US7602175B2 - Non-contacting position measuring system - Google Patents

Non-contacting position measuring system Download PDF

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Publication number
US7602175B2
US7602175B2 US11/436,434 US43643406A US7602175B2 US 7602175 B2 US7602175 B2 US 7602175B2 US 43643406 A US43643406 A US 43643406A US 7602175 B2 US7602175 B2 US 7602175B2
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United States
Prior art keywords
measuring system
contacting position
tube
position measuring
coil
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US11/436,434
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English (en)
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US20060202682A1 (en
Inventor
Felix Mednikov
Martin Sellen
Eduard Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
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Micro Epsilon Messtechnik GmbH and Co KG
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Assigned to MICRO-EPSILON MESSTECHNIK GMBH & CO. KG reassignment MICRO-EPSILON MESSTECHNIK GMBH & CO. KG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HUBER, EDUARD, MEDNIKOV, FELIX, SELLEN, MARTIN
Publication of US20060202682A1 publication Critical patent/US20060202682A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/70—Position sensors comprising a moving target with particular shapes, e.g. of soft magnetic targets
    • G01D2205/77—Specific profiles
    • G01D2205/774—Profiles with a discontinuity, e.g. edge or stepped profile

Definitions

  • the invention relates to a non-contacting position measuring system having a sensor comprising a measuring coil which can be energized with alternating current, where the measuring coil comprises at least two voltage taps, with an electrically and/or magnetically conductive object to be measured which is assigned to the sensor, and with an evaluation circuit, where the sensor and the object to be measured can be displaced relative to one another in the longitudinal direction of the measuring coil.
  • Non-contacting position-measuring systems have been known in practice for years in the most varied embodiments.
  • non-contacting position measuring systems with at least one sensor comprising a measuring coil are known, i.e., position measuring systems which operate either on the basis of eddy current or inductively.
  • Known arrangements for inductive position measurement operate, for example, according to the LVDT (linear variable differential transformer) principle and comprise one primary coil and two secondary coils, where the primary coils are supplied by oscillator electronics with an alternating current of constant frequency.
  • a ferromagnetic core is moved without contact between the coils encapsulated in a housing.
  • alternating voltages are induced in the two secondary coils.
  • a displacement of the magnetic core causes a higher voltage in one secondary coil and a lower voltage in the other secondary coil, where the difference of two secondary voltages is proportional to the displacement of the core.
  • connection can, for example, be realized by welding or via a thread. Both variants are mechanically extremely complicated.
  • the object of the present invention is to develop and extend a position-measuring system operating without contact and of the type stated in the introduction in such a manner that the object to be measured can be defined as a simple machine component.
  • a non-contacting position measuring system comprising a sensor that includes a measuring coil which can be energized with alternating current, where the measuring coil comprises at least two voltage taps, an electrically or magnetically conductive object to be measured which is assigned to the sensor, and an evaluation circuit, where the sensor and the object to be measured can be displaced relative to one another in a longitudinal direction of the measuring coil.
  • the position-measuring system presented is formed in such a manner that the object to be measured comprises at least one marking affecting the impedance of the measuring coil between two voltage taps so that the evaluation circuit provides an output signal correlating with the position of the object to be measured in relation to the voltage taps.
  • the invention it has been recognized that it is extremely complicated to provide a special component (magnetic core, ring) interacting with the measuring coil to which the motion of the actual object to be measured is transferred by means of a mechanical connection.
  • a marking on the object to be measured the marking affecting the impedance of the measuring coil between two voltage taps, an additional component can be omitted. Due to the marking provided on the object to be measured, it can interact as a simple machine part directly with the measuring coil, with corresponding positioning relative to the measuring coil, so that an output signal correlating with the position of the object to be measured in relation to the voltage taps is provided.
  • the marking could be an air gap or cutout portion since this could be produced particularly simply, e.g., by milling or by drilling.
  • the object to be measured could be made of a single material such that production costs would be reduced significantly vis-à-vis known position-measuring systems.
  • the object to be measured is embodied as a tube with at least one air gap and is disposed parallel to the axis of the measuring coil.
  • the presence of the air gap in one of the measuring coil sections defined by the voltage taps leads to an effect on the partial impedance of the corresponding coil section, which leads to corresponding output signals which are provided by the evaluation circuit.
  • the air gap could have a width corresponding at most to the spacing between two adjacent voltage taps so that the air gap is always unambiguously localized between two voltage taps.
  • the length of the tube could correspond to approximately the length of the measuring coil.
  • the tube is at least twice as long as the measuring coil, an optimal utilization of the sensor would result.
  • the range of measurement would then be maximized and would correspond to the length of the measuring coil.
  • the tube could comprise two air gaps opposite one another.
  • the tube could also comprise three air gaps offset relative to one another by 120°, where in principle an arbitrary configuration of the air gap(s) is conceivable. In principle, a limit with regard to a particular development is only set by the necessary mechanical strength of the tube.
  • the object to be measured could be made of a ferromagnetic material, e.g., iron.
