US3400070A - High efficiency plasma processing head including a diffuser having an expanding diameter - Google Patents

High efficiency plasma processing head including a diffuser having an expanding diameter Download PDF

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Publication number
US3400070A
US3400070A US463799A US46379965A US3400070A US 3400070 A US3400070 A US 3400070A US 463799 A US463799 A US 463799A US 46379965 A US46379965 A US 46379965A US 3400070 A US3400070 A US 3400070A
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US
United States
Prior art keywords
flow
arc
passages
gas
attachment
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US463799A
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English (en)
Inventor
Naff John Tom
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Hercules LLC
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Hercules LLC
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Application filed by Hercules LLC filed Critical Hercules LLC
Priority to US463799A priority Critical patent/US3400070A/en
Priority to GB25341/66A priority patent/GB1130600A/en
Priority to SE07868/66A priority patent/SE331466B/xx
Priority to BE682338D priority patent/BE682338A/xx
Priority to FR64974A priority patent/FR1484079A/fr
Priority to DE1564333A priority patent/DE1564333C3/de
Priority to AT562066A priority patent/AT287131B/de
Priority to NO163409A priority patent/NO121927B/no
Priority to ES0327860A priority patent/ES327860A1/es
Priority to CH849966A priority patent/CH460197A/de
Priority to NL6608167A priority patent/NL6608167A/xx
Priority to LU51326D priority patent/LU51326A1/xx
Priority to ES337898A priority patent/ES337898A1/es
Application granted granted Critical
Publication of US3400070A publication Critical patent/US3400070A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Definitions

