USD803075S1 - Thermometry tool for substrate processing apparatus - Google Patents

Thermometry tool for substrate processing apparatus Download PDF

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Publication number
USD803075S1
USD803075S1 US29/572,550 US201629572550F USD803075S US D803075 S1 USD803075 S1 US D803075S1 US 201629572550 F US201629572550 F US 201629572550F US D803075 S USD803075 S US D803075S
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United States
Prior art keywords
thermometry
tool
processing apparatus
substrate processing
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Active
Application number
US29/572,550
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English (en)
Inventor
Tokunobu Akao
Motoya TAKEWAKI
Akihiro Osaka
Masaaki Ueno
Tetsuya Kosugi
Masashi Sugishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
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Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OSAKA, AKIHIRO, AKAO, TOKUNOBU, KOSUGI, TETSUYA, SUGISHITA, MASASHI, TAKEWAKI, MOTOYA, UENO, MASAAKI
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Publication of USD803075S1 publication Critical patent/USD803075S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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US29/572,550 2016-02-10 2016-07-28 Thermometry tool for substrate processing apparatus Active USD803075S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2016-2841F JP1564809S (enExample) 2016-02-10 2016-02-10
JP2016/002841 2016-02-10

Publications (1)

Publication Number Publication Date
USD803075S1 true USD803075S1 (en) 2017-11-21

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US29/572,550 Active USD803075S1 (en) 2016-02-10 2016-07-28 Thermometry tool for substrate processing apparatus

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US (1) USD803075S1 (enExample)
JP (1) JP1564809S (enExample)
TW (1) TWD182149S (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD924701S1 (en) * 2019-03-04 2021-07-13 Kokusai Electric Corporation Temperature sensor
USD976129S1 (en) * 2020-09-15 2023-01-24 Kokusai Electric Corporation Temperature sensor
USD1140755S1 (en) * 2023-06-19 2026-08-11 Kokusai Electric Corporation Thermometer for semiconductor manufacturing apparatus
USD1140754S1 (en) * 2023-06-19 2026-08-11 Kokusai Electric Corporation Thermometer for semiconductor manufacturing apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1804873S (enExample) 2024-10-02 2025-07-31

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9488528B2 (en) * 2012-03-29 2016-11-08 Türk & Hillinger GmbH Immersion temperature sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9488528B2 (en) * 2012-03-29 2016-11-08 Türk & Hillinger GmbH Immersion temperature sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD924701S1 (en) * 2019-03-04 2021-07-13 Kokusai Electric Corporation Temperature sensor
USD976129S1 (en) * 2020-09-15 2023-01-24 Kokusai Electric Corporation Temperature sensor
USD1140755S1 (en) * 2023-06-19 2026-08-11 Kokusai Electric Corporation Thermometer for semiconductor manufacturing apparatus
USD1140754S1 (en) * 2023-06-19 2026-08-11 Kokusai Electric Corporation Thermometer for semiconductor manufacturing apparatus

Also Published As

Publication number Publication date
JP1564809S (enExample) 2016-12-05
TWD182149S (zh) 2017-04-01

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