US7920412B2 - Magnetic random access memory and method of manufacturing the same - Google Patents
Magnetic random access memory and method of manufacturing the same Download PDFInfo
- Publication number
- US7920412B2 US7920412B2 US12/605,072 US60507209A US7920412B2 US 7920412 B2 US7920412 B2 US 7920412B2 US 60507209 A US60507209 A US 60507209A US 7920412 B2 US7920412 B2 US 7920412B2
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- 238000000034 method Methods 0.000 claims description 13
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O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 229910052814 silicon oxide Inorganic materials 0.000 description 17
- 238000005530 etching Methods 0.000 description 15
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- 238000005755 formation reaction Methods 0.000 description 10
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- 238000009792 diffusion process Methods 0.000 description 7
- 230000005294 ferromagnetic Effects 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials 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[Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 6
- 229910016909 AlxOy Inorganic materials 0.000 description 5
- 230000015654 memory Effects 0.000 description 5
- 229910016570 AlCu Inorganic materials 0.000 description 4
- 210000003229 CMP Anatomy 0.000 description 4
- 229910000529 magnetic ferrite Inorganic materials 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials 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[O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- AYTAKQFHWFYBMA-UHFFFAOYSA-N Chromium(IV) oxide Chemical compound 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O=[Cr]=O AYTAKQFHWFYBMA-UHFFFAOYSA-N 0.000 description 2
- 229910004166 TaN Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000005290 antiferromagnetic Effects 0.000 description 2
- 235000020127 ayran Nutrition 0.000 description 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(III) oxide Inorganic materials 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O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052803 cobalt Inorganic materials 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 230000001808 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000002349 favourable Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000009813 interlayer exchange coupling reaction Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Chemical compound 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[Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials 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[Al]=O AIRCTMFFNKZQPN-UHFFFAOYSA-N 0.000 description 1
- 229940091292 Alo Drugs 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L Calcium fluoride Chemical compound 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[F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
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- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
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- PIGFYZPCRLYGLF-UHFFFAOYSA-N aluminum nitride Chemical compound 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[Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000000875 corresponding Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
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- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound 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[W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/22—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including components using galvano-magnetic effects, e.g. Hall effects; using similar magnetic field effects
- H01L27/222—Magnetic non-volatile memory structures, e.g. MRAM
- H01L27/226—Magnetic non-volatile memory structures, e.g. MRAM comprising multi-terminal components, e.g. transistors
- H01L27/228—Magnetic non-volatile memory structures, e.g. MRAM comprising multi-terminal components, e.g. transistors of the field-effect transistor type
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1653—Address circuits or decoders
- G11C11/1657—Word-line or row circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1659—Cell access
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1673—Reading or sensing circuits or methods
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
Abstract
Description
Claims (5)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006-269334 | 2006-09-29 | ||
JP2006269334A JP4560025B2 (en) | 2006-09-29 | 2006-09-29 | Magnetic random access memory and manufacturing method thereof |
US11/839,265 US7706175B2 (en) | 2006-09-29 | 2007-08-15 | Magnetic random access memory and method of manufacturing the same |
US12/605,072 US7920412B2 (en) | 2006-09-29 | 2009-10-23 | Magnetic random access memory and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/605,072 US7920412B2 (en) | 2006-09-29 | 2009-10-23 | Magnetic random access memory and method of manufacturing the same |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date | |
---|---|---|---|---|
US11/839,265 Continuation US7706175B2 (en) | 2006-09-29 | 2007-08-15 | Magnetic random access memory and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
US20100047930A1 US20100047930A1 (en) | 2010-02-25 |
US7920412B2 true US7920412B2 (en) | 2011-04-05 |
Family
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US20100047930A1 (en) | 2010-02-25 |
JP2008091537A (en) | 2008-04-17 |
US7706175B2 (en) | 2010-04-27 |
US20080080233A1 (en) | 2008-04-03 |
JP4560025B2 (en) | 2010-10-13 |
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