US3904991A - Stripline directional coupler having bent coupling arms - Google Patents
Stripline directional coupler having bent coupling arms Download PDFInfo
- Publication number
- US3904991A US3904991A US438404A US43840474A US3904991A US 3904991 A US3904991 A US 3904991A US 438404 A US438404 A US 438404A US 43840474 A US43840474 A US 43840474A US 3904991 A US3904991 A US 3904991A
- Authority
- US
- United States
- Prior art keywords
- strip lines
- crossed
- directional coupling
- coupling unit
- bent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
- H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
- H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
- H01P5/184—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers the guides being strip lines or microstrips
- H01P5/185—Edge coupled lines
Definitions
- a coupled line type directional coupler comprises a first directional coupling unit including mutually insulated first and second metal strip lines having a length of M4 which are crossed three-dimensionally at the center of the directional coupling unit and run parallel to each other, the first and second metal strip lines being bent substantially at a right angle and substantially at the center of the first directional coupling unit; and a second directional coupling unit including mutually insulated third and fourth metal strip lines having a length of M4 which are crossed threedimensionally at the center of the directional coupling unit and run parallel to each other, the third and fourth strip lines being bent substantially at the center of the second directional coupling unit, whereby the first and second directional coupling units are directly coupled in tandem.
- This invention relates to a coupled line type directional coupler, particularly to a directional coupler for use in a microwave strip circuit.
- a coupled line type directional coupler as shown in FIG. 1 has been used as a mixer in amicrowave receiving device.
- the coupled line type directional coupler is provided with directional coupling units 1, 2 coupled in tandem.
- the directional coupling unit I has a pair of strip lines 3, 4 having a length of M4 (A being the wavelength of the handled signal) which are crossed at the center of the directional coupling unit and run parallel to each other.
- the directional coupling units 1, 2 are coupled in tandem by means of strip lines 7, 8.
- the strip lines 7, 8 are advantageously made longer so as to prevent a mutual influence of the directional coupling units 1, 2.
- the strip lines 7, 8 per se impart an influence to the characteristics of the coupled line type directional coupler.
- a bulkier directional coupler results. Therefore, the length of the strip lines 7, 8 is empirically determined to be M4.
- FIG. 4 shows in broken lines output characteristics at a port II and VSWR at a port I involved when a signal of 2.0-4.0 GHz is applied to the port I. As will be evident from this figure, an amount of attenuation of an output at the port II is below 20 dB and VSWR is l.3l .4 which indicates a poor characteristic.
- This invention relates to a small-sized directional coupler whose characteristics are improved.
- a directional coupling comprising a first directional coupling unit having mutually insulated first and second strip lines having a length of M4 which are crossed at one location and run parallel to each other, the first and second strip lines being bent, a second directional coupling unit having mutually insulated third and fourth strip lines having a length of M4 which are crossed at one location and run parallel to each other, the third and fourth strip lines being bent, whereby the first and second directional coupling units are directly coupled in tandem.
- FIG. 1 is a diagrammatic view showing a conventional coupled line type directional coupler
- F IG. 2 is a diagrammatic view illustrating the principle of a coupled line type directional coupler according to this invention
- FIG. 3 is a perspective view of a directional coupler based on the principle of FIG. 2;
- FIG. 4 is an explanatory view showing the characteristics of coupled line type directional couplers based on the principle of FIGS. 1 and 2;
- FIG. 5 is a diagrammatic view illustrating the principle of another coupled line type directional coupler according to this invention.
- a coupled line type directional coupler shown in FIG. 2 is provided with directional coupling units ll, 12 having a degree of coupling of 8.34 dB.
- the directional coupling unit 1] has mutually insulated metal strip lines 13, 14 having a length of M4 which are threedimensionally crossed substantially at the central portion of the directional coupling unit and run parallel to each other at the remaining portion.
- the directional coupling unit 12 has mutually insulated metal strip lines 15, 16 having a length of N4 which are threedimensionally crossed substantially at the central portion of the directional coupling unit 12 and run parallel to each other at the remaining portion.
