US7129519B2 - Monitoring system comprising infrared thermopile detector - Google Patents

Monitoring system comprising infrared thermopile detector Download PDF

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US7129519B2
US7129519B2 US10/668,489 US66848903A US7129519B2 US 7129519 B2 US7129519 B2 US 7129519B2 US 66848903 A US66848903 A US 66848903A US 7129519 B2 US7129519 B2 US 7129519B2
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infrared radiation
semiconductor process
sampling region
thermopile detector
process system
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US20040058488A1 (en
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Jose I. Arno
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Entegris Inc
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Advanced Technology Materials Inc
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Priority claimed from US10/140,848 external-priority patent/US6617175B1/en
Assigned to ADVANCED TECHNOLOGY MATERIALS, INC. reassignment ADVANCED TECHNOLOGY MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ARNO, JOSE I.
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Publication of US20040058488A1 publication Critical patent/US20040058488A1/en
Priority to KR1020067007696A priority patent/KR20060064689A/ko
Priority to CNB2004800312296A priority patent/CN100433267C/zh
Priority to JP2006528035A priority patent/JP2007506974A/ja
Priority to EP04809711A priority patent/EP1665352A4/de
Priority to PCT/US2004/029383 priority patent/WO2005034187A2/en
Priority to TW093128548A priority patent/TWI346993B/zh
Publication of US7129519B2 publication Critical patent/US7129519B2/en
Priority to US11/555,094 priority patent/US7351976B2/en
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Priority to US12/060,686 priority patent/US7723685B2/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/427—Dual wavelengths spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/151—Gas blown
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring

Definitions

  • This invention relates to infrared thermopile monitoring systems for semiconductor process monitoring and control.
  • infrared energy-absorbing molecules absorb infrared radiation at discrete energy levels, so that when a gas, liquid or solid composition is exposed to infrared (IR) radiation of a broad wavelength range, the infrared energy-absorbing component(s) of that composition will absorb a portion of the IR light at very specific wavelengths.
  • This phenomenon enables infrared-based detection, by comparing energy spectra of various known compositions with and without specific IR-absorbing component(s), to obtain an absorption profile or pattern that can be used to detect the presence of specific IR-absorbing component(s) in an unknown composition.
  • concentration of the IR-absorbing component(s) in the composition directly correlates to the amount of IR light that is absorbed by such component(s), and can be determined based thereon.
  • IR gas analyzers depend on grating techniques or prisms to break IR radiation into its individual wavelengths (see FIGS. 1A and 1B , showing split IR lights of wavelength ⁇ 1 and ⁇ 2 ). The IR radiation of individual wavelengths would then be introduced into a gas cell by means of a moveable slit aperture and the IR radiation of the selected wavelength passing through the gas cell would be detected.
  • Such dispersive IR analyzers used electronic processing means to correlate the slit aperture position with the IR energy level and the signal from the detector, and produce energy versus absorbance relations.
  • the principal drawbacks of the above-described dispersive spectrometers are the loss of radiation intensity due to multiple reflection and refraction, the risk of total system failure due to misalignment of the movable parts, the cost and complexity of the spectrometer apparatus due to the number of optical components (e.g., mirrors, lens, and prism), and the space requirement for accommodating the numerous optical components used.
  • optical components e.g., mirrors, lens, and prism
  • FT-IR Fourier transform IR
  • dispersive spectrometers like dispersive spectrometers, also use broad energy IR sources.
  • the originally generated IR beam is split into two beams and an interference pattern is created by sending one of the two beams in and out-of-phase, using a movable mirror.
  • a laser beam is used to monitor the location of the movable mirror at all times.
  • a sensor component of the spectrometer device receives the convoluted infrared wave pattern together with the laser-positioning beam. That information is then sent to a computer and deconvoluted using a Fourier transform algorithm.
  • the energy versus mirror displacement data is thereby converted into energy versus absorbance relationships.
  • Such FT-IR spectrometers suffer from similar drawbacks as described hereinabove for the conventional dispersive spectrometers.