  • typical plasma arc jet devices have included a centrally located anode rod and an annular cathode surrounding the rod.
  • An electrical arc passes from the cathode to the anode and feed materials as well as gas are fed generally unidirectionally in the arc region.
  • Such devices have many disadvantages, among which are included excessive electrode erosion at thermionic temperatures occurring -at high currents and pressures as Well as low currents and pressures; disadvantageously high peak to peak current fluctuation; the need to employ an expensive tungsten cathode in order to reduce the rate of erosion; the need to separately inject different reactants into the are at spaced locations in order to reduce electrode clogging and erosion rates; the problem of cathode destruction and clogging when hydrocarbons are introduced into the arc; and all of the foregoing imposing limitations on scale up of the head to handle higher power requirements, so that power as high as one megawatt for example could not be utilized.
  • the invention concerns the establishment of an arc discharge pattern to penetrate and bridge flow passing passages within both cathode and anode elements, and supplying gas under pressure to flow through the arc pattern or region in the element passages to unstabilize the loci of arc attachment to both electrode elements.
  • the passages in each of the electrode elements are cylindrical, conical, or have reduced upstream cross sectional region and enlarged downstream cross sectional region, and the process includes controlling the gas supply to sweep the arc unstabilized attachment locus downstream in the cylindrical electrodes, or into the enlarged cross sectional region in each electrode element of other configuration whereby more electrode area is presented for increasing the instability of the arc attachment and thereby increasing electrode life.
  • Other steps of the method include controllably quenching the hot gas flowing downstream of the arc attachment loci; variably controlling the ditferential rate of downstream flow of gas from the passages; and swirling the supplied gas approaching said passages.
  • the invention is embodied in structure including anode and cathode elements forming passages for passing the flow of gas therethrough and for reception of an arc discharge pattern penetrating the elements in the path of gas flow, and means to conduct electrical current to the elements to create the are discharge pattern.
  • each of the cathode and anode elements forms a gas discharge passage
  • gas inlet porting extends between the cathode and anode elements and in such proximity to the electrode element passages that the inlet flow divides to enter the respective passages. Additional features include the provision of annular electrode elements forming gas flow passages that extend downstream, and typically symmetrically (although non-symited States Patent U 3,400,070 Patented Sept.
  • the invention are the enablement of use of a much higher voltage are for higher power output, as for example in the megawatt range; the elimination of need in many applications for an expensive tungsten electrode; the facilitation of use of cathode and anode elements made of the same materials, as for example copper; the simplification of the cathode as well as anode arc attachment regions without necessarily resorting to eflicient thermionic emitters for cathode materials; the facilitation of scale-up for large gas throughputs and high power requirements, as a result of the head configuration and functioning thereof; simplified construction of the head structure because of symmetry; enablement of operation at much higher gas pressures and ability to handle an extremely large variety of materials directly through the arc column without adverse effects; better control of current and pressure and less peak to peak current fluctuations; facilitation of operation at significantly higher percentage of open circuit voltage so that a smaller capacity power supply is needed; and better control of quenching.
  • FIG. 1 is a vertical cross section taken through one form of plasma processing apparatus incorporating the invention
  • FIG. 2 is an enlarged vertical cross section taken in the same plane as FIG. 1, but showing a typical are discharge pattern
  • FIGS. 35 are cross sections taken on line 3-3, 44 and 5- 5 of FIG. 2;
  • FIG. 6 is a view like FIG. 3 but showing radial instead of tangential injection paths for the inlet gas flow.
  • FIGS. 7 and 8 show further modified forms of the invention.
  • FIG. 1 illustrates one form of structure including anode and cathode elements forming passages for passing the flow of gas t-herethrough and for reception of an arc discharge pattern penetrating the elements in the path of the flow.
  • annular cathode and anode elements are provided at 10 and 11 to have coaxial passages 12 and 13 for passing the flow of gas in the direction of arrows 14 and 15.
  • Elements 10 and 11 may advantageously be made of copper, or other conductive materials.
  • the structure also forms gas flow inlet portion extending between the cathode and element and in such proximity to the passages 12 and 13 that the inlet flow divides to enter the respective passages.
  • a fluorocarbon gas ring 16 provides a series of inlet ports 17 arranged as seen in FIG. 3 to receive gas from duct 22 and plenum 22a to direct the inlet flow in a spiral or vortex within a plenum 18 between the anode and cathode terminal flanges 19 and 20.
  • the vortex flow divides at the locus 21 and enters the 3 relatively reduced diameter throat regions 12a and 13a of passages 12 and 13.
  • the latter also typically include relatively increased diameter diffuser regions 12b and 13b downstream of the throat regions.
  • an arc discharge pattern penetrates both the electrode elements in the path of gas flow therein, producing a gas unstabilized are particularly at the points of variable are attachment to the electrodes.
  • One such pattern is generally indicated by the lines 42 in FIG. 2, which pass axially endwise through the passage portions 12a and 13a. and variably attach to the electrodes at the enlarged diffuser regions 12b and 1312.
