US3646948A - Hydraulic control system for a washing machine - Google Patents

Hydraulic control system for a washing machine Download PDF

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US3646948A
US3646948A US3646948DA US3646948A US 3646948 A US3646948 A US 3646948A US 3646948D A US3646948D A US 3646948DA US 3646948 A US3646948 A US 3646948A
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fill
valve
drain
water
valves
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Stuart E Athey
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Whirlpool Corp
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Hobart Manfacturing Co
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Assigned to KITCHENAID, INC. reassignment KITCHENAID, INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: HOBART CORPORATION
Assigned to TRABOH CORPORATION reassignment TRABOH CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: KITCHENAID, INC.
Assigned to EMERSON CONTRACT DIVISION, INC. reassignment EMERSON CONTRACT DIVISION, INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: TRABOH CORPORATION
Assigned to WHIRLPOOL CORPORATION reassignment WHIRLPOOL CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: EMERSON CONTRACT DIVISION, INC.
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    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47LDOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L15/00Washing or rinsing machines for crockery or tableware
    • A47L15/42Details
    • A47L15/4214Water supply, recirculation or discharge arrangements; Devices therefor
    • A47L15/4219Water recirculation
    • AHUMAN NECESSITIES
    • A47FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
    • A47LDOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
    • A47L15/00Washing or rinsing machines for crockery or tableware
    • A47L15/42Details
    • A47L15/4214Water supply, recirculation or discharge arrangements; Devices therefor
    • A47L15/4217Fittings for water supply, e.g. valves or plumbing means to connect to cold or warm water lines, aquastops
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/85954Closed circulating system

