US3669567A - Gettering - Google Patents
Gettering Download PDFInfo
- Publication number
- US3669567A US3669567A US34319A US3669567DA US3669567A US 3669567 A US3669567 A US 3669567A US 34319 A US34319 A US 34319A US 3669567D A US3669567D A US 3669567DA US 3669567 A US3669567 A US 3669567A
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- US
- United States
- Prior art keywords
- gas
- getter
- ring
- releasing
- barium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
Definitions
- PORTA ETAL GETTERING Filed may 4, 1970 FIQIO BEV ed; 225m O O TIME (SEQ) EV ad; 222m O T1ME (SEC.)
- FIG l2 INVENTORS PApLo dELLA PORTA ELfo RAB'USIN QUANTITY 0F soRBf-:D co (cc-Tome x 10'3) mmuv @Him 20F@ mom United States Patent 3,669,567 Patented June 13, 1972 3,669,567 GE'ITERING Paolo Della Porta and Elio Rabusin, Milan, Italy, as-
- a getter device comprising an evaporable getter metal and first and second sources of gas; means for releasing the gas from the first source prior to and preferably also during evaporation of the getter metal; and means for releasing the gas from the second source during the latter part of the period of getter metal evaporation.
- Getter devices which release an evaporable getter metal such as barium in a vacuum are well-known.
- the getter metal released by these devices deposits as a film on the inside walls of the vacuum vessel.
- These devices are commonly employed in electronic tubes in general and in cathode-ray tubes such as television tubes in particular.
- Getter devices asdescribed in U.S. Pats. 3,388,955 and 3,369,288 have recently been introduced and have found wide acceptance for use in electronic tubes. These getter devices are constructed such that the getter metal, prefferably barium, is evaporated in the tube in the presence of a gas. By virtue of the presence of this gas the getter metal is distributed preferentially on the conical walls rather than the screen portion of the cathode-ray tube. Unfortunately, the total sorptive capacity of the getter metal film produced by such devices is less than desired. It is well-known in the art that the sorptive capacity of barium films can be increased by evaporating barium in the presence of a gas to form the film. (See British specification 496,856.) However, greatly increasing the amount of gas can result in an undesirable decrease of the sorptive capacity of the film.
- the getter metal film inhibits the passage of electrons and decreases the brightness of the picture.
- any barium in contact with the aluminum can adversely affect the aluminum.
- oxygen evolved in the tube is sorbed by the barium and is converted to barium hydroxide in the presence of Water. This barium hydroxide attacks the aluminum damaging it.
- Color television tubes are conventionally provided with a shadow mask designed to stop those electrons which are not directed to one of the three primary color phosphors.
- a barium film deposited on the shadow mask can cause uneven absorption of electrons and consequent uneven heating of the shadow mask. This uneven heating can warp the shadow mask causing misalignment of the holes in the mask with the primary color phosphors. This misalignment in turn causes untrue colors in the picture.
- Electrons striking the barium film on the screen portion of the tube can cause sorbed gases to be re-evolved from the film.
- This eect is especially acute when the electrons have a high speed such as that encountered in color television tubes where the voltage between the electron guns and the screen is on the order of 25 kilovolts. This effect is present although somewhat less serious in black and white television tubes where this voltage is typically 10 to 15 kilovolts.
- Another object is to provide getter devices having an increased sorptive capacity.
- a further object is to provide getter devices which produce films having an increased sorptive speed.
- a still further object is to provide a novel process for depositing a getter metal film on the inside Walls of vessels in general and cathode-ray tubes in particular.
- Yet another object is to provide getter devices comprising a getter metal and a gas-releasing material for use in cathode-ray tubes which produce a getter metal film of desirable distribution having a higher sorptive capacity than those of prior devices.
- FIG. 1 is a plan view of the getter device of the present invention
- FIG. 2A is a sectional view taken along line 2--2 of FIG. 1;
- FIG. 3 is a plan view of a modified getter device of the present invention.
- FIG. 4 is a sectional view taken along line 4-4 of FIG. 3;
- FIG. 5 is a plan view of yet another modified getter device of the present invention.
