US6887578B2 - Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition - Google Patents

Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition Download PDF

Info

Publication number
US6887578B2
US6887578B2 US10/282,905 US28290502A US6887578B2 US 6887578 B2 US6887578 B2 US 6887578B2 US 28290502 A US28290502 A US 28290502A US 6887578 B2 US6887578 B2 US 6887578B2
Authority
US
United States
Prior art keywords
organosilicon
fluorocarbon
thin film
monomer
reactive species
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US10/282,905
Other languages
English (en)
Other versions
US20030138645A1 (en
Inventor
Karen K. Gleason
Shashi K. Murthy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
Original Assignee
Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Priority to US10/282,905 priority Critical patent/US6887578B2/en
Assigned to MASSACHUSETTS INSTITUTE OF TECHNOLOGY reassignment MASSACHUSETTS INSTITUTE OF TECHNOLOGY ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: GLEASON, KAREN K., MURTHY, SHASHI K.
Publication of US20030138645A1 publication Critical patent/US20030138645A1/en
Application granted granted Critical
Publication of US6887578B2 publication Critical patent/US6887578B2/en
Assigned to NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT reassignment NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Assigned to NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT reassignment NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Assigned to NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT reassignment NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF HEALTH AND HUMAN SERVICES (DHHS), U.S. GOVERNMENT CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). Assignors: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D4/00Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B05D5/08Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
    • B05D5/083Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/50Multilayers
    • B05D7/56Three layers or more
    • B05D7/58No clear coat specified
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber
    • Y10T428/2929Bicomponent, conjugate, composite or collateral fibers or filaments [i.e., coextruded sheath-core or side-by-side type]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber
    • Y10T428/2929Bicomponent, conjugate, composite or collateral fibers or filaments [i.e., coextruded sheath-core or side-by-side type]
    • Y10T428/2931Fibers or filaments nonconcentric [e.g., side-by-side or eccentric, etc.]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913Rod, strand, filament or fiber
    • Y10T428/2933Coated or with bond, impregnation or core
    • Y10T428/2936Wound or wrapped core or coating [i.e., spiral or helical]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/3154Of fluorinated addition polymer from unsaturated monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31652Of asbestos
    • Y10T428/31663As siloxane, silicone or silane
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31855Of addition polymer from unsaturated monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31855Of addition polymer from unsaturated monomers
    • Y10T428/3188Next to cellulosic
    • Y10T428/31895Paper or wood
    • Y10T428/31906Ester, halide or nitrile of addition polymer
US10/282,905 2001-10-30 2002-10-29 Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition Expired - Fee Related US6887578B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/282,905 US6887578B2 (en) 2001-10-30 2002-10-29 Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US34091101P 2001-10-30 2001-10-30
US10/282,905 US6887578B2 (en) 2001-10-30 2002-10-29 Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition

Publications (2)

Publication Number Publication Date
US20030138645A1 US20030138645A1 (en) 2003-07-24
US6887578B2 true US6887578B2 (en) 2005-05-03

Family

ID=23335439

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/282,905 Expired - Fee Related US6887578B2 (en) 2001-10-30 2002-10-29 Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition

Country Status (3)

Country Link
US (1) US6887578B2 (US20030138645A1-20030724-C00010.png)
EP (1) EP1448807A4 (US20030138645A1-20030724-C00010.png)
WO (1) WO2003038143A1 (US20030138645A1-20030724-C00010.png)

