US8070969B2 - Method of fabricating microelectromechanical systems devices - Google Patents
Method of fabricating microelectromechanical systems devices Download PDFInfo
- Publication number
- US8070969B2 US8070969B2 US12/268,966 US26896608A US8070969B2 US 8070969 B2 US8070969 B2 US 8070969B2 US 26896608 A US26896608 A US 26896608A US 8070969 B2 US8070969 B2 US 8070969B2
- Authority
- US
- United States
- Prior art keywords
- pct
- microelectromechanical systems
- silicon substrate
- layer
- adhesive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related, expires
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 239000010410 layer Substances 0.000 claims abstract description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- 239000010703 silicon Substances 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000012790 adhesive layer Substances 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00865—Multistep processes for the separation of wafers into individual elements
- B81C1/00873—Multistep processes for the separation of wafers into individual elements characterised by special arrangements of the devices, allowing an easier separation
Definitions
- This invention relates to the fabrication of devices incorporating microelectromechanical systems (MEMS). More particularly, the invention relates to a method of fabricating a MEMS device using at least one UV curable tape.
- MEMS device such a device shall be referred to below as a MEMS device and the part of the device comprising the microelectromechanical system shall be referred to as a MEMS layer.
- FIGS. 1 to 8 show various stages in a method of fabricating MEMS devices, in accordance with the invention.
- a layer 10 is provided to be applied to a first surface 12 of a silicon substrate or wafer 14 .
- the wafer 14 carries a surface macromachined MEMS layer 16 on the first surface 12 of the wafer 14 .
- the MEMS layer 16 comprises individual MEMS elements 18 .
- the layer 10 is a nozzle guard layer or wafer which is applied to the surface 12 of the silicon substrate 14 .
- Each individual MEMS element 18 is in the form of a nozzle assembly.
- Each nozzle assembly 18 comprises an ink ejection nozzle and its associated actuator. The actuator acts on the nozzle for effecting ink ejection, on demand.
- the purpose of the method of manufacture is to form individual MEMS chips 20 ( FIG. 8 ).
- the wafer 14 is turned over to expose a reverse side 22 as shown in FIG. 3 of the drawings.
- each part 24 comprises a plurality of MEMS elements 18 and a bond pad 28 .
- the layer 10 has a plurality of struts 30 which support a body 32 of the layer 10 in spaced relationship above the surface 12 of the wafer 14 such that the MEMS elements 18 and the bond pads 28 are protected by the body 32 .
- the struts 30 define chambers 34 and 36 . The chambers 34 overlie the bond pads 28 while the chambers 36 overlie the array of MEMS elements 18 of each part 24 .
- a holding means in the form of an adhesive tape 38 is bonded to the surface 22 of the layer 14 as illustrated in FIG. 5 of the drawings.
- the tape 38 is bonded to the layer 14 by means of a curable adhesive.
- the adhesive is curable in the sense that it loses its adhesive properties or “tackiness” when exposed to ultraviolet (UV) light.
- a handling means in the form of a glass, quartz, alumina or other transparent handle wafer 40 is secured to an opposite surface of the tape 38 .
- the wafer 40 , the tape 38 , the silicon wafer 14 and the nozzle guard layer 10 define a laminate 42 .
- the laminate 42 is then turned over, as shown in FIG. 7 of the drawings.
- Predetermined operations are carried out on the layer 10 . More particularly, passages 44 are etched through the layer 10 from an outer surface 46 towards the chambers 36 .
- individual nozzle guards 48 are formed by etching to remove material as shown at 50 in FIG. 7 of the drawings. The removal of this material exposes the bond pads 28 of each chip 20 . Upon completion of this operation, the individual chips 20 are formed.
- each chip 20 has a plurality of MEMS elements 18 in an array formed thereon.
- the laminate 42 is placed on an xy wafer stage (not shown) which is reciprocated, as illustrated by arrow 52 in FIG. 8 of the drawings.
- Each MEMS chip 20 when it is desired to remove it, is exposed to UV light as indicated by arrows 54 through a mask 56 . This cures the adhesive of the tape 40 locally in a region beneath one particular MEMS chip 20 at a time to enable that MEMS chip 20 to be removed from the tape 38 .
- the MEMS chip 20 is removed from the tape 38 by means of a transporting means including a vacuum pickup 58 .
- a method of fabrication which facilitates the performing of various operations to fabricate the individual MEMS chip 20 and which facilitates removal of the MEMS chips 20 for packaging.
- devices of the kind in question are measured in micron dimensions. Accordingly, the MEMS elements 18 on such devices are extremely fragile.
- the provision of the nozzle guard layer 10 and the use of the UV curable tape 38 facilitates that the MEMS elements 18 are not touched by solids or liquids after they are released by the release etch.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Dicing (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
-
- PCT/AU00/00518, PCT/AU00/00519, PCT/AU00/00520, PCT/AU00/00521, PCT/AU00/00522, PCT/AU00/00523, PCT/AU00/00524, PCT/AU00/00525, PCT/AU00/00526, PCT/AU00/00527, PCT/AU00/00528, PCT/AU00/00529, PCT/AU00/00530, PCT/AU00/00531, PCT/AU00/00532, PCT/AU00/00533, PCT/AU00/00534, PCT/AU00/00535, PCT/AU00/00536, PCT/AU00/00537, PCT/AU00/00538, PCT/AU00/00539, PCT/AU00/00540, PCT/AU00/00541, PCT/AU00/00542, PCT/AU00/00543, PCT/AU00/00544, PCT/AU00/00545, PCT/AU00/00547, PCT/AU00/00546, PCT/AU00/00554, PCT/AU00/00556, PCT/AU00/00557, PCT/AU00/00558, PCT/AU00/00559, PCT/AU00/00560, PCT/AU00/00561, PCT/AU00/00562, PCT/AU00/00563, PCT/AU00/00564, PCT/AU00/00565, PCT/AU00/00566, PCT/AU00/00567, PCT/AU00/00568, PCT/AU00/00569, PCT/AU00/00570, PCT/AU00/00571, PCT/AU00/00572, PCT/AU00/00573, PCT/AU00/00574, PCT/AU00/00575, PCT/AU00/00576, PCT/AU00/00577, PCT/AU00/00578, PCT/AU00/00579, PCT/AU00/00581, PCT/AU00/00580, PCT/AU00/00582, PCT/AU00/00587, PCT/AU00/00588, PCT/AU00/00589, PCT/AU00/00583, PCT/AU00/00593, PCT/AU00/00590, PCT/AU00/00591, PCT/AU00/00592, PCT/AU00/00584, PCT/AU00/00585, PCT/AU00/00586, PCT/AU00/00594, PCT/AU00/00595, PCT/AU00/00596, PCT/AU00/00597, PCT/AU00/00598, PCT/AU00/00516, PCT/AU00/00517, PCT/AU00/00511, PCT/AU00/00501, PCT/AU00/00502, PCT/AU00/00503, PCT/AU00/00504, PCT/AU00/00505, PCT/AU00/00506, PCT/AU00/00507, PCT/AU00/00508, PCT/AU00/00509, PCT/AU00/00510, PCT/AU00/00512, PCT/AU00/00513, PCT/AU00/00514, PCT/AU00/00515
Claims (7)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/268,966 US8070969B2 (en) | 2000-05-24 | 2008-11-11 | Method of fabricating microelectromechanical systems devices |
US13/301,598 US20120064647A1 (en) | 2000-05-24 | 2011-11-21 | Method of fabricating microelectromechanical systems devices |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/AU2000/000583 WO2001089987A1 (en) | 2000-05-23 | 2000-05-24 | Method of fabricating devices incorporating microelectromechanical systems using at least one uv curable tape |
US10/296,660 US7063993B1 (en) | 2000-05-24 | 2000-05-24 | Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
US11/450,431 US7465405B2 (en) | 2000-05-24 | 2006-06-12 | Method of fabricating printheads having multiple nozzle assemblies |
