US3916088A - Electric current supply lines for an induction heating coil used with a crucible-free melt zone apparatus - Google Patents

Electric current supply lines for an induction heating coil used with a crucible-free melt zone apparatus Download PDF

Info

Publication number
US3916088A
US3916088A US443716A US44371674A US3916088A US 3916088 A US3916088 A US 3916088A US 443716 A US443716 A US 443716A US 44371674 A US44371674 A US 44371674A US 3916088 A US3916088 A US 3916088A
Authority
US
United States
Prior art keywords
securement member
aperture
dielectric tube
heating coil
conductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US443716A
Other languages
English (en)
Inventor
Wolfgang Keller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of US3916088A publication Critical patent/US3916088A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/30—Sealing
    • H01B17/303—Sealing of leads to lead-through insulators
    • H01B17/305—Sealing of leads to lead-through insulators by embedding in glass or ceramic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Definitions

  • ABSTRACT U-S. 1 An electric urrent upply line including a pair of par- [5 Int- (2].
  • allel conductor elements eparated one from another F27D 11/06 by a hollow dielectric tube such as composed of Fleld of Search" 174/15 13H, 16 18, 5055, quartz or a ceramic and layers of a filler material, for 174/50.6, 151, 152 R, 152 GM; 13/1, 26, 27, example, silicone rubber, between contiguous metallic 1; 23/273 SP surfaces and dielectric surfaces.
  • a hollow dielectric tube such as composed of Fleld of Search" 174/15 13H, 16 18, 5055, quartz or a ceramic and layers of a filler material, for 174/50.6, 151, 152 R, 152 GM; 13/1, 26, 27, example, silicone rubber, between contiguous metallic 1; 23/273 SP surfaces and dielectric surfaces.
  • a semiconductor crystalline rod is vertically supported within a gas impermeable reaction chamber by suitable support means so that an induction heating coil within the chamber encircles an axial portion of the rod and upon energization of the coil, as by a high frequency current, a molten zone is generated at the encircled portion of the rod. Since the induction heating coil has a relatively small axial dimension in relation to the length of the semiconductor rod, only the portion of the rod which lies in the coil melts. During the course of a cruciblefree zone melting process, relative movement between the rod and the coil is effected. For example, the induction heating coil may be slowly moved in the longitudinal direction of the rod. The process may be carried out in a vacuum or in a protected gas atmosphere.
  • the induction heating coil is provided with a suitable current via a current supply line which passes through a wall of the reaction chamber and interconnects a source of current with the coil.
  • a current supply line which passes through a wall of the reaction chamber and interconnects a source of current with the coil.
  • US. Pat. No. 2,904,663 suggests that such current supply lines be comprised of a pair of conductor tubes of different diameters, which on account of the low inductance are arranged coaxially with one another.
  • the conductor tube having the largest diameter is passed through a wall of the reaction chamber by means of a gas impermeable seal means so that the tube is displaceable in its longitudinal direction.
  • the space within the inner conductor tube and the space between the outer and inner conductor tubes provide a cyclic flow path for a heatexchange medium.
  • the induction heating coil is supported on the outer conductor tube and is provided with a passage therein which is interconnected to the cyclic flow path within the current supply line so that the heat-exchange
  • the prior art employed a molded polytetrafluorethylene component for sealing and insulating a current supply line connected with an induction heating coil in a crucible-free zone melt apparatus. These molded components are forced against sealing surfaces by means of a screw which exerts pressure against the molded components. In the event that such an apparatus is subjected to a greater load, such as during the production of large diameter monocrystal rods, the pressure screws must be continuously retightened to insure proper sealing. However, such adjustments are only possible for a limited length of time, for example, until the molded polytetrafluoroethylene components become deformed.
  • the invention provides current supply lines comprised vof at least a pair of parallel conductor elements spaced from one another by a dielectric tube composed of a solid insulating material, such as quartz, ceramic or a synthetic material such as polytetrafluoroethylene and layers of a filler compound, such as silicone rubber, joining surfaces of the dielectric tube with contiguous metallic surfaces.
  • a dielectric tube composed of a solid insulating material, such as quartz, ceramic or a synthetic material such as polytetrafluoroethylene and layers of a filler compound, such as silicone rubber, joining surfaces of the dielectric tube with contiguous metallic surfaces.
  • FIG. 1 is a partial schematic illustration in crosssection of a current supply line for interconnecting a source of energy with an induction heating coil, constructed in accordance with the principles of the invention
  • FIG. 2 is a partial front view, with some elements in cross-section, taken substantially along section line lI-II of FIG. 1.
  • the invention provides current supply lines for interconnecting a source of electrical energy with an induction heating coil in a crucible-free melt zone apparatus and a method of producing such lines.
