US2266218A - Electron microscope vacuum system - Google Patents

Electron microscope vacuum system Download PDF

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Publication number
US2266218A
US2266218A US334965A US33496540A US2266218A US 2266218 A US2266218 A US 2266218A US 334965 A US334965 A US 334965A US 33496540 A US33496540 A US 33496540A US 2266218 A US2266218 A US 2266218A
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United States
Prior art keywords
tube
electron microscope
pressure
anode
cathode
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Expired - Lifetime
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US334965A
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English (en)
Inventor
Krause Friedrich
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Individual
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Individual
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Publication date
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Publication of US2266218A publication Critical patent/US2266218A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Definitions

  • the present invention relates to electron microscopes and more vparticularly pertains to means for maintainingdiiierent pressures there-- 1n.
  • a throttle diaphragm d is provided in such a manner that it divides the high vacuum space of the electron microscope into an upper space belonging to the discharge tube and into a lower space belonging to the object and the lenses.
  • a pump connecting pipe e', connected to a pumping plant (not shown) is provided just below the anode diaphragm c.
  • a pipe e2 is provided below the objective lens f and a pipe e3 is arranged below the projection lens g.
  • the ⁇ object (not shown) is arranged just below the objective lens f.
  • the housing h may be of great importance if the hollow space in the electron microscope is small and the apparatus isy e formed of metal.
  • thei A housing h extending from said tube intermediate the diaphragm and the anode for adjusting the pressure within the tube adjacent the cathode, objective and projecting lens means associated with the tube, and pipes communicating with the tube adjacent the lens means for adjusting the pressure in the tube adjacent an object to be analyzed.
  • an apertured anode within said tube an apertured anode Within said tube, a diaphragm having a throttling opening therein spaced from said anode, a pipe extending from said tube intermediate the diaphragm and the anode for adjusting thepressure Within the tube adjacent the cathode, objective and projecting lens means associated with the tube, conduits extending from said tube adjacent the lens means, a pressure equalizing housing connected to said conduits, and a pipe extending from said housing for adjusting the pressure therein.
  • a sealed tube In an electron microscope, a sealed tube, a cold cathode Within an end of said tube, an apertured anode within said tube, a neutral diaphragm4 substantially closing said end of the sealed tube and spaced from the anode, said diaphragm having a throttling opening therein, a pipe extended from said tube intermediate the diaphragm and the anode for adjusting the pressure Within the tube adjacent the cathode, objective and projecting lens means associating with said tube and spaced therealong for arranging an object to be examined therebetweenand pipes communicating with the sealed tubeadjacent the lens means for adjusting the pressure within the tube adjacent the object to be analyzed to value different from the pressure adjacent the cathode.
  • a sealed tube In an electron microscope, a sealed tube, a cold cathode withinan end of said tube, an apertured anode within said tube, a neutral diaphragm substantially closing said end of the sealed tube and spaced from the anode, said diaphragm having a throttling opening therein, a pipe extended from said tube intermediate the diaphragm and the anode for adjusting the pressure Within the tube adjacent the cathode, objective and projecting lens means associating with said tube and spaced therealong for arranging an object to be examined-therebetween, and conduits extending Vfrom said tube adjacent the lens means, a pressure equalizing housing connected to vsaid conduits, and a pipe extending from said housing for adjusting the pressure Within the tube adjacentthe lens means to a value dierent from the pressure within the tube adjacent the cathode.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
US334965A 1939-05-08 1940-05-13 Electron microscope vacuum system Expired - Lifetime US2266218A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2266218X 1939-05-08

Publications (1)

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US2266218A true US2266218A (en) 1941-12-16

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ID=7993013

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US334965A Expired - Lifetime US2266218A (en) 1939-05-08 1940-05-13 Electron microscope vacuum system

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US (1) US2266218A (en(2012))
BE (1) BE438468A (en(2012))

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424791A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope apparatus
US3138736A (en) * 1960-04-16 1964-06-23 United Aircraft Corp Electron beam generator system
US3299308A (en) * 1963-07-19 1967-01-17 Temescal Metallurgical Corp Electron beam traverse of narrow aperture in barrier separating regions of differentpressure
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
US4651003A (en) * 1984-02-27 1987-03-17 Siemens Aktiengesellschaft Particle-accelerating electrode
US5376799A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Turbo-pumped scanning electron microscope

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424791A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope apparatus
US3138736A (en) * 1960-04-16 1964-06-23 United Aircraft Corp Electron beam generator system
US3299308A (en) * 1963-07-19 1967-01-17 Temescal Metallurgical Corp Electron beam traverse of narrow aperture in barrier separating regions of differentpressure
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
US4651003A (en) * 1984-02-27 1987-03-17 Siemens Aktiengesellschaft Particle-accelerating electrode
US5376799A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Turbo-pumped scanning electron microscope

Also Published As

Publication number Publication date
BE438468A (en(2012))

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