US6923198B2 - Fully drainable weir valve - Google Patents

Fully drainable weir valve Download PDF

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Publication number
US6923198B2
US6923198B2 US10/390,350 US39035003A US6923198B2 US 6923198 B2 US6923198 B2 US 6923198B2 US 39035003 A US39035003 A US 39035003A US 6923198 B2 US6923198 B2 US 6923198B2
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Prior art keywords
weir
valve
flow duct
duct
axis
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US20040069343A1 (en
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Jeffrey J. McKenzie
Michael W. Johnson
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Entegris Inc
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Entegris Inc
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Assigned to ENTEGRIS, INC. reassignment ENTEGRIS, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: WELLS FARGO BANK NATIONAL ASSOCIATION
Assigned to GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT reassignment GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ADVANCED TECHNOLOGY MATERIALS, INC., ATMI PACKAGING, INC., ATMI, INC., ENTEGRIS, INC., POCO GRAPHITE, INC.
Assigned to GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT reassignment GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ADVANCED TECHNOLOGY MATERIALS, INC., ATMI PACKAGING, INC., ATMI, INC., ENTEGRIS, INC., POCO GRAPHITE, INC.
Assigned to ATMI, INC., ADVANCED TECHNOLOGY MATERIALS, INC., POCO GRAPHITE, INC., ENTEGRIS, INC., ATMI PACKAGING, INC. reassignment ATMI, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Assigned to ATMI PACKAGING, INC., POCO GRAPHITE, INC., ADVANCED TECHNOLOGY MATERIALS, INC., ENTEGRIS, INC., ATMI, INC. reassignment ATMI PACKAGING, INC. RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Assigned to GOLDMAN SACHS BANK USA reassignment GOLDMAN SACHS BANK USA SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ENTEGRIS, INC., SAES PURE GAS, INC.
Assigned to MORGAN STANLEY SENIOR FUNDING, INC. reassignment MORGAN STANLEY SENIOR FUNDING, INC. ASSIGNMENT OF PATENT SECURITY INTEREST RECORDED AT REEL/FRAME 048811/0679 Assignors: GOLDMAN SACHS BANK USA
Assigned to TRUIST BANK, AS NOTES COLLATERAL AGENT reassignment TRUIST BANK, AS NOTES COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CMC MATERIALS, INC., ENTEGRIS GP, INC., ENTEGRIS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, POCO GRAPHITE, INC., QED TECHNOLOGIES INTERNATIONAL, INC.
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/022—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising a deformable member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0491—Valve or valve element assembling, disassembling, or replacing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/598—With repair, tapping, assembly, or disassembly means
    • Y10T137/60—Assembling or disassembling flexible tube or sleeve type valve

