US4395049A - Metallic sealing device for a high-vacuum closure - Google Patents

Metallic sealing device for a high-vacuum closure Download PDF

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Publication number
US4395049A
US4395049A US06/215,404 US21540480A US4395049A US 4395049 A US4395049 A US 4395049A US 21540480 A US21540480 A US 21540480A US 4395049 A US4395049 A US 4395049A
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US
United States
Prior art keywords
sealing
annular disc
sealing device
sealing ring
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US06/215,404
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English (en)
Inventor
Siegfried Schertler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Group AG
Original Assignee
VAT AG fuer Vakuum Apparate Technik
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Filing date
Publication date
Application filed by VAT AG fuer Vakuum Apparate Technik filed Critical VAT AG fuer Vakuum Apparate Technik
Assigned to VAT AKTIENGESELLSCHAFT FUR VAKUUM-APPARATE-TECHNIK reassignment VAT AKTIENGESELLSCHAFT FUR VAKUUM-APPARATE-TECHNIK ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: SCHERTLER SIEGFRIED
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Publication of US4395049A publication Critical patent/US4395049A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/46Attachment of sealing rings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S285/00Pipe joints or couplings
    • Y10S285/917Metallic seals

Definitions

  • the present invention is directed to a metallic sealing device for a high-vacuum closure, particularly for use on a high-vacuum valve with a first sealing surface formed as a surface of revolution and a second sealing surface also formed as a surface of revolution and arranged coaxially with the first sealing surface.
  • the two sealing surfaces are adjustable relative to one another in the axial direction and a metallic sealing ring is positioned between the two sealing surfaces.
  • the sealing ring has a cross-sectional configuration capable of rolling on the two sealing surfaces when the sealing device is moved between the open and closed positions.
  • a sealing device of this type is disclosed in German Offenlegungsschrift No. 29 09 223.
  • the sealing rings have a C-shape open cross-section and, as a rule, the sealing ring is covered, at least at the outside, with a layer of ductile metal. Further, in the open position of the sealing device, the sealing ring bears loosely against the sealing surfaces.
  • the sealing device is opened and closed repeatedly, it can be expected that the contact of the sealing ring with the two sealing surfaces occurs along different closed lines, because the above-mentioned loose contact of the sealing ring, may cause changes in the position of the sealing ring relative to the sealing surfaces.
  • German Offenlegungsschrifts 26 25 796 and 25 23 152 It has also been suggested in high-vacuum closures to use all-metal valves in which hard-metallic sealing members with solid cross-sections interact, German Offenlegungsschrifts 26 25 796 and 25 23 152.
  • the sealing parts are formed of a spring-hard material and the valve seat of an alloy of high-grade steel with chromium, nickel, molybdenum and/or titanium.
  • the locking member is in the form of an annular disc held in the region of its outer circumference with its inner edge rounded off or its outer contour is rounded off and it is held at its inner circumference. The rounded-off edge interacts with the sealing member.
  • the locking member is fastened either to the valve housing or to the adjustable valve part.
  • the sealing part Due to the rounding off of the edges, the sealing part can roll on the sealing member under a high pressure when the valve is actuated with the sliding and resulting destruction of the valve because of insufficient lubrication being eliminated in such high-vacuum valves. Slight relative movements between sealing members due to temperature changes when the valve is closed and resulting in thermal expansion, can be absorbed by such valves without leading to damage of the sealing surfaces disposed in direct operative engagement.
  • By means of such valve arrangements it is possible to achieve a degree of tightness of 1.10 -9 mbar0.1/sec., measured with helium, for several thousand closing procedures without requiring an increase in the closing force.
  • temperture differences may range to more than 100° C. during heating and cooling.
  • dimensional changes due to thermal expansion occur in the structural elements of the sealing device resulting in relative movements between the structural elements and, above all, to a sliding action in the known constructions which tends to destroy the sealing surfaces because of cold welding or due to sliding friction.
  • the compensating movements caused by thermal expansion are possible to a limited extent, since the sealing member is unilaterally fixed at the rim in known constructions. In such an arrangement the sealing member may break at the attachment point because of the compensating movements or perhaps only cracks will develop, however, such cracks cause the valve device to leak.
  • the sealing member is plastically and, thus, permanently deformed at the attachment point when the compensating movements are appropriately large with the consequences that the device becomes loose and leaks. Therefore, it is the primary object of the present invention to provide a sealing device formed of metal which permits relatively great compensating and adjusting movements between the parts forming the sealing device without impairing the great sealing capacity of the sealing device described above.
  • the sealing ring is fixed on one of the two sealing surfaces by shrinking it on the surface.