- the metal strip lines 13, 14 and l5, 16 are bent substantially at a right angle at the crossed central portion so that the respective both ends of the metal strip lines l3, 14 are arranged opposite to the respective both ends of the metal strip lines 15, 16.
- One end of the metal strip line 13 is coupled directly to one end of the metal strip line 16 which is opposite to the one end of the strip line 13 and one end of the metal strip line 14 corresponding to the other end of the strip line 13 is coupled directly to one end of the metal strip line 15 corresponding to the other end of the strip line 16 so that the directional coupling units 11 and 12 are coupled in tandem to provide a directional coupler.
- the respective other ends of the metal strip lines 13, l4, l5 and 16 are extended to form ports I, II, III and IV.
- the metal strip lines 14 and 16 have metal strips 17 and 18, respectively.
- the metal strip 17 spans the metal strip 13 at one location where the metal strip lines 13 and 14 are to be crossed relative to each other, while the metal strip 18 spans the metal strip 15 at one location where the metal strip lines 15 and 16 are to be crossed relative to each other.
- the directional coupler has no coupling strip lines 7, 8 for the directional coupler shown in FIG. 1. This completely obviates disadvantages such as the bulkiness of a directional coupler, deterioration of directivity and VSWR, and so on. caused due to the presence of such coupling strip lines.
- FIG. 3 shows one embodiment based on the principle of FIG. 2.
- a directional coupler of the type shown in FIG. 2 is formed on an alumina substrate 21. Sections corresponding to respective metal strips l3, l4, l5, 16 are formed on an alumina substrate 21 (dielectric constant 10.5) of a chromiumgold double layer having a 0.635 mm thickness. Gold strips 17 and 18 are used to span the strip lines 13 and 15, respectively. The width of each strip line is made to be 0.380 mm and a spacing between the strip lines 13 and 14 and a spacing between the strip lines 15 and 16 are made to be 0.110 mm, respectively.
- Respective ports I, II, III, IV are connected to coaxial plugs 22, 23, 24, 25 so as to be coupled to outer coaxial lines (not shown).
- the substrate 21 is secured to a metal block 30 by fitting means 26, 27, 28 and 29.
- solid lines show output characteristics at the ports II, III and IV and VSWR at the port I involved when input signal is applied to the port I of the coupled line type directional coupler.
- An operating central frequency is 3 GHZ.
- an amount of attenuation at the outlet of the port II is improved up to more than 20 dB and VSWR is restricted to below 1.2.
- Such improved characteristics are attained by directly coupling the directional coupling units 11 and 12 in tandem without interposing any strip lines such as coupling strip lines 7, 8 etc. as is found in a conventional direction coupler. Furthermore, it is possible to reduce the size of a directional coupler to a greater extent by bending the directional coupling unit as shown in FIG. 2.
- the direc tional coupling units 11, 12 are bent at a right angle substantially at the center thereof.
- the directional coupling unit may be bent at an acute or obtuse angle.
- the directional coupling unit may be coupled in a semicircular shape as shown in FIG. 5.
- the metal strip lines l3, l4 and l5, 16 are crossed substantially at the respective center thereof.
- the crossed portions may be located at other than the center of the strip lines.
- two directional coupling units are coupled in tandem, a plurality of directional coupling units may be coupled in tandem.
- a directional coupler comprising a first directional coupling unit including mutually insulated first and second strip lines having a length of ) ⁇ /4 where A is the wavelength of the handled signal which are crossed at one portion and run parallel to each other at the remaining portion, the first and second strips being bent, a second directional coupling unit including mutually insulated third and fourth strip lines having a length of M4 which are crossed at one portion and run parallel to each other at the other portion, the third and fourth strip lines being bent so that the respective both ends of the first and second strip lines are opposite to the respective both ends of the third and fourth strip lines,
- first and second directional coupling units being directly coupled in tandem, the first and second lines being bent substantially at a right angle and crossed at the center thereof and the third and fourth strip lines being bent substantially at a right angle and crossed at the center thereof.
