US2215794A - Device for sluicing bodies into vacuum chambers - Google Patents

Device for sluicing bodies into vacuum chambers Download PDF

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Publication number
US2215794A
US2215794A US225915A US22591538A US2215794A US 2215794 A US2215794 A US 2215794A US 225915 A US225915 A US 225915A US 22591538 A US22591538 A US 22591538A US 2215794 A US2215794 A US 2215794A
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US
United States
Prior art keywords
bore
plug
cock body
lens
sluicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US225915A
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English (en)
Inventor
Muller Heinz Otto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Original Assignee
Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
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Filing date
Publication date
Application filed by Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH filed Critical Fides Gesellschaft fuer die Verwaltung und Verwertung von Gewerblichen Schutzrechten mbH
Application granted granted Critical
Publication of US2215794A publication Critical patent/US2215794A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Definitions

  • This invention relates to a device for'sluicing bodies into vacuum chambers particularly employed in devices involving electron beams.
  • theobject is held in a: cartridge which may be displaced within the cock plug and pushed partly'out of the plug into a given position against the force of a spring tending to normallyhold it within the plug.
  • the cartridge may be pushed out'of .the boreof the plug towards the objective in the operating position of the plug by means of a rack and pinion device and be held in its desired position bystops.
  • Fig. 1 represents inlcentral sectional eleva tion and semi-diagrammatically the sluicing portion of an. electron microscope.
  • Fig. 2 represents a crosssection of the'plug and a a sectional. elevation of adjacent cock portions on the line 2-2 in Fig. 1;
  • Fig.- 1 2 denotes the magnetic lens of the type-disclosed in detail in the copending application of, von' Borrieset al., -SerialNc.'223,i5.8;
  • The: device is provided with a rotatable; cock plug 3 transversely disposed in cock body 3* and having itself a transverse bore 4; This bore, as shown in Figs. land 2,- contains the cartridge S'for the reception of the object.
  • the cartridge 5 consists of the substan j tially cylindrical tube 6 which is closed'at'the endv facing the objective 2 by the object .ho'lder proper consisting of the parts I and 8.
  • The'ob iect to be examined for instance a thin layer 7 Claims. (01. 250-) pervious to cathode rays, is so attached to parts i and 8 that it covers the central aperture of these parts.
  • the cathode ray after having penetrated the object layer, passes through the central aper-v ture of the lens 2 and thus is subjected to an electron-optical bias serving, in particular, to produce a magnified electron-optical image of the object.
  • the tube 6 is threaded at its upper end into the holding ring .22 which is pressed against the shoulders-Ill of the plug bore 4 (Fig. 2) by the spring 9.
  • This spring is seated at its other end against an annular shoulder ID".
  • the holding ring .22 is secured against rotation by means of the screw ll disposed to slide in the'groove II of The ring 22 is introduced edgewise and isthen turned into its proper position within the bore 4.
  • the spring 9 tends to hold the cartridge tube 16 1 .bore 4' (Fig. 3)
  • the upper j opening of the bore 4 of the plug has an oval shape.
  • Tube 6 with its object" holder 1, 8 may be displaced from the position shown in Fig. 1 by way of the bushing l4 towards the objective 2 against the force of this spring with the aid of the movable tubular rack l3.
  • Tube ⁇ 3 may be actuated by meansoi the pinion I 6' and the shaft l1 sealedby a cone-shaped hearing I'l shownin dash lines in Fig. 1'.
  • Pinion l6 meshes with the-rack. l3 of the tube l3.
  • the object cartridge Sis moved back into the bore 4, of the plug by moving. tube j 13 into the position shown.
  • the upper portion of' the object cartridge is brought opposites T tothe charging opening 18- so-that the object holder proper 'ma'ysbe removed by a suitable instrument not shown here and another object'may is first rotated counterclockwise sufliciently far so that its'bore 4 is hermetically closed and a r communication is established between bore I and V a vacuum 'antechamber (not shown) by way oi .duct l9 in the'pl'ug and duct IS! in the cock body.
  • this duct l9 endsin a plane perpendicular to the-axis of rotation of the plug which islocated outside the sluicing passage I8,
  • the plug 3 is rotated clockwise back to the position shown in Figs. 1 and 2 and the object is moved downwardly into the proper position with respect to the lens 2 with the aid of the tube 13.
  • the transverse bores 20 arranged in the tube 6 serve to facilitate the evacuation of the tube 6. 2
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays, comprising a cock body arranged in front of said lens with respect to the direction of said beam and having a central bore forming a passage for said beam, 8.
  • revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore of said cock body when said plug is in operative position, an object holder disposed in said plug bore in the direction of said beam and having means for accommodating the object, operating means associated with said cock body and operable from outside for moving said object holder in the direction of said beam toward said lens to a desired focal position, and a charging bore in said cock body registrable with said plug bore for exchanging the object when the plug has been turned to present said object holder to said charging bore.
