US20210320209A1 - Semiconductor device and method for manufacturing semiconductor device - Google Patents

Semiconductor device and method for manufacturing semiconductor device Download PDF

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US20210320209A1
US20210320209A1 US17/272,400 US201917272400A US2021320209A1 US 20210320209 A1 US20210320209 A1 US 20210320209A1 US 201917272400 A US201917272400 A US 201917272400A US 2021320209 A1 US2021320209 A1 US 2021320209A1
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oxide
conductor
insulator
transistor
semiconductor device
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US12062723B2 (en
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Masahiro Takahashi
Naoki OKUNO
Tomosato KANAGAWA
Shota Mizukami
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725—Source or drain electrodes for field effect devices
    • H01L29/41733—Source or drain electrodes for field effect devices for thin film transistors with insulated gate
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
    • H—ELECTRICITY
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
    • H—ELECTRICITY
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    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42384—Gate electrodes for field effect devices for field-effect transistors with insulated gate for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
    • H—ELECTRICITY
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/78645—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate
    • H01L29/78648—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with multiple gate arranged on opposing sides of the channel
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
    • H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
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    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/70—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the floating gate being an electrode shared by two or more components

Definitions

  • One embodiment of the present invention relates to a semiconductor device and a method for manufacturing the semiconductor device. Another embodiment of the present invention relates to a semiconductor wafer, a module, and an electronic device.
  • a semiconductor device generally means a device that can function by utilizing semiconductor characteristics.
  • a semiconductor element such as a transistor, a semiconductor circuit, an arithmetic device, and a memory device are each an embodiment of a semiconductor device.
  • a display device a liquid crystal display device, a light-emitting display device, and the like
  • a projection device a lighting device, an electro-optical device, a power storage device, a memory device, a semiconductor circuit, an imaging device, an electronic device, and the like
  • a semiconductor device include a semiconductor device.
  • One embodiment of the present invention is not limited to the above technical field.
  • One embodiment of the invention disclosed in this specification and the like relates to an object, a method, or a manufacturing method.
  • One embodiment of the present invention relates to a process, a machine, manufacture, or a composition of matter.
  • Integrated circuits (IC) using semiconductor elements have been developed.
  • a CPU and a memory have been developed and manufactured with technology for an LSI including a highly integrated IC or an ultra LSI,
  • Such an IC is mounted on a circuit board, for example, a printed wiring board, to be used as one of components of a variety of electronic devices included in a computer, an information terminal, a display device, an automobile, and the like.
  • utilization of these ICs for an artificial intelligence (AI) system has been studied.
  • desktop computers As computers and information terminals, desktop computers, laptop computers, tablet computers, smartphones, cell phones, and the like are known.
  • a silicon-based semiconductor material is widely known as a semiconductor material used for a semiconductor element; in addition, an oxide semiconductor has attracted attention as another material.
  • One object of one embodiment of the present invention is to provide a semiconductor device with favorable electrical characteristics and a manufacturing method thereof Another object of one embodiment of the present invention is to provide a highly reliable semiconductor device and a manufacturing method thereof Another object of one embodiment of the present invention is to provide a semiconductor device that can be miniaturized or highly integrated and a manufacturing method thereof. Another object of one embodiment of the present invention is to provide a semiconductor device with high productivity and a manufacturing method thereof.
  • Another object is to inhibit a change in electrical characteristics and improve reliability in a semiconductor device using a transistor including an oxide semiconductor. Another object is o provide a transistor including an oxide semiconductor with high on-state current. Another object is to provide a transistor including an oxide semiconductor with low off-state current. Another object is to provide a semiconductor device with reduced power consumption. Another object is to provide a semiconductor device with an improved operating frequency.
  • Another object is to provide a novel semiconductor device. Another object is to provide a module including the semiconductor device. Another object is to provide an electronic device including the semiconductor device or the module.
  • One embodiment of the present invention is a semiconductor device including a first insulator; a first conductor and a second conductor over the first insulator; an oxide provided between the first conductor and the second conductor; a second insulator over the first conductor, the second conductor, and the oxide; and a third conductor over the second insulator, in which a side surface of the first conductor includes a region in contact with one side surface of the oxide, a side surface of the second conductor includes a region in contact with the other side surface of the oxide, the level of a top surface of the first conductor, the level of a top surface of the second conductor, and the level of a top surface of the oxide are substantially the same, the conductivity of the first conductor is higher than that of the oxide, and the conductivity of the second conductor is higher than that of the oxide.
  • Each of the first conductor and the second conductor preferably contains In and one or more of Sn, W, Ti, and. Si.
  • Each of the first conductor and the second conductor may contain one or more of Zn, Ti, Ga, and Nb.
  • the oxide preferably contains In, an element M (M is Al, Ga, Y, or Sn), and Zn.
  • the carrier densities of the first conductor and the second conductor are preferably higher than the carrier density of the oxide.
  • Another embodiment of the present invention is a method for manufacturing a semiconductor device, which includes: forming a first insulator over a substrate; depositing an oxide film over the first insulator; forming a mask over the oxide film by a lithography method;
  • the conductive film is preferably deposited by a sputtering method.
  • a deposition method is preferably used in which the deposition rate in a horizontal direction of the conductive film is lower than the deposition rate in a vertical direction of the conductive film.
  • a semiconductor device with favorable electrical characteristics and a manufacturing method thereof can be provided.
  • a highly reliable semiconductor device and a manufacturing method thereof can be provided.
  • a semiconductor device that can be miniaturized or highly integrated and a manufacturing method thereof can be provided.
  • a semiconductor device with high productivity and a manufacturing method thereof can be provided.
  • a change in electrical characteristics can be reduced and reliability can be improved in a semiconductor device using a transistor including an oxide semiconductor.
  • a transistor including an oxide semiconductor with a high on-state current can be provided.
  • a transistor including an oxide semiconductor with low of current can be provided.
  • a semiconductor device with low power consumption can be provided.
  • a semiconductor device with improved operation frequency can be provided.
  • a novel semiconductor device can be provided.
  • a module including the semiconductor device can be provided.
  • An electronic device including the semiconductor device or the module can be provided.
  • FIG. 1A is a top view illustrating a semiconductor device.
  • FIG. 1B and FIG. 1C are cross-sectional views illustrating the semiconductor device.
  • FIG. 2A is a top view illustrating a semiconductor device.
  • FIG. 2B and FIG. 2C are cross-sectional views illustrating the semiconductor device.
  • FIG. 3A is a top view illustrating a semiconductor device.
  • FIG. 3B and FIG. 3C are cross-sectional views illustrating the semiconductor device.
  • FIG. 4A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 4B and FIG. 4C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 5A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 5B and FIG. 5C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 6A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 6B and FIG. 6C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 7A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 7B and FIG. 7C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 8A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 8B and FIG. 8C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 9A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 9B and FIG. 9C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 10A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 10B and FIG. 10C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 11A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 11B and FIG. 11C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 12A is a top view illustrating a method for manufacturing a semiconductor device.
  • FIG. 12B and FIG. 12C are cross-sectional views illustrating a method for manufacturing the semiconductor device.
  • FIG. 13 is a diagram illustrating an energy band structure of an oxide semiconductor.
  • FIG. 14 is a cross-sectional view illustrating a structure of a memory device of one embodiment of the present invention.
  • FIG. 15A is a block diagram illustrating a structure example of a memory device.
  • FIG. 15B is a schematic view illustrating a structure example of the memory device.
  • FIG. 16A to FIG. 16H are circuit diagrams illustrating structure examples of a memory device.
  • FIG. 17A is s a block diagram of a semiconductor device.
  • FIG. 17B is a schematic view of the semiconductor device.
  • FIG. 18A to FIG. 18E are schematic views of memory devices.
  • FIG. 19A to FIG. 19F are diagrams illustrating electronic devices.
  • FIG. 20 is a graph showing heat treatment time dependence of sheet resistance values of indium tin oxides.
  • a top view also referred to as a plan view
  • a perspective view or the like
  • some components might not be illustrated for easy understanding of the invention.
  • some hidden lines and the like might not be shown.
  • ordinal numbers such as “first,” “second,” and the like in this specification and the like are used for convenience and do not denote the order of steps or the stacking order of layers. Therefore, for example, description can be made even when “first” is replaced with “second”, “third”, or the like as appropriate.
  • the ordinal numbers in this specification and the like do not sometimes correspond to the ordinal numbers that are used to specify one embodiment of the present invention.
  • X and Y are connected, in this specification and the like, for example, the case where X and Y are electrically connected, the case where X and Y are functionally connected, and the case where X and Y are directly connected are disclosed in this specification and the like. Accordingly, without being limited to a predetermined connection relation, for example, a connection relation shown in drawings or texts, a connection relation other than one shown in drawings or texts is disclosed in the drawings or the texts.
  • X and Y each denote an object (e.g., a device, an element, a circuit, a wiring, an electrode, a terminal, a conductive film, or a layer).
  • Examples of the case where X and Y are directly connected include the case where an element that allows an electrical connection between X and Y (e.g., a switch, a transistor, a capacitor, an inductor, a resistor, a diode, a display element, a light-emitting element, and a load) is not connected between X and Y, and the case where X and Y are connected without the element that allows the electrical connection between X and Y (e.g., a switch, a transistor, a capacitor, an inductor, a resistor, a diode, a display element, a light-emitting element, and a load) provided therebetween.
  • an element that allows an electrical connection between X and Y e.g., a switch, a transistor, a capacitor, an inductor, a resistor, a diode, a display element, a light-emitting element, and a load
  • a switch has a function of being controlled to be turned on or off. That is, a switch has a function of being in a conduction state (on state) or a non-conduction state (off state) to control whether or not current flows. Alternatively, the switch has a function of selecting and changing a current path.
  • X and Y are electrically connected includes the case where X and Y are directly connected.
  • X and Y are functionally connected is the case where one or more circuits that allow functional connection between X and Y(for example, a logic circuit (an inverter, a NAND circuit, a NOR circuit, or the like), a signal converter circuit (a DA converter circuit, an AD converter circuit, a gamma correction circuit, or the like), a potential level converter circuit (a power supply circuit (for example, a step-up circuit, a step-down circuit, or the like), a level shifter circuit for changing the potential level of a signal, or the like), a voltage source, a current source, a switching circuit, an amplifier circuit (a circuit capable of increasing signal amplitude, the amount of current, or the like, an operational amplifier, a differential amplifier circuit, a source follower circuit, a buffer circuit, or the like), a signal generator circuit, a memory circuit, a control circuit, or the like) can be connected between X and Y.
  • a logic circuit an inverter, a NAND circuit, a
  • X and Y are functionally connected when a signal output from X is transmitted to Y.
  • the case where X and Y are functionally connected includes the case where X and Y are directly connected and the case where X and Y are electrically connected.
  • a transistor is an element having at least three terminals of a gate, a drain, and a source.
  • the transistor includes a channel formation region between the drain (a drain terminal, a drain region, or a drain electrode) and the source (a source terminal, a source region, or a source electrode), and current can flow between the source and the drain through the channel formation region.
  • a channel formation region refers to a region through which current mainly flows.
  • source and drain can sometimes be interchanged with each other in this specification and the like.
  • the channel length refers to, for example, the distance between a source and a drain in a region where a semiconductor (or a portion where current flows in a semiconductor when a transistor is on) and a gate overlap with each other or a region where a channel is formed in a top view of the transistor.
  • channel lengths in all regions do not necessarily have the same value.
  • the channel length of one transistor is not fixed to one value in some cases.
  • the channel length is any one of the values, the maximum value, the minimum value, or the average value in a region where a channel is formed.
  • the channel width refers to, for example, the length of a portion where a source and a drain face each other in a region Where a semiconductor (or a portion where current flows in a semiconductor when a transistor is in an on state) and a gate overlap with each other, or a region where a channel is formed. Note that in one transistor, channel widths in all regions do not necessarily have the same value. In other words, the channel width of one transistor is not fixed to one value in some cases. Thus, in this specification, the channel width is any one of the values, the maximum value, the minimum value, or the average value in a region where a channel is formed.
  • a channel width in a region where a channel is actually formed (hereinafter, referred to as an “effective channel width”) is different from a channel width shown in a top view of a transistor (hereinafter, referred to as an “apparent channel width”) in some cases.
  • an effective channel width is greater than an apparent channel width, and its influence cannot be ignored in some cases.
  • the proportion of a channel formation region formed in the side surface of the semiconductor is increased in some cases. In that case, the effective channel width is larger than the apparent channel width.
  • the effective channel width is sometimes difficult to estimate by actual measurement.
  • estimation of an effective channel width from a design value requires assumption that the shape of a semiconductor is known. Accordingly, in the case where the shape of a semiconductor is not known accurately, it is difficult to measure the effective channel width accurately.
  • an apparent channel width is referred to as a “surrounded channel width (SCW)” in some cases.
  • the simple term “channel width” refers to a surrounded channel width or an apparent channel width in some cases.
  • the simple term “channel width” refers to effective channel width in some cases. Note that values of a channel length, a channel width, an effective channel width, an apparent channel width, a surrounded channel width, and the like can be determined, for example, by analyzing a cross-sectional TEM image and the like.
  • impurities in a semiconductor refer to, for example, elements other than the main components of a semiconductor.
  • an element with a concentration lower than 0.1 atomic % can be regarded as an impurity.
  • DOS Density of States
  • examples of an impurity that changes characteristics of the semiconductor include Group 1 elements, Group 2 elements, Group 13 elements, Group 14 elements, Group 15 elements, and transition metals other than the main components of the oxide semiconductor; hydrogen, lithium, sodium, silicon, boron, phosphorus, carbon, and nitrogen are given as examples.
  • an oxide semiconductor water also serves as an impurity in some cases.
  • oxygen vacancies may be formed by entry of impurities, for example.
  • examples of an impurity that changes characteristics of the semiconductor include oxygen, Group 1 elements except hydrogen, Group 2 elements, Group 13 elements, and Group 15 elements.
  • a silicon oxynitride film is a film in which oxygen content is higher than nitrogen content in its composition.
  • a silicon oxynitride film preferably contains oxygen, nitrogen, silicon, and hydrogen in the concentration ranges of 55 atomic % or higher and 65 atomic % or lower, 1 atomic % or higher and 20 atomic % or lower, 25 atomic % or higher and 35 atomic % or lower, and 0.1 atomic % or higher and 10 atomic % or lower, respectively.
  • a silicon nitride oxide film is a film in which nitrogen content is higher than oxygen content in its composition.
  • a silicon nitride oxide film preferably contains nitrogen, oxygen, silicon, and hydrogen in the concentration ranges of 55 atomic % or higher and 65 atomic % or lower, 1 atomic % or higher and 20 atomic % or lower, 25 atomic % or higher and 35 atomic % or lower, and 0.1 atomic % or higher and 10 atomic % or lower, respectively.
  • the term “film” and the term “layer” can be interchanged with each other.
  • the term “conductive layer” can be changed into the term “conductive film” in some cases.
  • the term “insulating film” can be changed into the term “insulating layer” in some cases.
  • the term “insulator” can be replaced with an insulating film or an insulating layer.
  • the term “conductor” can be replaced with a conductive film or a conductive layer.
  • the term “semiconductor” can be replaced with a. semiconductor film or a semiconductor layer.
  • transistors described in this specification and the like are field effect transistors. Furthermore, unless otherwise specified, transistors described in this specification and the like are n-channel transistors. Thus, unless otherwise specified, the threshold voltage (also referred to as “V th ”) is higher than 0 V.
  • parallel indicates a state where two straight lines are placed at an angle of greater than or equal to ⁇ 10° and less than or equal to 10°.
  • the term “substantially parallel” indicates a state where two straight lines are placed at an angle greater than or equal to ⁇ 30° and less than or equal to 30°.
  • perpendicular indicates a state where two straight lines are placed at an angle of greater than or equal to 80° and less than or equal to 100°.
  • the angle is greater than or equal to 85° and less than or equal to 95° is also included.
  • substantially perpendicular indicates a state where two straight lines are placed at an angle greater than or equal to 60° and less than or equal to 120°.
  • trigonal and rhombohedral crystal systems are included in a hexagonal crystal system.
  • a barrier film means a film having a function of inhibiting the transmission of oxygen and impurities such as hydrogen, and the barrier film having conductivity is referred to as a conductive barrier film in some cases.
