US5138214A - Piezoelectric transducer and method of adjusting oscillation frequency thereof - Google Patents

Piezoelectric transducer and method of adjusting oscillation frequency thereof Download PDF

Info

Publication number
US5138214A
US5138214A US07/457,916 US45791689A US5138214A US 5138214 A US5138214 A US 5138214A US 45791689 A US45791689 A US 45791689A US 5138214 A US5138214 A US 5138214A
Authority
US
United States
Prior art keywords
airtight housing
light
piezoelectric
deposition
oscillation frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US07/457,916
Inventor
Toshiyuki Nakai
Junji Tanaka
Yukio Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to US07/457,916 priority Critical patent/US5138214A/en
Assigned to MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. reassignment MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: NAKAI, TOSHIYUKI, NISHIKAWA, YUKIO, TANAKA, JUNJI
Application granted granted Critical
Publication of US5138214A publication Critical patent/US5138214A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the present invention relates to a piezoelectric transducer, or vibrator, which is applicable particularly, but not exclusively, to electronic devices requiring a reference clock signal and a method of adjusting the oscillation frequency of the piezoelectric transducer.
  • a piezoelectric transducer includes a vibrating piece which has on both its surfaces electrodes for providing an electric field to the vibrating piece.
  • the adjustment of the oscillation frequency of the piezoelectric transducer is made by partially removing the electrode provided on the vibrating piece by illumination of a laser beam (as disclosed in the Japanese Patent Provisional Publication No. 59-134412).
  • a laser beam as disclosed in the Japanese Patent Provisional Publication No. 59-134412
  • the piezoelectric transducer comprises a piezoelectric member which is encased in an airtight housing having at least one portion which allows transmission of light.
  • the piezoelectric member has on its surfaces electrodes and is coupled to one end portions of electrical conductors the other end portions of which extend toward the exterior of said airtight housing.
  • a feature of the piezoelectric transducer is to provide, in the airtight housing, a deposition member which is evaporated in response to illumination of a light beam.
  • the deposition member is provided so as to face the light-transmitting portion of the airtight housing, preferably, formed on the inner surface of the light-transmitting portion of the airtight housing by means of a deposition technique.
  • the deposition member is illuminated with a laser beam emitted from the exterior of the airtight housing to be evaporated.
  • the evaporated deposition member is attached to at least one of the electrodes provided on the piezoelectric member, whereby the oscillation frequency is adjustable in the evaporation amount of the deposition member.
  • FIG. 1 is a partially broken and perspective view showing a piezoelectric transducer according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional illustration for describing an adjustment method of the oscillation frequency of the FIG. 1 piezoelectric transducer.
  • the piezoelectric transducer comprises a rectangular piezoelectric (vibrating) member 6 which has on both surfaces electrode plates 7 made of silver, for example, and which is supported at both sides by holding portions 4 of two electrically conductive lead traminal 3 through electrically conductive adhesive bonds 5.
  • the electrode plates 7 are arranged to be electrically conductive to the electrically conductive lead terminals 3 through the electrically conductive bonds 5.
  • the rectangular piezoelectric member 6, together with portions of the electrically conductive lead terminals 3, is housed in a receptacle formed by a transparent glass cover 1 and a case 2.
  • the transparent glass cover 1 and the case 2 are integrally combined with each other by means of an adhesive bond 8 so as to form an airtight sealed receptacle.
  • a metallic coated film 9 which is made of silver, for example, and which may be made in accordance with a well known deposition technique, the metallic coated film 9 being positioned at the center portion of the inner surface thereof.
  • the inner surface of the transparent glass cover 1 should preferably be roughened in advance by a known sand-blasting technique.
  • FIG. 2 is a cross-sectional illustration for describing a method of adjusting the oscillation frequency of the piezoelectric transducer described above with reference to FIG. 1.
  • the lead terminals 3 are connected to an adequate oscillator, not shown, so that the oscillation frequency is checked by means of an adequate frequency counter, not shown.
  • an adequate frequency counter not shown.
  • a laser beam emitted from an adequate laser unit such as a YAG laser, not shown, which is arranged to be driven in response to an electric power of 0.5 to 3 W and which is arranged to be operable in a series of pulses by a switching device such as a Q switch so as to intermittently emit the laser light whose wavelength is 1060 nm, for example.
  • the laser beam 12 emitted from the laser unit reaches, or illuminates, the metallic coated film 9, provided on the inner surface of the transparent glass cover 1, after passing through a lens 11 and the transparent glass cover 1.
  • the lens 11 causes the laser beam 12 therefrom to be focused in the vicinity of the metallic coated film 9.
  • the laser beam 12 is focused before reaching the transparent glass cover 1, in order to prevent damage to the transparent glass cover 1 due to the laser beam 12.
  • the illuminated portion of the metallic coated film 9 is evaporated in a moment.
  • the evaporated metal 10 is attached to the electrode plate 7, which faces the metallic coated film 9, and the attachment of the evaporated metal 10 causes the lowering of the oscillation frequency of the piezoelectric member 6 by the so-called mass-addition effect. That is, the attachment of the evaporated metal to the electrode plate 7 results in an increase in the mass of the electrode plate 7, thereby allowing a lowering of the oscillation frequency of the piezoelectric member 6.
  • the laser unit and the lens 11 are movable along the surface of the transparent glass cover 1 whereby the metallic coated film 9 can be swept by the laser beam from the laser unit. This sweeping operation is repeatedly performed until the oscillation frequency reaches a predetermined value.
  • the oscillation frequency adjustment is performed in a vacuum device, the oscillation frequency adjustment of this embodiment can be effected in atmosphere, thereby not requiring such a vacuum device for the oscillation frequency adjustment.
  • the oscillation frequency adjustment can be effected after the airtight sealing, it is possible to present variation of the adjusted oscillation frequency in assembling.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

A piezoelectric transducer arranged to allow the adjustment of its oscillation frequency. The piezoelectric transducer comprises a piezoelectric member which is encased in an airtight housing having at least one portion which allows transmission of light. The piezoelectric member has on its surfaces electrodes and is coupled to one end portions of electrical conductors the other end portions of which extend toward the external of said airtight housing. Also housed in the airtight housing is a deposition member which is evaporated in response to illumination of a light beam. The deposition member is provided so as to face the light-transmitting portion of the airtight housing.

Description

BACKGROUND OF THE INVENTION
The present invention relates to a piezoelectric transducer, or vibrator, which is applicable particularly, but not exclusively, to electronic devices requiring a reference clock signal and a method of adjusting the oscillation frequency of the piezoelectric transducer.
A piezoelectric transducer includes a vibrating piece which has on both its surfaces electrodes for providing an electric field to the vibrating piece. The adjustment of the oscillation frequency of the piezoelectric transducer is made by partially removing the electrode provided on the vibrating piece by illumination of a laser beam (as disclosed in the Japanese Patent Provisional Publication No. 59-134412). There is a problem which arises with such an oscillation frequency adjusting method, however, in that the area of the electrode to be removed for an adequate adjustment becomes sufficiently large to thereby result in a reduction of the electric field to be produced and further increase the equivalent resistance.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to provide a piezoelectric transducer which has a simple structure and which is easy for the adjustment of the oscillation frequency and a method of effectively and accurately adjusting the oscillation frequency of the piezoelectric transducer.
The piezoelectric transducer according to the present invention comprises a piezoelectric member which is encased in an airtight housing having at least one portion which allows transmission of light. The piezoelectric member has on its surfaces electrodes and is coupled to one end portions of electrical conductors the other end portions of which extend toward the exterior of said airtight housing. A feature of the piezoelectric transducer is to provide, in the airtight housing, a deposition member which is evaporated in response to illumination of a light beam. The deposition member is provided so as to face the light-transmitting portion of the airtight housing, preferably, formed on the inner surface of the light-transmitting portion of the airtight housing by means of a deposition technique. For adjustment of the oscillation frequency of the piezoelectric transducer, the deposition member is illuminated with a laser beam emitted from the exterior of the airtight housing to be evaporated. The evaporated deposition member is attached to at least one of the electrodes provided on the piezoelectric member, whereby the oscillation frequency is adjustable in the evaporation amount of the deposition member.
BRIEF DESCRIPTION OF THE DRAWINGS
The present invention will be described in further detail with reference to the accompanying drawings, in which:
FIG. 1 is a partially broken and perspective view showing a piezoelectric transducer according to an embodiment of the present invention; and
FIG. 2 is a cross-sectional illustration for describing an adjustment method of the oscillation frequency of the FIG. 1 piezoelectric transducer.
DETAILED DESCRIPTION OF THE INVENTION
