US3188535A - Semi-conductor electrode system having at least one aluminium-containing electrode - Google Patents

Semi-conductor electrode system having at least one aluminium-containing electrode Download PDF

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Publication number
US3188535A
US3188535A US51704A US5170460A US3188535A US 3188535 A US3188535 A US 3188535A US 51704 A US51704 A US 51704A US 5170460 A US5170460 A US 5170460A US 3188535 A US3188535 A US 3188535A
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US
United States
Prior art keywords
electrode
layer
semi
conductor
aluminium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US51704A
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English (en)
Inventor
Walraven Diederik
Veenemans Bart
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US Philips Corp
North American Philips Co Inc
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US Philips Corp
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Publication of US3188535A publication Critical patent/US3188535A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01014Silicon [Si]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01019Potassium [K]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01023Vanadium [V]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01025Manganese [Mn]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01049Indium [In]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]

Definitions

  • the invention relates to a semi-conductor electrode system, such as a diode, transistor or photo-electric cell, having a semi-conductor body and at least one aluminumcontaining electrode on this body, a resilient contact member being brought into compression contact with the electrode.
  • a semi-conductor electrode system such as a diode, transistor or photo-electric cell, having a semi-conductor body and at least one aluminumcontaining electrode on this body, a resilient contact member being brought into compression contact with the electrode.
  • the contact member is covered, at least on the side facing the electrode, with .a layer consisting of a soft metal.
  • a soft metal is to be understood to mean herein a metal or an alloy softer than the electrode material at a temperature between room temperature and the lowest temperature at which the electrode material forms a melt.
  • the layer preferably consists at least partially of tin, indium, lead, bismuth, cadmium and/or gallium. Its thickness preferably exceeds 10a; for practical purposes a thickness of at least 50 is preferred. The maximum thickness is determined by the maximum heightwhich the electrode projects above the surface of the semiconductor body. For practical purposes preferably layer thicknesses up to 200 are chosen.
  • a current pulse is applied through the contact preferably after compressing the contact member. This current pulse should be stronger than the current to be expected in normal operation.
  • the layer is made softer by heating whereby the alloyed electrode is pressed deeper into the layer.
  • 1 is a disc of n-silicon soldered to the end of a filamentary current conductor 3 fused in a glass envelope 2.
  • a rectifying, aluminum containing electrode 4 is melted.
  • a second filamentary current conductor 5 is fused, which conductor is provided with a resilient contact member in the form of a bent strip 6 of a manganese-nickel alloy which is provided with a layer or coating 7 consisting of one of the above preferred compositions, e.g.
  • a current pulse was applied through the diode, for example by connecting it to a 10 source of direct voltage of 40 v. in the forward direction for 0.4 second. Then the layer 7 was made softer by slightly heating, for example above 100 C. for at least about 30 sec., as a result of which the electrode penetrated further into the thin layer on account of the pressure exerted by the resilient contact member. After cooling, a mechanical, rigid contact was obtained between the electrode 4 and the resilient contact member.
  • the soft metal applied to the resilient contact member 6 cannot be used for the entire contact member 6, because it does not possess appreciable resilience and thus could not provide a pressure contact to the aluminum electrode.
  • the resilient member 6 is made of spring-like hard metal, such as manganese-nickel or any other suitable composition well known in the art.
  • the invention is not limited to the diode shown in the drawing. Nor is it restricted to crystal diodes but it also relates to other semi-conductor electrode systems, for example transistors or photoelectric cells, having aluminum-containing electrodes and resilient contact members connected to them, in which also for these systems troublesome occurrence of fluctuations of the contact resistances could be prevented by using the invention.
  • a semiconductor device comprising a semiconductive body, an electrode containing aluminum on said body, a resilient contact member having a portion in pressure engagement with and making electrical connec tion to said electrode, and a layer of a soft metal coated on the said portion engaging the electrode, said layer having a thickness between about 10 and 200 microns.
  • the soft metal includes at least one element selected from the group consisting of tin, indium, lead, bismuth, cadmium and gallium.
  • a silicon semiconductor device comprising a semiconductive body, an electrode comprising aluminum fused to said body, a hard metal resilient contact member having an end portion in pressure engagement with said electrode, and a layer of a soft metal selected from the group consisting of tin, indium, lead, bismuth, cadmium, gallium and alloys thereof coated on said end portion engaging said electrode, said layer having a thickness between 10 and 200 microns.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thermistors And Varistors (AREA)
US51704A 1959-08-27 1960-08-24 Semi-conductor electrode system having at least one aluminium-containing electrode Expired - Lifetime US3188535A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL242762 1959-08-27

Publications (1)

Publication Number Publication Date
US3188535A true US3188535A (en) 1965-06-08

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ID=19751892

Family Applications (1)

Application Number Title Priority Date Filing Date
US51704A Expired - Lifetime US3188535A (en) 1959-08-27 1960-08-24 Semi-conductor electrode system having at least one aluminium-containing electrode

Country Status (5)

Country Link
US (1) US3188535A (hr)
CH (1) CH389782A (hr)
DE (1) DE1160545B (hr)
GB (1) GB881579A (hr)
NL (2) NL242762A (hr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6538214B2 (en) 1993-11-16 2003-03-25 Formfactor, Inc. Method for manufacturing raised electrical contact pattern of controlled geometry

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1283397B (de) * 1963-05-27 1968-11-21 Siemens Ag Transistoranordnung
US4984057A (en) * 1989-05-01 1991-01-08 Adam Mii Semiconductor element string structure

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1905525A (en) * 1931-09-10 1933-04-25 Union Switch & Signal Co Electrical rectifier
US2653374A (en) * 1949-04-01 1953-09-29 Int Standard Electric Corp Electric semiconductor
US2697269A (en) * 1950-07-24 1954-12-21 Bell Telephone Labor Inc Method of making semiconductor translating devices
US2906930A (en) * 1954-04-07 1959-09-29 Int Standard Electric Corp Crystal rectifier or crystal amplifier
US2917684A (en) * 1955-09-29 1959-12-15 Philips Corp Semi-conductive electrode system
US3066248A (en) * 1958-12-16 1962-11-27 Sarkes Tarzian Semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1042762B (de) * 1955-02-26 1958-11-06 Siemens Ag Flaechengleichrichter bzw. -transistor, welcher mit mindestens einer seiner Elektroden flaechenhaft mit einem die Verlustwaerme abfuehrenden Koerper in Kontakt steht
US2930948A (en) * 1956-03-09 1960-03-29 Sarkes Tarzian Semiconductor device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1905525A (en) * 1931-09-10 1933-04-25 Union Switch & Signal Co Electrical rectifier
US2653374A (en) * 1949-04-01 1953-09-29 Int Standard Electric Corp Electric semiconductor
US2697269A (en) * 1950-07-24 1954-12-21 Bell Telephone Labor Inc Method of making semiconductor translating devices
US2906930A (en) * 1954-04-07 1959-09-29 Int Standard Electric Corp Crystal rectifier or crystal amplifier
US2917684A (en) * 1955-09-29 1959-12-15 Philips Corp Semi-conductive electrode system
US3066248A (en) * 1958-12-16 1962-11-27 Sarkes Tarzian Semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6538214B2 (en) 1993-11-16 2003-03-25 Formfactor, Inc. Method for manufacturing raised electrical contact pattern of controlled geometry
US20030062398A1 (en) * 1993-11-16 2003-04-03 Formfactor, Inc. Method for manufacturing raised electrical contact pattern of controlled geometry
US6818840B2 (en) 1993-11-16 2004-11-16 Formfactor, Inc. Method for manufacturing raised electrical contact pattern of controlled geometry
US7082682B2 (en) 1993-11-16 2006-08-01 Formfactor, Inc. Contact structures and methods for making same
US20060286828A1 (en) * 1993-11-16 2006-12-21 Formfactor, Inc. Contact Structures Comprising A Core Structure And An Overcoat

Also Published As

Publication number Publication date
CH389782A (de) 1965-03-31
GB881579A (en) 1961-11-08
NL242762A (hr)
NL113528C (hr)
DE1160545B (de) 1964-01-02

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