US3813549A - Self-healing electrode for uniform negative corona - Google Patents
Self-healing electrode for uniform negative corona Download PDFInfo
- Publication number
- US3813549A US3813549A US00317973A US31797372A US3813549A US 3813549 A US3813549 A US 3813549A US 00317973 A US00317973 A US 00317973A US 31797372 A US31797372 A US 31797372A US 3813549 A US3813549 A US 3813549A
- Authority
- US
- United States
- Prior art keywords
- valve metal
- tantalum
- coating
- wire
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011248 coating agent Substances 0.000 claims abstract description 48
- 238000000576 coating method Methods 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims abstract description 26
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 8
- 235000012239 silicon dioxide Nutrition 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 7
- 229910052787 antimony Inorganic materials 0.000 claims description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 7
- 229910052797 bismuth Inorganic materials 0.000 claims description 7
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims description 7
- 229910052735 hafnium Inorganic materials 0.000 claims description 7
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 239000010955 niobium Substances 0.000 claims description 7
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 7
- 229920000642 polymer Polymers 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 229910052726 zirconium Inorganic materials 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 4
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 4
- 229910052681 coesite Inorganic materials 0.000 claims 1
- 229910052906 cristobalite Inorganic materials 0.000 claims 1
- 229910052682 stishovite Inorganic materials 0.000 claims 1
- 229910052905 tridymite Inorganic materials 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 3
- 239000010935 stainless steel Substances 0.000 abstract description 3
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 4
- 239000010410 layer Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000002048 anodisation reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- -1 i.e. Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 235000008113 selfheal Nutrition 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/02—Apparatus for electrographic processes using a charge pattern for laying down a uniform charge, e.g. for sensitising; Corona discharge devices
- G03G15/0291—Apparatus for electrographic processes using a charge pattern for laying down a uniform charge, e.g. for sensitising; Corona discharge devices corona discharge devices, e.g. wires, pointed electrodes, means for cleaning the corona discharge device
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
Definitions
- the present invention relates to electrodes used for charging electrophotographic image surfaces in copying machines. More particularly, the disclosure is directed to the negative corona discharge electrodes which produce a negative charge that is applied to the photoconductive surface exposed to the corona discharge.
- the electrode structure includes a combination of a wire of valve metal with a high resistivity coating spread uniformly over the surface of the wire.
- the valve metal, one example being tantalum, may serve as-the electrode wire itself or may surround an inner wire such as stainless steel.
- the plasma glow produced will spread uniformly along the length of the wire.
- a valve metal which forms a hard oxide under the high resistivity coating, the electrode is selfhealing in that if cracks or imperfections occur in the coating, the exposed valve metal will oxidize and fill in the cracks and imperfections.
- the present invention relates to the field of electrographic imaging and more particularly to an improved electrode for generating a negative corona discharge for electrographic imaging.
- Electrographic image copier systems employ negative discharge corona electrodes to produce a negative charge on a photoconductive surface.
- the electrode is normally a conductive wire which inherently produces a non-uniform corona discharge along its length resulting in streaks and other imperfections in the resultant visible copy.
- An object of the present invention is to provide an electrode for producing a uniform homogeneous negative corona discharge.
- Another object of the present invention is to provide a negative corona-discharge which is self-healing in the event that cracks and imperfections occur.
- Still another object of the present invention is to provide a negative corona discharge electrode which includes a valve metalhaving a uniform high resistivity coating.
- FIG. I is a schematic drawing illustrating the field distribution along the length of a typical prior art corona electrode wire which is suspended above a ground employed in an electrophotographic copying machine.
- negative corona discharge is used in many types of electrographic image copying machines.
- the negative corona discharge is used to apply a negative charge pattern on a photoconductive surface to form an electrostatic latent image.
- the latent electrostatic image is used in combination with the deposition of electroscopic material to form a visible image.
- a problem with this technology is that the corona around the discharge electrode is often inhomogeneous along the length of the electrode wire due to nonuniformity of the wire. This in turn results in an inhomogeneous corona and non-uniform charging of the photoconductive surface and produces streaks and im perfections in the final visible copy.
