USD668211S1 - Segmented electroplating anode and anode segment - Google Patents

Segmented electroplating anode and anode segment Download PDF

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Publication number
USD668211S1
USD668211S1 US29/369,658 US36965810F USD668211S US D668211 S1 USD668211 S1 US D668211S1 US 36965810 F US36965810 F US 36965810F US D668211 S USD668211 S US D668211S
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United States
Prior art keywords
anode
segmented
electroplating
segment
view
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US29/369,658
Inventor
Jingbin Feng
Marshall Stowell
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Novellus Systems Inc
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Novellus Systems Inc
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Priority to US29/369,658 priority Critical patent/USD668211S1/en
Assigned to NOVELLUS SYSTEMS, INC. reassignment NOVELLUS SYSTEMS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FENG, JINGBIN, STOWELL, MARSHALL
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FIG. 1 is a top perspective view of a segmented electroplating anode and anode segment showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a left side elevation view thereof;
FIG. 6 is a right side elevation view thereof;
FIG. 7 is a top perspective view shown in environmental use; and,
FIG. 8 is a bottom perspective view shown in environmental use.
The broken lines shown represent unclaimed subject matter and form no part of the claimed design.

Claims (1)

  1. We claim the ornamental design for a segmented electroplating anode and anode segment, as shown and described.
US29/369,658 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment Active USD668211S1 (en)

Priority Applications (1)

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US29/369,658 USD668211S1 (en) 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment

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US29/369,658 USD668211S1 (en) 2010-09-10 2010-09-10 Segmented electroplating anode and anode segment

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USD668211S1 true USD668211S1 (en) 2012-10-02

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD778247S1 (en) * 2015-04-16 2017-02-07 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
USD793972S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD881373S1 (en) * 2017-08-18 2020-04-14 Steven S. Wagner Exhaust fan screen

Citations (13)

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Publication number Priority date Publication date Assignee Title
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5671116A (en) * 1995-03-10 1997-09-23 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
US6004440A (en) * 1997-09-18 1999-12-21 Semitool, Inc. Cathode current control system for a wafer electroplating apparatus
US6721162B2 (en) * 1996-04-26 2004-04-13 Applied Materials Inc. Electrostatic chuck having composite dielectric layer and method of manufacture
USD489319S1 (en) * 2002-08-23 2004-05-04 Biosensor Applications Sweden Ab Piezoelectric sensor
USD546784S1 (en) * 2005-09-29 2007-07-17 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
USD570310S1 (en) * 2006-08-01 2008-06-03 Tokyo Electron Limited Attracting plate of an electrostatic chuck for semiconductor manufacturing
US20090211900A1 (en) 2008-02-22 2009-08-27 Novellus Systems, Inc. Convenient Replacement of Anode in Semiconductor Electroplating Apparatus
USD604693S1 (en) * 2008-02-18 2009-11-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion element
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD615488S1 (en) * 2008-12-31 2010-05-11 Neobulb Technologies, Inc. Photoelectric energy transducing apparatus
USD624890S1 (en) * 2008-08-18 2010-10-05 Schadeck Matthew A Anode and cathode assembly

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5078852A (en) * 1990-10-12 1992-01-07 Microelectronics And Computer Technology Corporation Plating rack
US5671116A (en) * 1995-03-10 1997-09-23 Lam Research Corporation Multilayered electrostatic chuck and method of manufacture thereof
US6721162B2 (en) * 1996-04-26 2004-04-13 Applied Materials Inc. Electrostatic chuck having composite dielectric layer and method of manufacture
US6004440A (en) * 1997-09-18 1999-12-21 Semitool, Inc. Cathode current control system for a wafer electroplating apparatus
USD489319S1 (en) * 2002-08-23 2004-05-04 Biosensor Applications Sweden Ab Piezoelectric sensor
USD546784S1 (en) * 2005-09-29 2007-07-17 Tokyo Electron Limited Attracting disc for an electrostatic chuck for semiconductor production
USD570310S1 (en) * 2006-08-01 2008-06-03 Tokyo Electron Limited Attracting plate of an electrostatic chuck for semiconductor manufacturing
USD604693S1 (en) * 2008-02-18 2009-11-24 Semiconductor Energy Laboratory Co., Ltd. Photoelectric conversion element
US20090211900A1 (en) 2008-02-22 2009-08-27 Novellus Systems, Inc. Convenient Replacement of Anode in Semiconductor Electroplating Apparatus
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD624890S1 (en) * 2008-08-18 2010-10-05 Schadeck Matthew A Anode and cathode assembly
USD615488S1 (en) * 2008-12-31 2010-05-11 Neobulb Technologies, Inc. Photoelectric energy transducing apparatus

Non-Patent Citations (10)

* Cited by examiner, † Cited by third party
Title
CN patent application No. 201130040306.7, Notification of Grant mailed Apr. 28, 2011.
EP patent application No. 001260111, Certificate of Registration issued Feb. 15, 2011.
JP patent application No. 2011-005362, Certificate of Design Registration No. 1437774 dated Mar. 9, 2012.
KR patent application No. 30-2011-0005223, Office Action mailed Apr. 20, 2012.
Novellus SABRE Extreme Manual, p. 396, Oct. 7, 2008.
Novellus SABRE xT Manual, p. 423, Mar. 16, 2007.
SG patent application No. D2011/261/I, Certificate of Registration dated Apr. 25, 2011.
TW patent application No. 100301070, Office Action mailed Sep. 23, 2011.
U.S. Appl. No. 12/879,484, "Front Referenced Anode", Feng et al., filed Sep. 10, 2010.
U.S. Appl. No. 29/420,177, "Segmented electroplating anode and anode segment," Mayer et al., filed May 4, 2012.

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD793972S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD852762S1 (en) 2015-03-27 2019-07-02 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD778247S1 (en) * 2015-04-16 2017-02-07 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
USD806046S1 (en) 2015-04-16 2017-12-26 Veeco Instruments Inc. Wafer carrier with a multi-pocket configuration
USD881373S1 (en) * 2017-08-18 2020-04-14 Steven S. Wagner Exhaust fan screen

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