  • the main dielectric separating a pair of parallelly arranged conductor elements is comprised of a tube formed of a solid insulating material and the gaps or spaces between contiguous conductor element surfaces and dielectric surfaces (which are relatively small, generally having a maximum dimension of l to 2 mm) are filled with a suitable filler compound, such as silicone rubber so that the resulting supply line has substantially improved electrical properties and better mechanical stability in comparison with the earlier discussed prior art supply lines.
  • a suitable filler compound such as silicone rubber
  • the resultant current supply line exhibits a tan 8 value of 10 and a dielectric constant e of 3.7.
  • substantially identical supply lines having a dielectric formed of only silicone rubber exhibits a tan 8 value of 10' and a dielectric constant e of 3.1.
  • current supply lines constructed in accordance with the principles of the invention have insulating properties which result in considerably lower losses of the available energy.
  • current supply lines of the invention are not subjected to any substantial field distortions because the dielectric constants of the materials employed are practically identical. Consequently, there is almost no danger of electric sparkovers in a region of the opening into the crucible-free melt zone apparatus.
  • a wall 2 of a cruciblefree melt zone apparatus is partially illustrated with the interior of the apparatus facing the left hand side of wall 2.
  • a crucible-free melt zone apparatus includes a melt zone or reaction chamber 15 wherein a semiconductor crystal rod 16 undergoes treatment.
  • the wall 2 is provided with an opening 2a for communication between the interior and exterior of the apparatus.
  • a current supply line 1 passes through opening Za'and interconnects an induction heating coil 17 with a current supply, such as an HF generator (not shown).
  • the current supply line 1 includes a'hollow metallic ring-like securement means, such as copper tube 3, which is provided with a circular flange 4 for securing the line 1 to the wall 2.
  • the flange 4 is attached to wall 2 by means of screws or bolts 6.
  • a sealing ring 14 is provided between adjacent flange and wall surfaces to insure a gas impermeable connection.
  • The'current supply line 1 also includes an inner conductor'element, such as copper tube 8 which is separated from outer tube 3 by an insulating means primarily comprised of a solid insulating tube 9, for example, composed of quartz, ceramic or a synthetic material such as polytetrafluoroethylene.
  • the spaces between contiguous surfaces of tube 9 and tubes Sand 8, respectively, are relatively small and are readily filled with a layer of silicone rubber.
  • the current supply line 1 alsoincludes an outer conductor element, such as a copper tube 11, which is connected, as by soldering,-to an adjacent outer wall of copper tube 3. As shown, the tube 11 passes through an opening in flange 4 so as to be secured to the wall 2.
  • the two metallic conductor elements, tubes 8 and 1 l are parallelly arranged and spaced fromone another by solid insulating tube 9.
  • the spaces or gaps between contiguous metallic and insulating surfaces are filled with a'layer 10 of asilicone-rubber or a filler compound which includes a base of silicone rubber.
  • the interior of tube 11 functions asan out-passage and the interior of tube 8 functions as an in-passage for a heat-exchange medium, as schematically indicated by arrows l2 and 13.
  • An induction heating coil 17 has suitable passages therein which are interconnected with tubes 11 and 8 so that a heat-exchange medium can be cyclically flown through the tube and the induction heating coil and prevent thecoil from being excessively heated by current flow and insure that radiati'on heating of the melt zone. occurs.
  • the method embodiment of the invention comprises assembling a current supply line for use with an induction heating coil in a crucible-free zone melt apparatus.
  • the method includes, fitting a hollow dielectric tube composed of a solid insulating material within an aperture of a securement member, fitting a hollow metallic conductor within'the dielectric tube, fitting a second hollow metallic conductor within a second aperture in the securement member, filling the spaces between contiguous metallic surfaces and insulating material surfaces with afiller compound so that a unitary structure is attained, an d attaching the unitary structure to a wall of a crucible-free zone melt apparatus.
  • a current supply means comprising:
  • a hollow metallic ring-like securement member h'aving an axially extending surface and a radially extending surface, said radially extending surface adapted for contacting wall portions adjacent the aperture in said apparatus, said securement member having a first aperture extending along said axial surface of the securement member, said securement member having a second aperture between said axially extending and radially extending surfaces;
  • a hollow dielectric tube composed of a solid insulating material selected from the group consisting of quartz, ceramic and polytetrafluoroethylene, said dielectric tube having an outer diameter relatively smaller than the diameter of said first aperture in the securement member, said dielectric tube being positioned within said first aperture of the securement member;
  • first hollow metallic conductor element having an outer diameter relatively smaller than the inner diameterof said dielectric tube, said first conductor element being positioned within said dielectric tube;
  • a second hollow metallic conductor element having an outer diameter relatively smaller'than the diarri eter of said second aperture in the securement member, said second conductor element being positioned within saidsecond aperture of the securement member; 7 a layer of a filler compound between contiguous sur faces of said securement member and said dielectric tube;