  • a metal oxide is an oxide of metal in a broad sense. Metal oxides are classified into an oxide insulator, an oxide conductor (including a transparent oxide conductor), an oxide semiconductor (also simply referred to as an OS), and the like. For example, in the case where a metal oxide is used in an active layer of a transistor, the metal oxide is referred to as an oxide semiconductor in some cases. That is, in the case where an OS FET is stated, it can also be referred to as a transistor including an oxide or an oxide semiconductor.
  • FIG. 1A , FIG. 1B , and FIG. 1C are a top view and cross-sectional views of a transistor 200 according to one embodiment of the present invention and the periphery of the transistor 200 .
  • FIG. 1A is a top view of a semiconductor device including the transistor 200 .
  • FIG. 1B and FIG. 1C are cross-sectional views of the semiconductor device.
  • FIG. 1B is a cross-sectional view of a portion indicated by the dashed-dotted line A 1 -A 2 in FIG. 1A , and is a cross-sectional view in the channel length direction of the transistor 200 .
  • FIG. 1C is a cross-sectional view of a portion indicated by the dashed-dotted line A 3 -A 4 in FIG. 1A , and is a cross-sectional view in the channel width direction of the transistor 200 . Note that for clarity of the drawing, some components are not illustrated in the top view of FIG. 1A .
  • the semiconductor device of one embodiment of the present invention includes an insulator 214 over a substrate (not illustrated), the transistor 200 over the insulator 214 , an insulator 280 over the transistor 200 , and an insulator 281 over the insulator 280 .
  • the insulator 214 , the insulator 280 , and the insulator 281 function as interlayer films.
  • a conductor 240 (a conductor 240 a and a conductor 240 b ) that is electrically connected to the transistor 200 and functions as a plug is also included.
  • an insulator 241 an insulator 241 a and an insulator 241 b ) is provided in contact with a side surface of the conductor 240 functioning as a plug.
  • a conductor 246 (a conductor 246 a and a conductor 246 b ) that is electrically connected to the conductor 240 and functions as a wiring is provided over the insulator 281 and the conductor 240 .
  • the insulator 241 a In contact with the inner wall of an opening formed in an insulator 272 , the insulator 280 , and the insulator 281 , the insulator 241 a is provided. In contact with its side surface, a first conductor of the conductor 240 a is provided, and a second conductor of the conductor 240 a is further provided on the inner side. In contact with the inner wall of an opening formed in the insulator 272 , the insulator 280 , and the insulator 281 , the insulator 241 b is provided. In contact with its side surface, a first conductor of the conductor 240 b is provided, and a second conductor of the conductor 240 b is further provided on the inner side.
  • the level of a top surface of the conductor 240 and the level of a top surface of the insulator 281 can be substantially the same.
  • the transistor 200 has a structure in which the first conductor of the conductor 240 and the second conductor of the conductor 240 are stacked, the present invention is not limited thereto.
  • the conductor 240 may be provided as a single layer or to have a stacked-layer structure of three or more layers. In the case where a structure body has a stacked-layer structure, layers may be distinguished by ordinal numbers corresponding to the formation order.
  • the transistor 200 includes an insulator 216 over the insulator 214 ; a conductor 205 provided to be embedded in the insulator 216 ; an insulator 222 over the insulator 216 and the conductor 205 ; an insulator 224 over the insulator 222 ; a conductor 242 a and a conductor 242 b over the insulator 224 ; an oxide 230 provided between the conductor 242 a and the conductor 242 b; an insulator 250 over the conductor 242 a, the conductor 242 b, and the oxide 230 ; and a conductor 260 (a conductor 260 a and a conductor 260 b ) over the insulator 250 .
  • a side surface of the conductor 242 a includes a region in contact with one side surface of the oxide 230
  • a side surface of the conductor 242 b includes a region in contact with the other side surface of the oxide 230 .
  • the level of a top surface of the conductor 242 a, the level of a top surface of the conductor 242 b, and the level of a top surface of the oxide 230 are substantially the same.
  • the insulator 222 , the insulator 272 , and the insulator 281 have a function of inhibiting diffusion of hydrogen (e.g., at least one of a hydrogen atom, a hydrogen molecule, and the like).
  • the insulator 222 , the insulator 272 , and the insulator 281 have a function of inhibiting diffusion of oxygen (e.g., at least one of an oxygen atom, an oxygen molecule, and the like).
  • the insulator 222 , the insulator 272 , and the insulator 281 each have a lower permeability of one or both of oxygen and hydrogen than'the insulator 224 .
  • the insulator 222 , the insulator 272 , and the insulator 281 each have a lower permeability of one or both of oxygen and hydrogen than the insulator 250 . It is preferable that the insulator 222 , the insulator 272 , and the insulator 281 each have a lower permeability of one or both of oxygen and hydrogen than the insulator 280 .
  • the insulator 272 be in contact with a top surface and a side surface of the conductor 260 , a side surface of the insulator 250 , the top surface and the side surface of the conductor 242 a, the top surface and the side surface of the conductor 242 b, and a top surface of the insulator 224 .
  • the insulator 280 is isolated from the insulator 224 and the oxide 230 by the insulator 272 .
  • transmission of one or both of oxygen and hydrogen from the insulator 280 to the conductor 260 is inhibited by the insulator 272 , whereby oxidation of the conductor 260 can be inhibited.
  • the transistor 200 has a structure in which a single layer of the oxide 230 is provided in a channel formation region and its vicinity; however, the present invention is not limited thereto. For example, a two-layer structure or a stacked-layer structure of three or more layers may be employed. Although the transistor 200 with the conductor 260 having a two-layer structure is described, the present invention is not limited thereto.
  • the conductor 260 may have a single-layer structure or a stacked-layer structure of three or more layers.
  • the conductor 260 functions as a gate of the transistor 200
  • the conductor 242 a and the conductor 242 b function as a source electrode and a drain electrode.
  • a metal oxide functioning as an oxide semiconductor (hereinafter also referred to as an oxide semiconductor) is preferably used as the oxide 230 including the channel formation region.
  • the transistor 200 using an oxide semiconductor in its channel formation region has an extremely low leakage current (off-state current) in a non-conduction state; thus, a semiconductor device with low power consumption can be provided.
  • An oxide semiconductor can be deposited by a sputtering method or the like, and thus can be used in the transistor 200 included in a highly integrated semiconductor device.
  • a metal oxide such as an In-M-Zn oxide (an element M is one or more selected from aluminum, gallium, yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and the like) is preferably used.
  • aluminum, gallium, yttrium, or tin is preferably used as the element M.
  • An In—Ga oxide or an In—Zn oxide may be used for the oxide 230 .
  • a transistor using an oxide semiconductor is likely to have its electrical characteristics changed when impurities and oxygen vacancies exist in a region of the oxide semiconductor where a channel is formed, which may deteriorate the reliability. Moreover, if the region of the oxide semiconductor where a channel is formed contains oxygen vacancies, the transistor tends to have normally-on characteristics. Thus, oxygen vacancies in the region where a channel is formed are preferably reduced as much as possible. Accordingly, a transistor with reduced variation in electrical characteristics, stable electrical characteristics, and improved reliability can be provided.
  • a conductive oxide is preferably used as the conductor 242 (the conductor 242 a and the conductor 242 b ) which is provided to be in contact with both of the side surfaces of the oxide 230 and functions as a source and a drain. It is particularly preferable to use a conductive oxide in which generation of carriers depends on not only oxygen vacancies but also a substitutional impurity donor. That is, even when oxygen vacancies in the conductor 242 are repaired by excess oxygen, a decrease in the carrier density of the conductor 242 can be inhibited. Therefore, in a conductive oxide, carriers are probably generated even in a state where the amount of oxygen vacancies is small, so that the transistor can have high on-state characteristics.
  • the conductor 242 preferably contains indium and one or more of tin, tungsten, titanium, and silicon.
  • indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon is added may be used.
  • zinc oxide to which gallium is added or titanium oxide to which niobium is added may be used.
  • the conductivity of the conductor 242 is preferably higher than the conductivity of the oxide 230 .
  • the carrier density of the conductor 242 is preferably higher than the carrier density of the oxide 230 .
  • the oxide 230 can function as a channel formation region, and the conductor 242 can function as a source and a drain.
  • the transistor 200 which is one embodiment of the present invention has a structure in which both of the side surfaces of the oxide 230 functioning as a channel formation region are interposed between the conductors 242 functioning as a source and a drain.
  • the level of the top surface of the conductor 242 and the level of the top surface of the oxide 230 are substantially the same.
  • a transistor with small parasitic capacitance can be provided because the shortest distance between the top surface of the channel formation region of the oxide 230 and the conductor 260 functioning as a gate is substantially the same as the shortest distance between the conductor 242 and the conductor 260 , so that the transistor can have small parasitic capacitance.
  • a step is not formed or a slight step is formed between the channel formation region of the oxide 230 and the conductor 260 ; therefore, the insulator 250 over the channel formation region of the oxide 230 and over the conductor 242 can be provided without almost no steps, which is preferable because the insulator 250 has favorable coverage and the withstand voltage of the insulator 250 is improved.
  • the conductor 260 functioning as a gate covers the side surface and the top surface of the oxide 230 of the channel formation region, with the insulator 250 positioned therebetween; this structure enables the electric field of the conductor 260 to easily affect the entire oxide 230 of the channel formation region.
  • the on-state current of the transistor 200 can be increased and the frequency characteristics of the transistor 200 can be improved.
  • a semiconductor device that includes a transistor having a high on-state current can be provided.
  • a semiconductor device that includes a transistor having excellent frequency characteristics can be provided.
  • a semiconductor device that has stable electrical characteristics with a small variation in electrical characteristics and improved reliability can be provided.
  • a semiconductor device that includes a transistor having a low of state current can be provided.
  • the conductor 205 is provided to overlap with the oxide 230 and the conductor 260 . Furthermore, the conductor 205 is preferably embedded in the insulator 216 .
  • the conductor 260 sometimes functions as a first gate (also referred to as a top gate).
  • the conductor 205 functions as a second gate (also referred to as a bottom gate) in some cases.
  • Vth of the transistor 200 can be controlled by changing a potential applied to the conductor 205 independently of a potential applied to the conductor 260 .
  • Vth of the transistor 200 can be higher than 0 V, and the off-state current can be reduced.
  • drain current when a potential applied to the conductor 260 is 0 V can be lower in the case where a negative potential is applied to the conductor 205 than in the case where the negative potential is not applied to the conductor 205 .
  • the conductor 205 is preferably provided to be larger than the oxide 230 .
  • a large conductor 205 can sometimes reduce local charging (referred to as charge up) in a treatment using plasma of a fabrication step after the formation of the conductor 205 .
  • charge up local charging
  • the conductor 205 overlaps with at least the oxide 230 positioned between the conductor 242 a and the conductor 242 b.
  • the channel formation region can be electrically surrounded by the electric field of the conductor 260 having a function of the first gate and the electric field of the conductor 205 having a function of the second gate.
  • a transistor structure in which a channel formation region is electrically surrounded by electric fields of the first gate and the second gate is referred to as a surrounded channel (S-channel) structure.
  • a lower-layer film of the conductor 205 is formed in contact with the inner wall of the opening in the insulator 216 , and an upper-layer film of the conductor 205 is formed on the inner side of the lower-layer film of the conductor 205 .
  • the level of a top surface of the conductor 205 and the level of a top surface of the insulator 216 can be substantially the same.
  • a conductive material having a function of inhibiting diffusion of impurities such as a hydrogen atom, a hydrogen molecule, a. water molecule, a nitrogen atom, a nitrogen molecule, a nitrogen oxide molecule (N 2 O, NO, NO 2 , and the like), and a copper atom (a conductive material through which the above impurities are less likely to pass) is preferably used.
  • impurities such as a hydrogen atom, a hydrogen molecule, a. water molecule, a nitrogen atom, a nitrogen molecule, a nitrogen oxide molecule (N 2 O, NO, NO 2 , and the like), and a copper atom (a conductive material through which the above impurities are less likely to pass)
  • oxygen e.g., at least one of oxygen atoms, oxygen molecules, and the like
  • a function of inhibiting diffusion of impurities or oxygen means a function of inhibiting diffusion of any one or all of the above impurities and the above oxygen.
  • a conductor having such a function is referred to as a conductive barrier film in some cases.
  • the conductivity of the upper-layer film of the conductor 205 can be prevented from being reduced because of oxidation.
  • the conductive material having a function of inhibiting diffusion of oxygen for example, titanium, titanium nitride, tantalum, tantalum nitride, ruthenium, or ruthenium oxide is preferably used.
  • the lower-layer film of the conductor 205 may be a single layer or stacked layers of the above conductive materials. Accordingly, impurities such as hydrogen and water can be inhibited from diffusing to the transistor 200 side through the conductor 205 .
  • tantalum nitride and titanium nitride are used for the conductor 205 a.
  • a conductive material containing tungsten, copper, or aluminum as its main component is preferably used for the upper-layer film of the conductor 205 .
  • tungsten is used for the upper-layer film of the conductor 205 .
  • an oxide semiconductor an insulator or a conductor positioned below the oxide semiconductor, and an insulator or a conductor positioned over the oxide semiconductor, different kinds of films be successively deposited without being exposed to the air, in which case a substantially highly purified intrinsic oxide semiconductor film where the concentration of impurities (in particular, hydrogen and water) is reduced can be formed.
  • impurities in particular, hydrogen and water
  • the insulator 222 , the insulator 224 , and an oxide film to be the oxide 230 may be successively deposited in this order using a deposition apparatus including a plurality of treatment chambers.
  • the insulator 214 , the insulator 272 , and the insulator 281 preferably function as a barrier insulating film that inhibits impurities such as water or hydrogen from entering the transistor 200 from the substrate side or from above.
  • the insulator 214 , the insulator 272 , and the insulator 281 are preferably formed using an insulating material having a function of inhibiting diffusion of impurities (through which the impurities are less likely to pass) such as a hydrogen atom, a hydrogen molecule, a water molecule, a nitrogen atom, a nitrogen molecule, a nitrogen oxide molecule (e.g., N 2 O, NO, or NO 2 ), or a copper atom.
  • an insulating material having a function of inhibiting diffusion of oxygen e.g., at least one of an oxygen atom, an oxygen molecule, and the like) (or through which the above oxygen is less likely to pass).
  • silicon nitride or the like be used for the insulator 214 and the insulator 281 . Accordingly, impurities such as water or hydrogen can be inhibited from being diffused to the transistor 200 side from the substrate side through the insulator 214 . Alternatively, oxygen contained in the insulator 224 and the like can be inhibited from being diffused to the substrate side through the insulator 214 .
  • the insulator 272 aluminum oxide can be used for the insulator 272 .
  • impurities such as water and hydrogen can be inhibited from being diffused to the transistor 200 side from the insulator 280 , the conductor 246 , and/or the like, which are provided above the insulator 272 .
  • the insulator 214 and the insulator 281 may have a stacked-layer structure.
  • a stacked-layer structure of an aluminum oxide film and a silicon nitride film be used for the insulator 214 and the insulator 281 .
  • the aluminum oxide film enables oxygen to be supplied below the insulator 214 .
  • the silicon nitride film can inhibit diffusion of impurities such as hydrogen and water to the transistor 200 side from the substrate side. Furthermore, oxygen can be supplied below the insulator 281 .
  • the silicon nitride film can inhibit diffusion of impurities such as hydrogen and water to the transistor 200 side from the outside.
  • the insulator 216 and the insulator 280 preferably have a lower dielectric constant than the insulator 214 .
  • a material with a low dielectric constant is used as an interlayer film, the parasitic capacitance generated between wirings can be reduced.
  • silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, porous silicon oxide, or the like is used as appropriate, for example.
  • the insulator 222 and the insulator 224 have a function of a gate insulator.
  • the insulator 224 in contact with the oxide 230 release oxygen by heating.
  • oxygen that is released by heating is referred to as excess oxygen in some cases.
  • silicon oxide, silicon oxynitride, or the like is used as appropriate for the insulator 224 .
  • an oxide material from which part of oxygen is released by heating is preferably used.
