US6904067B2 - Back facet wavelength locker tuning and assembly method - Google Patents

Back facet wavelength locker tuning and assembly method Download PDF

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Publication number
US6904067B2
US6904067B2 US10/264,464 US26446402A US6904067B2 US 6904067 B2 US6904067 B2 US 6904067B2 US 26446402 A US26446402 A US 26446402A US 6904067 B2 US6904067 B2 US 6904067B2
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United States
Prior art keywords
detector
lens
flexure
recited
wavelength locker
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US10/264,464
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English (en)
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US20040070840A1 (en
Inventor
Sylvain M. Colin
Raghuram Narayan
Owen B. Pine
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Neophotonics Corp
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Intel Corp
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Priority to US10/264,464 priority Critical patent/US6904067B2/en
Assigned to INTEL CORPORATION reassignment INTEL CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: COLIN, SYLVAIN M., NARAYAN, RAGHURAM, PINE, OWEN B.
Priority to DE60323382T priority patent/DE60323382D1/de
Priority to JP2004541662A priority patent/JP2006502571A/ja
Priority to AT03774540T priority patent/ATE407467T1/de
Priority to AU2003282923A priority patent/AU2003282923A1/en
Priority to CNB2003801050544A priority patent/CN100440654C/zh
Priority to EP03774540A priority patent/EP1547214B1/en
Priority to TW092127327A priority patent/TWI230802B/zh
Priority to MYPI20033758A priority patent/MY128247A/en
Priority to PCT/US2003/031388 priority patent/WO2004032295A1/en
Publication of US20040070840A1 publication Critical patent/US20040070840A1/en
Publication of US6904067B2 publication Critical patent/US6904067B2/en
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Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION SECURITY AGREEMENT Assignors: EMCORE CORPORATION, EMCORE SOLAR POWER, INC.
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Assigned to EMCORE CORPORATION reassignment EMCORE CORPORATION RELEASE OF SECURITY INTEREST IN CERTAIN PATENT COLLATERAL RECORDED AT REEL 26304 FRAME 0142 Assignors: WELLS FARGO, NATIONAL ASSOCIATION
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4246—Bidirectionally operating package structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687—Stabilising the frequency of the laser
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236—Fixing or mounting methods of the aligned elements
    • G02B6/4237—Welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02251—Out-coupling of light using optical fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/023—Mount members, e.g. sub-mount members
    • H01S5/02325—Mechanically integrated components on mount members or optical micro-benches

