US20170059710A1 - Object recognition device - Google Patents

Object recognition device Download PDF

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Publication number
US20170059710A1
US20170059710A1 US15/306,205 US201515306205A US2017059710A1 US 20170059710 A1 US20170059710 A1 US 20170059710A1 US 201515306205 A US201515306205 A US 201515306205A US 2017059710 A1 US2017059710 A1 US 2017059710A1
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US
United States
Prior art keywords
vcsel
mems
recognition device
scanner
doppler sensor
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Abandoned
Application number
US15/306,205
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English (en)
Inventor
Christoph Delfs
Frank Fischer
Reiner Schnitzer
Heiko Ridderbusch
Gael Pilard
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Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Assigned to ROBERT BOSCH GMBH reassignment ROBERT BOSCH GMBH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: DELFS, CHRISTOPH, RIDDERBUSCH, HEIKO, SCHNITZER, REINER, FISCHER, FRANK, PILLARD, GAEL
Publication of US20170059710A1 publication Critical patent/US20170059710A1/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491—Details of non-pulse systems
    • G01S7/4912—Receivers
    • G01S7/4916—Receivers using self-mixing in the laser cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Definitions

  • VCSEL-based miniature laser-Doppler interferometer A. Pruijmboom et al., Proc. of SPIE, vol. 6908 describes an integrated Doppler sensor where a VCSEL and a photodiode are integrated on a common semiconductor substrate.
  • VCSEL Doppler sensors are already used in high-resolution computer mice.
  • VCSEL Doppler sensors measure the relative velocity of a reflecting object and the distance thereof (in modulated operation).
  • VeCSEL VCSEL having an external cavity
  • MEMS mirrors or micromirrors, as well as laser scanner projectors having such MEMS mirrors are also available in the related art.
  • the present invention relates to an object recognition device having a VCSEL Doppler sensor and an MEMS scanner; the MEMS scanner having at least one deflectable MEMS mirror for scanning an angular region using a laser beam from the VCSEL Doppler sensor; the VCSEL Doppler sensor being connected to a Doppler control and evaluation element that is adapted for determining the velocity and/or the distance of an object.
  • This device may be advantageously used to scan an angular region for objects.
  • the device is advantageously very energy efficient.
  • An advantageous embodiment of the present invention provides that the VCSEL Doppler sensor have a laser and a photodiode that are monolithically integrated. This embodiment is especially compact and inexpensive.
  • An advantageous embodiment of the present invention provides that the VCSEL Doppler sensor have a laser having an external cavity, namely a VeCSEL.
  • the device feature a scanner control and position recognition element that is linked to the MEMS scanner and is adapted for determining the angular position of the MEMS mirror.
  • the location of the object is thereby able to be determined in polar coordinates, for example.
  • the device have a synchronization unit that is linked to the Doppler control and evaluation element and to the scanner control and position recognition element, and that it be adapted for determining the velocity and/or distance of the object in a time- and angle-resolved manner.
  • the structure of the scanned surface of the object may also be advantageously determined when working with an appropriate object size and resolving power of the object recognition device.
  • An advantageous embodiment of the present invention provides that the MEMS scanner have an MEMS mirror that is deflectable in two different axes of rotation or two MEMS mirrors that are deflectable in different axes of rotation for scanning a solid angle region.
  • scanning is advantageously carried out using one or a plurality of laser beams generally parallel to an operating interface. For this, one or a plurality of micromirrors employing MEMS technology is/are used.
  • the present invention provides that the laser beam be produced by a VCSEL (vertical cavity surface emitting laser) or a VeCSEL (vertical external-cavity surface-emitting laser) that is part of a Doppler sensor.
  • a VCSEL Doppler sensor (infrared) laser radiation is emitted by a VCSEL. If an object backscatters a portion of the laser light (up to 10 ⁇ 6 of the power output), photons are coupled into the cavity of the VCSEL and, there, constructively or destructively superpose the stationary wave of the stimulated emission. This changes the output signal.
  • the power output of the VCSEL is directly measured by a monolithically integrated photodiode.
  • An especially compact and cost-saving configuration is provided here by monolithically integrating the photodiode with the VCSEL in a very small, inexpensive component. It is also advantageous that the mirror structure of the VCSEL (multiple semiconductor layers) be a very narrow-band structure for the transmission of light, that it thereby filter out ambient light, and, in principle, that it only carry the coherent photons of the emission thereof to produce a superimposition effect, thereby achieving a very high sensitivity.
  • the power output begins to oscillate when the scattering object moves toward the laser or away therefrom (Doppler effect).
  • Doppler effect In the case of a modulated operation of the VCSEL Doppler sensor, besides the velocity, the distance to the reflecting surface may also be determined.
  • the Gaussian beam geometry of the VCSEL advantageously makes it possible for a simple wafer level collimation optics to be used.
  • the VCSEL Doppler sensor advantageously has a high sensitivity. Moreover, it is very insensitive to background light and temperature fluctuations. For that reason, the device according to the present invention makes do with very little reflected light and may be used under a variety of even unfavorable environmental conditions.
  • FIG. 1 schematically shows an object recognition device according to the present invention.
  • FIG. 2 illustrates the operating principle of the object recognition device according to the present invention.
  • FIG. 1 schematically shows an object recognition device according to the present invention.
  • a VCSEL Doppler sensor 1 having collimation optics 2 transmits a laser beam 10 , for example in infrared radiation, to an MEMS scanner 3 .
  • MEMS scanner 3 is essentially composed of one or a plurality of MEMS mirrors, whose position is measured by an integrated position recognition element (not shown).
  • an angle-expanding optics 4 may optionally be used that may be designed, for example, as a lens optics or of a concave (for example, cylindrical) mirror (in the reflection). The purpose of the beam expansion is to enlarge the scanning angle of the mirror to broaden the region for capturing the object.
  • VCSEL Doppler sensor 1 is connected to a Doppler control and evaluation unit 5 .
  • MEMS scanner 3 is connected to a scanner control and position recognition unit 6 .
  • the device optionally features a synchronization unit 7 that is connected to Doppler control and evaluation unit 5 and scanner control and position recognition unit 6 .
  • the evaluation signal from the Doppler sensor i.e., the velocity or also distance of a detected object and the corresponding angular position of mirror module 3 may be determined in a time-resolved manner.
  • An evaluated positional signal indicative of the objector also raw data sets may be transmitted via an interface 8 to an application processor.
  • Units 5 , 6 and 7 may also be integrated in a circuit element.
  • FIG. 2 illustrates the operation of the object recognition device according to the present invention.
  • a one-dimensional scanner that scans parallel to a user interface, such as a table surface or a sheet plane. Scanned angular region 20 is determined by the possible deflection range of the MEMS mirror in MEMS scanner 3 .
  • individual laser beams 10 that are transmitted at an angle ⁇ (t). At distance d( ⁇ (t)), laser beams 10 strike next reflecting surface 40 of an object 30 . Outside of object 30 , a background signal is shown in simplified form as a plane.
  • a Doppler sensor is able to ascertain distance d. Besides distance d, velocity v may also be alternatively determined.
  • the object velocity is measured quickly relative to the scanner velocity, it is possible to measure the movement of the object toward the scanner.
  • the object recognition device it is possible to detect finger movements, for example, simple or even corresponding complex gestures on the user interface, or closely thereabove.
  • the object recognition device is positioned on the user interface, for example on the table surface or otherwise suitably fastened thereto or thereabove. This is accomplished in that the scanner scans thereover generally parallel to the user interface in a grazing process or a few millimeters to centimeters thereabove.
  • MEMS scanner 3 features an MEMS mirror that is deflectable in two different axes of rotation or two MEMS mirrors that are deflectable in different axes of rotation. This provides a scanning of a solid angle region.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
US15/306,205 2014-04-28 2015-03-03 Object recognition device Abandoned US20170059710A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014207965.9 2014-04-28
DE102014207965.9A DE102014207965A1 (de) 2014-04-28 2014-04-28 Vorrichtung zur Objekterkennung
PCT/EP2015/054377 WO2015165616A1 (de) 2014-04-28 2015-03-03 Vorrichtung zur objekterkennung