  • Such variable or unstable attachment is promoted due to the velocity of flow of the gas over the electrodes, and the vortex or rotating character of such flow.
  • the enlargement of the passages at 12b and 130 provides greater area for the arc to play over, thereby reducing any tendency for high temperature erosion of the electrode surface.
  • the are oscillates between the different are attach- From regions 60 and 61 in piping 64 and 65 the two streams of discharge gas may be recombined as indicated by flow lines 66 and 67, or they may be separately withdrawn as indicated by flow lines 68 and 69.
  • flow control valves 7073 in such flow lines are operable to variably control the discharge flow of gas from the apparatus.
  • the inlet flow of gas to duct 22 may be controlled as to flow rate and pressure by valve 74 or other means in order to control the arc discharge pattern, as for example sweeping the arc attachment loci relatively downstream or upstream in passages 12 and 13, i.e. typically from narrow throat regions 12a and 13a into enlarged diffuser sections 12b and 13b.
  • Bolts 76 and 77 may attach the pipe retainers 78 and 79 to the bodies 48 and 49 respectively.
  • FIG. 6 is shown an alternate form of fluorocarbon gas inlet ring 16a providing radial instead of tangential inlet ports 17a for the inflowing reaction gas. Accordingly, the flow does not spiral or rotate in the passages 12 and 13; however, the downstream valves 71-73 may then be adjusted to provide for turbulent flow conditions in the passages 12 and 13 acting to unstabilize the arc attachment loci.
  • the surface temperature of the electrodes at the points of arc attachment may be kept well below the melting temperature of copper, so that formation of copper carbide is largely avoided where the gas contains hydrocarbons or carbon containing gases.
  • Means to conduct electrical current to the electrode elements in order to provide for creation of such an advantageously unstable arc discharge pattern may include electrically conductive connector plate 44 and 45 having connection at 46 and 47 to the electrode terminal flanges 30 and 31. Further, plates 44 and 45 may be retained at opposite ends of the housing 25 by annular bodies 48 and 49 bolted at 50 to the plates and housing. A source of direct or alternating current and voltage is indicated at 51 with terminal connection at 52 and 53 to the respective plates 44 and 45.
  • a further feature of the invention has to do with the provision of means to introduce quench fluid into the path of hot gas flowing downstream relative to the loci of arc attachment.
  • One such means as shown in the drawings includes the bodies 48 and 49 forming plenum chambers 54 and 55 to which quench fluid is supplied via ducts 56 and 57. From such chambers the quench fluid, typically consisting of water or other suitable medium, passes via ports 58 and 59 into the gas at regions 60 and 61 downstream of the arc attachment loci.
  • the quench fluid operates to sharply reduce the temperature of the gas flow to aid in terminating or reducing high temperature chemical reactions occurring therein.
  • Valves 62 and 63 are operable to control the rate of quench fluid introduction to regions 60 and 61. Quenching may also be effected by means of water or other quench medium passages placed directly in the electrodes 10 and 11 downstream of the arc attachment loci.
  • FIG. 2 illustrates a supplementary feed path or ducting for direct injection of reactant into the are at a point downstream of flow division locus 21.
  • the reactant consists of particulate material, as for example iron ore, to produce a product of desired metallurgical properties.
  • a magnetic field producing coil is seen at extending about an electrode 121 of the type disclosed at 11 in FIG. 2.
  • the coil is controllably energized from a source 122 so as to effect rotation of the locus of arc attachment within the passage enlargement 123, as for example where radial injection is used as described in FIG. 6, and including powder.
  • means is seen at 124, typically including a duct 125 and injector nozzle 126 in electrode 121 for introducing quench fluid into the path of hot gas flowing downstream relative to the locus of arc attachment.
  • Electrode 130 is like that disclosed at 10 in FIG. 2; however electrode 131 differs in that it is unsymmetrical with respect to electrode 130 (and respecting flow division locus 132). Also, electrode 131 has a passage 133 with straight cylindrical conformation throughout its length.
  • the separate coils 128 and 129 may be separately energized as at 134 and 135 to effect rotation of the arc attachment loci in the passages 136 and 137, for either radial or tangential injection as described in FIGS. 6 and 3.
  • the anode and cathode elements may have various other forms with flow passages that are diverging or converging conically in a downstream direction, or of nozzle configuration, or stepped or cylindrical (large or small). Symmetrical or unsymmetrical pairs of such electrodes may be used together as anode and cathode elements. Any electrically conducting materials may be used, if desirable, when compatible with proper cooling.
  • structure including electrode elements each forming a passage for passing the flow of gas therethrough and for reception of an arc discharge pattern penetrating said element passages in the path of said flow, said passages having opposed entrances and exits downstream of said entrances and means to conduct electrical current to said elements to create said are discharge pattern, said passage in at least one element including a relatively reduced cross section throat region directly downstream of the entrance of the element passage, and a relatively increased cross section diffuser region directly downstream of the throat, the arc having loci of attachment to at least one element at said diffuser region.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Discharge Heating (AREA)
  • Treating Waste Gases (AREA)
US463799A 1965-06-14 1965-06-14 High efficiency plasma processing head including a diffuser having an expanding diameter Expired - Lifetime US3400070A (en)