  • An oxide that releases oxygen by heating is an oxide film in which the amount of released oxygen converted into oxygen molecules is greater than or equal to 1.0 ⁇ 10 18 molecules/cm 3 , preferably greater than or equal to 1.0 ⁇ 10 19 molecules/cm 3 , further preferably greater than or equal to 2.0 ⁇ 10 19 molecules/cm 3 or greater than or equal to 3.0 ⁇ 10 20 molecules/cm 3 in TDS (Thermal Desorption Spectroscopy) analysis.
  • TDS Thermal Desorption Spectroscopy
  • the temperature of the film surface in the TDS analysis is preferably within the range of 100° C. to 700° C., or 100° C. to 400° C.
  • the insulator 222 preferably functions as a barrier insulating film that inhibits impurities such as water and hydrogen from entering the transistor 200 from the substrate side.
  • the insulator 222 preferably has lower hydrogen permeability than the insulator 224 .
  • Surrounding the insulator 224 , the oxide 230 , and the like by the insulator 222 and the insulator 272 can inhibit entry of impurities such as water and hydrogen into the transistor 200 from the outside.
  • the insulator 222 have a function of inhibiting diffusion of oxygen (e.g., at least one of an oxygen atom, an oxygen molecule, and the like) (or through which the above oxygen is less likely to pass).
  • oxygen e.g., at least one of an oxygen atom, an oxygen molecule, and the like
  • the insulator 222 preferably has lower oxygen permeability than the insulator 224 .
  • the insulator 222 preferably has a function of inhibiting diffusion of oxygen or impurities, in which case diffusion of oxygen contained in the oxide 230 into a layer under the insulator 222 can be reduced.
  • the conductor 205 can be inhibited from reacting with oxygen contained in the insulator 224 and the oxide 230 .
  • an insulator containing an oxide of one or both of aluminum and hafnium which is an insulating material, is preferably used.
  • the insulator containing an oxide of one or both of aluminum and hafnium aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like is preferably used.
  • the insulator 222 functions as a layer that inhibits release of oxygen from the oxide 230 and mixing of impurities such as hydrogen from the periphery of the transistor 200 into the oxide 230 .
  • aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide may be added to these insulators, for example.
  • these insulators may be subjected to nitriding treatment. Silicon oxide, silicon oxynitride, or silicon nitride may be stacked over the insulator.
  • a single layer or stacked layers of an insulator containing what is called a high-k material such as aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO 3 ), or (Ba,Sr)TiO 3 (BST), may be used as the insulator 222 .
  • a high-k material such as aluminum oxide, hafnium oxide, tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO 3 ), or (Ba,Sr)TiO 3 (BST)
  • the insulator 222 and the insulator 224 may each have a stacked-layer structure of two or more layers. In such cases, without limitation to a stacked-layer structure formed of the same material, a stacked-layer structure formed of different materials may be employed.
  • a metal oxide functioning as an oxide semiconductor is preferably used as the oxide 230 .
  • a metal oxide whose energy gap is greater than or equal to 2 eV, preferably greater than or equal to 2.5 eV is preferably used, With the use of a metal oxide having such a large energy gap, the of state current of the transistor can be reduced. With the use of such a transistor, a semiconductor device with low power consumption can be provided.
  • the electron affinity or the energy level Ec of the conduction band minimum can be obtained from a band gap Eg and an ionization potential Ip, which is a difference between the vacuum level Evac and the energy Ev of the valence band maximum, as shown in FIG. 1B .
  • the ionization potential Ip can be measured using, for example, an ultraviolet photoelectron spectroscopy (UPS) apparatus.
  • the energy gap Eg can be measured using, for example, a spectroscopic ellipsometer.
  • the insulator 250 functions as a gate insulator.
  • the insulator 250 is preferably positioned in contact with the top surface of the oxide 230 c.
  • silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, or porous silicon oxide can be used.
  • silicon oxide and silicon oxynitride, which have thermal stability, are preferable.
  • the insulator 250 is preferably formed using an insulator from which oxygen is released by heating.
  • an insulator from which oxygen is released by heating is provided as the insulator 250 in contact with the top surface of the oxide 230 c, oxygen can be efficiently supplied to the channel formation region of the oxide 230 b.
  • the concentration of impurities such as water and hydrogen in the insulator 250 is preferably reduced.
  • the thickness of the insulator 250 is preferably greater than or equal to 1 nm and less than or equal to 20 nm.
  • a metal oxide may be provided between the insulator 250 and the conductor 260 .
  • the metal oxide preferably inhibits diffusion of oxygen from the insulator 250 into the conductor 260 .
  • Providing the metal oxide that inhibits diffusion of oxygen inhibits diffusion of oxygen from the insulator 250 to the conductor 260 . That is, a reduction in the amount of oxygen supplied to the oxide 230 can be inhibited.
  • oxidation of the conductor 260 due to oxygen from the insulator 250 can be inhibited.
  • the metal oxide has a function of part of the gate insulator in some cases. Therefore, when silicon oxide, silicon oxynitride, or the like is used for the insulator 250 , a metal oxide that is a high-k material with a high dielectric constant is preferably used for the metal oxide.
  • the gate insulator has a stacked-layer structure of the insulator 250 and the metal oxide, the stacked-layer structure can be thermally stable and have a high dielectric constant.
  • a gate potential that is applied during operation of the transistor can be reduced while the physical thickness of the gate insulator is maintained.
  • the equivalent oxide thickness (EOT) of an insulator functioning as the gate insulator can be reduced.
  • the metal oxide has a function of part of the gate in some cases.
  • the conductive material containing oxygen is preferably provided on the channel formation region side. When the conductive material containing oxygen is provided on the channel formation region side, oxygen released from the conductive material is easily supplied to the channel formation region.
  • a conductive material containing oxygen and a metal element contained in a metal oxide where the channel is formed it is particularly preferable to use.
  • a conductive material containing the above metal element and nitrogen may be used.
  • indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon is added may be used.
  • indium gallium zinc oxide containing nitrogen may be used.
  • a conductive material having a function of inhibiting diffusion of impurities such as a hydrogen atom, a hydrogen molecule, a water molecule, a nitrogen atom, a nitrogen molecule, a nitrogen oxide molecule (N 2 O, NO, NO 2 , and the like), and a copper atom.
  • impurities such as a hydrogen atom, a hydrogen molecule, a water molecule, a nitrogen atom, a nitrogen molecule, a nitrogen oxide molecule (N 2 O, NO, NO 2 , and the like), and a copper atom.
  • a conductive material having a function of inhibiting diffusion of oxygen e.g., at least one of oxygen atoms, oxygen molecules, and the like).
  • the conductor 260 a has a function of inhibiting diffusion of oxygen
  • the conductivity of the conductor 260 b can be inhibited from being lowered because of oxidation due to oxygen contained in the insulator 250 .
  • a conductive material having a function of inhibiting diffusion of oxygen for example, tantalum, tantalum nitride, ruthenium, ruthenium oxide, or the like is preferably used.
  • a conductive material containing tungsten, copper, or aluminum as its main component is preferably used for the conductor 260 b.
  • the conductor 260 also functions as a wiring and thus is preferably formed using a conductor having high conductivity.
  • a conductive material containing tungsten, copper, or aluminum as its main component can be used.
  • the conductor 260 b may have a stacked-layer structure, for example, a stacked-layer structure of any of the above conductive materials and titanium or titanium nitride.
  • the insulator 280 preferably contains silicon oxide, silicon oxynitride, silicon nitride oxide, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, porous silicon oxide, or the like.
  • silicon oxide and silicon oxynitride which have thermal stability, are preferable.
  • the concentration of impurities such as water and hydrogen in the insulator 280 is preferably reduced.
  • the top surface of the insulator 280 may be planarized.
  • the insulator 281 preferably functions as a barrier insulating film that inhibits impurities such as water and hydrogen from entering the insulator 280 from the above.
  • an insulator such as aluminum oxide, silicon nitride, or silicon nitride oxide is used, for example.
  • a conductive material containing tungsten, copper, or aluminum as its main component is preferably used.
  • the conductor 240 a and the conductor 240 b may each have a stacked-layer structure.
  • a conductive material having a function of inhibiting transmission of impurities such as water and hydrogen is preferably used for a conductor in contact with the insulator 281 , the insulator 280 , and the insulator 272 .
  • a conductive material having a function of inhibiting transmission of impurities such as water and hydrogen is preferably used for a conductor in contact with the insulator 281 , the insulator 280 , and the insulator 272 .
  • tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, ruthenium oxide, or the like is preferably used.
  • a single layer or a stacked layer of the conductive material having a function of inhibiting transmission of impurities such as water and hydrogen may be used.
  • the use of the conductive material can prevent oxygen added to the insulator 280 from being absorbed by the conductor 240 a and the conductor 240 b. Moreover, impurities such as water and hydrogen can be inhibited from entering the oxide 230 through the conductor 240 a and the conductor 240 b from a layer above the insulator 281 .
  • an insulator such as aluminum oxide, silicon nitride, or silicon nitride oxide is used, for example. Since the insulator 241 a and the insulator 241 b are provided in contact with the insulator 272 , impurities such as water and hydrogen can be inhibited from entering the oxide 230 through the conductor 240 a and the conductor 240 b from the insulator 280 or the like. In addition, oxygen contained in the insulator 280 can be prevented from being absorbed by the conductor 240 a and the conductor 240 b.
  • the conductor 246 (the conductor 246 a and the conductor 246 b ) functioning as a wiring may be provided in contact with a top surface of the conductor 240 a and a top surface of the conductor 240 b.
  • the conductor 246 is preferably formed using a conductive material containing tungsten, copper, or aluminum as its main component.
  • the conductor may have a stacked-layer structure and may be a stack of titanium or titanium nitride and any of the above conductive materials, for example. Note that the conductor may be formed to be embedded in an opening provided in an insulator.
  • FIG. 2A , FIG. 2B , and FIG. 2C are a top view and cross-sectional views of the transistor 201 according to one embodiment of the present invention and the periphery of the transistor 201 .
  • FIG. 2A is the top view of the semiconductor device including the transistor 201 .
  • FIG. 2B and FIG. 2C are cross-sectional views of the semiconductor device.
  • FIG. 2B is a cross-sectional view of a portion indicated by a dashed-dotted line A 1 -A 2 in FIG. 2A , and is a cross-sectional view in the channel length direction of the transistor 201 .
  • FIG. 2C is a cross-sectional view of a portion indicated by a dashed-dotted line A 3 -A 4 in FIG. 2A , and is a cross-sectional view in the channel width direction of the transistor 201 . Note that for clarity of the drawing, some components are not illustrated in the top view of FIG. 2A .
  • the transistor 201 includes the insulator 216 over the insulator 214 ; the conductor 205 provided to be embedded in the insulator 216 ; the insulator 222 over the insulator 216 and the conductor 205 ; the insulator 224 over the insulator 222 ; the conductor 242 a and the conductor 242 b over the insulator 224 ; an oxide 230 a provided between the conductor 242 a and the conductor 242 b; an oxide 230 b provided over the oxide 230 a and between the conductor 242 a and the conductor 242 b; an oxide 230 c over the conductor 242 a, the conductor 242 b, and the oxide 230 b; the insulator 250 over the oxide 230 c; and the conductor 260 (the conductor 260 a and the conductor 260 b ) over the insulator 250 .
  • the side surface of the conductor 242 a includes a region in contact with one side surface of the oxide 230 a and the oxide 230 b
  • the side surface of the conductor 242 b includes a region in contact with the other side surface of the oxide 230 a and the oxide 230 b.
  • the level of the top surface of the conductor 242 a, the level of the top surface of the conductor 242 b, and the level of a top surface of the oxide 230 b are substantially the same.
  • a metal oxide such as an In-M-Zn oxide (the element M is one or more kinds selected from aluminum, gallium, yttrium, tin, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and the like) is preferably used.
  • aluminum, gallium, yttrium, or tin is preferably used as the element M
  • An In—Ga oxide or an In—Zn oxide may be used for the oxide 230 .
  • a transistor using an oxide semiconductor is likely to have its electrical characteristics changed when impurities and oxygen vacancies exist in a region of the oxide semiconductor where a channel is formed, which may deteriorate the reliability. Moreover, if the region of the oxide semiconductor where a channel is formed contains oxygen vacancies, the transistor tends to have normally-on characteristics. Thus, oxygen vacancies in the region where a channel is formed are preferably reduced as much as possible. Accordingly, a transistor with reduced variation in electrical characteristics, stable electrical characteristics, and improved reliability can be provided.
  • a conductive oxide is preferably used as the conductor 242 (the conductor 242 a and the conductor 242 b ) which is provided to be in contact with both of the side surfaces of the oxide 230 a and the oxide 230 b and functions as a source and a drain. It is particularly preferable to use a conductive oxide in which generation of carriers depends on not only oxygen vacancies but also a substitutional impurity donor. That is, even when oxygen vacancies in the conductor 242 are repaired by excess oxygen, a decrease in the carrier density of the conductor 242 can be inhibited. Therefore, in a conductive oxide, carriers are probably generated even in a state where the amount of oxygen vacancies is small, so that the transistor can have high on-state characteristics.
  • the conductor 242 preferably contains indium and one or more of tin, tungsten, titanium, and silicon.
  • indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon is added may be used.
  • zinc oxide to which gallium is added or titanium oxide to which niobium is added may be used.
  • the conductivity of the conductor 242 is preferably higher than the conductivity of the oxide 230 a and the oxide 230 b.
  • the carrier density of the conductor 242 is preferably higher than the carrier density of the oxide 230 a and the oxide 230 b.
  • the transistor 201 which is one embodiment of the present invention has a structure in which both of the side surfaces of the oxide 230 b functioning as a channel formation region are interposed between the conductors 242 functioning as a source and a drain.
  • the level of the top surface of the conductor 242 and the level of the top surface of the oxide 230 b are substantially the same.
  • a transistor with small parasitic capacitance can be provided because the shortest distance between the top surface of the channel formation region of the oxide 230 b and the conductor 260 functioning as a gate is substantially the same as the shortest distance between the conductor 242 and the conductor 260 , so that the transistor can have small parasitic capacitance.
  • a step is not formed or a slight step is formed between the channel formation region of the oxide 230 b and the conductor 260 ; therefore, the insulator 250 over the channel formation region of the oxide 230 b and over the conductor 242 can be provided without almost no steps, which is preferable because the insulator 250 has favorable coverage and the withstand voltage of the insulator 250 is improved.
  • the level of the bottom surface of the conductor 260 in a region where the oxide 230 a and the oxide 230 b do not overlap with the conductor 260 is preferably placed lower than the level of a bottom surface of the oxide 230 b.
  • the difference between the level of the bottom surface of the conductor 260 in the region where the oxide 230 b does not overlap with the conductor 260 and the level of the bottom surface of the oxide 230 b is greater than or equal to 0 nm and less than or equal to 100 nm, preferably greater than or equal to 3 nm and less than or equal to 50 nm, further preferably greater than or equal to 5 nm and less than or equal to 20 nm.
  • the conductor 260 functioning as a gate covers the side surfaces of the oxide 230 a and the oxide 230 b of the channel formation region and the top surface of the oxide 230 b, with the insulator 250 positioned therebetween; this structure enables the electric field. of the conductor 260 to easily affect the entire oxide 230 a and the entire oxide 230 b of the channel formation region.
  • the on-state current of the transistor 201 can be increased and the frequency characteristics of the transistor 201 can be improved.
  • a semiconductor device that includes a transistor having a high on-state current can be provided.
  • a semiconductor device that includes a transistor having excellent frequency characteristics can be provided.
  • a semiconductor device that has stable electrical characteristics with a small variation in electrical characteristics and improved reliability can be provided.
  • a semiconductor device that includes a transistor having a low of state current can be provided.
  • the oxide 230 includes the oxide 230 a, the oxide 230 b over the oxide 230 a, and the oxide 230 c over the oxide 230 b.
  • Including the oxide 230 a below the oxide 230 b makes it possible to inhibit diffusion of impurities into the oxide 230 b from the components formed below the oxide 230 a.
  • including the oxide 230 c over the oxide 230 b makes it possible to inhibit diffusion of impurities into the oxide 230 b from the components formed above the oxide 230 c.
  • the oxide 230 preferably has a stacked-layer structure using oxides that differ in the atomic ratio of metal atoms.
  • the atomic proportion of the element M in the constituent elements in the metal oxide used as the oxide 230 a is preferably greater than the atomic proportion of the element M in the constituent elements in the metal oxide used as the oxide 230 b.
