US3610734A - Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments - Google Patents

Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments Download PDF

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Publication number
US3610734A
US3610734A US849310A US3610734DA US3610734A US 3610734 A US3610734 A US 3610734A US 849310 A US849310 A US 849310A US 3610734D A US3610734D A US 3610734DA US 3610734 A US3610734 A US 3610734A
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United States
Prior art keywords
slit
jaws
jaw
support
edges
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Expired - Lifetime
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US849310A
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English (en)
Inventor
Hermann Wollnik
Gottfried Munzenberg
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GOTTERIED MUNZENBERG
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Individual
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Priority claimed from DE19681797091 external-priority patent/DE1797091C/de
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
    • G21K1/04—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using variable diaphragms, shutters, choppers

Definitions

  • This invention relates to temperature-controlled apparatus, and more specifically to an orifice or slit defined by the edges of platelet-shaped jaws and the width of which is variably by control means that change in length with varying temperature, for use in optical instruments and more particularly in ion-optical or electron-optical instruments.
  • Such orifices or slits of which one is described in US. Pat. No. 3,242,796 must be capable of being opened and closed with great precision both for the purposes of adjustment and for operating instruments of variable resolving power.
  • the slit is required to be capable of continuous narrowing to a width of only a few microns.
  • the slit must remain symmetrical with respect to the center plane and its width adjustable without jerks while the edges of the jaws remain perfectly parallel.
  • Patent specification comprises a control means for adjusting the slit width, in the fonn of a rod which varies in length in functional dependence upon the temperature to which it is exposed.
  • the changes in length of the rod are transmitted by a lever system which includes numerous retaining springs and a special restoring spring to the jaws to produce a relative shift of said jaws.
  • a lever system which includes numerous retaining springs and a special restoring spring to the jaws to produce a relative shift of said jaws.
  • Another object of the invention is to ensure that the slitdefining jaws can be relatively moved quickly, precisely and symmetrically, while their edges are maintained exactly in parallel.
  • the present invention provides a temperature-controlled orifice or slit defined by the edges of platelet-shaped jaws whereof the width is variable by control means that change in length with varying temperature, for use in optical instruments and particularly in ion-optical and electron-optical instruments, wherein said jaws themselves in conjunction with support means common to said jaws are arranged to function as said control means, and the ends of said jaws remote from their slit-defining edges are firmly secured to said support means which consist of a material having a coefficient of thermal expansion that substantially differs from that of the material of which said jaws are made, the temperature of said jaws and of said support means being controllable by heating means common to both.
  • the slit may be defined by a pair of jaws which rert flush on a baseplate fonning said supportmeans. or by two or more pairs of jaws disposed in stacks for further enlarging the controllable variability range of the orifice or slit. in an alternative arrangement more than two jaws disposed in pairs that are superimposed in several planes and radially project inwards from a ring forming the support means may together define an orifice in a manner similar to an iris diaphragm.
  • the baseplate supporting the jaws need not be flat.
  • the side of the baseplate facing the jaws may be formed with a central sill and the jaws may be provided with a perpendicularly off-angled portion that may be of bimetal construction.
  • the sill may be widened to form lateral'abutments for the bimetal parts of the jaws.
  • the jaws may be flat and rest in coplanar disposition on a flat baseplate or they may be disposed in different planes and rest on a correspondingly stepped baseplate. In the latter case the inner edges of the jaws may be arranged to overlap so that V notches in the edges of the jaws will define specially shaped orifices for the passage therethrough of the rays or beams.
  • the baseplate may consist of a material having a low coefiicient of thermal expansion, such as molybdenum, and the jaws of a material having a large coefficient of thermal expansion, such as nickel, copper, aluminum and the like, provided it is desired to narrow the slit at rising temperatures.
  • materials will be so chosen for the baseplate and the jaws that the relative magnitudes of the coefficients of thermal expansion are reversed.
  • the variability range of the orifice or slit width can be further enlarged by constructing the jaws or parts thereof of a bimetal.
  • the width of the orifice or slit defined by the jaws be controlled by the heating means that are provided.
  • the temperature may be raised by heating the support means in any way known in the art, for instance by the direct passage of a current through the baseplate, by electron or ion bombardment, by indirect heating with special heating elecan then ments, by radiant or inductive heating or by heating the entire vessel or room in which the orifice or slit is being used. in the interests of rapidity of slit width adjustment heating should preferably be so performed that substantially greater heating power is employed at temperatures that are still remote from the required temperature level than at temperatures close to the required temperature level.
  • Control loops of a kind conventional in'systems control readily permit a constant slit width to be maintained. However, sometimes it may be quite sufficient to operate a heating means from a constant voltage supply.
  • FIG. 1 is a perspective view of a slit defined by a pair of jaws made of a material having a different coefficient of thermal expansion from that of a baseplate which carries said pair of jaws and showing an induction heater for heating the baseplate and the jaws;
  • FIG. 2 is a schematic cross section of the slit according to FIG. 3 is a schematic cross section of a modification of thearrangement according to FIGS. 1 and 2, which pennits the variability range of the slit width to be substantially enlarged;
  • FIG. 4a is a top plan viewof a pair of jaws of particular shape for defining a square orifice
  • FIG. 4b is a cross section thereof
  • FIG. 5 is a top plan view of an orifice defined by a plurality of jaws mounted on a supporting ring so as to extend radially therein;
  • FIG. 6 is a perspective view of a slit of which the width can be varied by the deflections of a pair of jaws consisting partly or completely of bimetal;
  • FIG. 7 is a schematic cross section of a slit according to FIG. 6 at a given temperature
  • FIG. 8 is a view similar to that shown in FIG. 7 but showing the slit afier the temperature has changed;
  • FIG. 9 is a sche DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • FIGS. 1 and 2 show an orifice or slit formed by a baseplate l and two platelet-shaped jaws 2 and 3, baseplate and jaws having different coefficients of thermal expansion.
