US3630856A - Electrodeposition of ruthenium - Google Patents

Electrodeposition of ruthenium Download PDF

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Publication number
US3630856A
US3630856A US21533A US3630856DA US3630856A US 3630856 A US3630856 A US 3630856A US 21533 A US21533 A US 21533A US 3630856D A US3630856D A US 3630856DA US 3630856 A US3630856 A US 3630856A
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ruthenium
indium
electrodeposition
coatings
gallium
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US21533A
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Andre Meyer
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OMI International Corp
Sel Rex Corp
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Sel Rex Corp
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Assigned to OXY METAL INDUSTRIES CORPORATION reassignment OXY METAL INDUSTRIES CORPORATION CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). 4-09-74 Assignors: OXY METAL FINISHING CORPORATION
Assigned to HOOKER CHEMICALS & PLASTICS CORP. reassignment HOOKER CHEMICALS & PLASTICS CORP. MERGER (SEE DOCUMENT FOR DETAILS). Assignors: OXY METAL INDUSTRIES CORPORATION
Assigned to OCCIDENTAL CHEMICAL CORPORATION reassignment OCCIDENTAL CHEMICAL CORPORATION CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). EFFECTIVE MARCH 30, 1982. Assignors: HOOKER CHEMICAS & PLASTICS CORP.
Assigned to OMI INTERNATIONAL CORPORATION reassignment OMI INTERNATIONAL CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: OCCIDENTAL CHEMICAL CORPORATION
Assigned to MANUFACTURERS HANOVER TRUST COMPANY, A CORP OF reassignment MANUFACTURERS HANOVER TRUST COMPANY, A CORP OF SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: INTERNATIONAL CORPORATION, A CORP OF DE
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/50Electroplating: Baths therefor from solutions of platinum group metals
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/54Electroplating: Baths therefor from solutions of metals not provided for in groups C25D3/04 - C25D3/50

Definitions

  • Thick electrodeposits of ruthenium can be obtained by adding an element selected from gallium, indium, and thallium in a stable and soluble form. The deposits obtained are primarily characterized by their low stress and absence of surface cracks at thicknesses up to about millimicrons.
  • the present invention relates to a method for the electrodeposition of ruthenium and to an aqueous bath for carrying out this method.
  • the ruthenium coatings so obtained are characterized by severe inner stress, so that they show cracks when their thickness is above 1.0 to 1.5 m.
  • Today most commercial applications of parts plated with ruthenium require substantially thicker coatings, usually of the order of a minimum thickness of 2.5 ,um. to 5 ,um. or even, on occasion, somewhat thicker, up to about 10 m.
  • the object of the present invention is to permit the electrodeposition of ruthenium coatings of a thickness sufficient to meet contemporary industrial needs.
  • This invention is based on the discovery that the addition of one of the elements selected from gallium, indium and thallium in the form of a stable, soluble compound to a ruthenium plating solution, serves to severely reduce inner surface stress of the plated ruthenium to the point where relatively thick deposits of ruthenium electroplate can be obtained.
  • one of the elements selected from gallium, indium and thallium is added in concentration from 50 mg./l. up to saturation to an aqueous solution of a ruthenium compound which contains from about 0.5 g./l. to about 50 g./l. of ruthenium metal.
  • Ruthenium 10 g./l. as a complex of containing 34.4% in weight of ruthenium metal
  • Indium 5 g./l. (as sulfate)
  • Ammonium sulfamate 15 g./l. (conductivity salt) pH adjusted to 1.5 by means of NH OH or HCl or H 80 Temperature of the bath: 60 C. Current density: 1 amp.dm.
  • the light coatings produced on samples of brass precoated with a flash of gold, showing no visible cracks or micro-cracks, to thicknesses up to about 10 ,uI'IL, have been obtained at a plating rate of 12 mg./amp.min., that represent 1 ,um. in 9 minutes. These deposits contained about 1.2 to 1.5% indium.
  • Ruthenium 10 -g./l. as a complex of Indium: 3 g./l. (as sulfamate) Ammonium sulfamate: 5 g./l.
  • Bright coatings of ruthenium were obtained on brass samples precoated with a flash of gold which showed no visible cracks or micro-cracks, and for this thicknesses up to 10 ,um. These coatings were obtained at a plating rate of 11 m-g./amp.min. These deposits contained about 1.0 to 1.3% indium.
  • ruthenium Along with the deposit of ruthenium there will be a codeposit of the Group III-B metal chosen. That codeposit will generally be on the order of about 0.1% to 10.0% of the total content of the electrodeposit. At about 5 g./l. of a Group III-B metal, the metal will codeposit with ruthenium in a range of about 1.0 to 2.0%.
  • the cathodic efliciency increases with the temperature. Between 6.0 and it is practically constant. On the other hand, it shows a tendency to decrease while the current density increases.
  • the plating can be effected on any support permitting an electrodeposition, especially on the same supports as those which permit the coating of gold, like brass, nickel, titanium, etc.
  • a method for electrodepositing ruthenium by passing a current through an aqueous solution containing from about 0.5 g./l. to about 50 g./L of ruthenium and at least one element selected from the group consisting of gallium, indium and thallium in a stable and soluble form and in a concentration from about 50 mg./l. up to saturation, whereby ruthenium is deposited on the cathode.
  • An aqueous electroplating solution containing from about 0.5 g./1. to about 50 g./l. of ruthenium and at least one element selected from the group consisting of gallium,

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)

Abstract

THICK ELECTRODEPOSITS OF RUTHENIUM CAN BE OBTAINED BY ADDING AN ELEMENT SELECTED FROM GALLIUM, INDIUM, AND THALLIUM IN A STABLE AND SOLUBLE FORM. THE DEPOSITS OBTAINED ARE PRIMARILY CHARACTERIZED BY THEIR LOW STRESS AND ABSENCE OF SURFACE CRACKS AT THICKNESS UP TO ABOUT 10 MILLIMICRONS.

Description

United States Patent @fice 3,630,856 ELECTRODEPOSITION OF RUTHENIUM Andre Meyer, Geneva, Switzerland, assignor to Sel-Rex Corporation, Nutley, NJ.
No Drawing. Filed Mar. 20, 1970, Ser. No. 21,533 Claims priority, application Switzerland, Mar. 21, 1969, 4,277 69 Int. Cl. C23b /32 US. Cl. 204-43 2 Claims ABSTRACT OF THE DISCLOSURE Thick electrodeposits of ruthenium can be obtained by adding an element selected from gallium, indium, and thallium in a stable and soluble form. The deposits obtained are primarily characterized by their low stress and absence of surface cracks at thicknesses up to about millimicrons.
The present invention relates to a method for the electrodeposition of ruthenium and to an aqueous bath for carrying out this method.
It is known to electrolytically produce ruthenium coatings by using, as an electrolyte, a complex having the formula (NH [Ru Cl (H O') N], containing 34.4% in Weight of ruthenium metal, at several current densities.
The ruthenium coatings so obtained are characterized by severe inner stress, so that they show cracks when their thickness is above 1.0 to 1.5 m. Today most commercial applications of parts plated with ruthenium require substantially thicker coatings, usually of the order of a minimum thickness of 2.5 ,um. to 5 ,um. or even, on occasion, somewhat thicker, up to about 10 m.
The object of the present invention is to permit the electrodeposition of ruthenium coatings of a thickness sufficient to meet contemporary industrial needs. In particular, it is an object of the present invention to permit the production of ruthenium coatings of a thickness of up to about 10 ,um. while comprising no visible cracks even at a magnification of 500 times.
This invention is based on the discovery that the addition of one of the elements selected from gallium, indium and thallium in the form of a stable, soluble compound to a ruthenium plating solution, serves to severely reduce inner surface stress of the plated ruthenium to the point where relatively thick deposits of ruthenium electroplate can be obtained. In general, one of the elements selected from gallium, indium and thallium is added in concentration from 50 mg./l. up to saturation to an aqueous solution of a ruthenium compound which contains from about 0.5 g./l. to about 50 g./l. of ruthenium metal.
The addition of at least one metal selected from gallium, indium and thallium, as stable and water soluble compounds, results in coatings which are more ductile. These metallic compounds which appear in the cathodic film during the electrolysis modify the cathodic polarization and the crystallization phenomena, and produce coatings which are completely dilferent from those heretofore obtained by known methods, in their appearance (brighter and clearer), in their mechanical characteristics (more ductile, without cracks), and in their composition, the metals of addition being co-deposited with the ruthenium during the electrolysis. Some secondary eflfects due to the addition of these metals have also been found, especially a slight improvement of the cathodic elficiency, almost at high current density, and a higher power of macro and micro-repartition.
3,630,856 Patented Dec. 28, 1971 EXAMPLES (1) A bath has been prepared containing:
Ruthenium: 10 g./l. as a complex of containing 34.4% in weight of ruthenium metal Indium: 5 g./l. (as sulfate) Ammonium sulfamate: 15 g./l. (conductivity salt) pH adjusted to 1.5 by means of NH OH or HCl or H 80 Temperature of the bath: 60 C. Current density: 1 amp.dm.
The light coatings, produced on samples of brass precoated with a flash of gold, showing no visible cracks or micro-cracks, to thicknesses up to about 10 ,uI'IL, have been obtained at a plating rate of 12 mg./amp.min., that represent 1 ,um. in 9 minutes. These deposits contained about 1.2 to 1.5% indium.
(2) Deposits have been effected by means of the following bath:
Ruthenium: 10 -g./l. as a complex of Indium: 3 g./l. (as sulfamate) Ammonium sulfamate: 5 g./l.
Sulphamic acid: 5 g./l.
Sulfuric acid up to a pH of 1.0 to 1.5
Temperature of bath: 65 to C.
Current density: 1 amp.dm.
Bright coatings of ruthenium were obtained on brass samples precoated with a flash of gold which showed no visible cracks or micro-cracks, and for this thicknesses up to 10 ,um. These coatings were obtained at a plating rate of 11 m-g./amp.min. These deposits contained about 1.0 to 1.3% indium.
Along with the deposit of ruthenium there will be a codeposit of the Group III-B metal chosen. That codeposit will generally be on the order of about 0.1% to 10.0% of the total content of the electrodeposit. At about 5 g./l. of a Group III-B metal, the metal will codeposit with ruthenium in a range of about 1.0 to 2.0%.
The above examples have only an illustrative purpose and are not to be considered, in any way, as being limitative.
Experience has shown that indium and gallium give the best result, thallium being less soluble and presenting a tendency to crystallize partially.
The effects of the addition are substantial from a concentration of about 100 mg./l. the maximum eifect being obtained, however, with an addition of 5 g./l. of indium, for instance. Above this concentration, no substantial supplementary effect appears.
At pH higher than 1.5, the deposits obtained are less bright and have a greater tendency to present micro-cracks and pits which alter its appearance.
The cathodic efliciency increases with the temperature. Between 6.0 and it is practically constant. On the other hand, it shows a tendency to decrease while the current density increases.
The plating can be effected on any support permitting an electrodeposition, especially on the same supports as those which permit the coating of gold, like brass, nickel, titanium, etc.
So as to produce a better adherence and for limiting the formation of porous deposits, it is advantageous, in some cases, to apply on the support, before the electrodeposition of ruthenium, a flash of gold.
I claim:
1. A method for electrodepositing ruthenium by passing a current through an aqueous solution containing from about 0.5 g./l. to about 50 g./L of ruthenium and at least one element selected from the group consisting of gallium, indium and thallium in a stable and soluble form and in a concentration from about 50 mg./l. up to saturation, whereby ruthenium is deposited on the cathode.
2. An aqueous electroplating solution containing from about 0.5 g./1. to about 50 g./l. of ruthenium and at least one element selected from the group consisting of gallium,
References Cited Frederick A. Lowenheim: Modern Electroplating, p. 6, 1968.
GERALD L. KAPLAN, Primary Examiner US. Cl. X.R. 75172; 20447
US21533A 1969-03-21 1970-03-20 Electrodeposition of ruthenium Expired - Lifetime US3630856A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH427769A CH508055A (en) 1969-03-21 1969-03-21 Process for the electrolytic plating of ruthenium, and aqueous bath for the implementation of this process

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JP (1) JPS4926175B1 (en)
AT (1) AT301977B (en)
BE (1) BE747595A (en)
CA (1) CA920084A (en)
CH (1) CH508055A (en)
DE (1) DE2014122C3 (en)
DK (1) DK124960B (en)
ES (1) ES377773A1 (en)
FR (1) FR2037241B1 (en)
GB (1) GB1300153A (en)
NL (1) NL7004066A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3793162A (en) * 1971-12-17 1974-02-19 Int Nickel Co Electrodeposition of ruthenium
US4082625A (en) * 1976-06-08 1978-04-04 The International Nickel Company, Inc. Electrodeposition of ruthenium
US4082622A (en) * 1977-04-20 1978-04-04 Gte Automatic Electric Laboratories Incorporated Electrodeposition of ruthenium
US4375392A (en) * 1981-06-02 1983-03-01 Occidental Chemical Corporation Bath and process for the electrodeposition of ruthenium

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19741990C1 (en) * 1997-09-24 1999-04-29 Degussa Electrolyte for low-stress, crack-free ruthenium coatings

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB959052A (en) * 1962-01-02 1964-05-27 Johnson Matthey Co Ltd Improvements in and relating to the electro-deposition of rhodium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3793162A (en) * 1971-12-17 1974-02-19 Int Nickel Co Electrodeposition of ruthenium
US4082625A (en) * 1976-06-08 1978-04-04 The International Nickel Company, Inc. Electrodeposition of ruthenium
US4082622A (en) * 1977-04-20 1978-04-04 Gte Automatic Electric Laboratories Incorporated Electrodeposition of ruthenium
US4375392A (en) * 1981-06-02 1983-03-01 Occidental Chemical Corporation Bath and process for the electrodeposition of ruthenium

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DK124960B (en) 1972-12-11
CH508055A (en) 1971-05-31
BE747595A (en) 1970-08-31
DE2014122A1 (en) 1970-10-22
NL7004066A (en) 1970-09-23
GB1300153A (en) 1972-12-20
AT301977B (en) 1972-09-25
FR2037241B1 (en) 1973-03-16
FR2037241A1 (en) 1970-12-31
DE2014122B2 (en) 1978-10-05
JPS4926175B1 (en) 1974-07-06
CA920084A (en) 1973-01-30
ES377773A1 (en) 1972-05-16

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