  • the atomic ratio of the element M to In in the metal oxide used as the oxide 230 a is preferably greater than the atomic ratio of the element M to In in the metal oxide used as the oxide 230 b.
  • the atomic ratio of In to the element Al in the metal oxide used as the oxide 230 b is preferably greater than the atomic ratio of In to the element M in the metal oxide used as the oxide 230 a.
  • a metal oxide that can be used as the oxide 230 a or the oxide 230 b can be used as the oxide 230 c.
  • the oxide 230 b preferably has crystallinity.
  • a CAAC-OS c-axis aligned crystalline oxide semiconductor
  • An oxide having crystallinity, such as a CAAC-OS has a dense structure with small amounts of impurities and defects (e.g., oxygen vacancies) and high crystallinity. This can inhibit oxygen extraction from the oxide 230 b by the source or the drain. This can reduce oxygen extraction from the oxide 230 b even when heat treatment is performed; thus, the transistor 201 is stable with respect to high temperatures in a manufacturing process (what is called thermal budget).
  • the energy of the conduction band minimum of each of the oxide 230 a and the oxide 230 c is preferably higher than the energy of the conduction band minimum of the oxide 230 b.
  • the electron affinity of each of the oxide 230 a and the oxide 230 c is preferably smaller than the electron affinity of the oxide 230 b.
  • the energy level of the conduction band minimum is gradually varied at junction regions of the oxide 230 a, the oxide 230 b, and the oxide 230 c.
  • the energy level of the conduction band minimum at the junction regions of the oxide 230 a, the oxide 230 b, and the oxide 230 c is continuously varied or continuously connected.
  • the density of defect states in mixed layers formed at an interface between the oxide 230 a and the oxide 230 b and an interface between the oxide 230 b and the oxide 230 c is preferably made low.
  • the oxide 230 b serves as a main carrier path.
  • the oxide 230 a and the oxide 230 c have the above structure, the density of defect states at the interface between the oxide 230 a and the oxide 230 b and the interface between the oxide 230 b and the oxide 230 c can be made low.
  • the influence of interface scattering on carrier conduction is small, and the transistor 201 can have high on-state current and excellent frequency characteristics.
  • the oxide 230 c has a stacked-layer structure, not only the above effect of reducing the density of defect states at the interface between the oxide 230 b and the oxide 230 c but also the effect of inhibiting diffusion of a constituent element contained in the oxide 230 c to the insulator 250 side should be obtained. More specifically, since the oxide 230 c has a stacked-layer structure in which an oxide that does not contain In is positioned in the upper layer, the diffusion of In to the insulator 250 side can be inhibited. Since the insulator 250 functions as the gate insulator, the transistor has defects in characteristics when in diffuses. Thus, when the oxide 230 c has a stacked-layer structure, a highly reliable semiconductor device can be provided. Note that the transistor 200 can be referred to for the other structures and effect of the transistor 201 .
  • an insulator substrate, a semiconductor substrate, or a conductor substrate is used, for example.
  • the insulator substrate include a glass substrate, a quartz substrate, a sapphire substrate, a stabilized zirconia substrate (an yttria-stabilized zirconia substrate or the like), and a resin substrate.
  • the semiconductor substrate include a semiconductor substrate using silicon, germanium, or the like as a material and a compound semiconductor substrate including silicon carbide, silicon germanium, gallium arsenide, indium phosphide, zinc oxide, or gallium oxide.
  • a semiconductor substrate in which an insulator region is included in the semiconductor substrate e.g., an SOI (Silicon On Insulator) substrate.
  • the conductor substrate include a graphite substrate, a metal substrate, an alloy substrate, and a conductive resin substrate.
  • Other examples include a substrate including a metal nitride and a substrate including a metal oxide.
  • Other examples include an insulator substrate provided with a conductor or a semiconductor, a semiconductor substrate provided with a conductor or an insulator, and a conductor substrate provided with a semiconductor or an insulator.
  • these substrates provided with elements may be used.
  • the element provided for the substrate include a capacitor, a resistor, a switching element, a light-emitting element, and a memory element.
  • an insulator examples include an oxide, a nitride, an oxynitride, a nitride oxide, a metal oxide, a metal oxynitride, and a metal nitride oxide, each of which has an insulating property.
  • a problem such as leakage current may arise because of a thinner gate insulator.
  • the voltage during operation of the transistor can be lowered while the physical thickness of the gate insulator is maintained
  • a material with a low dielectric constant is used for the insulator functioning as an interlayer film, the parasitic capacitance generated between wirings can be reduced.
  • a material is preferably selected depending on the function of an insulator.
  • Examples of the insulator with a high dielectric constant include gallium oxide, hafnium oxide, zirconium oxide, an oxide containing aluminum and hafnium, an oxynitride containing aluminum and hafnium, an oxide containing silicon and hafnium, an oxynitride containing silicon and hafnium, and a nitride containing silicon and hafnium.
  • Examples of the insulator with a low dielectric constant include silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, porous silicon oxide, and a resin.
  • the electrical characteristics of the transistor can be stable.
  • the insulator having a function of inhibiting transmission of oxygen and impurities such as hydrogen a single layer or stacked layers of an insulator containing, for example, boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon, gallium, germanium, yttrium, zirconium, lanthanum, neodymium, hafnium, or tantalum is used.
  • a metal oxide such as aluminum oxide, magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, or tantalum oxide or a metal nitride such as aluminum nitride, aluminum titanium nitride, titanium nitride, silicon nitride oxide, or silicon nitride can be used.
  • the insulator functioning as the gate insulator is preferably an insulator including a region containing oxygen released by heating.
  • an insulator including a region containing oxygen released by heating For example, when a structure is employed in which silicon oxide or silicon oxynitride including a region containing oxygen released by heating is in contact with the oxide 230 , oxygen vacancies included in the oxide 230 can be compensated for.
  • a metal element selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, iridium, strontium, and lanthanum; an alloy containing any of the above metal elements as its component; an alloy containing a combination of the above metal elements; or the like.
  • tantalum nitride titanium nitride, tungsten nitride, a nitride containing titanium and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, an oxide containing lanthanum and nickel, or the like.
  • Tantalum nitride, titanium nitride, a nitride containing titanium nitride and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, and an oxide containing lanthanum and nickel are preferable because they are oxidation-resistant conductive materials or materials that retain their conductivity even after absorbing oxygen.
  • a semiconductor having high electrical conductivity, typified by polycrystalline silicon containing an impurity element such as phosphorus, or silicide such as nickel silicide may be used.
  • a stack including a plurality of conductive layers formed of the above materials may be used.
  • a stacked-layer structure combining a material containing the above metal element and a conductive material containing oxygen may be employed.
  • a stacked-layer structure combining a material containing the above metal element and a conductive material containing nitrogen may be employed.
  • a stacked-layer structure combining a material containing the above metal element, a conductive material containing oxygen, and a conductive material containing nitrogen may be employed.
  • a stacked-layer structure in which a material containing the above metal element and a conductive material containing oxygen are combined is preferably used as the conductor functioning as the gate.
  • the conductive material containing oxygen is preferably provided on the channel formation region side.
  • a conductive material containing oxygen and a metal element contained in a metal oxide where the channel is formed it is particularly preferable to use.
  • a conductive material containing the above metal element and nitrogen may be used.
  • a conductive material containing nitrogen such as titanium nitride or tantalum nitride, may be used.
  • indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon is added may be used.
  • indium gallium zinc oxide containing nitrogen may be used. With use of such a material, hydrogen contained in the metal oxide where the channel is formed can be trapped in some cases. Alternatively, hydrogen entering from an external insulator or the like can be trapped in some cases.
  • oxide 230 a metal oxide functioning as an oxide semiconductor is preferably used.
  • a metal oxide that can be used as the oxide 230 according to the present invention is described below.
  • the metal oxide preferably contains at least indium or zinc.
  • indium and zinc are preferably contained.
  • aluminum, gallium, yttrium, tin, or the like is preferably contained in addition to them.
  • one or more kinds selected from boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and the like may be contained.
  • the metal oxide is an In-M-Zn oxide containing indium, an element Al and zinc
  • the element M is aluminum, gallium, yttrium, tin, or the like.
  • other elements that can be used as the element M include boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium. Note that it is sometimes acceptable to use a plurality of the above-described elements in combination as the element M.
  • a metal oxide containing nitrogen is also collectively referred to as a metal oxide in some cases.
  • a metal oxide containing nitrogen may be referred to as a metal oxynitride.
  • Oxide semiconductors can be classified into a single crystal oxide semiconductor and a non-single-crystal oxide semiconductor.
  • the non-single-crystal oxide semiconductors include a CAAC-OS, a polycrystalline oxide semiconductor, an nc-OS, an amorphous-like oxide semiconductor (a-like OS), and an amorphous oxide semiconductor.
  • the CAAC-OS has c-axis alignment, a plurality of nanocrystals are connected in the a-b plane direction, and its crystal structure has distortion.
  • the distortion refers to a portion where the direction of a lattice arrangement changes between a region with a regular lattice arrangement and another region with a regular lattice arrangement in a region where the plurality of nanocrystals are connected.
  • the nanocrystal is basically a hexagon but is not always a regular hexagon and is a non-regular hexagon in some cases. Furthermore, a pentagonal or heptagonal lattice arrangement, for example, is included in the distortion in some cases.
  • a clear crystal grain boundary also referred to as grain boundary
  • formation of a crystal grain boundary is inhibited by the distortion of a lattice arrangement. This is because the CAAC-OS can tolerate distortion owing to a low density of arrangement of oxygen atoms in the a-b plane direction, an interatomic bond length changed by substitution of a metal element, and the like.
  • the CAAC-OS tends to have a layered crystal structure (also referred to as a layered structure) in which a layer containing indium and oxygen (hereinafter, an In layer) and a layer containing the element M, zinc, and oxygen (hereinafter, an (M,Zn) layer) are stacked.
  • a layer containing indium and oxygen hereinafter, an In layer
  • a layer containing the element M, zinc, and oxygen hereinafter, an (M,Zn) layer
  • indium and the element M can be replaced with each other
  • the layer can also be referred to as an (In,M,Zn) layer.
  • the layer can be referred to as an (In,M) layer.
  • the CAAC-OS is a metal oxide with high crystallinity
  • a reduction in electron mobility due to the crystal grain boundary is less likely to occur because it is difficult to observe a clear crystal grain boundary.
  • entry of impurities, formation of defects, or the like might decrease the crystallinity of a metal oxide, which means that the CAAC-OS is a metal oxide having small amounts of impurities and defects (e.g., oxygen vacancies (Vo)).
  • a metal oxide including a CAAC-OS is physically stable. Therefore, the metal oxide including a CAAC-OS is resistant to heat and has high reliability.
  • nc-OS In the nc-OS, a microscopic region (for example, a region with a size greater than or equal to 1 nm and less than or equal to 10 nm, in particular, a region with a size greater than or equal to 1 nm and less than or equal to 3 nm) has a periodic atomic arrangement. Furthermore, there is no regularity of crystal orientation between different nanocrystals in the nc-OS. Thus, the orientation in the whole film is not observed. Accordingly, in some cases, the nc-OS cannot be distinguished from an a-like OS or an amorphous oxide semiconductor depending on the analysis method.
  • indium-gallium-zinc oxide that is a kind of metal oxide containing indium, gallium, and zinc has a stable structure in some cases by being formed of the above-described nanocrystals.
  • IGZO has a stable structure when formed of smaller crystals (e.g., the above-described nanocrystals) rather than larger crystals (here, crystals with a size of several millimeters or several centimeters) because crystal growth tends to hardly occur particularly in the air.
  • An a-like OS is a metal oxide having a structure between those of the nc-OS and an amorphous oxide semiconductor.
  • the alike OS contains a void or a low-density region. That is, the alike OS has low crystallinity compared with the nc-OS and the CAAC-OS.
  • An oxide semiconductor can have various structures which show different properties. Two or more of the amorphous oxide semiconductor, the polycrystalline oxide semiconductor, the a-like OS, the nc-OS, and the CAAC-OS may be included in an oxide semiconductor of one embodiment of the present invention.
  • the concentration of an alkali metal or an alkaline earth metal in the metal oxide is set lower than or equal to 1 ⁇ 10 18 atoms/cm 3 , preferably lower than or equal to 2 ⁇ 10 16 atoms/cm 3 .
  • Hydrogen contained in a metal oxide reacts with oxygen bonded to a metal atom to be water, and thus forms an oxygen vacancy in some cases.
  • an electron which is a carrier is generated in some cases.
  • bonding of part of hydrogen to oxygen bonded to a metal atom causes generation of an electron serving as a carrier.
  • a transistor using a metal oxide containing hydrogen is likely to have normally-on characteristics.
  • hydrogen in the metal oxide is preferably reduced as much as possible.
  • the hydrogen concentration of the metal oxide obtained by SIMS is set lower than 1 ⁇ 10 20 atoms/cm 3 , preferably lower than 1 ⁇ 10 19 atoms/cm 3 , further preferably lower than 5 ⁇ 10 18 atoms/cm 3 , still further preferably lower than 1 ⁇ 10 18 atoms/cm 3 .
  • a thin film having high crystallinity is preferably used as a metal oxide used as a semiconductor of a transistor. With use of the thin film, the stability or reliability of the transistor can be improved.
  • the thin film include a thin film of a single-crystal metal oxide and a thin film of a polycrystalline metal oxide.
  • a high-temperature process or a laser heating process is needed to form the thin film of a single-crystal metal oxide or the thin film of a polycrystalline metal oxide over a substrate. Thus, manufacturing cost is increased, and throughput is decreased.
  • FIG. 4 to FIG. 12 (A) of each drawing is a top view. Moreover, (B) of each drawing is a cross-sectional view corresponding to a portion indicated by the dashed-dotted line A 1 -A 2 in (A), and is also a cross-sectional view of the transistor 201 in the channel length direction. Furthermore, (C) of each drawing is a cross-sectional view corresponding to a portion indicated by the dashed-dotted line A 3 -A 4 in (A), and is also a cross-sectional view of the transistor 201 in the channel width direction. Note that for simplification of the drawing, some components are not illustrated in the top view of (A) of each drawing.
  • a substrate (not illustrated) is prepared, and the insulator 214 is deposited over the substrate.
  • the insulator 214 can be deposited by a sputtering method, a chemical vapor deposition (CVD) method, a molecular beam epitaxy (MBE) method, a pulsed laser deposition (PLD) method, an atomic layer deposition (AM) method, or the like.
  • the CVD method can be classified into a plasma enhanced CVD (PECVD) method using plasma, a thermal CVD (TCVD) method using heat, a photo CVD method using light, and the like.
  • the CVD method can be classified into a metal CVD (MCVD) method and a metal organic CVD (MOCVD) method depending on a source gas to be used.
  • a thermal CVD method is a deposition method that does not use plasma and thus enables less plasma damage to an object to be processed.
  • a wiring, an electrode, an element (a transistor, a capacitor, or the like), or the like included in a semiconductor device might be charged up by receiving electric charge from plasma. In that case, accumulated electric charge might break the wiring, the electrode, the element, or the like included in the semiconductor device.
  • plasma damage does not occur in the case of a thermal CVD method, which does not use plasma, and thus the yield of the semiconductor device can be increased.
  • a thermal CVD method does not cause plasma damage during deposition, so that a film with few defects can be obtained.
  • an ALD method In an ALD method, one atomic layer can be deposited at a time using self-regulating characteristics of atoms. Hence, an ALD method has effects such as deposition of an extremely thin film, deposition on a component with a high aspect ratio, deposition of a film with a small number of defects such as pinholes, deposition with excellent coverage, and low-temperature deposition.
  • An ALD method includes a PEALD (plasma-enhanced ALD) method, which is a deposition method using plasma. The use of plasma is sometimes preferable because deposition at lower temperature is possible. Note that a precursor used in the ALD method sometimes contains impurities such as carbon.
  • a film provided by the ALD method contains impurities such as carbon in a larger amount than a film provided by another deposition method.
  • impurities can be quantified by X-ray photoelectron spectroscopy (XPS).
  • a CVD method and an ALD method are deposition methods in which a film is formed by reaction at a surface of an object to be processed.