Priority Applications (13)

Application Number Priority Date Filing Date Title
US463799A US3400070A (en) 1965-06-14 1965-06-14 High efficiency plasma processing head including a diffuser having an expanding diameter
GB25341/66A GB1130600A (en) 1965-06-14 1966-06-07 High efficiency plasma process head
SE07868/66A SE331466B (enrdf_load_stackoverflow) 1965-06-14 1966-06-08
BE682338D BE682338A (enrdf_load_stackoverflow) 1965-06-14 1966-06-09
FR64974A FR1484079A (fr) 1965-06-14 1966-06-10 Appareil et procédé de traitement à plasma et à haute efficacité
DE1564333A DE1564333C3 (de) 1965-06-14 1966-06-11 Vorrichtung zur Erzeugung eines Gasentladungsplasmas
AT562066A AT287131B (de) 1965-06-14 1966-06-13 Plasmagenerator und Verfahren zur Verwendung eines Plasmas
NO163409A NO121927B (enrdf_load_stackoverflow) 1965-06-14 1966-06-13
ES0327860A ES327860A1 (es) 1965-06-14 1966-06-13 Un aparato para tratamiento de plasma.
CH849966A CH460197A (de) 1965-06-14 1966-06-13 Vorrichtung zur Erzeugung eines Plasmas und Verfahren zum Betrieb dieser Vorrichtung
NL6608167A NL6608167A (enrdf_load_stackoverflow) 1965-06-14 1966-06-13
LU51326D LU51326A1 (enrdf_load_stackoverflow) 1965-06-14 1966-06-14
ES337898A ES337898A1 (es) 1965-06-14 1967-03-11 Un procedimiento de tratamiento de plasma.

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US463799A US3400070A (en) 1965-06-14 1965-06-14 High efficiency plasma processing head including a diffuser having an expanding diameter

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US (1) US3400070A (enrdf_load_stackoverflow)
AT (1) AT287131B (enrdf_load_stackoverflow)
BE (1) BE682338A (enrdf_load_stackoverflow)
CH (1) CH460197A (enrdf_load_stackoverflow)
DE (1) DE1564333C3 (enrdf_load_stackoverflow)
ES (2) ES327860A1 (enrdf_load_stackoverflow)
GB (1) GB1130600A (enrdf_load_stackoverflow)
LU (1) LU51326A1 (enrdf_load_stackoverflow)
NL (1) NL6608167A (enrdf_load_stackoverflow)
NO (1) NO121927B (enrdf_load_stackoverflow)
SE (1) SE331466B (enrdf_load_stackoverflow)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3512029A (en) * 1967-04-14 1970-05-12 Westinghouse Electric Corp Dual exhaust three-phase alternating current arc heater for chemical processing
US3516921A (en) * 1968-03-26 1970-06-23 Allis Chalmers Mfg Co Apparatus for magnetic stirring of discharge plasma in chemical synthesis
US3537965A (en) * 1969-06-16 1970-11-03 Diamond Shamrock Corp Process for the production of unsaturated hydrocarbons
DE2107834A1 (de) * 1970-03-02 1971-09-30 Westinghouse Electric Corp Lichtbogenheizeinrichtung
FR2084028A5 (enrdf_load_stackoverflow) * 1970-03-02 1971-12-17 Westinghouse Electric Corp
US3668108A (en) * 1966-11-15 1972-06-06 Hercules Inc Solids arc reactor apparatus and method
US3746830A (en) * 1969-01-10 1973-07-17 Westinghouse Electric Corp Recurrent arc heating system
US3891562A (en) * 1972-10-13 1975-06-24 Aga Ab Arrangement in a reactor for plasma-chemical processes
US4426597A (en) 1980-01-07 1984-01-17 Commissariat A L'energie Atomique Ionized gas generator at very high temperature and very high pressure
FR2609358A1 (fr) * 1987-01-07 1988-07-08 Electricite De France Torche a plasma a pied d'arc amont mobile longitudinalement et procede pour maitriser son deplacement
WO1989011775A1 (en) * 1988-05-17 1989-11-30 Commonwealth Scientific And Industrial Research Or Electric arc reactor
US5076051A (en) * 1990-02-06 1991-12-31 Olin Corporation Long life arcjet thruster having diffuse cathode arc attachment
EP0743811A1 (fr) * 1995-05-19 1996-11-20 Aerospatiale Societe Nationale Industrielle Torche à plasma d'arc à courant continu, particulièrement destinée à l'obtention d'un corps chimique par décomposition d'un gaz plasmagène
US20040055884A1 (en) * 2002-09-19 2004-03-25 Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
US20100252411A1 (en) * 2009-04-02 2010-10-07 Toshio Awaji Control method of plasma by magnetic field in an exhaust gas treating apparatus and an exhaust gas treating apparatus using the same
EP2888211A4 (en) * 2012-08-21 2016-06-22 Uop Llc METHODAL CONVERSION DEVICE AND METHOD USING AN OVERHEAD RATE REACTOR