- the non-uniformity of the corona discharge results from distortions of the electric field around the electrode wire caused by charge clouds.
- the discharge is initiated by the field-induced injection of electrons from the wire into space.
- FIG. 1 a schematic drawing is shown illustrating the field distribution along the length of a typical prior art corona electrode wire 10 which is suspended above a ground plane 12.
- the electrons, positive ions and negative ions are represented as indicated in the drawing.
- the negative ions formed by the discharge drift slowly from wire l0'to the collecting electrode (ground plane 12) as represented in FIG. 1.
- a negative ion cloud 14 forms an electrostatic shield covering alength of the wire 10.
- Corona glow does not appear over most of the shielded region because of a reduced surface field at the wire.
- the equipotential lines are distorted as shown in F IG. 1, a plasma glow is found at the point of electron injection into the corona.
- the field free region of the plasma glow therefore, acts to enhance the field at the point of electron injection and to continue the injection at that point.
- this regenerative process produces corona discharge at several small points along the wire with dark spaces between them as indicated by the designations high field and low field.
- the points of corona migrate along the wire until they stabilize at regions where conditions, on the wire surface facilitate discharge.
- anelectrode wire with a uniform resistive coating
- the resistive coating acts as a limiting resistor which decreases the surface field at'the points of high current injection. If the coating has a sufficiently high resistivity, any point of high injection current will be less favorable to corona discharge than the surrounding dark regions. Therefore, the corona glow 16 will spread to cover the entire wire uniformly. This mechanism is illustrated in FIG. 2.
- FIG. 2 there is schematically shown a field distribution along the length of a corona wire 18 which is uniformly coated with a material 20 of high electrical resistance. An electrical field across coating material 20 at the point of injection lowers the surface field at that point.
- FIG. 2 what is shown in FIG. 2 is a set of equipotential surfaces around a point of high current injection.
- Potential drop across the resistive coating 20 at the corona point (the corona glow is indicated by reference numeral 22) lowers the surface field at that point of the electrode wire.
- the coating 20 must be uniform and free of cracks and imperfections to function properly. In the present invention, if any cracks or imperfections occur, self-healing of the crackedareas is produced by a plasma enhanced oxidation of the chemically active valve metal which is found under the resistive coating 20. .
- the metallic wire underlayer 18 will plasma oxidize when exposed to the corona discharge to form a resistive patch in the coating layer.
- the resistive surface coating should have a high resistivity, for example, greater than ohms per centimeter. Also, the resistive surface should be initially amorphous and crack resistant. The resistive coating 20 should also be a material that will not sputter easily, so that the coating will not be eroded during operation.
- the electrode wire 18 should be an active valve metal such that a self-healing oxide will form in any cracks, imperfections or damaged areas which may occur in resistive coating 20 in order to restore uniformity.
- the corona electrode may be as shown in FIG. 2 wherein the electrode wire 18 is a valve metal selected from the representative group including tantalum, niobium, zirconium, hafnium, bismuth, tungsten and antimony, and any other hard, active valve metals which plasma oxidize to produce a resistive oxide for self-healing purposes.
- the electrode wire 18 is a valve metal selected from the representative group including tantalum, niobium, zirconium, hafnium, bismuth, tungsten and antimony, and any other hard, active valve metals which plasma oxidize to produce a resistive oxide for self-healing purposes.
- the aforesaid valve metals may be used separately or in combination.
- the corona electrode is formed by selecting the valve metal, i.e., tantalum, for wire element 18 which may have a diameter in the order of 0.005 inches.
- the tantalum wire 18 is then anodized to form an oxide (Ta O of thickness in the order of 1,000 Angstroms using an anodize-etch repeat technique wherein the tantalum is placed under tension-in a suitable electrolyte with a potential applied between the wire and a cathode to produce the oxide.
- the resultant oxide is removed by etching and then the anodizing-etching steps are repeated until an oxide surface is formed on the tantalum wire having desired uniformity.
