US6867585B2 - Circuit and method for compensating for temperature - Google Patents

Circuit and method for compensating for temperature Download PDF

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US6867585B2
US6867585B2 US10/684,647 US68464703A US6867585B2 US 6867585 B2 US6867585 B2 US 6867585B2 US 68464703 A US68464703 A US 68464703A US 6867585 B2 US6867585 B2 US 6867585B2
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signal
circuit
temperature
compensation
measuring
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US20040075452A1 (en
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Franz Hrubes
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Micro Epsilon Messtechnik GmbH and Co KG
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Micro Epsilon Messtechnik GmbH and Co KG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G01D3/0365—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves the undesired influence being measured using a separate sensor, which produces an influence related signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Definitions

  • the invention relates to a circuit arrangement and a method for compensating for temperature with a sensor operating by the eddy current principle and preferably comprising a measuring coil for measuring physical conditions, and with an evaluation unit for evaluating the measuring signal of the sensor, with the sensor and the evaluation unit being interconnected via a connection line.
  • Circuit arrangements and methods for compensating for temperature have been known in practical operation for a long time.
  • the impedance change of the measuring coil of a sensor is measured, which results from the approximation of an electrically conductive object of measurement.
  • the impedance change is evaluated, so that a measuring signal results, which reflects as much as possible in a linear relationship, for example, the spacing between the sensor and the object of measurement.
  • a corresponding temperature compensation is required for obtaining a correct measuring signal.
  • the temperature influence requires different compensation values as a function of the measuring distance.
  • a possibility of accomplishing this lies, for example, in measuring the temperature of the sensor. It is then possible to use the temperature measuring signal for selecting corresponding correction values from a stored table, or for interpolating them, if need be, and for correcting therewith the measuring signal. As an alternative, it is possible to offset the temperature measuring signal directly against the measuring signal, for example, by a simple or multiple addition and/or by multiplying correction factors with the measuring signals. This may occur before and/or after a linearization of the measuring signal, possibly even by an additional nonlinear change of the temperature measuring signal before the correction step. In this manner, it is possible to attain a simple temperature compensation.
  • connection line represents an additional impedance, which itself is again temperature-dependent and, thus, also generates temperature-dependent measuring errors.
  • the temperature of the sensor is also not identical with the temperature of the connection line, so that a temperature compensation, which is derived only from the temperature of the sensor, does not simultaneously compensate the measuring error caused by the connection line.
  • EP 0 049 304 B1 discloses a circuit arrangement and a method for compensating for temperature with a sensor operating by the eddy current principle for measuring physical conditions, and with an evaluation unit for evaluating the measuring signal of the sensor.
  • the sensor which includes a measuring coil, and the evaluation unit are interconnected by a connection cable.
  • a suitable adjustment of the impedances of the measuring coil, the object of measurement, and the connection cable results in a temperature response, which adequately compensates with the method disclosed therein also the influence of the connection cable.
  • this adjustment and conformity of the impedances is to be realized only in special cases.
  • the foregoing object is accomplished by a circuit for compensating for temperature and which includes an additional compensation line for compensating for the temperature of the connection line.
  • the foregoing object is accomplished by a method of compensating for temperature in a process of the initially described type and which is improved and further developed by the provision of an additional compensation line arranged for compensating for the temperature of the connection line.
  • a measuring error that is caused by the temperature of the connection line can be corrected not solely by adjusting the impedances of the measuring coil, the object of measurement, and the connection line. Rather, it is necessary to measure the temperature of the connection line separately, so as to permit a reliable compensation. To this end, use is made of the ohmic resistance of the additionally arranged compensation line, which changes with the temperature. In accordance with the invention, it is thus possible to measure the temperature along the connection line as a mean value over the entire length of the connection line, to derive therefrom a correction signal for the measured value, and to perform a corresponding correction.
  • a further advantage of the circuit arrangement according to the invention may be seen in that in the case of a mechanical realization of the sensor, in particular with respect to dimensions and the impedance of the measuring coil, greater freedoms than until now are possible, since an adjustment between the impedances of the measuring coil, the object of measurement, and the connection line is no longer needed.
  • connection line could be constructed as a coaxial cable. This would be especially advantageous with respect to a satisfactory conductivity of the connection cable at high frequencies.
  • the compensation line could be an integral part of the connection cable.
  • the compensation line would also be excellently protected against external mechanical influences. This would be especially well realizable, if the compensation line were provided as a wire that could be integrated into the connection cable in a very simple manner.
  • the compensation line could be shielded against the connection cable. This could clearly reduce or largely prevent the influence of the compensation line on the impedance of the connection cable and, thus, the measuring circuit.
  • the compensation line could also extend parallel to the connection cable. This could prevent in a very simple manner an influence of the impedance of the connection cable, without having to provide a special shield for the compensation line.
  • the compensation line could connect at one end to the shield of the coaxial cable.
  • the shield of a coaxial cable has a low ohmic resistance.
  • the compensation line could connect to the coaxial cable at the end adjacent the sensor.
  • the coaxial cable could serve as a return line of the compensation line to the evaluation unit.
  • the compensation line could include a separate return line. In the case of damage, this would permit exchanging the compensation line in a particularly simple manner.
  • the return line could extend parallel to the connection cable back to the evaluation unit, which would require an additional connection between the evaluation unit and the compensation cable.
  • the compensation line could be supplied from a signal source, preferably with direct current, which would permit generating a temperature dependent compensation line signal, in particular a temperature dependent dc voltage signal.
  • the temperature dependent compensation line signal would therefore decrease on the resistance of the compensation line.
  • the compensation line could be supplied from a signal source with a low frequency alternating current, which would permit generating a temperature dependent compensation line signal, in particular a low frequency ac voltage signal.
  • a temperature dependent compensation line signal in particular a low frequency ac voltage signal.
  • a preferably analog circuit could be arranged for preparing the temperature dependent signal, in particular the temperature dependent dc voltage signal, and/or the low frequency ac voltage signal, and/or for generating a compensation signal.
  • the circuit could prepare the compensation signal in such a manner that the thus-resulting temperature-dependent dc voltage or ac voltage signal can be used for a separate correction of the temperature influence on the connection cable.
  • the compensation signal generated by the circuit components for correcting the temperature dependent compensation signal, in particular for multiplying the temperature dependent compensation signal with at least one correction factor.
  • the components for the correction could be used to the extent that the compensation applies to the entire measuring range.
  • the correction factors could be adapted to the temperature variation of the sensor, in particular the measuring coil of the sensor, for purposes of attaining a particularly satisfactory temperature compensation.
  • a generator for generating a high frequency ac signal which can be used for supplying the measuring coil for purposes of generating a measuring signal, in particular a high frequency ac measuring signal.
  • a high frequency ac voltage measuring signal which is dependent both on the temperature and on the physical quantity, for example, the distance of the sensor from an object of measurement.
  • a further generator could be arranged for generating a dc signal and/or a low frequency ac signal, which can be used for supplying the measuring coil.
  • This dc signal and/or ac signal could be adapted for superposition on the high frequency ac signal, which is used for generating the measuring signal that is dependent on the physical quantity.