  • the CVD method and the ALD method are deposition methods that are less likely to be influenced by the shape of the object to be processed and thus enable good step coverage.
  • the ALD method enables good step coverage and high thickness uniformity and thus is suitable for covering a surface of an opening portion with a high aspect ratio, for example.
  • the ALD method has a relatively low deposition rate, and thus is preferably used the in combination with another deposition method with a high deposition rate, such as the CVD method, in some cases.
  • Each of a CVD method and an ALD method enables the composition of a film that is to be deposited to be controlled with a flow rate ratio of source gases. For example, by each of a CVD method and an ALD method, a film with a certain composition can be deposited depending on the flow rate ratio of the source gases. Moreover, with each of a CVD method and an ALD method, by changing the flow rate ratio of the source gases while depositing the film, a film whose composition is continuously changed can be deposited.
  • the time taken for the deposition can be shortened because the time taken for transfer and pressure adjustment is omitted.
  • the productivity of the semiconductor device can be increased in some cases.
  • silicon nitride is deposited by a CVD method.
  • an insulator through which copper is less likely to pass such as silicon nitride, is used for the insulator 214 ; accordingly, even when a metal that is likely to diffuse, such as copper, is used for a conductor in a layer (not illustrated) below the insulator 214 , diffusion of the metal into a layer above the insulator 214 through the insulator 214 can be inhibited.
  • the use of an insulator through which impurities such as water and hydrogen are less likely to pass, such as silicon nitride can inhibit diffusion of impurities such as water and hydrogen from a layer below the insulator 214 .
  • the insulator 214 may have a two-layer structure.
  • aluminum oxide may be deposited over silicon nitride.
  • the insulator 216 is deposited over the insulator 214 .
  • the insulator 216 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • an opening reaching the insulator 214 is formed in the insulator 216 .
  • a groove and a slit, for example, are included in the category of the opening.
  • a region where an opening is formed may be referred to as an opening portion.
  • Wet etching can be used for the formation of the opening; however, dry etching is preferably used for microfabrication.
  • As the insulator 214 it is preferable to select an insulator that functions as an etching stopper film used in forming the groove by etching the insulator 216 .
  • a silicon oxide film is used as the insulator 216 in which the groove is to be formed
  • a silicon nitride film, an aluminum oxide film, or a hafnium oxide film is preferably used as the insulator 214 .
  • a conductive film to be the conductor 205 is deposited.
  • the conductive film preferably includes a conductor that has a function of inhibiting transmission of oxygen.
  • tantalum nitride, tungsten nitride, or titanium nitride can be used.
  • a stacked-layer film with tantalum, tungsten, titanium, molybdenum, aluminum, copper, or a molybdenum-tungsten alloy can be used.
  • the conductive film to be the conductor 205 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the conductive film to be the conductor 205 has a multilayer structure.
  • tantalum nitride is deposited by a sputtering method, and titanium nitride is stacked over the tantalum nitride.
  • a metal that is likely to diffuse such as copper
  • the use of such metal nitrides for a lower layer of the conductive film to be the conductor 205 can prevent outward diffusion of the metal from the conductor 205 .
  • a conductive film that is the upper layer of the conductive film to be the conductor 205 is deposited.
  • the conductive film can be deposited by a plating method, a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • a low-resistance conductive material such as copper is deposited.
  • CMP treatment Chemical Mechanical Polishing
  • CMP treatment Chemical Mechanical Polishing
  • the conductive film to be the conductor 205 remains only in the opening portion.
  • the conductor 205 whose top surface is flat can be formed (see FIG. 4 ).
  • the insulator 216 is partly removed by the CMP treatment in some cases.
  • a conductive film to be the conductor 205 is deposited over the insulator 214 .
  • the conductive film to be the conductor 205 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the conductive film to be the conductor 205 can be a multilayer film In this embodiment, tungsten is deposited for the conductive film to be the conductor 205 .
  • the conductive film to be the conductor 205 is processed by a lithography method, so that the conductor 205 is formed.
  • a resist is exposed to light through a mask.
  • a region exposed to light is removed or left using a developer, so that a resist mask is formed.
  • etching treatment through the resist mask is conducted, whereby a conductor, a semiconductor, an insulator, or the like can be processed into a desired shape.
  • the resist mask is formed by, for example, exposure of the resist to light such as KrF excimer laser light, ArF excimer laser light, EUV (Extreme Ultraviolet) light, or the like.
  • a liquid immersion technique may be employed in which a gap between a substrate and a projection lens is filled with liquid (e.g., water) in light exposure.
  • an electron beam or an ion beam may be used instead of the light.
  • a mask is unnecessary in the case of using an electron beam or an ion beam.
  • the resist mask can be removed by dry etching treatment such as ashing, wet etching treatment, wet etching treatment after dry etching treatment, or dry etching treatment after wet etching treatment.
  • a hard mask formed of an insulator or a conductor may be used instead of the resist mask.
  • a hard mask with a desired shape can be formed by forming an insulating film or a conductive film that is the hard mask material over the conductive film to be the conductor 205 , forming a resist mask thereover, and then etching the hard mask material.
  • the etching of the conductive film to be the conductor 205 may be performed after removing the resist mask or with the resist mask remaining. In the latter case, the resist mask sometimes disappears during the etching.
  • the hard mask may be removed by etching after the etching of the conductive film to be the conductor 205 . Meanwhile, the hard mask is not necessarily removed when the hard mask material does not affect subsequent steps or can be utilized in the subsequent steps.
  • a capacitively coupled plasma (CCP) etching apparatus including parallel plate electrodes can be used as a dry etching apparatus.
  • the capacitively coupled plasma etching apparatus including the parallel plate electrodes may have a structure in which a high-frequency power is applied to one of the parallel plate electrodes.
  • a structure may be employed in which different high-frequency powers are applied to one of the parallel plate electrodes.
  • a structure may be employed in which high-frequency powers with the same frequency are applied to the parallel plate electrodes.
  • a structure may be employed in which high-frequency powers with different frequencies are applied to the parallel plate electrodes.
  • a dry etching apparatus including a high-density plasma source can be used.
  • an inductively coupled plasma (ICP) etching apparatus or the like can be used, for example.
  • ICP inductively coupled plasma
  • an insulating film to be the insulator 216 is deposited over the insulator 214 and the conductor 205 .
  • the insulating film to be the insulator 216 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • silicon oxide is deposited by a CVD method.
  • the thickness of the insulating film to be the insulator 216 is preferably greater than or equal to the thickness of the conductor 205 .
  • the thickness of the conductor 205 is 1
  • the thickness of the insulating film to be the insulator 216 is greater than or equal to 1 and less than or equal to 3.
  • the thickness of the conductor 205 is 150 nm
  • the thickness of the insulating film to be the insulator 216 is 350 nm.
  • CMP treatment is performed on the insulating film to be the insulator 216 , so that part of the insulating film to be the insulator 216 is removed and a surface of the conductor 205 is exposed.
  • the conductor 205 and the insulator 216 whose top surfaces are flat can be formed. The above is the different formation method of the conductor 205 .
  • the insulator 222 is deposited over the insulator 216 and the conductor 205 .
  • An insulator containing an oxide of one or both of aluminum and hafnium is preferably deposited as the insulator 222 .
  • the insulator containing an oxide of one or both of aluminum and hafnium aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like is preferably used.
  • the insulator containing an oxide of one or both of aluminum and hafnium has a barrier property against oxygen, hydrogen, and water.
  • the insulator 222 has a barrier property against hydrogen and water, hydrogen and water contained in components provided around the transistor 201 are inhibited from diffusing into the transistor 201 through the insulator 222 , and generation of oxygen vacancies in the oxide 230 a, the oxide 230 b, and the oxide 230 c can be inhibited.
  • the insulator 222 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the insulator 224 is deposited over the insulator 222 .
  • the insulator 224 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • heat treatment is preferably performed.
  • the heat treatment is performed at a temperature higher than or equal to 250° C. and lower than or equal to 650° C., preferably higher than or equal to 300° C. and lower than or equal to 500° C., further preferably higher than or equal to 320° C. and lower than or equal to 450° C.
  • the heat treatment is performed in a nitrogen atmosphere, an inert gas atmosphere, or an atmosphere containing an oxidizing gas at 10 ppm or more, 1% or more, or 10% or more.
  • the heat treatment may be performed under reduced pressure.
  • the heat treatment may be performed in such a manner that heat treatment is performed in a nitrogen atmosphere or an inert gas atmosphere, and then another heat treatment is performed in an atmosphere containing an oxidizing gas at 10 ppm or more, 1% or more, or 10% or more in order to compensate for released oxygen.
  • treatment is performed at 400° C. in a nitrogen atmosphere for one hour, and treatment is successively performed at 400° C. in an oxygen atmosphere for one hour.
  • impurities such as water and hydrogen contained in the insulator 224 can be removed.
  • Heat treatment may be performed after the insulator 222 is deposited.
  • the above-described heat treatment conditions can be used.
  • plasma treatment containing oxygen may be performed under reduced pressure so that an excess-oxygen region can be formed in the insulator 224 .
  • an apparatus including a power source for generating high-density plasma using microwaves is preferably used, for example.
  • a power source for applying an RF (Radio Frequency) to a substrate side may be included.
  • the use of high-density plasma enables high-density oxygen radicals to be produced, and RF application to the substrate side allows the oxygen radicals generated by the high-density plasma to be efficiently introduced into the insulator 224 .
  • plasma treatment with oxygen may be performed to compensate for released oxygen. Note that impurities such as water and hydrogen contained in the insulator 224 can be removed by selecting the conditions for the plasma treatment appropriately. In that case, the heat treatment does not need to be performed.
  • aluminum oxide may be deposited over the insulator 224 by a sputtering method and the aluminum oxide may be subjected to CMP until the insulator 224 is reached.
  • the CMP treatment can planarize the surface of the insulator 224 and smooth the surface of the insulator 224 .
  • it is easy to detect the endpoint of CMP Although part of the insulator 224 is polished by CMP and the thickness of the insulator 224 is reduced in some cases, the thickness can be adjusted when the insulator 224 is deposited.
  • Planarizing and smoothing the surface of the insulator 224 can prevent deterioration of the coverage with an oxide formed later and a decrease in the yield of the semiconductor device in some cases.
  • the deposition of aluminum oxide over the insulator 224 by a sputtering method is preferred because oxygen can be added to the insulator 224 .
  • an oxide film 230 A 1 and an oxide film 23091 are deposited in this order over the insulator 224 (see FIG. 4 ).
  • the oxide films are preferably deposited successively without being exposed to an atmospheric environment. By the deposition without exposure to the air, impurities or moisture from the atmospheric environment can be prevented from being attached onto the oxide film 230 A 1 and the oxide film 230 B 1 , so that the vicinity of the interface between the oxide film 230 A 1 and the oxide film 230131 can be kept clean.
  • the oxide film 230 A 1 and the oxide film 230 B 1 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an MD method, or the like.
  • oxide film 230 A 1 and the oxide film 230 B 1 are deposited by a sputtering method
  • oxygen or a mixed gas of oxygen and a rare gas is used as a sputtering gas.
  • Increasing the proportion of oxygen contained in the sputtering gas can increase the amount of excess oxygen in the deposited oxide films
  • a target of the above-described In-M-Zn oxide can be used.
  • the proportion of oxygen contained in the sputtering gas for the oxide film 230 A 1 is preferably 70% or higher, further preferably 80% or higher, and still further preferably 100%.
  • the oxide film 230 B 1 is formed by a sputtering method
  • the proportion of oxygen contained in the sputtering gas is 1% or higher and 30% or lower, preferably 5% or higher and 20% or lower during the deposition
  • an oxygen-deficient oxide semiconductor is formed.
  • a transistor in which an oxygen-deficient oxide semiconductor is used for its channel formation region can have relatively high field-effect mobility.
  • the proportion of oxygen contained in the sputtering gas is 70% or higher, preferably 80% or higher, further preferably 100% for the deposition. In that case, part of oxygen contained in the sputtering gas may be supplied to the oxide film 230 A 1 , which is preferable.
  • the oxide film 230 A 1 and the oxide film 230 B 1 are preferably formed by appropriate selection of deposition conditions and atomic ratios in accordance with the characteristics required for the oxide 230 a and the oxide 230 b.
  • heat treatment may be performed.
  • the above-described heat treatment conditions can be used.
  • impurities such as water and hydrogen in the oxide film 230 A 1 and the oxide film 230 B 1 can be removed.
  • treatment is performed at 400° C. in a nitrogen atmosphere for one hour, and treatment is successively performed at 400° C. in an oxygen atmosphere for one hour.
  • a film to be a hard mask 244 is deposited.
  • the film to be the hard mask 244 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • a film which is less likely to be etched when the oxide film 230 A 1 and the oxide film 230 B 1 are processed in the following step is preferable.
  • silicon oxide, silicon oxynitride, silicon nitride, silicon nitride oxide, aluminum oxide, hafnium oxide, tungsten, molybdenum, aluminum, titanium, titanium nitride, tantalum, tantalum nitride, or the like can be used.
  • the film to be the hard mask 244 is processed by a lithography method to form the hard mask 244 .
  • the oxide film 230 A 1 and the oxide film 230 B 1 are processed using the hard mask 244 as an etching mask to form an oxide 230 A 2 and an oxide 230 B 2 . Note that in this step, the thickness of the insulator 224 in a region not overlapping with the oxide film 230 A 2 is reduced in some cases (see FIG. 5 ).
  • a conductive film 242 A is deposited so as to cover the insulator 224 and the hard mask 244 (see FIG. 6 ).
  • the conductive film 242 A can be deposited by a sputtering method, a. CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the deposition rate in a horizontal direction is preferably lower than the deposition rate in a vertical direction.
  • the deposition rate in the vertical direction is 1, the deposition rate in the horizontal direction is preferably lower than or equal to 0.5.
  • the conductive film 242 A can be deposited by, for example, a bias sputtering method in which deposition is performed while a potential is being applied to a substrate, a collimated sputtering method in which a shield plate (collimator) with a hole is inserted between a substrate and a target and a deposition direction is controlled, a long throw sputtering method in which the distance between a substrate and a target is long, or the like.
  • the conductive film 242 A preferably contains indium and one or more of tin, tungsten, titanium, and silicon.
  • indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon is added may be used.
  • zinc oxide to which gallium is added or titanium oxide to which niobium is added may be used.
  • indium tin oxide is used.
  • part of the conductive film 242 A is isotropically etched (isotropic etching). This etching is performed so that a top surface of a conductor 24213 and a top surface of an oxide 232 B 2 are substantially level with each other and the conductive film 242 A on side surfaces of the hard mask 244 is removed.
  • the conductor 242 B is formed over the insulator 224
  • a conductor 242 C is formed over the hard mask 244 (see FIG. 7 ).
  • a dry etching method or a wet etching method can be used.
  • the hard mask 244 is etched from a direction of the side surface. This etching is preferably performed under conditions where the etching rate of the conductor 242 B is low enough to hardly etch the conductor 24213 compared to the etching rate of the hard mask 244 .
  • FIG. 8 illustrates a state in which the hard mask 244 is being etched.
  • the whole hard mask 244 is etched, whereby the conductor 242 C over the hard mask is lifted off.
  • the level of the top surface of the oxide 230 B 2 and the level of the top surface of the conductor 242 B are substantially the same (see FIG. 9 ).
  • the oxide 230 A 2 , the oxide 230 B 2 , and the conductor 242 B are processed by a lithography method to form the oxide 230 a, the oxide 230 c, the conductor 242 a, and the conductor 242 b.
  • the oxide 230 a, the oxide 230 b, the conductor 242 a, and the conductor 242 b are formed to at least partly overlap with the conductor 205 .
  • the thickness of the insulator 224 in a region not overlapping with the oxide 230 a is reduced in some cases.
  • the thickness of the insulator 224 in a region not overlapping with the oxide 230 a, the conductor 242 a, and the conductor 242 b is reduced in some cases (see FIG. 10 ).
  • first heat treatment may be performed.
  • the first heat treatment is suitably performed in an atmosphere containing oxygen.
  • the first heat treatment may be performed under a reduced pressure, and an oxide film to be the oxide 230 c may be successively formed without exposure to the air.
  • the treatment can remove moisture and hydrogen adsorbed onto the surface of the oxide 230 b and the like, and further can reduce the moisture concentration and the hydrogen concentration of the oxide 230 a and the oxide 230 b.
