US3818982A - Device for cooling workpieces which are submitted to a vacuum treatment - Google Patents

Device for cooling workpieces which are submitted to a vacuum treatment Download PDF

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Publication number
US3818982A
US3818982A US00300373A US30037372A US3818982A US 3818982 A US3818982 A US 3818982A US 00300373 A US00300373 A US 00300373A US 30037372 A US30037372 A US 30037372A US 3818982 A US3818982 A US 3818982A
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US
United States
Prior art keywords
jacket
drum
workpiece
cooling
coolant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US00300373A
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English (en)
Inventor
R Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
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Balzers Patent und Beteiligungs AG
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S165/00—Heat exchange
    • Y10S165/135—Movable heat exchanger
    • Y10S165/139—Fully rotatable
    • Y10S165/156—Hollow cylindrical member, e.g. drum

Definitions

  • ABSTRACT A cylindrical jacket of rubber-like elastic material is mounted on a rotary drum forming part of the equipment of a chamber for vacuum coating, and it is hermetically sealed with each end of the drum so that the drum interior is separated from a surrounding evacuated space of a treatment chamber.
  • the workpieces to be coated are supported on the periphery of the cooling jacket which is stretched against the bottom sur- Oct. 27, 1971 Switzerland 015692/71 faces of the workpieces so as to create a heat conduction contact.
  • the jacket is cooled by coolant which is [52] U.S. Cl 165/86, 118/491, 118/69, circulated from outside the vacuum chamber through 118/301, 118/503, 165/89, 204/298 the drum shaft and around the inner jacket surfaces [51] Int. Cl. F28d 11/02 and out through an annular conduit surrounding the [58] Field of Search 165/89, 46; 1 18/301, 505, drum shaft.
  • coolant is [52] U.S. Cl 165/86, 118/491, 118/69
  • This invention relates, in general, to vacuum treating devices and in particular to a new and useful device for cooling articles which are treated under vacuum conditions and which includes a jacket of rubber-like elastic material which forms the cylindrical skin of a rotary drum located in a vacuum chamber which is cooled from within by a separate coolant circuit and is adapted to apply tightly against workpieces arranged on the drum circumference so as to efficiently abduct the heat therefrom.
  • cooling bodies may be hollow and flown through by a coolant, for example, by cooling water or pressure air.
  • a device for cooling workpieces which are submitted to a treatment in vacuum conditions, comprising a cooling jacket which is, preferably, mounted on a rotary drum forming part of the equipment of a vacuum chamber so as to hermetically separate the interior of the jacket from the evacuated space and which is cooled from within by a coolant circulating in an independent circuit operated from the outside.
  • the cooling jacket is made of a rubber-like elastic material.
  • the jacket is mounted on the rotary drum so that it forms the outer skin thereof coming into direct contact with the bottom surfaces of the workpieces which are fixed to the periphery of the drum either directly or indirectly by means of a supporting cage or holding grid shaped according to the shape and dimensions of the individual workpieces.
  • the cooling of the jacket makes use of the known practice of cooling hollow bodies by a continuous stream of a cooling agent and, in a preferred embodiment of the invention, the coolant is introduced through the hollow shaft of the rotary drum, flows around the interior walls of the jacket and passes, throughan annular passage formed around the drum shaft, to an outlet provided outside the vacuum chamber.
  • the pressure difference established by the cooling system between the interior of the jacket and the evacuated space of the vacuum chamber causes the jacket automatically and tightly to apply against the workpiece retained on the circumference of the rotary drum and, owing to the elasticity of the material, exactly to conform to almost any shape of the bottom surface of a workpiece.
  • the perfect surface contact thereby obtained results in an efficient and reliable cooling of the pieces during the whole treatment.
  • Workpieces of relatively large dimensions may be fixed, for example, to the head plates of the rotary drum.
  • the cage or grid acts as a structure limiting the maximum possible inflation of the jacket in radial direction.
  • a further object of the invention is to provide a hermetic mounting of the cooling jacket on the drum so that the interior of the jacket as well as the inlet and outlet coolant conduits are separated from the evacuated space in the vacuum chamber and a pressure difference can be created.
  • Another object of the invention is to provide an independent coolant circuit in which the coolant continuously flows around the inner surfaces of the jacket thereby cooling the jacket walls and, simultaneously, creating a pressure causing the same to apply against the workpieces.
  • the workpieces are supported on the drum by a preferably cylindrical cage or grid which, at the same time, forms a limiting means for the inflation of the cooling jacket.
  • the wall or wall portions of the cooling jacket' may already in manufacture be conformed to the surfaces of the workpieces to be contacted.
  • F IG; 1 is a schematicelevationalview, partly in section, of an apparatus for vacuum coating by evaporation constructed in accordance with the invention.
  • FIG. 2 is a partial sectional view of the elastic jacket shown in FIG. 1 with optical lense workpieces to be 7 coated.
  • the inventive jacket 10 forming the cylindricalouter skin of the, V drurn'S is madeof a material of rubbenlike elasticity.
  • the workpieceto becoated by evaporation could be a metal sheet. 11 of cylindrical V 7 shape which is arranged on the peripheral surface of j the rotary drum 5 so as to be supported by the head plates13 and 16. Owing to the pressure difference crerated by the cooling system between the interior and the exterior of the cooling jacket 10, the rubber-like elastic wall ofjacket 10 is tightly applied against. the inner surface of the sheet to be coated and, consequently, cools the same very efficiently. Another advantage, due to the elasticity of the jacket, is that when the vacuum:
  • the jacket 10 may very rapidly and easily be removed from: the drum, or slipped over again.
  • an absolute conformity device embodied therein comprises an apparatus for vacuumcoating'comprising a tank or vessel 1 defining a vacuum chamber which can be evacuated by means of a pump 2 through a pipe 3 so as to produce the very low pressure necessary for the'intended coating process.
  • a coating by evaporation is provided, and to this purpose, thechamber l is equipped with a structure 4 which for example comprises a'support serving to support substances tobe evaporated or a cathode ofa cathode sputtering device.
  • the workpiece may be a simple cylindricalsheet as:
  • the metal sheet 11 shown in FIG. 1 may not be a workpiece but a support for' I other' workpieces if desired.
  • a support for instance, could be provided with recesses or hollowed spaces in which optical'lenses to be coated by evaporation could be placed.
  • the rubber-like elastic jacket 10 istightly applied both against the lenses 12 and the intermediate surfaces of the support
  • a rotary drum 5 adapted to hold the workpieces to be 1 coated is disposed, in front of the structure 4.
  • the drum 5 is unilaterally supported by and rotatably mounted in a bearing 6 which is fixed to the wall of the vessel 1.
  • the drum 5 comprises two end parts or heads 5a and 5b,-e'ach assembled of two circular plates l3, l4 and I5, 16 respectively, which are held together, for example, by bolts 20.
  • a central shaft 8 supports the heads 5a and SI) for rotary motion therewith.
  • a cylindricalela stic 7 support or cooling jacket 10 has its respective ends en'- gaged between and clamped by the two circular plates 13, I4 and. l5, 16 forming the drum heads 5a and 5b.
  • the shaft portion 8 or, as in the represented embodias shown in FIG. 2.v obviously, many other shapes of V supporting devices for workpieces may be employed.
  • the support for the workpieces comprises a cage, or grid II embracing. the drum and Iimitingthe maximum possible expansion or inflation of the cooling jacket in a radial direction.
  • the rubberlike elastic jacket 10 for workpieces with a particular uniform surface, it isadvantageous to manufacture the rubberlike elastic jacket 10 in a conformable particular.
  • the jacket 10 could, for example, have concave depressions corresponding to the convex lens surfaces.
  • the coaxial motor shaft'portion 9 of smaller diameter is mounted in the bearing 6, and driven by a motor 7.
  • the bearing 6 is fixed to the wall 1 ofthe vacuum chamber and includes a hermetic sealing for the shaft 9 passing therethrough.
  • Inlet and outlet conduits 21 and 22 are provided for circulating a cooling medium to the interior ofjacket 10.
  • respective portions of the motor shaft 9 and of shaft 8 are hollow to define axial flow conduit '23 and cross bores 24 areprovided at the ends of the. hollow por-, tions to provide for flow into the hollow drum 5.
  • annular passages 25 and 26 in the circular plates 15, I6 and bores 27, 28 in a supporting disk 29 connecting the shaft 8 with the plate 16 as well as a tubular conduit 17 flanged to this platetl6 are provided as pasi
  • the cooling jacket is sufficiently flexible to conform to. the surface of any workpiece in a satisfactory manner.
  • the structure 4 may comprise a cathode of a cathode sputtering device, or it could simply be a heata ing device for a heat treatment of a workpiece surface requiring a simultaneous cooling as protection against sages for the return flow of thecoolant.
  • a cathode of a cathode sputtering device or it could simply be a heata ing device for a heat treatment of a workpiece surface requiring a simultaneous cooling as protection against sages for the return flow of thecoolant.
  • I l A device for cooling a workpiece which is submitted to a treatment, particularly to'a vacuum coating,
  • cooling jacket comprises a hollow cylinder having an inner surface exposed to said coolant and having at least a portion comprising a rubber-like elastic material.
  • a vacuum treatment apparatus for use in a vessel having an evacuated chamber, comprising a rotary drum adapted to be positioned within the evacuated chamber having an end wall at each end and a cylindrical elastic jacket with a portion at each end engaged with and sealed to respective ones of said end walls, said drum having a shaft with means for rotatably mounting said shaft on the vessel wall and for circulating a coolant into the interior of said drum for cooling of the interior of said jacket and subsequently withdrawing the coolant from said drum, and holding means for holding a workpiece over the exterior surface of said jacket, said jacket being expandible by the circulation of said coolant into heat absorbing contact with the workpiece, said holding means comprising a cage disposed around said jacket having portions engageable with the periphery of a workpiece and exposing the exterior surface of the workpiece for treatment and limiting the expansion of said jacket.
  • drum end walls include inner and outer plates clamped together over the respective ends of said jackets.
  • a vacuum treatment apparatus including a vessel defining the evacuation chamber and a treatment structure located with said vessel alongside said jacket in a position to expose the exterior of the workpiece to treatment from said structure.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
US00300373A 1971-10-27 1972-10-24 Device for cooling workpieces which are submitted to a vacuum treatment Expired - Lifetime US3818982A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1569271A CH544274A (de) 1971-10-27 1971-10-27 Einrichtung zum Kühlen von Werkstücken, die einer Behandlung im Vakuum unterworfen werden