Cited By (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060063059A1 (en) * 2004-07-01 2006-03-23 Ceramatec, Inc. Amorphous, non-oxide seals for solid electrolyte or mixed electrolyte cells
US20060151884A1 (en) * 2002-11-28 2006-07-13 Daiji Hara Insulatng film material containing organic silane or organic siloxane compound, method for produing sane, and semiconductor device
US20060172065A1 (en) * 2005-02-01 2006-08-03 Carlotto John A Vacuum deposition of coating materials on powders
US20070032620A1 (en) * 2005-08-05 2007-02-08 Massachusetts Institute Of Technology Chemical vapor deposition of hydrogel films
US20070299239A1 (en) * 2006-06-27 2007-12-27 Air Products And Chemicals, Inc. Curing Dielectric Films Under A Reducing Atmosphere
US20080188836A1 (en) * 2007-02-02 2008-08-07 Boston Scientific Scimed, Inc. Medical devices having nanoporous coatings for controlled therapeutic agent delivery
US20080241377A1 (en) * 2007-03-29 2008-10-02 Tokyo Electron Limited Vapor deposition system and method of operating
US20080244908A1 (en) * 2007-04-04 2008-10-09 Robert Petcavich Cutting tool
US20090226614A1 (en) * 2008-03-04 2009-09-10 Tokyo Electron Limited Porous gas heating device for a vapor deposition system
US20090223452A1 (en) * 2008-03-07 2009-09-10 Tokyo Electron Limited Gas heating device for a vapor deposition system
US20100247803A1 (en) * 2009-03-24 2010-09-30 Tokyo Electron Limited Chemical vapor deposition method
WO2010144167A1 (en) * 2009-06-08 2010-12-16 Innovanano, Inc. Hydrophobic materials made by vapor deposition coating and applications thereof
US20110061595A1 (en) * 2009-09-14 2011-03-17 Tokyo Electron Limited High temperature gas heating device for a vapor deposition system
US20110126762A1 (en) * 2007-03-29 2011-06-02 Tokyo Electron Limited Vapor deposition system
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US20110186537A1 (en) * 2008-09-22 2011-08-04 Becton, Dickinson And Company Systems, Apparatus and Methods for Coating the Interior of a Container Using a Photolysis and/or Thermal Chemical Vapor Deposition Process
US20130095329A1 (en) * 2010-07-22 2013-04-18 Jin Hyong Lim Fluorine-based polymer thin film and method for preparing same
US8512796B2 (en) 2009-05-13 2013-08-20 Si02 Medical Products, Inc. Vessel inspection apparatus and methods
US8814862B2 (en) 2005-05-12 2014-08-26 Innovatech, Llc Electrosurgical electrode and method of manufacturing same
US8852347B2 (en) 2010-06-11 2014-10-07 Tokyo Electron Limited Apparatus for chemical vapor deposition control
US8889225B2 (en) 2012-12-21 2014-11-18 The Gillette Company Chemical vapor deposition of fluorocarbon polymers
US9139910B2 (en) 2010-06-11 2015-09-22 Tokyo Electron Limited Method for chemical vapor deposition control
US9209017B2 (en) 2014-03-26 2015-12-08 International Business Machines Corporation Advanced ultra low k SiCOH dielectrics prepared by built-in engineered pore size and bonding structured with cyclic organosilicon precursors
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9339770B2 (en) 2013-11-19 2016-05-17 Applied Membrane Technologies, Inc. Organosiloxane films for gas separations
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9498934B2 (en) 2013-02-15 2016-11-22 Massachusetts Institute Of Technology Grafted polymer surfaces for dropwise condensation, and associated methods of use and manufacture
US9541480B2 (en) 2011-06-29 2017-01-10 Academia Sinica Capture, purification, and release of biological substances using a surface coating
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9630206B2 (en) 2005-05-12 2017-04-25 Innovatech, Llc Electrosurgical electrode and method of manufacturing same
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10107726B2 (en) 2016-03-16 2018-10-23 Cellmax, Ltd. Collection of suspended cells using a transferable membrane
US10112198B2 (en) 2014-08-26 2018-10-30 Academia Sinica Collector architecture layout design
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US10495644B2 (en) 2014-04-01 2019-12-03 Academia Sinica Methods and systems for cancer diagnosis and prognosis
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US11393679B2 (en) 2016-06-13 2022-07-19 Gvd Corporation Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US11679412B2 (en) 2016-06-13 2023-06-20 Gvd Corporation Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7713297B2 (en) 1998-04-11 2010-05-11 Boston Scientific Scimed, Inc. Drug-releasing stent with ceramic-containing layer
US9725805B2 (en) * 2003-06-27 2017-08-08 Spts Technologies Limited Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
US20050271893A1 (en) * 2004-06-04 2005-12-08 Applied Microstructures, Inc. Controlled vapor deposition of multilayered coatings adhered by an oxide layer
US7638167B2 (en) * 2004-06-04 2009-12-29 Applied Microstructures, Inc. Controlled deposition of silicon-containing coatings adhered by an oxide layer
US20040261703A1 (en) * 2003-06-27 2004-12-30 Jeffrey D. Chinn Apparatus and method for controlled application of reactive vapors to produce thin films and coatings
KR100762573B1 (ko) * 2004-06-04 2007-10-01 어플라이드 마이크로스트럭쳐스, 인코포레이티드 산화물층에 의해 부착된 다층 코팅의 제어되는 기상 증착
US7879396B2 (en) * 2004-06-04 2011-02-01 Applied Microstructures, Inc. High aspect ratio performance coatings for biological microfluidics
US7695775B2 (en) * 2004-06-04 2010-04-13 Applied Microstructures, Inc. Controlled vapor deposition of biocompatible coatings over surface-treated substrates
US7399668B2 (en) 2004-09-30 2008-07-15 3M Innovative Properties Company Method for making electronic devices having a dielectric layer surface treatment
US20060127443A1 (en) * 2004-12-09 2006-06-15 Helmus Michael N Medical devices having vapor deposited nanoporous coatings for controlled therapeutic agent delivery
US20060129215A1 (en) * 2004-12-09 2006-06-15 Helmus Michael N Medical devices having nanostructured regions for controlled tissue biocompatibility and drug delivery
