US8059236B2

US8059236B2 - Method for producing reflective layers in LCD display

Info

Publication number: US8059236B2
Application number: US11/707,577
Authority: US
Inventors: Hsiang-Lin Lin; Chun-Chieh Tsao
Original assignee: AU Optronics Corp
Current assignee: Optronic Sciences LLC
Priority date: 2007-02-15
Filing date: 2007-02-15
Publication date: 2011-11-15
Also published as: CN101131539A; JP2008197631A; US20110292327A1; TW200834719A; TWI353021B; US8488086B2; JP4958760B2; CN101131539B; US20080199638A1

Abstract

A method for producing a light reflecting structure in a transflective or reflective liquid crystal display uses one or two masks for masking a photoresist layer in a back-side exposing process. The pattern on the masks is designed to produce rod-like structures or crevices and holes on exposed and developed photoresist layer. After the exposed photoresist is developed, a heat treatment process or a UV curing process is used to soften the photoresist layer so that the reshaped surface is more or less contiguous but uneven. A reflective coating is then deposited on the uneven surface. One or more intermediate layers can be made between the masks, between the lower mask and the substrate, and between the upper masks and the photoresist layers. The masks and the intermediate layers can be made in conjunction with the fabrication of the liquid crystal display panel.

Description

FIELD OF THE INVENTION

The present invention relates generally to a liquid crystal display panel and, more particularly, to a reflective or transflective liquid crystal display panel.

BACKGROUND OF THE INVENTION

Due to the characteristics of thin profile and low power consumption, liquid crystal displays (LCDS) are widely used in electronic products, such as portable personal computers, digital cameras, projectors, and the like. Generally, LCD panels are classified into transmissive, reflective, and transflective types. A transmissive LCD panel uses a back-light module as its light source. A reflective LCD panel uses ambient light as its light source. A transflective LCD panel makes use of both the back-light source and ambient light.

As known in the art, a color LCD panel 1 has a two-dimensional array of pixels 10, as shown in FIG. 1. Each of the pixels comprises a plurality of sub-pixels, usually in three primary colors of red (R), green (G) and blue (B). These RGB color components can be achieved by using respective color filters. FIG. 2 illustrates a plan view of the pixel structure in a conventional transflective liquid crystal panel, and FIG. 3 is a cross sectional view of the pixel structure. As shown in FIG. 2, a pixel can be divided into three

sub-pixels

12R, 12G and 12B and each sub-pixel can be divided into a transmission area (TA) and a reflection area (RA). In the transmission area as shown in FIG. 3 a, light from a back-light source enters the pixel area through a lower substrate 30, and goes through a liquid crystal layer, a color filter R and the upper substrate 20. In the reflection area, light encountering the reflection area goes through an upper substrate 20, the color filter R and the liquid crystal layer before it is reflected by a reflective layer 52. Alternatively, part of the reflection area is covered by a non-color filter (NCF), as shown in FIG. 3 b.

As known in the art, there are many more layers in each pixel for controlling the optical behavior of the liquid crystal layer. These layers may include a device layer 50 and one or two electrode layers. The device layer is typically disposed on the lower substrate and comprises

gate lines

31, 32, data lines 21-24 (FIG. 2), transistors, and passivation layers (not shown).

It is advantageous and desirable to provide a method for making the reflective layer in a transflective or reflective liquid crystal display panel.

SUMMARY OF THE INVENTION

The present invention provides a method for producing a light reflecting structure for use in the pixels of a transflective or reflective liquid crystal display. One or two masks are disposed on a substrate for producing an uneven surface pattern in a photoresist layer disposed on the mask when the photoresist layer is exposed by a light beam through the mask and developed. The exposed and developed photoresist layer is softened in a heat treatment process or a UV curing process to produce a reshaped surface. A reflective coating is disposed on the reshaped surface. In particular, when two masks are used for partially blocking the light beam in the exposure process, both masks have light-blocking areas and non-blocking areas. These areas are arranged such that the combined non-blocking areas are smaller than the non-blocking areas in either one of the masks. The masks are designed such that at least part of the uneven surface comprises rod-like bumps. These bumps are partially joined when the photoresist layer is softened in the reshaping process. The masks can also be designed such that at least part of the uneven surface comprises crevices or holes. These crevices or holes are partially filled when the photoresist layer is softened in the reshaping process. The light reflecting structure may have one or more intermediate layers disposed between the masks, between the photoresist layer and the upper mask, and between the substrate and the lower mask.

