US3693582A - Apparatus for applying a metal coating to an elongated metal article - Google Patents
Apparatus for applying a metal coating to an elongated metal article Download PDFInfo
- Publication number
- US3693582A US3693582A US10169A US3693582DA US3693582A US 3693582 A US3693582 A US 3693582A US 10169 A US10169 A US 10169A US 3693582D A US3693582D A US 3693582DA US 3693582 A US3693582 A US 3693582A
- Authority
- US
- United States
- Prior art keywords
- article
- screen means
- source
- deflector screen
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002184 metal Substances 0.000 title claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 39
- 238000000576 coating method Methods 0.000 title claims abstract description 25
- 239000011248 coating agent Substances 0.000 title claims abstract description 24
- 230000008016 vaporization Effects 0.000 claims description 9
- 238000009834 vaporization Methods 0.000 claims description 7
- 230000002708 enhancing effect Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 9
- 229910000831 Steel Inorganic materials 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 101100065878 Caenorhabditis elegans sec-10 gene Proteins 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000001455 metallic ions Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Definitions
- ABSTRACT An apparatus for applying a metallic coating to an elongated metal article.
- the article to be coated is transported through an enclosure with closure gates at the ends.
- a source of ionized metallic atoms is positioned around the article.
- Also within the enclosure is a tubular deflection screen at a potential which is of the same polarity as the ionized atoms.
- the deflector screen deflects back towards the article the ionized atoms produced by the source which do not strike the article when emitted by thesour e 7 v 1 1 Claims, 3 Drawing Figures APPARATUS FOR APPLYING A METAL COATING TO AN ELONGATED METAL ARTICLE
- This invention relates to apparatus for applying to an elongated metal article a metallic coating obtained by condensation of metallic atoms produced by evaporation under vacuum of a metal heated to a temperature above its vaporization point.
- One known apparatus provides for metallization under vacuum, including placing the articles to be coated in an enclosure where there is a vacuum of approximately -4 Torr, into which enclosure, there are introduced metallic vapors constituted by the atoms of the metal required to form the coating, these atoms being produced by evaporation of the metal heated to a temperature above its vaporization point so that the vapors formed condense on the article to be coated.
- This apparatus has the advantages that the coating obtained is homogeneous and adhesive and can be composed of an alloy, and that the method makes it possible to avoid the formation of fragile layers at the interface between the article and the coating.
- the yield is particularly low.
- the present invention aims at overcoming or reducing the effect of these disadvantages.
- the present invention consists in an apparatus for applying to an elongated metal article, for example a steel article such as a strip or a wire, a coating obtained by condensation of the metallic atoms produced by evaporation under vacuum of a metal heated to a temperature above its vaporization point, wherein the said article is arranged vertically in an enclosure under a vacuum of 10'] to 10 5 Torr, a source of metallic atoms is arranged around the article and metallic atoms from the source having passed the article and thus not directly condensed on the article, are deflected back towards the article.
- an elongated metal article for example a steel article such as a strip or a wire
- a coating obtained by condensation of the metallic atoms produced by evaporation under vacuum of a metal heated to a temperature above its vaporization point
- FIG. 1 is a diagrammatic view of one form of apparatus constructed in accordance with the present invention
- FIG. 2 is a partial diagrammatic view in perspective of the apparatus of FIG. 1,
- FIG. '3 is a view in perspective of a portion of a modified form of apparatus for coating wire.
- FIGS. 1 and 2 show an apparatus for applying a metallic coating to a strip of sheet, which includes an enclosure 1 arranged vertically, i.e. whose longitudinal axis is vertical, the two ends being closed by closure gates 2 and 3.
- Vacuum pumps which are not shown, are attached to the said enclosure 1 and create there a vacuum generally of approximately 101 to 10-5 Torr.
- a metallic strip 4 for instance of steel, transported by drive cylinders 5 and 6 over a vertical path from the bottom of the enclosure to the top.
- Two crucibles 7 and 8 composed of refractory material are located one on each side of the strip 4, the free side of each crucible beingin a plane perpendicular to the strip 4.
- the crucibles contain a metal which by two electron guns 9 and 10, is raised to a temperature which is higher than its vaporization point.
- the crucibles are supplied continuously with metal by means of a cone device, which is not shown.
- the electron guns 9 and 10 which may be of a known type are provided with a deflection system effecting a deflection of on the electrons and a reciprocating sweeping device to cause the electron to pass alternately to each end of the crucibles, which ends are thus heated equally.
- the crucibles constitute a source of metallic atoms, which when emitted follow paths which are almost rectilinear, and some of them strike directly the two faces of the strip 4 where they condense and form a coating.
- This hood is brought to a temperature, called deflection temperature, by means of heating provided by a heating resistance 12 surrounding the hood and supplied from a source of current 13.
- the deflection temperature is selected in such a manner that the metallic atoms which strike the hood cannot condense there and are immediately deflected towards the strip 4 which is to be coated. Tests which have been carried out have shown that in general this temperature may be between seven-tenths and twelve-tenths of the value of the melting point of the coating metal.
- the best manner of operation in practice is to perform tests by subjecting the hood successively to various increasing temperatures from a value approximately equal to threequarters of the vaporization temperature of the metal, and to determine that which supplies the best yield.
- deflector screen 1 1 may be heated in a totally different manner by passing an electrical current through it so that its own resistance brings about the heating.
- electron guns may be used, which may be the same guns for heating the crucibles, beams of electrons issuing from the guns being moved such that in turn they strike against the crucibles and the internal surface of the screen.
- the heating of the screen by a particular means may even be omitted, since when the apparatus is operating, the crucibles heated by the electron guns emit thermal radiation sufficing in certain cases to heat surface with parabolic directrix.
- the hood 11 is connected by a circuit 14a to the positive pole of a source of current 14 and the metallic atoms emitted are subjected on issuing from the crucibles to the action of an ionization device 15 of a known type arranged immediately above the crucibles. Accordingly the atoms are transformed into positive metallic ions which by virtue of this device are repelled by the positive hood and returned to the strip 4 where they condense, which increases the yield. The' yield may be still further increased by connecting the strip 4 to the negative pole of a source of current, not shown.
- the value-of the potentials of the strip and of the hood depend in particular on the nature of the metal deposited and the operating conditions. Thus, for depositing nickel, it has been found that the strip should be at approximately 500V, the hood at approximately 100V and the vaporized nickel at earth potential.
- the article may be heated to a temperature in general between one-fifth and-one-third of the melting point of the metal to be deposited.
- this heating of the strip 4 is obtained by a source of current 16 connected by conductors 17 to the cylinders 5 and 6 driving the strip 4, which is thus heated by the Joule effect.
- the heating of the strip 4 may also be obtained by an electron gun 22 as shown in FIG. 2.
- the hood 18 forming the deflector screen has a cylindrical/conical shape and its opening 180 is directed downwardly.
- a wire 19 to be covered passes along toissue through the apex 18b, driven by a device not shown, analogous to the cylinders 5 and 6.
- Two crucibles 20 of semi-toroidal shape surround the wire 19 and each is swept alternately first in one direction and then in the other by the electrons emitted by two electron guns 21 and deflected by a known device which is not shown.
- the apparatus of FIG. 3 also has an enclosure for the hood, a device for heating and polarizing the hood, a heating device for the wire, an ionization device for the metallic atoms, as in the apparatus shown in FIGS. 1 and 2 provided for coating a metallic strip.
- the advantage of the apparatus is that it applies simultaneously a uniform coating on the two sides of an extended metallic product such as a strip, a wire or a section of metal. Moreover, the yield is'increased and there is far less clogging of the apparatus, with the result that there are far fewer stoppages for cleaning and production is increased. 1
- An apparatus includingan enclosure for applying ametallic coating to an elongated metal article said apparatus comprising:
- transporting means for transporting said elongated metal article through the enclosure along a vertical P 0.
- source means for producing metallic atoms the
- source means being positioned around the elongated metal article in a plane normal to the path;
- ionizing means for ionizing the atoms produced by said source means
- tubular deflector screen means surrounding in part the article passing therethrough for deflecting back towards the elongated metal article the metallic atoms which have passed to the side of the elongated metal article and have not condensed thereon, wherein the deflector screen means is positioned above the source means;
- a dc. current source having one pole connected to the deflector screen means for applying a potential to said screen means which is of the same polarity as the polarity of i said ionized atoms thereby enhancing the deflection by said screen means;
- g. means for creating a vacuum of from 10-1 to 10'5 Torr within the enclosure.
- Apparatus as claimed in claim 1, wherein the a source means of metallic atoms comprises at least one crucible'containing the metal to be vaporized under, said apparatus further including an electron gun for vaporizing the metal.
- deflector screen means is defined by the internal sur- T e apparatus 88 Set forth n C aim 1 herein Said face of a body of revolution.
- tubular deflector screen means has a circular cross sec- 10.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE728876 | 1969-02-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3693582A true US3693582A (en) | 1972-09-26 |
Family
ID=3854328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10169A Expired - Lifetime US3693582A (en) | 1969-02-24 | 1970-02-10 | Apparatus for applying a metal coating to an elongated metal article |
Country Status (8)
Country | Link |
---|---|
US (1) | US3693582A (zh) |
JP (1) | JPS4817695B1 (zh) |
BE (1) | BE728876A (zh) |
CH (1) | CH520784A (zh) |
FR (1) | FR2031254A5 (zh) |
GB (1) | GB1277375A (zh) |
LU (1) | LU60206A1 (zh) |
NL (1) | NL7002193A (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4285296A (en) * | 1978-02-24 | 1981-08-25 | Ball Corporation | Lubricating apparatus |
EP0142083A2 (de) * | 1983-11-11 | 1985-05-22 | Hoesch Aktiengesellschaft | Verfahren und Einrichtung zum Herstellen metallischer Überzüge |
US4532889A (en) * | 1983-07-07 | 1985-08-06 | Societe Nationale Industrielle Aerospatiale | Process and apparatus for metallic impregnation of a web of conductive fibres |
DE4018340A1 (de) * | 1990-06-08 | 1991-12-12 | Deutsche Forsch Luft Raumfahrt | Verfahren und vorrichtung zum beschichten von fasern |
US5616362A (en) * | 1993-06-02 | 1997-04-01 | Andritz-Patentverwaltungs-Gesellschaft M.B.H. | Process and apparatus for the coating of metal |
US5826773A (en) * | 1997-01-31 | 1998-10-27 | Straemke; Siegfried | Rope material transfer structure |
WO2002087787A1 (en) * | 2001-04-30 | 2002-11-07 | University Of Virginia Patent Foundation | Method and apparatus for efficient application of substrate coating |
US20120037077A1 (en) * | 2002-05-03 | 2012-02-16 | Giacomo Benvenuti | Large area deposition in high vacuum with high thickness uniformity |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55120223U (zh) * | 1979-02-16 | 1980-08-26 | ||
DE4442733C2 (de) * | 1994-12-01 | 2001-04-26 | Ardenne Anlagentech Gmbh | Einrichtung zur Bedampfung bandförmiger Substrate im Vakuum |
Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1710747A (en) * | 1925-12-07 | 1929-04-30 | American Mach & Foundry | Method of and apparatus for coating metal |
DE665540C (de) * | 1931-07-26 | 1938-09-28 | Siemens Schuckertwerke Akt Ges | Herstellung von metallischen UEberzuegen auf Metallkoerpern |
US2206509A (en) * | 1939-05-27 | 1940-07-02 | Rca Corp | Radio tube manufacture |
US2382432A (en) * | 1940-08-02 | 1945-08-14 | Crown Cork & Seal Co | Method and apparatus for depositing vaporized metal coatings |
US2437606A (en) * | 1944-11-27 | 1948-03-09 | Jones & Laughlin Steel Corp | Method and apparatus for oiling sheet metal |
US2621624A (en) * | 1944-01-29 | 1952-12-16 | Chilowsky Constantin | Apparatus for manufacture of piezo-electric elements |
US2771568A (en) * | 1951-01-31 | 1956-11-20 | Zeiss Carl | Utilizing electron energy for physically and chemically changing members |
US2994618A (en) * | 1957-01-22 | 1961-08-01 | Trion Inc | Method and apparatus for electrostatic coating |
US3000752A (en) * | 1957-12-30 | 1961-09-19 | Armco Steel Corp | Coating metallic sheet or strip material with powdered annealing separator substances |
US3192892A (en) * | 1961-11-24 | 1965-07-06 | Sperry Rand Corp | Ion bombardment cleaning and coating apparatus |
US3250694A (en) * | 1962-10-17 | 1966-05-10 | Ibm | Apparatus for coating articles by cathode sputtering |
US3288638A (en) * | 1962-10-09 | 1966-11-29 | Martin Marietta Corp | Method and apparatus for the treatment of plastic materials |
US3324825A (en) * | 1964-11-25 | 1967-06-13 | Mhd Res Inc | Glow discharge reactor |
US3361591A (en) * | 1964-04-15 | 1968-01-02 | Hughes Aircraft Co | Production of thin films of cadmium sulfide, cadmium telluride or cadmium selenide |
US3386909A (en) * | 1964-12-08 | 1968-06-04 | Air Force Usa | Apparatus for depositing material on a filament from ionized coating material |
US3395674A (en) * | 1963-09-23 | 1968-08-06 | Int Resistance Co | Apparatus for vapor coating tumbling substrates |
US3432335A (en) * | 1966-03-15 | 1969-03-11 | Lokomotivbau Elektrotech | Cyclically moving electron beam for uniform vapor deposited coating |
US3556048A (en) * | 1968-09-05 | 1971-01-19 | Nasa | Vacuum evaporator with electromagnetic ion steering |
-
1969
- 1969-02-24 BE BE728876D patent/BE728876A/xx not_active IP Right Cessation
-
1970
- 1970-01-20 LU LU60206D patent/LU60206A1/xx unknown
- 1970-01-22 CH CH91170A patent/CH520784A/fr not_active IP Right Cessation
- 1970-01-27 GB GB3984/70A patent/GB1277375A/en not_active Expired
- 1970-01-29 FR FR7003122A patent/FR2031254A5/fr not_active Expired
- 1970-02-10 US US10169A patent/US3693582A/en not_active Expired - Lifetime
- 1970-02-17 NL NL7002193A patent/NL7002193A/xx unknown
- 1970-02-24 JP JP45015279A patent/JPS4817695B1/ja active Pending
Patent Citations (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1710747A (en) * | 1925-12-07 | 1929-04-30 | American Mach & Foundry | Method of and apparatus for coating metal |
DE665540C (de) * | 1931-07-26 | 1938-09-28 | Siemens Schuckertwerke Akt Ges | Herstellung von metallischen UEberzuegen auf Metallkoerpern |
US2206509A (en) * | 1939-05-27 | 1940-07-02 | Rca Corp | Radio tube manufacture |
US2382432A (en) * | 1940-08-02 | 1945-08-14 | Crown Cork & Seal Co | Method and apparatus for depositing vaporized metal coatings |
US2621624A (en) * | 1944-01-29 | 1952-12-16 | Chilowsky Constantin | Apparatus for manufacture of piezo-electric elements |
US2437606A (en) * | 1944-11-27 | 1948-03-09 | Jones & Laughlin Steel Corp | Method and apparatus for oiling sheet metal |
US2771568A (en) * | 1951-01-31 | 1956-11-20 | Zeiss Carl | Utilizing electron energy for physically and chemically changing members |
US2994618A (en) * | 1957-01-22 | 1961-08-01 | Trion Inc | Method and apparatus for electrostatic coating |
US3000752A (en) * | 1957-12-30 | 1961-09-19 | Armco Steel Corp | Coating metallic sheet or strip material with powdered annealing separator substances |
US3192892A (en) * | 1961-11-24 | 1965-07-06 | Sperry Rand Corp | Ion bombardment cleaning and coating apparatus |
US3288638A (en) * | 1962-10-09 | 1966-11-29 | Martin Marietta Corp | Method and apparatus for the treatment of plastic materials |
US3250694A (en) * | 1962-10-17 | 1966-05-10 | Ibm | Apparatus for coating articles by cathode sputtering |
US3395674A (en) * | 1963-09-23 | 1968-08-06 | Int Resistance Co | Apparatus for vapor coating tumbling substrates |
US3361591A (en) * | 1964-04-15 | 1968-01-02 | Hughes Aircraft Co | Production of thin films of cadmium sulfide, cadmium telluride or cadmium selenide |
US3324825A (en) * | 1964-11-25 | 1967-06-13 | Mhd Res Inc | Glow discharge reactor |
US3386909A (en) * | 1964-12-08 | 1968-06-04 | Air Force Usa | Apparatus for depositing material on a filament from ionized coating material |
US3432335A (en) * | 1966-03-15 | 1969-03-11 | Lokomotivbau Elektrotech | Cyclically moving electron beam for uniform vapor deposited coating |
US3556048A (en) * | 1968-09-05 | 1971-01-19 | Nasa | Vacuum evaporator with electromagnetic ion steering |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4285296A (en) * | 1978-02-24 | 1981-08-25 | Ball Corporation | Lubricating apparatus |
US4532889A (en) * | 1983-07-07 | 1985-08-06 | Societe Nationale Industrielle Aerospatiale | Process and apparatus for metallic impregnation of a web of conductive fibres |
EP0142083A2 (de) * | 1983-11-11 | 1985-05-22 | Hoesch Aktiengesellschaft | Verfahren und Einrichtung zum Herstellen metallischer Überzüge |
EP0142083A3 (de) * | 1983-11-11 | 1987-04-29 | Hoesch Aktiengesellschaft | Verfahren und Einrichtung zum Herstellen metallischer Überzüge |
DE4018340A1 (de) * | 1990-06-08 | 1991-12-12 | Deutsche Forsch Luft Raumfahrt | Verfahren und vorrichtung zum beschichten von fasern |
US5616362A (en) * | 1993-06-02 | 1997-04-01 | Andritz-Patentverwaltungs-Gesellschaft M.B.H. | Process and apparatus for the coating of metal |
US5826773A (en) * | 1997-01-31 | 1998-10-27 | Straemke; Siegfried | Rope material transfer structure |
WO2002087787A1 (en) * | 2001-04-30 | 2002-11-07 | University Of Virginia Patent Foundation | Method and apparatus for efficient application of substrate coating |
US20120037077A1 (en) * | 2002-05-03 | 2012-02-16 | Giacomo Benvenuti | Large area deposition in high vacuum with high thickness uniformity |
US8852344B2 (en) * | 2002-05-03 | 2014-10-07 | Ecole Polytechnique Federale De Lausanne (Epfl) | Large area deposition in high vacuum with high thickness uniformity |
Also Published As
Publication number | Publication date |
---|---|
GB1277375A (en) | 1972-06-14 |
LU60206A1 (zh) | 1970-03-20 |
NL7002193A (zh) | 1970-08-26 |
DE2006866B2 (de) | 1976-03-25 |
JPS4817695B1 (zh) | 1973-05-31 |
FR2031254A5 (zh) | 1970-11-13 |
CH520784A (fr) | 1972-03-31 |
DE2006866A1 (zh) | 1970-09-03 |
BE728876A (zh) | 1969-08-01 |
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