  • the present invention in one aspect relates to a semiconductor process system adapted for processing of a material therein, in which the system comprises:
  • the infrared (IR) radiation in such system of the present invention is transmitted along a transmission path that is substantially linear, while both the infrared radiation source and the thermopile detector are aligned along the transmission path of said infrared radiation.
  • the linear transmission path for the IR radiation minimizes reflection and refraction of such IR radiation and therefore significantly reduces loss of radiation intensity during transmission.
  • Such linear transmission path is made available by the integration of the thermopile detector, which comprises one or more radiation filters for selectively transmitting the IR radiation of a specific wavelength, therefore eliminating the requirements for monochromating the IR radiation through splitting and grating that are essential to the conventional dispersive and FT-IR spectrometers.
  • the loss of IR radiation intensity can also be reduced, either independent from or in addition to the use of linear transmission path, by providing a transmission path with inner surface that is sufficient smooth and/or reflective, which minimizes absorption and dissipation of the IR radiation by such inner surface of the transmission path.
  • inner surface of the transmission path is characterized by a roughness in a range of from about 0.012 ⁇ m Ra to about 1.80 ⁇ m Ra, preferably from about 0.10 ⁇ m Ra to about 0.80 ⁇ m Ra, and more preferably from about 0.10 ⁇ m Ra to about 0.20 ⁇ m Ra.
  • Such inner surface may further be characterized by a reflectivity in a range of from about 70% to about 99%, preferably from about 92% to about 97%.
  • Ra refers to the average differences between peaks and valleys of a surface finish.
  • such material When the material is subjected to IR radiation in the sampling region is a process gas, such material may comprise particles or be susceptible to particle formation, resulting in deposition of particles around the IR radiation source or the thermopile detector, which may in turn significantly reduce the amount of IR radiation transmitted therethrough or completely block the transmission path.
  • the present invention in such circumstances can be arranged and constructed to utilize a purge gas for purging the interfacial spaces between the sampling region containing the process gas and the IR radiation source as well as between the sampling region and the thermopile detector.
  • a purge gas for purging the interfacial spaces between the sampling region containing the process gas and the IR radiation source as well as between the sampling region and the thermopile detector.
  • Such purge gas can be passed through porous media into the interfacial spaces, to form a purge gas flow that moves any particle deposits away from the IR radiation source and the thermopile detector into the sampling region.
  • particle deposit may be reduced by providing external thermal energy for heating at least a portion of the IR transmission path, so as to create a thermal gradient or heat flux that hinders the particle access to the internal surface of the transmission path.
  • the semiconductor process system of the present invention may comprise a scrubber unit for abating a semiconductor process effluent from an upstream process unit, with a sampling region arranged near the inlet of such scrubber unit, so as to enable analysis of the effluent before its entry into such the scrubber unit, thereby enabling the scrubber unit to be responsively operated according the composition of the process gas.
  • FIGS. 1A and 1B show conventional monochromator systems for splitting and grating IR radiation.
  • FIG. 2 is a schematic view of a semiconductor process system comprising a linear transmission path for IR radiation, according to one embodiment of the present invention.
  • FIG. 3 is a schematic view of a semiconductor process system comprising a scrubber unit having an IR radiation source and a thermopile detector constructed and arranged for analyzing an incoming process effluent near the inlet of such scrubber unit, according to one embodiment of the present invention.
  • FIG. 4 is a time-concentration plot of tetraethyloxysilane (TEOS) and silicon tetrafluoride (SiF 4 ) as measured for the process effluent from an upstream plasma enhanced chemical vapor deposition chamber that is operated according to alternative deposition and cleaning cycles.
  • TEOS tetraethyloxysilane
  • SiF 4 silicon tetrafluoride
  • FIG. 5 is a graph showing the IR signal responses measured for a first transmission path having non-electropolished inner surface, a second transmission path having moderately electropolished inner surface, and a third transmission path having highly electropolished inner surface, at various IR wavelengths.