- FIG. 6 is a sectional view taken along line 6-6 of FIG. 5;
- FIG. 7 is a sectional view of still another modified getter device of the present invention similar to that of FIGS. 5 and 6;
- IFIG, 8 is a partial sectional view of a cathode-ray tube employing a getter device of the present invention
- FIG. 9 is a partial sectional view of a cathode-ray tube employing a modified form of the getter device of the present invention.
- FIG. 10 is a graph indicating the pressure in a cathoderay tube and the barium yield as a function of time char acteristic of a prior getter device;
- FIG. 11 is a graph similar to that of FIG. 10 but showing the characteristics of the getter devices of the present invention. i
- FIG. l2 is a graph showing the sorption speed as a function of the quantity of carbon monoxide sorbed for a getter device of the present invention compared to a cer'- tain control getter device.
- a getter device comprising an evaporable getter metal and first and second sources of gas; means for releasing the gas from the the rst source prior to and preferably also during evaporation of the getter metal; and means for releasing the gas from the second source during the latter part of the period of getter metal evaporation.
- Such devices produce getter metal lm having increased sorptive speeds and sorptive capacity.
- the preferred devices are those which comprise a ring of an inductively heatable material, a mixture of airst gas-releasing material and an evaporable getter material in thermal proximity to the ring, and a second gas-releasing material adapted to release its gas during the latter period of getter metal evaporation.
- the alkali or alkaline earth metals examples of which include among others calcium, magnesium, strontium, and barium.
- Barium is the preferred .getter metal because of its wellknown sorptive characteristics.
- the getter metal can be employed alone -but is preferably employed in the form of a getter alloy comprising the getter metal and one or more less-reactive metals. Such alloys are less reactive towards air and are easier to handle.
- the preferred getter alloys are those of barium and aluminum, generally in weight ratio of about :5 to 10:20, and especially binary alloys containing about 50 to 56% barium, balance aluminum.
- the getter metals and getter alloys can be employed alone or in admixture with other substances.
- endothermic getter devices When employed alone so-called endothermic getter devices are produced. These devices rely upon induction heating in order to provide the heat of vaporization of the getter metal. More preferably the getter alloy is employed admixed4 with nickel to create an exothermic getter device wherein a portion of the heat of vaporization of the getter metal is supplied by an exothermic reaction between the nickel and the barium-aluminum alloy.
- the ring of inductively heatable material can have a wide variety of geometric shapes provided that it is continuous.
- the ring is annular in shape whereas in another embodiment especially useful with exothermic getter materials the ring comprises a vertically extending wall attached to a short horizontal wall.
- any material which releases a gas is suitable for use as the gas-releasing material in the present invention.
- the preferred gas-releasing materials are those which are stable to temperatures up to f meant, those which neither decompose nor pick up unt desirably large quantities of gas from the atmosphere. e
- the gas-releasing material can be selected such that virtually any gas is released under the desired conditions.
- the preferred gases are4 the activegases.
- An active gas is one which is sorbed by the employed getter metal.
- suitable gases include among others; carbon monoxide, carbon dioxide, oxygen, hydrogen, and nitrogen.
- the preferred gases are hydrogen and nitrogen, hydrogen because of its well-known incidental benefit to cathode activity, and nitrogen because of the rate at which it is sorbed by the preferred getter metals and because of its relatively high mass permitting a relatively small amount to be employed to effectively control getter lmdistribution. Nitrogen is most preferred.
- suitable gas-releasing materials include among others: barium carbonate, the metallic hydrides, and nitrides such as barium nitride, barium hydride, titanium hydride, phosphorous nitride, and most preferably iron nitride (FerN).
- iron nitride is preferred because of its stability in air and its decomposition temperature which is above that commonly employed in de-gasing and is below that of barium evaporation. Furthermore, it yields nitrogen, the preferred gas.
- the first gas-releasing material ⁇ is admixed with the evaporative getter metal, and this mixture positioned in the device in thermal proximity to the ring.
- thermal proximity is meant that the mixture is placed close enough to the ring, and preferably in contact therewith such that exposure of the ring toinductive currents causes induced heating in the ring which heat is transferred to the mixture causing first release of gas from the gas-releasing material and then evaporation of the evaporable getter metal and further gas release.