  • the partial impedance of the measuring coil would be reduced in that section in which the air gap is located so that between the corresponding voltage taps a lower voltage would be tapped than between the other voltage taps.
  • the object to be measured could also be made of a non-ferromagnetic material, in particular of aluminum.
  • the presence of the air gap in a certain section of the measuring coil would then have as a consequence an increase of the corresponding partial impedance and consequently an increase of the corresponding voltage value.
  • the wall thickness of the tube could be chosen in such a manner that it is greater than the penetration depth of the eddy current.
  • the object to be measured could be displaceable in the interior of the measuring coil. If the object to be measured is in addition formed as a tube, then a particular advantage results that the interior of the tube can be used at the same time for other functions.
  • the interior of the tube could be used, for example, to transfer force by, for example, a shaft or a cable being guided through the tube. Also conceivable would be the utilization of the interior of the tube as an optical beam path or for cooling.
  • the object to be measured could be displaceable outside of the sensor in such a manner that the object to be measured encircles the measuring coil.
  • the measuring coil could be produced in one-layer or multi-layer technology and be wound around the coil body.
  • a coil body of plastic is particularly suitable for this.
  • the coil body could be embodied in the form of a plastic rod, which is particularly advantageous when the object to be measured is disposed outside of the sensor.
  • the coil body of an electrically conductive material with high specific electric resistance, where non-magnetic stainless steel is particularly suitable for this.
  • the wall thickness of the coil body could be chosen in such a manner that the penetration depth of the electromagnetic alternating field is less than the wall thickness of the coil body. This effect could also be achieved by a corresponding choice of the frequency of the alternating voltage applied to the measuring coil.
  • the coil body and the measuring coil could be encapsulated in a housing.
  • the housing can, for example, be made of plastic or another non-ferromagnetic material, in particular a stainless steel. Particularly in connection with an object to be measured guided within the coil body, a more compact encapsulated sensor can be made thereby.
  • the signals provided via the voltage taps and supplied to the evaluation circuit could be provided in a particularly simple manner by the evaluation circuit as an output voltage which varies linearly with the position of the air gap or the object to be measured.
  • a possible evaluation circuit has been disclosed in detail, e.g., in U.S. Pat. No. 5,629,619. In order to obtain as good a resolution as possible for the determination of the position of the object to be measured, interleaving of the voltage taps in one another could be provided.
  • FIG. 1 is a schematic representation of a first embodiment example of a position-measuring system according to the invention
  • FIG. 2 is a schematic representation of a second embodiment example of a position-measuring system according to the invention.
  • FIG. 3 is a schematic representation a tubular object to be measured which comprises an air gap.
  • FIG. 1 shows a first embodiment example of a non-contacting position-measuring system in accordance with the invention, with a sensor 2 comprising a measuring coil 1 which can be energized with alternating current, a power supply/evaluation circuit 3 connected to the sensor 2 , and an electrically and/or magnetically conductive object 4 to be measured which is assigned to the sensor 2 .
  • the measuring coil 1 is embodied as an elongated coil, in fact as a cylindrical coil with uniform windings, and is wound onto a coil body 5 , where the measuring coil 1 and the coil body 5 are encapsulated in a housing 6 .
  • the power supply/evaluation circuit 3 the measuring coil 1 is supplied with complementary alternating voltages U 1 and U 2 .
  • the measuring coil 1 comprises two voltage taps 7 so that according to the number of voltage taps 7 voltage values between the individual voltage taps 7 can be tapped and supplied to the power supply/evaluation circuit 3 .
  • the object 4 to be measured comprises a marking 8 (also referred to herein as a discontinuity) affecting the impedance of the measuring coil 1 between two voltage taps 7 so that the evaluation circuit 3 provides an output signal 9 correlating with the position of the object 4 to be measured in relation of the voltage taps 7 .
  • the object 4 to be measured which is moved without contact within the measuring coil 1 and is encircled by it with a slight spacing, is embodied as a tube 10 .
  • the marking 8 is formed in this case in the form of a radial air gap 11 milled into the tube 10 .
  • FIG. 2 shows, schematically, a second embodiment example of a position-measuring system according to the invention, where the same reference numbers relate to the same components as in FIG. 1 .
  • the essential difference with respect to the embodiment example according to FIG. 1 is that the object 4 to be measured is not moved within the measuring coil 1 without contact but rather that the object 4 to be measured encloses the sensor 2 in the form of a cylinder with a slight spacing.
  • the measuring coil 1 is wound onto a rod-like coil body 5 .
  • the measuring coil 1 and the coil body 5 are encapsulated in a housing 6 made of plastic.
  • the lead wires for supplying the measuring coil 1 with the two complementary alternating voltages U 1 and U 2 as well as the voltage taps 7 are laid parallel to the rod-like coil body 5 from an end face of the sensor 2 .
  • FIG. 3 shows schematically in a side view (a) and a plan view (b) an object 4 to be measured as well as a particular development of the air gap 11 .
  • the air gap 11 is formed of three material recesses, each offset relative to the others by 120°.
  • the three areas denoted by ⁇ , which form three partitioning walls in which the tube 10 has its full material thickness in the radial direction, are in principle only limited by the mechanical strength which the object 4 to be measured must have, depending on the particular application.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
US11/436,434 2003-11-20 2006-05-18 Non-contacting position measuring system Expired - Fee Related US7602175B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10354375A DE10354375A1 (de) 2003-11-20 2003-11-20 Berührungslos arbeitendes Wegmesssystem
DE10354375.9 2003-11-20
PCT/DE2004/002408 WO2005052506A2 (de) 2003-11-20 2004-10-28 Berührungslos arbeitendes wegmesssystem

