USD1020668S1 - Gas injector for substrate processing apparatus - Google Patents

Gas injector for substrate processing apparatus Download PDF

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Publication number
USD1020668S1
USD1020668S1 US29/819,526 US202129819526F USD1020668S US D1020668 S1 USD1020668 S1 US D1020668S1 US 202129819526 F US202129819526 F US 202129819526F US D1020668 S USD1020668 S US D1020668S
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US
United States
Prior art keywords
processing apparatus
substrate processing
gas injector
view
design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/819,526
Inventor
Toru Kagaya
Yoshimasa NAGATOMI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KAGAYA, TORU, NAGATOMI, Yoshimasa
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Description

FIG. 1 is a front, top and right side perspective view of a gas injector for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is an enlarged left side elevational view thereof;
FIG. 5 is an enlarged right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2 thereof;
FIG. 9 is an enlarged cross-sectional view taken from the area 9 in FIG. 8 ; and,
FIG. 10 is an enlarged partial view taken from the area 10 in FIG. 1 .
The dash-dash lines illustrate environmental structure and form no part of the claimed design.
The dash-dot lines illustrate the boundary of the claimed design and form no part of the claimed design.
The dash-dot-dot lines in FIGS. 1, 8, 9, and 10 show the boundary of the enlarged portion view and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a gas injector for substrate processing apparatus, as shown and described.
US29/819,526 2021-06-16 2021-12-15 Gas injector for substrate processing apparatus Active USD1020668S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021012874D 2021-06-16
JP2021012874F JP1706319S (en) 2021-06-16 2021-06-16

Publications (1)

Publication Number Publication Date
USD1020668S1 true USD1020668S1 (en) 2024-04-02

Family

ID=80218928

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/819,526 Active USD1020668S1 (en) 2021-06-16 2021-12-15 Gas injector for substrate processing apparatus

Country Status (3)

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US (1) USD1020668S1 (en)
JP (1) JP1706319S (en)
TW (1) TWD226182S (en)

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD404115S (en) * 1994-06-06 1999-01-12 David H Wills Jet nozzle
USD462740S1 (en) * 2001-10-31 2002-09-10 Nordson Corporation Inline angle spray nozzle
USD497407S1 (en) * 2003-09-15 2004-10-19 Nordson Corporation Spray nozzle
USD499463S1 (en) * 2003-09-15 2004-12-07 Nordson Corporation Spray nozzle
US20060258174A1 (en) * 2003-08-15 2006-11-16 Hitachi Kokusai Electric Inc. Substrate treatment apparatus and method of manufacturing semiconductor device
USD532864S1 (en) * 2005-05-27 2006-11-28 Nordson Corporation Nozzle
USD584919S1 (en) * 2006-12-19 2009-01-20 Horace Regnart Cooking pan cover
JP1547057S (en) 2015-05-28 2016-04-04
USD886948S1 (en) * 2019-03-17 2020-06-09 Runjian Mo Handheld shower
USD886947S1 (en) * 2019-03-17 2020-06-09 Runjian Mo Handheld shower
USD888196S1 (en) * 2018-07-05 2020-06-23 Kokusai Electric Corporation Gas nozzle for substrate processing apparatus
USD918388S1 (en) * 2018-06-15 2021-05-04 Wiesman Holdings, LLC Solution diffusing head
USD919083S1 (en) * 2018-11-16 2021-05-11 Niceday365 Co., Ltd. In-vivo drug delivery
USD940270S1 (en) * 2019-08-20 2022-01-04 Craig Hillinger Fire nozzle
US20230055506A1 (en) * 2021-08-20 2023-02-23 Kokusai Electric Corporation Substrate processing apparatus, method of manufacturing semiconductor device, method of processing substrate, and gas injector

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD404115S (en) * 1994-06-06 1999-01-12 David H Wills Jet nozzle
USD462740S1 (en) * 2001-10-31 2002-09-10 Nordson Corporation Inline angle spray nozzle
USD469847S1 (en) * 2001-10-31 2003-02-04 Nordson Corporation Inline angle spray nozzle
US20060258174A1 (en) * 2003-08-15 2006-11-16 Hitachi Kokusai Electric Inc. Substrate treatment apparatus and method of manufacturing semiconductor device
USD497407S1 (en) * 2003-09-15 2004-10-19 Nordson Corporation Spray nozzle
USD499463S1 (en) * 2003-09-15 2004-12-07 Nordson Corporation Spray nozzle
USD532864S1 (en) * 2005-05-27 2006-11-28 Nordson Corporation Nozzle
USD584919S1 (en) * 2006-12-19 2009-01-20 Horace Regnart Cooking pan cover
JP1547057S (en) 2015-05-28 2016-04-04
USD783351S1 (en) 2015-05-28 2017-04-11 Hitachi Kokusai Electric Inc. Gas nozzle substrate processing apparatus
USD918388S1 (en) * 2018-06-15 2021-05-04 Wiesman Holdings, LLC Solution diffusing head
USD888196S1 (en) * 2018-07-05 2020-06-23 Kokusai Electric Corporation Gas nozzle for substrate processing apparatus
USD919083S1 (en) * 2018-11-16 2021-05-11 Niceday365 Co., Ltd. In-vivo drug delivery
USD886948S1 (en) * 2019-03-17 2020-06-09 Runjian Mo Handheld shower
USD886947S1 (en) * 2019-03-17 2020-06-09 Runjian Mo Handheld shower
USD940270S1 (en) * 2019-08-20 2022-01-04 Craig Hillinger Fire nozzle
US20230055506A1 (en) * 2021-08-20 2023-02-23 Kokusai Electric Corporation Substrate processing apparatus, method of manufacturing semiconductor device, method of processing substrate, and gas injector

Also Published As

Publication number Publication date
TWD226182S (en) 2023-07-01
JP1706319S (en) 2022-01-31

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