- the 'Ille gas-releasing material and the getter metal can be in any physical form but are generally particulate, and are preferably pressed together to form a cohesive mass.
- the gas-releasing material can be present in any amount which will release the gas in order to effect distribution of the getter metal film,y and in the case of an active gas not saturate the getter metal.
- the gas-releasing material can be admixed withthe getter metal in widely varying weight ratios, but generally is present in ratios of 0.5: to 50:100, and preferably 1:100 to Yl0:100, parts by weight of gas-releasing material per part by weight of getter metal.
- the gas-releasing ⁇ material is generally ⁇ present -in an absolute amount sutiicient to produce a pressure of 5x104 to 5x10-1, and preferably 10-3 to 5 10"2 torr,
- a second gas-releas ing material is provided adapted to release its gas during the latter period of getter metal evaporation.v This is preferably accomplished by placing this gas-releasing material at a point remote vfrom the ring such that itis heated after the ring is heated thereby releasing the gas from this source during the latter period of getter metal evaporation.
- the second gas-releasing material can be present in Widely varying amounts as long as the total gas released from the first and second sources combined does not consume too great a capacity of the getter metal film.
- the volume ratio of the gas produced by the second source to that producedby the first source is 1:10 to 10:1.
- the device 20 comprises a ring 21, a pressed particulate mixture 22 comprising barium-aluminum alloy and nickel and Fe4'N in contact with the ring 21.
- Attached to the ring 21 is a disc-shaped shield 23 of a heat conductive material.
- the shield 23 substantially closes the area circumscribed by the ring 21.
- the shield 23 has a coaxial depression 24 which functions as a holder containing an amount of a gas-releasing material 25.
- the ring 21 comprises an upper extending segment 26 and a horizontally extending segment 27. Attached to the ring 21 by means of a plurality of tabs 28, is a heat ⁇ insulative -base 29.
- the getter device 20 is also provided with a second tab 30 to facilitate mounting of the device 20 in the tube as described more completely below.
- the shield is provided with a plurality of depressions 31.
- y l' Referring now to FIGS. 3 and 4, there is shown a modiied getter device 40 similar in many respects to the device 20 except that a holder 41, in the shape of. conical cup is positioned coaxially on the shield 42, a gas-releasing material 43 is within the holder 41'. 'Ihe remaining structural elements are ⁇ identical to those of the device 20.
- the device 50 comprises an annular ring 51 of an inductiwely heatable material.
- a mixture 52 of a gas'- releasing material and an evaporable getter metal is Attached to the ring ⁇ 51 and extending upwardly therefrom, and a support member 53, the top portion of which is bent into a horizontal segment 54. Attached to the horizontal segment 54 as aV cylindrical holder 55 containing a gasreleasing material 56.
- the device 60 comprises an annular ring 61 of an inductively heatable material, a mixture 62 of a gas-releasing material'l and an evaporable getter material in the ring 61.
- the device 60 further comprises a support member 63, having an upper horizontally extending segment 64 and a lower horizontally extending segment 65 connected by a vertical segment 66.v
- the upper segment 64 is attached to the ring 61 by any convenient means such as by spot welding. Attached to the vertical segment 66 is a holder 67 similar to the holder 55 of FIG. 6.
- the holder 67 contains a gasreleasing material not shown.
- FIG. 8 there is shown a partial sectional view of a cathode-ray tube 70 having a screen not shown and an electron gun 71.
- Attached to the gun 71 is a flexible metallic strip 72 which is attached on its other end to the tab 30 of the getter device 20.
- the strip 72 is spring biased such that the base 29 of the device 20 rests on the wall 73 of the tube '70.
- the getter device 20 is placed within the tube 70, whereupon the tube 70 is evacuated by any convenient means, and then sealed.
- a toroidal coil 74 is then positioned coaxially with the device 20 and current passed through the windings of the coil 74 from a source of high freqeuncy alternating current not shown.
- the coil 74 generates lines of force shown schematically as lines 75 and 76 creating a toroidal field. Because the ring 21 of the device 20 lies almost completely within the toroidal field, the ring 21 is rapidly heated.