Thus, the first aspect of the present invention is a method for producing a light reflective structure on a substrate in a liquid crystal display panel. The method comprises the steps of:

providing a mask on the substrate, the mask having light-blocking areas and non-light blocking areas;

disposing a photoresist layer on the mask;

exposing the photoresist layer through the mask for providing an exposed photoresist layer having exposed layer areas;

developing the exposed photoresist layer for producing an uneven surface;

reshaping the uneven surface for producing a reshaped surface; and

disposing a light reflective coating on the reshaped surface, wherein the reshaping step can be a heating process or a UV curing process for softening the photoresist layer.

Advantageously, the method further comprises the step of disposing one or more intermediate layers between the substrate and the mask, and/or disposing one or more intermediate layers between the photoresist layer and the mask.

Advantageously, the method also comprises the step of providing a further mask between the intermediate layers and the photoresist layer, wherein the further mask has light-blocking areas at least partially different from the light-blocking areas in the mask so as to reduce the exposed layer areas.

Advantageously, the method further comprises the step of disposing one or more different intermediate layers between the photoresist layer and the further mask.

The second aspect of the present invention is a light reflecting structure in a pixel in a liquid crystal display having a substrate. The light reflecting structure comprises:

a first mask disposed on the substrate, the first mask having light-blocking areas and non-light blocking areas;

one or more intermediate layers disposed on the first mask;

a second mask disposed on the intermediate layers, wherein the second mask has further light blocking areas and further non-light blocking areas;

a photoresist layer disposed on the second mask; wherein the further light-blocking areas are at least partially different from the light blocking areas and the further non-light blocking areas are partially overlapped with the non-light blocking areas so as to allow a light beam to expose at least part of the photoresist layer through the first and second masks in an exposing process; and

a reflective coating disposed on the photoresist layer.

Advantageous, the masks and the intermediate layers are some of the layers for producing the gate lines, the common electrodes and the transistors in the liquid crystal display. For example, each of the first and second masks is made of a metal layer, one or more of the intermediate layers comprises a dielectric layer, an amorphous silicon layer or a passivation layer.

The third aspect of the present invention is a liquid crystal display panel comprising two substrates and a liquid crystal layer between the substrates to form a plurality of pixels, wherein at least some pixels comprise the light reflecting structure as described above. The liquid crystal display panel can be a reflective LCD panel or a transflective LCD panel.

The present invention will become apparent upon reading the description taken in conjunction with FIGS. 4 a to 13.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic representation showing a typical LCD display.

FIG. 2 is a plane view showing the pixel structure of a conventional transflective color LCD display.

FIG. 3 a is a cross sectional view showing the reflection and transmission of light beams in the pixel as shown in FIG. 2.

FIG. 3 b is a cross sectional view showing the reflection and transmission of light beams in another prior art transflective display.

FIGS. 4 a to 4 c illustrate the general method of producing a reflective layer, according to the present invention.

FIGS. 5 a to 5 g illustrate the steps in making the reflective layer on a substrate, according to one embodiment of the present invention.

FIGS. 6 a to 6 g illustrate the steps in making the reflective layer on a substrate, according to another embodiment of the present invention.

FIGS. 7 a to 7 g illustrate the steps in making the reflective layer on a substrate, according to a different embodiment of the present invention.

FIGS. 8 a and 8 b illustrate the result of using two masks in producing the reflective layer.

FIGS. 9 a to 9 c show an example of dual masks for making the reflective layer.

FIGS. 10 a to 10 c show another example of dual masks for making the reflective layer.

FIG. 11 a to 11 c show yet another example of dual masks for making the reflective layer.

