US20190353148A1 - Liquid supply system - Google Patents
Liquid supply system Download PDFInfo
- Publication number
- US20190353148A1 US20190353148A1 US16/482,760 US201816482760A US2019353148A1 US 20190353148 A1 US20190353148 A1 US 20190353148A1 US 201816482760 A US201816482760 A US 201816482760A US 2019353148 A1 US2019353148 A1 US 2019353148A1
- Authority
- US
- United States
- Prior art keywords
- casing
- space
- supply system
- pump chamber
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 105
- 239000012530 fluid Substances 0.000 claims abstract description 59
- 238000004891 communication Methods 0.000 claims description 7
- 238000009413 insulation Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
- F04B2015/082—Helium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
- F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
- F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
- F04B2015/081—Liquefied gases
- F04B2015/0824—Nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/08—Cylinder or housing parameters
- F04B2201/0801—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors
Definitions
- the present disclosure relates to a liquid supply system used to supply cryogenic liquid.
- cryogenic liquid In conventional systems, the cryogenic liquid is caused to flow directly in the fluid passage passing through the pump chamber. It takes a long time to cool the fluid passage to make the pump operable by this process.
- An object of the present disclosure is to provide a liquid supply system that enables a reduction in time required for precooling to reduce the time taken to make a pump operable.
- the fluid passage provided in the first casing can be precooled by causing cryogenic liquid for precooling to flow in the space between the first casing and the second casing. Thereafter, the fluid passage can be cooled in a short time by causing cryogenic liquid to flow in the fluid passage. This can reduce the time taken to make the pump operable.
- the space between the first casing and the second casing may be kept in a vacuum state with the cryogenic liquid having been removed from the space between the first casing and the second casing after precooling.
- the space between the first casing and the second casing can provide heat insulation.
- a hermetically sealed space other than the liquid supply passage passing through the pump chamber may be provided in the interior of the first casing, and the hermetically sealed space and the space between the first casing and the second casing may be in communication with each other.
- the system may further comprise a third casing that surrounds the second casing and that a hermetically sealed space kept in a vacuum state may be formed between the second casing and the third casing.
- the hermetically sealed space between the second casing and the third casing can provide heat insulation.
- precooling can be performed in a reduced time, and the time taken to make the pump operable can be shortened.
- FIG. 1 is a diagram illustrating the general configuration of a liquid supply system in a first embodiment.
- FIG. 2 is a diagram illustrating the general configuration of a liquid supply system in a second embodiment.
- a liquid supply system in a first embodiment will be described with reference to FIG. 1 .
- the liquid supply system is suitably used for the purpose of, for example, maintaining a superconducting device in an ultra-low temperature state.
- Superconducting devices require perpetual cooling of components such as superconducting coils.
- a cooled device including a superconducting coil and other components is perpetually cooled by continuous supply of a cryogenic liquid (such as liquid nitrogen or liquid helium) to the cooled device.
- a circulating fluid passage passing through the cooled device is provided, and the liquid supply system is connected to the circulating fluid passage to cause the cryogenic liquid to circulate, thereby enabling perpetual cooling of the cooled device.
- FIG. 1 is a schematic diagram illustrating the overall configuration of the liquid supply system, where the overall configuration of the liquid supply system is illustrated in a cross section.
- FIG. 1 illustrates the overall configuration in a cross section in a plane containing the center axis.
- the liquid supply system 10 includes a main unit of the liquid supply system 100 (which will be referred to as the “main system unit 100 ” hereinafter), a vacuum container 200 in which the main system unit 100 is housed, and pipes (including an inlet pipe 310 and an outlet pipe 320 ).
- the inlet pipe 310 and the outlet pipe 320 both extend into the interior of the vacuum container 200 from outside the vacuum container 200 and are connected to the main system unit 100 .
- the interior of the vacuum container 200 is a hermetically sealed space.
- the interior space of the vacuum container 200 outside the main system unit 100 , the inlet pipe 310 , and the outlet pipe 320 is kept in a vacuum state. Thus, this space provides heat insulation.
