US20190079400A1 - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor device Download PDFInfo
- Publication number
- US20190079400A1 US20190079400A1 US15/898,677 US201815898677A US2019079400A1 US 20190079400 A1 US20190079400 A1 US 20190079400A1 US 201815898677 A US201815898677 A US 201815898677A US 2019079400 A1 US2019079400 A1 US 2019079400A1
- Authority
- US
- United States
- Prior art keywords
- resist
- opening portion
- semiconductor device
- manufacturing
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 41
- 239000002253 acid Substances 0.000 claims abstract description 35
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000004132 cross linking Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 239000011248 coating agent Substances 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/168—Finishing the coated layer, e.g. drying, baking, soaking
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
- H01L21/28587—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
Definitions
- thermoset layer 6 is formed on the surface of the first resist 2 by the acid occurring from the first resist 2 under the exposure and under the heat treatment even when the shrink agent 5 does not contain any acid 4 .
- the amount of acid is insufficient, only a thin thermoset layer 6 is formed, and mixing occurs between the first resist 2 and the second resist 7 , so that the first and second opening portions 3 and 8 cannot be stably formed.
- the shrink agent 5 containing the acid 4 is used in this embodiment, a sufficiently thick thermoset layer 6 can be formed on the overall surface of the first resist 2 .
- the thick thermoset layer 6 serves as a barrier to suppress the mixing between the first resist 2 and the second resist 7 . As a result, the first and second opening portions 3 and 8 can be stably formed in the first and second resists 2 and 7 .
- the optical exposure is performed under such a condition that the third opening portion 12 is located above the first and second opening portions 3 and 8 , and is larger than the first opening portion 3 and smaller than the second opening portion 8 .
- the cross-sectional shapes of the second and third resists 7 and 11 become an overhang-shape.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
Description
- The present invention relates to a method of manufacturing a semiconductor device forming a fine opening portion in a resist.
- There has been disclosed a method of forming a fine opening portion in a resist by using a shrink agent which causes a crosslinking reaction with an acid occurring in the resist (for example, see JP2003-7729A).
- The shrink agent contains a material which causes the crosslinking reaction under the presence of an acid. A layer which has been subjected to the crosslinking reaction is called as a thermoset layer. A thermoset layer is formed around an opening portion at which the acid occurring from the resist under exposure remains. Furthermore, an acid also occurs when the resist is subjected to heat treatment. Therefore, a thermoset layer is also formed at other portions than the resist opening portion by a conventional method, but the thus-formed thermoset layer is thin and insufficient as compared with that at the opening portion. Therefore, when a second resist is formed on a shrunk first resist, mixing occurs between both the resists, which causes a problem that it is impossible to stably form fine opening portions in the first and second resists.
- The present invention has been implemented to solve the foregoing problem, and has an object to provide a method of manufacturing a semiconductor device that is capable of stably forming an opening portion in a resist.
- According to the present invention, a method of manufacturing a semiconductor device includes: coating a first resist containing a photoacid generator or a thermal acid generator on a semiconductor substrate; forming a first opening portion in the first resist by optical exposure; subjecting a shrink agent containing an acid to a crosslinking reaction by the heat treatment to form a thermoset layer on an overall surface of the first resist; coating a second resist on the semiconductor substrate and the thermoset layer; and forming a second opening portion located above the first opening portion and larger than the first opening portion in the second resist by optical exposure.
- Since the shrink agent containing the acid is used in the present invention, a sufficiently thick thermoset layer can be formed on the overall surface of the first resist. Furthermore, the thick thermoset layer serves as a barrier to suppress the mixing between the first resist and the second resist. As a result, the first and second opening portions can be stably formed in the first and second resists.
- Other and further objects, features and advantages of the invention will appear more fully from the following description.
-
FIGS. 1 to 5 are cross-sectional views showing a method of manufacturing a semiconductor device according to a first embodiment. -
FIGS. 6 and 7 are cross-sectional views showing a method of manufacturing a semiconductor device according to a second embodiment -
FIGS. 8 and 9 are cross-sectional views showing a method of manufacturing a semiconductor device according to a third embodiment. -
FIGS. 10 to 13 are cross-sectional views showing a method of manufacturing a semiconductor device according to a fourth embodiment. -
FIG. 14 is a cross-sectional view showing a method of manufacturing a semiconductor device according to a fifth embodiment. -
FIGS. 15 to 18 are cross-sectional views showing a method of manufacturing a semiconductor device according to a sixth embodiment. - A method of manufacturing a semiconductor device according to the embodiments of the present invention will be described with reference to the drawings. The same components will be denoted by the same symbols, and the repeated description thereof may be omitted.
