US3793571A - Camera tube comprising insulated diodes and a resistance layer - Google Patents
Camera tube comprising insulated diodes and a resistance layer Download PDFInfo
- Publication number
- US3793571A US3793571A US00245782A US3793571DA US3793571A US 3793571 A US3793571 A US 3793571A US 00245782 A US00245782 A US 00245782A US 3793571D A US3793571D A US 3793571DA US 3793571 A US3793571 A US 3793571A
- Authority
- US
- United States
- Prior art keywords
- layer
- domains
- target plate
- resistance layer
- camera tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 abstract description 18
- 239000000758 substrate Substances 0.000 abstract description 15
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 230000008021 deposition Effects 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005562 fading Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
- H01J29/45—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen
- H01J29/451—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions
- H01J29/453—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions provided with diode arrays
- H01J29/455—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions provided with diode arrays formed on a silicon substrate
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B7/00—Special methods or apparatus for drilling
- E21B7/02—Drilling rigs characterised by means for land transport with their own drive, e.g. skid mounting or wheel mounting
- E21B7/024—Drilling rigs characterised by means for land transport with their own drive, e.g. skid mounting or wheel mounting having means for adapting to inclined terrain; having means for stabilizing the vehicle while drilling
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B7/00—Special methods or apparatus for drilling
- E21B7/02—Drilling rigs characterised by means for land transport with their own drive, e.g. skid mounting or wheel mounting
- E21B7/025—Rock drills, i.e. jumbo drills
Definitions
- the target plate Is provIded [52] Us Cl 317/235 R 317/235 N 317/235 NA with a mosaic of discrete-domains,-each of which 313/66 1 forms a rectifying junction with the substrate.
- the tar- [51] Int Cl H0 15/00 get plate being provided with an insulating layer ex- [58] Fie'ld "317/235 NA posing the domains.
- a resistance layer of lead monoxide is provided in order to conduct away the electrons [56] Reierences Cited incident on the insulating layer.
- the invention relates to a camera tube comprising an electron source and a photo-sensitive target plate to be scanned by an electron beam emanating from said source and formed by a semiconductor substrate provided with an electric contact and on the side to be scanned by the electron beam with a mosaicof'discrete domains, each of which forms a rectifying junction with the semiconductor substrate, the side of the substrate tobe scanned'being'provided with an electrically insulating layer having apertures at the places of said domains, said layer being covered in turn by a thin resistance layer.
- Such a camera tube is known from an article in Bell System Technical Journal, Nov. 1968 Nr. 9, pages 1,855 to 1,873.
- the target plate of the camera tube described therein is scanned by an electron beam having slow electrons, the scanned area of the target plate is each time stabilized at a potential equal or substantially equal to the potential of the cathode of the electron source. Owing to differences in work functions the electrons in such an electron beam exhibit different speeds. If no resistance layer is provided, the comparatively rapid electrons will-bring the electrically insulatinglayer during the repeated stabilization ata potential which is lower than the cathode potential.
- the layer of lead monoxide' is applied from the vapour'phase, the resistance value of said layer being determined by the conditions of the vapour deposition or by subsequent doping.
- this layer may have a high porosity so that the secondary emission of the layer is reduced, which is conducive to the contrast of the tube.
- the capacitative effect of the resistance layer which is due only to the layer parts on the domains, can be reduced or even be substantially annulled by using a resistance layer having mains.
- elongated, cylindrical envelope l having a glass sheath 2 encloses an exhausted space 6 by an end face 3 having variousthrough connections 4 and a second end face 5 serving as an imput window for the image information light.
- This space accomodates an electron gun -7, a cathode 8, a control-grid9 and an anode' 10.
- the target plate 14 is mounted ve'rsely affect both the contrastand the definition, the
- resistance valueper square must not be too low. On the other hand this resistance must not be too high,.since then said braking effect is not sufficiently avoided.