- the liquid supply system 10 is normally installed on a horizontal surface. In the installed state, the upward direction of the liquid supply system 10 in FIG. 1 is the vertically upward direction, and the downward direction in FIG. 1 is the vertically downward direction.
- the main system unit 100 includes a linear actuator 110 serving as a driving source, a shaft member 120 that is moved in vertically upward and downward directions by the linear actuator 110 , and a container 130 .
- the linear actuator 110 is fixed on something suitable, which may be the container 130 or something that is not shown in the drawings.
- the container 130 includes a first casing 131 and a second casing 132 that is provided in such a way as to surround the outer wall of the first casing 131 .
- the shaft member 120 extends from outside the container 130 into the inside through an opening 131 a provided in the ceiling portion of the first casing 131 .
- the first casing 131 has an inlet 131 b and an outlet 131 c for liquid (cryogenic liquid) on its bottom.
- the aforementioned inlet pipe 310 is connected to the inlet 131 b and the outlet pipe 320 is connected to the outlet 131 c.
- first casing 131 Inside the first casing 131 are provided a plurality of structural components that compart the interior space into plurality of spaces, which constitute a plurality of pump chambers, passages for liquid, and vacuum chambers providing heat insulation.
- first casing 131 Inside the first casing 131 are provided a plurality of structural components that compart the interior space into plurality of spaces, which constitute a plurality of pump chambers, passages for liquid, and vacuum chambers providing heat insulation.
- the shaft member 120 has a main shaft portion 121 having a cavity in it, a cylindrical portion 122 surrounding the outer circumference of the main shaft portion 121 , and a connecting portion 123 that connects the main shaft portion 121 and the cylindrical portion 122 .
- the cylindrical portion 122 is provided with an upper outward flange 122 a at its upper end and a lower outward flange 122 b at its lower end.
- the first casing 131 has a substantially cylindrical body portion 131 X and a bottom plate 131 Y.
- the body portion 131 X has a first inward flange 131 Xa provided near its vertical center and a second inward flange 131 Xb provided on its upper portion.
- first fluid passages 131 Xc that extend in the axial direction below the first inward flange 131 Xa and are spaced apart from one another along the circumferential direction.
- second fluid passage 131 Xd which is an axially extending cylindrical space provided radially outside the region in which the first fluid passages 131 Xc are provided.
- the bottom portion of the first casing 131 is provided with a fluid passage 131 d that extends circumferentially and radially outwardly to join to the first fluid passages 131 Xc.
- the bottom plate 131 Y of the first casing 131 is provided with a fluid passage 131 e that extends circumferentially and radially outwardly.
- These fluid passages 131 d and 131 e extend uniformly all along the circumferential direction to allow liquid to flow radially outwardly in all directions, namely 360 degrees about the center axis.
- first bellows 141 and a second bellows 142 which expand and contract with the up and down motion of the shaft member 120 .
- the first bellows 141 and the second bellows 142 are arranged one above the other along the vertical direction.
- the upper end of the first bellows 141 is fixedly attached to the upper outward flange 122 a of the cylindrical portion 122 of the shaft member 120
- the lower end of the first bellows 141 is fixedly attached to the first inward flange 131 Xa of the first casing 131 .
- the upper end of the second bellows 142 is fixedly attached to the first inward flange 131 Xa of the first casing 131
- the lower end of the second bellows 142 is fixedly attached to the lower outward flange 122 b of the cylindrical portion 122 of the shaft member 120 .
- the space surrounding the outer circumference of the first bellows 141 forms a first pump chamber P 1
- the space surrounding the outer circumference of the second bellows 142 forms a second pump chamber P 2 .
- a third bellows 151 and a fourth bellows 152 which expand and contract with the up and down motion of the shaft member 120 .
- the upper end of the third bellows 151 is fixedly attached to the ceiling portion of the first casing 131 , and the lower end of the third bellows 151 is fixedly attached to the shaft member 120 .
- the opening 131 a of the first casing 131 is closed.
- the upper end of the fourth bellows 152 is fixedly attached to the second inward flange 131 Xb provided on the first casing 131 , and the lower end of the fourth bellows 152 is fixedly attached to the connecting portion 123 of the shaft member 120 .