Definitions

  • FIG-l ⁇ J INVENTOR STUART
  • This application is a continuation-in-part of now abandoned application Ser. No. 789,296, filed Jan. 6, I969.
  • the present invention is directed to an improved hydraulic control system which is ideally suited for controlling the drain of an automatic dishwashing machine as outlined above.
  • the system utilizes the selective operation of the two separate solenoid-actuated fill valves in the water supply line to control the operation of a water pressure actuated device.
  • a normally closed pressure-actuated diaphragm valve is mounted within the drain line to protect against back draining or siphoning into the machine, and this diaphragm drain valve is actuated by the water pressure obtained by tapping the water supply line between the two solenoid-actuated fill valves.
  • the drain valve is constructed to open when the upstream fill valve is open and the downstream fill valve is closed.
  • both the fill valves are open to supply water to the tank, the water pressure to thedrain valve is reduced causing the drain valve to close. Furthermore, if the machine is stopped during draining when only the upstream fill valve is open, the downstream fill valve is momentarily opened to provide for closing of the drain valve and thereby assure that the drain water will not flow or siphon back into the wash chamber.
  • a primary advantage of a drain control system constructed in accordance with the invention is the elimination of a solenoid for actuating the drain valve without sacrificing the water overflow protection provided by the two solenoid fill valves in the water supply line and without sacrificing the protection against back flowing or siphoning of drain water into the tank. Furthermore, since the two solenoid fill valves and the drain valve are normally located in the same general area of an under-the-counter dishwashing machine, that is, in the lower front portion of the machine, it is within the scope of the invention to construct the fill valves and the drain valve within a common housing or body which reduces the overall production costs of the valves.
  • FIG. 1 is a side elevational view of a dishwashing machine with a portion broken away to illustrate somewhat diagram matically a drain control system constructed in accordance with the invention.
  • FIG. 2 is a schematic fluid diagram for operating the drain control system employed in the dishwasher shown in FIG. 1,
  • FIG. I shows a typical front loading type dishwashing machine including an outer cabinet indicated generally at 10 which encloses a tank 11 having a bottom 12 and defining a wash chamber 14. Access to the wash chamber 14 is provided by a door 15 operable between a vertical closed position and a horizontal open position and which is adapted to be sealed tightly against the tank 11 by actuating the latch 16. Tableware and food preparing articles are supported within the cleansing chamber 14 by one or more racks 17 which are adapted to be moved out over the door 15 when in the open position for convenient loading and unloading. While a front loading type dishwashing machine is illustrated, it is to be understood that the drain control system according to the invention may be employed in other types of dishwash ing machines, as for example, a top opening portable dishwasher.
  • the bottom 12 slopes downwardly towards the center so that the liquid collecting thereon drains into a sump 20 having a bottom wall 23.
  • a main recirculating pump 25 is located within the sump 20 and has an inlet surrounded by an annular filter 26. The discharge of the pump 25 is connected to a conduit (not shown) which supports a rotatable reaction arm 28 having jet openings for spraying water upwardly over the articles supported by the racks 17.
  • a drain pump 30 is mounted on the bottom wall 23 of the sump 20 and is secured to the upper bearing bracket 31 of a motor 32. As shown in the aforementioned patent, the upwardly projecting shaft of the motor 32 drives the impellers of both the main recirculating pump 25 and the drain pump 30. Water is supplied to the chamber 14 through a fill line 35 which extends to a fill airgap 36 mounted on a sidewall of the tank 11. A pair of valves 38 and 40 each actuated by a corresponding solenoid 42, are mounted within the fill line 35, and both valves 38 and 40 have a common housing or body 44 which supports the two solenoids 42.
  • a normally closed pressure-actuated drain valve 45 is mounted within a drain line 46 connected to the drain pump 30, and the valve '45 includes a diaphragm actuator 48.
  • the valve 45 and diaphragm actuator 48 are enclosed within the body 44 with one side of the diaphragm connected by a line or passageway 52 to the fill line 35 between the fill valves 38 and 40. The other side of the diaphragm is open to atmosphere.
  • the motor 31 and the solenoids 42 of the fill valves 38 and 40 are automatically controlled according to a predetermined sequence or program by a motor driven timer 50 supplied with electrical power from lines L and L Water is introduced into the chamber 14 by opening both of the fill valves 38 and 40.
  • a motor driven timer 50 supplied with electrical power from lines L and L Water is introduced into the chamber 14 by opening both of the fill valves 38 and 40.
  • fill valves 38 and 40 are closed.
  • fill valve 38 is opened which pressurizes passageway 52 thereby pressurizing the diaphragm actuator 48 which opens the drain valve 45.
  • fill valve 40 is opened and the operation is repeated for another wash or rinse period.
  • fill valve 38 After the final drain when fill valve 38 is open and fill valve 40 is closed to open drain valve 45, fill valve 38 is closed and fill valve 40 is momentarily opened so that the pressure on the diaphragm actuator is released and drain valve 45 returns to its normally closed position when the dishwashing machine is not in use.
  • a centrifugally actuated switch 55 is mounted on the lower end of the motor 31 and is located within a line 56 which connects the power supply line L to the line which connects the timer 50 to the solenoid 42 for the downstream fill valve 40.
  • a switch 58 is located within the line 56 and is actuated by operating the latch 16. When the latch handle is raised to permit opening the door 15, the switch 58 closes. When the door is locked, the switch 58 is open.
  • the switch 55 consists of back contacts on the centrifugal starting switch for the motor 31 and is normally open when the motor is stopped.
  • the switches 55 and 58 function to prevent the drain valve 45 from remaining open in the event the door 15 is opened during a drain period when the upstream fill valve 38 is open and the downstream fill valve 40 is closed. That is, if the door 15 is open when water is being drained from the wash chamber, for example, to add a forgotten dish, the upstream fill valve 38 will close, but the downstream fill valve 40 will remain open momentarily by power supplied through the switches 55 and 58 until the speed of the shaft of the motor 31 drops to the speed when the centrifugal switch 55opens.
  • the drain control system of the invention eliminates the need for an additional solenoid to actuate the drain valve 45 as well as the noise which is produced by the drain valve solenoid. That is, the drain valve solenoid is replaced by a less expensive and quieter fluid pressure actuator 48 which, in effect, is controlled by the pressure differential across the fill valve 40. Furthermore, by incorporating all three valves 38, 40 and 45 and the diaphragm actuator 48 within the valve body 44, the production cost of the fill and drain valves is significantly reduced as well as the labor cost for installing the valves on the dishwashing machine. Moreover, the combination of the two fill valves 38 and 40 effectively eliminates the possibility of water overflowing the chamber 14.
  • the solenoid 42 for the downstream fill valve 40 might be energized independent of the timer cam actuated switch by a switch mechanically actuated by operation of the drain valve 45 or solely by the door latch switch 58.
  • the latter method of actuation would require a solenoid 42 capable of continuous operation.
  • a dishwashing machine comprising a tank defining a chamber having rack means therein for receiving articles to be cleaned, a water supply line extending to said tank, first and second fill valves within said water supply line, said first fill valve being located upstream of said second fill valve relative to the flow of water within said supply line, means including a motor for circulating water within said chamber, means including a drain line for removing water from said chamber, a normally closed drain valve within said drain line, water pressure actuated means for operating said drain valve, means defining a water passageway connecting said pressure-actuated means to said water supply line between said first and second fill valves for controlling the operation of said drain valve in response to selected operation of said fill valves, timer means for actuating said motor and said fill valves according to a predetermined program, said drain valve being open when said first fill valve is open and said second fill valve is closed, said drain valve being closed when both said fill valves are either open or closed or when said first fill valve is closed and said second fill valve is open, and control means separate from said time
  • a washing machine as defined in claim 1 including a housing supporting both said fill valves and said water pressure actuated means.

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  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Washing And Drying Of Tableware (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

A dishwashing machine has two solenoid actuated fill valves within a water supply line, and pressure tap between the solenoid valves is connected to a normally closed pressure actuated drain valve within a drain line to provide for controlling the drain valve in response to selective actuation of the fill valves. The fill valves are controlled by a timer according to a predetermined sequence, and the downstream fill valve is also actuated by a centrifugal switch responsive to operation of the motor for the recirculating means.

Description

United States Patent Athey 1 Mar. 7, 1972 [54] HYDRAULIC CONTROL SYSTEM FOR 3,353,796 11/1967 Roberts ..134/% x A WASHING MACHINE Continuation-impart of Ser. No. 789,296, Jan. 6, 1969, abandoned.
U.S. CI. ..134/57 D, 134/97, 134/98, 134/186, 137/563 Int. Cl ..B08b 3/02 Field ofSearch ..134/56 D, 57 D,57 DL, 58 D, 134/97, 98, 186; 137/563 Inventor:
Assignee:
References Cited UNITED STATES PATENTS 4/1939 Jones ..l34/57 D 3,415,276 12/1968 Lind et a1 ..134/56 D X 1 Primary Examiner-Robert L. Bleutge Attorney-Marechal, Biebel, French & Bug
[5 7] ABSTRACT 4 Claims, 2 Drawing Figures DRAIN PATENTEDMAR 7 m2 3,646, 948
' FIG-l \J INVENTOR STUART E. ATHEY ATTOZVEYSI HYDRAULIC CONTROL SYSTEM FOR A WASHING MACHINE Cross-References to Related Applications This application is a continuation-in-part of now abandoned application Ser. No. 789,296, filed Jan. 6, I969.
BACKGROUND OF THE INVENTION .In the field of dishwashing machines such as disclosed in Geiger et al. US. Pat. No. 3,323,529, which issued to the assignee of the present invention, water is supplied to a tank defining a washing chamber through a line having a solenoidactuated fill valve. The water is recirculated within the tank by a motor-driven recirculating pump connected toa reaction spray arm, and the water is removed from the tank by a drain pump which is driven either by the same motor driving the recirculating pump or by a separate motor. When the main recirculating pump and the drain pump are driven by the same nonreversing motor, it is common to employ a solenoid actuated drain valve in the drain line leading from the drain pump. The dishwashing machine also incorporates a motor-driven timer which controls the actuation of the fill and drain valves and the motor for each pump in accordance with a programmed cycle of operation.
In recent years, it has been found desirable to employ two solenoid-actuated fill valves in the water supply line to a dishwashing machine, especially in the water supply line to a machine which is permanently installed under a countertop. The purpose of the two solenoid-actuated fill valves is to prevent water from overflowing the dishwashing machine tank in case one of the fill valves accidentally leaks or sticks in an open position by a foreign particle received from the water supply line. While the second solenoid fill valve adds cost to the machine, it is believed that this cost is justified in a highquality dishwashing machine in view of the fact that it is seemingly impossible to construct a solenoid-actuated fill valve which will never leak and which is impossible to stick in the open position.
SUMMARY OF THE INVENTION The present invention is directed to an improved hydraulic control system which is ideally suited for controlling the drain of an automatic dishwashing machine as outlined above. The system utilizes the selective operation of the two separate solenoid-actuated fill valves in the water supply line to control the operation of a water pressure actuated device. In accordance with one embodiment of the invention, a normally closed pressure-actuated diaphragm valve is mounted within the drain line to protect against back draining or siphoning into the machine, and this diaphragm drain valve is actuated by the water pressure obtained by tapping the water supply line between the two solenoid-actuated fill valves. The drain valve is constructed to open when the upstream fill valve is open and the downstream fill valve is closed. However, when both the fill valves are open to supply water to the tank, the water pressure to thedrain valve is reduced causing the drain valve to close. Furthermore, if the machine is stopped during draining when only the upstream fill valve is open, the downstream fill valve is momentarily opened to provide for closing of the drain valve and thereby assure that the drain water will not flow or siphon back into the wash chamber.
A primary advantage of a drain control system constructed in accordance with the invention is the elimination of a solenoid for actuating the drain valve without sacrificing the water overflow protection provided by the two solenoid fill valves in the water supply line and without sacrificing the protection against back flowing or siphoning of drain water into the tank. Furthermore, since the two solenoid fill valves and the drain valve are normally located in the same general area of an under-the-counter dishwashing machine, that is, in the lower front portion of the machine, it is within the scope of the invention to construct the fill valves and the drain valve within a common housing or body which reduces the overall production costs of the valves.
BRIEF DESCRIPTION OF THE DRAWING FIG. 1 is a side elevational view of a dishwashing machine with a portion broken away to illustrate somewhat diagram matically a drain control system constructed in accordance with the invention; and
FIG. 2 is a schematic fluid diagram for operating the drain control system employed in the dishwasher shown in FIG. 1,
DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the drawing, FIG. I shows a typical front loading type dishwashing machine including an outer cabinet indicated generally at 10 which encloses a tank 11 having a bottom 12 and defining a wash chamber 14. Access to the wash chamber 14 is provided by a door 15 operable between a vertical closed position and a horizontal open position and which is adapted to be sealed tightly against the tank 11 by actuating the latch 16. Tableware and food preparing articles are supported within the cleansing chamber 14 by one or more racks 17 which are adapted to be moved out over the door 15 when in the open position for convenient loading and unloading. While a front loading type dishwashing machine is illustrated, it is to be understood that the drain control system according to the invention may be employed in other types of dishwash ing machines, as for example, a top opening portable dishwasher.
As shown in FIG. I, the bottom 12 slopes downwardly towards the center so that the liquid collecting thereon drains into a sump 20 having a bottom wall 23. A main recirculating pump 25 is located within the sump 20 and has an inlet surrounded by an annular filter 26. The discharge of the pump 25 is connected to a conduit (not shown) which supports a rotatable reaction arm 28 having jet openings for spraying water upwardly over the articles supported by the racks 17.
A drain pump 30 is mounted on the bottom wall 23 of the sump 20 and is secured to the upper bearing bracket 31 of a motor 32. As shown in the aforementioned patent, the upwardly projecting shaft of the motor 32 drives the impellers of both the main recirculating pump 25 and the drain pump 30. Water is supplied to the chamber 14 through a fill line 35 which extends to a fill airgap 36 mounted on a sidewall of the tank 11. A pair of valves 38 and 40 each actuated by a corresponding solenoid 42, are mounted within the fill line 35, and both valves 38 and 40 have a common housing or body 44 which supports the two solenoids 42.
A normally closed pressure-actuated drain valve 45 is mounted within a drain line 46 connected to the drain pump 30, and the valve '45 includes a diaphragm actuator 48. Preferably, the valve 45 and diaphragm actuator 48 are enclosed within the body 44 with one side of the diaphragm connected by a line or passageway 52 to the fill line 35 between the fill valves 38 and 40. The other side of the diaphragm is open to atmosphere.
In operation, the motor 31 and the solenoids 42 of the fill valves 38 and 40 are automatically controlled according to a predetermined sequence or program by a motor driven timer 50 supplied with electrical power from lines L and L Water is introduced into the chamber 14 by opening both of the fill valves 38 and 40. When a predetermined amount of water has been supplied to the chamber 14, fill valves 38 and 40 are closed. After the water is circulated by the main pump 25 for the desired length of time, fill valve 38 is opened which pressurizes passageway 52 thereby pressurizing the diaphragm actuator 48 which opens the drain valve 45. After the water is removed from the tank, fill valve 40 is opened and the operation is repeated for another wash or rinse period. After the final drain when fill valve 38 is open and fill valve 40 is closed to open drain valve 45, fill valve 38 is closed and fill valve 40 is momentarily opened so that the pressure on the diaphragm actuator is released and drain valve 45 returns to its normally closed position when the dishwashing machine is not in use.
A centrifugally actuated switch 55 is mounted on the lower end of the motor 31 and is located within a line 56 which connects the power supply line L to the line which connects the timer 50 to the solenoid 42 for the downstream fill valve 40. A switch 58 is located within the line 56 and is actuated by operating the latch 16. When the latch handle is raised to permit opening the door 15, the switch 58 closes. When the door is locked, the switch 58 is open. Preferably, the switch 55 consists of back contacts on the centrifugal starting switch for the motor 31 and is normally open when the motor is stopped.
As mentioned above, the switches 55 and 58 function to prevent the drain valve 45 from remaining open in the event the door 15 is opened during a drain period when the upstream fill valve 38 is open and the downstream fill valve 40 is closed. That is, if the door 15 is open when water is being drained from the wash chamber, for example, to add a forgotten dish, the upstream fill valve 38 will close, but the downstream fill valve 40 will remain open momentarily by power supplied through the switches 55 and 58 until the speed of the shaft of the motor 31 drops to the speed when the centrifugal switch 55opens. By bypassing the timer 50 to hold the downstream fill valve 40 open momentarily, water pressure within the line 52 is discharged through the valve 40 so that the drain valve 45 will close and thereby prevent drain water from back flowing or siphoning through the drain valve 46 and into the sump 20.
As another advantage, the drain control system of the invention eliminates the need for an additional solenoid to actuate the drain valve 45 as well as the noise which is produced by the drain valve solenoid. That is, the drain valve solenoid is replaced by a less expensive and quieter fluid pressure actuator 48 which, in effect, is controlled by the pressure differential across the fill valve 40. Furthermore, by incorporating all three valves 38, 40 and 45 and the diaphragm actuator 48 within the valve body 44, the production cost of the fill and drain valves is significantly reduced as well as the labor cost for installing the valves on the dishwashing machine. Moreover, the combination of the two fill valves 38 and 40 effectively eliminates the possibility of water overflowing the chamber 14.
While the form of apparatus herein described constitutes a preferred embodiment of the invention, it is to be understood that the invention is not limited to this precise form of apparatus, and that changes may be made therein without departing from the scope of the invention. For example, in place of the centrifugally actuated switch 55, the solenoid 42 for the downstream fill valve 40 might be energized independent of the timer cam actuated switch by a switch mechanically actuated by operation of the drain valve 45 or solely by the door latch switch 58. The latter method of actuation would require a solenoid 42 capable of continuous operation.
What is claimed is:
l. A dishwashing machine comprising a tank defining a chamber having rack means therein for receiving articles to be cleaned, a water supply line extending to said tank, first and second fill valves within said water supply line, said first fill valve being located upstream of said second fill valve relative to the flow of water within said supply line, means including a motor for circulating water within said chamber, means including a drain line for removing water from said chamber, a normally closed drain valve within said drain line, water pressure actuated means for operating said drain valve, means defining a water passageway connecting said pressure-actuated means to said water supply line between said first and second fill valves for controlling the operation of said drain valve in response to selected operation of said fill valves, timer means for actuating said motor and said fill valves according to a predetermined program, said drain valve being open when said first fill valve is open and said second fill valve is closed, said drain valve being closed when both said fill valves are either open or closed or when said first fill valve is closed and said second fill valve is open, and control means separate from said timer means for at least momentarily opening said second fill valve when said first fill valve is closed to assure a release of water pressure within said passageway when both said fill valves are closed.
2. A washing machine as defined in claim 1 wherein said latter control means comprises a centrifugally actuated switch operated by said motor.
3. A washing machine as defined in claim 2 wherein said switch is normally open when the shaft of said motor is stationary.
4. A washing machine as defined in claim 1 including a housing supporting both said fill valves and said water pressure actuated means.

Claims (4)

1. A dishwashing machine comprising a tank defining a chamber having rack means therein for receiving articles to be cleaned, a water supply line extending to said tank, first and second fill valves within said water supply line, said first fill valve being located upstream of said second fill valve relative to the flow of water within said supply line, means including a motor for circulating water within said chamber, means including a drain line for removing water from said chamber, a normally closed drain valve within said drain line, water pressure actuated means for operating said drain valve, means defining a water passageway connecting said pressure-actuated means to said water supply line between said first and second fill valves for controlling the operation of said drain valve in response to selected operation of said fill valves, timer means for actuating said motor and said fill valves according to a predetermined program, said drain valve being open when said first fill valve is open and said second fill valve is closed, said drain valve being closed when both said fill valves are either open or closed or when said first fill valve is closed and said second fill valve is open, and control means separate from said timer means for at least momentarily opening said second fill valve when said first fill valve is closed to assure a release of water pressure within said passageway when both said fill valves are closed.
2. A washing machine as defined in claim 1 wherein said latter control means comprises a centrifugally actuated switch operated by said motor.
3. A washing machine as defined in claim 2 wherein said switch is normally open when the shaft of said motor is stationary.
4. A washing machine as defined in claim 1 including a housing supporting both said fill valves and said water pressure actuated means.
US3646948D 1969-01-06 1970-09-14 Hydraulic control system for a washing machine Expired - Lifetime US3646948A (en)

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US78929669A 1969-01-06 1969-01-06
US7203970A 1970-09-14 1970-09-14

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DE (1) DE1965723B2 (en)
FR (1) FR2027825B1 (en)
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NL (1) NL7000056A (en)

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US3949782A (en) * 1973-04-05 1976-04-13 Hobart Corporation Control circuit for dishwasher
US4119116A (en) * 1976-05-06 1978-10-10 Whirlpool Corporation Receptacle fill apparatus
US4441521A (en) * 1981-05-13 1984-04-10 Eaton Corporation Appliance control valve assembly with opposite magnetic polarity solenoid coils
US4450863A (en) * 1981-05-13 1984-05-29 Eaton Corporation Series connected solenoid appliance control valve assembly
US4657036A (en) * 1983-12-12 1987-04-14 Design & Manufacturing Corporation Combination water inlet, vent stack, blower and blower housing assembly for an automatic dishwasher
US20030198895A1 (en) * 2002-03-04 2003-10-23 Toma Dorel Ioan Method of passivating of low dielectric materials in wafer processing
US20040200512A1 (en) * 2003-04-14 2004-10-14 Clouser Michael T. Fill control for appliance
US20040229449A1 (en) * 2000-04-25 2004-11-18 Biberger Maximilian A. Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
US20040231707A1 (en) * 2003-05-20 2004-11-25 Paul Schilling Decontamination of supercritical wafer processing equipment
US20050022850A1 (en) * 2003-07-29 2005-02-03 Supercritical Systems, Inc. Regulation of flow of processing chemistry only into a processing chamber
US20050067002A1 (en) * 2003-09-25 2005-03-31 Supercritical Systems, Inc. Processing chamber including a circulation loop integrally formed in a chamber housing
US20050191865A1 (en) * 2002-03-04 2005-09-01 Gunilla Jacobson Treatment of a dielectric layer using supercritical CO2
US20050227187A1 (en) * 2002-03-04 2005-10-13 Supercritical Systems Inc. Ionic fluid in supercritical fluid for semiconductor processing
US20060102282A1 (en) * 2004-11-15 2006-05-18 Supercritical Systems, Inc. Method and apparatus for selectively filtering residue from a processing chamber
US20060185694A1 (en) * 2005-02-23 2006-08-24 Richard Brown Rinsing step in supercritical processing
US20060213820A1 (en) * 2005-03-23 2006-09-28 Bertram Ronald T Removal of contaminants from a fluid
US20060223899A1 (en) * 2005-03-30 2006-10-05 Hillman Joseph T Removal of porogens and porogen residues using supercritical CO2
US20060219268A1 (en) * 2005-03-30 2006-10-05 Gunilla Jacobson Neutralization of systemic poisoning in wafer processing
US20060223314A1 (en) * 2005-03-30 2006-10-05 Paul Schilling Method of treating a composite spin-on glass/anti-reflective material prior to cleaning
US20060225769A1 (en) * 2005-03-30 2006-10-12 Gentaro Goshi Isothermal control of a process chamber
US20060226117A1 (en) * 2005-03-29 2006-10-12 Bertram Ronald T Phase change based heating element system and method
US20060228874A1 (en) * 2005-03-30 2006-10-12 Joseph Hillman Method of inhibiting copper corrosion during supercritical CO2 cleaning
US20070000519A1 (en) * 2005-06-30 2007-01-04 Gunilla Jacobson Removal of residues for low-k dielectric materials in wafer processing
US20090126804A1 (en) * 2007-10-23 2009-05-21 Woongjin Codway Co., Ltd. Device for controlling water level
US9596974B1 (en) * 2015-09-22 2017-03-21 Haier Us Appliance Solutions, Inc. Fluid circulation system for dishwasher appliances

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US3415276A (en) * 1966-12-16 1968-12-10 Whirlpool Co Fluid control system

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US3415276A (en) * 1966-12-16 1968-12-10 Whirlpool Co Fluid control system

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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DE1965723A1 (en) 1970-08-13
FR2027825B1 (en) 1974-04-26
GB1292872A (en) 1972-10-18
FR2027825A1 (en) 1970-10-02
NL7000056A (en) 1970-07-08
DE1965723B2 (en) 1972-12-07

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