US3555275A

US3555275A - Specimen positioning apparatus for use with a back reflection x-ray camera

Info

Publication number: US3555275A
Application number: US772941A
Authority: US
Inventors: James F Kreider
Original assignee: Avco Corp
Current assignee: AV ELECTRONICS Corp A CORP OF
Priority date: 1968-11-04
Filing date: 1968-11-04
Publication date: 1971-01-12
Anticipated expiration: 1988-01-12

Abstract

A specimen positioning apparatus is disclosed which permits translation of the specimen relative to a reference point in space. A plurality of interfitting members supported by the operating assembly permits positioning of the specimen in the Xand Y-directions. An independent member provides longitudinal or Z-axis positioning.

Description

United States Patent I ['72] Inventor James F. Kreider [56] References Cited 1 l N s g i UNITED STATES PATENTS [21 App o. Filed Nov. 1968 3,l05,90l 10/1963 Ladelleta]. 250/51.5 [45] Patented Jan. 12, 1971 Primary Examiner-Archie R. Borchelt [73] Assignee Avco Corporation Assistant Examiner-A. L. Birch Cincinnati, Ohio AttorneysCharles M. Hogan and Eugene C. Goodale a corporation of Delaware [54] SPECIMEN POSITIONING APPARATUS FOR USE WITH A BACK REFLECTION X-RAY CAMERA 3 ClaunS6Drawmg ABSTRACT: A specimen positioning apparatus is disclosed [52] [1.8. CI 250/515, which permits translation of the specimen relative to a 250/495 reference point in space. A plurality of interfitting members [51] Int. Cl G0lh 23/20 supported by the operating assembly permits positioning of [50] Field of Search ..l ..250/49.5(2), the specimen in the X- and Y-directions. An independent member provides longitudinal or Z-axis positioning.

PATENTEB JAN] 2 ran SHEET 1 [IF 2 INVENTOR. JAMES F. KREIDER PATENTEUJANIZIB?! 3.555275 SHEET 2 BF 2 INVENTOR. JAMES F. KRE IDER W AT EYS' SIECIMEN IOSITIONING APPARATUS FOR USE WITH A BACK REFLECTION X-RAY CAMERA BACKGROUND OF THE INVENTION This invention pertains to specimen holding apparatus and more particularly to an adjustable apparatus for providing specimen translation relative to a given point in space.

In many applications in industry, it is desirous to examine the entire surface area of an object or specimen when the area under examination at any given instant is very small as compared to the entire surface. One example of this type examination is in the determination of crystal orientation necessary in the production of such items as silicon and germanium semiconductors.

In order to fully examine the entire surface area, it is necessary to move the specimen relative to the examining media. In some instances, the examining media may be moved while the specimen is held in place. This is undesirable because very often the examining media and associated structure are very large as compared to the specimen.

In some cases the examining media is fixed, such as in X-ray investigation when used in a back reflection X-ray camera of the Griak Laue type. Because of the fixed examining media, the specimen must be moved. It is important, however, that the specimen-to-film (in the X-ray investigation) or specimento-examining media distance is not disturbed when adjustments are made, thus, eliminating the necessity of realignment. In the past, when examining a crystal specimen with a Griak Laue back reflection camera, it has been necessary to remove and remount the specimen, on a mounting piece in order to examine a different portion of the specimen. This is not only time consuming and costly, it frequently requires the realignment of the specimen relative to the examining media.

It is an object of the invention to provide a specimen-positioning apparatus which overcomes the previous problems involved and will permit specimen translation relative to a given point in space without disturbing the specimen-to-film, etc., distance.

Another object of the invention is to provide specimen positioning apparatus which is inexpensive to manufacture and requires very little time to make an adjustment of the position of the specimen.

A further object of the invention is to provide a specimen positioning apparatus which can be used as a compatible accessory with a back reflection X-ray camera.

SUMMARY OF THE INVENTION A specimen-positioning apparatus is provided which is mounted in an operating assembly having means for establishing a reference point in space relative to a point on the specimen. The specimen-positioning apparatus provides for two axes of adjustment of the specimen relative to the reference point in space so that the entire surface area may be examined. Cooperating members of the specimen-positioning apparatus permit independent axis movement without disturbing the specimen-to-film distance and means are provided for securing the cooperating members, and hence the specimen, in any adjusted position.