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2004/002408 Continuation WO2005052506A2 (de) 2003-11-20 2004-10-28 Berührungslos arbeitendes wegmesssystem

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US20060202682A1 US20060202682A1 (en) 2006-09-14
US7602175B2 true US7602175B2 (en) 2009-10-13

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US (1) US7602175B2 (de)
EP (1) EP1685365A2 (de)
CN (1) CN101341377B (de)
DE (1) DE10354375A1 (de)
WO (1) WO2005052506A2 (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090058430A1 (en) * 2007-09-05 2009-03-05 Sentrinsic Systems and Methods for Sensing Positions of Components
US20100225299A1 (en) * 2009-03-06 2010-09-09 Nguyen Evans H Wall scanner
US8253619B2 (en) 2005-02-15 2012-08-28 Techtronic Power Tools Technology Limited Electromagnetic scanning imager
US8274273B2 (en) 2008-03-07 2012-09-25 Milwaukee Electric Tool Corporation Test and measurement device with a pistol-grip handle
US20130088243A1 (en) * 2011-10-05 2013-04-11 David Scott Nyce Position sensing head with redundancy
US20160003643A1 (en) * 2013-03-01 2016-01-07 Continental Teves Ag & Co. Ohg Sensor for detecting a position of a transducer magnet
US9835474B2 (en) 2013-02-01 2017-12-05 Continental Teves Ag & Co. Ohg Method for producing a sensing device
US12007526B2 (en) 2021-09-29 2024-06-11 Milwaukee Electric Tool Corporation Wall scanner

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005040536A1 (de) * 2005-08-26 2007-03-29 Honeywell Technologies Sarl Verfahren und Vorrichtung zum Messen einer Kraft und einer Position
US20070296405A1 (en) * 2006-06-26 2007-12-27 Orbotech Ltd. Plotting an image on a thin material having variations in thickness
US8193802B2 (en) 2008-04-09 2012-06-05 Milwaukee Electric Tool Corporation Slidably attachable non-contact voltage detector
CN106524978A (zh) * 2016-11-16 2017-03-22 上海核工程研究设计院 一种核电站的主设备支撑间隙测量系统

Citations (12)

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DE2630894A1 (de) 1976-07-09 1978-01-12 Bosch Gmbh Robert Induktiver geber
US4107605A (en) * 1975-10-15 1978-08-15 British Gas Corporation Eddy current flaw detector utilizing plural sets of four planar coils, with the plural sets disposed in a common bridge
DE3525199A1 (de) 1985-07-15 1987-01-22 Rexroth Mannesmann Gmbh Induktiver geber
DE3703867A1 (de) 1987-02-07 1988-08-18 Bayerische Motoren Werke Ag Vorrichtung zum messen des hubweges von hubventilen
DE4029633A1 (de) 1989-10-06 1991-04-11 Bosch Gmbh Robert Wegmesssystem
US5260651A (en) * 1989-10-06 1993-11-09 Robert Bosch Gmbh Travel measuring system for measuring a position relationship of one body relative to another body
DE4225968A1 (de) 1992-08-06 1994-02-10 Micro Epsilon Messtechnik Berührungslos arbeitendes Wegmeßsystem und Verfahren zur berührungslosen Wegmessung
US5811969A (en) 1994-06-03 1998-09-22 Sony Corporation Shaft position detection sensor monitoring changes in coil inductance
DE19832854C2 (de) 1997-07-24 2001-01-25 Micro Epsilon Messtechnik Einrichtung zum Messen linearer Verschiebungen
US6205230B1 (en) * 1998-11-12 2001-03-20 Amfit, Inc. Optical contour digitizer
US6246230B1 (en) * 1996-07-30 2001-06-12 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact position sensor
US7053604B2 (en) * 2002-08-30 2006-05-30 Fev Motorentechnik Gmbh Sensor detecting movement of a control element moved by an actuator