Definitions

  • Embodiments of the present invention are directed to wavelength lockers and, more particularly, to arrangements and methods for tuning wavelength lockers.
  • Wavelength division multiplexing is a technique used to transmit multiple channels of data simultaneously over the same optic fiber.
  • different data channels are modulated using light having different wavelengths or, colors if you will, for each channel.
  • the fiber can simultaneously carry multiple channels in this manner.
  • these multiplex channels are easily separated prior to demodulation using appropriate wavelength filtering techniques.
  • DWDM Dense Wavelength Division Multiplexing
  • wavelength drift of up to 0.15 nm from their set frequency over about a fifteen year period. In a DWDM system this wavelength drift is unacceptable as a given channel may drift and interfere with adjacent channels causing cross talk.
  • a wavelength locker to measure drift frequency vs. set frequency. This information can be fed back to a controller such that, various parameters, such as temperature or drive current, of the laser diode can be adjusted to compensate for the effects of aging and keep the diode laser operating at its set frequency.
  • Most laser transmitters with an integrated wavelength locker use either an etalon or thin film filter to measure the laser wavelength variation. In order to work accurately, it is important that the locker be tuned by precision alignment with the collimated beam being monitored.
  • a typical wavelength locker requires a placement accuracy of the etalon and collimated beam within better than +/ ⁇ 0.5 degree.
  • FIG. 1 is a plan view of a wavelength locker according to one embodiment of the invention.
  • FIG. 2 is a block diagram showing a simplified view of the wavelength locker of FIG. 1 ;
  • FIG. 3 is a graph plotting output current from the wavelength locker detectors against frequency
  • FIG. 4 is a graph showing peak transmission frequency verses beam angle of incidence on the etalon.
  • FIG. 5 is a block diagram showing a flexure used to adjust the height of a collimating lens.
  • one embodiment of the present invention shows a wavelength locker package having a quasi-planar substrate 2 having a positioning floor 4 .
  • First and second detectors, 10 and 12 are attached to the floor 4 .
  • a laser 14 produces a laser beam centered about a set frequency or wavelength.
  • the laser 14 emits a light beam from both a front facet 16 and a back facet 18 .
  • the actual modulated light carrying the data channel emerges from the front facet 16 , which is coupled to an optical fiber 20 .
  • a lens 28 such as a graded index (GRIN) lens, is used to collimate the beam 22 .
  • GRIN graded index
  • the fiber 20 is mounted using a miniature flexure 30 which allows for a small amount of vertical adjustment.
  • the flexure 30 is made of thin spring steel that has been etched or stamped, then bent in a press.
  • the flexure 30 may comprise of two or more legs 32 which rest on the substrate surface or positioning floor 4 .
  • the legs are joined by a bridge 34 that supports or clamps the fiber 20 .
  • the bridge 34 is translated in the y direction, opposite legs 32 give elastically in opposite x directions.
  • the flexure 30 may be designed so that in its natural or non-flexed state, the optical axis of the optical component attached to the bridge rests slightly above the optical plane of the package. Final adjustment of the height is obtained by applying pressure to the flexure 30 , thereby lowering the bridge 34 height. Dragging the flexure 30 in the plane parallel to the plane of the substrate may be used to correct the lateral position. When adequate alignment is reached, the legs 32 are permanently attached to the floor 4 or substrate 2 . The attachment may be by, for example, laser welding, soldering, or adhesive bonding.
  • the flexure 30 has more than two legs.
  • the first pair of legs is attached to the frame after coarse optical alignment.
  • the flexure is then finely realigned, using the residual flexibility left after the two first legs are attached. When the optimum position is reached, the remaining legs are attached.
  • Various flexure designs are described in U.S. Pat. Nos. 6,207,950 and 6,227,724.
  • a collimated beam 22 emerges from lens 28 and thereafter encounters a splitter 24 that splits the beam 22 into two additional beams.
  • the first beam is shown reflected at an angle normal to the original beam 22 .
  • This reflected beam passes through an etalon (filter) 26 and then falls on the first detector 10 .
  • the second beam passes straight through the splitter 24 and falls upon the second detector 12 .
  • the portion of the beam that traverses the etalon 26 is a function of both the beam's power and the wavelength of the beam.
  • the portion of the beam that passes directly from the splitter 24 to the second detector 12 is a function of the beam's power.
  • FIG. 2 shows a simplified block diagram of the wavelength locker according to one embodiment of the invention.
  • this type of wavelength locker is very sensitive to alignment with the collimated beam 22 and raises many packaging concerns.
  • ⁇ 0 is the peak frequency at normal incidence
  • ⁇ is the angle of incidence in air
  • FIG. 3 there is shown a graph plotting current, I 1 and I 2 , output from the detectors, 10 and 12 , respectively, against the frequency (i.e., 1/wavelength) of the laser beam.