- the final anodization of the tantalum wire is achieved by connecting the two electrodes of the electrolytic cell (the wire and the cathode) through a constant current source to achieve the desired final thickness of the high resistive oxide coating 20.
- the electrode wire 18 may also consist of an inner core of stainless steel, hardened steel, or tungsten surrounded by one of the aforesaid valve metals such as tantalum, to provide a three-layer structure.
- the corona electrode structure may be composed such that the uniform high resistivity coating 20 is formed of amorphous, semiinsulating layers of insulating polymers, silicon nitride (Si N or silicon dioxide (SiO deposited on a wire with a valve metal surface, such as tantalum.
- FIG. 3 a plan view is shown illustrating a structure wherein a plurality of corona discharge electrodes as illustrated in FIG. 2 are arrayed in parallel to form an apparatus which may be used in an electrostatic copying machine.
- An electrode means adapted for producing a corona discharge comprising an inner core wire of valve metal surrounded by an outer uniform coating of the oxide of said valve metal wherein said valve metal is selected from the group consisting of tantalum, niobium, zirconium, hafnium, bismuth, and antimony.
- valve metal is tantalum and said high resistivity material of said outer coating comprises anodized tantalum oxide.
- valve metal surrounds a high tensile strength core wire.
- An electrode means adapted for producing a corona discharge comprising an inner core wire of valve metal surrounded by an outer uniform coating of high resistivity material, said-outer coating being selected from the group consisting of an oxide of said valve metal, silicon nitride, silicon dioxide and an insulating polymer, wherein said valve metal is selected from the group consisting of tantalum, niobium, zirconium, hafnium, bismuth, and antimony.
- said inner core metal is tantalum and said uniform coating of high resistivity material is an amorphous semiinsulating coating selected from the group consisting of silicon nitride Si N silicon dioxide SiO and insulating polymers.
- An electrode means adapted for producing a corona discharge comprising an inner core wire of tantalum surrounded by an outer uniform coating of the oxide of tantalum wherein said tantalum of said outer coating comprises an anodized tantalum oxide film about 1,000 Angstroms thick.
- An electrode means adapted for producing a corona discharge comprising an inner core wire of valve metal surrounded by an outer uniform coating of high resistivity material, said outer coating being selected from the group consisting of a silicon nitride, silicon dioxide and an insulating polymer, wherein said valve metal is selected from the group consisting of tantalum,
- niobium zirconium, hafnium, bismuth, and antimony.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Electrostatic Charge, Transfer And Separation In Electrography (AREA)
- Elimination Of Static Electricity (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00317973A US3813549A (en) | 1972-12-26 | 1972-12-26 | Self-healing electrode for uniform negative corona |
GB5149373A GB1438995A (en) | 1972-12-26 | 1973-11-06 | Corona discharge electrode |
CA185,521A CA1087241A (en) | 1972-12-26 | 1973-11-09 | Self-healing electrode for uniform negative corona |
FR7341680A FR2211775B1 (enrdf_load_stackoverflow) | 1972-12-26 | 1973-11-14 | |
JP13491473A JPS5326970B2 (enrdf_load_stackoverflow) | 1972-12-26 | 1973-12-04 | |
DE2363088A DE2363088B2 (de) | 1972-12-26 | 1973-12-19 | Koronaentladungselektrode zur Erzeugung einer negativen Koronaentladung |
IT44837/73A IT1001174B (it) | 1972-12-26 | 1973-12-20 | Elettrodo perfezionato per carica re superfici di immagini elettro fotografiche in macchine per copia re |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00317973A US3813549A (en) | 1972-12-26 | 1972-12-26 | Self-healing electrode for uniform negative corona |