- a first space K 1 is formed by the cavity in the main shaft portion 121 of the shaft member 120 .
- a second space K 2 is formed outside the third bellows 151 and inside the fourth bellows 152 .
- a third space K 3 is formed inside the first bellows 141 and the second bellows 142 .
- the first space K 1 , the second space K 2 , and the third space K 3 are in communication with each other.
- the second casing 132 is configured to surround the outer wall of the first casing 131 .
- An annular fourth space K 4 is formed between the first casing 131 and the second casing 132 .
- the fourth space K 4 may also be in communication with the first space K 1 , the second space K 2 , and the third space K 3 .
- the space constituted by the first to fourth spaces K 1 , K 2 , K 3 , and K 4 is configured to be capable of being hermetically sealed.
- check valves 160 including a first check valve 160 A, a second check valve 160 B, a third check valve 160 C, and a fourth check valve 160 D, which are provided at different locations inside the container 130 .
- Each of these check valves 160 is an annular component provided coaxially with the shaft member 120 .
- Each of the check valves 160 is configured to allow flow of liquid in radial directions from inside to outside and to block flow of liquid in radial directions from outside to inside.
- the first check valve 160 A and the third check valve 160 C are provided in the fluid passage passing through the first pump chamber P 1 .
- the first check valve 160 A and the third check valve 160 C function to block backflow of liquid pumped by the pumping effect of the first pump chamber P 1 .
- the first check valve 160 A is provided on the upstream side of the first pump chamber P 1
- the third check valve 160 C is provided on the downstream side of the first pump chamber P 1 .
- the first check valve 160 A is provided in the fluid passage 131 d provided in the bottom portion of the first casing 131 .
- the third check valve 160 C is provided in the fluid passage formed in the vicinity of the second inward flange 131 Xb provided on the first casing 131 .
- the second check valve 160 B and the fourth check valve 160 D are provided in the fluid passage passing through the second pump chamber P 2 .
- the second check valve 160 B and the fourth check valve 160 D function to block backflow of liquid pumped by the pumping effect of the second pump chamber P 2 .
- the second check valve 160 B is provided on the upstream side of the second pump chamber P 2
- the fourth check valve 160 D is provided on the downstream side of the second pump chamber P 2 .
- the second check valve 160 B is provided in the fluid passage 131 e provided in the bottom plate 131 Y of the first casing 131 .
- the fourth check valve 160 D is provided in the fluid passage formed in the vicinity of the first inward flange 131 Xa of the first casing 131 .
- the liquid having passed through the first check valve 160 A is pumped into the first pump chamber P 1 through the first fluid passage 131 Xc in the body portion 131 X of the first casing 131 .
- the fluid pressure in the second pump chamber P 2 increases.
- the second check valve 160 B is closed, and the fourth check valve 160 D is opened.
- the liquid in the second pump chamber P 2 is pumped into the second fluid passage 131 Xd provided in the body portion 131 X through the fourth check valve 160 D (see arrow T 12 ).
- the liquid passes through the outlet 131 c and is brought to the outside of the liquid supply system 10 through the outlet pipe 320 .
- the first bellows 141 expands, and the second bellows 142 contracts. Consequently, the fluid pressure in the first pump chamber P 1 increases. Then, the first check valve 160 A is closed, and the third check valve 160 C is opened. In consequence, the liquid in the first pump chamber P 1 is pumped into the second fluid passage 131 Xd provided in the body portion 131 X through the third check valve 160 C (indicated by arrow T 11 ). Then, the liquid passes through the outlet 131 c and is brought to the outside of the liquid supply system 10 through the outlet pipe 320 . On the other hand, the fluid pressure in the second pump chamber P 2 decreases.
- the second check valve 160 B is opened, and the fourth check valve 160 D is closed.
- liquid supplied from outside the liquid supply system 10 through the inlet pipe 310 (indicated by arrow S 10 ) is taken into the interior of the container 130 through the inlet 131 b and passes through the second check valve 160 B (indicated by arrow S 12 ).
- the liquid having passed through the second check valve 160 B is pumped into the second pump chamber P 2 .