- the resis- has for its object to satisfy these requirements and the tube'ofthe kind set forth is characterized in that the resistance layer consists of lead mon-
- the resistance layer consists of lead mon-
- This material has the advantageous property that the resistance per square of a layer of material can be given the desired value by the conditions of deposition or by a subsequent treatment, while vapour-deposited layers of the material adhere excellently to the support, exhibit a uniform composition and a flat surface. It also has the advantage that it protects the target against):-
- a metal ring 19 which serves for the. electric connection, is clamped between the thicker annular circumferential part 27 of the disc 14 and one of the electrically insulating rings 16 or 17.
- the ring 19 is connected to an electric conductor 20 passed through the wall 2.
- the target plate of semiconductor material in this case silicon, has a mosaic 21, extending up to the portion 27 and formed by domains 22 in a regular array.
- the material of these domains has a conductivity type opposite that of the material of the further portion (to be termed the substrate hereinafter) ofthe disc 14.
- the domains 22 may be circular or square and; may have a diameter or a side of about 20a, the central distance between them being about 2511..
- the domains form a rectifying junction 23 at a'small depth in the substrate. These junctions have to operate in the reverse direction when the tube is operating. When scanned by slow electrons the domains 22 have therefore to be p-conducting and the substrate has to be nconducting.
- the side of the target plate 14 provided with the mosaic 21 has an electrically insulating layer 24.
- This layer does not cover the surfaces of the domains 22 and the thickened rim 27.
- the insulating layer having a thickness of about 0.5 to 1.0;. preferably consists of an oxide of the semiconductor material of the target plate and in the present case of silica obtained by oxidizing the central portion 26 of the silicon plate. In practice this layer is employed as a mask for establishing the p-conductive domains 22.
- the silicon substrate covered by the perforated layer 24 is for this end exposed to a dopant, for example, boron so that at the apertures in the oxide layer the silicon becomes 1- conducting to a depth of about 2 the pn-junctions 23 with the substrate being thus formed.
- a resistance layer 26 covers the insulating layer 24 and the domains 22.
- This layer consists of lead monoxide and it has a thickness of not more than 0.2;; and an electrical resistance of about to 10 ohms/square.
- the lead monoxide is vapour-deposited in a gas atmosphere of approximately equal parts of oxygen and hydrogen of a pressure of about 6 X 10' Torr.
- the substrate is kept at about l C during the vapour deposition.
- These vapour-deposition conditions provide a fairly porous layer of mainly micro-crystalline tetragonal lead monoxide, which exhibits a slight secondary emission. The latter is conducive to the stabilization with a comparatively low beam current and to the prevention of potential image fading.
- the electrical resistance of the lead monoxide layer may be given the desired value subsequent to vapour deposition, for example, by doping with oxygen.
- the layer then has apertures at the areas of these mosaic elements.
- Such an apertured layer may be provided by depositing the material of the resistance layer 25 from the vapour phase across a grating of parallel wires, which grating covers at least the central parts of the domains during the vapour deposition.
- the vapour deposition is then performed in two different processes, between which the grating-has to be turned through 90. During the two vapour-deposition processes it is preferred to apply equal quantities of material.
- a camera tube comprising an electron source and a photo-sensitive'target plate to be scanned by an electron beam emanating from said source and formed by a semi-conductor substrate provided with an electric contact and on the side to be scanned by the electron beam with a mosaic of discrete domains each of which forms a rectifying junction with the semicondutor substrate, the side of the substrate to be scanned being provided with an electrically insulating layer having apertures at the area of said domains the improvement comprising covering the latter layer with a layer of lead monoxide having a thickness not exceeding 0.2 .4. and a resistance of 10 to 10" ohms per square, wherein the resistance layer is provided with aperatures at the areas of the central portions of the domains.
Landscapes
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mining & Mineral Resources (AREA)
- Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Fluid Mechanics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Electromagnetism (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Cold Cathode And The Manufacture (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6904045A NL6904045A (no) | 1969-03-15 | 1969-03-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3793571A true US3793571A (en) | 1974-02-19 |
Family
ID=19806426
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US00245782A Expired - Lifetime US3793571A (en) | 1969-03-15 | 1972-04-20 | Camera tube comprising insulated diodes and a resistance layer |
Country Status (8)
Country | Link |
---|---|
US (1) | US3793571A (no) |
BE (1) | BE747377A (no) |
CH (1) | CH506180A (no) |
DE (1) | DE2011325A1 (no) |
FR (1) | FR2038010A5 (no) |
GB (2) | GB1250740A (no) |
NL (1) | NL6904045A (no) |
SE (1) | SE361106B (no) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3919582A (en) * | 1973-06-28 | 1975-11-11 | Rca Corp | Target mounting structure for use in camera tube |
US3930161A (en) * | 1973-04-04 | 1975-12-30 | Telecommunications Sa | Radiation detector having a mosaic structure |
US3988758A (en) * | 1974-07-10 | 1976-10-26 | Nippon Electric Company, Ltd. | Semiconductor camera-tube target |
US4038606A (en) * | 1974-02-14 | 1977-07-26 | U.S. Philips Corporation | Semiconductor device for storing and non-destructively reading image information and memory system comprising such a device |
US4103203A (en) * | 1974-09-09 | 1978-07-25 | Rca Corporation | Wafer mounting structure for pickup tube |
US4389591A (en) * | 1978-02-08 | 1983-06-21 | Matsushita Electric Industrial Company, Limited | Image storage target and image pick-up and storage tube |
US20040200117A1 (en) * | 2003-03-28 | 2004-10-14 | Leonid Gaber | Night-vision optical device having controlled life expectancy |
US20090033046A1 (en) * | 2007-08-02 | 2009-02-05 | Donald Wilborn | Roller shoe |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7607095A (nl) * | 1976-06-29 | 1978-01-02 | Philips Nv | Trefplaatmontage voor een opneembuis, en werkwijze voor de vervaardiging daarvan. |
SE461110B (sv) * | 1987-08-31 | 1990-01-08 | Gruvprodukter I Gaellivare Ab | Anordning vid drivning av uppaatriktade bergschakt |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3419746A (en) * | 1967-05-25 | 1968-12-31 | Bell Telephone Labor Inc | Light sensitive storage device including diode array |
US3428850A (en) * | 1967-09-12 | 1969-02-18 | Bell Telephone Labor Inc | Cathode ray storage devices |
US3574143A (en) * | 1969-02-19 | 1971-04-06 | Bell Telephone Labor Inc | Resistive composition of matter and device utilizing same |
-
1969
- 1969-03-15 NL NL6904045A patent/NL6904045A/xx unknown
-
1970
- 1970-03-10 DE DE19702011325 patent/DE2011325A1/de active Pending
- 1970-03-12 GB GB1250740D patent/GB1250740A/en not_active Expired
- 1970-03-12 CH CH370070A patent/CH506180A/de not_active IP Right Cessation
- 1970-03-12 FR FR7008887A patent/FR2038010A5/fr not_active Expired
- 1970-03-12 GB GB01912/70A patent/GB1246260A/en not_active Expired
- 1970-03-12 SE SE03311/70A patent/SE361106B/xx unknown
- 1970-03-13 BE BE747377D patent/BE747377A/xx unknown
-
1972
- 1972-04-20 US US00245782A patent/US3793571A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3419746A (en) * | 1967-05-25 | 1968-12-31 | Bell Telephone Labor Inc | Light sensitive storage device including diode array |
US3428850A (en) * | 1967-09-12 | 1969-02-18 | Bell Telephone Labor Inc | Cathode ray storage devices |
US3574143A (en) * | 1969-02-19 | 1971-04-06 | Bell Telephone Labor Inc | Resistive composition of matter and device utilizing same |
Non-Patent Citations (1)
Title |
---|
Solid State Abstracts Journal, Vol. 8, No. 1. Abstract No. 61493, article of Pamfilor et al. * |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3930161A (en) * | 1973-04-04 | 1975-12-30 | Telecommunications Sa | Radiation detector having a mosaic structure |
US3919582A (en) * | 1973-06-28 | 1975-11-11 | Rca Corp | Target mounting structure for use in camera tube |
US4038606A (en) * | 1974-02-14 | 1977-07-26 | U.S. Philips Corporation | Semiconductor device for storing and non-destructively reading image information and memory system comprising such a device |
US3988758A (en) * | 1974-07-10 | 1976-10-26 | Nippon Electric Company, Ltd. | Semiconductor camera-tube target |
US4103203A (en) * | 1974-09-09 | 1978-07-25 | Rca Corporation | Wafer mounting structure for pickup tube |
US4389591A (en) * | 1978-02-08 | 1983-06-21 | Matsushita Electric Industrial Company, Limited | Image storage target and image pick-up and storage tube |
US20040200117A1 (en) * | 2003-03-28 | 2004-10-14 | Leonid Gaber | Night-vision optical device having controlled life expectancy |
US6898890B2 (en) * | 2003-03-28 | 2005-05-31 | American Technologies Network Corp. | Night-vision optical device having controlled life expectancy |
US20090033046A1 (en) * | 2007-08-02 | 2009-02-05 | Donald Wilborn | Roller shoe |
US7735840B2 (en) | 2007-08-02 | 2010-06-15 | Bbc International Llc | Roller shoe |
Also Published As
Publication number | Publication date |
---|---|
SE361106B (no) | 1973-10-15 |
GB1246260A (en) | 1971-09-15 |
FR2038010A5 (no) | 1970-12-31 |
BE747377A (fr) | 1970-09-14 |
DE2011325A1 (de) | 1970-10-01 |
SE331071B (no) | 1970-12-14 |
CH506180A (de) | 1971-04-15 |
NL6904045A (no) | 1970-09-17 |
GB1250740A (no) | 1971-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3670213A (en) | Semiconductor photosensitive device with a rare earth oxide compound forming a rectifying junction | |
USRE28386E (en) | Method of treating semiconductor devices to improve lifetime | |
US4184188A (en) | Substrate clamping technique in IC fabrication processes | |
US3548233A (en) | Charge storage device with pn junction diode array target having semiconductor contact pads | |
US3350595A (en) | Low dark current photoconductive device | |
US4574216A (en) | Cathode-ray tube and semiconductor device for use in such a cathode-ray tube | |
CA1249012A (en) | Electron-beam device and semiconductor device for use in such an electron-beam device | |
US3793571A (en) | Camera tube comprising insulated diodes and a resistance layer | |
US2077442A (en) | Cathode ray tube | |
GB942406A (en) | Improvements in or relating to television camera tubes | |
US3274024A (en) | Energy converter | |
ES337777A1 (es) | Dispositivo de tubo de rayos catodicos. | |
US3105166A (en) | Electron tube with a cold emissive cathode | |
US4717855A (en) | Dual-cathode electron emission device | |
US4651052A (en) | Device for picking up or displaying images having an externally-mounted semiconductor cathode | |
US2700626A (en) | Secondary electron emissive electrodes | |
US3082340A (en) | Radiation sensitive device | |
US3664895A (en) | Method of forming a camera tube diode array target by masking and diffusion | |
JPS61131330A (ja) | 半導体装置 | |
GB2169132A (en) | Cathode-ray tube having an ion trap | |
US3786294A (en) | Protective coating for diode array targets | |
US3268764A (en) | Radiation sensitive device | |
US3214629A (en) | Solid-state electron source | |
GB1447806A (en) | Method of manufacturing a semiconductor target for a camera tube | |
US3723278A (en) | Method of depositing hafnium-tantalum nitride layer by reactive sputtering |