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • General Induction Heating (AREA)
  • Silicon Compounds (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Resistance Heating (AREA)
US443716A 1973-02-19 1974-02-19 Electric current supply lines for an induction heating coil used with a crucible-free melt zone apparatus Expired - Lifetime US3916088A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2308136A DE2308136C3 (de) 1973-02-19 1973-02-19 Gasdichte Stromzuführung

Publications (1)

Publication Number Publication Date
US3916088A true US3916088A (en) 1975-10-28

Family

ID=5872406

Family Applications (1)

Application Number Title Priority Date Filing Date
US443716A Expired - Lifetime US3916088A (en) 1973-02-19 1974-02-19 Electric current supply lines for an induction heating coil used with a crucible-free melt zone apparatus

Country Status (8)

Country Link
US (1) US3916088A (xx)
BE (1) BE805413A (xx)
DE (1) DE2308136C3 (xx)
DK (1) DK145818C (xx)
FR (1) FR2218627B1 (xx)
GB (1) GB1424487A (xx)
IT (1) IT1006337B (xx)
PL (1) PL88640B1 (xx)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4331827A (en) * 1978-05-30 1982-05-25 Siemens Aktiengesellschaft Method of producing current lead-ins having coaxial construction
US4361716A (en) * 1979-05-17 1982-11-30 Siemens Aktiengesellschaft Current lead-in of the coaxial type for sealing to a container wall
US20030176005A1 (en) * 2002-03-15 2003-09-18 Seiko Epson Corporation Through structure of connecting line at gastight chamber, and ejection system incorporating same; method of manufacturing LCD device, organic EL device, electron emitting device, PDP device, electrophoresis display device, color filter, and organic EL; and method of forming spacer, metal wiring, lens, resist, and light diffuser
US11670448B2 (en) * 2018-05-07 2023-06-06 Astronics Advanced Electronic Systems Corp. System of termination of high power transformers for reduced AC termination loss at high frequency

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2278974A (en) * 1940-05-02 1942-04-07 Gen Electric Bushing for encased electrical apparatus
US2617002A (en) * 1951-11-27 1952-11-04 Wiegand Co Edwin L Electric heater
US2675414A (en) * 1951-12-20 1954-04-13 Emil R Capita Induction furnace
US2803689A (en) * 1956-04-02 1957-08-20 Nat Res Corp Electric induction furnace
US2904663A (en) * 1957-11-15 1959-09-15 Siemens Ag Apparatus for zone melting of semiconductor material
US3497444A (en) * 1967-04-14 1970-02-24 Sinclair Research Inc Anode structure
US3539430A (en) * 1968-01-24 1970-11-10 Us Army Method of constructing a radio-frequency feed-through assembly
US3688006A (en) * 1969-03-29 1972-08-29 Siemens Ag Device for crucible-free, floating-zonemelting a crystalline member