DESCRIPTION OF THE DRAWINGS An illustrative embodiment of the present invention is shown in the following drawings, in which:

FIG. 1 is a perspective view of the specimen-positioning apparatus mounted in an operating assembly;

FIG. 2 is an exploded perspective view of the specimenpositioning apparatus;

FIG. 3 is a sectional side view of the specimen-positioning apparatus;

FIG. 4 is a sectional top view of the specimen-positioning apparatus;

FIG. 5 is a perspective view of a second configuration of the rear slide member; and

FIG. 6 is a perspective view of a second configuration of the middle slide member.

DETAILED DESCRIPTION OF THE INVENTION In the exemplary embodiment of FIG. I there is shown an operating assembly representative of a goniometer or specimen mount for a Griak Laue back reflection X-ray camera. The operating assembly involved in accordance with the invention facilitates the movement of a specimen 12, held by the specimen positioning apparatus shown generally at 14, through an arc, either vertically or horizontally, with a high degree of accuracy. The elements 7 and 8 functionally and schematically represent the well-known prior art structure (which need not be shown in detail herein) for positioning the collar 16 in elevation and azimuth. That is, the position of the collar 36 in azimuth or its angular displacement is controlled by the angular position of the base 7(Additionally, the position of the specimen in elevation or depression is controlled by fixing the angular relationship between lug or pivot point 8 and the vertical. In other words, the collar 16 is, by prior art means, adjustable over a horizontal are or a vertical arc, as shown. The specimen-positioning apparatus 14 is positioned along the Z-axis in a manner to be explained herebelow. The proper specimen position relative to elevation, azimuth, and distance, Le, a reference point in space coinciding with the intersection of the X-, Y-, and Z-axes, is obtained by any suitable means such as by viewing the specimen from the side along line 9 through a magnifier lens (not shown) on the side of the operating assembly.

It will be understood that the magnifier referred to above is employed to establish the initial position of the specimen along the Z-axis. It will be understood that a line of sight is established for purposes of examining the specimen. That line of sight happens to conform to the Z-axis 'as illustrated in FIG, 1 and is established by optics well-known in the art and not here shown. The lateral displacement of the specimen, in two dimensions, provided in accordance with the invention, permits any elemental area of the specimen to be placed in this line of sight so that the examination of the specimen is greatly facilitated, It is further understood that the axes referred to herein are referenced to the specimen carrying subassembly or positioning apparatus 14. Hence, the Z-axis coincides with the longitudinal axis of the collar 16.

The preferred illustrative embodiment of the specimenpositioning apparatus is best seen in FIGS. 2-4 in which a cylindrical or other shaped collar 16 is adapted to be mounted in the operating assembly and held immobile by any suitable means. An extension member 18, having an outer surface conforming with the inner surface of the collar 16, is mounted in collar 16 for movement in the Z-axis. In the embodiment shown, it is seen that collar 16 and extension member 18 are of cylindrical shape. Extension member 18 is coaxially mounted in collar 16 and is adapted for reciprocal and rotational displacement therein. Screw means (not shown) is threadably mounted at 20 in collar 16 and extends through the collar inner surface to frictionally engage member 18 and lock the member against further movement. The screw is preferably made of nylon or similar-type material so that the outer surface of member 18 is not scratched or marred.

One end of the extension member 18 extends beyond the end of collar 16 and has a groove or slot 22 formed therein perpendicular or transverse to the longitudinal or Z-axis of member 18, In this embodiment, a T-slot is shown, but it is understood that other configurations, such as dovetail, etc., may

be used.

A second or intermediate member 24 has one end formed with an integral slider complementary to and slidable within slot 22 for adjustable movement therealong in the Y-axis and transverse the Z-axis. The intermediate member 24 has a slot 26 at the other face which is angularly displaced at relative to the slider. A front or specimen-holding slider member 28, upon which specimen 12 is suitably mounted, is formed complementary to slot 26 and slidably mounted therein for adjustable movement in the X-axis. Hence, by moving

members

24 and 28, the specimen 12 is adjustable along the X- and Y- axes without the necessity of removing the specimen and remounting it at a different spot.

A longitudinally extending cavity or cylindrical hole 30 is formed in the intermediate member 24. The cavity 30 opens into slot 26 and extends inwardly along the Z-axis forming the cylinder for a piston 32 having a rounded end. A locking screw 34, terminating in a beveled end, is threadably mounted in member 24 for engagement with the rounded end of piston 32. Thus, as the locking screw 34 is tightened in member 24, the beveled end of the screw forces the piston 32 to frictionally engage and lock the specimen-holding member 28 in place. In order to avoid marring member 28, the piston 32 may be made of nylon or similar material. 7 The intermediate member 24 is locked in position relative to the rear member 18 by any suitable means such as locking screw 36 which is threadably mounted in member 18 along the longitudinal axis thereof and extends into frictional engagement with the complementary surface of member 24.