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4107605A (en) * 1975-10-15 1978-08-15 British Gas Corporation Eddy current flaw detector utilizing plural sets of four planar coils, with the plural sets disposed in a common bridge
DE2630894A1 (de) 1976-07-09 1978-01-12 Bosch Gmbh Robert Induktiver geber
DE3525199A1 (de) 1985-07-15 1987-01-22 Rexroth Mannesmann Gmbh Induktiver geber
DE3703867A1 (de) 1987-02-07 1988-08-18 Bayerische Motoren Werke Ag Vorrichtung zum messen des hubweges von hubventilen
DE4029633A1 (de) 1989-10-06 1991-04-11 Bosch Gmbh Robert Wegmesssystem
US5260651A (en) * 1989-10-06 1993-11-09 Robert Bosch Gmbh Travel measuring system for measuring a position relationship of one body relative to another body
DE4225968A1 (de) 1992-08-06 1994-02-10 Micro Epsilon Messtechnik Berührungslos arbeitendes Wegmeßsystem und Verfahren zur berührungslosen Wegmessung
US5629619A (en) 1992-08-06 1997-05-13 Micro-Epsilon Messtechnik Gmbh & Co. Kg Noncontact distance-measuring system having at least one coil and method of noncontact distance measuring operating either on the basis of eddy currents or by inductance
US5811969A (en) 1994-06-03 1998-09-22 Sony Corporation Shaft position detection sensor monitoring changes in coil inductance
US6246230B1 (en) * 1996-07-30 2001-06-12 Micro-Epsilon Messtechnik Gmbh & Co. Kg Non-contact position sensor
DE19832854C2 (de) 1997-07-24 2001-01-25 Micro Epsilon Messtechnik Einrichtung zum Messen linearer Verschiebungen
US6191575B1 (en) 1997-07-24 2001-02-20 Micro-Epsion Messtechnic Gmbh & Co. Kg Device for measuring linear displacements
US6205230B1 (en) * 1998-11-12 2001-03-20 Amfit, Inc. Optical contour digitizer
US7053604B2 (en) * 2002-08-30 2006-05-30 Fev Motorentechnik Gmbh Sensor detecting movement of a control element moved by an actuator

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8253619B2 (en) 2005-02-15 2012-08-28 Techtronic Power Tools Technology Limited Electromagnetic scanning imager
US20090058430A1 (en) * 2007-09-05 2009-03-05 Sentrinsic Systems and Methods for Sensing Positions of Components
US9696362B2 (en) 2008-03-07 2017-07-04 Milwaukee Electric Tool Corporation Test and measurement device with a pistol-grip handle
US8274273B2 (en) 2008-03-07 2012-09-25 Milwaukee Electric Tool Corporation Test and measurement device with a pistol-grip handle
US9385352B2 (en) 2008-03-07 2016-07-05 Milwaukee Electric Tool Corporation Test and measurement device with a pistol-grip handle
US9664808B2 (en) 2009-03-06 2017-05-30 Milwaukee Electric Tool Corporation Wall scanner
US20100225299A1 (en) * 2009-03-06 2010-09-09 Nguyen Evans H Wall scanner
US11169296B2 (en) 2009-03-06 2021-11-09 Milwaukee Electric Tool Corporation Wall scanner
US20130088243A1 (en) * 2011-10-05 2013-04-11 David Scott Nyce Position sensing head with redundancy
US8692541B2 (en) * 2011-10-05 2014-04-08 David Scott Nyce Position sensing head with redundancy
US9835474B2 (en) 2013-02-01 2017-12-05 Continental Teves Ag & Co. Ohg Method for producing a sensing device
US20160003643A1 (en) * 2013-03-01 2016-01-07 Continental Teves Ag & Co. Ohg Sensor for detecting a position of a transducer magnet
US9726520B2 (en) * 2013-03-01 2017-08-08 Continental Teves Ag & Co. Ohg Sensor for detecting a position of a transducer magnet
US12007526B2 (en) 2021-09-29 2024-06-11 Milwaukee Electric Tool Corporation Wall scanner

Also Published As

Publication number Publication date
US20060202682A1 (en) 2006-09-14
WO2005052506A2 (de) 2005-06-09
CN101341377B (zh) 2011-01-05
DE10354375A1 (de) 2005-06-30
CN101341377A (zh) 2009-01-07
WO2005052506A3 (de) 2008-12-11
EP1685365A2 (de) 2006-08-02

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