- a directional coupler comprising a first directional coupling unit including mutually insulated first and second strip lines having a length of M4 where A is the wavelength of the handled signal which are crossed at one portion and run parallel to each other at the remaining portion, the first and second strips being bent, a second directional coupling unit including mutually insulated third and fourth strip lines having a length of M4 which are crossed at one portion and run parallel to each other at the other portion, the third and fourth strip lines being bent so that the respective both ends of the first and second strip lines are opposite to the respective both ends of the third and fourth strip lines, the first and second directional coupling units being directly coupled in tandem, the first and second strip lines being bent in a semi-circular shape and crossed at the center thereof and the third and fourth strip lines being bent in a semi-circular shape and crossed at the
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1721273A JPS5321827B2 (fr) | 1973-02-12 | 1973-02-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3904991A true US3904991A (en) | 1975-09-09 |
Family
ID=11937625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US438404A Expired - Lifetime US3904991A (en) | 1973-02-12 | 1974-01-31 | Stripline directional coupler having bent coupling arms |
Country Status (3)
Country | Link |
---|---|
US (1) | US3904991A (fr) |
JP (1) | JPS5321827B2 (fr) |
GB (1) | GB1414948A (fr) |
Cited By (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3980972A (en) * | 1975-07-14 | 1976-09-14 | Stanford Research Institute | Proximity coupler |
US4011528A (en) * | 1975-07-14 | 1977-03-08 | Stanford Research Institute | Semi-lumped element coupler |
US4127832A (en) * | 1977-02-07 | 1978-11-28 | Riblet Gordon P | Directional coupler |
FR2440627A1 (fr) * | 1978-11-03 | 1980-05-30 | Philips Nv | Dispositif a guide d'ondes a ruban soutenu pour la propagation d'un mode d'onde impair |
US4816784A (en) * | 1988-01-19 | 1989-03-28 | Northern Telecom Limited | Balanced planar transformers |
US5262740A (en) * | 1992-04-09 | 1993-11-16 | Itt Corporation | Microstrip transformer apparatus |
US5818307A (en) * | 1997-03-11 | 1998-10-06 | Motorola, Inc. | Directional coupler having inductor crossing microstrip transmission line |
US20040263281A1 (en) * | 2003-06-25 | 2004-12-30 | Podell Allen F. | Coupler having an uncoupled section |
US20050122185A1 (en) * | 2003-12-08 | 2005-06-09 | Podell Allen F. | Bi-level coupler |
US20050146394A1 (en) * | 2003-12-08 | 2005-07-07 | Werlatone, Inc. | Coupler with edge and broadside coupled sections |
US20060066418A1 (en) * | 2003-06-25 | 2006-03-30 | Werlatone, Inc. | Multi-section coupler assembly |
US20080070519A1 (en) * | 2006-09-20 | 2008-03-20 | Renesas Technology Corp. | Directional coupler and rf circuit module |
US20090189712A1 (en) * | 2008-01-29 | 2009-07-30 | Xin Jiang | Spiral Coupler |
RU2447547C1 (ru) * | 2011-02-15 | 2012-04-10 | Федеральное государственное унитарное предприятие "Ростовский-на-Дону научно-исследовательский институт радиосвязи" (ФГУП "РНИИРС") | Квадратурный направленный ответвитель |
WO2013017397A1 (fr) * | 2011-08-04 | 2013-02-07 | Endress+Hauser Gmbh+Co. Kg | Coupleur directif séparé de manière galvanique |
CN103367314A (zh) * | 2012-08-31 | 2013-10-23 | 日月光半导体制造股份有限公司 | 半导体变压器 |
US20150109069A1 (en) * | 2013-10-22 | 2015-04-23 | Murata Manufacturing Co., Ltd. | Directional coupler |
US20150293304A1 (en) * | 2014-04-15 | 2015-10-15 | Gatesair, Inc. | Directional coupler system |
EP2984702A4 (fr) * | 2013-04-12 | 2016-12-28 | Skyworks Solutions Inc | Coupleur directif radiofréquence miniature pour applications cellulaires |
US20170098501A1 (en) * | 2014-05-05 | 2017-04-06 | 3D Glass Solutions, Inc. | 2D and 3D inductors antenna and trausformers fabricating photoactive substrates |
US10854946B2 (en) | 2017-12-15 | 2020-12-01 | 3D Glass Solutions, Inc. | Coupled transmission line resonate RF filter |
US10903545B2 (en) | 2018-05-29 | 2021-01-26 | 3D Glass Solutions, Inc. | Method of making a mechanically stabilized radio frequency transmission line device |
US11076489B2 (en) | 2018-04-10 | 2021-07-27 | 3D Glass Solutions, Inc. | RF integrated power condition capacitor |
US11101532B2 (en) | 2017-04-28 | 2021-08-24 | 3D Glass Solutions, Inc. | RF circulator |
US11139582B2 (en) | 2018-09-17 | 2021-10-05 | 3D Glass Solutions, Inc. | High efficiency compact slotted antenna with a ground plane |
US11161773B2 (en) | 2016-04-08 | 2021-11-02 | 3D Glass Solutions, Inc. | Methods of fabricating photosensitive substrates suitable for optical coupler |
US11264167B2 (en) | 2016-02-25 | 2022-03-01 | 3D Glass Solutions, Inc. | 3D capacitor and capacitor array fabricating photoactive substrates |
US11270843B2 (en) | 2018-12-28 | 2022-03-08 | 3D Glass Solutions, Inc. | Annular capacitor RF, microwave and MM wave systems |
US11342896B2 (en) | 2017-07-07 | 2022-05-24 | 3D Glass Solutions, Inc. | 2D and 3D RF lumped element devices for RF system in a package photoactive glass substrates |
US11373908B2 (en) | 2019-04-18 | 2022-06-28 | 3D Glass Solutions, Inc. | High efficiency die dicing and release |
US11594457B2 (en) | 2018-12-28 | 2023-02-28 | 3D Glass Solutions, Inc. | Heterogenous integration for RF, microwave and MM wave systems in photoactive glass substrates |
US11677373B2 (en) | 2018-01-04 | 2023-06-13 | 3D Glass Solutions, Inc. | Impedence matching conductive structure for high efficiency RF circuits |
US11908617B2 (en) | 2020-04-17 | 2024-02-20 | 3D Glass Solutions, Inc. | Broadband induction |
US11962057B2 (en) | 2019-04-05 | 2024-04-16 | 3D Glass Solutions, Inc. | Glass based empty substrate integrated waveguide devices |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS535946A (en) * | 1976-07-06 | 1978-01-19 | Mitsubishi Electric Corp | Coaxial transmission unit |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3167727A (en) * | 1961-03-09 | 1965-01-26 | Boeing Co | Microwave zig-zag line couplers |
US3737810A (en) * | 1969-05-05 | 1973-06-05 | Radiation Systems Inc | Wideband tem components |
-
1973
- 1973-02-12 JP JP1721273A patent/JPS5321827B2/ja not_active Expired
-
1974
- 1974-01-31 US US438404A patent/US3904991A/en not_active Expired - Lifetime
- 1974-02-01 GB GB477474A patent/GB1414948A/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3167727A (en) * | 1961-03-09 | 1965-01-26 | Boeing Co | Microwave zig-zag line couplers |
US3737810A (en) * | 1969-05-05 | 1973-06-05 | Radiation Systems Inc | Wideband tem components |
Cited By (57)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3980972A (en) * | 1975-07-14 | 1976-09-14 | Stanford Research Institute | Proximity coupler |
