USD831085S1 - Substrate processing unit - Google Patents

Substrate processing unit Download PDF

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Publication number
USD831085S1
USD831085S1 US29/606,718 US201729606718F USD831085S US D831085 S1 USD831085 S1 US D831085S1 US 201729606718 F US201729606718 F US 201729606718F US D831085 S USD831085 S US D831085S
Authority
US
United States
Prior art keywords
processing unit
substrate processing
view
elevational view
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/606,718
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English (en)
Inventor
Yusaku SAKKA
Hiromichi KAWASAKI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
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Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KAWASAKI, Hiromichi, SAKKA, YUSAKU
Application granted granted Critical
Publication of USD831085S1 publication Critical patent/USD831085S1/en
Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME AND ADDRESS Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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US29/606,718 2016-12-09 2017-06-07 Substrate processing unit Active USD831085S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-026821 2016-12-09
JPD2016-26821F JP1582103S (enrdf_load_stackoverflow) 2016-12-09 2016-12-09

Publications (1)

Publication Number Publication Date
USD831085S1 true USD831085S1 (en) 2018-10-16

Family

ID=59351791

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/606,718 Active USD831085S1 (en) 2016-12-09 2017-06-07 Substrate processing unit

Country Status (3)

Country Link
US (1) USD831085S1 (enrdf_load_stackoverflow)
JP (1) JP1582103S (enrdf_load_stackoverflow)
TW (1) TWD188261S (enrdf_load_stackoverflow)

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD556226S1 (en) * 2005-08-23 2007-11-27 Motoman, Inc. Robotic bartender and bar
USD581438S1 (en) * 2006-08-30 2008-11-25 Tie Tao Liu Hydraulic mechanism
USD623673S1 (en) * 2008-12-24 2010-09-14 Applied Materials, Inc. Large area substrate processor
USD675172S1 (en) * 2008-11-14 2013-01-29 Applied Materials, Inc. Substrate support
JP1456479S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
JP1456090S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD804556S1 (en) * 2015-06-16 2017-12-05 Hitachi Kokusai Electric Inc. Heat reflector for substrate processing apparatus
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD808350S1 (en) * 2017-03-06 2018-01-23 Topline Corporation Fixture for delivering interconnect members onto a substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200488076Y1 (ko) 2013-03-14 2018-12-12 어플라이드 머티어리얼스, 인코포레이티드 히터를 구비한 기판 지지 페디스털

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD556226S1 (en) * 2005-08-23 2007-11-27 Motoman, Inc. Robotic bartender and bar
USD581438S1 (en) * 2006-08-30 2008-11-25 Tie Tao Liu Hydraulic mechanism
USD675172S1 (en) * 2008-11-14 2013-01-29 Applied Materials, Inc. Substrate support
USD623673S1 (en) * 2008-12-24 2010-09-14 Applied Materials, Inc. Large area substrate processor
JP1456479S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
JP1456090S (enrdf_load_stackoverflow) 2012-01-13 2015-11-16
USD804556S1 (en) * 2015-06-16 2017-12-05 Hitachi Kokusai Electric Inc. Heat reflector for substrate processing apparatus
USD805044S1 (en) * 2015-10-30 2017-12-12 Hirata Corporation Adhesive sheet for substrate
USD811457S1 (en) * 2015-11-02 2018-02-27 Hirata Corporation Substrate conveyance arm
USD785578S1 (en) * 2016-03-22 2017-05-02 Asm Ip Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
USD808350S1 (en) * 2017-03-06 2018-01-23 Topline Corporation Fixture for delivering interconnect members onto a substrate

Also Published As

Publication number Publication date
JP1582103S (enrdf_load_stackoverflow) 2017-07-24
TWD188261S (zh) 2018-02-01

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