US7563734B2 (en) * 2005-04-11 2009-07-21 Massachusetts Institute Of Technology Chemical vapor deposition of antimicrobial polymer coatings
US20070005024A1 (en) * 2005-06-10 2007-01-04 Jan Weber Medical devices having superhydrophobic surfaces, superhydrophilic surfaces, or both
US7722979B2 (en) * 2005-10-14 2010-05-25 Gm Global Technology Operations, Inc. Fuel cells with hydrophobic diffusion medium
US20070224235A1 (en) 2006-03-24 2007-09-27 Barron Tenney Medical devices having nanoporous coatings for controlled therapeutic agent delivery
US8187620B2 (en) 2006-03-27 2012-05-29 Boston Scientific Scimed, Inc. Medical devices comprising a porous metal oxide or metal material and a polymer coating for delivering therapeutic agents
US8067258B2 (en) 2006-06-05 2011-11-29 Applied Microstructures, Inc. Protective thin films for use during fabrication of semiconductors, MEMS, and microstructures
US8815275B2 (en) 2006-06-28 2014-08-26 Boston Scientific Scimed, Inc. Coatings for medical devices comprising a therapeutic agent and a metallic material
JP2009542359A (ja) 2006-06-29 2009-12-03 ボストン サイエンティフィック リミテッド 選択的被覆部を備えた医療装置
JP2010503469A (ja) 2006-09-14 2010-02-04 ボストン サイエンティフィック リミテッド 薬物溶出性皮膜を有する医療デバイス
DE102006048658B4 (de) * 2006-10-14 2014-03-27 Khs Corpoplast Gmbh PICVD-Beschichtung für Kunststoffbehälter und Verfahren zu deren Herstellung
US7981150B2 (en) 2006-11-09 2011-07-19 Boston Scientific Scimed, Inc. Endoprosthesis with coatings
WO2008069894A2 (en) 2006-11-13 2008-06-12 The Regents Of The University Of Colorado, A Body Corporate Molecular layer deposition process for making organic or organic-inorganic polymers
US8431149B2 (en) 2007-03-01 2013-04-30 Boston Scientific Scimed, Inc. Coated medical devices for abluminal drug delivery
US8070797B2 (en) 2007-03-01 2011-12-06 Boston Scientific Scimed, Inc. Medical device with a porous surface for delivery of a therapeutic agent
US8067054B2 (en) 2007-04-05 2011-11-29 Boston Scientific Scimed, Inc. Stents with ceramic drug reservoir layer and methods of making and using the same
US7976915B2 (en) 2007-05-23 2011-07-12 Boston Scientific Scimed, Inc. Endoprosthesis with select ceramic morphology
JP5220106B2 (ja) * 2007-06-22 2013-06-26 ザ・リージエンツ・オブ・ザ・ユニバーシティ・オブ・コロラド 原子層堆積法及び分子層堆積法を用いて製造された有機電子デバイス用の保護被膜
US7942926B2 (en) 2007-07-11 2011-05-17 Boston Scientific Scimed, Inc. Endoprosthesis coating
US8002823B2 (en) 2007-07-11 2011-08-23 Boston Scientific Scimed, Inc. Endoprosthesis coating
WO2009012479A1 (en) * 2007-07-19 2009-01-22 Swagelok Company Coated seals
JP2010533563A (ja) 2007-07-19 2010-10-28 ボストン サイエンティフィック リミテッド 吸着抑制表面を有する内部人工器官
US8815273B2 (en) 2007-07-27 2014-08-26 Boston Scientific Scimed, Inc. Drug eluting medical devices having porous layers
US7931683B2 (en) 2007-07-27 2011-04-26 Boston Scientific Scimed, Inc. Articles having ceramic coated surfaces
US8221822B2 (en) 2007-07-31 2012-07-17 Boston Scientific Scimed, Inc. Medical device coating by laser cladding
EP2185103B1 (en) 2007-08-03 2014-02-12 Boston Scientific Scimed, Inc. Coating for medical device having increased surface area
US7938855B2 (en) 2007-11-02 2011-05-10 Boston Scientific Scimed, Inc. Deformable underlayer for stent
US8029554B2 (en) 2007-11-02 2011-10-04 Boston Scientific Scimed, Inc. Stent with embedded material
US8216632B2 (en) 2007-11-02 2012-07-10 Boston Scientific Scimed, Inc. Endoprosthesis coating
US8388678B2 (en) * 2007-12-12 2013-03-05 Boston Scientific Scimed, Inc. Medical devices having porous component for controlled diffusion
US20090263668A1 (en) * 2008-04-21 2009-10-22 3M Innovative Properties Company Durable coating of an oligomer and methods of applying
US8920491B2 (en) 2008-04-22 2014-12-30 Boston Scientific Scimed, Inc. Medical devices having a coating of inorganic material
WO2009132176A2 (en) 2008-04-24 2009-10-29 Boston Scientific Scimed, Inc. Medical devices having inorganic particle layers
EP2303350A2 (en) 2008-06-18 2011-04-06 Boston Scientific Scimed, Inc. Endoprosthesis coating
US20100092535A1 (en) * 2008-10-10 2010-04-15 Medtronic Vascular, Inc. Nanoporous Drug Delivery System
US8231980B2 (en) 2008-12-03 2012-07-31 Boston Scientific Scimed, Inc. Medical implants including iridium oxide
US8071156B2 (en) 2009-03-04 2011-12-06 Boston Scientific Scimed, Inc. Endoprostheses
US8287937B2 (en) 2009-04-24 2012-10-16 Boston Scientific Scimed, Inc. Endoprosthese
US8900663B2 (en) 2009-12-28 2014-12-02 Gvd Corporation Methods for coating articles
US20130046375A1 (en) 2011-08-17 2013-02-21 Meng Chen Plasma modified medical devices and methods
WO2013102011A2 (en) * 2011-12-30 2013-07-04 Gvd Corporation Coatings for electrowetting and electrofluidic devices
WO2013177003A1 (en) * 2012-05-25 2013-11-28 Applied Materials, Inc. Conformal sacrificial film by low temperature chemical vapor deposition technique
WO2014179283A2 (en) 2013-04-29 2014-11-06 Gvd Corporation Liquid-impregnated coatings and devices containing the same
US11292924B2 (en) * 2014-04-08 2022-04-05 Silcotek Corp. Thermal chemical vapor deposition coated article and process
US9991099B2 (en) 2014-12-05 2018-06-05 Seagate Technology Llc Filament holder for hot cathode PECVD source
CN104524644A (zh) * 2014-12-18 2015-04-22 常熟市亨利医疗器械有限公司 膜状内障剪
US20170140977A1 (en) * 2015-11-17 2017-05-18 Semes Co., Ltd. Chuck pin, method for manufacturing a chuck pin, apparatus for treating a substrate
US11709155B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved chromatography of metal interacting analytes
US11709156B2 (en) 2017-09-18 2023-07-25 Waters Technologies Corporation Use of vapor deposition coated flow paths for improved analytical analysis
US11918936B2 (en) 2020-01-17 2024-03-05 Waters Technologies Corporation Performance and dynamic range for oligonucleotide bioanalysis through reduction of non specific binding
WO2021167194A1 (ko) * 2020-02-21 2021-08-26 한국과학기술원 황을 개시제로서 사용한 화학기상증착(scvd)을 이용한 고분자막, 그 제조방법 및 제조장치
KR102443090B1 (ko) * 2020-02-21 2022-09-14 한국과학기술원 황을 개시제로서 사용한 화학기상증착(sCVD)을 이용한 고분자막, 그 제조방법 및 제조장치

Citations (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3576387A (en) * 1970-03-19 1971-04-27 Chomerics Inc Heat shrinkable electromagnetic shield for electrical conductors
US4596761A (en) * 1983-11-02 1986-06-24 Hughes Aircraft Company Graft polymerized SiO2 lithographic masks
US4782380A (en) 1987-01-22 1988-11-01 Advanced Micro Devices, Inc. Multilayer interconnection for integrated circuit structure having two or more conductive metal layers
US5079038A (en) 1990-10-05 1992-01-07 The United States Of America As Represented By The United States Department Of Energy Hot filament CVD of boron nitride films
US5094895A (en) 1989-04-28 1992-03-10 Branca Phillip A Composite, porous diaphragm
US5112775A (en) 1989-11-22 1992-05-12 The Tokai University Juridical Foundation Method of making diamond N-type semiconductor diamond p-n junction diode using diphosphorus pentoxide and hot filament CVD method
US5112649A (en) 1989-10-27 1992-05-12 U.S. Philips Corporation Method of depositing micro-crystalline solid particles by hot filament cvd
US5147687A (en) 1991-05-22 1992-09-15 Diamonex, Inc. Hot filament CVD of thick, adherent and coherent polycrystalline diamond films
US5160544A (en) 1990-03-20 1992-11-03 Diamonex Incorporated Hot filament chemical vapor deposition reactor
US5183545A (en) 1989-04-28 1993-02-02 Branca Phillip A Electrolytic cell with composite, porous diaphragm
US5516561A (en) 1991-06-20 1996-05-14 British Technology Group Ltd. Applying a fluoropolymer film to a body
US5516554A (en) 1988-05-26 1996-05-14 General Electric Company Cyclic hot-filament CVD of diamond
US5589233A (en) 1993-12-28 1996-12-31 Applied Materials, Inc. Single chamber CVD process for thin film transistors
US5702387A (en) * 1995-09-27 1997-12-30 Valleylab Inc Coated electrosurgical electrode
US5773098A (en) 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body
US5804259A (en) 1996-11-07 1998-09-08 Applied Materials, Inc. Method and apparatus for depositing a multilayered low dielectric constant film
US5888591A (en) 1996-05-06 1999-03-30 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
US5939140A (en) 1994-06-13 1999-08-17 Sumitomo Electric Industries, Ltd. Hot filament CVD of diamond films
US6045877A (en) * 1997-07-28 2000-04-04 Massachusetts Institute Of Technology Pyrolytic chemical vapor deposition of silicone films
US6051321A (en) 1997-10-24 2000-04-18 Quester Technology, Inc. Low dielectric constant materials and method
US6086952A (en) 1998-06-15 2000-07-11 Applied Materials, Inc. Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer
US6211065B1 (en) 1997-10-10 2001-04-03 Applied Materials, Inc. Method of depositing and amorphous fluorocarbon film using HDP-CVD
US6228477B1 (en) 1999-02-12 2001-05-08 Bha Technologies, Inc. Porous membrane structure and method
US6273271B1 (en) 1997-05-01 2001-08-14 Millipore Corporation Surface modified porous membrane and process
US6274043B1 (en) 1998-04-07 2001-08-14 Pall Corporation Porous polytetrafluoroethylene membrane
US20010018096A1 (en) 1999-02-12 2001-08-30 Bha Technologies Inc. Porous membrane structure and method
US6432206B1 (en) 1999-08-30 2002-08-13 Si Diamond Technology, Inc. Heating element for use in a hot filament chemical vapor deposition chamber