  • Shrinking-on means fitting a heated or cooled workpiece onto another member with the subsequent volume change occuring during cooling or heating resulting in a tight bond between the pieces.
  • the attachment of the sealing ring can be made either with the housing or with an adjustable part of the valve. Therefore, the sealing ring is fixed to the sealing surfaces, however, it is still movable to the required extent so that the same surface portions contact one another along the same lines when the sealing device is repeatedly opened and closed.
  • the sealing member or sealing ring is movable relative to the two sealing surfaces by rolling and has a high degree of adjustment adaptation, since both of the edges or surfaces of the sealing member disposed in operative engagement with the sealing surfaces are rounded off and the width of the sealing member in the radial direction is approximately equal to twice the radius of curvature of the rounded contact surfaces. Accordingly, the sealing member can roll on each of the sealing surfaces when the sealing device is opened or closed or when movements occur due to thermal expansion, without the development of any sliding friction which results in cold welding and thereby causes destruction of the sealing surface.
  • the ratio of thickness to the radial width of the valve body cross-section is in the range of about 1:3-1:10 so that the sealing member or ring is able to absorb any deformation in itself, that is, in the elastic range which occur because of the great sealing force acting on the sealing member.
  • the sealing surfaces as well as the sealing member are formed of materials which are practically non-ductible, that is, nickel material with a nickel content of 35% and more with chromium and/or cobalt as additional alloy components; stellites and alloys of high-grade steel with chromium, nickel molybdenum and/or titanium can also be used. Microscopically small plastic deformations occur at the sealing surfaces during the rolling action. The substantial closing pressures developed as the device is repeatedly opened and closed only cause a superficial deformation in the elastic range. If the position of the rolling sealing zone is changed, however, this tends to lead to leakage.
  • FIG. 1 is a half longitudinal sectional view taken through an open high-vacuum valve embodying the present invention
  • FIGS. 2, 3 and 4 are partial views of a portion of the valve shown in FIG. 1 on an enlarged scale each illustrating a different embodiment of the sealing surfaces;
  • FIGS. 5 and 6 are detail representations of another embodiment of the present invention with the valve shown in the open position in FIG. 5 and in the closed position in FIG. 6;
  • FIG. 7 is a view similar to FIGS. 5 and 6 displaying a detail of another embodiment similar to the one shown in FIGS. 5 and 6.
  • FIG. 1 a half longitudinal section of a high-vacuum stop valve is illustrated including a housing 1 having a connecting pipe 2 acting as the connection to a high-vacuum pump and with an opening 3 in the housing for connection to the device to be evacuated.
  • One sealing surface of the valve is formed by a frusto-conically shaped sealing plate 4 fastened to a suitable carrier 5 or the plate and carrier can be constructed as a single unit.
  • the carrier 5 is connected to a spindle having a thread, in FIG. 1 only the upper connecting end 6 of the spindle is visible.
  • the spindle 6 is supported in a housing cover 7 rigidly connected to the housing 1 by bolts 8.
  • a flange plate 9 is placed in the upper opening of the housing 1 with a metal bellows 10 surrounding the spindle and fixed in a tight manner to the flange plate 9 with the lower end of the metal bellows 10 being fixed tightly to the carrier 5.
  • a sealing ring 11 is located in an annular step between the upper end of the housing 1 and the flange plate 9.
  • Sealing surface 12 formed in the housing 1 is a frusto-conical surface.
  • the seal between the sealing surface 4 and 12 is afforded by a ring of a non-ductile material which acts as the sealing member 13.
  • ring 13 has been shrunk onto the sealing surface 12 by cooling the ring to a very low temperature prior to inserting it into contact with the sealing surface 12. Due to the cooling action, the outside diameter of the ring 13 has been reduced and can be fitted onto the frusto-conical sealing surface 12. As the ring expands while its temperature increases, it is automatically clamped on the frusto-conical surface 12 without requiring any additional securing means, such as holders or the like, for fixing its position.
  • FIG. 1 the valve is shown in the open position.
  • Each of the sealing surfaces 4, 12 which interact with the sealing member are constructed as frusto-conical surfaces. The invention, however, is not limited to such surface configurations.
  • FIG. 2 a detail is provided of that portion of FIG. 1 within the circular dot-dash line. The detail in FIG. 2 is on a much larger scale as compared to FIG. 1.
  • Sealing member 13' is in the form of a ring with a solid cross-section and is shrunk onto the sealing plate 4' which has a cylindrical shape.
  • FIGS. 3 and 4 Other possible arrangements of the seal are illustrated in FIGS. 3 and 4.
  • the sealing ring 13' is shrunk onto the sealing plate 4'.
  • the firm engagement of the sealing ring is ensured, because the generating angle of the sealing surface is smaller than the friction angle in that region in which the shrunk-on sealing ring bears against the sealing surface.
  • the sealing member is held relative to the sealing surface against which it bears in the same initial position at any temperature and in any operating condition of the device.
  • sealing member 13" is in the form of a frusto-conical annular disc with the inner and outer edges or surfaces 14 being rounded and these rounded surfaces engage the sealing surfaces 12" and 4" when the valve is closed, note FIG. 6.