  • FIGS. 6 and 7 are perspective views of semiconductor process systems comprising purge gas inlets for introducing a purge gas to remove particles from the interfacial spaces between the sampling region and the IR source as well as between the sampling region and the thermopile detector.
  • FIG. 8 is a perspective view of semiconductor process system comprising purge gas inlets for forming a sheath of purge gas around the particle-containing process effluent in the sampling region.
  • thermopile detector systems useful for semiconductor process monitoring and control.
  • U.S. patent application Ser. No. 10/140,848 filed on May 8, 2002 in the name of Jose I. Arno is incorporated herein by reference in its entirety for all purposes.
  • semiconductor process is intended to be broadly construed to include any and all processing and unit operations involved in the manufacture of semiconductor products, as well as all operations involving treatment or processing of materials used in or produced by a semiconductor manufacturing facility, as well as all operations carried out in connection with the semiconductor manufacturing facility not involving active manufacturing (examples include conditioning of process equipment, purging of chemical delivery lines in preparation for operation, etch cleaning of process tool chambers, abatement of toxic or hazardous gases from effluents produced by the semiconductor manufacturing facility, etc.).
  • the thermopile-based infrared monitoring system of the invention comprises an infrared (IR) radiation source, a sampling region for exposing a material of interest (e.g., a process gas) to IR radiation, and a thermopile detector for analyzing the IR radiation as transmitted through the material of interest.
  • the sampling region in the broad practice of the invention may comprise any suitable compartment, passageway or chamber, in which the material to be analyzed is subjected to passage of IR light therethrough for the purpose of using its IR absorbance-determined output to generate control signal(s) for process monitoring and control.
  • the thermopile detector generates small voltages when exposed to IR light (or heat in the IR spectral regime). The output signal of the thermopile detector is proportional to the incident radiation on the detector.
  • Thermopile detectors employed in the preferred practice of the present invention may have a multiple array of elements in each detector unit.
  • one of the thermopile detector elements is used as a reference, sensing IR light in a range in which substantially no absorption occurs (e.g., wavelength of 4.00 ⁇ 0.02 ⁇ m).
  • the second thermopile detector element is coated with a filter that senses IR energy in the spectral range of interest (such spectral range depending on the particular material to be monitored). Comparison of the differences in the voltages generated by the reference thermopile detector element and those generated by the thermopile detector active element(s) provides a concentration measurement.
  • Detectors with up to 4 thermopile detector element arrays are commercially available. For example, in a 4-element detector unit, one detector element is employed as a reference and the remaining 3 detector elements are utilized for measurements in different spectral regions.
  • thermopile IR detector has a minimum requirement for the IR radiation intensity, in order to effectively detect such IR radiation. Therefore, when the intensity of the IR radiation generated by the IR source remains constant, the L Total has to be maintained at a level that is equal to or smaller than a maximum limit L 0 in order to enable detection of the IR radiation by the thermopile IR detector. On the other hand, since the concentration of the IR-absorbing material of interest directly correlates to and is determined by L Material , maximization of L Material will maximize the signal strength of the measurement, which is especially important for detection and analysis of low concentration IR-absorbing materials.
  • the present invention achieves the goal of maximizing L Material while maintaining L Total at or below a maximum limit L 0 , by reducing or minimizing L Path , according to the following methods:
  • the loss of radiation intensity is effectively reduced in comparison to that of a non-linear transmission path that requires multiple reflections and refractions of the IR radiation, as shown in FIGS. 1A and 1B .
  • the present invention constructs and arranges the IR radiation source, the sampling region, and the thermopile detector to provide a substantially linear transmission path for the IR light, as shown in FIG. 2 .
  • the system 1 comprises a sampling region 10 , preferably a gas sampling region having a gas inlet 12 and a gas outlet 14 and constitutes a part of a flow circuitry for flow of a process gas therethrough.
  • the IR radiation source 20 is positioned at one side of such gas sampling region 10 .