- the liquid supply system 10 can cause liquid to flow from the inlet pipe 310 to the outlet pipe 320 both when the shaft member 120 moves downward and when the shaft member 120 moves upward. Hence, the phenomenon called pulsation can be reduced.
- cryogenic liquid is caused to flow in the fourth space K 4 formed between the first casing 131 and the second casing 132 before cryogenic liquid is supplied to the fluid passages passing through the pump chambers (the first pump chamber P 1 and the second pump chamber P 2 ).
- the process of precooling will be specifically described.
- a first pipe 410 for delivering liquid for precooling and a second pipe 420 for discharging the liquid for precooling are indicated by broken lines in FIG. 1 , because they are provided at locations outside the cross section shown in FIG. 1 .
- the fourth space K 4 , the vacuum container 200 , and the fluid passage from the inlet pipe 310 to the outlet pipe 320 are evacuated firstly, and then a gas having a boiling point lower than the temperature of the cryogenic liquid for precooling is supplied into the fourth space K 4 and the fluid passage from the inlet pipe 310 to the outlet pipe 320 .
- the cryogenic liquid is supplied into the fourth space K 4 through the first pipe 410 .
- the second pipe 420 is opened to discharge the gas from the fourth space K 4 .
- the cryogenic liquid is discharged through the second pipe 420 by a discharging pump (e.g. dry-sealed vacuum pump), which is not illustrated in the drawings.
- the cryogenic liquid is discharged to the atmosphere after vaporized and passing through a heat exchanger, where it is heated to a temperature near room temperature.
- a chamber capable of storing the cryogenic liquid may be provided in the discharging fluid passage downstream of the heat exchanger to prevent the cryogenic liquid from being discharged to the atmosphere in the liquid state.
- a pressure relief valve may be provided to prevent the fluid pressure in the discharging fluid passage from becoming excessively high.
- the cryogenic liquid is discharged, and hence the fourth space K 4 is in a vacuum state.
- the first space K 1 , the second space K 2 , and the third space K 3 may be in communication with the fourth space K 4 , as described above. If this is the case, the first space K 1 , the second space K 2 , and the third space K 3 are also in a vacuum state after cooled by the above-described precooling process.
- the fourth space K 4 By cooling the fourth space K 4 (and the first space K 1 , the second space K 2 , and the third space K 3 also in this embodiment), the fluid passage passing through the first pump chamber P 1 and the fluid passage passing through the second pump chamber P 2 are cooled. In consequence, when cryogenic liquid is supplied to these fluid passages, vaporization of the cryogenic liquid is prevented from occurring. As the cryogenic liquid flows in these fluid passages, they are cooled in a short time. Thus, the time taken until the pump is started to operate can be shortened.
- the cryogenic liquid in the fourth space K 4 may be discharged from it to evacuate the fourth space K 4 after the operation of the pump is started (in other words, after the up and down motion of the shaft member caused by the linear actuator 110 is started).
- the liquid supply system 10 can cool the fluid passages in the first casing 131 beforehand by causing cryogenic liquid for precooling to flow in the space (the fourth space K 4 ) between the first casing 131 and the second casing 132 . Thereafter, the fluid passages can be cooled in a short time by supplying cryogenic liquid to them. Therefore, the time taken until the pump is started to operate can be shortened.
- the liquid supply system is configured to remove cryogenic liquid from the fourth space K 4 after precooling to keep the fourth space K 4 in a vacuum state. Therefore, the fourth space K 4 can provide heat insulation.
- the liquid supply system has hermetically sealed spaces (the first, second, and third spaces K 1 , K 2 , K 3 ) in the first casing 131 that are separated from the fluid passages passing through the first pump chamber P 1 and the second pump chamber P 2 . These hermetically sealed spaces are in communication with the fourth space K 4 .
- the first space K 1 , the second space K 2 , and the third space K 3 are also cooled by the precooling process. This improves the reliability of cooling of the fluid passages passing through the first pump chamber P 1 and the second pump chamber P 2 .
- the first space K 1 , the second space K 2 , and the third space K 3 can also provide heat insulation.
- FIG. 2 illustrates a liquid supply system in a second embodiment.
- the system in the first embodiment has a second casing that surrounds the outer wall of the first casing.