Definitions

  • the present invention relates to valves, and more particularly, to plastic diaphragm valves having a weir-type seating surface.
  • Diaphragm valves provide excellent sealing and isolation characteristics to contain fluid being controlled and prevent migration of the controlled fluid. into the valve mechanisms or out of the valve.
  • Diaphragm valves utilize a resilient diaphragm and a valve shoulder to engage a valve seat and prevent the flow of fluid past the valve seat.
  • a weir-type diaphragm valve is a valve utilizing a resilient diaphragm that engages a weir to control flow of fluid over the weir. The diaphragm may be controllably lifted and sealed against the weir to selectively permit flow though the valve.
  • Weir-type diaphragm valves are often employed in the biotechnological, pharmaceutical, chemical, food processing, beverage, cosmetic, and semiconductor industries. These industries require valves that protect against product contamination and leakage within the valve, workplace and atmosphere. Weir-type diaphragm valves are well suited to meet these requirements because the mechanical valve parts are isolated from fluid flowing through the valve.
  • Weir-type diaphragm valves are commonly used to control the flow through a branch in a fluid distribution system or to deliver a sample of a fluid from a process.
  • Each of U.S. Pat. No's 5,065,980, 5,227,401, 5,222,523, 5,327,937 and 6,289,933 disclose diaphragm valves suitable for branch control and sampling. Often, it is desirable to mount such valves in a horizontal position, wherein the weir extends in a horizontal direction.
  • U.S. Pat. No. 6,289,933 has a plurality of horizontal surfaces that may retain fluids. Such stagnant or retained fluids may be a source for contamination in a process.
  • the process fluids generally must be kept ultra pure. Contamination of these processes may represent significant monetary losses. Therefore, separate cleaning steps must be employed to cleanse any stagnant or trapped fluids from the prior art valve designs. This extra step increases processing time and cost.
  • diaphragm valves were made of metal alloys. Such metal valves provide good durability and service life in basic fluid control applications.
  • metal alloys are not well suited to some process environments, such as pharmaceutical and semiconductor manufacturing. In those applications, the fluids often used are highly corrosive or caustic and also must be kept ultra pure. These corrosive fluids can erode the metal from the valve body and contaminate the ultra pure process fluids. Also, some metal alloys may act as catalysts causing the process fluids to undergo chemical reactions, thereby compromising end products, and potentially, worker safety.
  • Plastic lined metal valves were developed to allow traditional metal valve bodies to handle caustic fluids in specialized process applications.
  • the metal valve body is first formed by casting or machining. Then, a plastic or fluoropolymer is molded in the interior of the valve body where process fluids contact the body.
  • U.S. Pat. No. 4,538,638 discloses a plastic lined metal bodied diaphragm valve.
  • plastic lined metal valves and plastic lined plastic valves may provide the desired resistance to degradation by-process fluids, manufacturing costs are high. High costs are attributable to the complicated multi-step manufacturing process of molding a plastic lining in a support body.
  • the plastic lining may be subject to creep with respect to its surface underneath. Creep reduces the useful life of the expensive plastic lined valve.
  • plastic valves made entirely or almost entirely of fluoropolymers have become commercially viable. Such plastic valves are capable of providing a cost effective valve having desirable non-reactive and corrosive resistant properties ideally suited for use in pharmaceutical and semiconductor manufacturing applications.
  • U.S. Pat. Nos. 5,279,328 and 4,977,929 disclose plastic diaphragm valves. In certain applications, plastic bodied valves may also be provided with a plastic lining.
  • U.S. Pat. No. 4,538,638 discloses a plastic lined diaphragm valve.
  • fluoropolymer valves and plastic valves having fluoropolymer liners are well suited to withstanding caustic fluids, they are susceptible to dimensional degradation such as warpage and creep. Fluids used in industrial processes, such as the pharmaceutical, sanitary, and semiconductor industries, generally require the process fluids to be kept ultra pure. Components used in fluid delivery systems, such as valves, are routinely cleansed to ensure that contaminants do not become trapped in such components and thereby introduced into the process system.
  • the cleansing processes may involve exposure to high temperature steam for a sufficient amount of time to sterilize the component. Particularly when repeated numerous times, this sterilization process can cause the plastic in the valve to change dimension slightly, resulting in warpage. Creeping results when plastic is subject to stress over a period of time. The plastic component's dimensions can change from the stress. Due to such warpage and creep, tolerances, especially at the weir, are affected and leakage may result.
  • a fully draining valve apparatus in a preferred embodiment comprises an upper valve portion and a lower valve portion.
  • the upper valve portion preferably includes an upper valve housing or body, a resilient diaphragm and a valve actuator.