US12/268,966 US8070969B2 (en) | 2000-05-24 | 2008-11-11 | Method of fabricating microelectromechanical systems devices |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/450,431 Continuation US7465405B2 (en) | 2000-05-24 | 2006-06-12 | Method of fabricating printheads having multiple nozzle assemblies |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/301,598 Continuation US20120064647A1 (en) | 2000-05-24 | 2011-11-21 | Method of fabricating microelectromechanical systems devices |
Publications (2)
Publication Number | Publication Date |
---|---|
US20090061562A1 US20090061562A1 (en) | 2009-03-05 |
US8070969B2 true US8070969B2 (en) | 2011-12-06 |
Family
ID=3700808
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/296,660 Expired - Fee Related US7063993B1 (en) | 2000-05-24 | 2000-05-24 | Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
US11/450,431 Expired - Fee Related US7465405B2 (en) | 2000-05-24 | 2006-06-12 | Method of fabricating printheads having multiple nozzle assemblies |
US12/268,966 Expired - Fee Related US8070969B2 (en) | 2000-05-24 | 2008-11-11 | Method of fabricating microelectromechanical systems devices |
US13/301,598 Abandoned US20120064647A1 (en) | 2000-05-24 | 2011-11-21 | Method of fabricating microelectromechanical systems devices |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/296,660 Expired - Fee Related US7063993B1 (en) | 2000-05-24 | 2000-05-24 | Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
US11/450,431 Expired - Fee Related US7465405B2 (en) | 2000-05-24 | 2006-06-12 | Method of fabricating printheads having multiple nozzle assemblies |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/301,598 Abandoned US20120064647A1 (en) | 2000-05-24 | 2011-11-21 | Method of fabricating microelectromechanical systems devices |
Country Status (6)
Country | Link |
---|---|
US (4) | US7063993B1 (en) |
EP (1) | EP1294636B1 (en) |
AU (1) | AU2000247318B2 (en) |
DE (1) | DE60032521T2 (en) |
IL (2) | IL153026A0 (en) |
WO (1) | WO2001089987A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120064647A1 (en) * | 2000-05-24 | 2012-03-15 | Silverbrook Research Pty Ltd | Method of fabricating microelectromechanical systems devices |
US10607877B2 (en) | 2017-06-23 | 2020-03-31 | Samsung Electronics Co., Ltd. | Chip mounting apparatus and method using the same |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6982184B2 (en) * | 2001-05-02 | 2006-01-03 | Silverbrook Research Pty Ltd | Method of fabricating MEMS devices on a silicon wafer |
WO2003063219A1 (en) * | 2002-01-25 | 2003-07-31 | Matsushita Electric Industrial Co., Ltd. | Method for manufacturing electronic component |
US7268005B2 (en) * | 2002-10-30 | 2007-09-11 | Finisar Corporation | Apparatus and method for stacking laser bars for uniform facet coating |
TW200717519A (en) * | 2005-10-28 | 2007-05-01 | Univ Nat Chiao Tung | Asynchronous first-in-first-out cell |
Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0359373A2 (en) | 1988-07-21 | 1990-03-21 | LINTEC Corporation | Adhesive tape and use thereof |
US5000811A (en) * | 1989-11-22 | 1991-03-19 | Xerox Corporation | Precision buttable subunits via dicing |
US5273615A (en) | 1992-04-06 | 1993-12-28 | Motorola, Inc. | Apparatus and method for handling fragile semiconductor wafers |
DE4223215A1 (en) | 1992-07-15 | 1994-01-20 | Bosch Gmbh Robert | Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing |
CA2119505A1 (en) | 1993-03-29 | 1994-09-30 | Rafael Cesar Alfaro | Grid array masking tape process |