US4011528A (en) * | 1975-07-14 | 1977-03-08 | Stanford Research Institute | Semi-lumped element coupler |
US4127832A (en) * | 1977-02-07 | 1978-11-28 | Riblet Gordon P | Directional coupler |
FR2440627A1 (fr) * | 1978-11-03 | 1980-05-30 | Philips Nv | Dispositif a guide d'ondes a ruban soutenu pour la propagation d'un mode d'onde impair |
US4816784A (en) * | 1988-01-19 | 1989-03-28 | Northern Telecom Limited | Balanced planar transformers |
US5262740A (en) * | 1992-04-09 | 1993-11-16 | Itt Corporation | Microstrip transformer apparatus |
US5818307A (en) * | 1997-03-11 | 1998-10-06 | Motorola, Inc. | Directional coupler having inductor crossing microstrip transmission line |
US20070159268A1 (en) * | 2003-06-25 | 2007-07-12 | Werlatone, Inc. | Multi-section coupler assembly |
US20060066418A1 (en) * | 2003-06-25 | 2006-03-30 | Werlatone, Inc. | Multi-section coupler assembly |
US20040263281A1 (en) * | 2003-06-25 | 2004-12-30 | Podell Allen F. | Coupler having an uncoupled section |
US7345557B2 (en) | 2003-06-25 | 2008-03-18 | Werlatone, Inc. | Multi-section coupler assembly |
US7190240B2 (en) | 2003-06-25 | 2007-03-13 | Werlatone, Inc. | Multi-section coupler assembly |
US7132906B2 (en) | 2003-06-25 | 2006-11-07 | Werlatone, Inc. | Coupler having an uncoupled section |
US6972639B2 (en) | 2003-12-08 | 2005-12-06 | Werlatone, Inc. | Bi-level coupler |
US20050146394A1 (en) * | 2003-12-08 | 2005-07-07 | Werlatone, Inc. | Coupler with edge and broadside coupled sections |
US20050122185A1 (en) * | 2003-12-08 | 2005-06-09 | Podell Allen F. | Bi-level coupler |
US7138887B2 (en) | 2003-12-08 | 2006-11-21 | Werlatone, Inc. | Coupler with lateral extension |
US20050156686A1 (en) * | 2003-12-08 | 2005-07-21 | Werlatone, Inc. | Coupler with lateral extension |
US20050122186A1 (en) * | 2003-12-08 | 2005-06-09 | Podell Allen F. | Phase inverter and coupler assembly |
US7245192B2 (en) | 2003-12-08 | 2007-07-17 | Werlatone, Inc. | Coupler with edge and broadside coupled sections |
US7042309B2 (en) | 2003-12-08 | 2006-05-09 | Werlatone, Inc. | Phase inverter and coupler assembly |
US20080070519A1 (en) * | 2006-09-20 | 2008-03-20 | Renesas Technology Corp. | Directional coupler and rf circuit module |
US8249544B2 (en) * | 2006-09-20 | 2012-08-21 | Renesas Electronics Corporation | Directional coupler and RF circuit module |
US20090189712A1 (en) * | 2008-01-29 | 2009-07-30 | Xin Jiang | Spiral Coupler |
US7714679B2 (en) * | 2008-01-29 | 2010-05-11 | Hittite Microwave Corporation | Spiral coupler |
TWI409987B (zh) * | 2008-01-29 | 2013-09-21 | Hittite Microwave Corp | 改良式螺旋耦合器 |
RU2447547C1 (ru) * | 2011-02-15 | 2012-04-10 | Федеральное государственное унитарное предприятие "Ростовский-на-Дону научно-исследовательский институт радиосвязи" (ФГУП "РНИИРС") | Квадратурный направленный ответвитель |
US20140285283A1 (en) * | 2011-08-04 | 2014-09-25 | Endress + Hauser Gmbh + Co. Kg | Galvanically Isolated, Directional Coupler |
WO2013017397A1 (fr) * | 2011-08-04 | 2013-02-07 | Endress+Hauser Gmbh+Co. Kg | Coupleur directif séparé de manière galvanique |
US9413053B2 (en) * | 2011-08-04 | 2016-08-09 | Endress + Hauser Gmbh + Co. Kg | Galvanically isolated, directional coupler |
CN103367314B (zh) * | 2012-08-31 | 2017-01-18 | 日月光半导体制造股份有限公司 | 半导体变压器 |
US8963671B2 (en) * | 2012-08-31 | 2015-02-24 | Advanced Semiconductor Engineering, Inc. | Semiconductor transformer device and method for manufacturing the same |