-
FIGS. 1 to 5 are cross-sectional views showing a method of manufacturing a semiconductor device according to a first embodiment. As shown inFIG. 1 , afirst resist 2 is first coated on asemiconductor substrate 1 of GaAs or the like. A first openingportion 3 is formed in thefirst resist 2 by optical exposure. Thefirst resist 2 is Sumiresist PFI-58A6 manufactured by Sumitomo Chemical Co. Ltd., for example. Here, the acid occurring from thefirst resist 2 under exposure remains around thefirst opening portion 3. - Next, a
shrink agent 5 containing anacid 4 is coated on the whole surface as shown inFIG. 2 . Theshrink agent 5 causes a crosslinking reaction when it is subjected to heat treatment under the presence of theacid 4. However, the amount of theacid 4 is controlled so that theshrink agent 5 does not cause a sufficient crosslinking reaction by only theacid 4 contained in theshrink agent 5. Here, the sufficient crosslink reaction means that the reaction progresses to the extent that a crosslinked product cannot be removed by a developing processing. Addition of the acid occurring from thefirst resist 2 through the heat treatment makes theshrink agent 5 cause the crosslinking reaction, thereby forming athermoset layer 6 on the overall surface of thefirst resist 2. - Next, as shown in
FIG. 3 , asecond resist 7 is coated on thesemiconductor substrate 1 and thethermoset layer 6. A second openingportion 8 is formed in thesecond resist 7 by optical exposure. The second openingportion 8 is located above the first openingportion 3, and formed to be larger than the first openingportion 3. - Next, a
metal film 9 is formed on thesemiconductor substrate 1, thethermoset layer 6 and thesecond resist 7 as shown inFIG. 4 . Next, as shown inFIG. 5 , the first and second resists 2 and 7, and thethermoset layer 6 are removed, and themetal film 9 on thesecond resist 7 is also removed by lift-off, thereby forming a T-shaped electrode 10. - Here, since the
first resist 2 contains a photoacid generator or a thermal acid generator, athermoset layer 6 is formed on the surface of thefirst resist 2 by the acid occurring from thefirst resist 2 under the exposure and under the heat treatment even when theshrink agent 5 does not contain anyacid 4. However, since the amount of acid is insufficient, only athin thermoset layer 6 is formed, and mixing occurs between thefirst resist 2 and thesecond resist 7, so that the first and secondopening portions shrink agent 5 containing theacid 4 is used in this embodiment, a sufficientlythick thermoset layer 6 can be formed on the overall surface of thefirst resist 2. Furthermore, thethick thermoset layer 6 serves as a barrier to suppress the mixing between thefirst resist 2 and thesecond resist 7. As a result, the first and second openingportions -
FIGS. 6 and 7 are cross-sectional views showing a method of manufacturing a semiconductor device according to a second embodiment. The steps up to the step of forming thethermoset layer 6 on thefirst resist 2 are the same as the steps of the first embodiment. Next, as shown inFIG. 6 , asecond resist 7 which is an image reversal resist is coated, and a second openingportion 8 is formed in thesecond resist 7 by optical exposure. - Next, a
metal film 9 is formed on thesemiconductor substrate 1, thethermoset layer 6 and thesecond resist 7 by vapor deposition as shown inFIG. 7 . Thereafter, the first and second resists 2 and 7 and thethermoset layer 6 are removed, and themetal film 9 on thesecond resist 7 is also removed by lift-off, thereby forming a T-shaped electrode 10. - As described above, in this embodiment, the second opening
portion 8 is formed in an overhang-shape by using the image reversal resist as thesecond resist 7. As a result, themetal film 9 on thesecond resist 7 and themetal film 9 in thesecond opening portion 8 are easily separated, so that the T-shaped electrode 10 can be easily formed by a vapor deposition lift-off method. -
FIGS. 8 and 9 are cross-sectional views showing a method of manufacturing a semiconductor device according to a third embodiment. The steps up to the step of forming thethermoset layer 6 on thefirst resist 2 are the same as the steps of the first embodiment. Next, as shown inFIG. 8 , thesecond resist 7 is coated, and athird resist 11 is coated on thesecond resist 7. All of these resists are positive type photoresists, and a combination of these resists is selected so that thesecond resist 7 has higher exposure sensitivity than thethird resist 11. A second openingportion 8 is formed in thesecond resist 7 by optical exposure, and a third openingportion 12 is formed in thethird resist 11. The optical exposure is performed under such a condition that the third openingportion 12 is located above the first and second openingportions portion 3 and smaller than the second openingportion 8. As a result, the cross-sectional shapes of the second and third resists 7 and 11 become an overhang-shape. - Next, the
