US4972713A - Sensor of the theft and the like of automobiles - Google Patents

Sensor of the theft and the like of automobiles Download PDF

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Publication number
US4972713A
US4972713A US07/359,049 US35904989A US4972713A US 4972713 A US4972713 A US 4972713A US 35904989 A US35904989 A US 35904989A US 4972713 A US4972713 A US 4972713A
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US
United States
Prior art keywords
film
vibration
carrier film
sensor
theft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US07/359,049
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English (en)
Inventor
Keisuke Iwata
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IWATA ELECTRIC KK
Original Assignee
IWATA ELECTRIC KK
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Publication date
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Assigned to KABUSHIKI KAISHA IWATA ELECTRIC reassignment KABUSHIKI KAISHA IWATA ELECTRIC ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: IWATA, KEISUKE
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Publication of US4972713A publication Critical patent/US4972713A/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
    • B60R25/00—Fittings or systems for preventing or indicating unauthorised use or theft of vehicles
    • B60R25/10—Fittings or systems for preventing or indicating unauthorised use or theft of vehicles actuating a signalling device
    • B60R25/1004—Alarm systems characterised by the type of sensor, e.g. current sensing means
    • B60R25/1006—Mechanical sensors, e.g. pendulums
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02827—Elastic parameters, strength or force

Definitions

  • This invention relates to a sensor of the theft and the like of an automobile fitted in such prober space as within the engine compartment, chassis, passenger compartment, center pillar or trunk of an automobile to generate a signal by sensing such vibration as at the time of the theft of the automobile, that is, the vibration of the automobile artificially applied by the intrusion into the automobile compartment from outside, removal of the tire, breaking of the window glass and insertion of the key into the key hole of the door or trunk and to thereby prevent the theft and the like of the automobile as combined with any alarm and the like.
  • sensors of the theft and the like of automobiles as a sensor 1 utilizing the resonance of a vibrating plate of a hat-like cross-section as shown in FIG. 4, a sensor 2 utilizing the resonance of a disk-like vibrating plate fixed on the outer periphery as shown in FIG. 5 and a sensor 3 utilizing an electromagnetic induction as shown in FIG. 6.
  • the reference numeral 4 represents a housing
  • 5 represents such rigid vibrating plate as a metal plate of a hat-like cross-section with both feet fixed to the housing 4
  • 6 represents a piezo-electric element pasted to the vibrating plate 5
  • 7 and 8 represent lead wires for taking out the output signals of the piezo-electric element 6.
  • This sensor 1 is fitted in such proper space as within the passenger compartment of an automobile so that the vibrating plate 5 may vibrate with the rocking of the automobile at the time of the theft, the vibration may be converted to an electric signal by the piezo-electric element 6, the signal may be output from between the lead wires 7 and 8 and the theft and the like may be thereby sensed.
  • the reference numeral 9 represents a housing
  • 10 represents such rigid vibrating plate as a disk-like metal plate fixed on the outer periphery to the housing 9
  • 11 represents a piezo-electric element pasted to this vibrating plate 10
  • 12 and 13 represent lead wires for taking out the output signals of the piezo-electric element 11.
  • this sensor 2 is fitted in such proper space as within the passenger compartment of an automobile so that the vibrating plate may vibrate with the rocking of the automobile at the time of the theft, this vibration may be converted to an electric signal by the piezo-electric element 11, this signal may be output from between the lead wires 7 and 8 and the theft or the like of the automobile may be thereby sensed.
  • the reference numeral 14 represents a housing
  • 15 represents an elastic string provided as stretched in this housing 14
  • 16 represents a weight provided in the middle of this elastic string and formed of a permanent magnet 17 exposed on the lower surface.
  • a copper wire coil 18 is provided below the above mentioned weight 16.
  • the principle of the vibration of this sensor 3 is of a torsion bar system with the elastic string 15 as an axis so that, when the automobile is vibrated, the weight 16 will swing as a pendulum with the elastic string 15 as an axis, the magnetic flux intersecting the copper wire coil 18 by the permanent magnet 17 of the weight 16 will vary, an induction current will be generated in this copper wire coil 18 and the theft and the like of the automobile will be thereby sensed.
  • a sensor of the theft and the like of an automobile there has been provided a sensor provided with a vibration converting part for converting the vibration of the car body to an electric signal of a frequency coinciding with the frequency of this vibration over a wide frequency band without utilizing the resonance.
  • a filter has been indispensable to prevent a mis-operation from being caused by an external acoustic noise or meteorological factor. That is to say, as the above mentioned vibration converting part converts to an electric signal not only the vibration of the car body of a low frequency generated at the time of the theft or the like but also the vibration of the car body of a comparatively high frequency based on such external sound as of a klaxson of another car, siren of an emergency car, rainfall or wind or on a meterological factor, a filter for taking only the signal based on the vibration of the car body of a low frequency generated at the time of the theft out of the electric signals has been indispensable to the above mentioned sensor.
  • This invention is to provide a sensor of the theft and the like of an automobile wherein the theft and the like of an automobile can be positively sensed, a mis-operation by an external acoustic noise or the like can be prevented without requiring a filter, even if the car body inclines much while parked, the sensitivity will not substantially reduce, a mis-operation under the influence of an electromagnetic induction from outside or an operation failure by an excess input is not likely to occur, the contour can be made small and the formation is simple and cheap.
  • a piezo-electric film is pasted to one surface of an elastic film fixed at the ends and a weight is attached substantially to the middle of the other surface of this elastic film.
  • the sensor according to the present invention is fitted in a proper space of an automobile. Therefore, in the present invention, as the weight is attached substantially to the middle of the elastic film fixed at the ends, when the car body vibrates, the above mentioned elastic film will be vibrated by the operation of the above mentioned elastic film and weight. As a piezo-electric film is pasted to the elastic film, with the vibration of the elastic film, a mechanical extending and contracting force will be applied to the piezo-electric film and an electric signal as a sensing signal will be obtained from this piezo-electric film.
  • the resonant frequency of the above mentioned elastic film is determined by the mass of the weight and the tension and size of the elastic film, by properly selecting them, the resonant frequency of the elastic film can be made a low frequency below several 10 H z .
  • the elastic film is used instead of such rigid vibrating plate as a metal plate, the resonant sharpness will be comparatively small. Therefore, according to the present invention, when a vibration of a frequency in a comparatively wide range of a frequency band below several 10 H z is produced in an automobile, a comparatively large signal will be able to be obtained from the piezo-electric film.
  • the present invention as a low frequency vibration of an automobile is detected, there can be obtained an advantage that no mis-operation will be made by an external unnecessary acoutic noise or the like.
  • a comparatively large signal will be obtained from the piezo-electric film when a low frequency vibration is produced in the automobile, no filter is required and there can be obtained an advantage that the sensor can be provided at a low cost.
  • the mass of the weight acts to reduce the resonant frequency of the elastic film in reducing the resonant frequency of the elastic film to a low frequency as described above, the resonant frequency can be set at a low frequency without making the elastic film large and therefore there can be obtained an advantage that the contour of the sensor can be made small.
  • the sensitivity will reduce only in proportion to the cosine (cos ⁇ ) of the inclination angle ⁇ and therefore there can be obtained an advantage that the sensitivity will not substantially reduce.
  • the senor of the present invention is formed of an elastic film, piezo-electric film and weight, there can be obtained an advantage that the structure is simple and can be provided at a low cost.
  • FIG. 1 is a perspective view showing an essential part of a sensor of the theft and the like of an automobile embodying the present invention.
  • FIG. 2 is a vertically sectioned view of the same.
  • FIG. 3 is an electric circuit diagram showing an example of an outside circuit.
  • FIG. 4 is a vertically sectioned view showing a conventional sensor of the theft and the like of an automobile.
  • FIG. 5 is a vertically sectioned view showing another conventional sensor of the theft and the like of an automobile.
  • FIG. 6 is a partly sectioned perspective view showing further another conventional sensor of the theft and the like of an automobile.
  • FIG. 1 is a perspective view showing an essential part of a sensor of the theft and the like of an automobile according to the present invention.
  • FIG. 2 is a vertically sectioned view of the same.
  • the reference numeral 20 represents an elastic film fixed at the ends, a piezo-electric film 21 is pasted to one surface of this elastic film 20 and a weight 22 is attached substantially to the middle of the other surface of the elastic film 20.
  • the above mentioned elastic film 20 may be made of any material but preferably of a silicone rubber little in the variation with the lapse of years.
  • the above mentioned elastic film 20 is formed to be rectangular and has stoppers 23 formed integrally at both ends, fitted in grooves 25 in supporting stands 24 and bonded with a bonding agent or the like.
  • the elastic film 20 may be fixed at the ends by any other method.
  • the elastic film 20 may be fixed at the ends directly to the tips of the supporting stands 24 by being bonded with a bonding agent or the like without forming the above mentioned stoppers 23 or may be fixed with pressing plates and rivets.
  • the contour of the elastic film 20 is not limited to be rectangular but may be made, for example, circular and may be fixed on the periphery.
  • the supporting stands 24 are housed together with the other component parts in a box-like housing 26 and are fixed to the housing 26.
  • the elastic film 20 may be fixed at the ends directly to the wall surfaces of the housing 26.
  • the weight 22 is attached to the elastic film 20 by being contained in a bag 27 molded integrally with the elastic film 20.
  • the weight 22 attaching method is not limited to this but, for example, the weight 22 may be bonded to the elastic film 20 with a bonding agent or the like.
  • the contour of the weight 22 is made cubic but is not limited to be so and may be, for example, columnar.
  • the material of the weight 22 is not particularly limited but it is desirable to form the weight 22 by using such material of a large specific gravity as lead.
  • the piezo-electric film 21 may be any film but may be preferably such soft film as, for example, of PVDF (polyvinylidene fluoride) or such high molecular weight piezo-electric film as of PECM because, even when subjected to a strong mechanical shock, it will not be likely to be broken.
  • the thickness of the piezo-electric film 21 is not particularly limited but may be, for example, about 10 ⁇ m.
  • the piezo-electric film 21 has on both surfaces electrode parts 28 and 29 to which lead wires 30 and 31 are respectively connected.
  • the housing 26 is fitted directly or by using other metal pieces or the like in such proper space as within the engine compartment, chassis, passenger compartment, center pillar or trunk of an automobile. Therefore, when the car body vibrates, the vibration will be transmitted to the elastic film 20 through the housing 26 and supporting stands 24 and the elastic film 20 will be vibrated by the operation of the elastic film 20 and weight 22. As the piezo-electric film 21 is pasted to the elastic film 20, a mechanical extending and contracting force will be applied to the piezo-electric film 21 with the vibration of the elastic film 20 and an electric signal as a sensing signal will be obtained between the lead wires 30 and 31.
  • the elastic film 20 is formed to be rectangular and is fixed at both ends, if the mass of the weight 22 is represented by m, the length between both ends of the elastic film 20 is represented by l, the tension of the elastic film 20 is represented by T and the constant is represented by k, the resonant frequency f r of the above mentioned elastic film 20 will be: ##EQU1## After all, as the resonant frequency f r of the elastic film 20 is determined by the mass of the weight 22, the length between both ends of the elastic film 20 and its tension, by properly selecting them, the resonant frequency of the elastic film 20 can be made below several 10 H z . Therefore, according to the present invention, when a vibration of a frequency in a comparatively wide range among frequencies below several 10 H z is produced in an automobile, a comparatively large signal will be able to be obtained from the piezo-electric film 21.
  • the present invention as the low frequency vibration of the automobile is detected, there can be obtained an advantage that no mis-operation will be made by an external unnecessary acoustic noise or the like. Also, as a vibration of a smaller resonant sharpness and in a comparatively wider range than in a conventional sensor using a vibrating plate can be sensed, there can be obtained an advantage that, even if the kind and loaded weight of the automobile are different, the theft and the like will be able to be positively sensed. Further, when a low frequency vibration is produced in the automobile, a comparatively large signal will be obtained from the piezo-electric film 21 and therefore there can be obtained an advantage that no filter is required and the sensor can be provided cheaply.
  • the mass of the weight 22 will act to reduce the resonant frequency of the elastic film 20, therefore the resonant frequency can be set at a low frequency without making the elastic film 20 large and there can be obtained an advantage that the contour of the sensor can be made small.
  • the sensitivity will reduce only in proportion to the cosine (cos ⁇ ) of the inclination angle and therefore there can be obtained an advantage that the sensitivity will not substantially reduce. Therefore, there can be obtained an advantage that, if the sensor of the present invention is fitted to an automobile so that the plane of the elastic film 20 may be substantially horizontal, there will be no need of being nervous to make the plane of the elastic film 20 perfectly horizontal when fitted.
  • the piezo-electric film 21 is used but no copper wire coil is used, there can be obtained an advantage that a mis-operation under the influence of an electromagnetic induction from outside by high voltage lines embedded under the ground or transmitting antennae transmitting strong electromagnetic waves and an operation failure by an excess input are not likely to occur.
  • an electric signal as a sensing signal of the theft and the like of an automobile is obtained between the lead wires 30 and 31, by properly processing this signal with a separately provided electric circuit, for example, an electric circuit connecting an amplifier, detector, holding circuit, relay driving circuit and relay in the order mentioned, there can be formed a crime preventing alarm apparatus or the like wherein such abnormal situation as when the tire to be stolen is jacked up, the body weight is loaded at the time of the intrusion into the car, the window glass is broken, the key is inserted into the key hole of the door or trunk or the parked car is struck from behind or is tugged can be made known to the owner or the like by sounding a buzzer or emitting a wireless electric wave signal.
  • a separately provided electric circuit for example, an electric circuit connecting an amplifier, detector, holding circuit, relay driving circuit and relay in the order mentioned
  • FIG. 3 An example of an outside circuit connected to the sensor of the present invention is shown in FIG. 3.
  • the reference numeral 40 represents an amplifier to which the above mentioned lead wires 30 and 31 are connected and into which the output signal of the piezo-electric film 21 is input
  • 41 represents a detector receiving the output signal of this amplifier, convering the signal above a predetermined level to a direct current voltage signal and outputting it
  • 42 represents a switching transistor in which the output signal of this detector 41 is input into the base.
  • the collector of this switching transistor 42 is connected to a direct current source V cc through a coil part 43 of a relay and the emitter is earthed through a light emitting diode 44.
  • the reference numeral 45 represents a speaker
  • 46 represents an oscillator generating an alarming sound by driving this speaker 45
  • 47 represents a contact of the above mentioned relay and conducting when a voltage is applied to the above mentioned coil part 43.
  • the outside circuit connected to the sensor of the present invention is not limited to the above mentioned formation shown in FIG. 3 but may be of any other formation.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Burglar Alarm Systems (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
US07/359,049 1989-03-08 1989-05-30 Sensor of the theft and the like of automobiles Expired - Fee Related US4972713A (en)

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JP1-26532[U] 1989-03-08
JP2653289U JPH02119784U (zh) 1989-03-08 1989-03-08

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Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5289159A (en) * 1991-11-28 1994-02-22 Kabushiki Kaisha Iwata Electric Automobile alarm circuit responsive to multi-frequency phenomena
US5317929A (en) * 1991-02-07 1994-06-07 Brown David A Fiber optic flexural disk accelerometer
US5512874A (en) * 1994-05-04 1996-04-30 T. B. Poston Security device
US5523644A (en) * 1990-05-16 1996-06-04 Witehira; Pita Piezoelectric motion sensor
US5635629A (en) * 1993-08-03 1997-06-03 Nippondenso Co., Ltd. Knock sensor
US5811910A (en) * 1997-01-30 1998-09-22 Cameron; Graham P. Mechanical shock sensor
US6053045A (en) * 1995-07-17 2000-04-25 Murata Manufacturing Co., Ltd. Impact sensor
US6069560A (en) * 1995-08-30 2000-05-30 Covial Device Ab Detector for detecting vibrations
US20050066736A1 (en) * 2003-09-29 2005-03-31 Yoshiaki Ohbayashi Piezoelectric vibration sensor
WO2006046989A1 (en) * 2004-10-21 2006-05-04 Michelin Recherche Et Technique S.A. A miniaturized piezoelectric based vibrational energy harvester
US20080061969A1 (en) * 2004-08-04 2008-03-13 Matsushita Electric Industrial Co., Ltd. Invasion Detection Device
US20090206703A1 (en) * 2006-08-11 2009-08-20 Ralf Reichenbach Circuit Module
US20100007246A1 (en) * 2008-06-26 2010-01-14 Franz Laermer Bending transducer device for generating electrical energy from deformations and circuit module
US20100033060A1 (en) * 2008-08-08 2010-02-11 Franz Laermer Bending transducer for generating electrical energy from mechanical deformations
CN102095891A (zh) * 2010-11-09 2011-06-15 浙江大学 温度不敏感的加速度传感用光纤线圈组件
US20120073371A1 (en) * 2010-09-28 2012-03-29 Infineon Technologies Ag Microelectromechanical sensor
US20120074812A1 (en) * 2009-06-26 2012-03-29 Murata Manufacturing Co., Ltd. Piezoelectric Power Generator and Wireless Sensor Network Apparatus
DE10354281B4 (de) * 2003-11-20 2012-10-25 Marco Systemanalyse Und Entwicklung Gmbh Sensor
AT13629U1 (de) * 2011-07-08 2014-05-15 Bachmann Gmbh Piezoelektrischer sensor
US8991253B2 (en) 2010-09-28 2015-03-31 Infineon Technologies Ag Microelectromechanical system
US20150226618A1 (en) * 2014-02-10 2015-08-13 Texas Instruments Incorporated Piezoelectric thin-film sensor and use thereof
US20160101438A1 (en) * 2014-10-10 2016-04-14 Samsung Electro-Mechanics Co., Ltd. Piezoelectric vibration actuator
US20170123548A1 (en) * 2015-10-29 2017-05-04 Texas Instruments Incorporated Integrated force sensing element
US20180192204A1 (en) * 2017-01-05 2018-07-05 Robert Bosch Gmbh Micromechanical sound transducer system and corresponding manufacturing method
US11367458B2 (en) * 2020-08-21 2022-06-21 Waymo Llc Accelerometer inside of a microphone unit

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US4395908A (en) * 1981-08-27 1983-08-02 Western Geophysical Co. Of America Means for adjusting the sensitivity of a crystal detector
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US4749056A (en) * 1987-01-22 1988-06-07 Kabushiki Kaisha Iwata Electric Sensor of the theft and the like of an automobile

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Publication number Priority date Publication date Assignee Title
US3206980A (en) * 1962-10-29 1965-09-21 Kollsman Instr Corp Solid state altimeter
US4051395A (en) * 1975-08-08 1977-09-27 Minnesota Mining And Manufacturing Weight actuated piezoelectric polymeric transducer
US4395908A (en) * 1981-08-27 1983-08-02 Western Geophysical Co. Of America Means for adjusting the sensitivity of a crystal detector
US4712098A (en) * 1985-07-27 1987-12-08 Tapeimp Limited Inertia sensitive device
US4732041A (en) * 1986-11-21 1988-03-22 Kabushiki Kaisha Iwata Electric Automobile theft sensor
US4749056A (en) * 1987-01-22 1988-06-07 Kabushiki Kaisha Iwata Electric Sensor of the theft and the like of an automobile

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5523644A (en) * 1990-05-16 1996-06-04 Witehira; Pita Piezoelectric motion sensor
US5317929A (en) * 1991-02-07 1994-06-07 Brown David A Fiber optic flexural disk accelerometer
US5369485A (en) * 1991-02-07 1994-11-29 The United States Of America As Represented By The Secretary Of The Navy Fiber optic accelerometer with centrally supported flexural disk
US5289159A (en) * 1991-11-28 1994-02-22 Kabushiki Kaisha Iwata Electric Automobile alarm circuit responsive to multi-frequency phenomena
US5635629A (en) * 1993-08-03 1997-06-03 Nippondenso Co., Ltd. Knock sensor
US5512874A (en) * 1994-05-04 1996-04-30 T. B. Poston Security device
US6053045A (en) * 1995-07-17 2000-04-25 Murata Manufacturing Co., Ltd. Impact sensor
US6069560A (en) * 1995-08-30 2000-05-30 Covial Device Ab Detector for detecting vibrations
US5811910A (en) * 1997-01-30 1998-09-22 Cameron; Graham P. Mechanical shock sensor
US20050066736A1 (en) * 2003-09-29 2005-03-31 Yoshiaki Ohbayashi Piezoelectric vibration sensor
DE10354281B4 (de) * 2003-11-20 2012-10-25 Marco Systemanalyse Und Entwicklung Gmbh Sensor
US20080061969A1 (en) * 2004-08-04 2008-03-13 Matsushita Electric Industrial Co., Ltd. Invasion Detection Device
US7692366B2 (en) 2004-10-21 2010-04-06 Michelin Recherche Et Technique S.A. Miniaturized piezoelectric based vibrational energy harvester
WO2006046989A1 (en) * 2004-10-21 2006-05-04 Michelin Recherche Et Technique S.A. A miniaturized piezoelectric based vibrational energy harvester
WO2006046938A1 (en) * 2004-10-21 2006-05-04 Societe De Technologie Michelin A miniaturized piezoelectric based vibrational energy harvester
US20080136292A1 (en) * 2004-10-21 2008-06-12 Jack Thiesen Miniaturized Piezoelectric Based Vibrational Energy Harvester
CN100553002C (zh) * 2004-10-21 2009-10-21 米其林技术公司 小型化压电基的振动能量收集器
US20090206703A1 (en) * 2006-08-11 2009-08-20 Ralf Reichenbach Circuit Module
US7919907B2 (en) * 2006-08-11 2011-04-05 Robert Bosch Gmbh Circuit module
US20100007246A1 (en) * 2008-06-26 2010-01-14 Franz Laermer Bending transducer device for generating electrical energy from deformations and circuit module
US8154174B2 (en) * 2008-06-26 2012-04-10 Robert Bosch Gmbh Bending transducer device for generating electrical energy from deformations and circuit module
US20100033060A1 (en) * 2008-08-08 2010-02-11 Franz Laermer Bending transducer for generating electrical energy from mechanical deformations
US8040023B2 (en) * 2008-08-08 2011-10-18 Robert Bosch Gmbh Bending transducer for generating electrical energy from mechanical deformations
US20120074812A1 (en) * 2009-06-26 2012-03-29 Murata Manufacturing Co., Ltd. Piezoelectric Power Generator and Wireless Sensor Network Apparatus
US8604674B2 (en) * 2009-06-26 2013-12-10 Murata Manufacturing Co., Ltd. Piezoelectric power generator and wireless sensor network apparatus
US20120073371A1 (en) * 2010-09-28 2012-03-29 Infineon Technologies Ag Microelectromechanical sensor
US8991253B2 (en) 2010-09-28 2015-03-31 Infineon Technologies Ag Microelectromechanical system
US9075078B2 (en) * 2010-09-28 2015-07-07 Infineon Technologies Ag Microelectromechanical accelerometer with wireless transmission capabilities
CN102095891A (zh) * 2010-11-09 2011-06-15 浙江大学 温度不敏感的加速度传感用光纤线圈组件
AT13629U1 (de) * 2011-07-08 2014-05-15 Bachmann Gmbh Piezoelektrischer sensor
US11131589B2 (en) 2014-02-10 2021-09-28 Texas Instruments Incorporated Piezoelectric thin-film sensor and use thereof
US20150226618A1 (en) * 2014-02-10 2015-08-13 Texas Instruments Incorporated Piezoelectric thin-film sensor and use thereof
US9970831B2 (en) * 2014-02-10 2018-05-15 Texas Instruments Incorporated Piezoelectric thin-film sensor
US20160101438A1 (en) * 2014-10-10 2016-04-14 Samsung Electro-Mechanics Co., Ltd. Piezoelectric vibration actuator
US9931671B2 (en) * 2014-10-10 2018-04-03 Mplus Co., Ltd. Piezoelectric vibration actuator
US20170123548A1 (en) * 2015-10-29 2017-05-04 Texas Instruments Incorporated Integrated force sensing element
US10353503B2 (en) * 2015-10-29 2019-07-16 Texas Instruments Incorporated Integrated force sensing element
US11487381B2 (en) 2015-10-29 2022-11-01 Texas Instruments Incorporated Piezoelectric sensor apparatus
US10547951B2 (en) * 2017-01-05 2020-01-28 Robert Bosch Gmbh Micromechanical sound transducer system and corresponding manufacturing method
US20180192204A1 (en) * 2017-01-05 2018-07-05 Robert Bosch Gmbh Micromechanical sound transducer system and corresponding manufacturing method
US11367458B2 (en) * 2020-08-21 2022-06-21 Waymo Llc Accelerometer inside of a microphone unit
US11705149B2 (en) 2020-08-21 2023-07-18 Waymo Llc Accelerometer inside of a microphone unit

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