US4913763A - Die bonding apparatus - Google Patents

Die bonding apparatus Download PDF

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Publication number
US4913763A
US4913763A US07/289,233 US28923388A US4913763A US 4913763 A US4913763 A US 4913763A US 28923388 A US28923388 A US 28923388A US 4913763 A US4913763 A US 4913763A
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United States
Prior art keywords
collet
moving block
vertically moving
die
contact
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US07/289,233
Inventor
Nobuto Yamazaki
Minoru Kawagishi
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Shinkawa Ltd
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Shinkawa Ltd
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Publication date
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Assigned to KABUSHIKI KAISHA SHINKAWA reassignment KABUSHIKI KAISHA SHINKAWA ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: FUKE, SHIGERU, KAWAGISHI, MINORU, YAMAZAKI, NOBUTO
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Publication of US4913763A publication Critical patent/US4913763A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75—Apparatus for connecting with bump connectors or layer connectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/82—Pressure application arrangements, e.g. transmission or actuating mechanisms for joining tools or clamps
    • B29C66/822—Transmission mechanisms
    • B29C66/8227—Transmission mechanisms using springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/92—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools
    • B29C66/924—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools
    • B29C66/9241—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force or the mechanical power
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/90—Measuring or controlling the joining process
    • B29C66/92—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools
    • B29C66/924—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools
    • B29C66/9261—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the displacement of the joining tools
    • B29C66/92611—Measuring or controlling the joining process by measuring or controlling the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the pressure, the force, the mechanical power or the displacement of the joining tools by controlling or regulating the displacement of the joining tools by controlling or regulating the gap between the joining tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00—General aspects of processes or apparatus for joining preformed parts
    • B29C66/80—General aspects of machine operations or constructions and parts thereof
    • B29C66/87—Auxiliary operations or devices
    • B29C66/872—Starting or stopping procedures

Definitions

  • the present invention relates to a die bonding apparatus which is used to bond dies to a substrate, etc.
  • a collet In conventional die bonding apparatuses, a collet is simply raised and lowered by a raising and lowering mechanism. Accordingly, adjustment of the height of the collet must be performed by lowering the collet while observing the gap between the substrate and the collet with a microscope.
  • the height of the collet is adjusted visually. Accordingly, it requires skill and a considerable amount of time to adjust. Furthermore, since the position where the die adhered to the collet by suction cannot be quantitatively judged, the collet must be lowered at a slower rate. Accordingly, the production characteristics of the apparatus are poor. Furthermore, it is difficult to alter the bonding load which presses the die against the substrate in accordance with the type of die and type of substrate involved.
  • one object of the present invention is to provide a die bonding apparatus which allows quick and easy adjustment of the height of the collet.
  • Another object of the present invention is to provide a die bonding apparatus which allows rapid lowering of the collet to a fixed position above the substrate.
  • Still another object of the present invention is to provide a die bonding apparatus in which the bonding load can be easily and arbitrarily altered.
  • the collet holder and the collet both move up and down in accordance with the upward and downward motion of the vertically moving block. Accordingly, when the vertically moving block is lowered, the die adhering to the collet by suction contacts a substrate so that lowering of the collet holder is stopped. However, since the vertically moving block is designed so that it can be lowered even further, when the vertically moving block is thus lowered further, the two contacts are separated from each other.
  • the position at which the die contacts the substrate is detected, and the position, which is a fixed position above the substrate to which the vertically moving block can be lowered at a rapid rate, can be easily set via a detection signal generated by the separation of the two contacts as a standard.
  • the force pressing the two contacts against each other varies depending upon the amount that the vertically moving block is further lowered, which is decided by the signal generated by the separation of the contacts as a standard. Accordingly, the bonding load can be easily and arbitrarily adjusted and altered.
  • FIG. 1 is a front view of the die bonding apparatus
  • FIG. 2 is a left side view thereof
  • FIG. 3 is a plan view thereof.
  • a vertically moving block 1 is mounted on an X-Y table, which is known in prior art and not shown in the Figures, so that the vertically moving block 1 can be moved in the X and Y directions.
  • This vertically moving block 1 is driven upward and downward by a known vertical driving mechanism such as a cam, screw, etc.
  • a ball slide 2 which has a vertical guide section 2a is fixed to the vertically moving block 1, and a collet holder 3 is installed in this guide section 2a so that the collet holder 3 is free to move upward and downward.
  • a first contact 5 is provided on the vertically moving block 1 via an insulating bush 4, and a second contact 6 is provided on the collet holder 3 so that the second contact 6 contacts the upper surface of the first contact 5.
  • a first terminal 7 is provided on the first contact 5, and a second terminal 8 is provided on the vertically moving block 1, which is electrically connected to the second contact 6.
  • the second terminal 8 is grounded, and voltage is applied to both terminals 7 and 8 by a means not shown in the Figures.
  • a load adjusting screw 10 is screwed into a portion of the vertically moving block 1 which is located above the second contact 6.
  • a compression spring 11 is provided in the space between this load adjusting screw 10 and the second contact 6.
  • a collet 12 is provided on the collet holder 3, and a pipe 13 is fastened to the collet holder 3 so that the pipe 13 is connected to the suction-adhesion hole 12a of this collet 12.
  • the pipe 13 is connected to a vacuum pump which is not shown in the Figures.
  • the height level of the collet 12 is adjusted. With a die 14 adhered to the collet 12 by vacuum suction, the collet 12 is positioned above a substrate 15 which is placed on a substrate table (not shown in the Figures). The vertically moving block 1 is then lowered. Thus, the collet holder 3 and the collet 12 are both lowered. When the die 14 contacts the substrate 15, lowering of the collet 12 and collet holder 3 is stopped. However, the vertically moving block 1 can be lowered even further because of the space between the screw 10 and the second contact 6 and of the spring 11 provided between these two elements. Thus, when the vertically moving block 1 is lowered further, the contacts 5 and 6 are separated from each other.
  • a signal which is generated by separation of the contacts 5 and 6 is stored in an arithmetic unit not shown in the Figures.
  • the position at which rapid lowering of the collet 12 is stopped can be set, and the bonding load (i. e., the amount to which the vertically moving block 1 is further lowered) can also be set.
  • the position at which rapid lowering of the collet 12 is stopped is decided as follows: If, for example, such a position where the collet 12 is lowered and the die 14 is 0.1 mm above the substrate 15, the position of the vertically moving block 1 where the die 14 is positioned 0.1 mm above the substrate is stored in the arithmetic unit using the detection signal generated by separation of the contacts 5 and 6 as a standard.
  • the amount that the vertically moving block 1 is further lowered can be empirically set in accordance with the materials and sizes, etc., of the die 14 and substrate 15 by using the signal generated by separation of the contacts 5 and 6 as a standard.
  • the collet 12 first picks up the die 14 by suction at a die pick-up position not shown in the Figures.
  • the vertically moving block 1 is then moved in the X and Y directions so that the collet 12 is positioned above the substrate 15.
  • the vertically moving block 1 is then lowered at a rapid rate, and when the die 14 reaches the position 0.1 mm above the substrate 15, the vertically moving block 1 is lowered at a slow rate in accordance with a command from the arithmetic unit.
  • the vertically moving block 1 is lowered further after the die 14 has contacted the substrate 15, the contacts 5 and 6 are separated from each other so that the detection signal is output. With this detection signal, the vertically moving block 1 is lowered by a predetermined amount using the detection signal as a standard. As a result, the die 14 is pressed against the substrate 15 under a predetermined bonding load and is thus bonded thereto. Afterward, the vertically moving block 1 is raised.
  • the present invention allows the position at which the die contacts the substrate to be easily ascertained by means of a signal which is generated when the contact of the collet holder and another contact of the vertically moving block are separated from each other. Furthermore, the collet can be lowered at a rapid rate to a fixed position above the substrate, and the bonding load can be easily and arbitrarily altered.

Abstract

A die bonding apparatus including a vertically moving block, a collet holder provided on the vertically moving block such that the collet holder itself freely moves up and down, a collet which holds a die to be bonded to a substrate and is installed in the collet holder, a first contact provided on the vertically moving block, and a second contact provided on the collet holder so that the second contact is pressed by a spring to make contact with the upper surface of the first contact. The position where rapid downward movement of the collet is stopped and the bonding load applied to the substrate are decided based upon a signal which is generated upon separation of the two contacts.

