US3343828A - High vacuum furnace - Google Patents

High vacuum furnace Download PDF

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Publication number
US3343828A
US3343828A US183841A US18384162A US3343828A US 3343828 A US3343828 A US 3343828A US 183841 A US183841 A US 183841A US 18384162 A US18384162 A US 18384162A US 3343828 A US3343828 A US 3343828A
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Prior art keywords
hearth
metal
furnace
chamber
molten
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US183841A
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Charles D A Hunt
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Airco Inc
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Air Reduction Co Inc
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Priority to US183841A priority Critical patent/US3343828A/en
Priority to GB11012/63A priority patent/GB959367A/en
Priority to AT218963A priority patent/AT264858B/de
Priority to CH372963A priority patent/CH412344A/de
Priority to LU43432D priority patent/LU43432A1/xx
Priority to NL63290817A priority patent/NL143278B/xx
Priority to DK144363AA priority patent/DK107891C/da
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Publication of US3343828A publication Critical patent/US3343828A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere

Definitions

  • Vacuum furnaces as they are known in the art, commonly employ electrical heating means which may, for example, radiate heat to the metal, however, improved versions of vacuum furnaces employ electron beam heating for supplying requisite energy for melting the metal.
  • Electron beam vacuum furnaces have been relatively widely employed in certain fields, particularly in those applications wherein only relatively minute amounts of metal are to be operated upon. In the instance wherein actual production ⁇ quantities of metal are to be melted, cast, and purified, it has been found that an interrupted zone process is possible by bombarding a melt stock with one or more electron beams and at the same time further bombarding a molten pool of the metal as it drips from the melt stock. The electron energy is thus employed to originally melt the metal and then to add further heat thereto for additional purification of the metal.
  • electron beam vacuum furnaces adapted for quantity melting and casting operations operate by what may be termed an interrupted zone process, wherein the material is fed into one or more electron beams for bombardment heating and melting of same so that the metal then drips or streams downwardly in a mold disposed below the melt stock. Within this mold additional heat is applied by electron bombardment to further raise the temperature of the metal and consequently to achieve additional purification thereof.
  • a relatively continuous process is possible in this type of furnace by continually removing the ingot formed in the cooled mold while continuously feeding melt stock into the bombarding electron beam.
  • the present invention is particularly directed to the provision of an improved vacuum furnace utilizing bombardment energy for the addition of heat to metal being processed together with the removal of volatile impurities and insoluble slags throughout processing while at the same time achieving a truly continuous process which is admirably suited to the melting, and purification of both low temperature and high temperature metals. Furthermore, the present invention is particularly directed to the attainment of a much greater degree of purification than is possible in conventional electron beam vacuum furnaces.
  • the present invention provides, among other features, for the establishment of a plurality of evacuated zones or regions.
  • the aforementioned first fvacuum region is isolated from the remainder of the furnace, and further-more, the surface of the molten metal therein is likewise retained Within the first region so that relatively light weight impurities floating upon the molten metal may be readily removed therefrom in this region.
  • the fiowing metal then passes through a second evacuated region wherein it is additionally heated by multiple bombardment with elementary particles such as electrons or other charged particles.
  • this second region provides for removal of volatile impurities arising fro-m the further heated metal liowing therethrough.
  • This second region may be further subdivided into separate vacuum stages.
  • the flowing 4metal is then -directed into such as a water cooled mold or the like for the formation of ingots of desired size or configuration.
  • a third vacuum region of the improved furnace hereof encompasses the sources of bombardment energy. This latter region is maintained at the highest vacuum of any of the regions, and is only connected with the first and second regions aforementioned by minute slots or the like in wall structure defining the third region.
  • the present invention provides for the attainment of :maximized operations in each of three separate regions of the furnace, i.e.
  • the initial melting region which is separate-d by a vapor Ibarrier from the remainder of the furnace, an additional heating region, wherein molten metal flows through an elongated path for multiple bombardment to raise the temperature of this metal as required and to maintain same for a desired period of time, and a separate highly evacuated region within which there are disposed the bombardment sources such as electron guns for maximum protection of such sources to attain an extended longevity and an improved operation thereof.
  • a generally rectangular pool of molten material is established, preferably with an elongated transverse flow of material therethrough so as to afford a maximized area of material and time of processing consistent with large through-put for the furnace.
  • This large area pool is heated and agitated to thereby accomplish maximum removal of occluded gases and volatile impurities without prior art limitations upon available heating time resulting from a dependence of output upon surface area of ingot that is being cast.
  • FIGURE 1 is an elevational view in section illustrating one preferred embodiment of the improved vacuum furnace of the present invention
  • FIGURE 2 is a partial plan view in section taken in the plane 2-2 of FIGURE l;
  • FIGURE 3 is an elevational Niew in section of one of the electron guns that may be employed in the furnace of FIGURE 1 and which are therein only illustrated in only block form;
  • FIGURE 4 is a plan view of the same gun illustrated in FIGURE 3;
  • FIGURE 5 is an elevational view in section of a multiple gun source useful in the furnace of the present invention.