  • the IR radiation source 20 comprises an IR emitter 22 and a parabolic mirror 24 , for providing a parallel beam of IR light 2 , which is transmitted along a substantially linear transmission path through the gas sampling region 10 .
  • the thermopile detector 40 is positioned at the other side of such gas sampling region 10 for receiving and analyzing the transmitted IR light beam.
  • the thermopile detector 40 comprises an IR detecting element 44 having one or more IR radiation band pass filters for selectively transmitting a portion of the IR radiation of a narrow wavelength range that encompasses the absorption wavelength that is characteristic to the IR-absorbing component(s) of interest in the process gas, so that the decrease in output signal generated by such thermopile is directly related to the amount of infrared absorption by the corresponding component(s) of interest.
  • the IR light beam is focused by a focusing lens 42 before entering the IR detecting element 44 .
  • thermopile detector unit may further include a multiplicity of absorber areas, including reference (unfiltered) absorber and gas-filtered absorber regions, with the latter filters being gas-specific for sensing of the semiconductor gases or gas components of interest (e.g., arsine, phosphine, germane, stibine, distibine, silane, substituted silanes, chlorine, bromine, organometallic precursor vapor, etc.).
  • reference (unfiltered) absorber e.g., arsine, phosphine, germane, stibine, distibine, silane, substituted silanes, chlorine, bromine, organometallic precursor vapor, etc.
  • the gas sampling region 10 is separated from the IR radiation source 20 and the thermopile detector 40 by interfacial spaces 32 and 52 , which form parts of the IR transmission path.
  • the interfacial space 32 is connected to the IR radiation source 20 in a sealed manner, which comprises a weld connector 34 that is detachably and sealingly connected to the IR radiation source by a spacer 35 and O-rings 36 .
  • the interfacial space 52 is connected to the thermopile detector 40 in a sealed manner, which comprises a weld connector 54 that is detachably and sealingly connected to the IR radiation source by a spacer 55 and O-rings 56 .
  • Such weld connector 34 and 54 both comprise IR transparent materials and therefore form a portion of the IR transmission path.
  • the linear transmission path of the IR radiation reduces unnecessary loss of radiation intensity.
  • connection between the IR source, the gas sampling region, and the thermopile detector is simple and robust, providing a sufficient small footprint and efficient resistance against misalignment.
  • thermopile detector 40 may be positioned behind the thermopile detector 40 , for immediately receiving output signals from the thermopile detector 40 , so as to further reduce the footprint and minimize signal loss due to remote connections.
  • the thermopile detector system is utilized as an abatement tool controller for an abatement unit for treating process effluent produced in a semiconductor manufacturing operation, or other industrial process.
  • the thermopile detector system advantageously is installed at the inlet of the abatement unit, where the abatement apparatus receives the effluent to be treated.
  • the thermopile detector system is used to sense whether or not an upstream tool that generates the effluent in active on-stream operation, is in an active operating mode, or alternatively whether or not the upstream tool is in a non-effluent-producing state, e.g., undergoing purging or cleaning.
  • thermopile detector unit by way of specific example, is usefully employed as an abatement tool controller for an effluent scrubber, such as a wet/dry scrubber or a thermal scrubber, whereby the presence of the thermopile detector system transforms the scrubber into a “smart” scrubber and enhances the efficiency of the scrubber, allowing conservation of resources (lower consumables) to be achieved.
  • effluent scrubber such as a wet/dry scrubber or a thermal scrubber
  • FIG. 3 shows a semiconductor process system 100 comprising a scrubber unit 140 having a gas inlet 142 and a gas outlet 144 .
  • An IR source 120 and a thermopile detector 130 are provided at both sides of a gas sampling region 110 near the gas inlet 142 of such scrubber unit 140 , for analyzing the composition of the effluent flowed into the scrubber.
  • the output signal generated by the thermopile detector 130 is forwarded through transmission line 152 to a microcontroller 150 .
  • the microcontroller 150 is connected to the scrubbing medium sources 160 and responsively adjusts the amount of scrubbing media (preferably fuel, water, and chemical additives) 162 , 164 , and 166 input according to the composition of the effluent as measured.
  • scrubbing media preferably fuel, water, and chemical additives
  • thermopile detector system of the present invention.
  • abatable components in the effluent including but not limited to, tetraethyloxysilane, silane, silicon tetrafluoride, silicon-containing organic compounds, boranes, arsenic hydride, phosphine, hydrogen fluoride, fluorine, tungsten hexafluoride, hydrogen chloride, chlorine, titanium tetrachloride, perfluorocarbons, nitrous oxide, ammonium, hydrogen, oxygen, argon, and helium, may be analyzed by the thermopile detector system of the present invention.
  • Additional sensors such as temperature sensors, flow sensors, pressure transducers, ultraviolet spectrometers, mass spectrometers, and electrochemical sensors, may be provided for further measuring the flow rate, gas composition and concentration, pressure, and temperature of the effluent, so as to allow corresponding adjustment of the operational mode of the scrubber unit.
  • the IR thermopile detector system of the present invention may be used to analyze the effluent gas species emitted from a plasma enhanced chemical vapor deposition (PECVD) chamber, in which SiO 2 films are deposited using tetraethyloxysilane (TEOS) and which performs chamber cleaning by using SiF 4 after each deposition cycle. Therefore, during the deposition cycles, the IR detector system measures the real-time concentration of TEOS in the deposition effluent. During alternating cleaning cycles, the IR detector system measures the SiF 4 concentration. Measurements obtained by the IR detector system during the alternating deposition/cleaning cycles are provided in FIG. 4 . The information collected by the IR photometer can be used to adjust the settings of the downstream scrubber unit for abatement of TEOS and SiF 4 .
  • PECVD plasma enhanced chemical vapor deposition
  • TEOS tetraethyloxysilane
  • a transmission path with a smooth, reflective inner face is provided, which minimize the absorption and dissipation of IR radiation by the surface of such transmission path.
  • such inner surface of the transmission path is characterized by a roughness in a range of from about 0.012 ⁇ m Ra to about 1.80 ⁇ m Ra, more preferably from about 0.10 ⁇ m Ra to about 0.80 ⁇ m Ra, and most preferably from about 0.10 ⁇ m Ra to about 0.20 ⁇ m Ra.
  • Such inner surface may further be characterized by a reflectivity in a range of from about 70% to about 99%, preferably from about 92% to about 97%.
  • Such smooth, reflective inner surface may be provided by electropolishing or super polishing techniques.
  • the path length for each transmission path is the same, and the same IR source and thermopile detector are used.
  • the measurement results indicate that the highly polished transmission path provides much stronger signal strength than that of the moderately polished and non-polished transmission paths. provides much stronger signal strength than that of the moderately polished and non-polished transmission paths.
  • Process gas that contains particles or is susceptible to particles formation may form particle deposits along the transmission path of the IR radiation, which will absorb the IR radiation and significantly reduces the radiation intensity of the IR radiation transmitted.
  • the present invention therefore provides a purge gas near the interfacial spaces between the gas sampling region and the IR source as well as between the gas sampling region and the thermopile detector.
  • the purge gas flow provides a sufficient force to remove the particle deposits away from the IR source and the thermopile detector, so as to prevent such particles from interfering with the detection process.
  • FIG. 6 shows a gas sampling region 210 having an inlet 212 and an outlet 214 for flowing a particle-containing process gas 202 therethrough.
  • An IR source 220 is positioned at one side of such gas sampling region 210 and is isolated therefrom by an interfacial space 232
  • a thermopile detector 240 is positioned at the other side of such gas sampling region 210 and is isolated therefrom by an interfacial space 252 .
  • a purge gas 262 is introduced into such interfacial spaces 232 and 252 from a purge gas source (not shown), preferably through a porous media 264 , for forming an uniform flow of purge gas that moves away from the IR source 220 and the thermopile detector 240 toward the gas sampling region 210 .
  • Such flow of purge gas further generates vacuum at the dead-end spaces near the IR source 220 and the thermopile detector 240 , so as to force the particle deposits out of such dead-end spaces and discharge same into the process gas flow in the gas sampling region 210 .
  • the purge gas may be introduced into the interfacial spaces 232 and 252 along a direction that is substantially parallel to the process gas flow, as shown in FIG. 6 , which then flows through such interfacial spaces into the gas sampling region 210 in a direction that is substantially perpendicular to the process gas flow.
  • FIG. 7 shows an alternative embodiment of the present invention, in which the purge gas is introduced into the interfacial spaces 332 and 352 in a direction that is substantially perpendicular to the process gas flow and flows through such interfacial spaces along the same direction into to the gas sampling region 210 .
  • the purge gas may be provided to form a gas sheath surrounding the process gas flow, so as to prevent particles from escaping from the gas sampling region.
  • FIG. 8 shows a purge gas 362 that forms an annular sheath 466 around the particle-containing process gas flow. Such purge gas is flowed in a direction that is confluent with the process gas flow and is therefore discharged of the gas sampling region 410 together with the process gas.
  • external heating devices can be provided for heating at least a portion of the IR transmission path (including the IR transmission windows), so as to generate a thermal gradient or heat flux, which functions to prevent the particles from accessing and depositing on the internal surface of the IR transmission path.

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US10/668,489 US7129519B2 (en) 2002-05-08 2003-09-23 Monitoring system comprising infrared thermopile detector
KR1020067007696A KR20060064689A (ko) 2003-09-23 2004-09-10 적외선 써모파일 검출기를 포함하는 모니터링 시스템
CNB2004800312296A CN100433267C (zh) 2003-09-23 2004-09-10 包括红外热电堆探测器的监测系统
JP2006528035A JP2007506974A (ja) 2003-09-23 2004-09-10 赤外線熱電堆検出器を備える監視システム
EP04809711A EP1665352A4 (de) 2003-09-23 2004-09-10 Überwachungssystem mit infrarot-thermopile-detektor
PCT/US2004/029383 WO2005034187A2 (en) 2003-09-23 2004-09-10 Monitoring system comprising infrared thermopile detector
TW093128548A TWI346993B (en) 2003-09-23 2004-09-21 Monitoring system comprising infrared thermopile detector
US11/555,094 US7351976B2 (en) 2002-05-08 2006-10-31 Monitoring system comprising infrared thermopile detector
US12/060,686 US7723685B2 (en) 2002-05-08 2008-04-01 Monitoring system comprising infrared thermopile detector

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US10/140,848 US6617175B1 (en) 2002-05-08 2002-05-08 Infrared thermopile detector system for semiconductor process monitoring and control
US10/623,244 US7011614B2 (en) 2002-05-08 2003-07-18 Infrared thermopile detector system for semiconductor process monitoring and control
US10/668,489 US7129519B2 (en) 2002-05-08 2003-09-23 Monitoring system comprising infrared thermopile detector

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US7723685B2 (en) 2002-05-08 2010-05-25 Advanced Technology Materials, Inc. Monitoring system comprising infrared thermopile detector
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US20240319087A1 (en) * 2023-03-22 2024-09-26 Seiko Epson Corporation Spectroscopic Device and Shape Measurement Device
US12571681B2 (en) * 2023-03-22 2026-03-10 Seiko Epson Corporation Spectroscopic device and shape measurement device comprising an analysis optical system and a length measurement optical system

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KR20060064689A (ko) 2006-06-13
EP1665352A4 (de) 2007-09-12
US20040058488A1 (en) 2004-03-25
CN100433267C (zh) 2008-11-12
TW200518274A (en) 2005-06-01
EP1665352A2 (de) 2006-06-07
US7351976B2 (en) 2008-04-01
WO2005034187A3 (en) 2006-02-02
US20070200065A1 (en) 2007-08-30
JP2007506974A (ja) 2007-03-22
TWI346993B (en) 2011-08-11
CN1871691A (zh) 2006-11-29
WO2005034187A2 (en) 2005-04-14

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