metal film 9 is formed on the overall surface as shown inFIG. 9 . Thereafter, the first, second and third resists 2, 7 and 11 and thethermoset layer 6 are removed, and themetal film 9 on the third resist 11 is also removed by lift-off, thereby forming a T-shapedelectrode 10. - As described above, in this embodiment, the T-shaped
electrode 10 can be easily formed according to the vapor deposition lift-off method by using the resist having the overhang-shaped cross-section. -
FIGS. 10 to 13 are cross-sectional views showing a method of manufacturing a semiconductor device according to a fourth embodiment. As shown inFIG. 10 , a first resist 2 which is an image reversal resist is coated on thesemiconductor substrate 1. Afirst opening portion 3 having an overhang-shape is formed in the first resist 2 by optical exposure. Next, as shown inFIG. 11 , ashrink agent 5 containing anacid 4 is coated, and theshrink agent 5 is subjected to the crosslinking reaction by the heat treatment, thereby forming thethermoset layer 6 on the overall surface of the first resist 2. - Next, the second resist 7 is coated on the
semiconductor substrate 1 and thethermoset layer 6 as shown inFIG. 12 . Asecond opening portion 8 is formed in the second resist 7 by optical exposure. Thesecond opening portion 8 is arranged inside thefirst opening portion 3, and set to be smaller than thefirst opening portion 3. - Next, the
metal film 9 is formed on the overall surface as shown inFIG. 13 . Thereafter, the first and second resists 2 and 7 and thethermoset layer 6 are removed, and themetal film 9 on the second resist 7 is also removed by lift-off, thereby forming a T-shapedelectrode 10. - As described above, in this embodiment, the first resist 2 can be formed in an overhang-shape by using the image reversal resist. Therefore, the T-shaped
electrode 10 can be easily formed by the vapor deposition lift-off method. The same other effects as the first embodiment can be obtained. -
FIG. 14 is a cross-sectional view showing a method of manufacturing a semiconductor device according to a fifth embodiment. In this embodiment, the step of forming thethermoset layer 6 by making theshrink agent 5 cause the crosslinking reaction in the first to third embodiments is repeated multiple times, whereby thethermoset layer 6 on the surface of the first resist 2 can be formed so as to have a large thickness. Since thethermoset layer 6 is thick, thefirst opening portion 3 of the first resist 2 can be further reduced in size. Furthermore, since a large barrier effect for mixing can be obtained, the first andsecond opening portions shrink agent 5 cause the crosslinking reaction in the fourth embodiment to form thethermoset layer 6. -
FIGS. 15 to 18 are cross-sectional views showing a method of manufacturing a semiconductor device according to a sixth embodiment. The steps up to the step of forming thethermoset layer 6 on the first resist 2 are the same as the steps of the first embodiment. Next, as shown inFIG. 15 , the second resist 7 is coated on thesemiconductor substrate 1 and thethermoset layer 6. Asecond opening portion 8 which is located above thefirst opening portion 3 and larger than thefirst opening portion 3 is formed in the second resist 7 by optical exposure. Next, as shown inFIG. 16 , ametal film 9 is formed on thesemiconductor substrate 1, thethermoset layer 6 and the second resist 7 by a sputtering method. Next, as shown inFIG. 17 , a third resist 13 which is larger than thesecond opening portion 8 is formed on themetal film 9 above the first andsecond opening portions FIG. 18 , themetal film 9 is subjected to anisotropic etching by using the third resist 13 as a mask according to a milling method or the like. As a result, the T-shapedelectrode 10 can be formed without forming the second resist 7 in an overhang-shape. - In the first to sixth embodiments, a
shrink agent 5 containing a thermal acid generator or a photoacid generator in place of theacid 4 may be used. In this case, the same effect can be obtained by generating theacid 4 through heat treatment and light irradiation. - Obviously many modifications and variations of the present invention are possible in the light of the above teachings. It is therefore to be understood that within the scope of the appended claims the invention may be practiced otherwise than as specifically described.
