US3857055A - Electron gun for electron irradiation equipment - Google Patents

Electron gun for electron irradiation equipment Download PDF

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Publication number
US3857055A
US3857055A US00361180A US36118073A US3857055A US 3857055 A US3857055 A US 3857055A US 00361180 A US00361180 A US 00361180A US 36118073 A US36118073 A US 36118073A US 3857055 A US3857055 A US 3857055A
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US
United States
Prior art keywords
main electrode
filament
electron gun
plate member
insulating plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00361180A
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English (en)
Inventor
S Shirai
H Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABT NO 19-18 1-CHOME NAKACHO MUSASHINO-SHI TOKYO JAPAN A JAPANESE CORP KK
Topcon Corp
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Application granted granted Critical
Publication of US3857055A publication Critical patent/US3857055A/en
Assigned to KABUSHIKI KAISHA ABT, NO. 19-18, 1-CHOME, NAKACHO, MUSASHINO-SHI, TOKYO, JAPAN A JAPANESE CORP. reassignment KABUSHIKI KAISHA ABT, NO. 19-18, 1-CHOME, NAKACHO, MUSASHINO-SHI, TOKYO, JAPAN A JAPANESE CORP. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: KABUSHIKI KAISHA AKASHI, SEISAKUSHO, A JAPANES CORP.
Assigned to KABUSHIKI KAISHA TOPCON A CORP. OF JAPAN reassignment KABUSHIKI KAISHA TOPCON A CORP. OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: KABUSHIKI KAISHA ABT A CORP. OF JAPAN
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Definitions

  • the conventional electron guns also have the disadvantage that the connections between the power supply and the various electrodes is complicated and the voltage applied to the electrode assembly is generally through the various parts of the mounting structure.
  • the main object of the present invention is to solve the aforementioned problems of the conventional electron guns by providing an electron gun*for use in electron irradiation equipment which has a simple construction and is small in size. 7
  • The-cartridge includes an insulating plate member that has the two electrodes'mounted thereon and projecting therefrom on one side thereof. At least one fastener is received through an aperture in the insulating plate member with a clearance thereabout to permit adjustable movement of the main electrode with respect to the insulating plate member thereby providing for the adjustable positioning of the main electrode with respect to-the filament.
  • the supply terminal means has jack means that receive the two plug electrodes therein for mechanically coupling the cartridge to the supply terminal means.
  • This means for electrically coupling the main electrode comprises a resilient contact electrically contacting the main electrode when the cartridge is mechanically coupled to the supply termainal means and means biasing the electrical contact outwardly of the supply terminal means.
  • the middle portion of a metal cylinder 7 holds insulating block 5, in an adjustable position which may be varied by use of an adjusting screw 5a.
  • the lower portion of cylinder 7 has a Wehnelt electrode 8 screwmounted thereon.
  • the electrode 8 has a small hole through which electron beams pass.
  • the upper portion of the cylinder '7 has a flange 7a on which a fastening ring 9 is rotatably fitted for connecting the assembly to the remaining structure.
  • a metal fittingl2 is fluidtightly fixed through a seal 11 to a flange 10a formed at the lower end of an electron gun insulator l0.
  • The'upper end portion of ring 9 has an internal thread which engages an external thread of a portion of the lower end of metal fitting 12, so that turning the ring 9 fastens the upper flange 7a of said cylinder 7 to the lower end of the metal fitting 12.
  • an elastic metal tongue 6a which is attached to the upper portion of each terminal 6, is pressed against terminal 14 which is fitted through an insulating material 13 in such a manner as to seal the central opening in the metal fitting 12.
  • the terminal 14 is connected to a power source (not shown).
  • the metal fitting 12 is connected to a voltage supply (not shown) by wire 15 for applying the voltage to the Wehnelt electrode 8.
  • the voltage is applied to the Wehnelt electrode 8 through said metal cylinder 7.
  • a further disadvantage of the conventional electron gun, as described with reference to FIG. 1, is that voltage from the power source is applied to the Wehnelt electrode 8 through the electric wire 15, metal fitting 12, ring 9 and the metal cylinder 7. This contributes to complexity of construction of the electron gun.
  • the position of the Wehnelt electrode 24 with-respect to the'insulating plate 23 can be adjusted by utilizing the clearance hole 23a in the insulating plate 23.
  • alignment of the tip 210 of the filament 21 and the small hole 24 in the Wehnelt electrode can be effected.
  • a Wehnelt terminal 29 has a specified voltage applied thereto and is fixed to the electron gun insulator 27.
  • Terminal 29 has a spring contact 30 attached to the lower end thereof which resiliently presses against the metal doubling plate 25. This meansthat the specified voltage is applied from the Wehnelt terminal 29 to the Wehnelt electrode 24 through said spring contact 30, metal doubling plate 25 and clamping bolt 26.
  • said means defining said second pair of apertures comprising means defining a clearance about each of said fasteners to permit adjustable movement of said main electrode with respect to said insulating plate member thereby providing for the adjustable positioning of said main electrode with respect to said filament.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US00361180A 1972-05-22 1973-05-17 Electron gun for electron irradiation equipment Expired - Lifetime US3857055A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5058772A JPS5433512B2 (de) 1972-05-22 1972-05-22

Publications (1)

Publication Number Publication Date
US3857055A true US3857055A (en) 1974-12-24

Family

ID=12863092

Family Applications (1)

Application Number Title Priority Date Filing Date
US00361180A Expired - Lifetime US3857055A (en) 1972-05-22 1973-05-17 Electron gun for electron irradiation equipment

Country Status (5)

Country Link
US (1) US3857055A (de)
JP (1) JPS5433512B2 (de)
DE (1) DE2325993C3 (de)
FR (1) FR2185854B1 (de)
GB (1) GB1363618A (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0417640A2 (de) * 1989-09-09 1991-03-20 Ptr Präzisionstechnik Gmbh Katodenhalter für einen Elektronenstrahlerzeuger
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
US20130039475A1 (en) * 2010-04-09 2013-02-14 Ge Sensing & Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
CN110556279A (zh) * 2019-08-13 2019-12-10 河南河大科技发展有限公司 一种阴极电子枪灯丝装置
CN110622276A (zh) * 2017-04-11 2019-12-27 Asml荷兰有限公司 带电粒子源模块
US20200161086A1 (en) * 2018-11-16 2020-05-21 Emcrafts Co., Ltd. Electron microscope equipped with automatic beam alignment

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528595A (en) * 1975-07-09 1977-01-22 Matsushita Electric Ind Co Ltd Electron gun for electronic beam processing machines
JPS52154150U (de) * 1976-05-19 1977-11-22
DE3169011D1 (en) * 1980-05-31 1985-03-28 Bl Tech Ltd Control systems for continuously variable ratio transmissions
GB8332237D0 (en) * 1983-12-02 1984-01-11 Leyland Vehicles Transmission system
GB8900210D0 (en) * 1989-01-06 1989-03-08 Fellows Thomas G Improvements in or relating to drivelines for wheeled vehicles
DE3930202A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Elektronenstrahlerzeuger fuer eine elektronenstrahlkanone
US10807187B2 (en) * 2015-09-24 2020-10-20 Arcam Ab X-ray calibration standard object

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2639397A (en) * 1949-06-04 1953-05-19 Collins Radio Co Vacuum gauge of the ionization producing type
US2932755A (en) * 1956-01-30 1960-04-12 Applied Radiation Corp Electron gun and cathode
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
US3368163A (en) * 1964-05-28 1968-02-06 Sylvania Electric Prod Ruggedized high frequency apparatus
US3588574A (en) * 1968-05-15 1971-06-28 Eidophor Ag Cathode-ray device with a replaceable cathode
US3601651A (en) * 1970-01-09 1971-08-24 Motorola Inc Replacement cathode assembly

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3263109A (en) * 1961-07-24 1966-07-26 Siemens Ag Electron source for corpuscular radiation apparatus operating on a pump including an indirectly heated cathode
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2639397A (en) * 1949-06-04 1953-05-19 Collins Radio Co Vacuum gauge of the ionization producing type
US2932755A (en) * 1956-01-30 1960-04-12 Applied Radiation Corp Electron gun and cathode
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
US3368163A (en) * 1964-05-28 1968-02-06 Sylvania Electric Prod Ruggedized high frequency apparatus
US3588574A (en) * 1968-05-15 1971-06-28 Eidophor Ag Cathode-ray device with a replaceable cathode
US3601651A (en) * 1970-01-09 1971-08-24 Motorola Inc Replacement cathode assembly

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0417640A2 (de) * 1989-09-09 1991-03-20 Ptr Präzisionstechnik Gmbh Katodenhalter für einen Elektronenstrahlerzeuger
EP0417640A3 (en) * 1989-09-09 1991-12-04 Ptr Praezisionstechnik Gmbh Cathode support for election beam producing device
US5376792A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Scanning electron microscope
US20130039475A1 (en) * 2010-04-09 2013-02-14 Ge Sensing & Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
US9601300B2 (en) * 2010-04-09 2017-03-21 Ge Sensing And Inspection Technologies Gmbh Cathode element for a microfocus x-ray tube
EP2556525B1 (de) * 2010-04-09 2018-08-22 GE Sensing & Inspection Technologies GmbH Mikrofokus-röntgenröhre mit kathodenelement und verfahren damit
EP3610493A4 (de) * 2017-04-11 2021-07-07 ASML Netherlands B.V. Ladungsteilchenquellenmodul
CN110622276A (zh) * 2017-04-11 2019-12-27 Asml荷兰有限公司 带电粒子源模块
CN110622276B (zh) * 2017-04-11 2022-07-08 Asml荷兰有限公司 带电粒子源模块
US11557455B2 (en) 2017-04-11 2023-01-17 Asml Netherlands B.V. Charged particle source module
TWI793114B (zh) * 2017-04-11 2023-02-21 荷蘭商Ａｓｍｌ荷蘭公司 帶電粒子源模組及具有所述帶電粒子源模組之曝光系統
US20200161086A1 (en) * 2018-11-16 2020-05-21 Emcrafts Co., Ltd. Electron microscope equipped with automatic beam alignment
CN110556279A (zh) * 2019-08-13 2019-12-10 河南河大科技发展有限公司 一种阴极电子枪灯丝装置

Also Published As

Publication number Publication date
GB1363618A (en) 1974-08-14
FR2185854B1 (de) 1977-02-18
DE2325993B2 (de) 1975-04-24
JPS4917166A (de) 1974-02-15
DE2325993C3 (de) 1981-10-15
JPS5433512B2 (de) 1979-10-20
DE2325993A1 (de) 1973-12-06
FR2185854A1 (de) 1974-01-04

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Legal Events

Date Code Title Description
AS Assignment

Owner name: KABUSHIKI KAISHA ABT, NO. 19-18, 1-CHOME, NAKACHO,

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:KABUSHIKI KAISHA AKASHI, SEISAKUSHO, A JAPANES CORP.;REEL/FRAME:005610/0757

Effective date: 19901001

AS Assignment

Owner name: KABUSHIKI KAISHA TOPCON A CORP. OF JAPAN, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:KABUSHIKI KAISHA ABT A CORP. OF JAPAN;REEL/FRAME:005760/0203

Effective date: 19910401