  • the output from detector 10 (I 1 ) comprises a frequency component and a power component.
  • the output from detector 12 (I 2 ) comprises the laser's output beam power component and is therefore illustrated as a horizontal line.
  • the output I 1 from detector 10 comprises both a power component and a wavelength component and is therefore illustrated as a waveform shifted in the positive direction along the y axis.
  • the wavelength locker monitors changes in wavelength or frequency.
  • this is sometimes difficult when monitored channel falls on either a peak or a trough of the frequency waveform.
  • ITU International Telecommunication Union
  • tuning the angle of incidence ⁇ is desirable to change the phase of the waveform from I 1 to I 1 ′. This allows the wavelength locker to monitor a more suitable portion of the waveform 33 where small changes in dl/dv can be more readily detected and providing a more accurate reading.
  • FIG. 4 shows a graph plotting frequency shift against the beam angle of incidence.
  • the angle of incidence ⁇ is 0 degrees
  • the frequency shift is 0.
  • the measured wavelength currently being output by the laser 14 is very sensitive to the angle of incident.
  • a shift in the angle of incident of less that 1 degree results in a 10 GHz measured frequency shift.
  • This skew is exponential in nature as a rotation of the etalon 26 and detector 10 to the collimated beam of as little as 2 degrees causes a measured frequency shift of greater than 50 GHz.
  • in order to shift the waveform I 1 to I 1 ′ as shown in FIG. 3 only slight changes in the angle of incidence is need.
  • One way of changing the angle of incidence ⁇ is by controlling the rotation of the etalon 26 and first detector 10 relative to the beam. That is, when mounting these items during the manufacturing process, care must be taken to ensure that they are positioned so that the angle is precisely rotated to the desired angle from zero (i.e., so that the portion of the beam reflected from the splitter 24 ′ is slightly rotated from the normal to the etalon 26 and detector 10 ). However, in practice this is sometimes difficult to achieve and some fine tuning of the wavelength locker components may be necessary after the various components are fixed in place relative to the substrate.
  • fine tuning of the wavelength locker can be achieved simply by adjusting the position of the flexure 36 , and thus the position of the lens 28 (i.e., in the x and/or y-directions). That is, translating the lens 28 up and down and side to side relative to the substrate 2 has the same effect as rotating the detector 10 and etalon 26 relative to the beam reflected from the splitter 24 and thus changes the angle of incidence.
  • fine tuning of the angle of incidence can be achieved by using the machines already developed for flexure coupling.
  • a lens mount 36 is used that allows the lens to be easily adjusted in the x or y-directions.
  • the lens mount comprises a flexure 36 .
  • a lens flexure 36 is used to mount the lens 28 relative to the substrate 2 .
  • FIG. 5 shows a front view looking into the lens 28 .
  • the lens flexure 36 may be designed so that in its natural or non-flexed state, the optical axis of the lens 28 mounted thereto rests slightly above the optical plane of the package. Final adjustment of the height is obtained by applying pressure to the flexure 36 , therefore lowering the lens 28 height. Lateral positioning of the lens 28 is achieved by translating the legs 38 of the flexure in the x-directions When adequate alignment is reached, the legs 38 are permanently attached to the floor or substrate 2 (not shown in FIG. 5 ). In this case, alignment is reached when the angle of incidence, ⁇ , between the beam reflected from the splitter 24 and the etalon 26 and detector 10 is shifted to a desired position as illustrated in FIG. 3 .
  • the attachment may be by, for example, laser welding, soldering, adhesive bonding or any other suitable method.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Optical Communication System (AREA)
  • Semiconductor Lasers (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
US10/264,464 2002-10-03 2002-10-03 Back facet wavelength locker tuning and assembly method Expired - Lifetime US6904067B2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
US10/264,464 US6904067B2 (en) 2002-10-03 2002-10-03 Back facet wavelength locker tuning and assembly method
DE60323382T DE60323382D1 (de) 2002-10-03 2003-10-02 Rückflächenwellenlängenverriegelungsvorrichtung, abstimm- und zusammenbauverfahren
JP2004541662A JP2006502571A (ja) 2002-10-03 2003-10-02 後面波長ロッカーの同調および組立方法
AT03774540T ATE407467T1 (de) 2002-10-03 2003-10-02 Rückflächenwellenlängenverriegelungsvorrichtung abstimm- und zusammenbauverfahren
AU2003282923A AU2003282923A1 (en) 2002-10-03 2003-10-02 Back facet wavelength locker, tuning and assembly method
CNB2003801050544A CN100440654C (zh) 2002-10-03 2003-10-02 背面波长锁定装置的调整和装配方法
EP03774540A EP1547214B1 (en) 2002-10-03 2003-10-02 Back facet wavelength locker, tuning and assembly method
TW092127327A TWI230802B (en) 2002-10-03 2003-10-02 Back facet wavelength locker tuning and assembly method
MYPI20033758A MY128247A (en) 2002-10-03 2003-10-02 Back facet wavelength locker tuning and assembly method
PCT/US2003/031388 WO2004032295A1 (en) 2002-10-03 2003-10-02 Back facet wavelength locker, tuning and assembly method