Publications (1)
Publication Number | Publication Date |
---|---|
US3813549A true US3813549A (en) | 1974-05-28 |
Family
ID=23236075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00317973A Expired - Lifetime US3813549A (en) | 1972-12-26 | 1972-12-26 | Self-healing electrode for uniform negative corona |
Country Status (7)
Country | Link |
---|---|
US (1) | US3813549A (enrdf_load_stackoverflow) |
JP (1) | JPS5326970B2 (enrdf_load_stackoverflow) |
CA (1) | CA1087241A (enrdf_load_stackoverflow) |
DE (1) | DE2363088B2 (enrdf_load_stackoverflow) |
FR (1) | FR2211775B1 (enrdf_load_stackoverflow) |
GB (1) | GB1438995A (enrdf_load_stackoverflow) |
IT (1) | IT1001174B (enrdf_load_stackoverflow) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4542977A (en) * | 1982-09-20 | 1985-09-24 | Konishiroku Photo Industry Co., Ltd. | Method and apparatus for separating recording paper from image retaining member |
US4585321A (en) * | 1984-10-30 | 1986-04-29 | Kabushiki Kaisha Toshiba | Corona discharging apparatus |
US4587527A (en) * | 1985-05-15 | 1986-05-06 | Eastman Kodak Company | Charging electrodes bearing a doped semiconductor coating |
US4910637A (en) * | 1978-10-23 | 1990-03-20 | Rinoud Hanna | Modifying the discharge breakdown |
US5087856A (en) * | 1989-06-19 | 1992-02-11 | Ricoh Company, Ltd. | Discharge electrode having a thin wire core and surface coating of amorphous alloy for a discharger |
US20100312294A1 (en) * | 2008-04-30 | 2010-12-09 | Medtronic, Inc. | Medical device with self-healing material |
US20140216343A1 (en) | 2008-08-04 | 2014-08-07 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
WO2016089427A1 (en) * | 2014-12-05 | 2016-06-09 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
US10586685B2 (en) | 2014-12-05 | 2020-03-10 | Agc Glass Europe | Hollow cathode plasma source |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1554266A (en) * | 1975-07-14 | 1979-10-17 | Xerox Corp | Corona charging device |
US4057723A (en) * | 1976-01-23 | 1977-11-08 | Xerox Corporation | Compact corona charging device |
US4227234A (en) | 1978-07-03 | 1980-10-07 | Xerox Corporation | Corona charging element |
DE2855864A1 (de) * | 1978-12-22 | 1980-07-10 | Ibm Deutschland | Ionenquelle, insbesondere fuer ionenimplantationsanlagen |
JPH02291574A (ja) * | 1989-04-28 | 1990-12-03 | Ricoh Co Ltd | 放電電極用細線 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3075078A (en) * | 1960-05-13 | 1963-01-22 | Rca Corp | Corona device |
US3133193A (en) * | 1962-01-22 | 1964-05-12 | Du Pont | Corona discharge apparatus for the surface treatment of plastic resins |
US3281347A (en) * | 1962-07-13 | 1966-10-25 | Int Paper Co | Method and apparatus for treating plastic coated paper |
US3566108A (en) * | 1967-01-27 | 1971-02-23 | Xerox Corp | Corona generating electrode structure for use in a xerographic charging method |
US3612864A (en) * | 1968-01-13 | 1971-10-12 | Yasuo Tamai | Imaging system utilizing an electrode treated with a mixture of a hygroscopic material and a hydrophilic binder |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE793227A (fr) * | 1971-12-23 | 1973-06-22 | Xerox Corp | Generateur d'effet corona et procede de production de celui-ci |
-
1972
- 1972-12-26 US US00317973A patent/US3813549A/en not_active Expired - Lifetime
-
1973
- 1973-11-06 GB GB5149373A patent/GB1438995A/en not_active Expired
- 1973-11-09 CA CA185,521A patent/CA1087241A/en not_active Expired
- 1973-11-14 FR FR7341680A patent/FR2211775B1/fr not_active Expired
- 1973-12-04 JP JP13491473A patent/JPS5326970B2/ja not_active Expired
- 1973-12-19 DE DE2363088A patent/DE2363088B2/de active Granted
- 1973-12-20 IT IT44837/73A patent/IT1001174B/it active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3075078A (en) * | 1960-05-13 | 1963-01-22 | Rca Corp | Corona device |