Referring now to FIG. 1, there is schematically illustrated an arrangement of a piezoelectric transducer according to an embodiment of the present invention. In FIG. 1, the piezoelectric transducer comprises a rectangular piezoelectric (vibrating) member 6 which has on both surfaces electrode plates 7 made of silver, for example, and which is supported at both sides by holding portions 4 of two electrically conductive lead traminal 3 through electrically conductive adhesive bonds 5. The electrode plates 7 are arranged to be electrically conductive to the electrically conductive lead terminals 3 through the electrically conductive bonds 5. The rectangular piezoelectric member 6, together with portions of the electrically conductive lead terminals 3, is housed in a receptacle formed by a transparent glass cover 1 and a case 2. The transparent glass cover 1 and the case 2 are integrally combined with each other by means of an adhesive bond 8 so as to form an airtight sealed receptacle. 0n the inner surface of the transparent glass cover 1 facing the rectangular piezoelectric member 6 is provided a metallic coated film 9 which is made of silver, for example, and which may be made in accordance with a well known deposition technique, the metallic coated film 9 being positioned at the center portion of the inner surface thereof. For forming the metallic coated film 9, the inner surface of the transparent glass cover 1 should preferably be roughened in advance by a known sand-blasting technique.
FIG. 2 is a cross-sectional illustration for describing a method of adjusting the oscillation frequency of the piezoelectric transducer described above with reference to FIG. 1. To adjust the oscillation frequency after the airtight sealing by the adhesive bond 8, the lead terminals 3 are connected to an adequate oscillator, not shown, so that the oscillation frequency is checked by means of an adequate frequency counter, not shown. In FIG. 2, illustrated at numeral 12 is a laser beam emitted from an adequate laser unit such as a YAG laser, not shown, which is arranged to be driven in response to an electric power of 0.5 to 3 W and which is arranged to be operable in a series of pulses by a switching device such as a Q switch so as to intermittently emit the laser light whose wavelength is 1060 nm, for example. The laser beam 12 emitted from the laser unit reaches, or illuminates, the metallic coated film 9, provided on the inner surface of the transparent glass cover 1, after passing through a lens 11 and the transparent glass cover 1. The lens 11 causes the laser beam 12 therefrom to be focused in the vicinity of the metallic coated film 9. Preferably, the laser beam 12 is focused before reaching the transparent glass cover 1, in order to prevent damage to the transparent glass cover 1 due to the laser beam 12. In response to the illumination by the laser beam 12, the illuminated portion of the metallic coated film 9 is evaporated in a moment. The evaporated metal 10 is attached to the electrode plate 7, which faces the metallic coated film 9, and the attachment of the evaporated metal 10 causes the lowering of the oscillation frequency of the piezoelectric member 6 by the so-called mass-addition effect. That is, the attachment of the evaporated metal to the electrode plate 7 results in an increase in the mass of the electrode plate 7, thereby allowing a lowering of the oscillation frequency of the piezoelectric member 6. Here, the laser unit and the lens 11 are movable along the surface of the transparent glass cover 1 whereby the metallic coated film 9 can be swept by the laser beam from the laser unit. This sweeping operation is repeatedly performed until the oscillation frequency reaches a predetermined value. In this embodiment, since the inner surface of the transparent glass cover 1 is roughened before forming the metallic coated film 9, after the evaporation of the metallic coated film 9, the laser beam 12 is scattered at the transparent glass cover 1 so as to prevent the laser beam from damaging the electrode plate 7. Although in the prior art the oscillation frequency adjustment is performed in a vacuum device, the oscillation frequency adjustment of this embodiment can be effected in atmosphere, thereby not requiring such a vacuum device for the oscillation frequency adjustment. Moreover since the oscillation frequency adjustment can be effected after the airtight sealing, it is possible to present variation of the adjusted oscillation frequency in assembling.
It should be understood that the foregoing relates to only preferred embodiments of the present invention, and that it is intended to cover all changes and modifications of the embodiments of the invention herein used for the purposes of the disclosure, which do not constitute departures from the spirit and scope of the invention.

Claims (2)

What is claimed is:
1. A piezoelectric transducer comprising:
an airtight housing having at least one portion which allows transmission of light;
a piezoelectric member provided in said airtight housing and having electrodes on its surfaces;
electrically conductive means one end portion of which is coupled to said electrodes provided on the surface of said piezoelectric member and the other end portion of which extends toward the outside of said airtight housing; and
a deposition member formed by a deposition technique and provided in said airtight housing so as to face said light-transmitting portion of said airtight housing, said deposition member being a metallic coated film which is formed on an inner surface of said light-transmitting portion of said airtight housing, the inner surface of said light-transmitting portion being roughened and said deposition member being formed on the roughened inner surface thereof.
2. A method of adjusting an oscillation frequency of a piezoelectric transducer comprising an airtight housing having at least one portion which allows transmission of light; a piezoelectric member provided in said airtight housing and having electrodes on its surfaces; electrically conductive means, one end portion of which is coupled to said electrodes provided on the surface of said piezoelectric member and the other end portion of which extends toward the outside of said airtight housing; and a deposition member formed by a deposition technique and provided in said airtight housing so as to face said light-transmitting portion of said airtight housing, said oscillation-frequency adjusting method comprising the steps of:
illuminating said deposition member with a laser beam emitted from a point external of said airtight housing;
evaporating said deposition member so that the evaporated deposition member is attached to at least one of said electrodes provided on said piezoelectric member;
said laser beam for the illumination of said deposition member being focused before reaching said light-transmitting portion of said airtight housing.
US07/457,916 1989-12-27 1989-12-27 Piezoelectric transducer and method of adjusting oscillation frequency thereof Expired - Fee Related US5138214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US07/457,916 US5138214A (en) 1989-12-27 1989-12-27 Piezoelectric transducer and method of adjusting oscillation frequency thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/457,916 US5138214A (en) 1989-12-27 1989-12-27 Piezoelectric transducer and method of adjusting oscillation frequency thereof

Publications (1)

Publication Number Publication Date
US5138214A true US5138214A (en) 1992-08-11

Family

ID=23818581

Family Applications (1)

Application Number Title Priority Date Filing Date
US07/457,916 Expired - Fee Related US5138214A (en) 1989-12-27 1989-12-27 Piezoelectric transducer and method of adjusting oscillation frequency thereof

Country Status (1)

Country Link
US (1) US5138214A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5780713A (en) * 1996-11-19 1998-07-14 Hewlett-Packard Company Post-fabrication tuning of acoustic resonators
US20030020365A1 (en) * 2001-07-26 2003-01-30 Matsushita Electric Industrial Co., Ltd. Piezoelectric thin film vibrator and method of adjusting its frequency
US20030168944A1 (en) * 2001-10-31 2003-09-11 Satoshi Shimizu Piezoelectric vibrator and manufacturing method thereof
US20040145272A1 (en) * 2003-01-29 2004-07-29 Shim Dong S. Tuning of packaged film bulk acoustic resonator filters
US20050134151A1 (en) * 2002-07-22 2005-06-23 Toyo Communication Equipment Co Piezoelectric resonator and the method for making the same
US20060006964A1 (en) * 2004-03-04 2006-01-12 Discera Method for frequency tuning of a micro-mechanical resonator
US20070200461A1 (en) * 2001-10-31 2007-08-30 Seiko Epson Corporation Apparatus and methods for manufacturing a piezoelectric resonator device
US20120157838A1 (en) * 2009-10-06 2012-06-21 Adanny Yossef Ori Ultrasound monitoring of aesthetic treatments
US9887687B2 (en) * 2015-01-28 2018-02-06 Analog Devices Global Method of trimming a component and a component trimmed by such a method

Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1114695A (en) * 1953-12-08 1956-04-16 Marconi Wireless Telegraph Co Improvements to a method of adjusting the frequency of piezoelectric cristanxes
US3006711A (en) * 1959-05-13 1961-10-31 James Knights Company Crystal assembly
GB971571A (en) * 1961-08-10 1964-09-30 Telefunken Patent Improvements in or relating to the manufacture of piezo-electric resonators
DE2262784A1 (en) * 1971-12-22 1973-07-05 Motorola Inc METHOD FOR MANUFACTURING A FREQUENCY DETERMINING CRYSTAL
US3766616A (en) * 1972-03-22 1973-10-23 Statek Corp Microresonator packaging and tuning
DE2335495A1 (en) * 1973-04-19 1975-01-02 Lasag Sa METHOD AND DEVICE FOR TUNING THE NATURAL FREQUENCY OF A VIBRATING BODY MADE OF PIEZOELECTRIC CRYSTAL
US3914836A (en) * 1974-06-21 1975-10-28 Us Army Method for processing quartz crystal resonators
JPS5219989A (en) * 1975-08-07 1977-02-15 Seikosha Co Ltd Crystal oscillator unit
JPS5240092A (en) * 1975-09-26 1977-03-28 Seiko Instr & Electronics Ltd Structure of container for quarts crystal oscillator
JPS5267995A (en) * 1975-12-04 1977-06-06 Seiko Instr & Electronics Ltd Piezoelectric oscillator
US4120759A (en) * 1976-08-10 1978-10-17 New Nippon Electric Company, Ltd. Constant current density plating method
JPS53139487A (en) * 1977-05-11 1978-12-05 Sharp Corp Manufacture of crystal vibrator
US4293986A (en) * 1977-12-05 1981-10-13 Matsushima Kogo Kabushiki Kaisha Method of making a quartz crystal oscillator
JPS5789319A (en) * 1980-11-26 1982-06-03 Kinseki Kk Piezoelectric oscillator and method for adjusting its frequency
JPS57125511A (en) * 1981-01-29 1982-08-04 Matsushima Kogyo Co Ltd Piezoelectric oscillator
US4379244A (en) * 1979-08-31 1983-04-05 Ebauches, S.A. Method of detection of the asymmetry of piezo-electric crystal resonators in the form of tuning forks and resonators for carrying it out
US4419533A (en) * 1982-03-03 1983-12-06 Energy Conversion Devices, Inc. Photovoltaic device having incident radiation directing means for total internal reflection
WO1984000082A1 (en) * 1982-06-14 1984-01-05 Gte Prod Corp Trimming of piezoelectric components
US4638536A (en) * 1986-01-17 1987-01-27 The United States Of America As Represented By The Secretary Of The Army Method of making a resonator having a desired frequency from a quartz crystal resonator plate
US4701772A (en) * 1986-11-26 1987-10-20 Xerox Corporation Thermally activated image bar
US4843282A (en) * 1988-02-16 1989-06-27 Gte Products Corporation Glow discharge starter containing silver
JPH01209810A (en) * 1988-02-17 1989-08-23 Matsushita Electric Ind Co Ltd Piezoelectric vibrator and fine adjustment method of its frequency
US4933588A (en) * 1988-12-23 1990-06-12 Raytheon Company Higher order transverse mode suppression in surface acoustic wave resonators

Patent Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1114695A (en) * 1953-12-08 1956-04-16 Marconi Wireless Telegraph Co Improvements to a method of adjusting the frequency of piezoelectric cristanxes
US3006711A (en) * 1959-05-13 1961-10-31 James Knights Company Crystal assembly
GB971571A (en) * 1961-08-10 1964-09-30 Telefunken Patent Improvements in or relating to the manufacture of piezo-electric resonators
DE2262784A1 (en) * 1971-12-22 1973-07-05 Motorola Inc METHOD FOR MANUFACTURING A FREQUENCY DETERMINING CRYSTAL
US3766616A (en) * 1972-03-22 1973-10-23 Statek Corp Microresonator packaging and tuning
US3969640A (en) * 1972-03-22 1976-07-13 Statek Corporation Microresonator packaging and tuning
DE2335495A1 (en) * 1973-04-19 1975-01-02 Lasag Sa METHOD AND DEVICE FOR TUNING THE NATURAL FREQUENCY OF A VIBRATING BODY MADE OF PIEZOELECTRIC CRYSTAL
US3914836A (en) * 1974-06-21 1975-10-28 Us Army Method for processing quartz crystal resonators
JPS5219989A (en) * 1975-08-07 1977-02-15 Seikosha Co Ltd Crystal oscillator unit
JPS5240092A (en) * 1975-09-26 1977-03-28 Seiko Instr & Electronics Ltd Structure of container for quarts crystal oscillator
JPS5267995A (en) * 1975-12-04 1977-06-06 Seiko Instr & Electronics Ltd Piezoelectric oscillator
US4120759A (en) * 1976-08-10 1978-10-17 New Nippon Electric Company, Ltd. Constant current density plating method
JPS53139487A (en) * 1977-05-11 1978-12-05 Sharp Corp Manufacture of crystal vibrator
US4293986A (en) * 1977-12-05 1981-10-13 Matsushima Kogo Kabushiki Kaisha Method of making a quartz crystal oscillator
US4379244A (en) * 1979-08-31 1983-04-05 Ebauches, S.A. Method of detection of the asymmetry of piezo-electric crystal resonators in the form of tuning forks and resonators for carrying it out
JPS5789319A (en) * 1980-11-26 1982-06-03 Kinseki Kk Piezoelectric oscillator and method for adjusting its frequency
JPS57125511A (en) * 1981-01-29 1982-08-04 Matsushima Kogyo Co Ltd Piezoelectric oscillator
US4419533A (en) * 1982-03-03 1983-12-06 Energy Conversion Devices, Inc. Photovoltaic device having incident radiation directing means for total internal reflection
WO1984000082A1 (en) * 1982-06-14 1984-01-05 Gte Prod Corp Trimming of piezoelectric components
US4638536A (en) * 1986-01-17 1987-01-27 The United States Of America As Represented By The Secretary Of The Army Method of making a resonator having a desired frequency from a quartz crystal resonator plate
US4701772A (en) * 1986-11-26 1987-10-20 Xerox Corporation Thermally activated image bar
US4843282A (en) * 1988-02-16 1989-06-27 Gte Products Corporation Glow discharge starter containing silver
JPH01209810A (en) * 1988-02-17 1989-08-23 Matsushita Electric Ind Co Ltd Piezoelectric vibrator and fine adjustment method of its frequency
US4933588A (en) * 1988-12-23 1990-06-12 Raytheon Company Higher order transverse mode suppression in surface acoustic wave resonators