Publications (1)

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US3818982A true US3818982A (en) 1974-06-25

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US00300373A Expired - Lifetime US3818982A (en) 1971-10-27 1972-10-24 Device for cooling workpieces which are submitted to a vacuum treatment

Country Status (6)

Country Link
US (1) US3818982A (enExample)
CH (1) CH544274A (enExample)
DE (2) DE7235271U (enExample)
FR (1) FR2157895B3 (enExample)
GB (1) GB1364960A (enExample)
NL (1) NL143626B (enExample)

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3885520A (en) * 1974-03-08 1975-05-27 John F Krumme Vapor deposition apparatus with rotatable ring mask
US3892651A (en) * 1974-05-28 1975-07-01 Corning Glass Works Method and apparatus for coating a plurality of cylindrical articles
US4014779A (en) * 1974-11-01 1977-03-29 Coulter Information Systems, Inc. Sputtering apparatus
US4026787A (en) * 1974-01-25 1977-05-31 Coulter Information Systems, Inc. Thin film deposition apparatus using segmented target means
US4080281A (en) * 1976-04-09 1978-03-21 Tsunehiko Endo Apparatus for making metal films
US4151064A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Apparatus for sputtering cylinders
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
US4478247A (en) * 1981-01-26 1984-10-23 Franz Alber Fluid coupling for hollow rotary member
US4514636A (en) * 1979-09-14 1985-04-30 Eaton Corporation Ion treatment apparatus
US4534312A (en) * 1982-08-30 1985-08-13 Ricoh Company, Ltd. Vacuum evaporation apparatus
US4576622A (en) * 1983-11-28 1986-03-18 Lothar Jung Manufacture of preforms for energy transmitting fibers
US4680061A (en) * 1979-12-21 1987-07-14 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
WO1987007153A1 (en) * 1986-05-29 1987-12-03 Interface Biomedical Laboratories Corporation Composite hemostatic article including a hemostatic agent onlay and methods for preparing the same
US4724300A (en) * 1984-07-16 1988-02-09 United Kingdom Atomic Energy Authority Temperature control in vacuum
US4743570A (en) * 1979-12-21 1988-05-10 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
US4747368A (en) * 1985-05-17 1988-05-31 Mitel Corp. Chemical vapor deposition apparatus with manifold enveloped by cooling means
US4832781A (en) * 1988-01-07 1989-05-23 Varian Associates, Inc. Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment
US4938992A (en) * 1988-01-07 1990-07-03 Varian Associates, Inc. Methods for thermal transfer with a semiconductor
US4949783A (en) * 1988-05-18 1990-08-21 Veeco Instruments, Inc. Substrate transport and cooling apparatus and method for same
US4997606A (en) * 1988-01-07 1991-03-05 Varian Associates, Inc. Methods and apparatus for fabricating a high purity thermally-conductive polymer layer
US5182093A (en) * 1990-01-08 1993-01-26 Celestech, Inc. Diamond deposition cell
US6193801B1 (en) * 1997-04-18 2001-02-27 Semi-Alloys Company Apparatus for coating lenticular articles
US6241005B1 (en) 1999-03-30 2001-06-05 Veeco Instruments, Inc. Thermal interface member
US20050252227A1 (en) * 2004-05-14 2005-11-17 Intevac, Inc. Capacitance sensing for substrate cooling
US20120132138A1 (en) * 2010-11-30 2012-05-31 United Technologies Corporation Dimensionally stable durable thermal spray masking system
WO2019241351A1 (en) * 2018-06-12 2019-12-19 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films
US11242599B2 (en) 2018-07-19 2022-02-08 Applied Materials, Inc. Particle coating methods and apparatus
US11299806B2 (en) 2019-04-24 2022-04-12 Applied Materials, Inc. Gas injection for de-agglomeration in particle coating reactor
US11717800B2 (en) 2019-04-24 2023-08-08 Applied Materials, Inc. Reactor for coating particles in stationary chamber with rotating paddles
US20240401185A1 (en) * 2023-06-05 2024-12-05 Li-Metal Corp. Coating drum and system for vapor deposition
US12220678B2 (en) 2020-07-30 2025-02-11 Applied Materials, Inc. Paddle configuration for a particle coating reactor
US12539526B2 (en) 2021-10-22 2026-02-03 Applied Materials, Inc. Isolation for reactor for deposition of films onto particles

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0043248B1 (en) * 1980-07-01 1984-05-30 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Process for the bulk production of alloys and apparatus therefor
DE202014009343U1 (de) 2014-11-22 2014-12-15 Sav Automation Gmbh Einrichtung zum Kühlen partiell erhitzter Werkstücke nach Schweiß- oder Härtebearbeitungen

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185131A (en) * 1960-10-24 1965-05-25 Gen Motors Corp Apparatus for coating articles in a fluidized bed
US3344772A (en) * 1963-04-01 1967-10-03 Possis Machine Corp Spray coater
US3355309A (en) * 1963-07-15 1967-11-28 Gen Electric Method and apparatus for applying coatings onto articles of manufacture
US3383238A (en) * 1965-05-27 1968-05-14 Unzicker Arlyn Eugene Method and apparatus of controlling thin film deposition in a vacuum
US3498260A (en) * 1963-07-15 1970-03-03 Gen Electric Machine for applying coatings onto articles of manufacture
US3638606A (en) * 1969-11-21 1972-02-01 Gen Electric Apparatus for controlling the coating of selected surfaces of an article of manufacture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185131A (en) * 1960-10-24 1965-05-25 Gen Motors Corp Apparatus for coating articles in a fluidized bed
US3344772A (en) * 1963-04-01 1967-10-03 Possis Machine Corp Spray coater
US3355309A (en) * 1963-07-15 1967-11-28 Gen Electric Method and apparatus for applying coatings onto articles of manufacture
US3498260A (en) * 1963-07-15 1970-03-03 Gen Electric Machine for applying coatings onto articles of manufacture
US3383238A (en) * 1965-05-27 1968-05-14 Unzicker Arlyn Eugene Method and apparatus of controlling thin film deposition in a vacuum
US3638606A (en) * 1969-11-21 1972-02-01 Gen Electric Apparatus for controlling the coating of selected surfaces of an article of manufacture

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026787A (en) * 1974-01-25 1977-05-31 Coulter Information Systems, Inc. Thin film deposition apparatus using segmented target means
US3885520A (en) * 1974-03-08 1975-05-27 John F Krumme Vapor deposition apparatus with rotatable ring mask
US3892651A (en) * 1974-05-28 1975-07-01 Corning Glass Works Method and apparatus for coating a plurality of cylindrical articles
US4014779A (en) * 1974-11-01 1977-03-29 Coulter Information Systems, Inc. Sputtering apparatus
US4080281A (en) * 1976-04-09 1978-03-21 Tsunehiko Endo Apparatus for making metal films
US4151064A (en) * 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Apparatus for sputtering cylinders
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
US4514636A (en) * 1979-09-14 1985-04-30 Eaton Corporation Ion treatment apparatus
US4743570A (en) * 1979-12-21 1988-05-10 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
US4680061A (en) * 1979-12-21 1987-07-14 Varian Associates, Inc. Method of thermal treatment of a wafer in an evacuated environment
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment
US4478247A (en) * 1981-01-26 1984-10-23 Franz Alber Fluid coupling for hollow rotary member
US4534312A (en) * 1982-08-30 1985-08-13 Ricoh Company, Ltd. Vacuum evaporation apparatus
US4576622A (en) * 1983-11-28 1986-03-18 Lothar Jung Manufacture of preforms for energy transmitting fibers
US4724300A (en) * 1984-07-16 1988-02-09 United Kingdom Atomic Energy Authority Temperature control in vacuum
US4747368A (en) * 1985-05-17 1988-05-31 Mitel Corp. Chemical vapor deposition apparatus with manifold enveloped by cooling means
WO1987007153A1 (en) * 1986-05-29 1987-12-03 Interface Biomedical Laboratories Corporation Composite hemostatic article including a hemostatic agent onlay and methods for preparing the same
US4832781A (en) * 1988-01-07 1989-05-23 Varian Associates, Inc. Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum
US4938992A (en) * 1988-01-07 1990-07-03 Varian Associates, Inc. Methods for thermal transfer with a semiconductor
US4997606A (en) * 1988-01-07 1991-03-05 Varian Associates, Inc. Methods and apparatus for fabricating a high purity thermally-conductive polymer layer
US4949783A (en) * 1988-05-18 1990-08-21 Veeco Instruments, Inc. Substrate transport and cooling apparatus and method for same
US5182093A (en) * 1990-01-08 1993-01-26 Celestech, Inc. Diamond deposition cell
US6193801B1 (en) * 1997-04-18 2001-02-27 Semi-Alloys Company Apparatus for coating lenticular articles
US6241005B1 (en) 1999-03-30 2001-06-05 Veeco Instruments, Inc. Thermal interface member
US20050252227A1 (en) * 2004-05-14 2005-11-17 Intevac, Inc. Capacitance sensing for substrate cooling
US7000418B2 (en) 2004-05-14 2006-02-21 Intevac, Inc. Capacitance sensing for substrate cooling
US20120132138A1 (en) * 2010-11-30 2012-05-31 United Technologies Corporation Dimensionally stable durable thermal spray masking system
US8468969B2 (en) * 2010-11-30 2013-06-25 United Technologies Corporation Dimensionally stable durable thermal spray masking system
WO2019241351A1 (en) * 2018-06-12 2019-12-19 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films
US11174552B2 (en) 2018-06-12 2021-11-16 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films
US11180851B2 (en) 2018-06-12 2021-11-23 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films
US12421601B2 (en) 2018-06-12 2025-09-23 Applied Materials, Inc. Rotary reactor for uniform particle coating with thin films
US12146217B2 (en) 2018-07-19 2024-11-19 Applied Materials, Inc. Particle coating methods and apparatus
US11242599B2 (en) 2018-07-19 2022-02-08 Applied Materials, Inc. Particle coating methods and apparatus
US11674223B2 (en) 2019-04-24 2023-06-13 Applied Materials, Inc. Reactor for coating particles in stationary chamber with rotating paddles and gas injection
US11717800B2 (en) 2019-04-24 2023-08-08 Applied Materials, Inc. Reactor for coating particles in stationary chamber with rotating paddles
US12071685B2 (en) 2019-04-24 2024-08-27 Applied Materials, Inc. Gas injection for de-agglomeration in particle coating reactor
US12077856B2 (en) 2019-04-24 2024-09-03 Applied Materials, Inc. Reactor for coating particles in stationary chamber with rotating paddles and gas injection
US12134091B2 (en) 2019-04-24 2024-11-05 Applied Materials, Inc. Reactor for coating particles in stationary chamber with rotating paddles
US11692265B2 (en) 2019-04-24 2023-07-04 Applied Materials, Inc. Gas injection for de-agglomeration in particle coating reactor
US11299806B2 (en) 2019-04-24 2022-04-12 Applied Materials, Inc. Gas injection for de-agglomeration in particle coating reactor
US12220678B2 (en) 2020-07-30 2025-02-11 Applied Materials, Inc. Paddle configuration for a particle coating reactor
US12539526B2 (en) 2021-10-22 2026-02-03 Applied Materials, Inc. Isolation for reactor for deposition of films onto particles
US20240401185A1 (en) * 2023-06-05 2024-12-05 Li-Metal Corp. Coating drum and system for vapor deposition

Also Published As

Publication number Publication date
FR2157895A1 (enExample) 1973-06-08
NL7117137A (enExample) 1973-05-02
NL143626B (nl) 1974-10-15
DE2247014C3 (de) 1975-05-22
GB1364960A (en) 1974-08-29
CH544274A (de) 1973-11-15
DE2247014A1 (de) 1973-05-03
FR2157895B3 (enExample) 1975-11-28
DE2247014B2 (de) 1974-10-10
DE7235271U (de) 1975-09-04

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