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US20170059710A1 true US20170059710A1 (en) 2017-03-02

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US15/306,205 Abandoned US20170059710A1 (en) 2014-04-28 2015-03-03 Object recognition device

Country Status (6)

Country Link
US (1) US20170059710A1 (ko)
JP (1) JP2017520756A (ko)
KR (1) KR20160147760A (ko)
CN (1) CN106233156A (ko)
DE (1) DE102014207965A1 (ko)
WO (1) WO2015165616A1 (ko)

Cited By (1)

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CN110927699A (zh) * 2019-12-02 2020-03-27 重庆知至科技有限公司 一种mems光束调控三维激光雷达

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DE102015120538A1 (de) * 2015-11-26 2017-06-01 Valeo Schalter Und Sensoren Gmbh Laserscanner und Kraftfahrzeug mit einem Laserscanner
DE102016221989A1 (de) * 2016-11-09 2018-05-09 Robert Bosch Gmbh Partikelsensor mit wenigstens zwei Laser-Doppler-Sensoren
CN106843280B (zh) * 2017-02-17 2021-03-16 深圳市卓兴半导体科技有限公司 一种机器人智能跟随系统
KR102105310B1 (ko) * 2018-10-22 2020-05-29 전자부품연구원 고효율 무회전 스캐닝 라이다 장치
CN110412611A (zh) * 2019-07-26 2019-11-05 中誉装备科技(广东)有限公司 双毫米精度激光探测技术
WO2021040045A1 (ja) * 2019-08-29 2021-03-04 富士フイルム株式会社 光偏向装置および光学装置
CN111239760A (zh) * 2020-01-16 2020-06-05 湖北三江航天红峰控制有限公司 基于融合传感器的多视场目标环境信息采集装置和方法

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Publication number Priority date Publication date Assignee Title
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Publication number Publication date
WO2015165616A1 (de) 2015-11-05
JP2017520756A (ja) 2017-07-27
CN106233156A (zh) 2016-12-14
DE102014207965A1 (de) 2015-10-29
KR20160147760A (ko) 2016-12-23

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