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5780713A (en) * 1996-11-19 1998-07-14 Hewlett-Packard Company Post-fabrication tuning of acoustic resonators
US20030020365A1 (en) * 2001-07-26 2003-01-30 Matsushita Electric Industrial Co., Ltd. Piezoelectric thin film vibrator and method of adjusting its frequency
US20030168944A1 (en) * 2001-10-31 2003-09-11 Satoshi Shimizu Piezoelectric vibrator and manufacturing method thereof
US7429814B2 (en) * 2001-10-31 2008-09-30 Seiko Epson Corporation Apparatus and methods for manufacturing a piezoelectric resonator device
US6924582B2 (en) * 2001-10-31 2005-08-02 Seiko Instruments Inc. Piezoelectric vibrator and manufacturing method thereof
US20070200461A1 (en) * 2001-10-31 2007-08-30 Seiko Epson Corporation Apparatus and methods for manufacturing a piezoelectric resonator device
US7012353B2 (en) * 2002-07-22 2006-03-14 Toyo Communication Equipment Co., Ltd. Piezoelectric resonator and the method for making the same
US20050134151A1 (en) * 2002-07-22 2005-06-23 Toyo Communication Equipment Co Piezoelectric resonator and the method for making the same
US20040145272A1 (en) * 2003-01-29 2004-07-29 Shim Dong S. Tuning of packaged film bulk acoustic resonator filters
US6787970B2 (en) * 2003-01-29 2004-09-07 Intel Corporation Tuning of packaged film bulk acoustic resonator filters
US7170369B2 (en) * 2004-03-04 2007-01-30 Discera, Inc. Method for frequency tuning of a micro-mechanical resonator
US20060006964A1 (en) * 2004-03-04 2006-01-12 Discera Method for frequency tuning of a micro-mechanical resonator
US20120157838A1 (en) * 2009-10-06 2012-06-21 Adanny Yossef Ori Ultrasound monitoring of aesthetic treatments
US9887687B2 (en) * 2015-01-28 2018-02-06 Analog Devices Global Method of trimming a component and a component trimmed by such a method

Similar Documents

Publication Publication Date Title
US4468584A (en) Unidirectional flexure type tuning fork crystal vibrator
US5138214A (en) Piezoelectric transducer and method of adjusting oscillation frequency thereof
US5541468A (en) Monolithic transducer array case and method for its manufacture
JP3714228B2 (en) Piezoelectric vibrator and method for manufacturing piezoelectric device
EP0111483A1 (en) Trimming of piezoelectric components
CN112187207B (en) Piezoelectric vibrating piece, piezoelectric vibrator, and method for manufacturing the same
US4112324A (en) Mounting for plural piezoelectric vibrator units
JP2019125896A (en) Piezoelectric vibrating piece, piezoelectric vibrator, and manufacturing method
US4110640A (en) Standard signal generating apparatus
JP3937722B2 (en) Piezoelectric device
JP2003229720A (en) Method of manufacturing piezoelectric oscillator and piezoelectric oscillator
JPH059689Y2 (en)
JPH0456508A (en) Piezoelectric vibrator and its frequency adjustment method
JP2019153841A (en) Piezoelectric vibration piece, piezoelectric vibrator, and manufacturing method thereof
KR20040036926A (en) Surface mounting package
JPH0787331B2 (en) Piezoelectric vibrator and frequency adjusting method thereof
JP2011082736A (en) Method for manufacturing piezoelectric device
JP2002076815A (en) Package structure of AT-cut piezoelectric vibrator and frequency adjustment method thereof
JPH10117120A (en) GT cut crystal oscillator
JPH06291551A (en) Piezoelectric oscillator
JPS5833304A (en) Oscillator and its controlling method
JPH01209810A (en) Piezoelectric vibrator and fine adjustment method of its frequency
WO1984000081A1 (en) Apparatus for trimming of piezoelectric components
JPS5842966B2 (en) crystal unit
JPH09167934A (en) Crystal unit holding structure

Legal Events

Date Code Title Description
AS Assignment

Owner name: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:NAKAI, TOSHIYUKI;TANAKA, JUNJI;NISHIKAWA, YUKIO;REEL/FRAME:005205/0395

Effective date: 19891219

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 4

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
FP Lapsed due to failure to pay maintenance fee

Effective date: 20000811

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362