  • FIGURE 6 is a schematic illustration of the same -gun configuration as shown in FIGURE 5 1but with the electron beam focus being set forth more particularly;
  • FIGURE 7 is an elevational view in section of an alternative embodiment of the improved vacuum furnace of the present invention which is particularly adapted to the melting, purification, and casting of high temperature metals;
  • FIGURE 8 is a transverse sectional view of the furnace hearth with metal therein and additionally illustrating means for sweeping the bombarding electron beams over the surface of the molten metal in the furnace;
  • FIGURE 9 is a partial view in section taken in a vertical longitudinal plane of the hearth and showing an alternative embodiment of the furnace.
  • FIGURE 10 is a schematic illustration of a multiple hearth arrangement in accordance with the invention.
  • FIGURES 1 and 2 illustrating a preferred embodiment of the vacuum furnace hereof particularly adapted for th m t1 purification, and casting of relatively low temperature metals.
  • the furnace comprises a Igenerally rectangular hearth 11 disposed wit formed of an outer water cooled shell 13 and an inner high temperature liner 14 with insulating material 16 separating the liner lfrom the shell.
  • Suitable mounting means are provided beneath the shell 13 so that the hearth is disposed horizontally within the .vacuum housing 12, as illustrated.
  • the housing 12 is internally divided into three separate regions identified as 17, 18, and 19 in FIG URE 1, and these regions are separated by vapor barriers 21 and 22, described in more detail below.
  • the hearth extends into both of the separate regions 17 and 18 and provision is made for feeding a melt stock 23 into region 17 above the hearth for melting of the material of the melt stock therein so that the molten material will drip or stream downwardly into the open top of the hearth.
  • feed and support means Afor the melt stock may take a wide variety of configurations and there may -be employed either vertical, angular, or horizontal feed of the melt stock as desired.
  • FIGURE 1 a horizontal melt stock feed, wherein the melt stock 23 is disposed upon a water cooled table 24 and is engaged by feed means controllably moving the melt stock further into the region 17 over the hearth as successive amounts of the melt stock are melted away from the leading edge 27 thereof.
  • the melt stock may ⁇ be disposed entirely within the housing or may extend through vacuum lock means included in the block illustration at 26 exteriorly of the housing. Inasmuch as the actual melt stock feed forms no part of the present invention other than the particular location of same relative to the remainder of the furnace, further details of this portion of the furnace are excluded herefrom.
  • the vacuum housing 12 is divided into three separate regions which are separated by vapor barriers and it is herein further noted that these regions are maintained at different degrees of vacuum. Melting of the melt stock as it is fed over the hearth within the region 17 will cause a substantial evolution of gases and vapors, in addition to the liquid metal and other impurities mixed therewith which drip into the hearth. Evacnation of the region 17 is accomplished by high speed vacuum pumps, such as illustrated at 31. By the provision of evacuation means having an adequate capacity, there is maintained in the region 17 a substantial vacuum, as of the order of one to twenty microns of mercury, despite the above noted evolution of substantial quantities of gas and vapors during the initial melting of the melt stock.
  • This region 17 is sealed from the other fvacuum regions 18 and 19 of the furnace by means of the above noted vapor barrier 21 which extends as a generally vertical wall downwardly from the top of the housing 12 into a pool 33 of liquid metal formed in the hearth by melting of the melt stock.
  • the vapor barrier also extends about the hearth outwardly therefrom into engagement with the side walls and bottom of the housing 12, but has an opening therethrough within the hearth so that liquid metal may flow through the wall of the barrier.
  • a seal is formed by the extension of this vapor barrier wall into the pool 33 and the lower portion of the wall or barrier extending into the pool may be formed of a separate high temperature metal or material, as indicated at 34.
  • Bombardment of the melt stock to initially melt same in the region 17 is accomplished by the direction of one or more beams of subatomic particles onto the leading edge of the melt stock as it is fed over the hearth.
  • the bombardment beam 36 may, for example, be formed of electrons or ions generated and directed by a source 37 disposed in the vacuum region 19 on the opposite side of the vapor barrier 21 from the region 17.
  • the beam 36 is focused through a small opening 38 in this vapor barrier, and as noted below, minimization of the size of this opening then allows the maintenance of a different pressure on opposite sides of the vapor barrier.
  • the scum is pushed from the top of the pool into some type of sump 42 from which it may be drained or otherwise removed from the furnace.
  • the drain pipe 43 shown may be suitable for such removal if the scum is sufficiently fiuid, otherwise other means may be employed to remove the solids. It will, of course, be appreciate-d that this drain pipe 43 is disposed :adjacent the bottom of the sump 43 in order that a liquid seal will be maintained -therein for preserving the vacuum in the region 17 of the furnace.
  • the metal or other material to be operated upon herein shall be initially melted in one vacuum region of the furnace separated from the remainder of the region for vacuum purposes. This molten material or metal is then directed to iiow along the open hearth 11 for further heating, so as to additionally volatilize impurities therein, and consequently, to attain an increased purilication of the metal. All sources of bombardment energy employed in the present invention are located within the vacuum region 19, which is maintained at the highest vacuum of any portion of the furnace.
  • a plurality of beam sources such, for example, electron beam sources 51 schematically illustrated in FIGURE 1 and each producing at least one electron beam 52 which is focused through a small aperture 53 in the vapor barrier 22.
  • These electron guns may be directly mounted upon the vapor barrier 22 which then serves as a ceiling for the hearth portion of the furnace wherein purification of the metal is mainly accomplished, and also :as a oor for the region 19 containing the electron guns.
  • Evacuation of the region 19 is accomplished by high speed vacuum pumping means 54 communicating with the region 19 through walls of the housing 12 and establishing within the region 19 a vacuum of the order of .02 to 0.2 micron of mercury.
  • high speed vacuum pumping means 54 communicating with the region 19 through walls of the housing 12 and establishing within the region 19 a vacuum of the order of .02 to 0.2 micron of mercury.
  • This is accomplished in accordance with the present invention by the minimization of the size of the electron beam apertures 53 provided for entrance of bornbarding electron beams into the region 18, :and also by minimizing the size of a like aperture 38 communicating between the region 19 and the initial melt region 17.
  • the manner of maintaining these apertures of minimum size reference is made to a following portion of the description hereof relative to possible electron gun configurations.
  • the inlet end of the hearth may be defined as the end into which initially melted metal drips from the melt stock and the outlet end of the hearth is disposed some distance therefrom along a flow path of molten metal through the hearth and is provided with outlet means for pouring of molten metal into a mold.
  • a funnel or tundish 61 extending from the outlet end of the hearth over a mold 62 into which the molten metal flows. In order-to insure flow of molten metal through this spout or tundish, the upper side thereof is left open and an electron beam is directed therein, as illustrated.
  • FIGURE 1 a solidified ingot 63 formed within the mold 62 by solidification of the molten metal flowing therein from the hearth through the tundish 61.
  • This ingot may extend through the bottom of the furnace housing 12, and in practice there is provided a substantial depth beneath this end of the furnace so that a relatively elongated ingot may be formed in one operation and continuously withdrawn from the furnace as the metal solidifies in the mold. Quite clearly the rate of withdrawal of solidified material must be related to the rate of initial melting of the melt ,stock and the actual rate of ow of molten metal from the hearth end of the mold.
  • Evacuation of the region 18 encompassing the majority of the hearth wherein purifying bombardment of the molten metal is accomplished, and the ingot casting means at the end of the hearth, may be carried out by high speed evacuation pumps as schematically indicated at 64.
  • the degree of vacuum maintained within the region 18 is intermediate between the extremely high vacuum maintained in the electron gun region 19, and the initial melt region 17 of the furnace.
  • the hearth liner is preferably formed of graphite and will be heated by contact with the molten copper so as to thereby serve to remove oxygen from the copper.
  • the outer shell of the hearth may, for example, be formed of copper with water cooling tubes therein or thereabout while the intermediate insulation 16 between the liner shell may, for example, be formed of porous carbon blocks.
  • the vapor barrier 21 is formed of copper in this instance with a graphite tip 34 thereon, and similarly the other vapor barrier 22 may be likewise formed of copper.
  • the outlet or tundish 61 is also preferably formed of graphite and there may be employed cold mold casting, wherein the mold 62 is maintained at a sufficiently low temperature for solidification of copper therein as it flows through the tundish from the hearth.
  • the furnace hereof pro- -vide a substantially elongated flow path for the metal being purified in the region 18 of the furnace, in order that purification of the metal may be maximized.
  • This length of flow may be increased by the utilization of graphite dividers 66 extending laterally across the hearth from alternately opposite sides thereof just short of touching the other side, so as to thereby define a serpentine path for molten metal flow from the inlet end of the hearth to the outlet end thereof.
  • the melt stock 23 of relatively impure copper is fed into the bombarding beam 36 so as to be heated and melted above the hearth, and consequently, to drip downwardly therein and to fill the hearth with a pool or stream of molten copper 33.
  • the opening in the lower portion 34 of the vapor barrier 21 allows the molten copper to ow longitudinally in the hearth from the right to left, and the separators 66 in the hearth provide for an elongated iidi'lmpmzitliwsb that the molten copper follows a serpentine passage from the inlet to outlet end of the hearth.
  • the molten copper is additionally heated by bombardment with such as electron beams 52 directed into the hearth upon the upper surface of the molten copper.
  • This additional heating then provides for the establishment of substantial thermal gradients in the copper so that a material agitation or stirring of the copper results.
  • the addition of further heat to the copper along the extended flow path and upon the extended surface area thereof accomplishes very substantial purification of the copper in that a very high percentage of volatile impurities in the copper are removed therefrom.
  • These impurities include not only such compounds as may volatilize at a temperaturfe below the melting point of copper, but, furthermore, those gases which may be occluded within the copper as originally fed into the furnace.
  • the furnace hereof provides for the direction of bombardment energy into the open top of the mold 62 so that the copper solidities at the bottom of a molten pool within this mold, and consequently, there is attained a very dense ingot without voids or the like which would otherwise occur in the absence of this manner of casting.
  • the various materials suitable for use in the furnace of the present invention wherein copper, for example, is to be operated upon has been set forth above, and it is again noted that the utilization of graphite liner 14 for the hearth and separators therein is highly advantageous in that a material oxygen removal from the copper is accomplished by the contact of molten copper with the heated graphite.
  • the rectangular pool of copper established in the hearth has a materially elongated dimension with respect to the depth of the molten metal.
  • the inner open portion of the hearth may have a dimension of 4 by 6 feet with a molten metal, such as copper, having a depth of about 2 inches therein.
  • Provision of bombardment energy in the furnace hereof for the initial melting of material fed therein and the addition of further heat to the molten metal owing as a stream throughout the hearth of the furnace may be accomplished by energtic beams of subatomic particles.
  • energtic beams of subatomic particles Considering the ease of generation and of control, it ⁇ is advantageous herein to employ either electron beams or ion beams.
  • FIGURES 3 to 6 certain electron gun configurations highly suited for the present invention and as regard the criteria for the type of beam employed herein, it is of primary importance that it be focused to pass through very small apertures in the vapor barriers of the furnace.
  • an electron source 71 is schematically illustrated as including an electron emissive filament 72 disposed at least in part within a backing electrode 73 and having electron accelerating means 74 displaced from the filament.
  • the electron accelerating means 74 is maintained at a relatively positive potential with respect to the filament and thus attracts emitted electrons as a beam from the source.
  • This source 71 l may also be considered to constitute an electron gun, inasmuch as electrons are directionally emitted therefrom in a beam.
  • the electron beam 76 which may correspond to the individual beams 52 of FIGURE l, will have a certain divergence and there is illustrated two separate electron paths as defining, for example, the envelope of the beam.
  • the electron gun be protected from bombardment by positive ions generated within the furnace ⁇ and also from vapors and the like which might otherwise deposit upon the portions of the gun and deleteriously effect gun operation and even eventually render same inoperable.
  • the furnace hereof is capable of continuous operation and provides a maximum protection for the electron guns hereof by the isolation of the gun region 19 from the regions 17 and 18 of the furnace, wherein substantial quantities of gases and vapors may be evolved. Furthermor the electron gun 71 will be seen to Vbe laterally displaced from the relatively small opening 53 in the horizontal vapor barrier 22.
  • the electron ⁇ beam 76 is curved and focused to pass through this small opening 53 by means of a magnetic field generated between a pair of pole pieces 81 and 82 by a suitable coil 33 lacross the ends of these pole pieces.
  • the pole pieces may, for example, be made of iron or the like and have the form of generally flat plates extending upwardly from the top side of the vapor barrier 22 toward the electron gun 71 from the coil 83, so that the magnetic field is genenated across the top of the opening 53.
  • the present invention provides for the direction of the beam into a convex magnetic field, as viewed by the electron gun, and thence into focus substantially at the opening 53.
  • the beam is generated in a region of relatively weak magnetic field and directed through a barrelshaped field in focus at the strongest portion of the magnetic eld.
  • This type of beam control provides a lateral compression of the beam, as shown in FIGURE 4, because of the curvature of the field lines and consequent detiecting forces applied to the electrons. A maximum focusing effect is achieved in this manner and this is highly desirable in passing the beam through the smallest possible aperture in the vapor barrier.
  • the present invention provides for maximum protection of the electron guns from contaminating influences originating within the hearth region of the furnace.
  • Extremely small apertures are provided through the vapor barriers 21 and 22, 'and consequently, the possibility of metal vapor dispersing through the apertures is quite small.
  • the large quantity of electrons passing in focus through the minute apertures 53 minimize the possibility of the vapor continuing upwardly through the apertures without being ionized.
  • the passage of ions through the aperture 53 will be seen to then result in these ions entering a magnetic field which has the proper field strength to deliect electrons through the aperture but insufcient strength to deflect ions back into the electron gun.
  • the vapor barriers 21 and 22 are formed of a nonmagnetic material such as copper, for example, and it will be appreciated that a certain amount of vapor arising from the molten metal in the hearth of the furnace will impinge upon these Vapor barriers. It is thus advantageous to provide ⁇ cooling means for the barriers and such is schematically illustrated as cooling tubes 84 on the barrier 22 in FIGURE 3, the tubes being adapted to carry cooling water across the surface of the vapor barrier. These cooling tubes may be disposed above or below the vapor barrier depending upon the dictates of particular ⁇ design considerations and thus, for example, in FIGURE 5 the same cooling tubes are illustrated as being disposed above the vapor barrier in contact therewith.
  • FIGURE 5 One method of accomplishing this result is illustrated in FIGURE 5, wherein it will be seen that there is provided two separate electron guns 91 and 92.
  • the gun 91 is disposed at a greater distance from the center of the magnetic field than is the gun 92, and consequently, electrons emitted from the gun 91 will pass through a weaker field and will thus be curved less by the field so as to traverse orbits of less curvature.
  • the electron beam focusing described above preferably results in the establishment of the beam focus slightly above the vapor barrier 22, rather than directly in the aperture 53 of this barrier.
  • the representation of FIGURE 6 is included only for the purpose of precluding misunderstanding of the beam focusing, for in practice it is found that the focal point of the beam or beams is only slightly displaced above the vapor barrier and that consequently the minute physical dimensions of the barrier aperture 53 are yet attainable.
  • Examples of these types of metals include columbium, hafnium, tantalum, titanium, zirconium, and tungsten. While the general concepts of the present invention are equally applicable to all types of metals, it will be appreciated that certain physical variations of furnace structure are desirable and, in fact, necessary for the containment of those metals which are only molten at temperatures in the thousands of degrees or which react with typical container materials such as oxides. There is illustrated in FIGURE 7 a variation of the present invention particularly adapted for utilization with refractory metals.
  • the furnace of this invention includes an elongated generally rectangular hearth 101, formed in this instance of a material such as copper and including cooling means such as the water passages 102 illustrated therethrough.
  • This elongated hearth or open topped container 101 is mounted by suitable footing within a vacuum housing 103.
  • the furnace of FIGURE 7 is illustrated to be divided into three separate vacu-um regions.
  • the first region 104 is evacuated by suitable pumping means 106 and encompass the initial melting operation of a melt stock 107 fed over the top of the hearth 101.
  • the melt stock 107 may be fed vertically or horizontally into an electron beam 108 for initial melting of the melt stock so that same drips downwardly into the hearth.
  • the vapor barrier in the form of a generally vertical Wall 109 separates the vacuum region 104 from the remainder of the furnace.
  • This wall or barrier 109 extends from the top of the furnace downwardly into the hearth 101 and also surrounds the hearth both on the sides and bottom so as to substantially completely isolate the initial vacuum region 104 from the remainder of the furnace.
  • Within the hearth 101 there is disposed a molten high temperature metal resulting from the melting of the melt stock 107, and owing to the substantial cooling of the hearth 101 there will then be formed a solidified layer 111 of metal along the bottom and walls of the hearth.
  • This molten metal 112 flows longitudinally through the hearth from the input end to an output end.
  • the vapor barrier 109 which may also be formed of material such as copper with water coolingT therein, as indicated, extends into the molten sheet of metal 112, and consequently, there will be formed a solidified portion of metal 113 about the end or tip of this barrier extending into the molten metal, as indicated.
  • a second vacuum region 116 On the opposite side of the barrier 109 from the input end of the hearth there is defined a second vacuum region 116 about the hearth, and this region is separated by a generally horizontal vapor barrier 117 from an upper gun region 118 of the furnace.
  • Molten metal flowing as a sheet 112 along the hearth 101 toward the outlet end thereof is bombarded as by electron beams 121 directed onto the upper surface of this metal. This additional electron bombardment serves to overcome heat losses and to further heat the metal and to raise same to an extremely high temperature for added removal of volatile impurities therein.
  • a water cooled spout or tundish 122 through which molten metal flows from the hearth to drip downwardly into a water cooled mold 123.
  • High speed evacuation means 124 serve to continuously evacuate the vacuum region 116 of the furnace so as to maintain a very substantial vacuum within this portion of the furnace and to insure the rapid removal of gases and vapors evolved from the extremely high temperature molten metal being processed therein.
  • Cooling of the mold 123 serves to solidify metal dripped therein from the hearth, and heat is applied to the upper surface of this metal dripping into the mold so as to maintain a molten pool of metal within the mold above the ingot.
  • this molten metal maintained atop the ingot 126 as it solidifies serves to prevent the occurrence of voids or density irregularities in the ingot.
  • the furnace embodiment of FIGURE 7 provides an extremely high vacuum region 118 within which there are disposed the multiplicity of bombardment sources 131.
  • One of these sources directs a beam of subatomic particles 108 through the vapor barrier 109 for initially melting the melt stock 107, and also for applying added heat to the metal within the hearth at the entrance end of the hearth.
  • a plurality of the bombardment sources 131 direct beams downwardly through small openings in the generally horizontal vapor barrier 117 so as to thus bombard the upper surface of the molten metal sheet 112 owing along the hearth. This application of additional heat serves, as previously stated, to further purify the metal being processed.
  • Certain other bombardment sources 131 also disposed within the high vacuum region 118 direct beams downwardly through openings in the vapor barrier 117 to insure the maintenance of a molten pool atop the solidfying ingot 126, and also to insure the continuous flow of molten metal through the outlet 122 of the furnace.
  • These bombardment sources 131 may, for example, comprise the and in this respect such vacuum may again be established'l...
  • FIGURE 7 The embodiment of the present invention illustrated in FIGURE 7 is, as above noted, particularly adapted for operation upon iron and nickel-base alloys and high temperature metals, and it is found that with only a very thin sheet or film of molten metal 112 continuously flowing through the furnace hereof it is possible to purify these refractory metals to such an extent that only one pass of same through the furnace is necessary to attain resultant metals of a purity hitherto substantially unknown.
  • the continuous processing hereof wherein the molten metal is subjected to repeated heating to very high temperatures, accomplishes in a simplified manner results which have previously only been possible through the repeated passage of metals through high temperature vacuum furnaces.
  • the division of the furnace hereof into separate portions by the vapor barriers within the furnace serves to minimize the difiiculties attendant the separate operations performed in these individual regions.
  • the very substantial vapor and gas evolution occurring in the initial portion 104 of the furnace is prevented from entering other portions of the furnace to thereby limit the purification or damage the electron guns, for example, utilized in providing bombardment energy.
  • the separation of the bombardment sources from the region of gas and vapor evolution during metal purification, as is accomplished by the generally horizontal vapor barrier 117, serves to materially enhance the operation of these sources and to provide for a substantial increase in the longevity thereof.
  • Prior art difficulties with respect to electron beam bombardment, for example is almost entirely overcome by the present invention.
  • FIGURE 8 This figure, showing the hearth of the furnace of FIGURE 7 in cross section, illustrates the provision of magnetic pole pieces 152 extending upwardly alongside of the hearth. These pole pieces extend beneath the hearth to opposite ends of a magnetic coil 153, which upon suitable energization will pass a magnetic ux through the pole pieces and thence across the top of the hearth.
  • the present invention may be varied in numerous ways to suit particular design considerations or to vary certain structural features thereof.
  • the mounting of the hearth may be accomplished in the variety of ways, and the physical positioning of the vacuum housing of the furnace may be varied, particularly with respect to the provision of space for withdrawing a substantially elongated ingot of metal from one end thereof.
  • the housing itself may be at ground level and a trench or depression formed to accommodate lowering of the ingot from the furnace, or alternatively the furnace itself may be mounted in a raised position above the fioor of a building or the like so that adequate clearance is provided beneath the housing for removal of the ingot.
  • FIGURE 9 a portion of a vacuum furnace wherein molten material 33 flows through a plurality of separately evacuated regions during processing of this material.
  • the furnace of FIGURE 9 includes the hearth 11 with a relatively vertical vapor barrier 21 separating an initial melting region 17 from the remainder of the flow path of molten material within the furnace.
  • Vertical walls or bafiies 66 disposed in part across the hearth provide for establishing a serpentine flow path for the molten material, and at least some of these walls extend upwardly and outwardly to form vapor barriers 66.
  • reaction or purification region is thus divided into separate portions indicated at 18 and 18' with each of the regions having separate evacuation ports 151.
  • This structure there is provided for separate evacuation of consecutive reaction or purification regions through which the molten material 33 flows, and consequently, there may be produced a greater vacuum in subsequent regions along the flow path in order to maximize purification of the molten material.
  • FIGURE 9 only relates to the establishment of successive separated vacuum regions along the fiow path and does not attempt to show all elements of a complete furnace, reference being made to FIGURES 1 and 7 in this respect.
  • FIGURE 10 A multiple hearth arrangement is schematically illustrated in FIGURE 10 wherein there are shown three successive hearths 11a, 11b, and 11C connected by tundishes 61a and 61b and directing ultimately purified materials through a final tundish outlet 61C into a mold 62.
  • FIG- URE l0 the schematic illustration of FIG- URE l0 is not intended to depict details of the furnace, it is noted that one or more vacuum housings 12' are provided in enclosing relationship to the hearths and, of course, suitable evacuation means are provided for establishing a high vacuum within such enclosure. Separate portions of the over-all housing 12' may be separately evacuated and separated from successive portions as indicated, for example, by the dashed lines in FIGURE l0 and in accordance with the above description of the present invention.
  • the region about the initial hearth 11a is divided into separate portions by vapor barriers such as illustrated and described in connection with FIGURE 1 of the drawings hereof, and the regions about the further hearths 11b and 11c may be divided into separate vacuum regions by vapor barriers such as discussed above in connection with the illustration of FIGURE 9.
  • the utilization of a plurality of hearths comprising a single elongated flow path is particularly desirable in very large furnace installations, however, the various embodiments and alternatives of the present invention described herein and those variations apparent to those skilled in the art may be combined in any desired manner to accommodate varying circumstances or to overcome particular problems in connection with the purification and casting of alternative materials in varying quantities.
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal and for forming a molten po-ol thereof, a. generally upright transverse wall positioned intermediate the ends of said hearth dividing said enclosure into a first pressure chamber and a second pressure chamber, said wall including a tip portion extending into the molten pool of metal in said hearth to a position below the normal level of the pool and above the hearth bottom thereby defining an opening for passage of molten metal from the first chamber to the second chamber, first electron beam generating means for heating raw materials above their melting point in said first chamber and for heating the molten pool of metal in said hearth in said first chamber, second electron beam generating means for heating the molten pool of metal in said hearth in said second chamber, means for evacuating said rst chamber and said second chamber to remove volatilized impurities, and means adapted to receive the purified metal from said hearth for withdrawal from the furnace.
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal and for forming a molten pool thereof, said enclosurel having a transverse wall therein intermediate the ends of said hearth which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining an opening for passage of molten metal from said first chamber into said second chamber, means extending into the molten pool and transversely of said hearth for preventing floating impurities from traveling along said hearth, fsureepi-agarracanadianas ed to move acrossrthe top of.themoltenepoolto'fremove fioatiii'gim'pii'rities
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal and for forming a molten pool thereof, said enclosure having a transverse wall therein intermediate the ends of said hearth which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing ⁇ said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining an opening for passage of molten metal from said first chamber into said second chamber, said transverse wall being provided with at least one slit at a point above the normal level of the molten pool in said hearth to allow passage of an electron beam therethrough, a generally horizontally disposed wall in said second chamber positioned intermediate said hearth and said slit in said transverse wall defining with said enclosure and said transverse wall
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal and for forming a molten pool thereof, said enclosure having a transverse Wall therein intermediate the ends of said hearth which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the ⁇ molten pool thereby defining an opening for passage of molten metal from said first chamber into said second chamber, said transverse wall being provided with at least one slit at a point above the normal level of the molten pool in said hearth to allow passage of an electron beam therethrough, a generally horizontally disposed wall in said second chamber positioned intermediate said hearth and said slit in said transverse wall defining with said enclosure and said transverse wall an
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal and for forming a molten pool thereof, said enclosure having a transverse Wall therein intermediate the ends of said hearth which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining an opening for passage of molten metal from said first chamber into said second chamber, said transverse wall being provided with at least one slit at a point above the normal level of the molten pool in said hearth to allow passage of an electron beam therethrough, a generally horizontally disposed wall in said second chamber positioned intermediate said hearth and said slit in said transverse wall defining with said enclosure and said transverse wall an electron gun
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal and forming a molten pool thereof, said hearth including ahightemperature graphite liner separatedinom a surrounding cooled shell by heat insulation, said enclosure having a transverse Wall therein intermediate the ends of said hearth which Iforms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining Ian opening for passage of molten metal from said first chamber into said second chamber, first electron beam generating means for heating raw materials above their melting point in said first chamber and for heating the molten pool of metal in said hearth in said first chamber, second electron beam generating means for heating the molten pool of metal in said
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclos-ure for receiving molten metal and for forming a molten pool thereof, said hearth comprising an open-topped cpntingously cooled container in which -a poitio'i'of the -molten metal 50 solidifies to form a skull therein With a thin sheet of molten metal thereon, said enclosure having a transverse wall therein intermediate the ends of said hearth which forms with the Walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second .pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining an opening for passage of molten ymetal from said first chamber into said second chamber, first electron beam generating means for heating raw materials above
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal defining an elongated fiow path of large surface area from an inlet end to an outlet end, said hearth having a large width and length relative to depth and having a plurality of upstanding dividers alternately extending laterally inward 4from opposite walls thereof substantially but not completely across said hearth to define an elongated serpentine flow path for the molten metal in said hearth, said enclosure having a transverse Wall therein intermediate the ends of said hearth which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating 'at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining an opening for passage of molten metal from said first chamber into said second chamber,
  • a high vacuum furnace for the production of highly purified metal comprising an enclosure, an elongated horizontally disposed hearth Within said enclosure for receiving molten metal defining an elongated flow path of large surface area from an inlet end to an outlet end, said enclosure having a transverse wall therein intermediate the ends of said hearth which forms with the Walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent theysurface of the molten pool thereby defining an opening for passage of molten metal Ifrom said first chamber into said second chamber, at least one additional transverse wall intermediate the ends of said hearth in said second chamber which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said second chamber into a plurality of additional pressure chambers, said additional transverse
  • a high vacuum furnace for the production of highly purified metal comprising ⁇ v an enclosure, an elongated horizontally disposed hearth within said enclosure for receiving molten metal defining an clon-gated fiow path of large surface area from an inlet end to an outlet end, said enclosure having a transverse wall therein intermediate the ends of said hearth which forms with the walls of said enclosure, said hearth, and the molten pool of metal in said hearth a pressure barrier thereby dividing said enclosure into a first pressure chamber and a second pressure chamber, said transverse wall in the region within said hearth terminating at a point spaced above the bottom of said hearth and adjacent the surface of the molten pool thereby defining an opening for passage of molten metal from said first chamber into said second chamber, first electron beam generating means for heating raw materials above their molting -point in said first chamber above their melting poinvtwgnd for heating the molten pool of metal in said hearth in said first chamber, additional E ,lectnollmgefr'ieratin

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US183841A US3343828A (en) 1962-03-30 1962-03-30 High vacuum furnace
GB11012/63A GB959367A (en) 1962-03-30 1963-03-20 High vacuum furnace
AT218963A AT264858B (de) 1962-03-30 1963-03-20 Hochvakuumofen zur Herstellung sehr reiner Metalle
CH372963A CH412344A (de) 1962-03-30 1963-03-25 Hochvakuumofen
LU43432D LU43432A1 (enrdf_load_stackoverflow) 1962-03-30 1963-03-27
NL63290817A NL143278B (nl) 1962-03-30 1963-03-28 Inrichting voor het continu behandelen van metalen onder vacuuem.
DK144363AA DK107891C (da) 1962-03-30 1963-03-29 Fremgangsmåde og ovn til kontinuerlig smeltning, raffinering og udstøbning af materiale under vakuum.

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AT (1) AT264858B (enrdf_load_stackoverflow)
CH (1) CH412344A (enrdf_load_stackoverflow)
DK (1) DK107891C (enrdf_load_stackoverflow)
GB (1) GB959367A (enrdf_load_stackoverflow)
LU (1) LU43432A1 (enrdf_load_stackoverflow)
NL (1) NL143278B (enrdf_load_stackoverflow)

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US3474218A (en) * 1966-01-10 1969-10-21 Air Reduction Electron beam conditioning ingot and slab surfaces
US3554512A (en) * 1969-03-24 1971-01-12 George H Elliott Crucible for holding molten semiconductor materials
US3634045A (en) * 1967-04-14 1972-01-11 Atomic Energy Authority Uk Growing of crystals using electron beam heating and annealize
US3660585A (en) * 1970-06-24 1972-05-02 Robert D Waldron Frozen shell metal melting means
US3790145A (en) * 1970-06-10 1974-02-05 Graenges Essem Ab Device in a melting or holding furnace for facilitating the charging thereof
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US3887171A (en) * 1973-03-12 1975-06-03 Kloeckner Werke Ag Apparatus for purifying in continuous casting silicon- and/or aluminium-killed steel
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US5516081A (en) * 1994-07-18 1996-05-14 General Electric Company Water-cooled molten metal refining hearth
US5531425A (en) * 1983-06-06 1996-07-02 Alcan Aluminum Corporation Apparatus for continuously preparing castable metal matrix composite material
EP0896197A1 (en) * 1997-08-04 1999-02-10 Oregon Metallurgical Corporation Straight hearth furnace for titanium refining
US6175585B1 (en) * 1999-07-15 2001-01-16 Oregon Metallurgical Corporation Electron beam shielding apparatus and methods for shielding electron beams
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US20040103751A1 (en) * 2002-12-03 2004-06-03 Joseph Adrian A. Low cost high speed titanium and its alloy production
WO2005017233A3 (en) * 2003-06-06 2005-06-23 Rmi Titanium Co Insulated cold hearth for refinning metals having improved thermal efficiency
US20080237200A1 (en) * 2007-03-30 2008-10-02 Ati Properties, Inc. Melting Furnace Including Wire-Discharge Ion Plasma Electron Emitter
US20090272228A1 (en) * 2005-09-22 2009-11-05 Ati Properties, Inc. Apparatus and Method for Clean, Rapidly Solidified Alloys
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US3474218A (en) * 1966-01-10 1969-10-21 Air Reduction Electron beam conditioning ingot and slab surfaces
US3457064A (en) * 1966-05-24 1969-07-22 Chemical Construction Corp Continuous vacuum degassing of liquids
US3464687A (en) * 1966-12-01 1969-09-02 Chung Wie Chang Apparatus for continuous steel refining
US3437328A (en) * 1967-04-13 1969-04-08 Air Reduction Powder crucibles
US3634045A (en) * 1967-04-14 1972-01-11 Atomic Energy Authority Uk Growing of crystals using electron beam heating and annealize
US3554512A (en) * 1969-03-24 1971-01-12 George H Elliott Crucible for holding molten semiconductor materials
US3809379A (en) * 1970-04-21 1974-05-07 Alsacienne Atom Installation for the treatment and movement of liquid metals
US3790145A (en) * 1970-06-10 1974-02-05 Graenges Essem Ab Device in a melting or holding furnace for facilitating the charging thereof
US3660585A (en) * 1970-06-24 1972-05-02 Robert D Waldron Frozen shell metal melting means
US3887171A (en) * 1973-03-12 1975-06-03 Kloeckner Werke Ag Apparatus for purifying in continuous casting silicon- and/or aluminium-killed steel
US4190404A (en) * 1977-12-14 1980-02-26 United Technologies Corporation Method and apparatus for removing inclusion contaminants from metals and alloys
US5531425A (en) * 1983-06-06 1996-07-02 Alcan Aluminum Corporation Apparatus for continuously preparing castable metal matrix composite material
US4488902A (en) * 1983-06-10 1984-12-18 Duval Corporation Horizontal, multistage electron beam refinement of metals with recycle
WO1984004933A1 (en) * 1983-06-10 1984-12-20 Duval Corp Electron beam refinement of metals, particularly copper
US4518418A (en) * 1983-06-10 1985-05-21 Duval Corporation Electron beam refinement of metals, particularly copper
US4558729A (en) * 1984-01-12 1985-12-17 Demetron, Inc. Method for high vacuum casting
US4690875A (en) * 1984-01-12 1987-09-01 Degussa Electronics Inc., Materials Division High vacuum cast ingots
US4583580A (en) * 1984-09-28 1986-04-22 Electro Metals, A Division Of Demetron, Inc. Continuous casting method and ingot produced thereby
US4681787A (en) * 1984-09-28 1987-07-21 Degussa Electronics Inc. Ingot produced by a continuous casting method
US4641704A (en) * 1985-01-25 1987-02-10 Degussa Electronics Inc. Continuous casting method and ingot produced thereby
US4727928A (en) * 1985-09-23 1988-03-01 Metallurgie Hoboken-Overpelt Process for the preparation of refined tantalum or niobium
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EP0300411A3 (en) * 1987-07-21 1990-05-30 Retech, Inc. Melting retort and method of melting materials
US4850577A (en) * 1988-06-15 1989-07-25 Kabushiki Kaisha Daiki Aluminum Kogyosho Melting and holding furnace
US4932635A (en) * 1988-07-11 1990-06-12 Axel Johnson Metals, Inc. Cold hearth refining apparatus
WO1990000627A1 (en) * 1988-07-11 1990-01-25 Axel Johnson Metals, Inc. Cold hearth refining apparatus and method
US4838340A (en) * 1988-10-13 1989-06-13 Axel Johnson Metals, Inc. Continuous casting of fine grain ingots
WO1995023238A1 (en) * 1994-02-23 1995-08-31 Orbit Technologies, Inc. Low cost titanium production
US5503655A (en) * 1994-02-23 1996-04-02 Orbit Technologies, Inc. Low cost titanium production
US5516081A (en) * 1994-07-18 1996-05-14 General Electric Company Water-cooled molten metal refining hearth
EP0896197A1 (en) * 1997-08-04 1999-02-10 Oregon Metallurgical Corporation Straight hearth furnace for titanium refining
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US6824585B2 (en) 2002-12-03 2004-11-30 Adrian Joseph Low cost high speed titanium and its alloy production
US20040103751A1 (en) * 2002-12-03 2004-06-03 Joseph Adrian A. Low cost high speed titanium and its alloy production
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US8216339B2 (en) 2005-09-22 2012-07-10 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US8221676B2 (en) 2005-09-22 2012-07-17 Ati Properties, Inc. Apparatus and method for clean, rapidly solidified alloys
US8226884B2 (en) 2005-09-22 2012-07-24 Ati Properties, Inc. Method and apparatus for producing large diameter superalloy ingots
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LU43432A1 (enrdf_load_stackoverflow) 1963-05-27
AT264858B (de) 1968-09-25
NL143278B (nl) 1974-09-16
CH412344A (de) 1966-04-30
GB959367A (en) 1964-06-03
DK107891C (da) 1967-07-17

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