A rear stop member 38 is mounted in one end of collar 16 and is locked by any suitable means such as a nylon or similartype setscrew (not shown) threadably mounted in the collar at 40 for frictional engagement with member 38.

In operation, the rear member 18 is positioned in the collar 16 to the proper distance along the Z-axis by means of viewing the specimen through the magnifier lens on the operating assembly. The rear member 18 is then locked in place with the locking means at 20. The rear stop member 38 is positioned in the collar 16 so that it is touching the rear member 18 and then locked in place with the lock means at 40. If desired, the lock means at 20 can be loosened and the rear member 18 can be rotated in the collar 16 without altering the position of the specimen along the Z-axis. To move the specimen so that other parts of the specimen surface area coincide with the reference point in space, i.e., the intersection of the three axes, it is only necessary to loosen the

respective screws

34 and 36 and move

members

28 and 24 along the X- and Y-axes. A modification of the rear and intermediate members is shown in FIGS. and 6 in which middle member 42 has a key or lug 43 adapted to slidably fit in slot 44 of rear member 46. Member 42 is locked in place by a loclt screw (not shown) threadably mounted in rear member 46 at 48. A slot 50 is formed in member 42 transverse the key 43 for receiving a specimen holding member (not shown). A plurality of locking means, such as setscrews, are provided at 52, 54 and 56 for frictionally engaging the specimen holding member and locking it in place. It is seen that this modification also permits movement of a specimen along the X- and Y-axes.

[t is thus seen that the objectives of this invention have been accomplished. A specimen positioning apparatus has been described which will permit lateral translation of the specimen in two dimensions with reference to a point in space without disturbing the specimen location along the Z-axis.

While the forms of apparatus herein described constitute preferred embodiments of the invention, it is to be understood that the invention is not limited to these precise forms of apparatus.

lclaim:

1. in an operating assembly of the type including specimenpositioning apparatus and means for adjusting the angle of elevation and the angle of azimuth of the specimen-positioning apparatus to establish a given reference point in space, the improvement in the specimen-positioning apparatus to provide specimen translation relative to a given reference point in space comprising:

a first member coaxially mounted within the operating assembly and having an outer surface complementary with the operating assembly inner surface, said first member having one end thereof extending beyond said operating assembly and having a first slot formed therein transverse the longitudinal axis thereof;

a second member formed with a slider complementary to said slot and slidably mounted therein for adjustable displacement therealong transverse the longitudinal axis, v said second member having a slot formed in the opposite end thereof transverse the complementary slider, said second member being further formed with a longitudinal cavity opening in said slot;

means for securing said second member in any adjusted position relative to said first member;

a specimen-holding member mounted on said second member for relative movement therewith transverse the direction of said second member movement wherein a specimen mounted thereon is adjustably moveable in two directions relative to said first member whereby any element of the entire specimen may be positioned coincident to the longitudinal axis of the apparatus;

a friction member mounted in said cavity for a reciprocal longitudinal movement therealong; and

a lock screw mounted in said second member transverse the longitudinal axis thereof and extending into said cavity area for cooperative engagement with said friction member whereby tightening said screw will force said friction member outward into frictional engagement with said specimen-holding member thereby securing said specimen-holding member in any adjusted position relative to said second member.

2. Apparatus as set forth in claim 1 further comprising:

a collar adapted to be mounted in the operating assembly and having an inner surface complementary with said first member outer surface wherein said first member is mounted in said collar with the one end thereof extending beyond said collar;

said specimen-holding member being formed with a slider complementary to the slot in said second member and slidably mounted therein for adjustable displacement therealong; and

a stop member coaxially mounted within said collar and adapted for abutting engagement with said first member wherein said first member may be precisely positioned along the longitudinal axis relative to said collar and whereby the relative transverse movements of said second member and said specimen-holding member pro vides translation of the specimen in a given plane transverse the longitudinal axis thereof.

3. In an operating assembly of the type including specimenpositioning apparatus and means for adjusting the angle of elevation and the angle of azimuth of the specimen-positioning apparatus to establish a given reference point in space, the improvement in the specimen-positioning apparatus to provide specimen translation relative to a given reference point in space comprising:

a cylindrical collar adapted'to be mounted in the operating assembly and having a cylindrical inner surface;

a cylindrical first member coaxiaily mounted within said collar for longitudinal and rotational movement relative to said collar, said first member having one end thereof extending beyond one end of said collar and having a first slot formed in the extended end transverse the longitudinal axis thereof; I

means for securing said first member in any longitudinal and rotational position relative to said collar;