  • the baseplate 1 has an opening 6 through which light or a particle stream can pass.
  • a slit is defined above the opening 6 between facing edges 2' and 3 of the jaws 2 and 3 which are secured to the baseplate 1 by means of screws 4 and 4'.
  • the jaws 2 and 3 may be thin platelets, say 5 X25 X0.l mm. in size.
  • the thickness of the baseplate 1 may be substantially greater.
  • the width of the slit 5 is adjustable to within a few 1..
  • An induction heater coil 2a disposed adjacent the slit assembly is energized from a suitable source to heat both the jaws and the baseplate to a desired temperature.
  • FIG. 2 illustrates the manner in which the slit functions. Let it be assumed that the width d of the slit 5 has been adjusted at a given temperature level to a given value. Two cases can then be distinguished:
  • a particularly useful form of construction comprises a baseplate made for instance of molybdenum and jaws consisting for instance of nickel, copper or aluminum. If a slit constructed as shown in FIGS. 1 and 2 is adjusted at room temperature to about 0.1 mm. and assuming that the distance between the screws 4 and 4', Le. between the points of affixation of the jaws on each side of the slit 5, is 2 cm., then the width of the slit will change by about 0.2 ;r./' C. At a temperature of the slit of about 500 C.
  • the slit width in case I will close to a few p.if the above-mentioned materials are used.
  • FIG. 3 shows an arrangement in which the slit width can be varied within a wider range than in the arrangement according to FIG. 2.
  • Two jaws in the form of platelets 36 and 37 having a coefficient of thermal expansion b are affixed to a baseplate 31 having a coefficient of thermal expansion a.
  • These platelets 36 and 37 carry a further pair of jaws or platelets 38 and 39 having the coefficient of thermal expansion a and to these are affixed slit-defining jaws 32 and 33 which are more closely spaced than the platelets and which again have a coefficient of thermal expansion 1:.
  • the platelets are securely connected to each other at points A and B (by soldering or welding) and at C they are secured to the baseplate 31. They are finnly pressed on the baseplate 31 by means of screws 34 and 34'.
  • edges of the jaws 42 and 43 By giving the edges of the jaws 42 and 43 a particular shape shown in FIG. 4a square orifices, as are desirable for instance in electron microscopes, can be created'instead of elongated slits. It will be understood from FIG. 4b that the face of the baseplate 41 carrying the jaws 42 and 43 is stepped, and that said jaws are therefore relatively oflset in different planes.
  • the edges of the jaws defining the slit are each provided with a central notch 42 or 43' of triangular shape so that according to the shape of the notches the overlapping edges will define a rectangular, square or rhombic orifice for the passage therethrough of the rays.
  • a baseplate 61 formed with a central sill 68 traversed by an opening 69 for the passage therethrough of a particle beam carries two jaws 62 and 63 and the edges of said jaws defining a slit 65 bear flush under flexural tension on the face of the sill 68.
  • This tension is generated by a portion or 67 of each jaw remote from the slit 65 being bent perpendicularly downwards and this bent portion which is affixed to the baseplate 61 being of bimetal construction so that it will flex when the temperature changes.
  • the width d of the slit 65 will therefore change according to the degree of flexing of these portions.
  • FIGS. 9 and 10 illustrate a modification of the slit according to FIG. 1 in the case of which the entire jaws 92 and 93 themselves are bimetal elements and bend when the temperature changes. They thus cause the slit width to change, as indicated in FIG. 10, the change exceeding that attainable according to FIG. 1.
  • FIG. 11 shows a slit of which the width d is coarsely variable within a given temperature range and finely variable as a function of temperature in another directly adjoining temperature range.
  • a baseplate 111 which is formed with a central sill 114 resembling that of the baseplate in FIG. 6, so that the edges of the jaws 112 and 113 fonning the slit 115 can bear flushagainst the face of the sill 114, the latter is widened and forms lateral projections 118 and 119 which serve as abutment faces for perpendicularly off-angled bimetal portions 116 and 117 of the jaws.
  • the jaws 112 and 113 are first moved fairly rapidly across relatively large distances, such as l mm.
  • a temperature-controlled adjustable orifice or slit for various types of instruments comprising, in combination a support formed from a material having a first coefficient of thermal expansion, said support having an opening therein;
  • first jaw mounted on said support, said first jaw having a slit-defining edge and an outer portion remote from said slit-defining edge, said first jaw being formed from a material having a coefficient of thermal expansion different from the coefficient of thennal expansion of the material of said support;
  • a second jaw mounted on said support, said second jaw having a slit-defining edge in opposed relation to the slitdefining edge of said first jaw, whereby a controllable slit or opening is defined between said slit-defining edges, said second jaw being formed from a material having a coefficient of thermal expansion different from the coefficient of thermal expansion of the material of said support;
  • a temperature controlled adjustable slit or orifice according to claim 1 wherein said support comprises 7 a baseplate having an opening therein and a pair of end edges, each edge of said pair being remote from said opening,
  • said baseplate, first pair of plates, and second pair of plates being parallel with each other;
  • said baseplate and said second pair of plates being formed from a material having the same coefficient of thermal expansion
  • said first and second jaws having outer edges secured respectively to the outer edges of said second pair of plates;
  • said jaws and said first pair of plates being formed from a material having the same coefficient of thermal expan- SlOn.
  • said first and second jaws extend along the same diameter of said ring with said slit-defining-edges in opposed relation to each other at a location generally centrally of the ring;
  • said additional jaws having inner edge portions in overlapping relation to said slit-defining edges of said first and second jaws;
  • a temperature-controlled adjustable orifice according to claim 1 wherein said support is a baseplate having a first jaw support surface and a second jaw support surface in a plane spaced from the plane of the first jaw support surface; said first jaw extends along said first jaw support surface; said second jaw extends along said second jaw support surface in overlapping relation to said fust jaw; said slit-defining edges are each generally triangular notches and extend across each other; whereby, said edges define a polygon-shaped orifice. 6.
  • said first and second jaws are mounted on said flat baseplate in coplanar relation to each other. 7.
  • said support includes a base having sides, and a centrally located projection extending from the base, said projection presenting a generally centrally located jaw-supporting surface having an opening therein; said first and second jaws are each generally L-shaped and include bimetal leg portions secured respectively to said sides of said base, and I end portions in engagement with and movable along said jaw-supporting surface, said end portions having said slit-defining edges fonned thereon and extending across said opening;

