US4811583A - Feed-through elements therefor - Google Patents
Feed-through elements therefor Download PDFInfo
- Publication number
- US4811583A US4811583A US07/106,367 US10636787A US4811583A US 4811583 A US4811583 A US 4811583A US 10636787 A US10636787 A US 10636787A US 4811583 A US4811583 A US 4811583A
- Authority
- US
- United States
- Prior art keywords
- tubular casing
- feed
- free
- wire
- free surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/52—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for wires; for strips ; for rods of unlimited length
- C21D9/54—Furnaces for treating strips or wire
- C21D9/56—Continuous furnaces for strip or wire
- C21D9/562—Details
- C21D9/565—Sealing arrangements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Definitions
- the invention relates in the first place to a feed-through element for application in a vacuum apparatus for the continuous feeding through of material with wire character to be treated at least comprising a tubular casing with an inside diameter that is larger than the outside diameter of the material to be fed through.
- Such feed-through element is known from British Patent Specification No. 1,428,933.
- Said tubular feed-through elements consist of a casing and also of bored end flanges through which the wire-shaped product to be treated can be fed.
- Inside the casing there are bored sealing elements of material with a low friction coefficient and/or a good heat resistance the bore being such that the outer surface of the wire-shaped product to be treated fits closely to the inner surface of the bore.
- vacuum treatment is in the present application to be understood as referring to every treatment of material with wire character that takes place in a vacuum environment, such as vacuum deposition, sputtering, plasma precipitation, ion implantation, heat treatments, plasma cleaning etc.
- a known feed-through element as described hereinabove has the disadvantage that the elements which fit closely to the wire-shaped products thereby forming a seal are subject to very high wear, so that the sealing effectiveness decreases with time. Furthermore, such sealing elements may occasion wire rupture, which results in a complete standstill of the apparatus involving large-scale operations to restart the installation. In the third place, the contact between the sealing elements and the wire surface may cause extra contamination of the surface, which is of course undesirable. Furthermore, such feed-through elements are only suited for application with one and the same wire type; a transition to a wire type with a different thickness requires changing the sealing elements.
- the feed-through element characterised in that the free surface which is left between the material to be fed through and the inner side of the tubular casing does not exceed 30% of the total surface available inside the tubular casing, whereby the value of the quotient of L/S-free being more than or equal to 500 mm -1 , where L represents the length of the tubular casing in mm. and S-free the free surface in mm 2 .
- the vacuum to be attained presents an asymptotic course if the length of the tubular casing applied is increased with a fixed free surface. In other words: with a free surface fixed in advance in increasing length of the casing applied, the vacuum to be attained will no longer show any improvement from a certain minimum length onwards.
- An additional advantage of the feed-through element according to the invention is that the feeding through of wire-shaped materials becomes very simple indeed. With switched-on pump or pumps, there will be an air flow through the tubular casing directed from outside the apparatus inwards. When introducing a wire-shaped material through such a feed-through element, the wire is sucked inwards as it were; guiding elements inside the apparatus provide a correct positioning of the material with respect to any other feed-through elements present.
- the free surface in the feed-through element according to the invention is less than 15%, the length of the tubular casing at least being 200 mm with a quotient of L/S-free of 1000 mm -1 .
- the feed-through element according to the invention is fixed in a partition wall so that it can be detached; such a partition wall may be a wall that separates the apparatus from the environment or a wall that separates different chambers of an apparatus.
- a partition wall may be a wall that separates the apparatus from the environment or a wall that separates different chambers of an apparatus.
- the feed-through element that is detachably fixed is fixed using a means formed by a part that is fitted in the partition wall thereby forming a seal and that has a bore through which the tubular casing is led, by one or more sealing rings that fit closely to the outer surface of the tubular casing and the part with a bore as well as by a set for the deformation through compression of the sealing rings(s) that acts together with said part with a bore.
- the invention also relates to an apparatus for the treatment in vacuum of material with wire character, the material to be treated being continuously fed through the apparatus and the apparatus at least consisting of one or more chambers, means for feeding the material through, means for generating a vacuum and feed-through elements characterised in that at least part of the feed-through elements is formed by the feed-through element according to the invention described hereinbefore.
- FIG. 1 represents a schematic section through an apparatus that is provided with feed-through elements according to the invention.
- FIG. 2 gives a representation of a fixing means for fixing a feed-through element according to the invention in a partition wall so that it can be detached.
- FIG. 3 represents a rough sketch of a test arrangement for testing one or more feed-through elements according to the invention.
- FIG. 1 an apparatus for the treatment in vacuum of a wire-shaped material is indicated with chambers 1 up to and including 5.
- the wire-shaped material enters the apparatus at 6 and leaves it at 12.
- vacuum means such as so-called roots pumps, oil diffusion pumps or turbomolecular pumps are present with numbers 7 up to and including 11.
- Feed-through elements 14 up to and including 17 are present in the walls separating the chambers; the track followed by the wire-shaped material to be treated is schematically indicated with 13.
- the feed-through elements indicated with numbers 6 and 12 are formed by the feed-through elements according to the invention; it has been found that the feed-through elements 14 up to and including 17 may also consist of feed-through elements according to the invention; this is not strictly necessary, however, because it has been found that with the vacuum condition prevailing in the whole of the apparatus, the criteria applying to the feed-through element according to the invention may be applied less stringently as in that case the gas flow between the chambers is obviously situated on a much lower level.
- FIG. 2 is indicated how a tubular casing is fixed in a partition wall of the apparatus, for instance an external wall, so that it can be detached.
- the tubular casing 21 is located inside the bore of the part 24 that is fixed in the wall 22 thereby forming a seal.
- 23 schematically indicates that the part 24 is fixed in the wall 22 so that, in principle, it can be exchanged, allowing another part 24 to be fixed in the event that for instance a pipe 21 with a diameter larger than the diameter represented herein is to be introduced.
- Part 24 acts together with set 25 and 26 by which means a ring 27 can be compressed so that it is deformed to seal against the outer side of pipe 21 and the inner side of bored part 24.
- Part 25 acts together with part 24 by means of a thread.
- FIG. 3 a test arrangement for testing one or more feed-through elements according to the invention is schematically indicated.
- a chamber 30 is provided with feed-through elements 31 and 32 fitted in the exterior walls of chamber 30.
- 33 indicates a connection for a vacuum pump while 34 represents a vacuum measuring apparatus.
- the outside diameter of the wire-like materials in the Table I example are: 1.18 mm, 1.30 mm and 1.30 mm, respectively.
- the free surface, that is "S-free", given in the Table is calculated as the cross-sectional area also by the formula ##EQU2##
- the cross-sectional area is 1.094 mm 2
- the cross-sectional area for rope and wire of 1.30 mm diameter is 1.327 mm 2 .
- the "free surface”, S-free is shown in Table 1 examples as the difference between the cross-sectional area of the pipe, 1.529 mm 2 , and the cross-sectional area of the rope and wire, viz. 1.094 mm 2 and 1.327 mm 2 , respectively. This difference is the free surface shown in the Table 1 examples, i.e., 0.43 mm 2 and 0.20 mm 2 , respectively.
- the first row of the table clearly shows that in the case of a rope with an actual diameter of 1.18 mm that is led through a pipe with a diameter of 1.395 mm and with a pipe length of 300 mm, a situation has been reached that is such that the vacuum obtained no longer or hardly improves when elongating the pipe.
- the second and third row of the table clearly show that if two wire-shaped materials are fed through, both materials having the same actual outside diameter, the one material being formed by a composite rope and the other material by a smooth wire, the vacuum obtained in the case of the rope is somewhat inferior to that obtained in the case of the smooth wire. This is understandable given the fact that the rope presents space between the individual windings that is not expressed in the value of the actual diameter.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thermal Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Chemical Vapour Deposition (AREA)
- Furnace Details (AREA)
- General Preparation And Processing Of Foods (AREA)
- Preparation Of Fruits And Vegetables (AREA)
- Electric Cable Installation (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Drying Of Solid Materials (AREA)
- Electrotherapy Devices (AREA)
- Nitrogen Condensed Heterocyclic Rings (AREA)
- Manipulator (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL86/02661 | 1986-10-23 | ||
NL8602661A NL8602661A (nl) | 1986-10-23 | 1986-10-23 | Doorvoerelement voor vacuuminrichting alsmede inrichting voorzien van dergelijke doorvoerelementen. |
Publications (1)
Publication Number | Publication Date |
---|---|
US4811583A true US4811583A (en) | 1989-03-14 |
Family
ID=19848705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US07/106,367 Expired - Fee Related US4811583A (en) | 1986-10-23 | 1987-10-09 | Feed-through elements therefor |
Country Status (8)
Country | Link |
---|---|
US (1) | US4811583A (es) |
EP (1) | EP0266818B2 (es) |
JP (1) | JP2542011B2 (es) |
AT (1) | ATE56478T1 (es) |
CA (1) | CA1274799A (es) |
DE (1) | DE3764924D1 (es) |
ES (1) | ES2018252T5 (es) |