  • the first heat treatment is preferably performed at a temperature higher than or equal to 100° C. and lower than or equal to 400° C., further preferably performed at a temperature higher than or equal to 150° C. and lower than or equal to 350° C. In this embodiment, the first heat treatment is performed at 200° C. under a reduced pressure.
  • the oxide film to be the oxide 230 c is deposited (see FIG. 11 ).
  • the oxide film to be the oxide 230 c can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the atomic ratio of Ga to In in the oxide film to be the oxide 230 c is preferably greater than the atomic ratio of Ga to In in the oxide 230 b.
  • the oxide film to be the oxide 230 c may be a stacked layer.
  • the proportion of oxygen contained in the sputtering gas for the oxide film to be the oxide 230 c is higher than or equal to 70%, preferably higher than or equal to 80%, and farther preferably 100%.
  • second heat treatment may be performed.
  • the second heat treatment may be performed under a reduced pressure, and an insulating film to be the insulator 250 may be successively deposited without exposure to the air.
  • moisture and hydrogen adsorbed on the surface of the oxide film to be the oxide 230 c and the like can be removed, and the moisture concentration and the hydrogen concentration of the oxide films to be the oxide 230 a, the oxide 230 b, and the oxide 230 c can be reduced.
  • the second heat treatment is preferably performed at a temperature higher than or equal to 100° C. and lower than or equal to 400° C. in this embodiment, the second heat treatment is performed at 200° C.
  • the insulating film to be the insulator 250 is deposited (see FIG. 11 ).
  • the insulating film to be the insulator 250 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like. Silicon oxynitride is preferably deposited by a CVD method as the insulating film to be the insulator 250 .
  • the deposition temperature at the time of the deposition of the insulating film to be the insulator 250 is preferably higher than or equal to 250° C. and lower than 450° C., particularly preferably approximately 350° C. When the insulating film to be the insulator 250 is deposited at 350° C., an insulator having few impurities can be deposited.
  • a conductive film to be the conductor 260 a and a conductive film to be the conductor 260 b are deposited.
  • the conductive film to be the conductor 260 a and the conductive film to be the conductor 260 b can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • a CVD method is preferably used, for example.
  • the conductive film to be the conductor 260 a is deposited by an ALD method
  • the conductive film to be the conductor 260 b is deposited by a CVD method (see FIG. 11 ).
  • the oxide film to be the oxide 230 c, the insulating film to be the insulator 250 , the conductive film to be the conductor 260 a, and the conductive film to be the conductor 260 b are processed by a lithography method to form the oxide 230 c, the insulator 250 , and the conductor 260 (the conductor 260 a and the conductor 260 b ).
  • the conductor 260 is formed to at least partly overlap with the conductor 205 (see FIG. 11 ).
  • third heat treatment may be performed.
  • the third heat treatment can be performed in a nitrogen atmosphere or an atmosphere containing oxygen. It is preferable that the third heat treatment be performed in an atmosphere containing nitrogen and oxygen.
  • the proportion of oxygen is preferably higher than or equal to 5% and lower than or equal to 20% of the total amount of nitrogen and oxygen.
  • the third heat treatment is preferably performed at a temperature higher than or equal to 300° C. and lower than or equal to 450° C., further preferably higher than or equal to 300° C. and lower than or equal to 400° C. Typically, 350° C. or a temperature in the vicinity thereof is preferable.
  • the heat treatment time is shorter than or equal to 100 hours, preferably longer than or equal to 1 hour and shorter than or equal to 48 hours. Typically, 24 hours or the treatment time in the vicinity thereof is preferable.
  • the heat treatment is performed at 350° C. in a nitrogen atmosphere for 24 hours.
  • the third heat treatment is preferably performed under conditions where the conductor 260 is not oxidized.
  • the insulator 272 is deposited so as to cover the insulator 224 , the oxide 230 a, the oxide 230 b, the conductor 242 a, the conductor 242 b, and the conductor 260 (see FIG. 11 ).
  • the insulator 272 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • an insulating film having a function of inhibiting transmission of oxygen is preferably used.
  • aluminum oxide, silicon nitride, silicon oxide, or gallium oxide may be deposited by a sputtering method or an ALD method.
  • the insulator 272 may have a two-layer structure, For example, aluminum oxide may be deposited by a sputtering method, and then aluminum oxide may be deposited by an ALD method.
  • the defect can be filled in by the aluminum oxide deposited by an ALD method that enables excellent coverage, which is preferable.
  • an insulating film to be the insulator 280 is deposited over the insulator 272 .
  • the insulating film to be the insulator 280 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the insulating film to be the insulator 280 is subjected to CMP treatment, so that the insulator 280 having a flat top surface is formed (see FIG. 12 ).
  • fourth heat treatment may be performed.
  • the fourth heat treatment is preferably performed under reduced pressure, and an insulating film to be the insulator 281 is preferably formed over the insulator 280 without exposure to the air.
  • Such treatment is preferable because moisture and hydrogen adsorbed onto the surface of the insulator 280 or the like can be removed.
  • the insulating film to be the insulator 281 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an AID method, or the like.
  • aluminum oxide is preferably deposited by a sputtering method, for example.
  • the insulator 281 may have a two-layer structure.
  • silicon oxide may be deposited by a sputtering method, and then silicon nitride may be deposited by a sputtering method.
  • impurities such as water and hydrogen can be inhibited from being diffused into the transistor 201 from the outside through the insulator 281 (see FIG. 12 ).
  • fifth heat treatment may be performed.
  • treatment is performed at 400° C. in a nitrogen atmosphere for one hour.
  • oxygen added by the deposition of the insulator 281 can be injected into the insulator 280 .
  • the oxygen can be injected into the oxide 230 a and the oxide 230 b through the oxide 230 c.
  • openings reaching the conductor 242 a and the conductor 242 b are formed in the insulator 272 , the insulator 280 , and the insulator 281 (see FIG. 2 ).
  • the openings are formed by a lithography method.
  • an insulating film to be the insulator 241 is deposited and the insulating film is subjected to anisotropic etching, so that the insulator 241 is formed (see FIG. 2 ).
  • the conductive film can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • an insulating film to be the insulator 241 an insulating film having a function of inhibiting transmission of oxygen is preferably used.
  • aluminum oxide or silicon nitride is preferably deposited by an ALD method.
  • anisotropic etching a dry etching method or the like is employed, for example.
  • a conductive film to be the conductor 240 a and the conductor 240 b is deposited.
  • the conductive film to be the conductor 240 a and the conductor 240 b preferably has a stacked-layer structure that includes a conductor having a function of inhibiting transmission of impurities such as water and hydrogen.
  • a stacked layer of tantalum nitride, titanium nitride, or the like and tungsten, molybdenum, copper, or the like can be employed.
  • the conductive film to be the conductor 240 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • CMP treatment is performed to remove part of the conductive film to be the conductor 240 a and the conductor 240 b, so that the insulator 281 is exposed.
  • the conductive film remains only in the openings, so that the conductor 240 a and the conductor 240 b having flat top surfaces can be formed (see FIG. 2 ).
  • the insulator 281 is partly removed by the CMP treatment in some cases.
  • the conductive film to be the conductor 246 is deposited.
  • the conductive film to be the conductor 246 can be deposited by a sputtering method, a CVD method, an MBE method, a PLD method, an ALD method, or the like.
  • the conductive film to be the conductor 246 is processed by a lithography method to form the conductor 246 a in contact with the top surface of the conductor 240 a and the conductor 246 b in contact with the top surface of the conductor 240 b (see FIG. 2 ).
  • the semiconductor device including the transistor 201 illustrated in FIG. 2 can be manufactured.
  • FIG. 3A is a top view of a semiconductor device including the transistor 200 .
  • FIG. 3B and FIG. 3C are cross-sectional views of the semiconductor device.
  • FIG. 3B is a cross-sectional view of a portion indicated by a dashed-dotted line A 1 -A 2 in FIG. 3A , and is a cross-sectional view in the channel length direction of the transistor 200 .
  • FIG. 3C is a cross-sectional view of a portion indicated by a dashed-dotted line A 3 -A 4 in FIG. 3A , and is a cross-sectional view in the channel width direction of the transistor 200 . Note that for clarity of the drawing, some components are not illustrated in the top view of FIG. 3A .
  • a structure of the transistor 200 is described with reference to FIG. 3 below. Note that also in this section, the materials described in detail in ⁇ Structure example 1 of semiconductor device> can be used as the materials for the transistor 200 .
  • the transistor 200 includes the insulator 216 over the insulator 214 ; the conductor 205 provided to be embedded in the insulator 216 ; the insulator 222 over the insulator 216 and the conductor 205 ; the insulator 224 over the insulator 222 ; the oxide 230 over the insulator 224 ; the conductor 242 a and the conductor 242 b over the oxide 230 ; the insulator 250 over the conductor 242 a, the conductor 242 b, and the oxide 230 ; and the conductor 260 over the insulator 250 (the conductor 260 a and the conductor 260 b ).
  • the side surface of the conductor 242 a and a bottom surface of the conductor 242 a include a region in contact with the oxide 230
  • the side surface of the conductor 242 b and a bottom surface of the conductor 242 b include a region in contact with the oxide 230 .
  • the level of the top surface of the conductor 242 a, the level of the top surface of the conductor 242 b, and the level of the top surface of the oxide 230 are substantially the same.
  • the semiconductor device illustrated in FIG. 3 is different from the semiconductor device described in ⁇ Structure example 1 of semiconductor device> (see FIG. 1 ) in the shape of the oxide 230 .
  • the oxide film to be the oxide 230 is half-etched without being completely removed, whereby the oxide 230 having such a shape can be formed.
  • Such a structure in which the bottom surface of the conductor 242 functioning as a source and a drain is in contact with the oxide 230 is preferable because a short-channel effect of the transistor 200 can be inhibited in some cases.
  • the semiconductor device illustrated in FIG. 1 can be referred to for the other structures and the effect.
  • compositions, structure, method, and the like described above in this embodiment can be used in combination as appropriate with the compositions, structures, methods, and the like described in the other embodiments and the example.
  • FIG. 14 one embodiment of a semiconductor device will be described using FIG. 14 .
  • FIG. 14 illustrates an example of a semiconductor device (a memory device) of one embodiment of the present invention.
  • the semiconductor device of one embodiment of the present invention includes the transistor 200 , a transistor 300 , and a capacitor 100 .
  • the transistor 200 is provided above the transistor 300 .
  • the capacitor 100 is provided above the transistor 300 and the transistor 200 . Note that the transistor 200 and the transistor 201 described in the above embodiment can be used as the transistor 200 .
  • the transistor 200 is a transistor in which a channel is formed in a semiconductor layer including an oxide semiconductor.
  • the off-state current of the transistor 200 is low; thus, by using the transistor 200 in a memory device, stored data can be retained for a long time. In other words, such a memory device does not require refresh operation or has extremely low frequency of the refresh operation, which leads to a sufficient reduction in power consumption of the memory device.
  • a wiring 1001 is electrically connected to a source of the transistor 300
  • a wiring 1002 is electrically connected to a drain of the transistor 300
  • a wiring 1003 is electrically connected to one of a source and a drain of the transistor 200
  • a wiring 1004 is electrically connected to a first gate of the transistor 200
  • a wiring 1006 is electrically connected to a second gate of the transistor 200 .
  • a gate of the transistor 300 and the other of the source and the drain of the transistor 200 are electrically connected to one electrode of the capacitor 100
  • a wiring 1005 is electrically connected to the other electrode of the capacitor 100 .
  • a memory cell array can be formed.
  • the transistor 300 is provided on a substrate 311 and includes a conductor 316 functioning as a gate, an insulator 315 functioning as a gate insulator, a semiconductor region 313 formed of part of the substrate 311 , and a low-resistance region 314 a and a low-resistance region 314 b functioning as a source and a drain.
  • the transistor 300 is either a p-channel transistor or an n-channel transistor.
  • the semiconductor region 313 (part of the substrate 311 ) in which a channel is formed has a convex shape.
  • the conductor 316 is provided to cover a side surface and a top surface of the semiconductor region 313 with the insulator 315 therebetween.
  • a material adjusting a work function may be used for the conductor 316 .
  • Such a transistor 300 is also referred to as a FIN-type transistor because it utilizes a convex portion of a semiconductor substrate.
  • an insulator functioning as a mask for forming the convex portion may be included in contact with an upper portion of the convex portion.
  • a semiconductor film having a convex shape may be formed by processing an SOI substrate.
  • transistor 300 illustrated in FIG. 14 is an example and the structure is not limited thereto; an appropriate transistor may be used in accordance with a circuit structure or a driving method.
  • the capacitor 100 is provided above the transistor 200 .
  • the capacitor 100 includes a conductor 110 functioning as a first electrode, a conductor 120 functioning as a second electrode, and an insulator 130 functioning as a dielectric.
  • a conductor 112 and the conductor 110 over a conductor 246 can be formed at the same time.
  • the conductor 112 has a function of a plug or a wiring that is electrically connected to the capacitor 100 , the transistor 200 , or the transistor 300 .
  • the conductor 112 and the conductor 110 illustrated in FIG. 14 each have a single-layer structure; however, the structure is not limited thereto, and a stacked-layer structure of two or more layers may be employed. For example, between a conductor having a barrier property and a conductor having high conductivity, a conductor that is highly adhesive to the conductor having a harrier property and the conductor having high conductivity may he formed.
  • the insulator 130 can be provided to have stacked layers or a single layer using, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, hafnium oxide, hafnium oxynitride, hafnium nitride oxide, hafnium nitride, or the like.
  • a stacked-layer structure of a material with high dielectric strength such as silicon oxynitride and a high-permittivity (high-k) material for the insulator 130 .
  • a material with high dielectric strength such as silicon oxynitride and a high-permittivity (high-k) material for the insulator 130 .
  • high-k high-permittivity
  • examples of the insulator of the high-permittivity (high-k) material include gallium oxide, hafnium oxide, zirconium oxide, an oxide containing aluminum and hafnium, an oxynitride containing aluminum and hafnium, an oxide containing silicon and hafnium, an oxynitride containing silicon and hafnium, and a nitride containing silicon and hafnium.
  • examples of the material with high dielectric strength include silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, porous silicon oxide, and a resin.
  • Wiring layers provided with an interlayer film, a wiring, a plug, and the like may be provided between the components.
  • a plurality of wiring layers can be provided in accordance with design.
  • a plurality of conductors having functions of plugs or wirings are collectively denoted by the same reference numeral in some cases.
  • a wiring and a plug electrically connected to the wiring may be a single component. That is, there are cases where part of a conductor functions as a wiring and another part of the conductor functions as a plug.
  • an insulator 320 , an insulator 322 , an insulator 324 , and an insulator 326 are sequentially stacked over the transistor 300 as interlayer films.
  • a conductor 328 , a conductor 330 , and the like that are electrically connected to the capacitor 100 or the transistor 200 are embedded in the insulator 320 , the insulator 322 , the insulator 324 , and the insulator 326 .
  • the conductor 328 and the conductor 330 function as a plug or a wiring.
  • the insulators functioning as interlayer films may also function as planarization films that cover uneven shapes therebelow.
  • a top surface of the insulator 322 may be planarized by planarization treatment using a chemical mechanical polishing (CMP) method or the like to improve planarity.
  • CMP chemical mechanical polishing
  • a wiring layer may be provided over the insulator 326 and the conductor 330 .
  • an insulator 350 , an insulator 352 , and an insulator 354 are stacked sequentially.
  • a conductor 356 is formed in the insulator 350 , the insulator 352 , and. the insulator 354 .
  • the conductor 356 functions as a plug or a wiring.
  • a conductor 218 a conductor included in the transistor 200 (the conductor 205 ), and the like are embedded in the insulator 210 , an insulator 212 , the insulator 214 , and the insulator 216 .
  • the conductor 218 has a function of a plug or a wiring that is electrically connected to the capacitor 100 or the transistor 300 .
  • an insulator 150 is provided over the conductor 120 and the insulator 130 .
  • Examples of an insulator that can be used as an interlayer film include an insulating oxide, an insulating nitride, an insulating oxynitride, an insulating nitride oxide, an insulating metal oxide, an insulating metal oxynitride, and an insulating metal nitride oxide.
