US7459809B2 - X-Y stage driver having locking device and data storage system having the X-Y stage driver - Google Patents

X-Y stage driver having locking device and data storage system having the X-Y stage driver Download PDF

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Publication number
US7459809B2
US7459809B2 US11/582,336 US58233606A US7459809B2 US 7459809 B2 US7459809 B2 US 7459809B2 US 58233606 A US58233606 A US 58233606A US 7459809 B2 US7459809 B2 US 7459809B2
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US
United States
Prior art keywords
stage
comb electrodes
stage driver
driver
locking device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US11/582,336
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English (en)
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US20070188199A1 (en
Inventor
Hong-Sik Park
Jong-youp Shim
Seung-bum Hong
Dong-ki Min
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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Assigned to SAMSUNG ELECTRONICS CO., LTD. reassignment SAMSUNG ELECTRONICS CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HONG, SEUNG-BUM, MIN, DONG-KI, PARK, HONG-SIK, SHIM, JONG-YOUP
Publication of US20070188199A1 publication Critical patent/US20070188199A1/en
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Publication of US7459809B2 publication Critical patent/US7459809B2/en
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques

Definitions

  • the present invention relates to an X-Y stage driver having a locking device and a data storage system having the X-Y stage driver, and more particularly, to an X-Y stage driver having a locking device that prevents the X-Y stage from moving in a different direction while the X-Y stage is moving in a predetermined direction, and a data storage system having the X-Y stage driver.
  • Magnetic devices that use a micro electro-mechanical system (MEMS) technique have been recently developed. Such magnetic devices include magnetic compasses, electromagnetic scanners, and electromagnetic valves. Research on the development of MEMS type data storage systems that use a scanning probe microscope (SPM) technique has been actively conducted.
  • SPM scanning probe microscope
  • Such data storage systems record or read data on a medium by moving an X-Y stage whereon the medium is placed in a two-dimensional plane while a plurality of probes are fixed to the data storage system.
  • the location of the X-Y stage having the medium must be precisely controlled with respect to the probes.
  • the X-Y stage must be prevented from moving in a different direction while moving in a predetermined direction.
  • the present invention provides an X-Y stage driver having a locking device that may prevent the X-Y stage from moving in a different direction while the X-Y stage is moving in a predetermined direction.
  • the present invention also provides a data storage system that includes the X-Y stage driver having the locking device.
  • an X-Y stage driver having a locking device, the X-Y stage comprising: an X-Y stage; a supporting unit that supports the X-Y stage and has elastic beams that support corners of the X-Y stage; a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction; a stiffener that prevents the X-Y stage from rotating; and a locking device that fixes the stiffener by an electrostatic force.
  • the locking device may comprise: a first anchor disposed to face a side surface of the stiffener; a plurality of first comb electrodes formed on a surface of the stiffener facing the first anchor; and a plurality of second comb electrodes alternately disposed with the first comb electrodes on the first anchor.
  • the second comb electrode corresponding to the first comb electrode may be a pair of electrodes respectively formed on both sides of the first comb electrode.
  • the first comb electrode may have a width greater than a width of the second comb electrode.
  • the supporting unit may comprise a second anchor that supports the elastic beams and a base that contacts a lower surface of the second anchor, wherein the first anchor may be formed on the base.
  • the driving unit may comprise a plurality of coils formed on the X-Y stage and permanent magnets disposed over and under the coils and form a magnetic field around the coils.
  • a data storage system comprising: an X-Y stage driver having a locking device; a medium mounted on the X-Y stage; and a probe array fixedly disposed above the medium to read or record data in each cell of the medium.
  • FIG. 1 is a schematic exploded perspective view of a data storage system according to an exemplary embodiment of the present invention
  • FIG. 2 is a schematic perspective view of the data storage system of FIG. 1 ;
  • FIG. 3 is a cross-sectional view of the data storage system of FIG. 1 ;
  • FIG. 4 is a partial perspective view of an X-Y stage driver employed in the data storage system of FIG. 1 ;
  • FIG. 5 is a plan view of the X-Y stage driver of FIG. 4 ;
  • FIG. 6 is an enlarged view of portion of A in FIG. 4 ;
  • FIG. 7 is a schematic drawing for showing the principle of driving an X-Y stage driver according to an exemplary embodiment of the present invention.
  • FIGS. 8 and 9 are plan views for explaining an operation of a locking device according to an exemplary embodiment of the present invention.
  • FIG. 1 is a schematic exploded perspective view of a data storage system according to an exemplary embodiment of the present invention.
  • FIGS. 2 and 3 respectively are a schematic perspective and a cross-sectional view of the data storage system of FIG. 1 .
  • the data storage system includes an X-Y stage driver 10 on which a medium 21 that records data is mounted and a probe array 90 fixedly disposed above the medium 21 .
  • the probe array 90 is omitted.
  • the X-Y stage driver 10 includes a base 15 , an X-Y stage 20 whereon the medium 21 is mounted, a supporting unit 30 that maintains the X-Y stage 20 at a predetermined distance from the base 15 and elastically supports the X-Y stage 20 , stiffeners 40 that prevent the X-Y stage 20 from rotating, a locking device 50 that prevents the X-Y stage 20 from moving along one axis while being driven along another axis, and an electromagnetic driver 80 that drives the X-Y stage 20 along two axes.
  • the present exemplary embodiment illustrates the data storage system as having the X-Y stage 20 on which the medium 21 is mounted, it will be appreciated that the present invention is not limited thereto.
  • the X-Y stage driver 10 can be applied to any system for analyzing a sample placed on the X-Y stage 20 through the probe array 90 .
  • the probe array 90 includes micro tips (not shown) formed on a lower surface of a cantilever 92 , and data stored in each cell (data storing unit) of the medium 21 is recorded or read using the micro tips.