US5476566A (en) | 1992-09-02 | 1995-12-19 | Motorola, Inc. | Method for thinning a semiconductor wafer |
US5605489A (en) | 1993-06-24 | 1997-02-25 | Texas Instruments Incorporated | Method of protecting micromechanical devices during wafer separation |
US5882532A (en) | 1996-05-31 | 1999-03-16 | Hewlett-Packard Company | Fabrication of single-crystal silicon structures using sacrificial-layer wafer bonding |
US5900892A (en) * | 1997-03-05 | 1999-05-04 | Xerox Corporation | Nozzle plates for ink jet cartridges |
US5923995A (en) | 1997-04-18 | 1999-07-13 | National Semiconductor Corporation | Methods and apparatuses for singulation of microelectromechanical systems |
JPH11204551A (en) | 1998-01-19 | 1999-07-30 | Sony Corp | Manufacture of semiconductor device |
US6060336A (en) | 1998-12-11 | 2000-05-09 | C.F. Wan Incorporated | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
US6159385A (en) | 1998-05-08 | 2000-12-12 | Rockwell Technologies, Llc | Process for manufacture of micro electromechanical devices having high electrical isolation |
US6176966B1 (en) | 1997-06-12 | 2001-01-23 | Lintec Corporation | Method of die bonding electronic component and die bonding apparatus thereof |
US6290331B1 (en) * | 1999-09-09 | 2001-09-18 | Hewlett-Packard Company | High efficiency orifice plate structure and printhead using the same |
US20050262691A1 (en) * | 2004-05-24 | 2005-12-01 | Seiko Epson Corporation | Manufacturing method of liquid jet head |
US7465405B2 (en) * | 2000-05-24 | 2008-12-16 | Silverbrook Research Pty Ltd | Method of fabricating printheads having multiple nozzle assemblies |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5680702A (en) * | 1994-09-19 | 1997-10-28 | Fuji Xerox Co., Ltd. | Method for manufacturing ink jet heads |
JP2000223446A (en) * | 1998-11-27 | 2000-08-11 | Denso Corp | Semiconductor device and manufacture thereof |
JP3816253B2 (en) * | 1999-01-19 | 2006-08-30 | 富士通株式会社 | Manufacturing method of semiconductor device |
US6213587B1 (en) * | 1999-07-19 | 2001-04-10 | Lexmark International, Inc. | Ink jet printhead having improved reliability |
WO2002074686A2 (en) * | 2000-12-05 | 2002-09-26 | Analog Devices, Inc. | A method and device for protecting micro electromechanical systems structures during dicing of a wafer |
-
2000
- 2000-05-24 AU AU2000247318A patent/AU2000247318B2/en not_active Ceased
- 2000-05-24 WO PCT/AU2000/000583 patent/WO2001089987A1/en active IP Right Grant
- 2000-05-24 EP EP00929095A patent/EP1294636B1/en not_active Expired - Lifetime
- 2000-05-24 US US10/296,660 patent/US7063993B1/en not_active Expired - Fee Related
- 2000-05-24 IL IL15302600A patent/IL153026A0/en active IP Right Grant
- 2000-05-24 DE DE60032521T patent/DE60032521T2/en not_active Expired - Lifetime
-
2002
- 2002-11-22 IL IL153026A patent/IL153026A/en not_active IP Right Cessation
-
2006
- 2006-06-12 US US11/450,431 patent/US7465405B2/en not_active Expired - Fee Related
-
2008
- 2008-11-11 US US12/268,966 patent/US8070969B2/en not_active Expired - Fee Related
-
2011
- 2011-11-21 US US13/301,598 patent/US20120064647A1/en not_active Abandoned
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0359373A2 (en) | 1988-07-21 | 1990-03-21 | LINTEC Corporation | Adhesive tape and use thereof |
US5000811A (en) * | 1989-11-22 | 1991-03-19 | Xerox Corporation | Precision buttable subunits via dicing |
US5273615A (en) | 1992-04-06 | 1993-12-28 | Motorola, Inc. | Apparatus and method for handling fragile semiconductor wafers |
DE4223215A1 (en) | 1992-07-15 | 1994-01-20 | Bosch Gmbh Robert | Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing |
US5476566A (en) | 1992-09-02 | 1995-12-19 | Motorola, Inc. | Method for thinning a semiconductor wafer |
CA2119505A1 (en) | 1993-03-29 | 1994-09-30 | Rafael Cesar Alfaro | Grid array masking tape process |
US5605489A (en) | 1993-06-24 | 1997-02-25 | Texas Instruments Incorporated | Method of protecting micromechanical devices during wafer separation |
US5882532A (en) | 1996-05-31 | 1999-03-16 | Hewlett-Packard Company | Fabrication of single-crystal silicon structures using sacrificial-layer wafer bonding |
US5900892A (en) * | 1997-03-05 | 1999-05-04 | Xerox Corporation | Nozzle plates for ink jet cartridges |
US5923995A (en) | 1997-04-18 | 1999-07-13 | National Semiconductor Corporation | Methods and apparatuses for singulation of microelectromechanical systems |
US6176966B1 (en) | 1997-06-12 | 2001-01-23 | Lintec Corporation | Method of die bonding electronic component and die bonding apparatus thereof |
JPH11204551A (en) | 1998-01-19 | 1999-07-30 | Sony Corp | Manufacture of semiconductor device |
US6159385A (en) | 1998-05-08 | 2000-12-12 | Rockwell Technologies, Llc | Process for manufacture of micro electromechanical devices having high electrical isolation |
US6060336A (en) | 1998-12-11 | 2000-05-09 | C.F. Wan Incorporated | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
US6290331B1 (en) * | 1999-09-09 | 2001-09-18 | Hewlett-Packard Company | High efficiency orifice plate structure and printhead using the same |
US7465405B2 (en) * | 2000-05-24 | 2008-12-16 | Silverbrook Research Pty Ltd | Method of fabricating printheads having multiple nozzle assemblies |
US20050262691A1 (en) * | 2004-05-24 | 2005-12-01 | Seiko Epson Corporation | Manufacturing method of liquid jet head |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120064647A1 (en) * | 2000-05-24 | 2012-03-15 | Silverbrook Research Pty Ltd | Method of fabricating microelectromechanical systems devices |
US10607877B2 (en) | 2017-06-23 | 2020-03-31 | Samsung Electronics Co., Ltd. | Chip mounting apparatus and method using the same |
Also Published As
Publication number | Publication date |
---|---|
AU2000247318B2 (en) | 2005-05-05 |
IL153026A (en) | 2006-10-31 |
DE60032521T2 (en) | 2007-11-22 |
WO2001089987A1 (en) | 2001-11-29 |
EP1294636B1 (en) | 2006-12-20 |
DE60032521D1 (en) | 2007-02-01 |
US20120064647A1 (en) | 2012-03-15 |
US7465405B2 (en) | 2008-12-16 |
EP1294636A4 (en) | 2004-11-10 |
US7063993B1 (en) | 2006-06-20 |
US20060261423A1 (en) | 2006-11-23 |
EP1294636A1 (en) | 2003-03-26 |
IL153026A0 (en) | 2003-06-24 |
US20090061562A1 (en) | 2009-03-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: SILVERBROOK RESEARCH PTY LTD, AUSTRALIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SILVERBROOK, KIA;REEL/FRAME:021818/0944 Effective date: 20081030 |
|
AS | Assignment |
Owner name: ZAMTEC LIMITED, IRELAND Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SILVERBROOK RESEARCH PTY. LIMITED;REEL/FRAME:031517/0134 Effective date: 20120503 |
|
AS | Assignment |
Owner name: MEMJET TECHNOLOGY LIMITED, IRELAND Free format text: CHANGE OF NAME;ASSIGNOR:ZAMTEC LIMITED;REEL/FRAME:033244/0276 Effective date: 20140609 |
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