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Electron Beam Exposure (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Micromachines (AREA)
US849310A 1968-08-14 1969-08-12 Temperature-controlled orifice or slit for optical, ion-optical and electron-optical instruments Expired - Lifetime US3610734A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681797091 DE1797091C (de) 1968-08-14 Blende mit einem durch Warme regel baren Steuerglied fur optische, lnsbesonde re ionenoptische Gerate

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0280375A1 (en) * 1987-02-27 1988-08-31 Stichting voor de Technische Wetenschappen Continuously variable microdiaphragm
JPH01284268A (ja) * 1988-03-29 1989-11-15 Siemens Ag 荷電粒子ビームの発生および輪送のための装置
WO2003079373A1 (de) * 2002-03-15 2003-09-25 Mrc Systems Gmbh Leaf, multileafkollimator, vorrichtung zur strahlenbegrenzung und bestrahlungsgerät
EP1526563A1 (en) * 2003-10-20 2005-04-27 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Charged particle beam device with aperture
US20080135786A1 (en) * 2006-10-25 2008-06-12 Stefan Lanio Adjustable aperture element for particle beam device, method of operating and manufacturing thereof
DE102009028013A1 (de) * 2009-07-24 2011-03-03 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
CN104409131A (zh) * 2014-11-24 2015-03-11 西北核技术研究所 面积可调的任意多边形光束产生方法及相应的伽马准直器

