US3500255A - Integrated circuit directional coupler - Google Patents

Integrated circuit directional coupler Download PDF

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Publication number
US3500255A
US3500255A US726269A US3500255DA US3500255A US 3500255 A US3500255 A US 3500255A US 726269 A US726269 A US 726269A US 3500255D A US3500255D A US 3500255DA US 3500255 A US3500255 A US 3500255A
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United States
Prior art keywords
directional coupler
line
integrated circuit
lines
conducting
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Expired - Lifetime
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US726269A
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English (en)
Inventor
Irving T Ho
Satish K Mullick
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International Business Machines Corp
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International Business Machines Corp
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Publication date
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
    • H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
    • H01P5/184—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers the guides being strip lines or microstrips
    • H01P5/185—Edge coupled lines

Definitions

  • This invention is in the field of integrated circuit directional couplers.
  • a directional coupler is a system containing a primary line and a secondary line arranged such that an incident voltage waveform into one end of the primary line is coupled to the other end of the primary line and to both ends of the secondary line in an amount dependent upon the structure of the coupler, the frequency of the wave form and the direction of travel of the wave.
  • Stripline directional couplers have been designed previously to include transmission lines separated from one or more ground planes by one or more layers of dielectric material.
  • This invention is particularly concerned with a stripline directional coupler for use with integrated circuits.
  • the directional coupler thus constructed yields more ways of energy distribution than does the conventional stripline directional coupler with dielectric separation.
  • the disclosed directional coupler when excited at the rear end of the primary line, can provide an output to the near end or the far end of the secondary line, which is not possible with conventional directional couplers utilizing homogeneous dielectric media.
  • FIGURE 1 illustrates the basic structure of the present invention
  • FIGURE 2 illustrates an equivalent circuit representation of the structure of FIGURE 1.
  • this semiconductor material 1 s silicon although otherjemiconductor materials may be used.
  • a layer 4 of insulating material is affixed to one side of wafer 5.
  • this insulating material is silicon dioxide which can be formed by well-known techniques directly on the surface of silicon wafer 5.
  • a layer 3 of conducting material forming a ground plane is aifixed to the other side of wafer 5.
  • Two transmission lines 1 and 2 of conducting material are shown alfixed to the insulating layer 4.
  • the conducting material is preferably metallic and may be deposited aluminum.
  • the thickness 1, width b, and spacing d of the transmission lines may be varied to vary the transfer function of the illustrated system.
  • the ordinary transmission line in this system is 1 mil in width b and 1 micron in thickness 1.
  • the thickest preferred line is 2 microns thick and could be 2 mil wide.
  • the transmission line illustrated in FIGURE 1 is especially suited for use as a directional coupler in an integrated circuit.
  • a single line on top of an integrated circuit chip has a virtual ground plane located in the semiconductor substrate but near the SiO -Si boundary in determining the transmission line capacitance.
  • the metallic ground plane such as layer 3 in FIG. 1 serves as the current return path.
  • the capacitance is generally large because the oxide layer is very thin and the inductance is also large because the thickness of the semiconductor substrate may be quite large in comparison with the transmission line width b.
  • a single transmission line on IC chip will have a large propagation delay because it has a large capacitance and a large inductance.
  • two adjacent parallel lines on IC chips will have a negligible capacitive coupling by choosing h d and a large inductive coupling by choosing h d.
  • the coupling between two adjacent lines on IC chip is dominated by inductive couplings.
  • the line as illustrated has a large inductance and capacitance which causes a large delay on the line. This extra delay allows an effective directional coupler to be constructed with a much shorter transmission line than is possible with conventional transmission lines.
  • FIGURE 2 illustnates an equivalent transmission line circuit useful in analyzing the ellect of using the structure of FIGURE 1 as a directional coupler.
  • the structure of FIGURE 1 is generally useful as a directional coupler, it is possible to vary the effectiveness of the coupling by varying the parameters of the structure.
  • a directional coupler according to claim 4 wherein 112 112 (l) I m (Z) In. alarm/(L0 (1+k1.) Bzl wh/(LC) (Z-kL) 21 (0) 01(0) m 0) 411' 21: 0 0 1 21r 1r 0 1 0 35 2 1 2 0. 5 0.87 o 3. 2r 0. 21w About 0.7 About 0.7 About 0
  • said conducting lines and said conducting plane comprise 1.
  • a directional coupler comprising: thin layers of aluminum. (a) a semiconductive layer, 7.
  • a directional coupler usin the transmission line of (b) a thin insulating coating on said layer,
  • a directional coupler according to claim 1 wherein said thin insulated coating comprises a layer of silicon dioxide formed on the surface of said silicon.

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  • Semiconductor Integrated Circuits (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
US726269A 1968-04-08 1968-04-08 Integrated circuit directional coupler Expired - Lifetime US3500255A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72626968A 1968-04-08 1968-04-08

Publications (1)

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US3500255A true US3500255A (en) 1970-03-10

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US726269A Expired - Lifetime US3500255A (en) 1968-04-08 1968-04-08 Integrated circuit directional coupler

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US (1) US3500255A (fr)
DE (1) DE1914173C3 (fr)
FR (1) FR2005723A1 (fr)
GB (1) GB1259689A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5313175A (en) * 1993-01-11 1994-05-17 Itt Corporation Broadband tight coupled microstrip line structures
JP2630105B2 (ja) 1991-04-30 1997-07-16 株式会社村田製作所 方向性結合器
US20050231302A1 (en) * 2004-04-14 2005-10-20 Frank Michael L Coupler detector
US20100259337A1 (en) * 2009-04-10 2010-10-14 Broadcom Corporation High speed transmission lines with enhanced coupling

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951218A (en) * 1957-02-19 1960-08-30 Itt Directional couplings
US3370184A (en) * 1963-12-24 1968-02-20 Hughes Aircraft Co Combination of thin-filmed electrical devices
US3416042A (en) * 1964-09-18 1968-12-10 Texas Instruments Inc Microwave integrated circuit mixer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2951218A (en) * 1957-02-19 1960-08-30 Itt Directional couplings
US3370184A (en) * 1963-12-24 1968-02-20 Hughes Aircraft Co Combination of thin-filmed electrical devices
US3416042A (en) * 1964-09-18 1968-12-10 Texas Instruments Inc Microwave integrated circuit mixer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2630105B2 (ja) 1991-04-30 1997-07-16 株式会社村田製作所 方向性結合器
US5313175A (en) * 1993-01-11 1994-05-17 Itt Corporation Broadband tight coupled microstrip line structures
US20050231302A1 (en) * 2004-04-14 2005-10-20 Frank Michael L Coupler detector
US7187062B2 (en) * 2004-04-14 2007-03-06 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupler detector
US20100259337A1 (en) * 2009-04-10 2010-10-14 Broadcom Corporation High speed transmission lines with enhanced coupling
US8125289B2 (en) * 2009-04-10 2012-02-28 Broadcom Corporation Transmission line pairs with enhanced coupling therebetween and negligible coupling to ground

Also Published As

Publication number Publication date
DE1914173B2 (fr) 1970-03-26
FR2005723A1 (fr) 1969-12-19
DE1914173C3 (de) 1975-10-09
DE1914173A1 (de) 1969-10-16
GB1259689A (en) 1972-01-12

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