US5046801A - Optical waveguide having low optical damage - Google Patents

Optical waveguide having low optical damage Download PDF

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Publication number
US5046801A
US5046801A US07/587,110 US58711090A US5046801A US 5046801 A US5046801 A US 5046801A US 58711090 A US58711090 A US 58711090A US 5046801 A US5046801 A US 5046801A
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optical
single crystal
optical waveguide
damage
linbo
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Expired - Fee Related
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US07/587,110
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Akira Terashima
Takumi Fujiwara
Hiroshi Mork
Takeshi Yokoyama
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Sumitomo Metal Mining Co Ltd
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Sumitomo Metal Mining Co Ltd
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Assigned to SUMITOMO METAL MINING COMPANY LIMITED reassignment SUMITOMO METAL MINING COMPANY LIMITED ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: FUJIWARA, TAKUMI, MORI, HIROSHI, TERASHIMA, AKIRA, YOKOYAMA, TAKESHI
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion

Definitions

  • the present invention relates to an optical waveguide useful for optical communications as well as for optical information processing.
  • LiNbO 3 Single crystals of lithium niobate
  • These LiNbO 3 single crystals are advantageous in that they show large electrooptical effects, photoacoustic effects, and non-linear optical effects. Accordingly, extensive and intensive efforts have gone into development of optical devices using the LiNbO 3 .
  • most extensively studied are optical waveguides based on titanium-diffused crystal substrates. The LiNbO 3 crystals, however, suffer change in refractive index when subjected to a strong incident beam, i.e., the so-called optical damage occurs.
  • optical waveguides mentioned above comprising titanium-diffused crystals are also subject to such optical damage.
  • Optical damage is undesirable to waveguides because, when the damage occurs, the refractive index of the waveguide portion approaches that of the waveguide sheath, and consequently causes the unfavorable light leakage.
  • Concerning the mechanism of the occurrence of this optical damage on the other hand, it is qualitatively explained as follows. That is, the carrier electrons excited from the impurity level to the conductive level by the incident beam transfer along the c axis from its negative side to the positive side for a certain distance, and are then trapped in the defects such as impurities and vacancies. As a consequence, a spatial electric field, Esc, is developed in the crystal.
  • Esc spatial electric field
  • n represents the refractive index
  • r represents the electrooptical constant[cm/V]
  • Esc represents the spatial electric field[V/cm].
  • the former method comprises growing a crystal by Czochralski method from a LiNbO 3 melt added therein 5% by molar of MgO. It is reported that the resulting single crystal is improved in resistance against optical damage by about two orders of magnitude as compared with one free from additives. When an optical waveguide is produced from this single crystal diffused thereon titanium, the resulting product still suffers optical damage in the waveguide portion.
  • the latter method comprises reducing the content of impurities, particularly that of the transition elements such as iron, because those transition elements are considered most responsible for the optical damage.
  • the crystals obtained in this method are, however, yet to be improved in purity.
  • the aforementioned object is accomplished by an optical waveguide based on a lithium niobate single crystal diffused thereon titanium, wherein the lithium niobate single crystal is such having an optical absorption coefficient of 0.03 cm -1 or less at the incidence of a light 420 nm in wavelength.
  • FIG. 1 is a scheme of an optical waveguide according to an embodiment of the present invention.
  • FIG. 1 schematically shows the structure of an waveguide formed on a substrate made from a single crystal of LiNbO 3 .
  • This optical waveguide is based on a substrate (1) whose longitudinal direction, the direction of the width, and the thickness direction are taken respectively in correspondence with the a-axis direction, the b-axis, and the c-axis of the single crystal, and comprises a Mach-Zehnder interferometer (5) having arms (4) of a predetermined length, provided with two input ports (2) and (2'), and an output port (3).
  • the LiNbO 3 single crystal for use in the present invention having an optical absorption coefficient of 0.03 cm -1 with respect to a light of 420 nm in wavelength is, specifically, a LiNbO 3 single crystal low in Fe 2+ .
  • the reason for using such a LiNbO 3 single crystal resides in the fact that the degree of the optical damage is proportional to the content of Fe 2+ . Since Fe 2+ most absorbs light 420 nm in wavelength, a LiNbO 3 single crystal low in absorption coefficient for such a light is also low in Fe 2+ .
  • Those LiNbO 3 single crystals low in Fe 2+ can be prepared, for example, in a controlled atmosphere during the crystal growth, i.e., by controlling the oxygen concentration of the surrounding atmosphere.
  • a LiNbO 3 single crystal substantially clear and colorless was Czochralski-grown from a 99.9995% pure LiNbO 3 under an atmosphere the oxygen concentration of which was controlled to 10% by volume.
  • the crystal was found to have an optical absorption coefficient for a light 420 nm in wavelength of 0.03 cm -1 .
  • a substrate 40 mm in length, 10 mm in width, and 0.5 mm in thickness was produced from this substrate in such a manner that the directions of the crystal axes a, b, and c, be respectively in correspondence with the length, width, and the thickness direction of the substrate.
  • On this substrate was diffused titanium, to thereby form an optical waveguide as shown in FIG. 1.
  • This optical waveguide comprises a Mach-Zehnder interferometer having an arm 16 mm in length and 7 mm in width, with two input ports (2 and 2') each 7 ⁇ m in width and 5 ⁇ 10 -7 cm 2 in waveguide cross section, and an output port (3) having the same width and waveguide cross section as those of the input ports.
  • a He-Ne laser beam 0.633 ⁇ m in wavelength was irradiated as an incidence beam to induce optical damage in the input port (2), while introducing into port (2') an LD light 1.3 ⁇ m in wavelength in TE mode with a proper beam intensity not capable to cause optical damage, so that this LD beam may serve as the probe beam to measure the change in refractive index ascribed to optical damage.
  • S ⁇ represents the optical damage sensitivity [cm 2 /J]
  • ⁇ represents the wavelength of the probe beam [ ⁇ m]
  • L represents the arm length of the interferometer [mm]
  • Iir represents the intensity of the laser beam irradiation [W/cm 2 ]
  • t ⁇ represents the period of time the output intensity of the probe beam drops from its maximum to its minimum [seconds].
  • the optical waveguide according to the present invention is 5 times improved in resistance against optical damage as compared with a prior art optical waveguide.
  • An optical waveguide schematically shown in FIG. 1 was produced using a LiNbO 3 single crystal Czochralski-grown from a 99.9995% pure LiNbO 3 under an atmosphere the oxygen concentration of which was controlled to 0.1% by volume and heat-treated in air at 1100° C. for 4 hours.
  • the heat-treated crystal was found to have an optical absorption coefficient of 0.03 cm -1 in a light 420 nm in wavelength.
  • This optical waveguide was subjected to the same test as in Example 1, to find that it has an almost constant S ⁇ of 1 ⁇ 10 -8 cm 2 /J for laser beam intensity of 20 W/cm 2 or less, which suddenly increases with the intensity exceeding 20 W/cm 2 .
  • An optical waveguide schematically shown in FIG. 1 was produced from a commercially available Czochralski-grown LiNbO 3 single crystal, and was subjected to measurements for optical damage sensitivity, S ⁇ , in the same way as in the Examples above.
  • the S ⁇ obtained by measuring the output intensity of the probe beam while changing the incident laser beam intensity was 1 ⁇ 10 -7 cm 2 /J for a laser beam intensity up to 5 W/cm 2 , which was found to quickly rise with higher intensity thereafter.
  • the optical waveguides according to the present invention show improved resistances against optical damage by five times of more as compared with the prior art waveguides, and are therefore suitable for devices subjected to incidence beam of higher intensity.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
US07/587,110 1989-09-27 1990-09-24 Optical waveguide having low optical damage Expired - Fee Related US5046801A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1-249244 1989-09-27
JP1249244A JP2680699B2 (ja) 1989-09-27 1989-09-27 光導波路の形成方法

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US5046801A true US5046801A (en) 1991-09-10

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JP (1) JP2680699B2 (fr)
DE (1) DE4030610A1 (fr)
FR (1) FR2652420B1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291576A (en) * 1992-06-18 1994-03-01 Ibiden Co., Ltd. Single mode optical waveguide

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3957342A (en) * 1974-07-29 1976-05-18 The Post Office Sodium borosilicate glasses for dielectric optical waveguides
US4783136A (en) * 1986-04-16 1988-11-08 Gte Laboratories Incorporated Optical waveguides and methods for making same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640736A (en) * 1980-10-02 1987-02-03 Xerox Corporation Wave guide fabrication method
JPS60202405A (ja) * 1984-03-27 1985-10-12 Canon Inc 光導波路材

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3957342A (en) * 1974-07-29 1976-05-18 The Post Office Sodium borosilicate glasses for dielectric optical waveguides
US4783136A (en) * 1986-04-16 1988-11-08 Gte Laboratories Incorporated Optical waveguides and methods for making same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5291576A (en) * 1992-06-18 1994-03-01 Ibiden Co., Ltd. Single mode optical waveguide

Also Published As

Publication number Publication date
JPH03111803A (ja) 1991-05-13
JP2680699B2 (ja) 1997-11-19
DE4030610A1 (de) 1991-04-04
FR2652420A1 (fr) 1991-03-29
FR2652420B1 (fr) 1994-04-08

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