- Continued application of power to the coil 74 continues to increase the temperature of the material 22 until the getter metal begins to evaporate and begins to deposit on the inside surfaces of the tube 70.
- the depression 24 (see FIG. 2) containing the gas-releasing material 25 is in the weaker portion of the toroidal eld, this gas-releasing material releases its gas only at a later point in time and according to the present invention during the latter period of getter metal evaporation.
- the cathode-ray tube 80 has an electron gun '81 to which is attached a support -82 holding the getter device 50 coaxially in the neck 83 of the tube y80.
- a toroidal coil 84 is positioned around the neck 83 of the tube S0, and is therefore coaxial with the getter device 50.
- ce-torr and ltr.t0rr refer to the quantity of gas respectively in cubic centimeters or liters when measured at a pressure of 1 torr.
- vOne torr is a pressure equal to that exerted by a column of mercury 1 mm. high.
- One micron (n) is a pressure equal to that exerted by a column of mercury 0.001 mm. high.
- EXAMPLE 1 This comparative example illustrates the gasreleasing character of prior devices.
- a typical prior art getter device designated Device A identical in all respects to the getter device 20 but having no gas-releasing material 25, is placed in a cathode-ray tube in the position shown in FIG. 8.
- the mixture 22 consists of 460 mg. of an alloy containing 56% barium, balance aluminum; 516 mg. nickel; and 24 mg. of Fe4N. Complete decomposition of the Fe4N would release 850 cc. torr of N2.
- Current is passed through the coil and the getter device 20 heated while measuring the gas ⁇ pressure within the tube and the amount of getter metal, which in this case is barium, evaporated from Device A.
- These variables are plotted as a function of time in FIG. 10. As can be seen by reference to FIG.
- Example 2 The procedure of Example 1 is repeated employing the same times, temperatures, conditions, and devices except that the device 20 designated Device B, having the gasreleasing material 25, is employed whereupon the graph shown as FIG. ll results. As can be seen by this ligure, the gas pressure exhibits a second peak due to release of gas' from the gas-releasing material 25. Furthermore, this second period of gas release occurs during the latter half of the period of barium evaporation.
- EXAMPLE 3 This example illustrates the increased sorptive speed and sorptive capacity of the getter devices of the present invention.
- a getter device termed Device C identical to Device A of Example 1 but having 48 mg. of Fe4N admixed with the nickel and barium-aluminum alloy, is placed in a cathoderay tube and subjected to induction heating as described with reference to FIG. 8, in order to evaporate the barium. Thereafter, carbon monoxide is introduced into the tube at a controlled rate equal to the rate at which it is sorbed by the barium lm. The sorption speed in cc./sec. is plotted as a function of the quantity of carbon monoxide sorbed in ltr.torr and the speed is measured at the pressure of 1 104 torr. The results are displayed graphically in FIG. 12 as line 911.
- FIG. 12 is a semi-log plot. The procedure is repeated except that Device C is replaced by Device D, having the same total Fe4N (48 mg), but wherein 24mg. are mixed with the nickel, barium-aluminum alloy mixture and 24 mg. are placed in the depression 24 as shown in FIGS. 1 and 2.
- the results are recorded in FIG. l2 as line 92.
- the getter devices of the present invention characterized by the line 92, have a greater capacity for carbon monoxide and maintain their sorptive speed for a greater length of'time than do prior getter devices characterized by line ⁇ 91.
- the sorptive capacity of barium film produced by the Device C begins to decrease after sorption of about 3 ltr.torr of CO, whereas that of the Device D (line '92) maintains its initial speed until it has sorbed about 4 ltr.torr of CO.
- the lm from the Device C is sorbing at a rate of only 105 cc./sec., whereas that of Device D (line 192) is 7 x 105 cc./sec., or seven times as great.
- both devices initially contained exactly the same amount of getter metal (240 mg. barium), and exactly the same amount of gas-releasing material (48 mg. of AFe4N).
- a 4getter device comprising an evaporable getter metal and rst and second sources of gas; means for releasing the gas from the rst source prior to evaporation of the getter metal; and means for releasing the gas from the second source during the latter period of getter metal evaporation.