  • the rounded surfaces 14 have the radius of curvature R corresponding to one-half the radial width B of the annulardisc.
  • annular disc 13" is shrunk onto the radially outer sealing surface 12" so that no additional support for maintaining the sealing member in the fixed position is required.
  • the disc-shaped sealing member 13" could also be shrunk onto the radially inner frusto-conical sealing surface 4" of the adjustable part of the valve. Regardless of whether the sealing member is shrunk onto one or the other of the sealing surfaces, the individual parts are adjusted relative to one another so that the median plane E of the annular disc 13" extends perpendicularly relative to the frusto-conical surface 12" when the valve is opened, that is, the median plane E coincides with the surface normal to the contact point or on the contact line.
  • the radially inner sealing surface 4" is moved into contact with the annular disc 13' in the direction of the arrow 16 shown in FIGS. 5 and 6 moving the spindle in the desired direction.
  • the middle zone of the frusto-conical sealing surface 4" contacts the radially inner edge 14 of the sealing member 13", the radially inner edge or surface being rounded and having a convex configuration.
  • the middle diameter of the frusto-conical sealing surface 4" corresponds approximately to the inner diameter d of the annular disc 13".
  • the first contact of these parts with another during the closing operation is illustrated in FIG. 6.
  • the sealing surfaces 4", 21" are in parallel relation with respect to one another.
  • the sealing surface 4" continues to travel in the axial direction designated by arrow 16 with the surfaces bearing against one another being superficially deformed in the elastic range due to the high pressure acting when these parts are pressed together.
  • the force appliced by the spindle 6 is increased in a high step-up ratio and this ratio is primarily determined by the angle ⁇ which correspond to the generating angle of the frusto-conical surfaces shown in FIGS. 5 and 6.
  • the disc-like sealing member 13" rolls with its two convex rounded surfaces or edges 14 on the sealing surfaces 4", 12". Sealing member 13" can also be deformed more or less as a unit.
  • the extent of such deformation depends, among other things, on the thickness S of the disc-like sealing member, that is, its dimension extending generally in the axial direction of the valve, note the thickness S shown in FIG. 6.
  • the ratio of the thickness S to the width B of the solid sealing member cross-section is about 1:3-1:10, so that the sealing member is able to absorb deformations within its own structure, that is, in its elastic range. It can be seen from FIG.
  • the sealing surfaces 4", 12" are frusto-conically shaped.
  • An effective sealing action can also be obtained if these sealing surfaces are constructed as spherical surface zones, that is, either concave or convex. It is also possible to have a conical surface and a spherical surface as the sealing surfaces in the sealing device, since these surfaces are not in direct contact with one another during the closing action. These surfaces are always constructed in such a way that the sealing member, that is, its rounded edges or surfaces can roll on the sealing surfaces without obstruction during the opening and closing action.
  • the sealing member 130 is constructed as a frusto-conical annular disc and is inserted so that with the sealing member unloaded or at the commencement of its contact during the closing procedure, the median plane E of the sealing member 130, note FIG. 7, includes an angle ⁇ with the surface normal plane N along the contact line A or B. Due to this arrangement, the contact lines A and B between the sealing member 130 and the frusto-conical sealing surfaces 120 and 140 are located slightly offset from the median plane E when the first contact occurs during the closing procedure, that is, with regard to the contact lines A the contact is above the median line and with regard to the contact line B of the contact is below the median plane E.
  • the sealing member 130 rolls on the sealing surfaces and the contact lines A and B shift toward the median plane E so that these contact lines A, B are essentially aligned with the median plane E when the sealing device is closed.
  • the adjusting movements and the relative movements caused by temperature changes and temperature differences during the heating of the sealing device and occurring between the various parts of the seal can be positive or negative relative to the median of the plane E. In both cases, sufficient tolerance ranges are provided for the adjustment of the sealing member 130 without causing the sealing or contact lines to deviate substantially from the median plane E.
  • the rolling-in action during the closing pressure can be such that the contact lines A, B travel through the cross-sectional plane of the valve so that subsequently no additional closing force is required for maintaining this position.
  • the valve is automatically locked and can be opened only by applyng an external opening force acting in the direction of the arrow 200.
  • valve actuation or the actuation of the spindle can be effected pneumatically or mechanically.
  • springs or sets of springs are provided which automatically form axial compensating movements when dimensional changes have occurred due to temperature differences.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)
  • Details Of Valves (AREA)
  • Lift Valve (AREA)
US06/215,404 1979-12-19 1980-12-11 Metallic sealing device for a high-vacuum closure Expired - Lifetime US4395049A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2951150A DE2951150C2 (de) 1979-12-19 1979-12-19 Aus Metall bestehende Dichtvorrichtung an einem Hochvakuumverschluß
DE2951150 1979-12-19

Publications (1)

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US4395049A true US4395049A (en) 1983-07-26

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Application Number Title Priority Date Filing Date
US06/215,404 Expired - Lifetime US4395049A (en) 1979-12-19 1980-12-11 Metallic sealing device for a high-vacuum closure

Country Status (6)

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US (1) US4395049A (de)
JP (1) JPS56101463A (de)
CH (1) CH651903A5 (de)
DE (1) DE2951150C2 (de)
FR (1) FR2472128A1 (de)
GB (1) GB2069102B (de)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756053A (en) * 1987-02-24 1988-07-12 The United States Of America As Represented By The Secretary Of The Air Force Nozzle flap hinge joint
US4773655A (en) * 1986-01-22 1988-09-27 Oy Safematic Ltd. Slide ring seal
US5146945A (en) * 1989-12-06 1992-09-15 Westinghouse Electric Corp. Seal ring retainer and guide ring for valve plug
US5160176A (en) * 1991-11-18 1992-11-03 Stanley Aviation Corporation Metal seal ball joint coupling assembly
US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6328051B1 (en) 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly
US6409149B1 (en) 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
US6883836B2 (en) 2003-01-17 2005-04-26 Stanley Aviation Corporation Positive locking fitting assembly
US7004478B2 (en) * 2001-12-07 2006-02-28 Perkinelmer Inc. Shallow metallic s-seal
US20070085275A1 (en) * 2005-10-14 2007-04-19 G-2 Engineering Sealing assembly with a diagonal seal
US20070087606A1 (en) * 2005-10-14 2007-04-19 G2 Engineering, Inc. Sealing Member and System
US20150316011A1 (en) * 2014-05-05 2015-11-05 Electro-Motive Diesel, Inc. Sealing body for isolating vibrations from cylinder body to nozzle
WO2019121903A1 (de) * 2017-12-21 2019-06-27 Continental Automotive Gmbh Ventil
US10502325B2 (en) 2015-08-06 2019-12-10 Vat Holding Ag Valve, preferably vacuum valve
US11092244B1 (en) * 2020-10-23 2021-08-17 Shanghai Advanced Research Institute, Chinese Academy Of Science Sealing disc for vacuum closure

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4023845C1 (en) * 1990-07-27 1992-04-02 Vat Holding Ag, Haag, Ch Shut-off valve for semiconductor producinvacuum equipment - has valve disc pressed against valve seal by actuator and seal between disc and seat
DE4446947C2 (de) * 1994-12-28 2003-04-10 Vat Holding Ag Haag Ringförmiger Dichtkörper
DE102007030510A1 (de) 2007-06-30 2009-01-02 Daimler Ag Dichtvorrichtung für Hochdruckanwendungen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US392931A (en) * 1888-11-13 Metallic wire packing
US2832614A (en) * 1955-03-18 1958-04-29 Jr Joseph E Settle Seal for concrete pipe joint having means for spacing the pipe ends
GB885304A (en) * 1958-12-12 1961-12-20 Goetzewerke Seals between cylinder heads and cylinder blocks in internal combustion engines
US3262722A (en) * 1964-11-19 1966-07-26 United Aircraft Prod Coupling having an o-ring retainer
US3537733A (en) * 1967-04-13 1970-11-03 Precision General Sa Soc Pipe connection incorporating a deformable packing

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3726504A (en) * 1971-04-02 1973-04-10 Gen Signal Corp Corrosion resistant valving edge for butter-fly valve disc
DE2623906A1 (de) * 1976-05-28 1977-12-01 Vat Ag Metallische dichtvorrichtung, insbesondere hochvakuumventil
CH626693A5 (de) * 1978-03-30 1981-11-30 Balzers Hochvakuum

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US392931A (en) * 1888-11-13 Metallic wire packing
US2832614A (en) * 1955-03-18 1958-04-29 Jr Joseph E Settle Seal for concrete pipe joint having means for spacing the pipe ends
GB885304A (en) * 1958-12-12 1961-12-20 Goetzewerke Seals between cylinder heads and cylinder blocks in internal combustion engines
US3262722A (en) * 1964-11-19 1966-07-26 United Aircraft Prod Coupling having an o-ring retainer
US3537733A (en) * 1967-04-13 1970-11-03 Precision General Sa Soc Pipe connection incorporating a deformable packing

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4773655A (en) * 1986-01-22 1988-09-27 Oy Safematic Ltd. Slide ring seal
US4756053A (en) * 1987-02-24 1988-07-12 The United States Of America As Represented By The Secretary Of The Air Force Nozzle flap hinge joint
US5146945A (en) * 1989-12-06 1992-09-15 Westinghouse Electric Corp. Seal ring retainer and guide ring for valve plug
US5160176A (en) * 1991-11-18 1992-11-03 Stanley Aviation Corporation Metal seal ball joint coupling assembly
US6089537A (en) * 1999-06-23 2000-07-18 Mks Instruments, Inc. Pendulum valve assembly
US6328051B1 (en) 2000-06-28 2001-12-11 Mks Instruments, Inc. Dual pendulum valve assembly
US6409149B1 (en) 2000-06-28 2002-06-25 Mks Instruments, Inc. Dual pendulum valve assembly with valve seat cover
DE10196376B4 (de) * 2000-06-28 2008-08-07 Mks Instruments Inc., Andover Doppel-Pendelschieberventil-Baugruppe
US7004478B2 (en) * 2001-12-07 2006-02-28 Perkinelmer Inc. Shallow metallic s-seal
US6883836B2 (en) 2003-01-17 2005-04-26 Stanley Aviation Corporation Positive locking fitting assembly
US20070085275A1 (en) * 2005-10-14 2007-04-19 G-2 Engineering Sealing assembly with a diagonal seal
US20070087606A1 (en) * 2005-10-14 2007-04-19 G2 Engineering, Inc. Sealing Member and System
US20150316011A1 (en) * 2014-05-05 2015-11-05 Electro-Motive Diesel, Inc. Sealing body for isolating vibrations from cylinder body to nozzle
US10502325B2 (en) 2015-08-06 2019-12-10 Vat Holding Ag Valve, preferably vacuum valve
WO2019121903A1 (de) * 2017-12-21 2019-06-27 Continental Automotive Gmbh Ventil
CN111448406A (zh) * 2017-12-21 2020-07-24 纬湃技术有限公司
US11092244B1 (en) * 2020-10-23 2021-08-17 Shanghai Advanced Research Institute, Chinese Academy Of Science Sealing disc for vacuum closure

Also Published As

Publication number Publication date
JPS56101463A (en) 1981-08-14
DE2951150A1 (de) 1981-07-02
GB2069102B (en) 1983-12-14
FR2472128B3 (de) 1983-08-26
CH651903A5 (de) 1985-10-15
FR2472128A1 (fr) 1981-06-26
DE2951150C2 (de) 1984-10-18
GB2069102A (en) 1981-08-19

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