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6203898B1 (en) * 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating
US6020458A (en) * 1997-10-24 2000-02-01 Quester Technology, Inc. Precursors for making low dielectric constant materials with improved thermal stability
US6509138B2 (en) * 2000-01-12 2003-01-21 Semiconductor Research Corporation Solventless, resistless direct dielectric patterning
WO2002032591A2 (en) * 2000-10-19 2002-04-25 Picosep A/S A material useful for the separation of organic compounds, processes for its preparation and use of the material
SG98468A1 (en) * 2001-01-17 2003-09-19 Air Prod & Chem Organosilicon precursors for interlayer dielectric films with low dielectric constants

Patent Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3576387A (en) * 1970-03-19 1971-04-27 Chomerics Inc Heat shrinkable electromagnetic shield for electrical conductors
US4596761A (en) * 1983-11-02 1986-06-24 Hughes Aircraft Company Graft polymerized SiO2 lithographic masks
US4782380A (en) 1987-01-22 1988-11-01 Advanced Micro Devices, Inc. Multilayer interconnection for integrated circuit structure having two or more conductive metal layers
US5516554A (en) 1988-05-26 1996-05-14 General Electric Company Cyclic hot-filament CVD of diamond
US5094895A (en) 1989-04-28 1992-03-10 Branca Phillip A Composite, porous diaphragm
US5183545A (en) 1989-04-28 1993-02-02 Branca Phillip A Electrolytic cell with composite, porous diaphragm
US5112649A (en) 1989-10-27 1992-05-12 U.S. Philips Corporation Method of depositing micro-crystalline solid particles by hot filament cvd
US5112775A (en) 1989-11-22 1992-05-12 The Tokai University Juridical Foundation Method of making diamond N-type semiconductor diamond p-n junction diode using diphosphorus pentoxide and hot filament CVD method
US5160544A (en) 1990-03-20 1992-11-03 Diamonex Incorporated Hot filament chemical vapor deposition reactor
US5079038A (en) 1990-10-05 1992-01-07 The United States Of America As Represented By The United States Department Of Energy Hot filament CVD of boron nitride films
US5147687A (en) 1991-05-22 1992-09-15 Diamonex, Inc. Hot filament CVD of thick, adherent and coherent polycrystalline diamond films
US5773098A (en) 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body
US5516561A (en) 1991-06-20 1996-05-14 British Technology Group Ltd. Applying a fluoropolymer film to a body
US5589233A (en) 1993-12-28 1996-12-31 Applied Materials, Inc. Single chamber CVD process for thin film transistors
US5939140A (en) 1994-06-13 1999-08-17 Sumitomo Electric Industries, Ltd. Hot filament CVD of diamond films
US5702387A (en) * 1995-09-27 1997-12-30 Valleylab Inc Coated electrosurgical electrode
US6156435A (en) 1996-05-06 2000-12-05 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
US5888591A (en) 1996-05-06 1999-03-30 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
US6153269A (en) 1996-05-06 2000-11-28 Massachusetts Institute Of Technology Chemical vapor deposition of fluorocarbon polymer thin films
US5804259A (en) 1996-11-07 1998-09-08 Applied Materials, Inc. Method and apparatus for depositing a multilayered low dielectric constant film
US6273271B1 (en) 1997-05-01 2001-08-14 Millipore Corporation Surface modified porous membrane and process
US6045877A (en) * 1997-07-28 2000-04-04 Massachusetts Institute Of Technology Pyrolytic chemical vapor deposition of silicone films
US6211065B1 (en) 1997-10-10 2001-04-03 Applied Materials, Inc. Method of depositing and amorphous fluorocarbon film using HDP-CVD
US6051321A (en) 1997-10-24 2000-04-18 Quester Technology, Inc. Low dielectric constant materials and method
US6274043B1 (en) 1998-04-07 2001-08-14 Pall Corporation Porous polytetrafluoroethylene membrane
US6086952A (en) 1998-06-15 2000-07-11 Applied Materials, Inc. Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer
US6228477B1 (en) 1999-02-12 2001-05-08 Bha Technologies, Inc. Porous membrane structure and method
US20010018096A1 (en) 1999-02-12 2001-08-30 Bha Technologies Inc. Porous membrane structure and method
US6432206B1 (en) 1999-08-30 2002-08-13 Si Diamond Technology, Inc. Heating element for use in a hot filament chemical vapor deposition chamber

Non-Patent Citations (12)