US3133193A (en) * | 1962-01-22 | 1964-05-12 | Du Pont | Corona discharge apparatus for the surface treatment of plastic resins |
US3281347A (en) * | 1962-07-13 | 1966-10-25 | Int Paper Co | Method and apparatus for treating plastic coated paper |
US3566108A (en) * | 1967-01-27 | 1971-02-23 | Xerox Corp | Corona generating electrode structure for use in a xerographic charging method |
US3612864A (en) * | 1968-01-13 | 1971-10-12 | Yasuo Tamai | Imaging system utilizing an electrode treated with a mixture of a hygroscopic material and a hydrophilic binder |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4910637A (en) * | 1978-10-23 | 1990-03-20 | Rinoud Hanna | Modifying the discharge breakdown |
US4542977A (en) * | 1982-09-20 | 1985-09-24 | Konishiroku Photo Industry Co., Ltd. | Method and apparatus for separating recording paper from image retaining member |
US4585321A (en) * | 1984-10-30 | 1986-04-29 | Kabushiki Kaisha Toshiba | Corona discharging apparatus |
US4587527A (en) * | 1985-05-15 | 1986-05-06 | Eastman Kodak Company | Charging electrodes bearing a doped semiconductor coating |
US5087856A (en) * | 1989-06-19 | 1992-02-11 | Ricoh Company, Ltd. | Discharge electrode having a thin wire core and surface coating of amorphous alloy for a discharger |
US20100312294A1 (en) * | 2008-04-30 | 2010-12-09 | Medtronic, Inc. | Medical device with self-healing material |
US8442651B2 (en) | 2008-04-30 | 2013-05-14 | Medtronic, Inc. | Medical device with self-healing material |
US9478401B2 (en) | 2008-08-04 | 2016-10-25 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
US20150004330A1 (en) | 2008-08-04 | 2015-01-01 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
US20150002021A1 (en) | 2008-08-04 | 2015-01-01 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
US20140216343A1 (en) | 2008-08-04 | 2014-08-07 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
US10580624B2 (en) | 2008-08-04 | 2020-03-03 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
US10438778B2 (en) | 2008-08-04 | 2019-10-08 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
US10580625B2 (en) | 2008-08-04 | 2020-03-03 | Agc Flat Glass North America, Inc. | Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition |
WO2016089427A1 (en) * | 2014-12-05 | 2016-06-09 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
US11875976B2 (en) | 2014-12-05 | 2024-01-16 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
US10755901B2 (en) | 2014-12-05 | 2020-08-25 | Agc Flat Glass North America, Inc. | Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces |
US10586685B2 (en) | 2014-12-05 | 2020-03-10 | Agc Glass Europe | Hollow cathode plasma source |
US9721764B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Method of producing plasma by multiple-phase alternating or pulsed electrical current |
US10559452B2 (en) | 2015-11-16 | 2020-02-11 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
US20170309458A1 (en) | 2015-11-16 | 2017-10-26 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
US9721765B2 (en) | 2015-11-16 | 2017-08-01 | Agc Flat Glass North America, Inc. | Plasma device driven by multiple-phase alternating or pulsed electrical current |
US10573499B2 (en) | 2015-12-18 | 2020-02-25 | Agc Flat Glass North America, Inc. | Method of extracting and accelerating ions |
US10242846B2 (en) | 2015-12-18 | 2019-03-26 | Agc Flat Glass North America, Inc. | Hollow cathode ion source |
Also Published As
Publication number | Publication date |
---|---|
DE2363088B2 (de) | 1975-11-27 |
JPS5326970B2 (enrdf_load_stackoverflow) | 1978-08-05 |
DE2363088A1 (de) | 1974-07-11 |
JPS4991652A (enrdf_load_stackoverflow) | 1974-09-02 |
CA1087241A (en) | 1980-10-07 |
FR2211775A1 (enrdf_load_stackoverflow) | 1974-07-19 |
FR2211775B1 (enrdf_load_stackoverflow) | 1976-11-19 |
IT1001174B (it) | 1976-04-20 |
GB1438995A (en) | 1976-06-09 |
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