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4212077A1 (de) * 1992-04-10 1993-10-14 Fraunhofer Ges Forschung Piezoelektrisch verstellbares Ventil und Verfahren zu ihrer Herstellung
DE10244850A1 (de) 2002-09-24 2004-04-01 Carl Zeiss Jena Gmbh Einstellbares Pinhole
CN116736519A (zh) * 2023-03-13 2023-09-12 中国科学院国家天文台南京天文光学技术研究所 一种热主动式狭缝宽度调节方法及装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1951018A (en) * 1930-11-01 1934-03-13 Wired Radio Inc Magnetostrictive light valve
US2059504A (en) * 1932-12-06 1936-11-03 Stewart C Whitman Apparatus and method for recording sound on film
US2852684A (en) * 1955-12-22 1958-09-16 Gen Electric Adjustable slit mechanism
US3242796A (en) * 1962-04-09 1966-03-29 Beckman Instruments Inc Slit control apparatus
US3447875A (en) * 1965-06-21 1969-06-03 American Optical Corp Temperature compensating refractometers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1951018A (en) * 1930-11-01 1934-03-13 Wired Radio Inc Magnetostrictive light valve
US2059504A (en) * 1932-12-06 1936-11-03 Stewart C Whitman Apparatus and method for recording sound on film
US2852684A (en) * 1955-12-22 1958-09-16 Gen Electric Adjustable slit mechanism
US3242796A (en) * 1962-04-09 1966-03-29 Beckman Instruments Inc Slit control apparatus
US3447875A (en) * 1965-06-21 1969-06-03 American Optical Corp Temperature compensating refractometers

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0280375A1 (en) * 1987-02-27 1988-08-31 Stichting voor de Technische Wetenschappen Continuously variable microdiaphragm
JPH01284268A (ja) * 1988-03-29 1989-11-15 Siemens Ag 荷電粒子ビームの発生および輪送のための装置
EP0335170A3 (en) * 1988-03-29 1990-03-21 Siemens Aktiengesellschaft Apparatus for generating and transporting a charged particle beam
WO2003079373A1 (de) * 2002-03-15 2003-09-25 Mrc Systems Gmbh Leaf, multileafkollimator, vorrichtung zur strahlenbegrenzung und bestrahlungsgerät
US20070127624A1 (en) * 2002-03-15 2007-06-07 Steffen Seeber Leaf, multi-leaf collimator, device for delimiting beams and irradiation device
US7397902B2 (en) 2002-03-15 2008-07-08 Siemens Aktiengesellschaft Leaf, multi-leaf collimator, device for delimiting beams and irradiation device
US7763866B2 (en) 2003-10-20 2010-07-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with aperture
EP1526563A1 (en) * 2003-10-20 2005-04-27 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Charged particle beam device with aperture
WO2005041242A1 (en) * 2003-10-20 2005-05-06 Ict, Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh Charged particle beam device with aperture
US20070257207A1 (en) * 2003-10-20 2007-11-08 Jurgen Frosien Charged Particle Beam Device with Aperture
US20080135786A1 (en) * 2006-10-25 2008-06-12 Stefan Lanio Adjustable aperture element for particle beam device, method of operating and manufacturing thereof
DE102009028013A1 (de) * 2009-07-24 2011-03-03 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
US20110049361A1 (en) * 2009-07-24 2011-03-03 Dirk Preikszas Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
DE102009028013A8 (de) * 2009-07-24 2011-06-01 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
DE102009028013B4 (de) * 2009-07-24 2012-03-15 Carl Zeiss Nts Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
DE102009028013B9 (de) * 2009-07-24 2014-04-17 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät
US11139140B2 (en) 2009-07-24 2021-10-05 Carl Zeiss Microscopy Gmbh Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
CN104409131A (zh) * 2014-11-24 2015-03-11 西北核技术研究所 面积可调的任意多边形光束产生方法及相应的伽马准直器
CN104409131B (zh) * 2014-11-24 2017-05-03 西北核技术研究所 面积可调的任意多边形光束产生方法及相应的伽马准直器

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Publication number Publication date
FR2022123A1 (https=) 1970-07-31
DE1797091B2 (de) 1972-09-28
GB1248825A (en) 1971-10-06
DE1797091A1 (de) 1970-12-10

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