* Cited by examiner, † Cited by third party
Title
Finstenwalder and Hambitzer; "Proton Conductive Thin Films Prepared by Plasma Polymerization", Journal of Membrane Science, 185: 105-124, (2001).
International Search Report Completed on Mar. 2, 2003 and Mailed on Mar. 18, 2003.
Kim et al.; "Asymmetric Membranes by a Two-Stage Gelation Technique for Gas Separation: Formation and Characterization", Journal of Membrane Science, 161: 229-238,( 1999).
Lau and Gleason; "Thermal Annealing of Fluorcarbon Films Grown by Hot Filament Chemical Deposition", J. Phys. Chem. B., 105: 2303-2307, (2001).
Lau et al.; "Hot-Wire Chemical Vapor Deposition (HWCVD) of Fluorocarbon and Organosilicon Thin Films", Thin Solid Films, 395: 288-291, (2001).
Lau et al.; "Structure and Morphology Fluorocarbon Films Grown by Hot Filament Chemical Vapor Deposition", Chemical Mater 12: 3032-3037, ( 2000).
Lau, S. K. K.; "Variable Angle Spectroscopic Ellipsometry of Fluorocarbon Films From Hot Filament Chemical Vapor Deposition", J. Vac. Sci. Technol. A 18(5): 2404-2411,(Sep./Oct. 2000).
Lee and lam; "Pressure Effect on Diamond Nucleation in a Hot-Filament CVD System", Physical Review B, 55(23): 15937-15941, (Jun. 15, 1997).
Lewis et al.; "E-Beam Patterning of Hot-Filament CVD Fluorocarbon Films Using Supercritical CO<SUB>2 </SUB>as a Developer", Chemical Vapor Deposition, 7(5): 195-197, (2001).
Lewis et al.; "Hot-Filament Chemical Vapor Deposition of Organosilicon Thin Films from Hexamethycyclotrisiloxane and Octamethylcyclotetrasiloxane", Journal of Electrochemical Society 148(12): F212-F220, (2001).
Lewis et al.; "Perfluorooctane Sulfonyl Fluoride as an Initiator in Hot-Filament Chemical Vapor Deposition of Fluorocarbon Thin Films", Langmuir 17: 7652-7655, ( 2001).
Lewis et al.; "Pulsed-PECVD Films from Hexamethylcyclotriciloxane for Use as Insulating Biomaterials", Chem. Mater. 12: 3488-3494, (2000).