Description

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a die bonding apparatus which is used to bond dies to a substrate, etc.
2. Prior Art
In conventional die bonding apparatuses, a collet is simply raised and lowered by a raising and lowering mechanism. Accordingly, adjustment of the height of the collet must be performed by lowering the collet while observing the gap between the substrate and the collet with a microscope.
An example of this type of apparatus is described in Japanese Patent Application Laid-Open No. 52-65675.
In this prior art apparatus, the height of the collet is adjusted visually. Accordingly, it requires skill and a considerable amount of time to adjust. Furthermore, since the position where the die adhered to the collet by suction cannot be quantitatively judged, the collet must be lowered at a slower rate. Accordingly, the production characteristics of the apparatus are poor. Furthermore, it is difficult to alter the bonding load which presses the die against the substrate in accordance with the type of die and type of substrate involved.
SUMMARY OF THE INVENTION
Accordingly, one object of the present invention is to provide a die bonding apparatus which allows quick and easy adjustment of the height of the collet.
Another object of the present invention is to provide a die bonding apparatus which allows rapid lowering of the collet to a fixed position above the substrate.
Still another object of the present invention is to provide a die bonding apparatus in which the bonding load can be easily and arbitrarily altered.
The problems encountered in the prior art are solved by the unique structure of this invention wherein a vertically moving block is driven upward and downward, and a collet holder provided on the vertically moving block is also freely moved upward and downward. A collet which holds a die by vacuum suction is installed in the collet holder, and a contact is provided on the vertically moving block. Another contact is provided on the collet holder so that this contact touches the upper surface of the contact of the vertically moving block. A means for applying force so that the two contacts are pressed against each other is also provided.
Since the contact on the collet holder contacts the upper surface of the contact on the vertically moving block, the collet holder and the collet both move up and down in accordance with the upward and downward motion of the vertically moving block. Accordingly, when the vertically moving block is lowered, the die adhering to the collet by suction contacts a substrate so that lowering of the collet holder is stopped. However, since the vertically moving block is designed so that it can be lowered even further, when the vertically moving block is thus lowered further, the two contacts are separated from each other. As a result, the position at which the die contacts the substrate is detected, and the position, which is a fixed position above the substrate to which the vertically moving block can be lowered at a rapid rate, can be easily set via a detection signal generated by the separation of the two contacts as a standard.
Furthermore, the force pressing the two contacts against each other varies depending upon the amount that the vertically moving block is further lowered, which is decided by the signal generated by the separation of the contacts as a standard. Accordingly, the bonding load can be easily and arbitrarily adjusted and altered.
BRIEF DESCRIPTION OF THE DRAWINGS
The attached drawings illustrate one embodiment of the die bonding apparatus of the present invention, wherein:
FIG. 1 is a front view of the die bonding apparatus;
FIG. 2 is a left side view thereof; and
FIG. 3 is a plan view thereof.
DETAILED DESCRIPTION OF THE INVENTION
A detailed description of an embodiment of the present invention will be given below with reference to the accompanying drawings.
A vertically moving block 1 is mounted on an X-Y table, which is known in prior art and not shown in the Figures, so that the vertically moving block 1 can be moved in the X and Y directions. This vertically moving block 1 is driven upward and downward by a known vertical driving mechanism such as a cam, screw, etc.
A ball slide 2 which has a vertical guide section 2a is fixed to the vertically moving block 1, and a collet holder 3 is installed in this guide section 2a so that the collet holder 3 is free to move upward and downward.
A first contact 5 is provided on the vertically moving block 1 via an insulating bush 4, and a second contact 6 is provided on the collet holder 3 so that the second contact 6 contacts the upper surface of the first contact 5. A first terminal 7 is provided on the first contact 5, and a second terminal 8 is provided on the vertically moving block 1, which is electrically connected to the second contact 6. The second terminal 8 is grounded, and voltage is applied to both terminals 7 and 8 by a means not shown in the Figures. Alternatively, it would also be possible to connect the second terminal 8 to the second contact 6 such that the second terminal 8 is electrically insulated from the vertically moving block 1, and to appy a plus or minus voltage to the terminals 7 and 8.
A load adjusting screw 10 is screwed into a portion of the vertically moving block 1 which is located above the second contact 6. A compression spring 11 is provided in the space between this load adjusting screw 10 and the second contact 6. A collet 12 is provided on the collet holder 3, and a pipe 13 is fastened to the collet holder 3 so that the pipe 13 is connected to the suction-adhesion hole 12a of this collet 12. The pipe 13 is connected to a vacuum pump which is not shown in the Figures.
Next, operation of the apparatus described above will be described.
First, before the bonding operation begins, the height level of the collet 12 is adjusted. With a die 14 adhered to the collet 12 by vacuum suction, the collet 12 is positioned above a substrate 15 which is placed on a substrate table (not shown in the Figures). The vertically moving block 1 is then lowered. Thus, the collet holder 3 and the collet 12 are both lowered. When the die 14 contacts the substrate 15, lowering of the collet 12 and collet holder 3 is stopped. However, the vertically moving block 1 can be lowered even further because of the space between the screw 10 and the second contact 6 and of the spring 11 provided between these two elements. Thus, when the vertically moving block 1 is lowered further, the contacts 5 and 6 are separated from each other. A signal which is generated by separation of the contacts 5 and 6 is stored in an arithmetic unit not shown in the Figures. Thus, by using the detection signal generated by the separation of the contacts 5 and 6 as a standard, the position at which rapid lowering of the collet 12 is stopped can be set, and the bonding load (i. e., the amount to which the vertically moving block 1 is further lowered) can also be set.
The position at which rapid lowering of the collet 12 is stopped is decided as follows: If, for example, such a position where the collet 12 is lowered and the die 14 is 0.1 mm above the substrate 15, the position of the vertically moving block 1 where the die 14 is positioned 0.1 mm above the substrate is stored in the arithmetic unit using the detection signal generated by separation of the contacts 5 and 6 as a standard.
As to the bonding load, it is true that when the vertically moving block 1 is lowered further after the die 14 has contacted the substrate 15, the pressure applied to the compression spring 11 varies depending upon how much further the vertically moving block 1 is lowered; thus, the force with which the die 14 is pressed against the substrate 15 also varies. Accordingly, the amount that the vertically moving block 1 is further lowered can be empirically set in accordance with the materials and sizes, etc., of the die 14 and substrate 15 by using the signal generated by separation of the contacts 5 and 6 as a standard.
The bonding action of the apparatus described above is executed as follows:
The collet 12 first picks up the die 14 by suction at a die pick-up position not shown in the Figures. The vertically moving block 1 is then moved in the X and Y directions so that the collet 12 is positioned above the substrate 15.
The vertically moving block 1 is then lowered at a rapid rate, and when the die 14 reaches the position 0.1 mm above the substrate 15, the vertically moving block 1 is lowered at a slow rate in accordance with a command from the arithmetic unit.
Then, when the vertically moving block 1 is lowered further after the die 14 has contacted the substrate 15, the contacts 5 and 6 are separated from each other so that the detection signal is output. With this detection signal, the vertically moving block 1 is lowered by a predetermined amount using the detection signal as a standard. As a result, the die 14 is pressed against the substrate 15 under a predetermined bonding load and is thus bonded thereto. Afterward, the vertically moving block 1 is raised.
As is clear from the above description, the present invention allows the position at which the die contacts the substrate to be easily ascertained by means of a signal which is generated when the contact of the collet holder and another contact of the vertically moving block are separated from each other. Furthermore, the collet can be lowered at a rapid rate to a fixed position above the substrate, and the bonding load can be easily and arbitrarily altered.

Claims (1)

We claim:
1. A die bonding apparatus for bonding a die to a substrate characterized in that said apparatus comprises:
a vertically moving block which is driven upward and downward;
a collet holder provided on said vertically moving block such that said collet holder is free to move upward and downward relative to said vertically moving block;
a collet which is installed in said collet holder;
a vacuum suction means provided on said collet for holding said die on said collet;
a first contact provided on said vertically moving block;
a second contact provided on said collet holder so that said second contact is contactable with an upper surface of said first contact provided on said vertically moving block; and
a means for pressing said two contacts against each other when said die is not in contact with said substrate;
whereby when said die contacts said substrate, said first and second contacts separate from each other and a rate of downward movement of said collet is switched from a rapid rate to a slow rate in response to said separation.
US07/289,233 1987-12-23 1988-12-22 Die bonding apparatus Expired - Fee Related US4913763A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62325728A JPH01168033A (en) 1987-12-23 1987-12-23 Die bonding apparatus
JP62-325728 1987-12-23

Publications (1)

Publication Number Publication Date
US4913763A true US4913763A (en) 1990-04-03

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US07/289,233 Expired - Fee Related US4913763A (en) 1987-12-23 1988-12-22 Die bonding apparatus

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JP (1) JPH01168033A (en)
KR (1) KR910007102B1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5188687A (en) * 1991-03-06 1993-02-23 Labelmatic, Inc. Label pickup and applicator assembly and method
US5234530A (en) * 1991-05-20 1993-08-10 Eastman Kodak Company Apparatus for controlling assembly force
US5246513A (en) * 1990-09-26 1993-09-21 Mitsubishi Denki Kabushiki Kaisha Die bonding apparatus and method of controlling the same
US6347655B1 (en) * 1999-11-02 2002-02-19 Mitsubishi Denki Kabushiki Kaisha Die bonding device and semiconductor device
US20080017293A1 (en) * 2006-07-24 2008-01-24 Kwok Kee Chung Automatic level adjustment for die bonder
US20080107514A1 (en) * 2006-11-08 2008-05-08 Suwas Nikumb Apparatus and process for stacking pieces of material
US20100314050A1 (en) * 2009-06-12 2010-12-16 Sun Kuen Wong Die bonder providing a large bonding force
US20210242051A1 (en) * 2018-04-26 2021-08-05 Shinkawa Ltd. Mounting apparatus and film supply apparatus
US11774935B2 (en) * 2016-10-08 2023-10-03 Capcon Limited Apparatus, control method and control device of semiconductor packaging

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* Cited by examiner, † Cited by third party
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JP2001156085A (en) * 1999-11-30 2001-06-08 Nec Corp Recording medium for program to display in computer method, apparatus, and process for mounting load
JP3549499B2 (en) 2001-07-04 2004-08-04 松下電器産業株式会社 Semiconductor integrated circuit device, D / A converter, and A / D converter

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US1563684A (en) * 1925-01-02 1925-12-01 John E Black Veneer press and the like
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US3841140A (en) * 1972-12-18 1974-10-15 Dreis & Krump Mfg Co Control system for press brakes and the like
US4640732A (en) * 1985-03-25 1987-02-03 British Gas Corporation Apparatus for fusion joining of thermoplastic pipes
US4725327A (en) * 1984-09-11 1988-02-16 Kabushiki Kaisha Sato Labeling robot
US4749435A (en) * 1985-10-18 1988-06-07 Fuji Photo Film Co., Ltd. Apparatus for and method of producing resin laminated cards

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JPS6136939A (en) * 1984-07-30 1986-02-21 Toshiba Corp Contact bonder for circuit part

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US1563684A (en) * 1925-01-02 1925-12-01 John E Black Veneer press and the like
US3041963A (en) * 1959-01-02 1962-07-03 Cincinnati Shaper Co Stop device for press brakes and the like
US3841140A (en) * 1972-12-18 1974-10-15 Dreis & Krump Mfg Co Control system for press brakes and the like
US4725327A (en) * 1984-09-11 1988-02-16 Kabushiki Kaisha Sato Labeling robot
US4640732A (en) * 1985-03-25 1987-02-03 British Gas Corporation Apparatus for fusion joining of thermoplastic pipes
US4749435A (en) * 1985-10-18 1988-06-07 Fuji Photo Film Co., Ltd. Apparatus for and method of producing resin laminated cards

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246513A (en) * 1990-09-26 1993-09-21 Mitsubishi Denki Kabushiki Kaisha Die bonding apparatus and method of controlling the same
US5188687A (en) * 1991-03-06 1993-02-23 Labelmatic, Inc. Label pickup and applicator assembly and method
US5234530A (en) * 1991-05-20 1993-08-10 Eastman Kodak Company Apparatus for controlling assembly force
US6347655B1 (en) * 1999-11-02 2002-02-19 Mitsubishi Denki Kabushiki Kaisha Die bonding device and semiconductor device
US8293043B2 (en) * 2006-07-24 2012-10-23 Asm Assembly Automation Ltd Automatic level adjustment for die bonder
US20080017293A1 (en) * 2006-07-24 2008-01-24 Kwok Kee Chung Automatic level adjustment for die bonder
US20080107514A1 (en) * 2006-11-08 2008-05-08 Suwas Nikumb Apparatus and process for stacking pieces of material
US7886801B2 (en) * 2006-11-08 2011-02-15 National Research Council Of Canada Apparatus and process for stacking pieces of material
US20100314050A1 (en) * 2009-06-12 2010-12-16 Sun Kuen Wong Die bonder providing a large bonding force
US8651159B2 (en) * 2009-06-12 2014-02-18 Asm Assembly Automation Ltd Die bonder providing a large bonding force
US11774935B2 (en) * 2016-10-08 2023-10-03 Capcon Limited Apparatus, control method and control device of semiconductor packaging
US20210242051A1 (en) * 2018-04-26 2021-08-05 Shinkawa Ltd. Mounting apparatus and film supply apparatus
US11848219B2 (en) * 2018-04-26 2023-12-19 Shinkawa Ltd. Mounting apparatus and film supply apparatus

Also Published As

Publication number Publication date
JPH01168033A (en) 1989-07-03
KR890011053A (en) 1989-08-12
KR910007102B1 (en) 1991-09-18

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