  • the lower valve portion comprises a lower valve housing or body that is preferably configured to mate with the upper valve housing to define a valve interior.
  • the lower valve body preferably has an integral weir, which in conjunction with the resilient diaphragm, defines a fluid passage.
  • the diaphragm is configured to sealingly engage and disengage with the weir as effected by the valve actuator.
  • the weir defines an upper surface that is angled slightly with respect to the horizon to provide an interior passage slope. Said slope causes fluid to flow back into passage instead of remaining in the passage.
  • a slope is also formed on a lower portion of the flow passage defined by the valve body to cause fluid to drain into the third duct of the valve.
  • the invention also includes the method of manufacturing a valve, preferably including the step of angling the horizontal surfaces within the fluid passages of the valve to promote full drainage of fluids that may otherwise accumulate.
  • a weir support member is disposable within the lower housing to support the weir.
  • an exoskeletal framework configured as the support collar extends circumferentially around the valve and supports the weir support member.
  • the valve body components may also comprise a plastic fluoropolymer lining for contacting fluids.
  • the invention also includes the method of manufacturing a reinforced plastic valve preferably including the step of providing a rigid support member to the weir of a lower valve housing.
  • An object and advantage of particular embodiments of the present invention is to provide for a fully drainable weir-type diaphragm valve.
  • An object and advantage of particular embodiments of the present invention is to provide a diaphragm valve wherein the weir is angled slightly above the horizontal to create a sloping surface.
  • An object and advantage of particular embodiments of the present invention is to provide a valve design that reduces the occurrence of retained fluids.
  • An object and advantage of particular embodiments of the present invention is to provide a valve design that reduces contamination of sterile or aseptic processes.
  • Another object, and advantage of particular embodiments of the present invention is to provide for a fluoropolymer diaphragm valve that is dimensionally tolerant to repeated sterilization processes.
  • Another object and advantage of particular embodiments of the present invention is to provide for a valve that is able to withstand repeated sterilization processes and that is also suitable to use in the pharmaceutical, biotechnological, chemical, and/or semiconductor industries.
  • Another object and advantage of particular embodiments of the present invention is to provide a means for reinforcing a plastic valve.
  • Another object and advantage of particular embodiments of the present invention is to provide for a method of reinforcing a plastic valve, thereby having improved resistance to warpage and creapage.
  • Another object and advantage of particular embodiments of the present invention is to provide a support for the weir of a plastic valve.
  • FIG. 1 is an exploded parts view of a diaphragm valve according to an embodiment of the present invention.
  • FIG. 2 is a perspective view of the assembled diaphragm valve of FIG. 1 .
  • FIG. 3 is another perspective view of the assembled diaphragm valve of FIG. 1 .
  • FIG. 4 is a side view of the lower portion of a diaphragm valve according to an embodiment of the present invention.
  • FIG. 5 is a side view of an assembled diaphragm valve according to an embodiment of the present invention.
  • FIG. 6 is an end view of an assembled diaphragm valve according to an embodiment of the present invention.
  • FIG. 7 is a partial cross sectional view of an assembled diaphragm valve according to an embodiment of the present invention taken along line A—A of FIG. 6 .
  • FIG. 8 is an exploded perspective view of a diaphragm valve according to an embodiment of the present invention.
  • FIGS. 1 , 2 and 3 A weir-type diaphragm valve 20 in accordance with the invention is illustrated in FIGS. 1 , 2 and 3 .
  • Such valve generally includes an upper valve portion 22 , a lower valve portion 24 , a bracket support framework 26 and a mounting bracket 28 .
  • a plurality of fasteners 30 are used to fasten the upper portion 12 , lower portion 14 bracket 28 and bracket mount 26 as shown in the assembly drawing of FIG. 1 .
  • an endoskeletal support member 32 may be used to add rigidity to the valve, which is often comprised of plastic.
  • valve portion 22 and lower valve portion 24 are used for convenience of description and that the valve of the present invention is not limited to the valve 20 being positioned such that the upper valve portion 22 must be vertically above lower valve portion 24 relative to the earth. In fact, a preferred operating position for the valve may include the upper valve portion 22 being positioned substantially to the side of the lower valve portion 24 .
  • the upper portion 22 includes a resilient diaphragm 38 and an actuator for controllably sealing against the valve seat 42 provided in the lower housing 24 .
  • the lower housing 24 shown in FIGS. 1 and 4 , comprises a central flow passage 44 , a first flow duct 46 , a second flow duct 48 , a third flow duct 50 and a valve seat 42 therein.
  • the valve seat 42 includes a weir 52 for isolating the third duct 50 from the first 46 and second 48 ducts when mated with the diaphragm 38 .