Cited By (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7935425B2 (en) * 2002-11-28 2011-05-03 Tosoh Corporation Insulating film material containing organic silane or organic siloxane compound, method for producing same, and semiconductor device
US20060151884A1 (en) * 2002-11-28 2006-07-13 Daiji Hara Insulatng film material containing organic silane or organic siloxane compound, method for produing sane, and semiconductor device
US20060063059A1 (en) * 2004-07-01 2006-03-23 Ceramatec, Inc. Amorphous, non-oxide seals for solid electrolyte or mixed electrolyte cells
US20060172065A1 (en) * 2005-02-01 2006-08-03 Carlotto John A Vacuum deposition of coating materials on powders
US10463420B2 (en) 2005-05-12 2019-11-05 Innovatech Llc Electrosurgical electrode and method of manufacturing same
US8814862B2 (en) 2005-05-12 2014-08-26 Innovatech, Llc Electrosurgical electrode and method of manufacturing same
US8814863B2 (en) 2005-05-12 2014-08-26 Innovatech, Llc Electrosurgical electrode and method of manufacturing same
US9630206B2 (en) 2005-05-12 2017-04-25 Innovatech, Llc Electrosurgical electrode and method of manufacturing same
US11246645B2 (en) 2005-05-12 2022-02-15 Innovatech, Llc Electrosurgical electrode and method of manufacturing same
WO2007005848A3 (en) * 2005-06-30 2007-12-21 Ceramatec Inc Amorphous, non-oxide seals for solid electrolyte or mixed electrolyte cells
WO2007005848A2 (en) * 2005-06-30 2007-01-11 Ceramatec, Inc. Amorphous, non-oxide seals for solid electrolyte or mixed electrolyte cells
US20070032620A1 (en) * 2005-08-05 2007-02-08 Massachusetts Institute Of Technology Chemical vapor deposition of hydrogel films
US7431969B2 (en) 2005-08-05 2008-10-07 Massachusetts Institute Of Technology Chemical vapor deposition of hydrogel films
US20070299239A1 (en) * 2006-06-27 2007-12-27 Air Products And Chemicals, Inc. Curing Dielectric Films Under A Reducing Atmosphere
US20080188836A1 (en) * 2007-02-02 2008-08-07 Boston Scientific Scimed, Inc. Medical devices having nanoporous coatings for controlled therapeutic agent delivery
US8187255B2 (en) 2007-02-02 2012-05-29 Boston Scientific Scimed, Inc. Medical devices having nanoporous coatings for controlled therapeutic agent delivery
US9157152B2 (en) 2007-03-29 2015-10-13 Tokyo Electron Limited Vapor deposition system
US20110126762A1 (en) * 2007-03-29 2011-06-02 Tokyo Electron Limited Vapor deposition system
US20080241377A1 (en) * 2007-03-29 2008-10-02 Tokyo Electron Limited Vapor deposition system and method of operating
US20080244908A1 (en) * 2007-04-04 2008-10-09 Robert Petcavich Cutting tool
US8053081B2 (en) 2007-04-04 2011-11-08 Aculon, Inc. Cutting tool
US20090226614A1 (en) * 2008-03-04 2009-09-10 Tokyo Electron Limited Porous gas heating device for a vapor deposition system
US20090223452A1 (en) * 2008-03-07 2009-09-10 Tokyo Electron Limited Gas heating device for a vapor deposition system
US8291856B2 (en) 2008-03-07 2012-10-23 Tokyo Electron Limited Gas heating device for a vapor deposition system
US20110186537A1 (en) * 2008-09-22 2011-08-04 Becton, Dickinson And Company Systems, Apparatus and Methods for Coating the Interior of a Container Using a Photolysis and/or Thermal Chemical Vapor Deposition Process
EP3505206A1 (en) 2008-09-22 2019-07-03 Becton, Dickinson and Company A system for coating the interior of a container using a photolysis chemical vapor deposition process
EP3536363A1 (en) 2008-09-22 2019-09-11 Becton, Dickinson and Company Systems for coating the interior of a container
US9212420B2 (en) 2009-03-24 2015-12-15 Tokyo Electron Limited Chemical vapor deposition method
US20100247803A1 (en) * 2009-03-24 2010-09-30 Tokyo Electron Limited Chemical vapor deposition method
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US10537273B2 (en) 2009-05-13 2020-01-21 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer
US8512796B2 (en) 2009-05-13 2013-08-20 Si02 Medical Products, Inc. Vessel inspection apparatus and methods
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US8834954B2 (en) 2009-05-13 2014-09-16 Sio2 Medical Products, Inc. Vessel inspection apparatus and methods
US10390744B2 (en) 2009-05-13 2019-08-27 Sio2 Medical Products, Inc. Syringe with PECVD lubricity layer, apparatus and method for transporting a vessel to and from a PECVD processing station, and double wall plastic vessel
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US8673393B2 (en) 2009-06-08 2014-03-18 Innovanano, Inc. Hydrophobic materials made by vapor deposition coating and applications thereof
WO2010144167A1 (en) * 2009-06-08 2010-12-16 Innovanano, Inc. Hydrophobic materials made by vapor deposition coating and applications thereof
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US20110061595A1 (en) * 2009-09-14 2011-03-17 Tokyo Electron Limited High temperature gas heating device for a vapor deposition system
US8272347B2 (en) 2009-09-14 2012-09-25 Tokyo Electron Limited High temperature gas heating device for a vapor deposition system
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US8852347B2 (en) 2010-06-11 2014-10-07 Tokyo Electron Limited Apparatus for chemical vapor deposition control
US9139910B2 (en) 2010-06-11 2015-09-22 Tokyo Electron Limited Method for chemical vapor deposition control
US20130095329A1 (en) * 2010-07-22 2013-04-18 Jin Hyong Lim Fluorine-based polymer thin film and method for preparing same
US11123491B2 (en) 2010-11-12 2021-09-21 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9541480B2 (en) 2011-06-29 2017-01-10 Academia Sinica Capture, purification, and release of biological substances using a surface coating
US11674958B2 (en) 2011-06-29 2023-06-13 Academia Sinica Capture, purification, and release of biological substances using a surface coating
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US11884446B2 (en) 2011-11-11 2024-01-30 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11724860B2 (en) 2011-11-11 2023-08-15 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US11148856B2 (en) 2011-11-11 2021-10-19 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10577154B2 (en) 2011-11-11 2020-03-03 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US10363370B2 (en) 2012-11-30 2019-07-30 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US11406765B2 (en) 2012-11-30 2022-08-09 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US8889225B2 (en) 2012-12-21 2014-11-18 The Gillette Company Chemical vapor deposition of fluorocarbon polymers
US9498934B2 (en) 2013-02-15 2016-11-22 Massachusetts Institute Of Technology Grafted polymer surfaces for dropwise condensation, and associated methods of use and manufacture
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US11344473B2 (en) 2013-03-11 2022-05-31 SiO2Medical Products, Inc. Coated packaging
US11298293B2 (en) 2013-03-11 2022-04-12 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10912714B2 (en) 2013-03-11 2021-02-09 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US10016338B2 (en) 2013-03-11 2018-07-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US11684546B2 (en) 2013-03-11 2023-06-27 Sio2 Medical Products, Inc. PECVD coated pharmaceutical packaging
US10537494B2 (en) 2013-03-11 2020-01-21 Sio2 Medical Products, Inc. Trilayer coated blood collection tube with low oxygen transmission rate
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9339770B2 (en) 2013-11-19 2016-05-17 Applied Membrane Technologies, Inc. Organosiloxane films for gas separations
US9209017B2 (en) 2014-03-26 2015-12-08 International Business Machines Corporation Advanced ultra low k SiCOH dielectrics prepared by built-in engineered pore size and bonding structured with cyclic organosilicon precursors
US9449810B2 (en) 2014-03-26 2016-09-20 International Business Machines Corporation Advanced ultra low k SiCOH dielectrics prepared by built-in engineered pore size and bonding structured with cyclic organosilicon precursors
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
US10495644B2 (en) 2014-04-01 2019-12-03 Academia Sinica Methods and systems for cancer diagnosis and prognosis
US10112198B2 (en) 2014-08-26 2018-10-30 Academia Sinica Collector architecture layout design
US11077233B2 (en) 2015-08-18 2021-08-03 Sio2 Medical Products, Inc. Pharmaceutical and other packaging with low oxygen transmission rate
US10107726B2 (en) 2016-03-16 2018-10-23 Cellmax, Ltd. Collection of suspended cells using a transferable membrane
US10605708B2 (en) 2016-03-16 2020-03-31 Cellmax, Ltd Collection of suspended cells using a transferable membrane
US11393679B2 (en) 2016-06-13 2022-07-19 Gvd Corporation Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles
US11679412B2 (en) 2016-06-13 2023-06-20 Gvd Corporation Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles

Also Published As

Publication number Publication date
EP1448807A1 (en) 2004-08-25
US20030138645A1 (en) 2003-07-24
EP1448807A4 (en) 2005-07-13
WO2003038143A1 (en) 2003-05-08

Similar Documents

Publication Publication Date Title
US6887578B2 (en) Fluorocarbon-organosilicon copolymers and coatings prepared by hot-filament chemical vapor deposition
Ward et al. Atmospheric pressure glow discharge deposition of polysiloxane and SiO x films
Schreiber et al. Corrosion protection by plasma-polymerized coatings
JP5344177B2 (ja) フレキシブルなプラズマポリマー生成物、相当する物品およびその使用
US20220186040A1 (en) Industrial equipment article
Morra et al. On the aging of oxygen plasma-treated polydimethylsiloxane surfaces
O'Hare et al. A methodology for curve‐fitting of the XPS Si 2p core level from thin siloxane coatings
Blanchard et al. Response of plasma-polymerized hexamethyldisiloxane films to aqueous environments
Sarkari et al. Assessing effects of (3-aminopropyl) trimethoxysilane self-assembled layers on surface characteristics of organosilane-grafted moisture-crosslinked polyethylene substrate: A comparative study between chemical vapor deposition and plasma-facilitated in situ grafting methods
JPH01270872A (ja) 潤滑化された表面の作製法
JP2009001806A (ja) プラズマ重合法によって製造したヒドロシクロシロキサン膜
Closser et al. Molecular layer deposition of a highly stable silicon oxycarbide thin film using an organic chlorosilane and water
JP2010533505A (ja) シリコーンおよび特定のポリホスファゼンを含む組成物およびデバイス
KR100284370B1 (ko) 아산화질소 존재하의 수소 실세스퀴옥산 수지의 증기상 침착방법
US20060040053A1 (en) Preparation of asymmetric membranes using hot-filament chemical vapor deposition
Siow Low pressure plasma modifications for the generation of hydrophobic coatings for biomaterials applications
Tan et al. Paper surface modification by plasma deposition of double layers of organic silicon compoundsElectronic Supplementary information (ESI) available: atomic force micrograph and optical micrograph of HMDS–TEOS film (90 seconds deposition). See http://www. rsc. org/suppdata/jm/b0/b008050k
JPH08127865A (ja) 撥水性薄膜およびその製造方法
Kang et al. Non‐stick polymer coatings for energy‐based surgical devices employed in vessel sealing
EP2720807A1 (en) Process for in situ plasma polymerization of silicone coating for surgical needles
Egghe et al. Comparative study of the aging behavior of plasma activated hexamethyldisiloxane-based plasma polymers and silicone elastomer thin films
Murthy et al. Fluorocarbon− Organosilicon Copolymer Synthesis by Hot Filament Chemical Vapor Deposition
Prysiazhnyi et al. Tailored wettability of plasma polymers made of C–F, C–H, and N–H
López et al. Substrate temperature effects on film chemistry in plasma depositions of organics. II. Polymerizable precursors
Ghali et al. Multilayer coating by plasma polymerization of TMDSO deposited on carbon steel: Synthesis and characterization

Legal Events

Date Code Title Description
AS Assignment

Owner name: MASSACHUSETTS INSTITUTE OF TECHNOLOGY, MASSACHUSET

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:GLEASON, KAREN K.;MURTHY, SHASHI K.;REEL/FRAME:013902/0478;SIGNING DATES FROM 20021115 TO 20030213

AS Assignment

Owner name: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF

Free format text: CONFIRMATORY LICENSE;ASSIGNOR:MASSACHUSETTS INSTITUTE OF TECHNOLOGY;REEL/FRAME:021493/0283

Effective date: 20021115

FPAY Fee payment

Year of fee payment: 4

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

AS Assignment

Owner name: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF

Free format text: CONFIRMATORY LICENSE;ASSIGNOR:MASSACHUSETTS INSTITUTE OF TECHNOLOGY;REEL/FRAME:026269/0277

Effective date: 20110506

CC Certificate of correction
AS Assignment

Owner name: NATIONAL INSTITUTES OF HEALTH (NIH), U.S. DEPT. OF

Free format text: CONFIRMATORY LICENSE;ASSIGNOR:MASSACHUSETTS INSTITUTE OF TECHNOLOGY;REEL/FRAME:027336/0031

Effective date: 20111114

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20130503