FIG. 12 illustrates an example of using the various layers in a typical LCD panel for producing the basis of the reflective layer, according to the present invention.

FIG. 13 shows a reflective coating deposited for producing the reflective layer, according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

It is generally preferred that the reflective layer in the reflection area in a transflective or reflective liquid crystal display (LCD) panel has an uneven surface such as the reflective layer 52 shown in FIGS. 3 a and 3 b. The present invention provides a method in making such a reflective layer. As shown in FIG. 4 a, the reflective layer is formed from a plurality of discrete bumps, or rod-like objects 60. The rod-like objects are partially softened in a re-flow process so that they join with each other to become a single layer 70 having a wavy surface as shown in FIG. 4 b. The surface is then coated with a reflective material to form a reflective layer 62, as shown in FIG. 4 c. In order to form the single layer 70, the rod-like objects 60 must behave like a viscid fluid during the re-flow process and become solidified after the process. Furthermore, the rod-like objects should be simple to make. According to the present invention, the rod-like objects 60 are made of a photoresist material which can be softened in a heat treatment process or a UV curing process. After the single layer 70 has been formed, a layer of metal such as Al or Ag is coated to form the reflective layer 62.

In one embodiment of the present invention, the rod-like objects 60 are fabricated in a number of photolithography and etching processes (PEPs) on a substantially transparent substrate. As shown in FIG. 5 a, a mask 90 is produced on a substrate 100. The mask 90 has opaque areas 91 to partially block a light beam 100 in a backside exposure process (FIG. 5 d). In an optional step, one or more intermediate layers 80 are disposed on top of the mask 90, as shown in FIG. 5 b. A layer of photoresist 82, such as a positive-type photoresist material, is provided on top of the optional layers 80, as shown in FIG. 5 c. A backside exposure procedure using a light beam 110 is carried out as shown in FIG. 5 d. As part of the light beam is allowed to transmit through the intermediate layers 80 and the non-blocking areas on the mask 90, it interacts with part of the photoresist layer. After the partially exposed photoresist layer is developed, the exposed part is removed and the remaining photoresist layer has a plurality of discrete bumps or rod-like objects 60, as shown in FIG. 5 e. The rod-like objects are softened so that they join each other to form a single layer 70, as shown in FIG. 5 f. Depending on the photoresist material, the rod-like objects 60 can be softened in a heat treatment process or a UV curing process, for example. The surface of the single layer 70 is then coated with a reflective layer 62, as shown in FIG. 5 g.

FIGS. 6 a to 6 g show another embodiment of the present invention in which the order of disposing the mask 90 and the intermediate layers 80 is reversed. As shown in FIG. 6 a, one or more intermediate layers 80 are disposed on a substrate 100. A mask 90 is disposed on top of the intermediate layers 80. The mask 90 has opaque areas 91 to partially block a light beam 100 in a backside exposure process (FIG. 6 d). A layer of photoresist 82, such as a positive-type photoresist material, is provided on top of the optional layers 80, as shown in FIG. 6 c. A backside exposure using a light beam 110 is carried out as shown in FIG. 6 d. As part of the light beam is allowed to transmit through the intermediate layers 80 and the non-blocking areas on the mask 90, it interacts with part of the photoresist layer. After the partially exposed photoresist layer is developed, the exposed part is removed and the remaining photoresist layer has a plurality of discrete bumps or rod-like objects 60, as shown in FIG. 6 e. The rod-like objects are softened so that they join each other to form a single layer 70, as shown in FIG. 6 f. Depending on the photoresist material, the rod-like objects 60 can be softened in a heat treatment process or a UV curing process, for example. The surface of the single layer 70 is then coated with a reflective layer 62, as shown in FIG. 6 g.