- the system has a third casing that surrounds the second casing.
- the structure and the operation of the system are the same as those of the system in the first embodiment except for the third casing, and the same components will be denoted by the same reference signs and will not be described further for the sake of convenience.
- FIG. 2 is a schematic diagram illustrating the overall configuration of the liquid supply system, where the overall configuration of the liquid supply system is illustrated in a cross section.
- FIG. 2 illustrates the overall configuration in a cross section in a plane containing the center axis.
- the liquid supply system 10 differs from the system in the first embodiment only in the features relating to the third casing 133 .
- the other features are the same as those in the liquid supply system 10 in the first embodiment, and the same features will not be described further for the sake of convenience.
- the container 130 includes the first casing 131 , the second casing 132 that surrounds the outer wall of the first casing 131 , and the third casing 133 that surrounds the second casing 132 .
- a fluid passage passing through the first pump chamber P 1 and a fluid passage passing through the second pump chamber P 2 are provided in the first casing 131 .
- the second casing 132 surrounds the outer wall of the first casing 131 .
- Between the first casing 131 and the second casing 132 is the annular fourth space K 4 .
- the fourth space K 4 may be in communication with the first space K 1 , the second space K 2 , and the third space K 3 .
- the space constituted by the first space K 1 , the second space K 2 , the third space K 3 , and the fourth space K 4 can be hermetically sealed.
- the third casing 133 surrounds the outer wall of the second casing 132 .
- the ceiling portion of the third casing 133 covers the ceiling portion of the first casing 131 and the ceiling portion of the second casing 132 with a gap between.
- the ceiling portion of the third casing 133 has an opening 133 a .
- the shaft member 120 extends into the interior of the container 130 from outside through the opening 133 a .
- a fifth bellows 153 is provided on the upper portion of the third casing 133 .
- the fifth bellows 153 extends and contracts with the up and down motion of the shaft member 120 .
- the upper end of the fifth bellows 153 is fixedly attached to the shaft member 120
- the lower end of the fifth bellows 153 is fixedly attached to the third casing 133 .
- the opening 133 a is closed.
- the third casing 133 configured as above forms a hermetically sealed space (i.e. the fifth space K 5 ) between the second casing 132 and the third casing 133 .
- the fifth space K 5 is configured to be kept in a vacuum state. Hence, the fifth space K 5 provides heat insulation.
- the liquid supply system 10 can also provide advantageous effects the same as the system in the first embodiment.
- the fifth space K 5 provides heat insulation. This improves the efficiency of cooling of the fourth space K 4 etc. in the precooling process. Moreover, this can prevent freezing from occurring due to thermal contact of the space used for precooling with something of high temperature (e.g. atmosphere). Specifically, since the top of the ceiling portion of the first casing 131 and the ceiling portion of the second casing 132 is covered with the fifth space K 5 , which provide heat insulation, freezing can be prevented from occurring near the ceiling portion of the first casing 131 and the ceiling portion of the second casing 132 during precooling.
- the second pipe 420 used for precooling may extend into the interior of the fourth space K 4 and the orifice of the second pipe 420 may be located in the upper portion of the fourth space K 4 . This can eliminate difficulties in filling the fourth space K 4 with cryogenic liquid that may be involved in the precooling process due to residence of gas in the upper portion of the fourth space K 4 .