- The entire disclosure of Japanese Patent Application No. 2017-176765, filed on Sep. 14, 2017 including specification, claims, drawings and summary, on which the Convention priority of the present application is based, is incorporated herein by reference in its entirety.
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2017-176765 | 2017-09-14 | ||
JP2017176765A JP6888493B2 (en) | 2017-09-14 | 2017-09-14 | Manufacturing method of semiconductor devices |
Publications (2)
Publication Number | Publication Date |
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US20190079400A1 true US20190079400A1 (en) | 2019-03-14 |
US10248023B1 US10248023B1 (en) | 2019-04-02 |
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US15/898,677 Expired - Fee Related US10248023B1 (en) | 2017-09-14 | 2018-02-19 | Method of manufacturing semiconductor device |
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US (1) | US10248023B1 (en) |
JP (1) | JP6888493B2 (en) |
TW (1) | TWI669574B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210398803A1 (en) * | 2019-04-26 | 2021-12-23 | Mitsubishi Electric Corporation | Method for manufacturing semiconductor device |
US20210398806A1 (en) * | 2020-06-19 | 2021-12-23 | Sumitomo Electric Industries, Ltd. | Method of manufacturing semiconductor device |
US11322398B2 (en) * | 2019-09-10 | 2022-05-03 | National Chiao Tung University | Process for making interconnect of group III-V semiconductor device, and group III-V semiconductor device including interconnect made thereby |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2723260B2 (en) | 1988-08-30 | 1998-03-09 | 株式会社東芝 | Fine pattern forming method |
JP2003007729A (en) * | 2001-06-26 | 2003-01-10 | Mitsubishi Electric Corp | Method for manufacturing compound semiconductor device |
JP4198418B2 (en) * | 2002-08-14 | 2008-12-17 | 富士通株式会社 | Manufacturing method of fine T-shaped electrode |
US7923198B2 (en) * | 2002-08-14 | 2011-04-12 | Fujitsu Limited | Method of manufacturing fine T-shaped electrode |
JP2007094058A (en) * | 2005-09-29 | 2007-04-12 | Elpida Memory Inc | Method for forming pattern |
JP4937842B2 (en) * | 2007-06-06 | 2012-05-23 | ルネサスエレクトロニクス株式会社 | Semiconductor device and manufacturing method thereof |
US7745077B2 (en) * | 2008-06-18 | 2010-06-29 | Az Electronic Materials Usa Corp. | Composition for coating over a photoresist pattern |
JP5531434B2 (en) * | 2009-03-31 | 2014-06-25 | 富士通株式会社 | Compound semiconductor device and manufacturing method thereof |
JP5672906B2 (en) * | 2010-09-28 | 2015-02-18 | ソニー株式会社 | Resist composition and method for manufacturing semiconductor device |
JP2014182187A (en) | 2013-03-18 | 2014-09-29 | Sony Corp | Resist composition and manufacturing method of semiconductor device |
-
2017
- 2017-09-14 JP JP2017176765A patent/JP6888493B2/en active Active
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2018
- 2018-02-19 US US15/898,677 patent/US10248023B1/en not_active Expired - Fee Related
- 2018-03-02 TW TW107107045A patent/TWI669574B/en not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210398803A1 (en) * | 2019-04-26 | 2021-12-23 | Mitsubishi Electric Corporation | Method for manufacturing semiconductor device |
US11948797B2 (en) * | 2019-04-26 | 2024-04-02 | Mitsubishi Electric Corporation | Method for manufacturing semiconductor device |
US11322398B2 (en) * | 2019-09-10 | 2022-05-03 | National Chiao Tung University | Process for making interconnect of group III-V semiconductor device, and group III-V semiconductor device including interconnect made thereby |
US20210398806A1 (en) * | 2020-06-19 | 2021-12-23 | Sumitomo Electric Industries, Ltd. | Method of manufacturing semiconductor device |
US11658027B2 (en) * | 2020-06-19 | 2023-05-23 | Sumitomo Electric Industries, Ltd. | Method of manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
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US10248023B1 (en) | 2019-04-02 |
JP2019054085A (en) | 2019-04-04 |
TW201915610A (en) | 2019-04-16 |
JP6888493B2 (en) | 2021-06-16 |
TWI669574B (en) | 2019-08-21 |
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