a second member formed with a slider complementary to said slot and slidably mounted therein for adjustable displacement therealong transverse the longitudinal axis;

a screw threadably mounted in said first member along the longitudinal axis and extending into said first slot for frictional engagement with said second member for securing said second member in any adjusted position relative to said first member;

said second member having a second slot formed in the face opposite the slider and transverse thereto, said second member further having a cavity formed therein along the longitudinal axis and opening into said second slot;

a specimen-holding member formed with a slider complementary to said second slot and slidably mounted therein for adjustable displacement therealong wherein a specimen mounted thereon is adjustably moveable in two directions relative to said first member whereby any element of the specimen may be positioned coincident to the longitudinal axis of the apparatus;

a piston mounted in said second member cavity for a reciprocal longitudinal movement therealong; and

piston outward into frictional engagement with said specimen holding member thereby securing said specimen-holding member in any adjusted position relative to said second member.

Claims

1. In an operating assembly of the type including specimenpositioning apparatus and means for adjusting the angle of elevation and the angle of azimuth of the specimen-positioning apparatus to establish a given reference point in space, the improvement in the specimen-positioning apparatus to provide specimen translation relative to a given reference point in space comprising: a first member coaxially mounted within the operating assembly and having an outer surface complementary with the operating assembly inner surface, said first member having one end thereof extending beyond said operating assembly and having a first slot formed therein transverse the longitudinal axis thereof; a second member formed with a slider complementary to said slot and slidably mounted therein for adjustable displacement therealong transverse the longitudinal axis, said second member having a slot formed in the opposite end thereof transverse the complementary slider, said second member being further formed with a longitudinal cavity opening in said slot; means for securing said second member in any adjusted position relative to said first member; a specimen-holding member mounted on said second member for relative movement therewith transverse the direction of said second member movement wherein a specimen mounted thereon is adjustably moveable in two directions relative to said first member whereby any element of the entire specimen may be positioned coincident to the longitudinal axis of the apparatus; a friction member mounted in said cavity for a reciprocal longitudinal movement therealong; and a lock screw mounted in said second member transverse the longitudinal axis thereof and extending into said cavity area for cooperative engagement with said friction member whereby tightening said screw will force said friction member outward into frictional engagement with said specimen-holding member thereby securing said specimen-holding member in any adjusted position relative to said second member.

2. Apparatus as set forth in claim 1 further comprising: a collar adapted to be mounted in the operating assembly and having an inner surface complementary with said first member outer surface wherein said first member is mounted in said collar with the one end thereof extending beyond said collar; said specimen-holding member being formed with a slider complementary to the slot in said second member and slidably mounted therein for adjustable displacement therealong; and a stop member coaxially mounted within said collar and adapted for abutting engagement with said first member wherein said first member may be precisely positioned along the longitudinal axis relative to said collar and whereby the relative transverse movements of said second member and said specimen-holding member provides translation of the specimen in a given plane transverse the longitudinal axis thereof.

3. In an operating assembly of the type including specimen-positioning apparatus and means for adjusting the angle of elevation and the angle of azimuth of the specimen-positioning apparatus to establish a given reference point in space, the improvement in the specimen-positioning apparatus to provide specimen translation relative to a given reference point in space comprising: a cylindrical collar adapted to be mounted in the operating assembly and having a cylindrical inner surface; a cylindrical first member coaxially mounted within said collar for longitudinal and rotational movement relative to said collar, said first member having one end thereof extending beyond one end of said collar and having a first slot formed in the extended end transverse the longitudinal axis thereof; means for securing said first member in any longitudinal and rotational position relative to said collar; a second member formed with a slider complementary to said slot and slidably mounted therein for adjustable displacement therealong transveRse the longitudinal axis; a screw threadably mounted in said first member along the longitudinal axis and extending into said first slot for frictional engagement with said second member for securing said second member in any adjusted position relative to said first member; said second member having a second slot formed in the face opposite the slider and transverse thereto, said second member further having a cavity formed therein along the longitudinal axis and opening into said second slot; a specimen-holding member formed with a slider complementary to said second slot and slidably mounted therein for adjustable displacement therealong wherein a specimen mounted thereon is adjustably moveable in two directions relative to said first member whereby any element of the specimen may be positioned coincident to the longitudinal axis of the apparatus; a piston mounted in said second member cavity for a reciprocal longitudinal movement therealong; and a lock screw threadably mounted in said second member transverse the longitudinal axis thereof and extending into said cavity area for cooperative engagement with said piston whereby tightening said screw will force said piston outward into frictional engagement with said specimen holding member thereby securing said specimen-holding member in any adjusted position relative to said second member.