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2278974A (en) * 1940-05-02 1942-04-07 Gen Electric Bushing for encased electrical apparatus
US2617002A (en) * 1951-11-27 1952-11-04 Wiegand Co Edwin L Electric heater
US2675414A (en) * 1951-12-20 1954-04-13 Emil R Capita Induction furnace
US2803689A (en) * 1956-04-02 1957-08-20 Nat Res Corp Electric induction furnace
US2904663A (en) * 1957-11-15 1959-09-15 Siemens Ag Apparatus for zone melting of semiconductor material
US3497444A (en) * 1967-04-14 1970-02-24 Sinclair Research Inc Anode structure
US3539430A (en) * 1968-01-24 1970-11-10 Us Army Method of constructing a radio-frequency feed-through assembly
US3688006A (en) * 1969-03-29 1972-08-29 Siemens Ag Device for crucible-free, floating-zonemelting a crystalline member

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4331827A (en) * 1978-05-30 1982-05-25 Siemens Aktiengesellschaft Method of producing current lead-ins having coaxial construction
US4361716A (en) * 1979-05-17 1982-11-30 Siemens Aktiengesellschaft Current lead-in of the coaxial type for sealing to a container wall
US20030176005A1 (en) * 2002-03-15 2003-09-18 Seiko Epson Corporation Through structure of connecting line at gastight chamber, and ejection system incorporating same; method of manufacturing LCD device, organic EL device, electron emitting device, PDP device, electrophoresis display device, color filter, and organic EL; and method of forming spacer, metal wiring, lens, resist, and light diffuser
US7384662B2 (en) * 2002-03-15 2008-06-10 Seiko Epson Corporation Through structure of connecting line at gastight chamber, and ejection system incorporating same; method of manufacturing LCD device, organic EL device, electron emitting device, PDP device, electrophoresis display device, color filter, and organic EL; and method of forming spacer, metal wiring, lens, resist, and light diffuser
US11670448B2 (en) * 2018-05-07 2023-06-06 Astronics Advanced Electronic Systems Corp. System of termination of high power transformers for reduced AC termination loss at high frequency

Also Published As

Publication number Publication date
DK145818B (da) 1983-03-14
GB1424487A (en) 1976-02-11
FR2218627B1 (xx) 1981-02-13
DE2308136C3 (de) 1982-03-25
DK145818C (da) 1983-08-29
FR2218627A1 (xx) 1974-09-13
PL88640B1 (xx) 1976-09-30
DE2308136B2 (de) 1981-06-25
DE2308136A1 (de) 1974-08-22
IT1006337B (it) 1976-09-30
BE805413A (fr) 1974-01-16

Similar Documents

Publication Publication Date Title
US2686865A (en) Stabilizing molten material during magnetic levitation and heating thereof
US3030194A (en) Processing of semiconductor devices
US2930098A (en) Production of sintered bodies from powdered crystalline materials
US2905798A (en) Induction heating apparatus
US2773923A (en) Zone-refining apparatus
US2875311A (en) Induction heating in injection and extrusion processes
US3916088A (en) Electric current supply lines for an induction heating coil used with a crucible-free melt zone apparatus
US3898413A (en) Induction heat coil arrangement
US2664496A (en) Apparatus for the magnetic levitation and heating of conductive materials
JPS63260828A (ja) ガラスを融解及び精製する方法
JPH0412083A (ja) シリコン単結晶製造方法
US2904663A (en) Apparatus for zone melting of semiconductor material
US3666869A (en) Method and apparatus for setting up a temperature gradient
US3688006A (en) Device for crucible-free, floating-zonemelting a crystalline member
US3793468A (en) Furnace apparatus utilizing a resultant magnetic field or fields produced by mutual interaction of at least two independently generated magnetic fields and methods of operating an electric arc furnace
US3100250A (en) Zone melting apparatus
US3086850A (en) Method and means for growing and treating crystals
US3310384A (en) Method and apparatus for cruciblefree zone melting
US3113841A (en) Floating zone melting method for semiconductor rods
US3397042A (en) Production of dislocation-free silicon single crystals
US2914397A (en) Refining processes for semiconductor materials
US3658598A (en) Method of crucible-free zone melting crystalline rods, especially of semiconductor material
US3801769A (en) Induction coil for zone melting of semiconductor rods
US3373240A (en) Method of operating an electric arc furnace
US3053918A (en) Apparatus for crucible-free zone melting of semiconductor rods