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017-019042 | 2017-02-03 | ||
JP2017019042 | 2017-02-03 | ||
PCT/JP2018/003630 WO2018143419A1 (ja) | 2017-02-03 | 2018-02-02 | 液体供給システム |
Publications (1)
Publication Number | Publication Date |
---|---|
US20190353148A1 true US20190353148A1 (en) | 2019-11-21 |
Family
ID=63039853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/482,760 Abandoned US20190353148A1 (en) | 2017-02-03 | 2018-02-02 | Liquid supply system |
Country Status (6)
Country | Link |
---|---|
US (1) | US20190353148A1 (ko) |
EP (1) | EP3578812A1 (ko) |
JP (1) | JPWO2018143419A1 (ko) |
KR (1) | KR20190098219A (ko) |
CN (1) | CN110192032A (ko) |
WO (1) | WO2018143419A1 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7151458B2 (ja) * | 2018-12-20 | 2022-10-12 | 株式会社Ihi | ピストンポンプ、昇圧液体供給システム及び液体噴射装置 |
JP2022065222A (ja) * | 2019-03-07 | 2022-04-27 | イーグル工業株式会社 | 液体供給システム |
KR102609191B1 (ko) * | 2021-11-25 | 2023-12-06 | 한국기계연구원 | 단열구조를 갖는 극저온 액체 왕복동 펌프 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000230478A (ja) * | 1999-02-09 | 2000-08-22 | Asahi Eng Co Ltd | 液化ガスの加圧装置 |
US20090165640A1 (en) * | 2004-06-30 | 2009-07-02 | Shuichi Kawasaki | Booster pump and low-temperature-fluid storage tank having the same |
JP4982515B2 (ja) * | 2009-02-24 | 2012-07-25 | 日本ピラー工業株式会社 | ベローズポンプ |
EP2600001B1 (en) * | 2011-11-29 | 2014-11-19 | Cryostar SAS | Cryogenic pumps |
CN103388577A (zh) * | 2012-05-09 | 2013-11-13 | 日本皮拉工业株式会社 | 液体用容积型泵 |
EP3168550B1 (en) | 2014-07-10 | 2020-02-26 | Eagle Industry Co., Ltd. | Liquid supply system |
EP3179105B1 (en) * | 2014-08-08 | 2019-05-29 | Nippon Pillar Packing Co., Ltd. | Bellows pump device |
-
2018
- 2018-02-02 US US16/482,760 patent/US20190353148A1/en not_active Abandoned
- 2018-02-02 KR KR1020197021421A patent/KR20190098219A/ko not_active Application Discontinuation
- 2018-02-02 WO PCT/JP2018/003630 patent/WO2018143419A1/ja unknown
- 2018-02-02 CN CN201880007290.9A patent/CN110192032A/zh active Pending
- 2018-02-02 JP JP2018566132A patent/JPWO2018143419A1/ja active Pending
- 2018-02-02 EP EP18747527.2A patent/EP3578812A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JPWO2018143419A1 (ja) | 2019-11-21 |
EP3578812A1 (en) | 2019-12-11 |
CN110192032A (zh) | 2019-08-30 |
WO2018143419A1 (ja) | 2018-08-09 |
KR20190098219A (ko) | 2019-08-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20190353148A1 (en) | Liquid supply system | |
US11840761B2 (en) | Substrate processing apparatus | |
US9638373B2 (en) | Energy efficient vertical cryogenic tank | |
KR101885017B1 (ko) | 액체 공급 시스템 | |
JP2016527444A (ja) | ロケットエンジンに推進剤を供給する装置 | |
US9359654B2 (en) | Mist cooling apparatus and heat treatment apparatus | |
EP3578820A1 (en) | Liquid supply system | |
KR100843389B1 (ko) | 과냉각된 수평 저온유지장치 | |
US20110120147A1 (en) | Pressurized Superfluid Helium Cryostat | |
US20200011323A1 (en) | Liquid supply system | |
EP2933585B1 (en) | Liquid supply system | |
US20200003195A1 (en) | Liquid supply system | |
US20200011322A1 (en) | Liquid supply system | |
US20200232448A1 (en) | Liquid supply system | |
JPH1096797A (ja) | 内部凝縮器蒸気排出システム | |
CN105443586A (zh) | 电动辅助给水泵推力轴承润滑油的冷却结构 | |
JP2009191730A (ja) | 多段ポンプ、低温液体貯蔵設備、低温液体移送設備 | |
US20200003196A1 (en) | Heat insulation structure and liquid supply system | |
JP2024055004A (ja) | 極低温冷却装置及び超電導装置 | |
JPS63224269A (ja) | 超流動ヘリウム冷却装置 | |
CN105270772A (zh) | 一种乙烯球罐冷却降压的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: EAGLE INDUSTRY CO., LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FURUTA, KIYOTAKA;OSAWA, YOSHIO;MORI, KOICHI;REEL/FRAME:049929/0200 Effective date: 20190423 |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |