US4484457A - Liquid-ring vacuum pump preceded by a precompressor - Google Patents
Liquid-ring vacuum pump preceded by a precompressor Download PDFInfo
- Publication number
- US4484457A US4484457A US06/461,505 US46150583A US4484457A US 4484457 A US4484457 A US 4484457A US 46150583 A US46150583 A US 46150583A US 4484457 A US4484457 A US 4484457A
- Authority
- US
- United States
- Prior art keywords
- coolant
- precompressor
- pump
- heat transfer
- transfer means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C19/00—Rotary-piston pumps with fluid ring or the like, specially adapted for elastic fluids
- F04C19/001—General arrangements, plants, flowsheets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
Definitions
- the present invention relates to a liquid-ring vacuum pump preceded by a precompressor (or supercharger) and followed by a liquid separator, a heat exchanger being provided for transferring heat to a coolant, e.g., water, from a working fluid which has a higher boiling point than that of water.
- a precompressor or supercharger
- a heat exchanger being provided for transferring heat to a coolant, e.g., water, from a working fluid which has a higher boiling point than that of water.
- the vacuum pump draws in gas and pushes it together with part of the working liquid, e.g., oil, into the liquid separator, which is disposed on the pressure side of the pump.
- the compressed gas leaves the separator via an output stub at the top thereof, while the working liquid flows back into the vacuum pump.
- the heat which is absorbed by the working liquid owing to compression and friction is transferred to the cooling water by means of a heat exchanger located in the working-liquid loop.
- the cooling water initially having a temperature of 15° C., for example, is warmed up to the normal working-liquid temperature of 25° to 30° C. and in general is of no further use unless the temperature is brought to a higher level by an expensive heat pump.
- the friction and compression heat energy which comes in thelast analysis from the operating motor of the vacuum pum is, therefore, lost as a rule.
- An object of the present invention is to provide a vacuum generating system in which at least part of this heat is used.
- this object is attained by the provision that the operating temperature of the working liquid in the pump and the separator is above the boiling point of the cooling water, energy for operating the precompressor being sup-plied by the steam generated in the heat exchanger.
- the operating temperature of the working liquid in the pump and the separator is above the boiling point of the cooling water, energy for operating the precompressor being sup-plied by the steam generated in the heat exchanger.
- the steam produced in the heat exchanger can serve as the propellant for the jet pump.
- a side-canal gas-ring compressor is used as the precompressor, the steam can be used to propel a flow engine, for instance, a turbine, coupled to the compressor.
- the steam produced in the system is advantageously separated as far as possible in a con-denser disposed between the precompressorand the pump.
- FIG. 1 is a diagram of a vacuum generating system showing a pre-compressor in the form of a jet pump driven by recycled energy in accordance with the present invention
- FIG. 2 is a diagram similar to FIG. 1, wherein the precompressor is in the form of a side-canal gas-ring compressor.
- the mixture 1 is first precompressed in jet pump 2 by a factor 1.5 and transported with the steam or vapor from a nozzle output 71 of jep pump 2 via a conduit 73 to a condenser 3 in which the vapor is condensed as far as possible.
- the separated liquid is discharged via a barometric tube 31. From the condenser 3, uncondensed gas-vapor mixture is transported at 50° C.
- liquid-ring vacuum pump 4 operates with a working fluid 5 such as oil which has a boiling point, for instance, of 500° C.
- liquid-ring vacuum pump 4 the vapor-gas mixture 1 is compressed to atmospheric pressure; from the pump the gas is subsequently transported together with part of the working liquid 5 to a liquid separator 6 via a duct 77 serving as part of both a gas flow path and a liquid flow circuit 79 which also includes a pump 62, as well as separator 6.
- T1 of approximately 130° C., the working liquid is separated in separator 6 from the gas.
- the so purified gas of atmospheric pressure is then transported through an emission cooler 63, whereby residual moisture is separated, and is vented to the atmosphere as purified gas 9 at atmospheric pressure. It would be conceivable to feed the gas to a further processing stage prior to release of the gas into the air.
- the working liquid 5 accumulated in separator 6 is returned at a temperature of approximately 120° C. to pump 4 via pump 62.
- a coolant 8 such as water with an initial temperature T2 of, say 15° C. is first preheated to 40° C. in condenser 3 by means of a heat exchanger 32. From there the coolant is transported via conduits 67 and a heat exchanger 64 in emission cooler 63 to a coolant input 83 of a heat exchanger 61 in separator 6. Upon reaching heat exchanger 61, the coolant has a temperature, for example, of 60° C.
- the saturated steam serves as the propellant for jet pump 2.
- boiling point of fluid 5 is substantially greater than the boiling point of coolant 8, i.e., of water.
- the difference facilitates the generation in exchanger 61 of vaporized coolant in the form of super-saturated steam.
- Heat exchanger 61 must, of course, be in contact with the working fluid in liquid flow circuit 79. It is not necessary that the heat exchanger be disposed in that part of the liquid flow circuit represented by separator 6.
- the precompressor may take the form of a side-canal gas-ring compressor 85.
- the compressor is driven by a turbine or flow engine 87 via a shaft 89.
- the turbine in turn is powered by the super-saturated steam 81 carried by conduit 7 from exchanger 61.
- An output 91 of turbine 87 is connected to condenser 3 via a duct 93, while an output of compressor 85 is coupled to an input of the liquid ring vacuum pump 4 via a conduit 95.
- Other reference numerals in FIG. 2 have the same meaning and represent the same structual features as in FIG. 1.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3204784 | 1982-02-11 | ||
DE19823204784 DE3204784A1 (de) | 1982-02-11 | 1982-02-11 | Fluessigkeitsringvakuumpumpe mit vorgeschaltetem vorverdichter |
Publications (1)
Publication Number | Publication Date |
---|---|
US4484457A true US4484457A (en) | 1984-11-27 |
Family
ID=6155400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US06/461,505 Expired - Fee Related US4484457A (en) | 1982-02-11 | 1983-01-27 | Liquid-ring vacuum pump preceded by a precompressor |
Country Status (3)
Country | Link |
---|---|
US (1) | US4484457A (de) |
EP (1) | EP0088226B1 (de) |
DE (2) | DE3204784A1 (de) |
Cited By (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4638642A (en) * | 1984-01-10 | 1987-01-27 | Kyowa Hakko Kogyo Co., Ltd. | Heat pump |
US4984432A (en) * | 1989-10-20 | 1991-01-15 | Corey John A | Ericsson cycle machine |
US5169502A (en) * | 1988-05-30 | 1992-12-08 | Siemens Aktiengesellschaft | Installation for processing liquids |
US5295792A (en) * | 1993-04-02 | 1994-03-22 | Ingersoll-Rand Company | Method for non-destructively compressing ozone gas |
US5467613A (en) * | 1994-04-05 | 1995-11-21 | Carrier Corporation | Two phase flow turbine |
US5618164A (en) * | 1994-12-06 | 1997-04-08 | Siemens Aktiengesellschaft | Liquid ring compressor with plural after-cooler elements |
EP0790545A2 (de) * | 1996-02-15 | 1997-08-20 | DEUTZ Aktiengesellschaft | Verfahren und Einrichtung zur Messung bzw. Überwachung der Dichte von Flüssigkeiten |
US6234760B1 (en) * | 1997-06-16 | 2001-05-22 | Serguei A. Popov | Pumping-ejection apparatus and variants |
WO2001066950A1 (fr) * | 2000-01-03 | 2001-09-13 | Zigang Jiang | Pompe-compresseur sous vide a circulation de liquide et a tambour |
WO2002027152A2 (de) * | 2000-09-29 | 2002-04-04 | Siemens Aktiengesellschaft | Dampfturbinenanlage und verfahren zum betreiben einer dampfturbinenanlage |
US20020125680A1 (en) * | 1999-03-22 | 2002-09-12 | David Muhs | Trailer and fuel tank assembly |
US6574987B2 (en) * | 2000-03-15 | 2003-06-10 | Denso Corporation | Ejector cycle system with critical refrigerant pressure |
EP1490599A2 (de) * | 2002-03-15 | 2004-12-29 | Water Management Systems | Pumpensystem mit unterdruckquelle |
US20050011221A1 (en) * | 2003-07-18 | 2005-01-20 | Tgk Co., Ltd. | Refrigeration cycle |
US20070074533A1 (en) * | 2005-08-24 | 2007-04-05 | Purdue Research Foundation | Thermodynamic systems operating with near-isothermal compression and expansion cycles |
US20080175723A1 (en) * | 2007-01-19 | 2008-07-24 | Water Management Systems | Vacuum pump with wear adjustment |
US20080175722A1 (en) * | 2007-01-19 | 2008-07-24 | David Muhs | Vacuum pump with wear adjustment |
CN100434832C (zh) * | 2006-11-21 | 2008-11-19 | 西安交通大学 | 一种带喷射器的自行复叠式制冷循环系统 |
WO2009032709A1 (en) | 2007-08-28 | 2009-03-12 | Air Products And Chemicals, Inc. | Apparatus and method for controlling the temperature of a cryogen |
US20100329903A1 (en) * | 2009-06-29 | 2010-12-30 | Lightsail Energy Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US20100326064A1 (en) * | 2009-06-29 | 2010-12-30 | Lightsail Energy Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US20110044827A1 (en) * | 2009-08-24 | 2011-02-24 | David Muhs | Self priming pump assembly with a direct drive vacuum pump |
US8247915B2 (en) | 2010-03-24 | 2012-08-21 | Lightsail Energy, Inc. | Energy storage system utilizing compressed gas |
US8436489B2 (en) | 2009-06-29 | 2013-05-07 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
EP2804928A1 (de) * | 2012-01-20 | 2014-11-26 | Catalytec | Verfahren und vorrichtung zur mechanischen aufheizung eines stoffgemisches |
CN104277911A (zh) * | 2014-09-25 | 2015-01-14 | 江阴天田真空设备制造有限公司 | 食用油脂冷凝冻结脱臭真空设备 |
US20160169226A1 (en) * | 2014-12-12 | 2016-06-16 | General Electric Company | Liquid ring fluid flow machine |
US20160201672A1 (en) * | 2015-01-08 | 2016-07-14 | Gardner Denver Nash Llc | Low pressure sealing liquid entry area in a compressor type liquid ring pump |
US10030670B2 (en) | 2012-12-14 | 2018-07-24 | Xylem Ip Management S.À R.L. | Cooling arrangement of a pump intended for pumping a liquid |
CN110671325A (zh) * | 2019-09-27 | 2020-01-10 | 西安奕斯伟硅片技术有限公司 | 真空吸附装置 |
US20210364003A1 (en) * | 2018-03-14 | 2021-11-25 | Edwards Technologies Vacuum Engineering (Qingdao) Co. Ltd. | Control system for liquid ring pumps |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8325813D0 (en) * | 1983-09-27 | 1983-10-26 | Hick Hargreaves & Co Ltd | Condenser vacuum system |
US4857084A (en) * | 1988-06-10 | 1989-08-15 | The Dow Chemical Company | Pressure swing adsorption apparatus and process for recovery of oil-soluble vapors |
WO1993001396A1 (en) * | 1991-07-03 | 1993-01-21 | Polar Vac International Inc. | Cooling apparatus for recirculating vacuum pump compressant |
DE19715480C2 (de) * | 1997-04-14 | 1999-01-14 | Saskia Solar Und Energietechni | Vakuumpumpsystem mit einer Flüssigringpumpe |
DE10214331A1 (de) * | 2002-03-28 | 2003-10-23 | Nash Elmo Ind Gmbh | Pumpeinrichtung, Verfahren zum Betreiben einer Pumpeinrichtung und dessen Verwendung bei einer Dampfturbinenanlage |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3481529A (en) * | 1966-05-12 | 1969-12-02 | Siemens Ag | Method and apparatus for pumping with a liquid-ring in series with a jet ejector |
US3575532A (en) * | 1968-03-15 | 1971-04-20 | Siemens Ag | Gas pump of a liquid-ring type |
US3973879A (en) * | 1974-03-13 | 1976-08-10 | Siemens Aktiengesellschaft | Liquid ring compressor |
US4385868A (en) * | 1979-11-19 | 1983-05-31 | Nash Engineering Company | Systems for evacuating process fluids having condensable and incondensable components |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE946916C (de) * | 1954-01-12 | 1956-08-09 | Karl Ebner | Verfahren zur Erhoehung der Ansaugleistung von Luftpumpen |
DE1023854B (de) * | 1955-09-29 | 1958-02-06 | Otto Siemen | Mehrstufige Fluessigkeitsringgaspumpe |
DE2841906C2 (de) * | 1978-09-26 | 1980-02-21 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Flüssigkeitsringverdichter oder -vakuumpumpe |
-
1982
- 1982-02-11 DE DE19823204784 patent/DE3204784A1/de not_active Withdrawn
-
1983
- 1983-01-27 US US06/461,505 patent/US4484457A/en not_active Expired - Fee Related
- 1983-01-31 EP EP83100879A patent/EP0088226B1/de not_active Expired
- 1983-01-31 DE DE8383100879T patent/DE3370980D1/de not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3481529A (en) * | 1966-05-12 | 1969-12-02 | Siemens Ag | Method and apparatus for pumping with a liquid-ring in series with a jet ejector |
US3575532A (en) * | 1968-03-15 | 1971-04-20 | Siemens Ag | Gas pump of a liquid-ring type |
US3973879A (en) * | 1974-03-13 | 1976-08-10 | Siemens Aktiengesellschaft | Liquid ring compressor |
US4385868A (en) * | 1979-11-19 | 1983-05-31 | Nash Engineering Company | Systems for evacuating process fluids having condensable and incondensable components |
Non-Patent Citations (1)
Title |
---|
Siemens Brochure E 7251046. * |
Cited By (58)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4638642A (en) * | 1984-01-10 | 1987-01-27 | Kyowa Hakko Kogyo Co., Ltd. | Heat pump |
US5169502A (en) * | 1988-05-30 | 1992-12-08 | Siemens Aktiengesellschaft | Installation for processing liquids |
US4984432A (en) * | 1989-10-20 | 1991-01-15 | Corey John A | Ericsson cycle machine |
WO1991005974A1 (en) * | 1989-10-20 | 1991-05-02 | Corey John A | Ericsson cycle machine |
US5295792A (en) * | 1993-04-02 | 1994-03-22 | Ingersoll-Rand Company | Method for non-destructively compressing ozone gas |
US5467613A (en) * | 1994-04-05 | 1995-11-21 | Carrier Corporation | Two phase flow turbine |
US5618164A (en) * | 1994-12-06 | 1997-04-08 | Siemens Aktiengesellschaft | Liquid ring compressor with plural after-cooler elements |
EP0790545A3 (de) * | 1996-02-15 | 1998-05-20 | DEUTZ Aktiengesellschaft | Verfahren und Einrichtung zur Messung bzw. Überwachung der Dichte von Flüssigkeiten |
EP0790545A2 (de) * | 1996-02-15 | 1997-08-20 | DEUTZ Aktiengesellschaft | Verfahren und Einrichtung zur Messung bzw. Überwachung der Dichte von Flüssigkeiten |
US6234760B1 (en) * | 1997-06-16 | 2001-05-22 | Serguei A. Popov | Pumping-ejection apparatus and variants |
US8246316B2 (en) | 1999-03-22 | 2012-08-21 | David Muhs | Vacuum source and float valve for a self-priming pump |
US7311335B2 (en) | 1999-03-22 | 2007-12-25 | Water Management Systems | Trailer and fuel tank assembly |
US7794211B2 (en) | 1999-03-22 | 2010-09-14 | Water Management Systems | Pump System with a vacuum source coupled to a separator |
US20020125680A1 (en) * | 1999-03-22 | 2002-09-12 | David Muhs | Trailer and fuel tank assembly |
US8662862B2 (en) | 1999-03-22 | 2014-03-04 | Water Management Systems, LLC | Pump system with vacuum source |
US20060110261A1 (en) * | 1999-03-22 | 2006-05-25 | David Muhs | Pump system with vacuum source |
US20110008183A1 (en) * | 1999-03-22 | 2011-01-13 | David Muhs | Pump system with vacuum source |
WO2001066950A1 (fr) * | 2000-01-03 | 2001-09-13 | Zigang Jiang | Pompe-compresseur sous vide a circulation de liquide et a tambour |
US6574987B2 (en) * | 2000-03-15 | 2003-06-10 | Denso Corporation | Ejector cycle system with critical refrigerant pressure |
US20040003593A1 (en) * | 2000-09-29 | 2004-01-08 | Harry Sauer | Steam turbine plant, and method of operating a steam turbine plant |
WO2002027152A3 (de) * | 2000-09-29 | 2002-06-27 | Siemens Ag | Dampfturbinenanlage und verfahren zum betreiben einer dampfturbinenanlage |
WO2002027152A2 (de) * | 2000-09-29 | 2002-04-04 | Siemens Aktiengesellschaft | Dampfturbinenanlage und verfahren zum betreiben einer dampfturbinenanlage |
EP1490599A2 (de) * | 2002-03-15 | 2004-12-29 | Water Management Systems | Pumpensystem mit unterdruckquelle |
EP1490599A4 (de) * | 2002-03-15 | 2007-07-11 | Water Man Systems | Pumpensystem mit unterdruckquelle |
US7207186B2 (en) * | 2003-07-18 | 2007-04-24 | Tgk Co., Ltd. | Refrigeration cycle |
US20050011221A1 (en) * | 2003-07-18 | 2005-01-20 | Tgk Co., Ltd. | Refrigeration cycle |
US7401475B2 (en) * | 2005-08-24 | 2008-07-22 | Purdue Research Foundation | Thermodynamic systems operating with near-isothermal compression and expansion cycles |
US20070074533A1 (en) * | 2005-08-24 | 2007-04-05 | Purdue Research Foundation | Thermodynamic systems operating with near-isothermal compression and expansion cycles |
CN100434832C (zh) * | 2006-11-21 | 2008-11-19 | 西安交通大学 | 一种带喷射器的自行复叠式制冷循环系统 |
US20080175723A1 (en) * | 2007-01-19 | 2008-07-24 | Water Management Systems | Vacuum pump with wear adjustment |
US20080175722A1 (en) * | 2007-01-19 | 2008-07-24 | David Muhs | Vacuum pump with wear adjustment |
US7878768B2 (en) | 2007-01-19 | 2011-02-01 | David Muhs | Vacuum pump with wear adjustment |
WO2009032709A1 (en) | 2007-08-28 | 2009-03-12 | Air Products And Chemicals, Inc. | Apparatus and method for controlling the temperature of a cryogen |
US20100329903A1 (en) * | 2009-06-29 | 2010-12-30 | Lightsail Energy Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8353156B2 (en) | 2009-06-29 | 2013-01-15 | Lightsail Energy Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8240142B2 (en) | 2009-06-29 | 2012-08-14 | Lightsail Energy Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8065874B2 (en) | 2009-06-29 | 2011-11-29 | Lightsale Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8146354B2 (en) | 2009-06-29 | 2012-04-03 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8191360B2 (en) | 2009-06-29 | 2012-06-05 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8196395B2 (en) | 2009-06-29 | 2012-06-12 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8037677B2 (en) | 2009-06-29 | 2011-10-18 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8061132B2 (en) | 2009-06-29 | 2011-11-22 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US20100326064A1 (en) * | 2009-06-29 | 2010-12-30 | Lightsail Energy Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8436489B2 (en) | 2009-06-29 | 2013-05-07 | Lightsail Energy, Inc. | Compressed air energy storage system utilizing two-phase flow to facilitate heat exchange |
US8998586B2 (en) | 2009-08-24 | 2015-04-07 | David Muhs | Self priming pump assembly with a direct drive vacuum pump |
US20110044827A1 (en) * | 2009-08-24 | 2011-02-24 | David Muhs | Self priming pump assembly with a direct drive vacuum pump |
US8247915B2 (en) | 2010-03-24 | 2012-08-21 | Lightsail Energy, Inc. | Energy storage system utilizing compressed gas |
EP2804928A1 (de) * | 2012-01-20 | 2014-11-26 | Catalytec | Verfahren und vorrichtung zur mechanischen aufheizung eines stoffgemisches |
US10030670B2 (en) | 2012-12-14 | 2018-07-24 | Xylem Ip Management S.À R.L. | Cooling arrangement of a pump intended for pumping a liquid |
CN104277911B (zh) * | 2014-09-25 | 2016-08-31 | 江阴天田真空设备制造有限公司 | 食用油脂冷凝冻结脱臭真空设备 |
CN104277911A (zh) * | 2014-09-25 | 2015-01-14 | 江阴天田真空设备制造有限公司 | 食用油脂冷凝冻结脱臭真空设备 |
US20160169226A1 (en) * | 2014-12-12 | 2016-06-16 | General Electric Company | Liquid ring fluid flow machine |
US10837443B2 (en) * | 2014-12-12 | 2020-11-17 | Nuovo Pignone Tecnologic - SRL | Liquid ring fluid flow machine |
US20160201672A1 (en) * | 2015-01-08 | 2016-07-14 | Gardner Denver Nash Llc | Low pressure sealing liquid entry area in a compressor type liquid ring pump |
US11512700B2 (en) * | 2015-01-08 | 2022-11-29 | Gardner Denver Nash Llc | Low pressure sealing liquid entry area in a compressor type liquid ring pump |
US20210364003A1 (en) * | 2018-03-14 | 2021-11-25 | Edwards Technologies Vacuum Engineering (Qingdao) Co. Ltd. | Control system for liquid ring pumps |
US11746785B2 (en) * | 2018-03-14 | 2023-09-05 | Edwards Technologies Vacuum Engineering (Qingdao) | Control system for liquid ring pumps |
CN110671325A (zh) * | 2019-09-27 | 2020-01-10 | 西安奕斯伟硅片技术有限公司 | 真空吸附装置 |
Also Published As
Publication number | Publication date |
---|---|
EP0088226A2 (de) | 1983-09-14 |
DE3370980D1 (en) | 1987-05-21 |
EP0088226A3 (en) | 1985-06-12 |
EP0088226B1 (de) | 1987-04-15 |
DE3204784A1 (de) | 1983-08-25 |
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