  • a material having low dielectric constant is used for the insulator functioning as an interlayer film, parasitic capacitance generated between wirings can be reduced.
  • a material is preferably selected depending on the function of an insulator.
  • the insulator 150 the insulator 212 , the insulator 352 , the insulator 354 , or the like
  • an insulator having a low dielectric constant is preferably used.
  • the insulator preferably includes silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, porous silicon oxide, a resin, or the like.
  • the insulator preferably has a stacked-layer structure of a resin and silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, or porous silicon oxide.
  • silicon oxide or silicon oxynitride which is thermally stable, is combined with a resin
  • the stacked-layer structure can have thermal stability and low relative permittivity.
  • the resin include polyester, polyolefin, polyamide (nylon, aramid, or the like), polyimide, polycarbonate, and acrylic.
  • an insulator having a function of inhibiting the transmission of oxygen and impurities such as hydrogen is used for the insulator 210 , the insulator 350 , or the like.
  • insulator having a function of inhibiting the transmission of oxygen and impurities such as hydrogen
  • a single layer or stacked layers of an insulator containing, for example, boron, carbon, nitrogen, oxygen, fluorine, magnesium, aluminum, silicon, phosphorus, chlorine, argon, gallium, germanium, yttrium, zirconium, lanthanum, neodymium, hafnium, or tantalum are used.
  • a metal oxide such as aluminum oxide, magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, hafnium oxide, or tantalum oxide; silicon nitride oxide; silicon nitride; or the like can be used.
  • a material containing one or more kinds of metal elements selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, and the like can be used.
  • a semiconductor having high electrical conductivity, typified by polycrystalline silicon containing an impurity element such as phosphorus, or silicide such as nickel silicide may be used.
  • a single layer or stacked layers of a conductive material such as a metal material, an alloy material, a metal nitride material, or a metal oxide material that is formed using the above material can be used.
  • a high-melting-point material that has both heat resistance and conductivity, such as tungsten or molybdenum, and it is preferable to use tungsten.
  • a low-resistance conductive material such as aluminum or copper. The use of a low-resistance conductive material can reduce wiring resistance.
  • an insulator including an excess-oxygen region is provided in the vicinity of the oxide semiconductor in some cases.
  • an insulator having a barrier property is preferably provided between the insulator including the excess-oxygen region and a conductor provided in the insulator including the excess-oxygen region.
  • an insulator 276 is preferably provided between the insulator 224 including excess oxygen and the conductor 245 in FIG. 14 . Since the insulator 276 is provided in contact with the insulator 222 and the insulator 272 , the insulator 224 and the transistor 200 can be sealed by the insulators having barrier properties. Furthermore, the insulator 276 is preferably in contact with part of the insulator 280 . When the insulator 276 extends to the insulator 280 , the diffusion of oxygen and impurities can be further inhibited.
  • provision of the insulator 276 can inhibit the absorption of excess oxygen contained in the insulator 224 by the conductor 245 .
  • the diffusion of hydrogen, which is an impurity, into the transistor 200 through the conductor 245 can be inhibited.
  • the insulator 276 is preferably formed using an insulating material having a function of inhibiting diffusion of an impurity such as water or hydrogen and oxygen.
  • an impurity such as water or hydrogen and oxygen.
  • aluminum oxide or hafnium oxide is preferably used.
  • a metal oxide such as magnesium oxide, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, lanthanum oxide, neodymium oxide, or tantalum oxide or silicon nitride oxide, silicon nitride, or the like.
  • This embodiment can be implemented in an appropriate combination with the structures described in the other embodiments, Example, and the like.
  • a memory device of one embodiment of the present invention including a transistor in which an oxide is used for a semiconductor (hereinafter referred to as an OS transistor in some cases) and a capacitor (hereinafter, such a memory device is also referred to as an OS memory device in some cases), will be described with reference to FIG. 15 and FIG. 16 .
  • the OS memory device is a memory device including at least a capacitor and an OS transistor that controls charge and discharge of the capacitor. Since the off-state current of the OS transistor is extremely low, the OS memory device has excellent retention characteristics and can function as a nonvolatile memory.
  • FIG. 15A illustrates a structure example of the OS memory device.
  • a memory device 1400 includes a peripheral circuit 1411 and a memory cell array 1470 .
  • the peripheral circuit 1411 includes a row circuit 1420 , a column circuit 1430 , an output circuit 1440 , and a control logic circuit 1460 .
  • the column circuit 1430 includes, for example, a column decoder, a precharge circuit, a sense amplifier, a write circuit, and the like.
  • the precharge circuit has a function of precharging wirings.
  • the sense amplifier has a function of amplifying a data signal read from a memory cell. Note that the wirings are wirings connected to memory cells included in the memory cell array 1470 , which will be described in detail later.
  • An amplified data signal is output to the outside of the memory device 1400 as a digital data signal RDATA through the output circuit 1440 .
  • the row circuit 1420 includes, for example, a row decoder, a word line driver circuit, and the like, and can select a row to be accessed.
  • a low power supply voltage (VSS), a high power supply voltage (VDD) for the peripheral circuit 1411 , and a high power supply voltage (VIL) for the memory cell array 1470 are supplied to the memory device 1400 from the outside.
  • control signals (CE, WE, and RE) are input to the memory device 1400 from the outside.
  • An address signal ADDR is input to the row decoder and the column decoder, and WDATA is input to the write circuit.
  • the control logic circuit 1460 processes signals (CE, WE, and RE) input from the outside, and generates control signals for the row decoder or the column decoder.
  • CE denotes a chip enable signal
  • WE denotes a write enable signal
  • RE denotes a read enable signal.
  • Signals processed by the control logic circuit 1460 are not limited thereto, and other input signals may be input as necessary.
  • the memory cell array 1470 includes a plurality of memory cells MC arranged in a matrix and a plurality of wirings. Note that the number of wirings that connect the memory cell array 1470 and the row circuit 1420 depends on the structure of the memory cell MC, the number of memory cells MC included in one column, and the like. Furthermore, the number of wirings that connect the memory cell array 1470 and the column circuit 1430 depends on the structure of the memory cell MC, the number of memory cells MC included in one row, and the like.
  • FIG. 15A illustrates an example in which the peripheral circuit 1411 and the memory cell array 1470 are formed on the same plane; however, this embodiment is not limited thereto.
  • the memory cell array 1470 may be provided over part of the peripheral circuit 1411 to overlap with the peripheral circuit 1411 .
  • a structure may be employed in which the sense amplifier is provided below the memory cell array 1470 to overlap with the memory cell array 1470 .
  • FIG. 16 illustrates examples of a memory cell applicable to the memory cell MC.
  • FIGS. 16A to 16C illustrate circuit structure examples of a memory cell of a DRAM.
  • a DRAM using a memory cell including one OS transistor and one capacitor is sometimes referred to as a DOSRAM (Dynamic Oxide Semiconductor Random Access Memory).
  • a memory cell 1471 illustrated in FIG. 16A includes a transistor MI and a capacitor CA.
  • the transistor M 1 includes a gate (also referred to as a front gate in some cases) and a back gate.
  • a first terminal of the transistor M 1 is connected to a first terminal of the capacitor CA.
  • a second terminal of the transistor M 1 is connected to a wiring BIL.
  • the gate of the transistor M 1 is connected to a wiring WOL.
  • the back gate of the transistor M 1 is connected to a wiring BGL.
  • a second terminal of the capacitor CA is connected to a wiring CAL.
  • the wiring BIL functions as a bit line
  • the wiring WOL functions as a word line.
  • the wiring CAL functions as a wiring for applying a predetermined potential to the second terminal of the capacitor CA. In data writing and reading, a low-level potential is preferably applied to the wiring CAL.
  • the wiring BGL functions as a wiring for applying a potential to the back gate of the transistor M 1 . By applying a given potential to the wiring BGL, the threshold voltage of the transistor M 1 can be increased or decreased.
  • the memory cell MC is not limited to the memory cell 1471 , and its circuit structure can be changed.
  • a structure may be employed in which the back gate of the transistor M 1 is connected not to the wiring BGL but to the wiring WOL in the memory cell MC.
  • the memory cell MC may be a memory cell including a single-gate transistor, that is, the transistor M 1 that does not include a back gate.
  • the transistor 200 can be used as the transistor M 1
  • the capacitor 100 can be used as the capacitor CA.
  • the use of an OS transistor as the transistor M 1 enables the leakage current of the transistor M 1 to be extremely low. That is, written data can be retained for a long time with the use of the transistor M 1 ; thus, the frequency of refresh of the memory cell can be reduced. Alternatively, the refresh operation of the memory cell can be omitted.
  • the transistor M 1 since the transistor M 1 has an extremely low leakage current, multi-level data or analog data can be retained in the memory cell 1471 , the memory cell 1472 , and the memory cell 1473 .
  • FIGS. 16D to 16H each illustrate a circuit structure example of a gain-cell memory cell including two transistors and one capacitor.
  • a memory cell 1474 illustrated in FIG. 16D includes a transistor M 2 , a transistor M 3 , and a capacitor CB.
  • the transistor M 2 includes a front gate (simply referred to as a gate in some cases) and a back gate.
  • NOSRAM Nonvolatile Oxide Semiconductor RAM
  • a first terminal of the transistor M 2 is connected to a first terminal of the capacitor Ca
  • a second terminal of the transistor M 2 is connected to a wiring WBL.
  • the gate of the transistor M 2 is connected to the wiring WOL.
  • the back gate of the transistor M 2 is connected to the wiring BGL.
  • a second terminal of the capacitor CB is connected to the wiring CAL.
  • a second terminal of the capacitor CB is connected to the wiring CAL.
  • a first terminal of the transistor M 3 is connected to the wiring RBL, a second terminal of the transistor M 3 is connected to the wiring SL, and a gate of the transistor M 3 is connected to the first terminal of the capacitor CB.
  • the wiring WBL functions as a write bit line
  • the wiring RBL functions as a read bit line
  • the wiring WOL functions as a word line.
  • the wiring CAL functions as a wiring for applying a predetermined potential to the second terminal of the capacitor CB. In data writing, data retention, and data reading, a low-level potential is preferably applied to the wiring CAL.
  • the wiring BGL functions as a wiring for applying a potential to the back gate of the transistor M 2 . By applying a given potential to the wiring BGL, the threshold voltage of the transistor M 2 can be increased or decreased.
  • the memory cell MC is not limited to the memory cell 1474 , and its circuit structure can be changed as appropriate.
  • a structure may be employed in which the back gate of the transistor M 2 is connected not to the wiring BGL but to the wiring WOL in the memory cell MC.
  • the memory cell MC may be a memory cell including a single-gate transistor, that is, the transistor M 2 that does not include a back gate.
  • the wiring WBL and the wiring RBL may be combined into one wiring BIL, as in a memory cell 1477 illustrated in FIG. 16G .
  • the transistor 200 can be used as the transistor M 2
  • the transistor 300 can be used as the transistor M 3
  • the capacitor 100 can be used as the capacitor CR.
  • the leakage current of the transistor M 2 can be extremely low. Consequently, written data can be retained for a long time with the use of the transistor M 2 ; thus, the frequency of refresh of the memory cell can be reduced. Alternatively, the refresh operation of the memory cell can be omitted.
  • the extremely low leakage current allows multi-level data or analog data to be retained in the memory cell 1474 . The same applies to the memory cells 1475 to 1477 .
  • the transistor M 3 may be a transistor containing silicon in a channel formation region (hereinafter such a transistor is referred to as a Si transistor in some cases).
  • the conductivity type of the Si transistor may be an n-channel type or a p-channel type.
  • a Si transistor has higher field-effect mobility than an OS transistor in some cases. Therefore, a Si transistor may be used as the transistor M 3 functioning as a read transistor.
  • the use of a Si transistor as the transistor M 3 enables the transistor M 2 to be stacked over the transistor M 3 , in which case the area occupied by the memory cell can be reduced and high integration of the memory device can be achieved.
  • the transistor M 3 may be an OS transistor.
  • OS transistors are used as the transistors M 2 and M 3
  • the circuit of the memory cell array 1470 can be formed using only n-channel transistors.
  • FIG. 16H illustrates an example of a gain-cell memory cell including three transistors and one capacitor.
  • a memory cell 1478 illustrated in FIG. 16H includes transistors M 4 to M 6 and a capacitor CC.
  • the capacitor CC is provided as necessary.
  • the memory cell 1478 is electrically connected to wirings BIL, RWL, WWL, BGL, and GNDL.
  • the wiring GNDL is a wiring for supplying a low-level potential. Note that the memory cell 1478 may be electrically connected to the wirings RBL and WBL instead of the wiring BIL.
  • the transistor M 4 is an OS transistor including a back gate, and the back gate is electrically connected to the wiring BGL. Note that the back gate and a gate of the transistor M 4 may be electrically connected to each other. Alternatively; the transistor M 4 does not necessarily include the back gate.
  • each of the transistors M 5 and M 6 may be an n-channel Si transistor or a p-channel Si transistor.
  • the transistors M 4 to M 6 may be an OS transistor. In that case, a circuit including the memory cell array 1470 using only n-channel transistors can be configured.
  • the transistor 200 can be used as the transistor M 4
  • the transistor 300 can be used as the transistors M 5 and M 6
  • the capacitor 100 can be used as the capacitor CC.
  • the use of an OS transistor as the transistor M 4 enables the leakage current of the transistor M 4 to be extremely low.
  • peripheral circuit 1411 the memory cell array 1470 , and the like shown in this embodiment are not limited to those described above.
  • the arrangement and functions of these circuits and the wirings, circuit components, and the like connected to the circuits can be changed, removed, or added as needed.
  • SoC system on chip
  • the chip 1200 includes a CPU (Central Processing Unit) 1211 , a GPU (Graphics Processing Unit) 1212 , one or more of analog arithmetic units 1213 , one or more of memory controllers 1214 , one or more of interfaces 1215 , one or more of network circuits 1216 , and the like.
  • a CPU Central Processing Unit
  • GPU Graphics Processing Unit
  • a bump (not illustrated) is provided on the chip 1200 and is connected to a first surface of a printed circuit board (PCB) 1201 as illustrated in FIG. 17B .
  • a plurality of bumps 1202 are provided on the rear surface of the first surface of the PCB 1201 and are connected to a motherboard 1203 .
  • Memory devices such as a DRAM 1221 and a flash memory 1222 may be provided over the motherboard 1203 .
  • the DOSRAM described in the above embodiment can be used as the DRAM 1221 .
  • the NOSRAM described in the above embodiment can be used as the flash memory 1222 .
  • the CPU 1211 preferably includes a plurality of CPU cores.
  • the GPU 1212 preferably includes a plurality of GPU cores.
  • the CPU 1211 and the GPU 1212 may each include a memory for storing data temporarily. Alternatively, a common memory for the CPU 1211 and the CPU 1212 may be provided in the chip 1200 .
  • the NOSRAM or the DOSRAM described above can be used.
  • the GPU 1212 is suitable for parallel computation of a large number of data and thus can be used for image processing and product-sum operation. When an image processing circuit or a product-sum operation circuit using an oxide semiconductor of the present invention is provided in the GPU 1212 , image processing and product-sum operation can be performed with low power consumption.
  • the analog arithmetic unit 1213 includes one or both of an A/D (analog/digital) converter circuit and a D/A (digital/analog) converter circuit. Furthermore, the analog arithmetic unit 1213 may include the above-described product-sum operation circuit.
  • the memory controller 1214 includes a circuit functioning as a controller of the DRAM 1221 and a circuit functioning as the interface of the flash memory 1222 .
  • the interface 1215 includes an interface circuit to be connected to an external device such as a display device, a speaker, a microphone, a camera, or a controller.
  • an external device such as a display device, a speaker, a microphone, a camera, or a controller.
  • the controller include a mouse, a keyboard, and a game controller.
  • USB Universal Serial Bus
  • HDMI registered trademark
  • High-Definition Multimedia Interface or the like can be used.
  • the network circuit 1216 includes a network circuit such as a LAN (Local Area Network).
  • the network circuit 1216 may further include a circuit for network security.
  • the circuits can be formed in the chip 1200 in the same manufacturing process. Therefore, even when the number of circuits needed for the chip 1200 increases, there is no need to increase the number of steps in the manufacturing process; thus, the chip 1200 can be manufactured at low cost.
  • the motherboard 1203 provided with the PCB 1201 on which the chip 1200 including the GPU 1212 is mounted, the DRAM 1221 , and the flash memory 1222 can be referred to as a GPU module 1204 .
  • the GPU module 1204 includes the chip 1200 using the SoC technology, and thus can have a small size.
  • the GPU module 1204 is excellent in image processing, and thus is suitably used in portable electronic devices such as a smartphone, a tablet terminal, a laptop PC, and a portable (mobile) game console.
  • the product-sum operation circuit using the GPU 1212 can implement the arithmetic operation in a deep neural network (DNN), a convolutional neural network (CNN), a recurrent neural network (RNN), an autoencoder, a deep Boltzmann machine (DBM), a deep belief network (DEIN), or the like; hence, the chip 1200 can be used as an Al chip or the CPU module 1204 can be used as an Al system module.
  • DNN deep neural network
  • CNN convolutional neural network
  • RNN recurrent neural network
  • DEIN deep belief network
  • the semiconductor device described in the above embodiment can be applied to, for example, memory devices of a variety of electronic devices (e.g., information terminals, computers, smartphones, e-book readers, digital cameras (including video cameras), video recording/reproducing devices, and navigation systems).
  • the computers refer not only to tablet computers, notebook computers, and desktop computers, but also to large computers such as server systems.
  • the semiconductor device described in the above embodiment is applied to removable memory devices such as memory cards (e.g., SD cards), USB memories, and SSDs (solid state drives).
  • FIG. 18 schematically illustrates some structure examples of removable memory devices.
  • the semiconductor device described in the above embodiment is processed into a packaged memory chip and used in a variety of storage devices and removable memories, for example.
  • FIG. 18A is a schematic view of a USB memory.
  • a USB memory 1100 includes a housing 1101 , a cap 1102 , a USB connector 1103 , and a substrate 1104 .
  • the substrate 1104 is held in the housing 1101 .
  • a memory chip 1105 and a controller chip 1106 are attached to the substrate 1104 .
  • the semiconductor device described in the above embodiment can be incorporated in the memory chip 1105 or the like on the substrate 1104 .
  • FIG. 18B is a schematic external view of an SD card
  • FIG. 18C is a schematic view of the internal structure of the SD card.
  • An SD card 1110 includes a housing 1111 , a connector 1112 , and a substrate 1113 .
  • the substrate 1113 is held in the housing 1111 .
  • a memory chip 1114 and a controller chip 1115 are attached to the substrate 1113 .
  • the memory chip 1114 is also provided on the rear surface side of the substrate 1113 , the capacity of the SD card 1110 can be increased.
  • a wireless chip with a radio communication function may be provided on the substrate 1113 . With this, data can be read from and written in the memory chip 1114 by radio communication between a host device and the SD card 1110 .
  • the semiconductor device described in the above embodiment can be incorporated in the memory chip 1114 or the like on the substrate 1113 .
  • FIG. 18D is a schematic external view of an SSD
  • FIG. 18E is a schematic view of the internal structure of the SSD.
  • An SSD 1150 includes a housing 1151 , a connector 1152 , and a substrate 1153 .
  • the substrate 1153 is held in the housing 1151 .
  • a memory chip 1154 a memory chip 1155 , and a controller chip 1156 are attached to the substrate 1153 .
  • the memory chip 1155 is a work memory for the controller chip 1156 , and a DOSRAM chip may be used, for example.
  • the memory chip 1154 is also provided on the rear surface side of the substrate 1153 , the capacity of the SSD 1150 can be increased.
  • the semiconductor device described in the above embodiment can be incorporated in the memory chip 1154 or the like on the substrate 1153 .
  • the semiconductor device of one embodiment of the present invention can be used for a processor such as a CPU and a GPU or a chip.
  • FIG. 19 illustrates specific examples of electronic devices including a processor such as a CPU and a CPU or a chip of one embodiment of the present invention.
  • the GPU or the computer of one embodiment of the present invention can be mounted on a variety of electronic devices.
  • electronic devices include a digital camera, a digital video camera, a digital photo frame, a mobile phone, a portable game console, a portable information terminal, and an audio reproducing device in addition to electronic devices provided with a relatively large screen, such as a television device, a desktop or laptop personal computer, a monitor for a computer and the like, digital signage, and a large game machine like a pachinko machine.
  • the electronic device can include artificial intelligence.
  • the electronic device of one embodiment of the present invention may include an antenna.
  • a signal is received by the antenna, a video, data, or the like can be displayed on a display portion,
  • the antenna may be used for contactless power transmission.
  • the electronic device of one embodiment of the present invention may include a sensor (a sensor having a function of measuring force, displacement, a position, speed, acceleration, angular velocity, rotational frequency, distance, light, liquid, magnetism, temperature, a chemical substance, sound, time, hardness, an electric field, current, voltage, electric power, radioactive rays, a flow rate, humidity, gradient, oscillation, a smell, or infrared rays).
  • a sensor a sensor having a function of measuring force, displacement, a position, speed, acceleration, angular velocity, rotational frequency, distance, light, liquid, magnetism, temperature, a chemical substance, sound, time, hardness, an electric field, current, voltage, electric power, radioactive rays, a flow rate, humidity, gradient, oscillation, a smell, or infrared rays).
  • the electronic device of one embodiment of the present invention can have a variety of functions.
  • the electronic device can have a function of displaying a variety of data (a still image, a moving image, a text image, and the like) on the display portion, a touch panel function, a function of displaying a calendar, date, time, and the like, a function of executing a variety of software (programs), a wireless communication function, and a function of reading out a program or data stored in a recording medium.
  • FIG. 19 illustrates examples of the electronic device.
  • FIG. 19A illustrates a mobile phone (smartphone), which is a type of information terminal.
  • An information terminal 5500 includes a housing 5510 and a display portion 5511 .
  • a touch panel is provided in the display portion 5511 and a button is provided in the housing 5510 .
  • the information terminal 5500 can execute an application utilizing artificial intelligence.
  • the application utilizing artificial intelligence include an application for recognizing a conversation and displaying the content of the conversation on the display portion 5511 ; an application for recognizing letters, figures, and the like input to the touch panel of the display portion 5511 by a user and displaying them on the display portion 5511 ; and an application for performing biometric authentication using fingerprints, voice prints, or the like.
  • FIG. 19B illustrates a desktop information terminal 5300 .
  • the desktop information terminal 5300 includes a main body 5301 of the information terminal, a display 5302 , and a keyboard 5303 .
  • the desktop information terminal 5300 can execute an application utilizing artificial intelligence.
  • the application utilizing artificial intelligence include design-support software, text correction software, and software for automatic menu generation.
  • novel artificial intelligence can be developed.
  • an information terminal other than the smartphone and the desktop information terminal are respectively illustrated in FIG. 19A and FIG. 19B as examples of the electronic device, one embodiment of the present invention can be applied to an information terminal other than the smartphone and the desktop information terminal.
  • Examples of an information terminal other than the smartphone and the desktop information terminal include a PDA (Personal Digital Assistant), a notebook information terminal, and a workstation.
  • FIG. 19C illustrates an electric refrigerator-freezer 5800 which is an example of an electrical appliance.
  • the electric refrigerator-freezer 5800 includes a housing 5801 , a refrigerator door 5802 , a freezer door 5803 , and the like.
  • the electric refrigerator-freezer 5800 including artificial intelligence can be achieved.
  • Utilizing the artificial intelligence enables the electric refrigerator-freezer 5800 to have a function of automatically making a menu based on foods stored in the electric refrigerator-freezer 5800 , expiration dates of the foods, or the like, a function of automatically adjusting temperature to be appropriate for the foods stored in the electric refrigerator-freezer 5800 , and the like.
  • the electric refrigerator-freezer is described in this example as a household appliance, examples of other household appliances include a vacuum cleaner, a microwave oven, an electric oven, a rice cooker, a water heater, an cooker, a water server, a heating-cooling combination appliance such as an air conditioner, a washing machine, a drying machine, and an audio visual appliance.
  • FIG. 19D illustrates a portable game machine 5200 which is an example of a game machine.
  • the portable game machine includes a housing 5201 , a display portion 5202 , a button 5203 , and the like.
  • the portable game machine 5200 When the GPU or the chip of one embodiment of the present invention is applied to the portable game machine 5200 , the portable game machine 5200 with low power consumption can be achieved. Moreover, heat generation from a circuit can be reduced owing to low power consumption; thus, the influence of heat generation on the circuit, a peripheral circuit, and a module can be reduced.
  • the portable game machine 5200 including artificial intelligence can be achieved.
  • the progress of a game, the actions and words of game characters, and expressions of a phenomenon and the like occurring in the game are determined by the program in the game; however, the use of artificial intelligence in the portable game machine 5200 enables expressions not limited by the game program. For example, it becomes possible to change expressions such as questions posed by the player, the progress of the game, time, and actions and words of game characters.
  • the artificial intelligence can create a virtual game player; thus, the game can be played alone with the game player created by the artificial intelligence as an opponent.
  • the portable game machine is illustrated in FIG. 19D as an example of a game machine, the game machine using the GPU or the chip of one embodiment of the present invention is not limited thereto.
  • Examples of the game machine to which the GPU or the chip of one embodiment of the present invention is applied include a home stationary game machine, an arcade game machine installed in entertainment facilities (a game center, an amusement park, and the like), and a throwing machine for batting practice installed in sports facilities.
  • the GPU or the chip of one embodiment of the present invention can be applied to an automobile, which is a moving vehicle, and the periphery of a driver's seat in the automobile.
  • FIG. 19 E 1 illustrates an automobile 5700 which is an example of a moving vehicle
  • FIG. 19 E 2 illustrates the periphery of a windshield inside the automobile.
  • a display panel 5701 in addition to a display panel 5701 , a display panel 5702 , and a display panel 5703 that are attached to a dashboard, a display panel 5704 that is attached to a pillar is illustrated.
  • the display panel 5701 to the display panel 5703 can provide a variety of kinds of information by displaying a speedometer, a tachometer, mileage, a fuel gauge, a gear state, air-condition setting, and the like.
  • the content, layout, or the like of the display on the display panels can be changed as appropriate to suit the user's preference, so that the design quality can be increased.
  • the display panel 5701 to the display panel 5703 can also be used as lighting devices.
  • the display panel 5704 can compensate for view obstructed by the pillar (a blind spot) by showing an image taken by an imaging device (not illustrated) provided for the automobile 5700 . That is, displaying an image taken by the imaging device provided outside the automobile 5700 leads to compensation for the blind spot and an increase in safety. In addition, displaying an image to compensate for a portion that cannot be seen makes it possible for the driver to confirm the safety more naturally and comfortably.
  • the display panel 5704 can also be used as a lighting device.
  • the chip can be used for an automatic driving system of the automobile 5700 , for example.
  • the chip can also be used for a navigation system, risk prediction, or the like.
  • a structure may be employed in which the display panel 5701 to the display panel 5704 display navigation information, risk prediction information, or the like.
  • the moving vehicle is not limited to an automobile.
  • the moving vehicle include a train, a monorail train, a ship, and a flying vehicle (a helicopter, an unmanned aircraft (a drone), an airplane, and a rocket), and these moving vehicles can each include a system utilizing artificial intelligence when the chip of one embodiment of the present invention is applied to each of these moving vehicles.
  • the GPU or the chip of one embodiment of the present invention can be applied to a broadcasting system.
  • FIG. 19F schematically illustrates data transmission in a broadcasting system. Specifically, FIG. 19F illustrates a path in which a radio wave (a broadcasting signal) transmitted from a broadcast station 5680 reaches a television receiver (TV) 5600 of each household.
  • the TV 5600 includes a receiving device (not illustrated), and the broadcast signal received by an antenna 5650 is transmitted to the TV 5600 through the receiving device.
  • an UHF (Ultra High Frequency) antenna is illustrated as the antenna 5650 in FIG. 19F
  • a BS ⁇ 110° CS antenna, a CS antenna, or the like can also be used as the antenna 5650 .
  • a radio wave 5675 A and a radio wave 5675 B are broadcast signals for terrestrial broadcasting; a radio wave tower 5670 amplifies the received radio wave 5675 A and transmits the radio wave 5675 B.
  • Each household can view terrestrial TV broadcasting on the TV 5600 by receiving the radio wave 5675 B with the antenna 5650 .
  • the broadcasting system is not limited to the terrestrial broadcasting illustrated in FIG. 19F and may be satellite broadcasting using an artificial satellite, data broadcasting using an optical line, or the like.
  • the broadcasting system may be a broadcasting system utilizing artificial intelligence by applying the chip of one embodiment of the present invention.
  • broadcast data is transmitted from the broadcast station 5680 to the TV 5600 of each household, the broadcast data. is compressed by an encoder.
  • the antenna 5650 receives the compressed broadcast data, the compressed broadcast data is decompressed by a decoder of the receiving device included in the TV 5600 .
  • artificial intelligence for example, a display pattern included in an image to be displayed can be recognized in motion compensation prediction, which is one of the compression methods for the encoder.
  • in-frame prediction or the like can also be performed utilizing artificial intelligence.
  • image interpolation processing such as upconversion can be performed in the broadcast data decompression by the decoder.
  • the broadcasting system utilizing artificial intelligence is suitable for ultra-high definition television (UHDTV: 4K, 8K) broadcasting, which needs a larger amount of broadcast data.
  • UHDTV ultra-high definition television
  • a recording device including artificial intelligence may be provided in the TV 5600 , for example.
  • the artificial intelligence included in the recording device can learn the user's preference, so that TV programs that suit the user's preference can be recorded automatically.
  • the electronic devices, the functions of the electronic devices, the application examples of artificial intelligence, their effects, and the like described in this embodiment can be combined as appropriate with the description of another electronic device.
  • Sample A to Sample C each including the conductor 242 were fabricated, and variations in sheet resistance of the conductor 242 due to heat treatment were evaluated.
  • a fabrication method of Samples is described below. First, a silicon wafer was used, and silicon oxide with a thickness of 100 nm was formed over the silicon wafer by thermal oxidation.
  • a 300-mm-thick silicon oxynitride was deposited over the silicon oxide by a CVD method.
  • oxygen was injected to the silicon oxynitride with an ion implantation apparatus.
  • the conditions of the oxygen ion implantation were as follows: the acceleration energy was 60 keV, and the amount of ion implantation was 2.0 ⁇ 10 16 /cm 2 .
  • indium tin oxide was deposited by a sputtering method.
  • the thickness of Sample A was 5 nm
  • the thickness of Sample B was 10 nm
  • the thickness of Sample C was 20 nm.
  • FIG. 20 is a graph showing heat treatment time dependence of the sheet resistance values of the indium tin oxides of Sample A, Sample B, and Sample C.
  • the sheet resistance values of Samples which have not been subjected to heat treatment varied depending on the thicknesses of the indium tin oxides (5 nm, 10 nm, and 20 nm). In the case where the heat treatment time was 1 hour, all the sheet resistance values of Samples with the thicknesses (5 nm, 10 nm, and 20 nm) were approximately 1.0 ⁇ 10 3 ( ⁇ /sq.) to 2.0 ⁇ 10 3 ( ⁇ /sq.). In the case where the heat treatment time was 4 hour, all the sheet resistance values of Samples with the thicknesses (5 nm, 10 nm, and 20 nm) were approximately 2.0 ⁇ 10 3 ( ⁇ /sq.) to 4.0'10 3 ( ⁇ /sq.).
  • the indium tin oxide used in this example was able to function as a source and a drain of the transistor of one embodiment of the present invention.
  • 100 capacitor, 110 : conductor, 112 : conductor, 120 : conductor, 130 : insulator, 150 : insulator, 200 : transistor, 201 : transistor, 205 : conductor, 205 a: conductor, 205 b: conductor, 210 : insulator, 212 : insulator, 214 : insulator, 216 : insulator, 218 : conductor, 222 : insulator, 224 : insulator, 230 : oxide, 230 a: oxide, 230 A 1 : oxide film, 230 A 2 : oxide, 230 b: oxide, 230 B 1 : oxide film, 230 B 2 : oxide, 230 c: oxide, 232 B 2 : oxide, 240 : conductor, 240 a: conductor, 240 b: conductor, 241 : insulator, 241 a: insulator, 241 b: insulator, 242 : conductor, 242 :

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