  • the dc signal or low frequency ac signal that is superposed on the high frequency ac signal generates on the ohmic resistance of the measuring coil and the connection cable, a dc signal or low frequency ac voltage signal, which changes to a large extent linearly with the temperature of the measuring coil and the connection cable.
  • a preferably analog circuit for separating and processing the high frequency measuring signal and the superposed dc voltage signal, and/or the low frequency ac voltage signal for generating a temperature dependent compensation measuring signal, in particular a temperature dependent dc voltage signal.
  • This temperature dependent dc voltage measuring signal could then make it possible to compensate the temperature of the sensor, or the measuring coil, and possibly the connection cable to a limited extent.
  • a component could be arranged for forming a difference signal of the temperature dependent compensation measuring signal and the corrected temperature dependent compensation signal.
  • the signal being thus generated which is preferably a dc voltage signal, could be dependent only on the temperature of the measuring coil.
  • this component could be a comparator.
  • a component for demodulating the high frequency measuring signal for generating a dc voltage measuring signal that is dependent on the physical quantity.
  • the dc voltage measuring signal is dependent on both the physical quantity and the temperature, and would permit further processing in a very simple manner, in particular compensating the temperature in a very simple manner.
  • the component for demodulating could be a demodulator.
  • a component could be arranged for forming the composite signal of the dc voltage signal that is dependent on the physical quantity, and/or the corrected difference signal, and/or the corrected temperature dependent compensation signal.
  • the necessary correction factors are to be adapted to the temperature variation of the measuring coil and the object of measurement.
  • the correction factors could be adapted to the temperature variation of the measuring coil and the object of measurement for being able to ensure a very satisfactory temperature compensation.
  • the measuring signal having been temperature compensated and being only dependent on the physical quantity would be present, which could then be further processed in a very simple manner.
  • the correction factors are computed before and after the linearization, so that the compensation applies to the entire measuring range of the physical quantity.
  • a supplementary capacitor for tuning the resonant frequency of the oscillatory circuit that is formed by the measuring coil, and/or the capacitance, and/or the inductance of the connection cable, and/or the supplementary capacitor.
  • the size of the supplementary capacitor could be determined in the usual way.
  • the high frequency signal, which generates the measuring signal would be applied to this oscillatory circuit in the previously described manner.
  • the temperature sensor could be thermally coupled with the measuring coil.
  • the temperature sensor could be integrated into the sensor.
  • the temperature sensor signal could be in particular a dc voltage signal and/or a low frequency ac voltage signal.
  • the processing of the temperature sensor measuring signal could then occur, as above described, analogously to the processing of the dc voltage signal or the low frequency ac voltage signal that is dependent on the temperature of the measuring coil and the connection line.
  • the method of the present invention could be used in particular for operating a circuit arrangement as has been described above.
  • the method is advantageous in that an additionally arranged line, or compensation line, achieves a reliable compensation of all relevant temperature influences.
  • a calibration of the circuit arrangement could occur as a function of the temperature of the sensor. In a particularly advantageous manner, this calibration could occur before the startup, in particular before the first startup of the sensor. In addition or as an alternative, a calibration could occur as a function of the temperature of the connection line.
  • correction factors could be determined based on the measured temperature compensation signals and the measuring signals, which are offset against one another, so that the adjustment values for the temperature compensation, i.e., the values of addition that interrupt before and after the linearization of the measuring signal, compensate it equally well irrespective of the physical quantity.
  • a table with temperature dependent correction factors could be prepared by means of a processor, and/or stored in a memory. During the measurements, it would then be possible to select from the table the correction factors as a function of the measured temperature for compensating for the temperature of the measuring signal, thereby enabling a particularly satisfactory temperature compensation. The correction factors could then be used for correcting the temperature dependent measuring signals. During the actual measurement of the physical quantities, it would be possible to select the corresponding values respectively as a function of the measured temperature values, in particular with the aid of the processor, and to correct the measuring signal accordingly by addition before and after the linearization. In the case of intermediate values, one may perform an interpolation of the corresponding table values.
  • FIG. 1 is a schematic view of a known circuit arrangement for compensating for temperature
  • FIG. 2 is a schematic view of an embodiment of a circuit arrangement for compensating for temperature in accordance with the invention.
  • FIG. 3 is a schematic view of a further embodiment of a circuit arrangement according to the invention.
  • FIG. 1 is a schematic view of a known circuit arrangement a for compensating for temperature.
  • the circuit arrangement comprises a sensor b that operates by the eddy current principle and includes a measuring coil for measuring the distance of the sensor b from an object of measurement c.
  • An evaluation unit d for evaluating the measuring signal of the sensor b connects to the sensor b via a connection line e.
  • a generator f is used for generating a high-frequency ac signal A, which is supplied to the measuring coil of the sensor b.
  • a further generator g generates a dc signal B, which is superposed on the high frequency ac signal A generated by generator f.
  • the dc signal B is used for generating a dc voltage both on the resistance of the connection line e and on the measuring coil of the sensor b. This means that the dc voltage signal B is dependent only on the temperature of the sensor b and the connection line e.
  • an analog circuit h is provided to separate and process the high frequency ac voltage signal A and the superposed dc voltage signal B.
  • a compensation signal C that is generated by a circuit h, is multiplied by means of two components i and j for correcting the temperature dependent compensation signal C with a correction factor Ka and Kb respectively.
  • a component k is arranged for generating a distance dependent dc voltage measuring signal D.
  • a component l is arranged.
  • the composite signal E comprises the distance dependent dc voltage measuring signal D and the compensation signal C that has been corrected with the correction factor Ka.
  • a linearization circuit m is arranged. At the output of the linearization circuit m, a linearized composite signal F is present.
  • a further component n is provided for forming a further composite signal, which corresponds to the temperature-compensated measuring signal G.
  • the composite signal G comprises in this instance the linearized composite signal F as well as the compensation signal C that has been corrected with correction factor Kb.
  • a circuit arrangement 1 of the present invention as shown in FIG. 2 comprises a sensor 2 operating by the eddy current principle and comprising a measuring coil for measuring physical quantities, and an evaluation unit 3 for evaluating the measuring signal of sensor 2 , with the sensor 2 and the evaluation unit 3 being interconnected via a connection cable 4 .
  • the circuit arrangement 1 includes an additional line, namely compensation line 5 for compensating for the temperature of connection line 4 .
  • the compensation line 5 is realized as a wire
  • the connection cable 4 is a coaxial cable.
  • the compensation line 5 extends parallel to the connection cable 4 , and connects to the shield 4 a of the coaxial cable at the end of the coaxial cable adjacent the sensor.
  • the coaxial cable serves as a low resistance return line of compensation line 5 to the evaluation unit 3 .
  • a source of current 6 supplies the compensation line 5 with a direct current, whereby a temperature dependent compensation line signal 200 is generated, which is accordingly a temperature dependent dc voltage signal.
  • a temperature dependent compensation line signal 200 is generated, which is accordingly a temperature dependent dc voltage signal.
  • an analog circuit 7 is arranged.
  • the circuit 7 generates a compensation signal 300 , which is a dc voltage in the present embodiment, and which is dependent only on the temperature of the wire and, accordingly, on the temperature of the compensation line 5 .
  • the compensation signal 300 as generated by the circuit is multiplied with a correction factor K1 by means of a component 8 for correcting the temperature dependent compensation signal 300 .
  • a generator 9 is used for generating a measuring signal, in particular a high frequency ac signal 100 , which is supplied to the measuring coil of the sensor 2 .
  • a further generator 10 generates a dc signal 400 , which is superposed on the high frequency ac voltage signal 100 that is generated by generator 9 .
  • the dc signal 400 is used for generating a dc voltage on the resistance of the connection line 4 and the measuring coil of the sensor 2 . This means that the dc voltage signal is dependent only on the temperature of the sensor 2 and the connection line 4 .
  • an analog circuit 12 is provided for separating and processing the high frequency ac voltage signal 100 and the superposed dc voltage signal 400 .
  • a resultant difference signal 600 is thus dependent only on the temperature of the measuring coil of sensor 2 .
  • a component 14 is arranged, which is realized in the present embodiment as a demodulator, for generating a distance dependent dc voltage measuring signal 700 .
  • This dc voltage measuring signal 700 is not temperature compensated.
  • components 15 , 16 are provided, which multiply the difference signal 600 with a correction factor K 2 , and the compensation signal 300 with a correction factor K 3 .
  • a component 17 is arranged.
  • the composite signal 800 comprises the distance dependent dc voltage signal 700 , as well as the difference signal 600 corrected with correction factor K 2 , and the compensation signal 300 corrected with correction factor K 3 .
  • a linearization circuit 18 is arranged. The output of the linearization circuit 18 supplies a linearized composite signal 900 .
  • components 19 , 20 are arranged for correcting the difference signal 600 and for correcting the temperature dependent compensation signal 300 .
  • the component 19 multiplies the difference signal 600 with a correction factor K 4
  • the component 20 multiplies the compensation signal 300 with a correction factor K 5 .
  • a further component 21 is provided for forming a further composite signal, which corresponds to the temperature compensated measuring signal 1000 .
  • the composite signal 1000 comprises the linearized composite signal 900 , as well as the difference signal 600 that has been corrected with the correction factor K 4 , and the temperature dependent compensation signal 300 that has been corrected with the correction factor K 5 .
  • a supplementary capacitor 22 for tuning the resonant frequency of the oscillatory circuit that is formed by the measuring coil of the sensor, the capacitance and the inductance of the connection cable 4 , and by the supplementary capacitor 22 .
  • a calibration proceeds as a function of the temperature of the sensor 2 together with the object of measurement 11 , and separately as a function of the temperature of the connection cable 4 .
  • the thermal stresses measured in this process and the measuring signals are offset against one another such that the correction factors K 1 -K 5 for the temperature compensation, i.e., the values of addition that interrupt before and after the linearization of the measuring signal, compensate the latter equally satisfactorily irrespective of the measuring distance.
  • a temperature dependent table of the correction values K 1 -K 5 is set up in addition, so that during the actual measurement of the distance, the corresponding values are inquired, each as a function of the measured temperature values, with the aid of a computer (not shown), and that the measuring signal is corrected accordingly by addition before and after the linearization.
  • the corresponding table values are inquired, each as a function of the measured temperature values, with the aid of a computer (not shown), and that the measuring signal is corrected accordingly by addition before and after the linearization.
  • an iteration of the corresponding table values is performed.
  • FIG. 3 illustrates a further embodiment of a circuit arrangement according to the invention.
  • a temperature sensor 23 is arranged in the direct vicinity of the measuring coil for measuring the temperature of the sensor 2 in a way that the temperature sensor 23 is thermally coupled with the measuring coil of the sensor 2 .
  • a generator 24 is provided.
  • the temperature sensor 23 is provided for compensating the temperature of the sensor 2 .
  • the measured temperature signal 1100 can be compensated corresponding to the dc voltage signal 400 by means of an analog circuit 25 .
  • the circuit 25 is used to prepare the temperature sensor signal 1100 , so that as a function of the temperature of the measuring coil of sensor 2 , a temperature sensor measuring signal 1200 is again generated, which corresponds to the temperature dependent compensation measuring signal 500 of the embodiment of FIG. 2 .
  • the compensation of the temperature now occurs analogously to the compensation in the embodiment of FIG. 2 .
  • the above description of the embodiment of FIG. 2 is herewith incorporated by reference. Not needed in this embodiment is only the formation of the difference between the dc voltage signal 400 and the corrected compensation signal 300 , since the temperature sensor measuring signal 1200 is already only dependent on the temperature of the measuring coil of sensor 2 .
US10/684,647 2001-04-12 2003-10-14 Circuit and method for compensating for temperature Expired - Fee Related US6867585B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10118718 2001-04-12
DE10118718.1 2001-04-12
DE10212999.1 2002-03-22
DE10212999A DE10212999A1 (de) 2001-04-12 2002-03-22 Schaltungsanordnung und Verfahren zur Temperaturkompensation
PCT/DE2002/001350 WO2002084424A1 (de) 2001-04-12 2002-04-11 Schaltungsanordnung und verfahren zur temperaturkompensation

Related Parent Applications (1)

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PCT/DE2002/001350 Continuation WO2002084424A1 (de) 2001-04-12 2002-04-11 Schaltungsanordnung und verfahren zur temperaturkompensation

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US6867585B2 true US6867585B2 (en) 2005-03-15

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US (1) US6867585B2 (de)
EP (1) EP1377887B1 (de)
JP (1) JP4031369B2 (de)
DE (1) DE50207002D1 (de)
WO (1) WO2002084424A1 (de)

Cited By (3)

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US20120146625A1 (en) * 2009-10-06 2012-06-14 Micro-Epsilon Messtechnik Gmbh & Co.Kg Sensor arrangement
US20140002069A1 (en) * 2012-06-27 2014-01-02 Kenneth Stoddard Eddy current probe
US10684148B2 (en) 2018-07-10 2020-06-16 Epro Gmbh Temperature compensation for eddy current sensors

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JP2011202978A (ja) * 2010-03-24 2011-10-13 Ihi Corp センサ検出信号の温度ドリフト補正方法及びその装置
JP4898971B1 (ja) * 2011-04-01 2012-03-21 株式会社マコメ研究所 インダクタンス変化検出回路、変位検出装置及び金属検出装置
US9007053B2 (en) * 2012-03-30 2015-04-14 Olympus Scientific Solutions Americas Inc. Circuitry for and a method of compensating drift in resistance in eddy current probes
DE102013015566A1 (de) * 2013-09-20 2015-03-26 Rosen Swiss Ag Verfahren zur berührungslosen Bestimmung einer mechanisch-technologischen Kenngröße von ferromagnetischen Metallen sowie Vorrichtung hierfür
DE102014116497B4 (de) 2013-11-15 2017-07-06 SURAGUS GmbH Verfahren und Verwendung einer Vorrichtung zur Messung der lokalen effektiven Permittivität von elektrisch nicht leitenden oder schwach leitenden Materialien
DE102014213741A1 (de) 2014-07-15 2016-02-18 Micro-Epsilon Messtechnik Gmbh & Co. Kg Schaltung und Verfahren zum Ansteuern eines Wegmesssensors
DE102015222017A1 (de) * 2015-09-15 2017-03-16 Micro-Epsilon Messtechnik Gmbh & Co. Kg Vorrichtung und Sensor zur kontaktlosen Abstands- und/oder Positionsbestimmung eines Messobjektes
DE102018209904A1 (de) * 2018-06-19 2019-12-19 Vega Grieshaber Kg Füllstandssensor oder Grenzstandsensor mit Temperaturkompensation
CN110207730B (zh) * 2019-07-08 2023-09-22 哈尔滨理工大学 一种电阻式位移传感器温度自补偿方法

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EP0049304A1 (de) 1980-10-07 1982-04-14 Micro-Epsilon Messtechnik GmbH & Co. Kommanditgesellschaft Verfahren zur Kompensation von temperaturbedingten Messfehlern bei Wechselstrom-Messschaltungen, insbesondere Abstandsmessgeräten sowie Vorrichtung zur Durchführung des Verfahrens
JPS57110904A (en) * 1980-12-27 1982-07-10 Nippon Steel Corp Eddy-current system displacement gauge
US4956606A (en) 1984-10-17 1990-09-11 Mine Safety Appliances Company Non-contact inductive distance measuring system with temperature compensation
US5180978A (en) 1991-12-02 1993-01-19 Honeywell Inc. Proximity sensor with reduced temperature sensitivity using A.C. and D.C. energy
WO2000070368A1 (en) 1999-05-13 2000-11-23 Honeywell Inc. Proximity sensor method and apparatus that is insensitive to temperature, noise and length of wire

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Publication number Priority date Publication date Assignee Title
EP0049304A1 (de) 1980-10-07 1982-04-14 Micro-Epsilon Messtechnik GmbH & Co. Kommanditgesellschaft Verfahren zur Kompensation von temperaturbedingten Messfehlern bei Wechselstrom-Messschaltungen, insbesondere Abstandsmessgeräten sowie Vorrichtung zur Durchführung des Verfahrens
JPS57110904A (en) * 1980-12-27 1982-07-10 Nippon Steel Corp Eddy-current system displacement gauge
US4956606A (en) 1984-10-17 1990-09-11 Mine Safety Appliances Company Non-contact inductive distance measuring system with temperature compensation
US5180978A (en) 1991-12-02 1993-01-19 Honeywell Inc. Proximity sensor with reduced temperature sensitivity using A.C. and D.C. energy
WO2000070368A1 (en) 1999-05-13 2000-11-23 Honeywell Inc. Proximity sensor method and apparatus that is insensitive to temperature, noise and length of wire

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120146625A1 (en) * 2009-10-06 2012-06-14 Micro-Epsilon Messtechnik Gmbh & Co.Kg Sensor arrangement
CN102549389A (zh) * 2009-10-06 2012-07-04 微-埃普西龙测量技术有限两合公司 传感器装置
US20140002069A1 (en) * 2012-06-27 2014-01-02 Kenneth Stoddard Eddy current probe
US10684148B2 (en) 2018-07-10 2020-06-16 Epro Gmbh Temperature compensation for eddy current sensors

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US20040075452A1 (en) 2004-04-22
EP1377887A1 (de) 2004-01-07
JP2004526971A (ja) 2004-09-02
EP1377887B1 (de) 2006-05-31
DE50207002D1 (de) 2006-07-06
JP4031369B2 (ja) 2008-01-09
WO2002084424A1 (de) 2002-10-24

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