- a getter device for releasing an evaporable getter metal in a vessel comprising:
- a getter device for releasing a getter metal in a vacuum comprising:
- a getter device of claim 2 for releasing a getter metal in a vacuum comprising;
- a getter device of claim 16 for releasing barium in a vessel comprising:
- a getter device of claim 2 for releasing a getter metal in a vacuum comprising:
- L(C) a support member attached to the ring and extending upwardly therefrom;
- a getter device of claim 2 for releasing a getter metal in a vacuum comprising:
- a getter device of claim 2 for releasing barium in vacuum comprising:
- a getter device of claim Z for releasing barium in a vessel comprising;
- a getter device having an evaporable getter metal and means for releasing a gas prior to getter metal evaporation the improvement comprising providing said device with means for releasing a gas during the latter period of getter metal evaporation.
Landscapes
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT1818769 | 1969-06-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
US3669567A true US3669567A (en) | 1972-06-13 |
Family
ID=11152312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US34319A Expired - Lifetime US3669567A (en) | 1969-06-14 | 1970-05-04 | Gettering |
Country Status (8)
Country | Link |
---|---|
US (1) | US3669567A (fr) |
JP (1) | JPS5426869B1 (fr) |
CA (1) | CA920639A (fr) |
DE (1) | DE2028949C3 (fr) |
FR (1) | FR2051155A5 (fr) |
GB (1) | GB1322757A (fr) |
NL (1) | NL172284C (fr) |
SU (1) | SU513652A3 (fr) |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3920355A (en) * | 1974-02-28 | 1975-11-18 | Getters Spa | Gettering |
US3927953A (en) * | 1973-05-18 | 1975-12-23 | Getters Spa | Getter device and method of use |
US3977813A (en) * | 1971-10-18 | 1976-08-31 | Nuclear Battery Corporation | Novel getter and process |
US4127361A (en) * | 1976-11-29 | 1978-11-28 | S.A.E.S. Getters S.P.A. | Air-bakeable water-proof getter device and method of manufacturing same |
US4264280A (en) * | 1974-03-12 | 1981-04-28 | S.A.E.S. Getters S.P.A. | Water vapor releasing composition of matter and device, and process for their use |
USRE31388E (en) * | 1975-12-12 | 1983-09-20 | Saes Getters, S.P.A. | Air-bakeable water-proof getter device and method of manufacturing |
US4407657A (en) * | 1980-05-16 | 1983-10-04 | U.S. Philips Corporation | Gettering device and method |
US4416642A (en) * | 1981-07-28 | 1983-11-22 | Rca Corporation | Method for preventing blocked apertures in a cathode ray tube caused by charged particles |
US4449952A (en) * | 1979-10-09 | 1984-05-22 | The United States Of America As Represented By The Secretary Of The Army | Method of operating a cold cathode-cold reservoir thyratron |
US4481441A (en) * | 1981-03-24 | 1984-11-06 | U.S. Philips Corporation | Method of manufacturing a picture display tube having a gas-absorbing layer; picture display tube thus manufactured, and gettering device suitable for such a method |
US4504765A (en) * | 1981-05-20 | 1985-03-12 | Saes Getters Spa | Support tab for getter devices |
US4665343A (en) * | 1984-07-05 | 1987-05-12 | S.A.E.S. Getters S.P.A. | Low methane getter device |
US6583559B1 (en) | 1999-06-24 | 2003-06-24 | Saes Getter S.P.A. | Getter device employing calcium evaporation |
US6793461B2 (en) | 2001-10-29 | 2004-09-21 | Saes Getters S.P.A. | Device and method for producing a calcium-rich getter thin film |
US6851997B2 (en) | 2001-11-14 | 2005-02-08 | Saes Getters S.P.A. | Process for depositing calcium getter thin films inside systems operating under vacuum |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2659609A1 (de) * | 1976-12-30 | 1978-07-20 | Patra Patent Treuhand | Elektrische gluehlampe |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL132102C (fr) | 1965-02-25 | 1900-01-01 | ||
