US3280326A - Mass filter with sheet electrodes on each side of the analyzer rod that intersect on the ion beam axis - Google Patents
Mass filter with sheet electrodes on each side of the analyzer rod that intersect on the ion beam axis Download PDFInfo
- Publication number
- US3280326A US3280326A US364130A US36413064A US3280326A US 3280326 A US3280326 A US 3280326A US 364130 A US364130 A US 364130A US 36413064 A US36413064 A US 36413064A US 3280326 A US3280326 A US 3280326A
- Authority
- US
- United States
- Prior art keywords
- analyzer
- axis
- rods
- mass filter
- sheet electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
- H01J49/4205—Device types
- H01J49/4255—Device types with particular constructional features
Definitions
- My invention relates to mass filters for separating ions of different specific electric charges by shooting them toward a collector electrode through an electric high-frequency field between electrodes which are elongated parallel to the axis of the trajectory path, so that only ion-s of certain specific charges or mass can pass through the field to the collector electrode, whereas other ions are deflected laterally onto the field-producing analyzer electrodes.
- Mass filters operating on this separation principle are known from U.S. Patent-s No. 2,939,952, No. 2,950,389, No. 3,075,076.
- a four-pole (quadrupole) mass spectrometer (filter) according to Patent No. 2,939,952, having four elongated rod electrodes for producing the analyzer field, affords a mass separation or resolving power up to a given optimum determined by the geometry of each particular quadrupole apparatus.
- a mass filter operating on the same principle but with only one analyzer rod electrode application of von Zahn, Serial No. 242,224, filed December 4, 1962 and issued July 27, 1965 as United States Patent No.
- 3,197,633 employs, in eifect, a one-quarter sector of the above-mentioned quadrupole analyzer, its single rod electrode being located opposite two sheet metal members which form an angular structure and extend in perpendicular relation to each other, the planes of the two sheets being angularly displaced 45 relative to the coordinate planes defined by the respective reference axes X and Y of the mass filter.
- a monopole apparatus is asymmetrical, particularly with respect to the locality where the ions are shot into the analyzing system.
- I provide a mas-s filter, designed and operating on the principle set forth above, with elongated analyzer electrode rods which extend between the ion source and the collector electrode means to produce an alternating electric field for causing ions of certain specific electric charges or masses to be laterally deflected onto the rods, rather than passing through the analyzer field onto the collector means; and I mount the just-mentioned analyzer rods in at least two symmetry planes that extend through the source-collector axis of the system, in this respect corresponding generally to the above-mentioned quadrupole systems.
- a mass filter system according to the invention is further provided with intermediate thin sheet electrodes that extend in the just-mentioned symmetry planes and are joined with each other on the above-mentioned axis of the system.
- all of the analyzer rods can be impressed by the same field voltage:
- U denotes the magnitude of a direct-voltage component
- V is the amplitude of an alternating-voltage component
- a single collector electrode may be provided for all of the analyzer rod electrodes. However, according to another feature of our invention, a separate collector electrode is provided for each analyzer rod electrode and receives the ions that pass through the particular one seetor space of the analyzer field.
- the analyzer rod electrodes may be given respectively difierent diameters.
- the spacing r of the respective analyzer rod electrodes from the axis of the system may be made different.
- the analyzezr rod electrodes regardless of whether they have the same or respectively different diameters, are impressed by respectively different voltages, each corresponding to the composite form U+V- cos wt
- the intermediate sheet electrodes are thin-walled. Suitable, for example, are metal sheets of about 0.1 to 0.5 mm. thickness. Also applicable is wire mesh consisting of wires of about 0.3 mm. diameter, for example.
- FIG. 1 shows schematically a cross section of a known quadrupole mass filter
- FIG. 2 is a schematic cross section of a monopole filter, and FIG. 2a shows in cross section one way of mounting such a filter into a tubular housing;
- FIG. 3 is a cross section through an embodiment of a mass filter exemplifying the invention.
- FIG. 4 is a cross section of a different embodiment of the invention.
- FIG. 5 illustrates in cross section still another example of a mass filter according to the invention.
- FIG. 6 shows schematically a lateral view of a gasanalyzing device incorporating a mass filter according to FIG. 3.
- the prior-art mass filter shown in FIG. 1 corresponds to the one known from U.S. Patent 2,939,952.
- Symmetrically mounted in a cylindrical envelope 1 are four analyzer rod electrodes 2, 3, 4 and 5, all of the same length.
- Each two diametrically opposite rods are connected to a voltage of the form U+V- cos wt 2 and +U+V- cos wt 2 wherein U and V have the above-defined meanings.
- These voltages are applied through insulated and sealed in-leads 6 and 7.
- the coordinate directions of the main planes of symmetry are indicated at X and Y.
- FIG. 2 represents schematically the above-mentioned monopole filter.
- metal sheets 11 and 12 which extend in respective planes X and Y parallel to the rod axis and at an angle of 90 to each other.
- the sheet planes are angularly displaced 45 counterclockwise from the main symmetry planes X and Y.
- a shaded circular area at 8 or 13 indicates the locality where the ions are shot into the analyzer system. It will be noted that the ionentering area 13 in FIG. 2 is eccentric to the intersection line of the two sheets 11 and 12.
- FIG. 2a shows that, when the monopole system is built into an ordinary spectrometer tube, the space utilization is unfavorable and that the outlet opening of the ion source must be eccentric.
- each analyzer rod 31 to 34 is mounted in an envelope which is grounded.
- a voltage supply lead 35 connected to a ring lead 36 applies to all of the four rods the same type and magnitude of voltage U+V- cos wt
- Metallic sheet members 37 and 38 extend in the two symmetry planes and, in this embodiment, define 90 angles with each other.
- the area of the ion beam is indicated by shading at 39.
- the sheet electrodes 37 and 38 can be connected to any desired voltages with the aid of insulated and sealed in-leads 40.
- the main'planes of symmetry are denoted by X, Y and X, Y.
- the envelope 36 contains an ion source 61 at one side of the group of analyzer electrodes and is provided with collector electrode means 62 which in this particular embodiment consist of 4 separate collectors for the respective analyzer rods.
- the envelope 30, kept at vacuum pressure, is vacuum-tightly sealed and has a neck 30 for connection to a supply of gaseous mixture to be investigated.
- the rod electrodes are electrically connected to a voltage source 64 which supplies a highfrequency voltage and a superimposed direct voltage as explained above.
- the current due to the ions reaching the collector electrode means 62 is amplified by an amplifier 65 and supplied to a recorder 66 or other measuring instrument for indicating the mas spectrum of the mixture being analyzed.
- the filter apparatus according to the invention as described above with reference -to FIGS. 3 and 6 affords the following advantages.
- the apparatus is completely symmetrical.
- the entire shaded area 39 is available for the ions to, enter into the analyzer field, this area corresponding to approximately four times the comparable area in a mass spectrometer of the monopole type, thus securing a high sensitivity.
- the analyzer electrodes rods are all connected to the same voltage, thus permitting a simplified mechanical design as well as a simplified high-frequency voltage source.
- the resolving power corresponds to that of the monopole spectrometer although the above-mentioned disadvantages of the latter are avoided.
- the mass filter must have a corresponding number of collector electrodes and output circuits which permit a separate detection or indication of the respectively different masses.
- FIG. 4 shows an embodiment which, when operated in the just-mentioned manner, will permit a simultaneous spectrographic analysis of different masses.
- a ring conductor 46 supplies all four analyzer rods with the same analyzer voltage -U+V- cos wt 2
- the thin sheet electrodes 47 and 48 in this embodiment extend in the planes of symmetry and form angles with each other. The symmetrically located trajectory area for the ions is indicated by shading. Five sealed inleads for the supply of voltage are shown at 42a, 43a, 44a, 45a and 4?.
- any desired larger number of such rods may be used, in which case the correspondingly mounted intermediate sheet electrodes, as a rule, form acute angles between each other.
- a mass filter of the latter type is exemplified .by FIG. 5.
- the tubular envelope 51 encloses a total of eight analyzer rods 52 which, in this embodiment, have all the same diameter and are all located symmetrically to intermediate thin sheet electrodes 53.
- the trajectory area of the ions is likewise symmetrical to the system axis.
- Denoted by 54 and 55 are sealed inleads for impressing the necessary operating voltages upon the electrodes.
- An embodiment with more than two pairs of analyzer rods may likewise be given rods of difierent diameter and difierent radical spacing from the symmetry axis, and/ or the angular ranges between the sheet electrodes may be non-uniform.
- Such and other modifications afiord further possibilities of improving the utilization of the available space or simultaneously analyzing a larger number of respectively different masses.
- An electric mass filter comprising an evacuable envelope, an ion source, collector electrode m'eans spaced from and defining with said ion source an ion path axis in said envelope, pairs of elongated analyzer electrode rods extending between said source and said collector electrode means in axially spaced relation to both andradially spaced from said axis for applying an alternating electric field for lateral deflection of ions, said analyzer electrode rods being symmetrically positioned to at least two symmetry planes through said axis, intermediate sheet electrodes intermediate two of said symmetry planes, said sheet electrodes having a substantially uniform thickness smaller than that of said analyzer electrode rods and extending radially through and from said axis and between said analyzer electrode rods, said ion source being mounted on said axis, said sheet electrodes being at least as long as said rods in axial length, and voltage supply means connected to said analyzer electrode rods for supplying determined voltages to said analyzer electrode rods.
- a mass filter according to claim 7 for separating different masses wherein said radial distances of said analyzer electrode rods from said axis are equal to c-mwherein m is the mass to be separated by an analyzer electrode rod and c is a constant.
- An electric mass filter according to claim 1 wherein said analyzer electrode rods have different diameters and are positioned at respectively diifer'ent radial distances from said axis, said voltage supply means providing different voltage magnitudes to said dilferent analyzer electrode rods, each individual voltage being where U is the magnitude of a direct-voltage component, V is the amplitude of an alternating-voltage component and cos wt is cos 21rft, being the frequency and t being the time.
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES85018A DE1298738B (de) | 1963-05-02 | 1963-05-02 | Massenfilter mit erhoehter Trennschaerfe und Empfindlichkeit |
Publications (1)
Publication Number | Publication Date |
---|---|
US3280326A true US3280326A (en) | 1966-10-18 |
Family
ID=7512106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US364130A Expired - Lifetime US3280326A (en) | 1963-05-02 | 1964-05-01 | Mass filter with sheet electrodes on each side of the analyzer rod that intersect on the ion beam axis |
Country Status (4)
Country | Link |
---|---|
US (1) | US3280326A (de) |
CH (1) | CH427352A (de) |
DE (1) | DE1298738B (de) |
GB (1) | GB1024925A (de) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3418464A (en) * | 1966-07-27 | 1968-12-24 | Bell & Howell Co | Duopole mass filter |
US3457404A (en) * | 1965-09-13 | 1969-07-22 | Electronic Associates | Quadrupole mass analyzer |
US3473018A (en) * | 1967-03-02 | 1969-10-14 | Bell & Howell Co | Mass analyzer using two spaced,tubular,and coaxial electrodes |
US3484602A (en) * | 1965-05-14 | 1969-12-16 | Nat Res Dev | Charged particle analyzer using a charged particle transit time oscillator |
US3501631A (en) * | 1968-10-21 | 1970-03-17 | Varian Associates | Charged particle trapping means employing a voltage divider and a plurality of simple conductors to produce complex trapping fields |
US3501630A (en) * | 1969-03-17 | 1970-03-17 | Bell & Howell Co | Mass filter with removable auxiliary electrode |
US3925663A (en) * | 1972-06-28 | 1975-12-09 | Unisearch Ltd | Extended monopole spectrometers and filters |
US3925662A (en) * | 1973-07-20 | 1975-12-09 | Canadian Patents Dev | High-resolution focussing dipole mass spectrometer |
US4066894A (en) * | 1976-01-20 | 1978-01-03 | University Of Virginia | Positive and negative ion recording system for mass spectrometer |
US4117321A (en) * | 1974-06-18 | 1978-09-26 | Varian Mat Gesellschaft Mit Beschrankter Haftung | Electrode system for multipoles and especially for multipole or monopole mass spectrometers |
US4136280A (en) * | 1976-01-20 | 1979-01-23 | University Of Virginia | Positive and negative ion recording system for mass spectrometer |
DE19511248A1 (de) * | 1994-03-25 | 1995-09-28 | Hewlett Packard Co | Universalvierpol und Verfahren zur Herstellung desselben |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0673295B2 (ja) * | 1989-11-22 | 1994-09-14 | 日本電子株式会社 | 荷電粒子線用静電多重極レンズ |
DE19517507C1 (de) * | 1995-05-12 | 1996-08-08 | Bruker Franzen Analytik Gmbh | Hochfrequenz-Ionenleitsystem |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2939952A (en) * | 1953-12-24 | 1960-06-07 | Paul | Apparatus for separating charged particles of different specific charges |
US3129327A (en) * | 1961-12-12 | 1964-04-14 | Bell & Howell Co | Auxiliary electrodes for quadrupole mass filters |
US3147445A (en) * | 1959-11-05 | 1964-09-01 | Thompson Ramo Wooldridge Inc | Quadrupole focusing means for charged particle containment |
US3197633A (en) * | 1962-12-04 | 1965-07-27 | Siemens Ag | Method and apparatus for separating ions of respectively different specific electric charges |
-
1963
- 1963-05-02 DE DES85018A patent/DE1298738B/de not_active Withdrawn
- 1963-11-11 CH CH1382763A patent/CH427352A/de unknown
-
1964
- 1964-05-01 US US364130A patent/US3280326A/en not_active Expired - Lifetime
- 1964-05-04 GB GB18508/64A patent/GB1024925A/en not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2939952A (en) * | 1953-12-24 | 1960-06-07 | Paul | Apparatus for separating charged particles of different specific charges |
US3147445A (en) * | 1959-11-05 | 1964-09-01 | Thompson Ramo Wooldridge Inc | Quadrupole focusing means for charged particle containment |
US3129327A (en) * | 1961-12-12 | 1964-04-14 | Bell & Howell Co | Auxiliary electrodes for quadrupole mass filters |
US3197633A (en) * | 1962-12-04 | 1965-07-27 | Siemens Ag | Method and apparatus for separating ions of respectively different specific electric charges |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3484602A (en) * | 1965-05-14 | 1969-12-16 | Nat Res Dev | Charged particle analyzer using a charged particle transit time oscillator |
US3457404A (en) * | 1965-09-13 | 1969-07-22 | Electronic Associates | Quadrupole mass analyzer |
US3418464A (en) * | 1966-07-27 | 1968-12-24 | Bell & Howell Co | Duopole mass filter |
US3473018A (en) * | 1967-03-02 | 1969-10-14 | Bell & Howell Co | Mass analyzer using two spaced,tubular,and coaxial electrodes |
US3501631A (en) * | 1968-10-21 | 1970-03-17 | Varian Associates | Charged particle trapping means employing a voltage divider and a plurality of simple conductors to produce complex trapping fields |
US3501630A (en) * | 1969-03-17 | 1970-03-17 | Bell & Howell Co | Mass filter with removable auxiliary electrode |
US3925663A (en) * | 1972-06-28 | 1975-12-09 | Unisearch Ltd | Extended monopole spectrometers and filters |
US3925662A (en) * | 1973-07-20 | 1975-12-09 | Canadian Patents Dev | High-resolution focussing dipole mass spectrometer |
US4117321A (en) * | 1974-06-18 | 1978-09-26 | Varian Mat Gesellschaft Mit Beschrankter Haftung | Electrode system for multipoles and especially for multipole or monopole mass spectrometers |
US4066894A (en) * | 1976-01-20 | 1978-01-03 | University Of Virginia | Positive and negative ion recording system for mass spectrometer |
US4136280A (en) * | 1976-01-20 | 1979-01-23 | University Of Virginia | Positive and negative ion recording system for mass spectrometer |
DE19511248A1 (de) * | 1994-03-25 | 1995-09-28 | Hewlett Packard Co | Universalvierpol und Verfahren zur Herstellung desselben |
US5616919A (en) * | 1994-03-25 | 1997-04-01 | Hewlett-Packard Company | Universal quadrupole and method of manufacture |
Also Published As
Publication number | Publication date |
---|---|
GB1024925A (en) | 1966-04-06 |
CH427352A (de) | 1966-12-31 |
DE1298738B (de) | 1969-07-03 |
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