In a different embodiment, two masks are used in the photoresist exposure process as shown in FIGS. 7 a to 7 g. As shown in FIG. 7 a, a mask 92 is produced on a substrate 100. The mask 92 has opaque areas 93 to partially block a light beam 100 in a backside exposure process (FIG. 7 d). In an optional step, one or more intermediate layers 80 are disposed on top of the mask 92, as shown in FIG. 7 b 1. In an additional step, a second mask 96 is disposed on top of the optional intermediate layers 80, as shown in FIG. 7 b 2. The mask 96 also has opaque areas 97 to partially block the light beam 110. A layer of photoresist 82, such as a positive-type photoresist material, is provided on top of the second mask, as shown in FIG. 7 c. The opaque areas 97 areas and the opaque areas 93 have some non-overlapping sections, but they still have non-blocking areas to allow part of the light beam 110 to reach the photoresist layer. A backside exposure using a light beam 110 is carried out as shown in FIG. 7 d. As part of the light beam is allowed to transmit through both the

masks

92 and 96, it interacts with part of the photoresist layer. After the partially exposed photoresist layer is developed, the exposed part is removed and the remaining photoresist layer has a plurality of discrete bumps or rod-like objects 60, as shown in FIG. 7 e. The rod-like objects are softened so that they join each other to form a single layer 70, as shown in FIG. 7 f. Depending on the photoresist material, the rod-like objects 60 can be softened in a heat treatment process or a UV curing process, for example. The surface of the single layer 70 is then coated with a reflective layer 62, as shown in FIG. 7 g.

As mentioned above, the opaque areas 97 areas on the mask 92 and the opaque areas 93 on the mask 92 have some non-overlapping sections, but they still have non-blocking areas to allow part of the backside exposure light beam to transmit through the masks. As shown in FIG. 8 a, the mask 92 has opaque or light-blocking areas 93 and non-blocking areas 94. Likewise, the mask 96 has opaque or light-blocking areas 97 and non-blocking areas 98. The

masks

92 and 96 are designed and arranged such that the non-blocking areas 94 and the non-blocking areas 96 have overlapping areas so as to allow part of the light beam 110 to transmit through the masks. As such, the

masks

92 and 96, together, act like a composite mask 190 having non-blocking areas 194. The non-blocking areas 194 are smaller than either the non-blocking areas 94 or the non-blocking areas 98.

FIGS. 9 a to 9 c show an example of using two shifted mask patterns to produce a composite mask having reduced non-blocking areas. As shown in FIGS. 9 a and 9 b, the

masks

92 and 96 are similar except that the non-blocking areas are slightly shifted from one mask to another. When the

masks

92 and 96 are used together for partially blocking the back-side exposure light beam, the resulting non-blocking areas 194 are reduced, as shown in the composite mask 190 in FIG. 9 c.

FIGS. 10 a to 10 c show another example of using two masks to reduce the non-blocking areas. As shown in FIGS. 10 a and 10 b, the mask 92 and the mask 96 have different mask patterns. When the mask 92 and mask 96 are used together for partially blocking the backside exposure light beam, the blocking areas 97 on the mask 96 overlap with the non-blocking areas 94 on the mask 92. As such, the resulting non-blocking areas 194′ are reduced, as shown in the composite mask 190′ in FIG. 10 c.

FIGS. 11 a to 11 c show yet another example of using two masks to make the basis of the reflective layer. As shown in FIG. 11 a and FIG. 11 b, the masks 92 and the mask 96 are similar except that the light-blocking

patterns

93 and 97 are slightly shifted from one mask to another. When the

masks

92 and 96 are used together for partially blocking the back-side exposure light beam, the resulting non-blocking areas 194″ are reduced to crevices and holes, as shown in the composite mask 190″ in FIG. 11 c.

