USB389017I5 - - Google Patents
Info
- Publication number
- USB389017I5 USB389017I5 US389017DD USB389017I5 US B389017 I5 USB389017 I5 US B389017I5 US 389017D D US389017D D US 389017DD US B389017 I5 USB389017 I5 US B389017I5
- Authority
- US
- United States
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/051—Etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/054—Flat sheets-substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/115—Orientation
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Drying Of Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US389017A US3366520A (en) | 1964-08-12 | 1964-08-12 | Vapor polishing of a semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
USB389017I5 true USB389017I5 (fr) |
Family
ID=23536484
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US389017D Pending USB389017I5 (fr) | 1964-08-12 | ||
US389017A Expired - Lifetime US3366520A (en) | 1964-08-12 | 1964-08-12 | Vapor polishing of a semiconductor wafer |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US389017A Expired - Lifetime US3366520A (en) | 1964-08-12 | 1964-08-12 | Vapor polishing of a semiconductor wafer |
Country Status (5)
Country | Link |
---|---|
US (2) | US3366520A (fr) |
JP (1) | JPS4929790B1 (fr) |
DE (1) | DE1521795B2 (fr) |
GB (1) | GB1081888A (fr) |
NL (1) | NL6509555A (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3428500A (en) * | 1964-04-25 | 1969-02-18 | Fujitsu Ltd | Process of epitaxial deposition on one side of a substrate with simultaneous vapor etching of the opposite side |
US3522118A (en) * | 1965-08-17 | 1970-07-28 | Motorola Inc | Gas phase etching |
US3546036A (en) * | 1966-06-13 | 1970-12-08 | North American Rockwell | Process for etch-polishing sapphire and other oxides |
US3639186A (en) * | 1969-02-24 | 1972-02-01 | Ibm | Process for the production of finely etched patterns |
US4671847A (en) * | 1985-11-18 | 1987-06-09 | The United States Of America As Represented By The Secretary Of The Navy | Thermally-activated vapor etchant for InP |
US4708766A (en) * | 1986-11-07 | 1987-11-24 | Texas Instruments Incorporated | Hydrogen iodide etch of tin oxide |
DE60218541T2 (de) * | 2002-05-01 | 2007-11-22 | Danfoss A/S | Verfahren zur modifizierung einer metalloberfläche |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3030189A (en) * | 1958-05-19 | 1962-04-17 | Siemens Ag | Methods of producing substances of highest purity, particularly electric semiconductors |
US3218204A (en) * | 1962-07-13 | 1965-11-16 | Monsanto Co | Use of hydrogen halide as a carrier gas in forming ii-vi compound from a crude ii-vicompound |
-
0
- US US389017D patent/USB389017I5/en active Pending
-
1964
- 1964-08-12 US US389017A patent/US3366520A/en not_active Expired - Lifetime
-
1965
- 1965-06-08 JP JP40033643A patent/JPS4929790B1/ja active Pending
- 1965-07-23 NL NL6509555A patent/NL6509555A/xx unknown
- 1965-08-04 GB GB33290/65A patent/GB1081888A/en not_active Expired
- 1965-08-11 DE DE19651521795 patent/DE1521795B2/de active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1081888A (en) | 1967-09-06 |
JPS4929790B1 (fr) | 1974-08-07 |
DE1521795B2 (de) | 1972-01-27 |
NL6509555A (fr) | 1966-02-14 |
DE1521795A1 (de) | 1970-02-12 |
US3366520A (en) | 1968-01-30 |