USD1053157S1 - Heat reflector for semiconductor manufacturing equipment - Google Patents

Heat reflector for semiconductor manufacturing equipment Download PDF

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Publication number
USD1053157S1
USD1053157S1 US29/883,098 US202329883098F USD1053157S US D1053157 S1 USD1053157 S1 US D1053157S1 US 202329883098 F US202329883098 F US 202329883098F US D1053157 S USD1053157 S US D1053157S
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United States
Prior art keywords
semiconductor manufacturing
manufacturing equipment
heat reflector
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reflector
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US29/883,098
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English (en)
Inventor
Akihiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
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Kokusai Electric Corp
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Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SATO, AKIHIRO
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US29/883,098 2022-08-10 2023-01-24 Heat reflector for semiconductor manufacturing equipment Active USD1053157S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-017170D 2022-08-10
JP2022017170F JP1733769S (enrdf_load_stackoverflow) 2022-08-10 2022-08-10

Publications (1)

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USD1053157S1 true USD1053157S1 (en) 2024-12-03

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US29/883,098 Active USD1053157S1 (en) 2022-08-10 2023-01-24 Heat reflector for semiconductor manufacturing equipment

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US (1) USD1053157S1 (enrdf_load_stackoverflow)
JP (1) JP1733769S (enrdf_load_stackoverflow)
TW (1) TWD236269S (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1082730S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Cover base for susceptors

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5088006A (en) * 1991-04-25 1992-02-11 International Business Machines Corporation Liquid film interface cooling system for semiconductor wafer processing
US6035100A (en) * 1997-05-16 2000-03-07 Applied Materials, Inc. Reflector cover for a semiconductor processing chamber
US6108491A (en) * 1998-10-30 2000-08-22 Applied Materials, Inc. Dual surface reflector
US6815645B2 (en) * 2001-03-08 2004-11-09 Shin-Etsu Handotai Co., Ltd. Heat reflecting material and heating device using the material
US7772527B2 (en) * 2005-05-04 2010-08-10 Samsung Electronics Co., Ltd. Heat reflector and substrate processing apparatus comprising the same
USD654883S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD654884S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD804437S1 (en) * 2016-09-30 2017-12-05 Norton (Waterford) Limited Circuit board
USD818961S1 (en) * 2016-02-10 2018-05-29 Hitachi Kokusai Electric Inc. Insulation unit cover of semiconductor manufacturing apparatus
JP1624353S (enrdf_load_stackoverflow) 2018-07-19 2019-02-12
US10283637B2 (en) * 2016-07-18 2019-05-07 Taiwan Semiconductor Manufacturing Co, Ltd. Individually-tunable heat reflectors in an EPI-growth system
USD849422S1 (en) * 2014-12-17 2019-05-28 Ngk Insulators, Ltd. Composite substrate for acoustic wave device
US10453713B2 (en) * 2016-11-29 2019-10-22 Taiwan Semiconductor Manufacturing Co., Ltd. Method for controlling temperature of furnace in semiconductor fabrication process
USD981972S1 (en) * 2021-03-22 2023-03-28 Kokusai Electric Corporation Adiabatic plate for substrate processing appratus
USD1003834S1 (en) * 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5088006A (en) * 1991-04-25 1992-02-11 International Business Machines Corporation Liquid film interface cooling system for semiconductor wafer processing
US6035100A (en) * 1997-05-16 2000-03-07 Applied Materials, Inc. Reflector cover for a semiconductor processing chamber
US6108491A (en) * 1998-10-30 2000-08-22 Applied Materials, Inc. Dual surface reflector
US6815645B2 (en) * 2001-03-08 2004-11-09 Shin-Etsu Handotai Co., Ltd. Heat reflecting material and heating device using the material
US7772527B2 (en) * 2005-05-04 2010-08-10 Samsung Electronics Co., Ltd. Heat reflector and substrate processing apparatus comprising the same
USD654883S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD654884S1 (en) * 2010-10-21 2012-02-28 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
USD849422S1 (en) * 2014-12-17 2019-05-28 Ngk Insulators, Ltd. Composite substrate for acoustic wave device
USD818961S1 (en) * 2016-02-10 2018-05-29 Hitachi Kokusai Electric Inc. Insulation unit cover of semiconductor manufacturing apparatus
US10283637B2 (en) * 2016-07-18 2019-05-07 Taiwan Semiconductor Manufacturing Co, Ltd. Individually-tunable heat reflectors in an EPI-growth system
USD804437S1 (en) * 2016-09-30 2017-12-05 Norton (Waterford) Limited Circuit board
US10453713B2 (en) * 2016-11-29 2019-10-22 Taiwan Semiconductor Manufacturing Co., Ltd. Method for controlling temperature of furnace in semiconductor fabrication process
JP1624353S (enrdf_load_stackoverflow) 2018-07-19 2019-02-12
USD924823S1 (en) 2018-07-19 2021-07-13 Kokusai Electric Corporation Adiabatic plate for substrate processing apparatus
USD981972S1 (en) * 2021-03-22 2023-03-28 Kokusai Electric Corporation Adiabatic plate for substrate processing appratus
USD1003834S1 (en) * 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
113 Applied Materials Reflector Plate, Inject, 300MM Radiance Plus 0041-12156,https://www.ebay.com/itm/114949674079, 2024. (Year: 2024). *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1082730S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Cover base for susceptors

Also Published As

Publication number Publication date
JP1733769S (enrdf_load_stackoverflow) 2023-01-06
TWD236269S (zh) 2025-02-11

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