In the fabrication of an LCD panel, many of the layers on the rear substrate can serve as the

masks

90, 92, 96 and the intermediate layers 80 for making the reflective layer, according to the present invention. FIG. 12 shows an example of using the generally available layers disposed on the substrate 100 as the masks and the intermediate layers in a transflective LCD panel. As shown in FIG. 12, the metal layer for producing the gate line 102, reflective pattern 202 and common electrode (not shown) can also be used to provide the mask 92 of FIG. 7. The dielectric layer 104, the amorphous silicon (a-Si)

layer

106, 206 and the doped amorphous silicon (N+ a-Si)

layer

108, 208 can also be used to provide the intermediate layers 80. The source-

drain metal layer

110, 112, 210 can be also used to provide the mask 96. As shown in FIG. 12, an indium Tin oxide (ITO) layer 114 and a passivation layer 116 made of silicon oxide or silicon nitride may also present in the various layers disposed on the rear substrate 100. Because these layers are substantially transparent, they do not significantly affect the partial exposure of the photoresist layer to the backside exposure light beam. Thus, after the photoresist layer is exposed through the

metal layer

102, 110, 112, 202, 210 and developed, the remaining

photoresist layer

118, 218 has a number of discrete portions, substantially aligned to the

underlying metal layer

102, 110, 112, 202, 210. After being softened and reshaped by a heat treating process or a UV process, the width of the remaining

photoresist portions

118 a, 218 b would increase. In the process of making a transflective type liquid crystal panel (see FIGS. 3 a and 3 b), the reshaped

photoresist layer

118 a, 218 b can be used as a mask for etching away part of the passivation layer 116 to leave the remaining

passivation portions

116 a, 216 b in order to expose part of the ITO layer in transmission area 300. FIG. 13 shows a reflective coating, such as Al and Ag, deposited and patterned on the reshaped

photoresist

118 a, 218 b to form a reflective layer 120 in the reflection area (including a portion of the reflective layer 220 b in the bump reflection area) of a transflective LCD panel. The exposed ITO area can be used as part of the transmission area 300 in a transflective LCD panel.

It should be noted that the present invention has been disclosed as using one or two masks for masking the photoresist layer in the back-side exposure process. Additional masks can also be used. Furthermore, the exposed and developed photoresist layer is softened by a heat treating process or a UV curing process for reshaping the surface. A different process may also be used to reshape the surface.

Thus, although the present invention has been described with respect to one or more embodiments thereof, it will be understood by those skilled in the art that the foregoing and various other changes, omissions and deviations in the form and detail thereof may be made without departing from the scope of this invention.

Claims

1. A method for producing a light reflective structure on a substrate in a liquid crystal display panel, comprising:

forming a first mask on the substrate, the first mask having first light-blocking areas and first non-light blocking areas;

disposing one or more intermediate layers over the first mask, wherein the intermediate layers are made of one or more materials different from the first mask;

forming a second mask over the intermediate layers, wherein the second mask has second light-blocking areas at least partially different from the first light-blocking areas;

disposing a photoresist layer on the second mask;

exposing the photoresist layer through the first mask and the second mask for providing an exposed photoresist layer having exposed layer areas;

developing the exposed photoresist layer for producing an uneven surface;

reshaping the uneven surface for producing a reshaped surface; and

disposing a light reflective coating on the reshaped surface.

2. The method of claim 1, further comprising:

disposing one or more intermediate layers between the substrate and the first mask, wherein the intermediate layers are made of one or more materials different from the first mask.

3. The method of claim 1, wherein said reshaping comprises a heating process for softening the photoresist layer.

4. The method of claim 1, wherein said reshaping comprises a UV curing process for softening the photoresist layer.

5. The method of claim 1, wherein the first mask is made of a metal coating.

6. The method of claim 1, wherein the intermediate layers comprises a dielectric layer.

7. The method of claim 1, wherein the intermediate layers comprises an amorphous silicon layer.

8. The method of claim 1, wherein the second mask is made of a metal coating.

9. The method of claim 1, further comprising:

disposing one or more different intermediate layers between the photoresist layer and the second mask.

10. The method of claim 9, wherein the one or more different intermediate layers comprises an electrically conductive layer.

11. The method of claim 9, wherein the one or more different intermediate layers comprises a passivation layer.

12. The method of claim 1, wherein the first non-light blocking areas and the second non-light blocking areas are arranged such that at least part of the uneven surface comprises a plurality of discrete pieces of photoresist material.

13. The method of claim 1, wherein the first non-light blocking areas and the second non-light blocking areas are arranged such that at least part of the uneven surface comprises a plurality of holes.