US3388955A (en) | 1965-02-25 | 1968-06-18 | Getters Spa | Process for producing within electron tubes,in particular television picture tubes,a thin metallic film capable of sorbing their residual gases |
-
1970
- 1970-05-04 US US34319A patent/US3669567A/en not_active Expired - Lifetime
- 1970-06-11 NL NLAANVRAGE7008526,A patent/NL172284C/xx not_active IP Right Cessation
- 1970-06-12 FR FR7021660A patent/FR2051155A5/fr not_active Expired
- 1970-06-12 DE DE2028949A patent/DE2028949C3/de not_active Expired
- 1970-06-12 SU SU1441304A patent/SU513652A3/ru active
- 1970-06-12 GB GB2864770A patent/GB1322757A/en not_active Expired
- 1970-06-12 CA CA085356A patent/CA920639A/en not_active Expired
- 1970-06-15 JP JP5108770A patent/JPS5426869B1/ja active Pending
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3977813A (en) * | 1971-10-18 | 1976-08-31 | Nuclear Battery Corporation | Novel getter and process |
US3927953A (en) * | 1973-05-18 | 1975-12-23 | Getters Spa | Getter device and method of use |
US3920355A (en) * | 1974-02-28 | 1975-11-18 | Getters Spa | Gettering |
US4264280A (en) * | 1974-03-12 | 1981-04-28 | S.A.E.S. Getters S.P.A. | Water vapor releasing composition of matter and device, and process for their use |
USRE31388E (en) * | 1975-12-12 | 1983-09-20 | Saes Getters, S.P.A. | Air-bakeable water-proof getter device and method of manufacturing |
US4127361A (en) * | 1976-11-29 | 1978-11-28 | S.A.E.S. Getters S.P.A. | Air-bakeable water-proof getter device and method of manufacturing same |
US4449952A (en) * | 1979-10-09 | 1984-05-22 | The United States Of America As Represented By The Secretary Of The Army | Method of operating a cold cathode-cold reservoir thyratron |
US4407657A (en) * | 1980-05-16 | 1983-10-04 | U.S. Philips Corporation | Gettering device and method |
US4481441A (en) * | 1981-03-24 | 1984-11-06 | U.S. Philips Corporation | Method of manufacturing a picture display tube having a gas-absorbing layer; picture display tube thus manufactured, and gettering device suitable for such a method |
US4504765A (en) * | 1981-05-20 | 1985-03-12 | Saes Getters Spa | Support tab for getter devices |
US4416642A (en) * | 1981-07-28 | 1983-11-22 | Rca Corporation | Method for preventing blocked apertures in a cathode ray tube caused by charged particles |
US4665343A (en) * | 1984-07-05 | 1987-05-12 | S.A.E.S. Getters S.P.A. | Low methane getter device |
US6583559B1 (en) | 1999-06-24 | 2003-06-24 | Saes Getter S.P.A. | Getter device employing calcium evaporation |
US6793461B2 (en) | 2001-10-29 | 2004-09-21 | Saes Getters S.P.A. | Device and method for producing a calcium-rich getter thin film |
US20040195968A1 (en) * | 2001-10-29 | 2004-10-07 | Saes Getters S.P.A. | Composition used in producing calcium-rich getter thin film |
US20050163930A1 (en) * | 2001-10-29 | 2005-07-28 | Saes Getters S.P.A. | Device and method for producing a calcium-rich getter thin film |
US7083825B2 (en) * | 2001-10-29 | 2006-08-01 | Saes Getters S.P.A. | Composition used in producing calcium-rich getter thin film |
US6851997B2 (en) | 2001-11-14 | 2005-02-08 | Saes Getters S.P.A. | Process for depositing calcium getter thin films inside systems operating under vacuum |
Also Published As
Publication number | Publication date |
---|---|
JPS5426869B1 (fr) | 1979-09-06 |
NL172284C (nl) | 1983-08-01 |
NL172284B (nl) | 1983-03-01 |
GB1322757A (en) | 1973-07-11 |
DE2028949B2 (de) | 1979-04-12 |
CA920639A (en) | 1973-02-06 |
DE2028949A1 (fr) | 1970-12-17 |
NL7008526A (fr) | 1970-12-16 |
FR2051155A5 (fr) | 1971-04-02 |
SU513652A3 (ru) | 1976-05-05 |
DE2028949C3 (de) | 1979-12-06 |
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