  • valve 20 is shown assembled and in position for mounting to an overhead surface with the attached bracket 28 .
  • An axis 56 is shown to indicate the normal horizontal H and vertical V orientation of the valve 20 .
  • a centerline C 1 drawn through the third duct 50 is parallel to the vertical axis V.
  • the horizontal axis H is normal to the vertical V.
  • a centerline C 2 through the upper valve portion 22 is not parallel to the horizontal H; rather, it is parallel to the line indicated as H′.
  • V′ is defined as normal to H′.
  • H′ is tilted at angle X to the horizontal H.
  • Angle X is preferably 5 degrees. However, those skilled in the art will recognize that X could include the following range 0° ⁇ 90° without departing from the spirit and scope of the present invention.
  • FIG. 7 indicates a partial sectional view of valve 20 taken along line A—A of FIG. 6 .
  • the central passage 44 includes a first inwardly facing surface 58 defined by the weir 52 .
  • the centerline C 2 of the weir 52 (which, in some embodiments, may also be the same as centerline C 2 of the upper housing 22 ) is offset from the horizontal H by X degrees. This produces a slope on the first surface 58 .
  • the first sloped surface 58 ensures that all fluids drain into the central passage 44 between the first 46 and second 48 ducts.
  • a second inwardly facing surface 60 is provided to the inside of the passage 44 defined by the lower housing 24 .
  • This slope X may be the same as for the first surface 58 , although it may be more of less depending on the application.
  • Second sloped surface 60 causes fluids in the central passage 44 to drain into the third duct 50 . The presence of these two sloped surfaces 58 and 60 allows all fluids to be fully drained from the valve 20 , thereby addressing the retained fluid problems of the prior art.
  • the valve may be reinforced, or supported, by the provision of the endoskeletal support member 32 as depicted in FIG. 8 .
  • Endoskeletal support member 32 is configured as a weir support member 62 and exoskeletal framework 64 configured as support collar 66 .
  • the weir support member 62 as shown in FIG. 8 , is preferably rod shaped having a first end 68 , a second end 70 , a longitudinal surface 72 and notches 74 in the longitudinal surface 72 at both first end 68 and second end 70 .
  • the weir support member 62 may be any suitably shaped elongated member. Those skilled in the art will recognize that many alternative embodiments of weir support member shape, such as polygonal, will provide the envisioned support without departing from the scope of the present invention.
  • the support collar 66 shown in FIG. 8 includes an upper bracket 76 and a lower bracket 78 .
  • the upper bracket 76 and lower bracket 78 are preferably approximately U-shaped and overlap when placed on the valve housing.
  • the slotted mount holes 82 aide in joining the upper bracket 76 to the lower bracket 78 and the valve upper portion 22 and lower portion 24 during assembly.
  • the lower bracket 78 may be provided with two mounting posts 90 that cooperate with the mounting slots 88 and upper mounting holes 84 of the valve upper portion 22 and lower portion 24 and slotted mount holes 97 of the upper bracket 76 for enabling the joining of the valve upper portion 22 and lower portion 24 .
  • the mounting posts 90 have a threaded portion 92 and a smooth portion 94 to provide a means for fastening the valve upper portion 22 and lower portion 24 together.
  • the lower bracket 78 also has two collar mounting holes 80 that communicate with respective collar mount holes 80 of the upper bracket 76 , the upper mounting holes 84 of the valve upper portion 22 and the lower mounting holes 64 of the valve lower portion 24 .
  • upper bracket 76 supports weir support member 62 at notches 74 thereby transferring force from weir 52 to weir support member 62 and thence to upper bracket 76 and lower bracket 78 .
  • This support prevents or reduces creep induced by pressure on weir 52 and other valve components. Thus, warpage and creep of the weir, the flanges and generally the valve body is inhibited.
  • the valve upper portion 22 and lower portion 24 are preferably formed of fluoropolymers, including but not limited to perfluoroalkoxy resin (PFA), polyvinylidene fluoride (PVDF) or other fluoropolymers. In certain applications, other plastics may be suitable, such as polyvinyl chloride (PVC), or polypropylene (PP).
  • PFA perfluoroalkoxy resin
  • PVDF polyvinylidene fluoride
  • other plastics may be suitable, such as polyvinyl chloride (PVC), or polypropylene (PP).
  • the body components are preferably injection molded, although they may be machined.
  • the wetted portion of the diaphragm 38 may be formed of polytetrafluoroethylene (PTFE).
  • the diaphragm may be composite with a layer adjacent the PTFE layer formed of EPDM.
  • the weir support member 62 and the support collar 66 are preferably constructed of stainless steel.
  • Stainless steel provides the desirable amount of rigidity and durability to provide the plastic valve with the desired amount of dimensional integrity.
  • other rigid materials such as carbon fiber filled PEEK or other polymers may be utilized.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Lift Valve (AREA)
US10/390,350 2002-03-18 2003-03-17 Fully drainable weir valve Expired - Lifetime US6923198B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/390,350 US6923198B2 (en) 2002-03-18 2003-03-17 Fully drainable weir valve

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36549202P 2002-03-18 2002-03-18
US10/390,350 US6923198B2 (en) 2002-03-18 2003-03-17 Fully drainable weir valve

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US20040069343A1 US20040069343A1 (en) 2004-04-15
US6923198B2 true US6923198B2 (en) 2005-08-02

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US (1) US6923198B2 (de)
EP (1) EP1490613A4 (de)
JP (1) JP2005535837A (de)
KR (1) KR20040098664A (de)
CN (1) CN1653286A (de)
AU (1) AU2003220362A1 (de)
TW (1) TW200307102A (de)
WO (1) WO2003081099A1 (de)

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US20080202606A1 (en) * 2007-02-27 2008-08-28 O'hara Dennis E Methods and apparatus to monitor diaphragm condition
US20090072172A1 (en) * 2005-04-25 2009-03-19 Joseph Peter Marcilese Valve bonnet assembly
US20130299726A1 (en) * 2012-05-08 2013-11-14 Ihara Science Corporation Joint
US9243718B2 (en) 2012-08-27 2016-01-26 Itt Manufacturing Enterprises Llc. Diaphragm valve having spherically-shaped valve body and diaphragm sealing surface

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JP4603875B2 (ja) * 2004-12-27 2010-12-22 シーケーディ株式会社 流体用機器の取り付け構造
US7731873B2 (en) * 2005-08-09 2010-06-08 Coopervision International Holding Company, Lp Contact lens mold assemblies and systems and methods of producing same
JP5239179B2 (ja) * 2007-03-13 2013-07-17 独立行政法人産業技術総合研究所 背圧弁
FR2920864A1 (fr) * 2007-09-12 2009-03-13 Air Liquide Appareil et procede de transfert d'un liquide cryogenique
JP4995853B2 (ja) * 2009-03-04 2012-08-08 シーケーディ株式会社 マニホールドバルブ
CN102537426A (zh) * 2012-01-16 2012-07-04 南京金日轻工科技发展有限公司 一种四通隔膜阀

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AU2003220362A1 (en) 2003-10-08
US20040069343A1 (en) 2004-04-15
CN1653286A (zh) 2005-08-10
EP1490613A1 (de) 2004-12-29
WO2003081099A1 (en) 2003-10-02
EP1490613A4 (de) 2005-09-07
KR20040098664A (ko) 2004-11-20
JP2005535837A (ja) 2005-11-24
TW200307102A (en) 2003-12-01

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