US3630856A - Electrodeposition of ruthenium - Google Patents
Electrodeposition of ruthenium Download PDFInfo
- Publication number
- US3630856A US3630856A US21533A US3630856DA US3630856A US 3630856 A US3630856 A US 3630856A US 21533 A US21533 A US 21533A US 3630856D A US3630856D A US 3630856DA US 3630856 A US3630856 A US 3630856A
- Authority
- US
- United States
- Prior art keywords
- ruthenium
- indium
- electrodeposition
- coatings
- gallium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical group [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 title abstract description 27
- 229910052707 ruthenium Inorganic materials 0.000 title abstract description 24
- 238000004070 electrodeposition Methods 0.000 title description 6
- 229910052738 indium Inorganic materials 0.000 abstract description 12
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract description 12
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052733 gallium Inorganic materials 0.000 abstract description 8
- 229910052716 thallium Inorganic materials 0.000 abstract description 7
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 abstract description 7
- 239000002659 electrodeposit Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229910001369 Brass Inorganic materials 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- GEHMBYLTCISYNY-UHFFFAOYSA-N Ammonium sulfamate Chemical compound [NH4+].NS([O-])(=O)=O GEHMBYLTCISYNY-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 150000003304 ruthenium compounds Chemical class 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-N sulfamic acid Chemical compound NS(O)(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-N 0.000 description 1
- 230000000576 supplementary effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/54—Electroplating: Baths therefor from solutions of metals not provided for in groups C25D3/04 - C25D3/50
Definitions
- Thick electrodeposits of ruthenium can be obtained by adding an element selected from gallium, indium, and thallium in a stable and soluble form. The deposits obtained are primarily characterized by their low stress and absence of surface cracks at thicknesses up to about millimicrons.
- the present invention relates to a method for the electrodeposition of ruthenium and to an aqueous bath for carrying out this method.
- the ruthenium coatings so obtained are characterized by severe inner stress, so that they show cracks when their thickness is above 1.0 to 1.5 m.
- Today most commercial applications of parts plated with ruthenium require substantially thicker coatings, usually of the order of a minimum thickness of 2.5 ,um. to 5 ,um. or even, on occasion, somewhat thicker, up to about 10 m.
- the object of the present invention is to permit the electrodeposition of ruthenium coatings of a thickness sufficient to meet contemporary industrial needs.
- This invention is based on the discovery that the addition of one of the elements selected from gallium, indium and thallium in the form of a stable, soluble compound to a ruthenium plating solution, serves to severely reduce inner surface stress of the plated ruthenium to the point where relatively thick deposits of ruthenium electroplate can be obtained.
- one of the elements selected from gallium, indium and thallium is added in concentration from 50 mg./l. up to saturation to an aqueous solution of a ruthenium compound which contains from about 0.5 g./l. to about 50 g./l. of ruthenium metal.
- Ruthenium 10 g./l. as a complex of containing 34.4% in weight of ruthenium metal
- Indium 5 g./l. (as sulfate)
- Ammonium sulfamate 15 g./l. (conductivity salt) pH adjusted to 1.5 by means of NH OH or HCl or H 80 Temperature of the bath: 60 C. Current density: 1 amp.dm.
- the light coatings produced on samples of brass precoated with a flash of gold, showing no visible cracks or micro-cracks, to thicknesses up to about 10 ,uI'IL, have been obtained at a plating rate of 12 mg./amp.min., that represent 1 ,um. in 9 minutes. These deposits contained about 1.2 to 1.5% indium.
- Ruthenium 10 -g./l. as a complex of Indium: 3 g./l. (as sulfamate) Ammonium sulfamate: 5 g./l.
- Bright coatings of ruthenium were obtained on brass samples precoated with a flash of gold which showed no visible cracks or micro-cracks, and for this thicknesses up to 10 ,um. These coatings were obtained at a plating rate of 11 m-g./amp.min. These deposits contained about 1.0 to 1.3% indium.
- ruthenium Along with the deposit of ruthenium there will be a codeposit of the Group III-B metal chosen. That codeposit will generally be on the order of about 0.1% to 10.0% of the total content of the electrodeposit. At about 5 g./l. of a Group III-B metal, the metal will codeposit with ruthenium in a range of about 1.0 to 2.0%.
- the cathodic efliciency increases with the temperature. Between 6.0 and it is practically constant. On the other hand, it shows a tendency to decrease while the current density increases.
- the plating can be effected on any support permitting an electrodeposition, especially on the same supports as those which permit the coating of gold, like brass, nickel, titanium, etc.
- a method for electrodepositing ruthenium by passing a current through an aqueous solution containing from about 0.5 g./l. to about 50 g./L of ruthenium and at least one element selected from the group consisting of gallium, indium and thallium in a stable and soluble form and in a concentration from about 50 mg./l. up to saturation, whereby ruthenium is deposited on the cathode.
- An aqueous electroplating solution containing from about 0.5 g./1. to about 50 g./l. of ruthenium and at least one element selected from the group consisting of gallium,
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Electrolytic Production Of Metals (AREA)
Abstract
Description
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH427769A CH508055A (en) | 1969-03-21 | 1969-03-21 | Process for the electrolytic plating of ruthenium, and aqueous bath for the implementation of this process |
Publications (1)
Publication Number | Publication Date |
---|---|
US3630856A true US3630856A (en) | 1971-12-28 |
Family
ID=4273098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US21533A Expired - Lifetime US3630856A (en) | 1969-03-21 | 1970-03-20 | Electrodeposition of ruthenium |
Country Status (12)
Country | Link |
---|---|
US (1) | US3630856A (en) |
JP (1) | JPS4926175B1 (en) |
AT (1) | AT301977B (en) |
BE (1) | BE747595A (en) |
CA (1) | CA920084A (en) |
CH (1) | CH508055A (en) |
DE (1) | DE2014122C3 (en) |
DK (1) | DK124960B (en) |
ES (1) | ES377773A1 (en) |
FR (1) | FR2037241B1 (en) |
GB (1) | GB1300153A (en) |
NL (1) | NL7004066A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3793162A (en) * | 1971-12-17 | 1974-02-19 | Int Nickel Co | Electrodeposition of ruthenium |
US4082625A (en) * | 1976-06-08 | 1978-04-04 | The International Nickel Company, Inc. | Electrodeposition of ruthenium |
US4082622A (en) * | 1977-04-20 | 1978-04-04 | Gte Automatic Electric Laboratories Incorporated | Electrodeposition of ruthenium |
US4375392A (en) * | 1981-06-02 | 1983-03-01 | Occidental Chemical Corporation | Bath and process for the electrodeposition of ruthenium |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19741990C1 (en) * | 1997-09-24 | 1999-04-29 | Degussa | Electrolyte for low-stress, crack-free ruthenium coatings |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB959052A (en) * | 1962-01-02 | 1964-05-27 | Johnson Matthey Co Ltd | Improvements in and relating to the electro-deposition of rhodium |
-
1969
- 1969-03-21 CH CH427769A patent/CH508055A/en not_active IP Right Cessation
-
1970
- 1970-03-17 GB GB02824/70A patent/GB1300153A/en not_active Expired
- 1970-03-19 BE BE747595D patent/BE747595A/en unknown
- 1970-03-19 DE DE2014122A patent/DE2014122C3/en not_active Expired
- 1970-03-20 DK DK143670AA patent/DK124960B/en unknown
- 1970-03-20 AT AT264370A patent/AT301977B/en active
- 1970-03-20 FR FR707010260A patent/FR2037241B1/fr not_active Expired
- 1970-03-20 NL NL7004066A patent/NL7004066A/xx unknown
- 1970-03-20 US US21533A patent/US3630856A/en not_active Expired - Lifetime
- 1970-03-20 JP JP45023234A patent/JPS4926175B1/ja active Pending
- 1970-03-20 CA CA077959A patent/CA920084A/en not_active Expired
- 1970-03-21 ES ES377773A patent/ES377773A1/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3793162A (en) * | 1971-12-17 | 1974-02-19 | Int Nickel Co | Electrodeposition of ruthenium |
US4082625A (en) * | 1976-06-08 | 1978-04-04 | The International Nickel Company, Inc. | Electrodeposition of ruthenium |
US4082622A (en) * | 1977-04-20 | 1978-04-04 | Gte Automatic Electric Laboratories Incorporated | Electrodeposition of ruthenium |
US4375392A (en) * | 1981-06-02 | 1983-03-01 | Occidental Chemical Corporation | Bath and process for the electrodeposition of ruthenium |
Also Published As
Publication number | Publication date |
---|---|
DE2014122C3 (en) | 1979-05-10 |
DK124960B (en) | 1972-12-11 |
CH508055A (en) | 1971-05-31 |
BE747595A (en) | 1970-08-31 |
DE2014122A1 (en) | 1970-10-22 |
NL7004066A (en) | 1970-09-23 |
GB1300153A (en) | 1972-12-20 |
AT301977B (en) | 1972-09-25 |
FR2037241B1 (en) | 1973-03-16 |
FR2037241A1 (en) | 1970-12-31 |
DE2014122B2 (en) | 1978-10-05 |
JPS4926175B1 (en) | 1974-07-06 |
CA920084A (en) | 1973-01-30 |
ES377773A1 (en) | 1972-05-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: OXY METAL INDUSTRIES CORPORATION Free format text: CHANGE OF NAME;ASSIGNOR:OXY METAL FINISHING CORPORATION;REEL/FRAME:003967/0084 Effective date: 19741220 |
|
AS | Assignment |
Owner name: HOOKER CHEMICALS & PLASTICS CORP. Free format text: MERGER;ASSIGNOR:OXY METAL INDUSTRIES CORPORATION;REEL/FRAME:004075/0885 Effective date: 19801222 |
|
AS | Assignment |
Owner name: OCCIDENTAL CHEMICAL CORPORATION Free format text: CHANGE OF NAME;ASSIGNOR:HOOKER CHEMICAS & PLASTICS CORP.;REEL/FRAME:004126/0054 Effective date: 19820330 |
|
AS | Assignment |
Owner name: OMI INTERNATIONAL CORPORATION, 21441 HOOVER ROAD, Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:OCCIDENTAL CHEMICAL CORPORATION;REEL/FRAME:004190/0827 Effective date: 19830915 |
|
AS | Assignment |
Owner name: MANUFACTURERS HANOVER TRUST COMPANY, A CORP OF NY Free format text: SECURITY INTEREST;ASSIGNOR:INTERNATIONAL CORPORATION, A CORP OF DE;REEL/FRAME:004201/0733 Effective date: 19830930 |