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2913464C3 (de) * 1979-04-04 1983-11-10 Deutsche Forschungs- Und Versuchsanstalt Fuer Luft- Und Raumfahrt E.V., 5300 Bonn Gleichstrom-Plasmabrenner

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DE31337C (de) * P. COLPAERT in Audenarde, Belgien Trockendarre
US2892114A (en) * 1958-05-06 1959-06-23 Wallace D Kilpatrick Continuous plasma generator
US2920236A (en) * 1959-04-24 1960-01-05 Edmund S Chambers Apparatus for heating ions
US2960614A (en) * 1956-03-19 1960-11-15 George E Mallinckrodt Electric jet-forming apparatus
DE1097053B (de) * 1958-06-09 1961-01-12 E H Erwin Marx Dr Ing Dr Ing Verfahren zur Erzeugung von Plasmen sehr hoher Temperatur und Anordnungen zur Durchfuehrung des Verfahrens
US3132996A (en) * 1962-12-10 1964-05-12 William R Baker Contra-rotating plasma system
FR1395362A (fr) * 1964-05-20 1965-04-09 Thermal Dynamics Corp Torche à arc électrique
US3360682A (en) * 1965-10-15 1967-12-26 Giannini Scient Corp Apparatus and method for generating high-enthalpy plasma under high-pressure conditions

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE31337C (de) * P. COLPAERT in Audenarde, Belgien Trockendarre
US2960614A (en) * 1956-03-19 1960-11-15 George E Mallinckrodt Electric jet-forming apparatus
US2892114A (en) * 1958-05-06 1959-06-23 Wallace D Kilpatrick Continuous plasma generator
DE1153463B (de) * 1958-05-06 1963-08-29 Atomic Energy Commission Plasmaerzeuger zur Erzeugung eines kontinuierlichen Plasmastrahls
DE1097053B (de) * 1958-06-09 1961-01-12 E H Erwin Marx Dr Ing Dr Ing Verfahren zur Erzeugung von Plasmen sehr hoher Temperatur und Anordnungen zur Durchfuehrung des Verfahrens
US2920236A (en) * 1959-04-24 1960-01-05 Edmund S Chambers Apparatus for heating ions
US3132996A (en) * 1962-12-10 1964-05-12 William R Baker Contra-rotating plasma system
FR1395362A (fr) * 1964-05-20 1965-04-09 Thermal Dynamics Corp Torche à arc électrique
US3360682A (en) * 1965-10-15 1967-12-26 Giannini Scient Corp Apparatus and method for generating high-enthalpy plasma under high-pressure conditions

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3668108A (en) * 1966-11-15 1972-06-06 Hercules Inc Solids arc reactor apparatus and method
US3512029A (en) * 1967-04-14 1970-05-12 Westinghouse Electric Corp Dual exhaust three-phase alternating current arc heater for chemical processing
US3516921A (en) * 1968-03-26 1970-06-23 Allis Chalmers Mfg Co Apparatus for magnetic stirring of discharge plasma in chemical synthesis
US3746830A (en) * 1969-01-10 1973-07-17 Westinghouse Electric Corp Recurrent arc heating system
US3537965A (en) * 1969-06-16 1970-11-03 Diamond Shamrock Corp Process for the production of unsaturated hydrocarbons
DE2107834A1 (de) * 1970-03-02 1971-09-30 Westinghouse Electric Corp Lichtbogenheizeinrichtung
FR2084028A5 (enrdf_load_stackoverflow) * 1970-03-02 1971-12-17 Westinghouse Electric Corp
US3663792A (en) * 1970-03-02 1972-05-16 Westinghouse Electric Corp Apparatus and method of increasing arc voltage and gas enthalpy in a self-stabilizing arc heater
DE2109634A1 (de) * 1970-03-02 1972-08-03 Westinghouse Electric Corp Verfahren und Lichtbogenheizeinrichtung zum Erhitzen von Gasen mittels·eines Lichtbogens
US3891562A (en) * 1972-10-13 1975-06-24 Aga Ab Arrangement in a reactor for plasma-chemical processes
US4426597A (en) 1980-01-07 1984-01-17 Commissariat A L'energie Atomique Ionized gas generator at very high temperature and very high pressure
EP0277845A1 (fr) * 1987-01-07 1988-08-10 Electricite De France Torche à plasma à pied d'arc amont mobile longitudinalement et procédé pour maitriser son déplacement
FR2609358A1 (fr) * 1987-01-07 1988-07-08 Electricite De France Torche a plasma a pied d'arc amont mobile longitudinalement et procede pour maitriser son deplacement
WO1989011775A1 (en) * 1988-05-17 1989-11-30 Commonwealth Scientific And Industrial Research Or Electric arc reactor
US5076051A (en) * 1990-02-06 1991-12-31 Olin Corporation Long life arcjet thruster having diffuse cathode arc attachment
WO1992018983A1 (en) * 1990-02-06 1992-10-29 Olin Corporation Long life arcjet thruster having diffuse cathode arc attachment
US5688417A (en) * 1995-05-19 1997-11-18 Aerospatiale Societe Nationale Industrielle DC arc plasma torch, for obtaining a chemical substance by decomposition of a plasma-generating gas
FR2734445A1 (fr) * 1995-05-19 1996-11-22 Aerospatiale Torche a plasma d'arc a courant continu, particulierement destinee a l'obtention d'un corps chimique par decomposition d'un gaz plasmagene
EP0743811A1 (fr) * 1995-05-19 1996-11-20 Aerospatiale Societe Nationale Industrielle Torche à plasma d'arc à courant continu, particulièrement destinée à l'obtention d'un corps chimique par décomposition d'un gaz plasmagène
US20040055884A1 (en) * 2002-09-19 2004-03-25 Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
US7029560B2 (en) * 2002-09-19 2006-04-18 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Rod target for arc evaporation source, manufacturing method therefor, and arc deposition device
US20100252411A1 (en) * 2009-04-02 2010-10-07 Toshio Awaji Control method of plasma by magnetic field in an exhaust gas treating apparatus and an exhaust gas treating apparatus using the same
US9675930B2 (en) * 2009-04-02 2017-06-13 Clean Technology Co., Ltd. Control method of plasma by magnetic field in an exhaust gas treating apparatus and an exhaust gas treating apparatus using the same
EP2888211A4 (en) * 2012-08-21 2016-06-22 Uop Llc METHODAL CONVERSION DEVICE AND METHOD USING AN OVERHEAD RATE REACTOR
US9707530B2 (en) 2012-08-21 2017-07-18 Uop Llc Methane conversion apparatus and process using a supersonic flow reactor

Also Published As

Publication number Publication date
NO121927B (enrdf_load_stackoverflow) 1971-04-26
DE1564333C3 (de) 1973-01-04
DE1564333A1 (de) 1970-01-22
LU51326A1 (enrdf_load_stackoverflow) 1968-03-08
SE331466B (enrdf_load_stackoverflow) 1971-01-04
CH460197A (de) 1968-07-31
AT287131B (de) 1971-01-11
BE682338A (enrdf_load_stackoverflow) 1966-12-09
ES337898A1 (es) 1968-03-16
DE1564333B2 (de) 1972-06-15
GB1130600A (en) 1968-10-16
ES327860A1 (es) 1967-08-16
NL6608167A (enrdf_load_stackoverflow) 1966-12-15

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