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Application Number Priority Date Filing Date Title
US10/264,464 US6904067B2 (en) 2002-10-03 2002-10-03 Back facet wavelength locker tuning and assembly method

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US20040070840A1 US20040070840A1 (en) 2004-04-15
US6904067B2 true US6904067B2 (en) 2005-06-07

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US (1) US6904067B2 (ja)
EP (1) EP1547214B1 (ja)
JP (1) JP2006502571A (ja)
CN (1) CN100440654C (ja)
AT (1) ATE407467T1 (ja)
AU (1) AU2003282923A1 (ja)
DE (1) DE60323382D1 (ja)
MY (1) MY128247A (ja)
TW (1) TWI230802B (ja)
WO (1) WO2004032295A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
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US20040165624A1 (en) * 2002-11-08 2004-08-26 James Stewart Age compensation in optoelectronic modules with integrated temperture control
US20060062259A1 (en) * 2004-09-21 2006-03-23 Franco Delpiano Optical wavelength control system and related method of assembly
US20080049316A1 (en) * 2006-08-25 2008-02-28 Fujitsu Limited Wavelength locker

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US20130156054A1 (en) * 2010-08-06 2013-06-20 University of North Texas System Monolithic, fiber-to-fiber coupled nonlinear resonator for brewster cut periodically poled crystals
CN103682971B (zh) * 2012-09-17 2016-05-25 华为技术有限公司 激光器波长锁定的方法及装置
CN105511029B (zh) * 2014-09-25 2019-06-28 青岛海信宽带多媒体技术有限公司 一种光模块及光模块中激光器波长偏移的调整方法、装置
CN107024744A (zh) * 2016-01-29 2017-08-08 青岛海信宽带多媒体技术有限公司 一种光模块及波长监控方法
CN106989832B (zh) * 2017-03-23 2019-03-12 中国科学院国家天文台 用于窄带滤光器不同视场波长漂移的测量装置和改正方法
CN108387980A (zh) * 2018-03-14 2018-08-10 青岛海信宽带多媒体技术有限公司 光学次模块及光模块
CN112018597A (zh) * 2020-09-09 2020-12-01 成都天奥电子股份有限公司 外腔半导体激光器
CN114725768A (zh) * 2022-03-22 2022-07-08 武汉光迅科技股份有限公司 一种波长锁定器及波长锁定装置

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US6207950B1 (en) * 1999-01-11 2001-03-27 Lightlogic, Inc. Optical electronic assembly having a flexure for maintaining alignment between optical elements
US6227724B1 (en) 1999-01-11 2001-05-08 Lightlogic, Inc. Method for constructing an optoelectronic assembly
EP1158630A1 (en) 2000-04-25 2001-11-28 Alcatel Wavelength stabilization monitor and method for adjusting the working wavelength of said monitor
US6400739B1 (en) 1998-06-22 2002-06-04 Siemens Aktiengesellschaft Wavelength-stabilized laser configuration

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EP0970550B1 (de) * 1997-03-26 2003-05-28 Infineon Technologies AG Lasermodul mit wellenlängenstabilisierung
JPH11251673A (ja) * 1998-02-27 1999-09-17 Nec Corp レーザ信号の波長制御回路

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US6400739B1 (en) 1998-06-22 2002-06-04 Siemens Aktiengesellschaft Wavelength-stabilized laser configuration
US6207950B1 (en) * 1999-01-11 2001-03-27 Lightlogic, Inc. Optical electronic assembly having a flexure for maintaining alignment between optical elements
US6227724B1 (en) 1999-01-11 2001-05-08 Lightlogic, Inc. Method for constructing an optoelectronic assembly
EP1158630A1 (en) 2000-04-25 2001-11-28 Alcatel Wavelength stabilization monitor and method for adjusting the working wavelength of said monitor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040165624A1 (en) * 2002-11-08 2004-08-26 James Stewart Age compensation in optoelectronic modules with integrated temperture control
US7058099B2 (en) * 2002-11-08 2006-06-06 Finisar Corporation Age compensation in optoelectronic modules with integrated temperature control
US20060062259A1 (en) * 2004-09-21 2006-03-23 Franco Delpiano Optical wavelength control system and related method of assembly
US20080049316A1 (en) * 2006-08-25 2008-02-28 Fujitsu Limited Wavelength locker
US7936509B2 (en) * 2006-08-25 2011-05-03 Fujitsu Limited Wavelength locker

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