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays comprising a cock body arranged in front of said lens with respect to the direction of said beam and having a central bore forming a passage for said beam, a revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore of said cock body when said plug is in operative position, a tubular cartridge disposed within said plug bore and containing means for holding the object, operating means disposed within the cock body and operable from outside for moving said cartridge in the direction of said beam toward said lens to a desired focal position, stops for limiting said movement of said cartridge, and a charging bore in said cock body registrable with said plug bore for exchanging the object when a the plug has been turned to present said cartridge to said charging bore.
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays comprising a cock body arranged in front of said lens with respect to the direction of said beam and having a central bore forming a passage for said beam, a revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore of said cock body when said plug is in operative position, a cartridge disposed within said plug bore and containing means for holding the object, a spring for normally retaining said cartridge within said plug, operating means disposed within said cock body and operable from outside for bore for exchanging objects when the plug has been turned to present said holding means to said charging bore.
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays comprising a cock body arranged in front of said lens with respect to the direction of said beam and having a central bore forming a passage for said beam, a revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore of said cock body when said plug is in operative position, a movable tubular cartridge disposed within said plug bore for holding the object, a hollow push rod movably disposed in said central bore of said cock body, means operable from outside for moving said holder in the direction of the electron beam towards said lens to a desired focal position, and a charging bore in said cock body registrable with said plug bore for exchanging the object when the plug has been turned to present said cartridge to said charging bore.
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays comprising a cock body arranged in front of said lens with respect to the direction of said beam and having a central bore forming a passage for said beam, a revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore of said cock body when said plug is in operative position, a spring-biased cartridge slidably arranged in said plug bore so as to have the tendency to remain within said plug bore, said cartridge having means for holding the object, a hollow push rod movably disposed in said central bore of said cock body, means operable from outside for moving said holder in the direction of the electron beam towards said lens to a desired focal position, said rod and said cartridge having correspondingly formed cone-shaped ends designed to engage each other when effecting said movement, and a charging bore in said cock body registrable with said plug bore for exchanging said
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays comprising a cock body arranged in front of said lens with respect to the direction of said beam and having a central bore forming a passage for said beam, a revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore of said cock body when said plug is in operative position, a tubular cartridge disposed in said plug bore and containing means for holding the object, a ring threaded to one end of said cartridge and slidingly disposed in said plug bore, a stop at one end of said plug bore serving as an abutment for said ring to limit the outward movement of the holder at that bore end, a spring in said plug bore disposed to normally hold said ring against said stop, operating means disposed within the cock body and operable from outside for moving said cartridge out of the other end of said plug bore toward said lens to a desired
  • a device for sluicing objects into the vacuum chamber of an electron microscope having a lens for electron-optically biasing a beam of cathode rays comprising a cock body arranged in front 0! said lens with respect to the direction of said beam and having a central bore forming a pas sage for said beam, a revolvable plug disposed in said cock body and having a relatively large bore arranged to be in alignment with the bore 01' said cock body when said plug is in operative position, an object holder disposed in said plug bore in the direction of said beam and having means for accommodating the object, operating means associated with said cock body and operable from outside for moving said object holder in the direction of said beam toward said lens to a desired focal position, a charging bore in said cock body registrable with said plug bore for exchanging the object when the plug has been turned to present said holder to said charging bore, and a venting 6 duct in said plug disposed at an inclination to said plug bore and terminating at one

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Microscoopes, Condenser (AREA)
  • Sampling And Sample Adjustment (AREA)
US225915A 1937-08-24 1938-08-20 Device for sluicing bodies into vacuum chambers Expired - Lifetime US2215794A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE518317X 1937-08-24

Publications (1)

Publication Number Publication Date
US2215794A true US2215794A (en) 1940-09-24

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ID=6549931

Family Applications (1)

Application Number Title Priority Date Filing Date
US225915A Expired - Lifetime US2215794A (en) 1937-08-24 1938-08-20 Device for sluicing bodies into vacuum chambers

Country Status (5)

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US (1) US2215794A (en(2012))
BE (1) BE429854A (en(2012))
FR (1) FR842484A (en(2012))
GB (1) GB518317A (en(2012))
NL (1) NL54222C (en(2012))

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424788A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL75362C (en(2012)) * 1946-08-30
US3833018A (en) * 1973-02-21 1974-09-03 Pass Port Syst Corp Low leakage vacuum valve and chamber using same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2424788A (en) * 1942-12-01 1947-07-29 Gen Electric Electron microscope

Also Published As

Publication number Publication date
GB518317A (en) 1940-02-23
FR842484A (fr) 1939-06-13
BE429854A (en(2012))
NL54222C (en(2012))

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