CN103367314A (zh) * | 2012-08-31 | 2013-10-23 | 日月光半导体制造股份有限公司 | 半导体变压器 |
EP2984702A4 (fr) * | 2013-04-12 | 2016-12-28 | Skyworks Solutions Inc | Coupleur directif radiofréquence miniature pour applications cellulaires |
US20150109069A1 (en) * | 2013-10-22 | 2015-04-23 | Murata Manufacturing Co., Ltd. | Directional coupler |
US9543632B2 (en) * | 2013-10-22 | 2017-01-10 | Murata Manufacturing Co., Ltd. | Directional coupler |
US20150293304A1 (en) * | 2014-04-15 | 2015-10-15 | Gatesair, Inc. | Directional coupler system |
US9570793B2 (en) * | 2014-04-15 | 2017-02-14 | Gatesair, Inc. | Directional coupler system |
US20170098501A1 (en) * | 2014-05-05 | 2017-04-06 | 3D Glass Solutions, Inc. | 2D and 3D inductors antenna and trausformers fabricating photoactive substrates |
US10665377B2 (en) * | 2014-05-05 | 2020-05-26 | 3D Glass Solutions, Inc. | 2D and 3D inductors antenna and transformers fabricating photoactive substrates |
US11929199B2 (en) | 2014-05-05 | 2024-03-12 | 3D Glass Solutions, Inc. | 2D and 3D inductors fabricating photoactive substrates |
US11264167B2 (en) | 2016-02-25 | 2022-03-01 | 3D Glass Solutions, Inc. | 3D capacitor and capacitor array fabricating photoactive substrates |
US11161773B2 (en) | 2016-04-08 | 2021-11-02 | 3D Glass Solutions, Inc. | Methods of fabricating photosensitive substrates suitable for optical coupler |
US11101532B2 (en) | 2017-04-28 | 2021-08-24 | 3D Glass Solutions, Inc. | RF circulator |
US11342896B2 (en) | 2017-07-07 | 2022-05-24 | 3D Glass Solutions, Inc. | 2D and 3D RF lumped element devices for RF system in a package photoactive glass substrates |
US11367939B2 (en) | 2017-12-15 | 2022-06-21 | 3D Glass Solutions, Inc. | Coupled transmission line resonate RF filter |
US11894594B2 (en) | 2017-12-15 | 2024-02-06 | 3D Glass Solutions, Inc. | Coupled transmission line resonate RF filter |
US10854946B2 (en) | 2017-12-15 | 2020-12-01 | 3D Glass Solutions, Inc. | Coupled transmission line resonate RF filter |
US11677373B2 (en) | 2018-01-04 | 2023-06-13 | 3D Glass Solutions, Inc. | Impedence matching conductive structure for high efficiency RF circuits |
US11076489B2 (en) | 2018-04-10 | 2021-07-27 | 3D Glass Solutions, Inc. | RF integrated power condition capacitor |
US10903545B2 (en) | 2018-05-29 | 2021-01-26 | 3D Glass Solutions, Inc. | Method of making a mechanically stabilized radio frequency transmission line device |
US11139582B2 (en) | 2018-09-17 | 2021-10-05 | 3D Glass Solutions, Inc. | High efficiency compact slotted antenna with a ground plane |
US11270843B2 (en) | 2018-12-28 | 2022-03-08 | 3D Glass Solutions, Inc. | Annular capacitor RF, microwave and MM wave systems |
US11594457B2 (en) | 2018-12-28 | 2023-02-28 | 3D Glass Solutions, Inc. | Heterogenous integration for RF, microwave and MM wave systems in photoactive glass substrates |
US11962057B2 (en) | 2019-04-05 | 2024-04-16 | 3D Glass Solutions, Inc. | Glass based empty substrate integrated waveguide devices |
US11373908B2 (en) | 2019-04-18 | 2022-06-28 | 3D Glass Solutions, Inc. | High efficiency die dicing and release |
US11908617B2 (en) | 2020-04-17 | 2024-02-20 | 3D Glass Solutions, Inc. | Broadband induction |
Also Published As
Publication number | Publication date |
---|---|
GB1414948A (en) | 1975-11-19 |
JPS49106754A (fr) | 1974-10-09 |
JPS5321827B2 (fr) | 1978-07-05 |
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