  • the electromagnetic driver 80 is provided to horizontally move the X-Y stage 20 in two directions on the base 15 , that is, in a first direction (x direction) and in a second direction (y direction) perpendicular to the first direction.
  • the electromagnetic driver 80 includes a plurality of flat panel coils 81 provided on the X-Y stage 20 , a plurality of permanent magnets 87 disposed under the X-Y stage 20 corresponding to the flat panel coils 81 , a plurality of permanent magnets 88 disposed over the X-Y stage 20 corresponding to the flat panel coils 81 , and yokes 89 for constituting a closed loop magnetic circuit together with the permanent magnets 87 and 88 .
  • Reference numeral 85 indicates a driving electrode pad for supplying a current to the flat panel coils 81 .
  • the flat panel coils 81 can be formed on an upper part of the X-Y stage 20 , but the present invention is not limited thereto.
  • the flat panel coils 81 can be formed on a lower part of the X-Y stage 20 or can be formed through the X-Y stage 20 .
  • the X-Y stage 20 has a rectangular shape, and four flat panel coils 81 are disposed near each of the sides thereof.
  • the permanent magnets 87 and 88 have different polarities and are respectively installed under and over each of the four flat panel coils 81 .
  • the X-Y stage 20 moves in the X-Y plane according to an electromagnetic force generated when a current flows in the flat panel coils 81 .
  • FIG. 4 is a partial perspective view of the X-Y stage driver 10 employed in the data storage system of FIG. 1 .
  • FIG. 5 is a plan view of the X-Y stage driver 10 of FIG. 4 .
  • the supporting unit 30 includes elastic beams 31 provided on corner portions of the X-Y stage 20 and a second anchor 38 that supports the elastic beams 31 and is installed on the base 15 .
  • the elastic beams 31 may deform a small amount in a vertical direction and a larger amount in a horizontal direction.
  • the elastic beams 31 include an x-direction portion 31 x and a y-direction portion 31 y.
  • the x-direction portion 31 x deforms in the y direction
  • the y-direction portion 31 y deforms in the x direction.
  • the X-Y stage 20 moves in the X-Y direction according to bending of the elastic beams 31 .
  • the stiffeners 40 are disposed parallel to each of the sides of the X-Y stage 20 and a predetermined distance therefrom.
  • the elastic beams 31 are connected to both ends of the stiffeners 40 to prevent the X-Y stage 20 from rotating when the X-Y stage 20 moves horizontally.
  • the stiffeners 40 include an x-direction portion 40 x parallel to the x direction and a y-direction portion 40 y parallel to the y direction. End portions of the stiffeners 40 are respectively connected to the x-direction portion 31 x and the y-direction portion 31 y of the elastic beams 31 .
  • the locking device 50 includes a first anchor 54 facing the respective stiffeners 40 on the base 15 , first comb electrodes 51 formed on a surface of the respective stiffeners 40 facing the first anchor 54 , and second comb electrodes 52 formed on the first anchor 54 so as to be alternately installed with the first comb electrodes 51 .
  • the second comb electrodes 52 include pairs of electrodes provided on both sides of each of the first comb electrodes 51 , such that the pairs of the second comb electrodes 52 straddle each of the first comb electrodes 51 .
  • the first comb electrodes 51 are disposed in the center between the corresponding second comb electrodes 52 .
  • the individual first comb electrodes 51 may have a width W 1 greater than a width W 2 of the individual second comb electrodes 52 .
  • the second comb electrodes 52 are respectively formed on both sides of the first comb electrode 51 , but the present invention is not limited thereto. That is, a pair of the first comb electrodes 51 corresponding to the second comb electrodes 52 can be formed on both sides of the second comb electrodes 52 , and the second comb electrodes 52 may have a width greater than the width of the first comb electrodes 51 .
  • the elements on the base 15 may be formed of a conductive material, for example, a single crystalline silicon.
  • the base 15 can be formed of a material having high electrical insulating capability, such as a glass substrate.
  • An electrode pad 58 is formed on the first anchor 54 , and the electrode pad 58 is electrically connected to an external area using wire bonding.
  • FIG. 7 is a schematic drawing showing a principle of driving the X-Y stage driver 10 according to an exemplary embodiment of the present invention.
  • the pair of the permanent magnets 87 and 88 have different polarities and are installed to face each other, and a portion of the flat panel coils 81 formed on the X-Y stage 20 is disposed therebetween.
  • a magnetic field B is formed in a space between the two permanent magnets 87 and 88 .
  • FIGS. 8 and 9 are plan views for explaining an operation of the locking device 50 according to an exemplary embodiment of the present invention.
  • a predetermined voltage Vx is applied to the second comb electrodes 52 formed in the x-direction portion 40 x of the stiffeners 40 .
  • the pair of the second comb electrodes 52 contact the first comb electrode 51 due to the electrostatic force between the second comb electrodes 52 and the first comb electrodes 51 . Accordingly, the first comb electrodes 51 are locked.
  • the x-direction portion 40 x of the stiffener 40 is fixed.
  • the X-Y stage 20 can be moved in a desired direction by controlling the direction and amount of current that flows in the flat panel coils 81 , and at this time, data can be stored in the medium 21 or data can be read from the medium 21 using the probe array 90 .
  • a current is applied to the flat panel coils 81 , such that the x-direction portion 40 x of the stiffener 40 moves in the y direction by deformation of the x-direction portion 31 x of the elastic beams 31 .
  • the X-Y stage can be precisely driven in a desired direction since the stiffeners are fixed by a locking device.
  • the X-Y stage driver having the locking device according to the exemplary embodiments of the present invention can be precisely driven since displacement of the X-Y stage in an unwanted direction is not allowed.
  • the data storage system can precisely control the position of the X-Y stage. Therefore, high density data can be stored and read.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Micromachines (AREA)
US11/582,336 2006-02-15 2006-10-18 X-Y stage driver having locking device and data storage system having the X-Y stage driver Expired - Fee Related US7459809B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2006-0014696 2006-02-15
KR1020060014696A KR100773545B1 (ko) 2006-02-15 2006-02-15 로킹장치를 구비한 ｘ-ｙ스테이지 구동장치와, 이를 채용한정보저장기기

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US20070188199A1 US20070188199A1 (en) 2007-08-16
US7459809B2 true US7459809B2 (en) 2008-12-02

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US (1) US7459809B2 (zh)
JP (1) JP4435188B2 (zh)
KR (1) KR100773545B1 (zh)
CN (1) CN100590953C (zh)

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Publication number Priority date Publication date Assignee Title
FR2959345B1 (fr) * 2010-04-21 2017-05-19 Isp System Actionneur lineaire sans contact a guidage flexible et application a une table de deplacement
JP6648984B2 (ja) * 2014-12-26 2020-02-19 日本電産サンキョー株式会社 アクチュエータ
JP6626725B2 (ja) * 2016-01-29 2019-12-25 日本電産サンキョー株式会社 アクチュエータ
US20190184424A1 (en) * 2016-08-09 2019-06-20 Nidec Sankyo Corporation Vibration generating device
JP6944287B2 (ja) * 2017-06-30 2021-10-06 日本電産サンキョー株式会社 アクチュエータ
CN111817497B (zh) * 2020-07-10 2022-01-21 深圳市汇顶科技股份有限公司 控制装置和运动机构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6992407B2 (en) * 2002-07-30 2006-01-31 Tamura Corporation Precision machining stage equipment
US7133115B2 (en) * 2003-10-14 2006-11-07 Canon Kabushiki Kaisha Positioning device, exposure apparatus using the positioning device, and device production method
US7333180B2 (en) * 2004-03-01 2008-02-19 Canon Kabushiki Kaisha Positioning apparatus and exposure apparatus using the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100311070B1 (ko) * 1999-02-08 2001-10-17 이중구 리니어 스텝 모터를 이용한 ｘｙ-스테이지 및 그 제어 시스템
JP2001069746A (ja) 1999-09-01 2001-03-16 Nsk Ltd 非接触型テーブル
KR100387243B1 (ko) * 2000-06-26 2003-06-12 삼성전자주식회사 초소형 정보저장기기용 ｘ-ｙ 스테이지 전자 구동 장치 및그 코일 제작 방법
JP2005168154A (ja) 2003-12-02 2005-06-23 Chiba Seimitsu:Kk 平面モータ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6992407B2 (en) * 2002-07-30 2006-01-31 Tamura Corporation Precision machining stage equipment
US7133115B2 (en) * 2003-10-14 2006-11-07 Canon Kabushiki Kaisha Positioning device, exposure apparatus using the positioning device, and device production method
US7333180B2 (en) * 2004-03-01 2008-02-19 Canon Kabushiki Kaisha Positioning apparatus and exposure apparatus using the same

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Publication number Publication date
US20070188199A1 (en) 2007-08-16
CN100590953C (zh) 2010-02-17
JP4435188B2 (ja) 2010-03-17
JP2007220272A (ja) 2007-08-30
CN101022240A (zh) 2007-08-22
KR20070082192A (ko) 2007-08-21
KR100773545B1 (ko) 2007-11-06

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