NL (1) | NL8602661A (es) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5050416A (en) * | 1988-11-16 | 1991-09-24 | N.V. Bekaert S.A. | Sealing element for feeding through at least one elongated object such as wire and a vacuum apparatus provided with one or more of sealing elements |
US5665165A (en) * | 1995-10-27 | 1997-09-09 | Rolls-Royce Plc | Seal and a chamber having a seal |
US20080041495A1 (en) * | 2006-08-18 | 2008-02-21 | George Vondriska | Tenon cutting router bit |
US20110209829A1 (en) * | 2008-09-30 | 2011-09-01 | Sekisui Chemical Co., Ltd. | Surface treatment apparatus |
DE102016004731A1 (de) * | 2016-04-19 | 2017-08-10 | eddylab GmbH | Seilzugsensor mit einer druck- und mediendichten Seildurchführung |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113309905B (zh) * | 2021-06-22 | 2022-03-01 | 中国核动力研究设计院 | 一种热室用保温贯穿装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2972330A (en) * | 1956-02-15 | 1961-02-21 | Nat Steel Corp | Vacuum seal for coating apparatus |
US2996410A (en) * | 1957-11-25 | 1961-08-15 | Nat Steel Corp | Coating |
FR2243378A1 (es) * | 1973-09-06 | 1975-04-04 | Johnson Elec Council | |
US3879973A (en) * | 1972-06-08 | 1975-04-29 | Inst Metallurgii Zeleza Imeni | Drawing device with hydrodynamic lubrication |
GB1428993A (en) * | 1973-07-03 | 1976-03-24 | Electricity Council | Continuous heat treatment of wire or rod |
US4096823A (en) * | 1977-01-27 | 1978-06-27 | University Of Virginia | Apparatus for metallization of fibers |
-
1986
- 1986-10-23 NL NL8602661A patent/NL8602661A/nl not_active Application Discontinuation
-
1987
- 1987-10-09 US US07/106,367 patent/US4811583A/en not_active Expired - Fee Related
- 1987-10-12 DE DE8787201955T patent/DE3764924D1/de not_active Expired - Fee Related
- 1987-10-12 ES ES87201955T patent/ES2018252T5/es not_active Expired - Lifetime
- 1987-10-12 EP EP87201955A patent/EP0266818B2/en not_active Expired - Lifetime
- 1987-10-12 AT AT87201955T patent/ATE56478T1/de active
- 1987-10-19 CA CA000549626A patent/CA1274799A/en not_active Expired - Fee Related
- 1987-10-21 JP JP62266171A patent/JP2542011B2/ja not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2972330A (en) * | 1956-02-15 | 1961-02-21 | Nat Steel Corp | Vacuum seal for coating apparatus |
US2996410A (en) * | 1957-11-25 | 1961-08-15 | Nat Steel Corp | Coating |
US3879973A (en) * | 1972-06-08 | 1975-04-29 | Inst Metallurgii Zeleza Imeni | Drawing device with hydrodynamic lubrication |
GB1428993A (en) * | 1973-07-03 | 1976-03-24 | Electricity Council | Continuous heat treatment of wire or rod |
FR2243378A1 (es) * | 1973-09-06 | 1975-04-04 | Johnson Elec Council | |
US4096823A (en) * | 1977-01-27 | 1978-06-27 | University Of Virginia | Apparatus for metallization of fibers |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5050416A (en) * | 1988-11-16 | 1991-09-24 | N.V. Bekaert S.A. | Sealing element for feeding through at least one elongated object such as wire and a vacuum apparatus provided with one or more of sealing elements |
US5665165A (en) * | 1995-10-27 | 1997-09-09 | Rolls-Royce Plc | Seal and a chamber having a seal |
US20080041495A1 (en) * | 2006-08-18 | 2008-02-21 | George Vondriska | Tenon cutting router bit |
US20110209829A1 (en) * | 2008-09-30 | 2011-09-01 | Sekisui Chemical Co., Ltd. | Surface treatment apparatus |
DE102016004731A1 (de) * | 2016-04-19 | 2017-08-10 | eddylab GmbH | Seilzugsensor mit einer druck- und mediendichten Seildurchführung |
DE102016004731B4 (de) * | 2016-04-19 | 2017-10-12 | eddylab GmbH | Seilzugsensor mit einer druck- und mediendichten Seildurchführung |
Also Published As
Publication number | Publication date |
---|---|
EP0266818B2 (en) | 1994-09-14 |
EP0266818B1 (en) | 1990-09-12 |
JPS63158379A (ja) | 1988-07-01 |
JP2542011B2 (ja) | 1996-10-09 |
ATE56478T1 (de) | 1990-09-15 |
DE3764924D1 (de) | 1990-10-18 |
NL8602661A (nl) | 1988-05-16 |
ES2018252B3 (es) | 1991-04-01 |
EP0266818A1 (en) | 1988-05-11 |
CA1274799A (en) | 1990-10-02 |
ES2018252T5 (es) | 1995-08-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: N.V. BEKAERT SA., BEKERTSTRAAT 2, B- 8550 ZWEVEGEM Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:LIEVENS, HUGO;COPPENS, WILFRIED;REEL/FRAME:004771/0581 Effective date: 19871002 Owner name: N.V. BEKAERT SA.,BELGIUM Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LIEVENS, HUGO;COPPENS, WILFRIED;REEL/FRAME:004771/0581 Effective date: 19871002 |
|
CC | Certificate of correction | ||
FEPP | Fee payment procedure |
Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
FPAY | Fee payment |
Year of fee payment: 4 |
|
FPAY | Fee payment |
Year of fee payment: 8 |
|
REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20010314 |
|
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |