US20170040242A1 - Thermal management system and method - Google Patents
Thermal management system and method Download PDFInfo
- Publication number
- US20170040242A1 US20170040242A1 US15/298,677 US201615298677A US2017040242A1 US 20170040242 A1 US20170040242 A1 US 20170040242A1 US 201615298677 A US201615298677 A US 201615298677A US 2017040242 A1 US2017040242 A1 US 2017040242A1
- Authority
- US
- United States
- Prior art keywords
- synthetic jet
- management system
- thermal management
- fin
- heat sink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title claims description 25
- 239000012530 fluid Substances 0.000 claims abstract description 13
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 229920001296 polysiloxane Polymers 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000013011 mating Effects 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 238000001125 extrusion Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/467—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
- B23P15/26—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass heat exchangers or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4871—Bases, plates or heatsinks
- H01L21/4882—Assembly of heatsink parts
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20009—Modifications to facilitate cooling, ventilating, or heating using a gaseous coolant in electronic enclosures
- H05K7/20136—Forced ventilation, e.g. by fans
- H05K7/20172—Fan mounting or fan specifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P2700/00—Indexing scheme relating to the articles being treated, e.g. manufactured, repaired, assembled, connected or other operations covered in the subgroups
- B23P2700/10—Heat sinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
- H01L23/4735—Jet impingement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
Definitions
- the invention relates generally to thermal management systems, and more particularly, to systems and methods for packaging synthetic jets.
- thermal management in semiconductor devices was often addressed through the use of forced convective air cooling, either alone or in conjunction with various heat sink devices, and was accomplished through the use of fans.
- fan-based cooling systems are undesirable due to the noise attendant to their use.
- the use of fans requires relatively large moving parts, and correspondingly high power inputs, in order to achieve the desired level of heat transfer. As a result of the moving parts, fan reliability is also an issue
- fans are adequate for providing global movement of air over electronic devices, they generally provide insufficient localized cooling to provide adequate heat dissipation for the hot spots that typically exist in semiconductor devices and in many types of electronic equipment.
- thermal management systems have been developed which utilize synthetic jets. Such systems are more energy efficient than comparable fan-based systems, and also offer reduced levels of noise and electromagnetic interference.
- the use of synthetic jets has proven very efficient in providing localized heat dissipation, and hence can be used to address hot spots in semiconductor devices and electronic equipment. Synthetic jets may be used in conjunction with fan-based systems to provide thermal management systems that afford both global and localized heat dissipation.
- synthetic jets need to be packaged in fins that provide reduced thermal resistance and steer fluid flow in the jet, for optimal performance.
- such packaging is complex.
- a thermal management system in accordance with an embodiment of the invention, includes at least one heat sink including one or more respective fins, wherein the one or more fins include one or more respective cavities.
- the thermal management system also includes a synthetic jet stack including at least one synthetic jet mounted within each of the respective cavities employing at least one engaging structure to provide a rigid positioning of the synthetic jet stack within the fins, wherein the synthetic jet includes at least one orifice through which a fluid is ejected.
- a method for manufacturing a thermal management system includes disposing at least one heat sink comprising one or more respective fins, each of the fins including one or more respective cavities.
- the method also includes mounting a synthetic jet stack including at least one synthetic jet within each of the respective cavities, employing at least one engaging structure to provide a rigid positioning of the synthetic jet stack within the fins, wherein the synthetic jet includes at least one orifice through which a fluid is ejected.
- FIG. 1 is a cross-sectional view of an exemplary synthetic jet thermal management system including a wire frame in accordance with an embodiment of the invention.
- FIG. 2 is a cross-sectional view of an exemplary synthetic jet thermal management system including a gasket in accordance with an embodiment of the invention.
- FIG. 3 is a cross-sectional view of an exemplary synthetic jet thermal management system including multiple bumps in accordance with an embodiment of the invention.
- FIG. 4 a cross-sectional view of an exemplary synthetic jet thermal management system including multiple locator pins in accordance with an embodiment of the invention.
- FIG. 5 is a cross-sectional view of an exemplary synthetic jet thermal management system including a sheet of non-conductive tape in accordance with an embodiment of the invention.
- FIG. 6 is a cross-sectional view of an exemplary synthetic jet thermal management system including extrusions in accordance with an embodiment of the invention.
- FIG. 7 is a top view of an exemplary synthetic jet thermal management system including a fin cap in accordance with an embodiment of the invention.
- FIG. 8 is a flow chart representing steps in an exemplary method for manufacturing a synthetic jet thermal management system in accordance with an embodiment of the invention.
- embodiments of the invention include systems and methods for packaging synthetic jet embedded fins.
- the systems and methods include various techniques of mechanically coupling the synthetic fin within the fins to provide high performance cooling.
- embodiments illustrated below include one synthetic jet attached to a single fin, it should be noted that the techniques are applicable to multiple synthetic jets attached to multiple fins and heat sinks.
- FIG. 1 is a cross-sectional view of a thermal management system 10 including a wire frame 12 .
- a synthetic jet 16 is mounted within a cavity 20 in a heat sink 24 including one or more respective fins 28 .
- the synthetic jet 16 includes two piezo disks 15 , 17 with an elastomeric wall 18 between them.
- the elastomeric wall is made of silicone material.
- the elastomeric wall 18 includes at least one orifice 19 for fluid flow. Electrical wires 21 attached to the piezo disk 17 ensure electrical connection to the synthetic jet 16 .
- the synthetic jet 16 is inserted into the fin 28 via the wire frame 12 .
- the wire frame or array of wires includes three wires 32 , 34 , 36 attached to the synthetic jet through holes (not shown) on the fin 28 .
- Non-limiting example of material used in the wires 32 , 34 , and 36 are copper and aluminum.
- the fin is made of aluminum.
- the synthetic jet 16 also includes multiple orifices 19 through which a fluid 23 is ejected. In one embodiment, the fluid is air.
- a slot at a base center 37 of the fin 28 may be opened and a similar wire frame 12 may be employed therein. It will be appreciated that although one heat sink, one fin and synthetic jet is illustrated herein, there may be any number of heat sinks, fins and synthetic jets employed.
- FIG. 2 is a cross-sectional view of a thermal management system 40 including a gasket 42 .
- the gasket 42 is disposed between an outer surface 44 of the piezo disk 17 ( FIG. 1 ) and an inner surface 27 of the fin 28 .
- the outer surface 44 of the piezo disk 17 bellows in and out within the fin 28 .
- a second gasket is adhesively coupled to the other piezo disk 15 ( FIG. 1 ).
- a couple of different manufacturing techniques may be employed for the mechanical coupling of the gasket 42 with the synthetic jet 16 inserted into the fin 28 .
- the gasket 42 may be manufactured separately and an adhesive is applied on each side of the gasket.
- the gasket 42 is further attached to the jet 16 that is separately manufactured, with the adhesive on one side that would have enough tact at room temperature and the jet 16 is then inserted into the fin 28 .
- heat or a chemical is applied to ensure desirable tact to the adhesive on the other side.
- the thickness of the gasket 42 may be selected based upon a desirable volume required for the piezo disk 17 to bellow back and forth. For example, if a desirable volume required for bellowing is 300 ⁇ m, the thickness of the gasket would be at least 300 ⁇ m to avoid collision of the jet 16 with the inner surface 27 of the fin 28 .
- the gasket 42 is built onto the piezo disk 17 during the manufacturing of the synthetic jet 16 and an adhesive is further applied on an outer gasket material.
- the adhesive is activated either via mechanical pressure, heat, or chemical activation. Subsequently the adhesive bonds the gasket 42 to the inner surface 27 of the fin.
- the gasket is dispensed over the synthetic jet and after attachment to the fin, is curing at a specified temperature.
- FIG. 3 is a cross-sectional view of a thermal management system 60 including multiple bumps 62 .
- the bumps 62 are formed at different locations 64 on an outer surface 44 of the piezo disk 17 ( FIG. 1 ) of the synthetic jet 16 .
- Similar shaped dimples (not shown) are formed at the same locations on the inner side 27 of the fin 28 such that the bumps 62 align into respective dimples to provide desirable mechanical coupling of the synthetic jet 16 and the fin 28 .
- dimples are formed by drilling holes on the inner side 27 of the fin 28 and later filling the holes with epoxy to establish smooth bumps over the surface.
- the bumps are formed by a stamping process via a dye. It will be appreciated that any number of dimples and bumps may be formed.
- FIG. 4 is a cross-sectional view of a thermal management system 80 including multiple locator pins 82 , 84 , 86 and 88 .
- the locator pins are welded or soldered on an outer surface 44 of the piezo disk 17 .
- two locator pins 82 , 84 and 86 , 88 are welded on each side of the piezo disk respectively.
- tight fitting holes 92 are drilled in the base/heat sink 24 ( FIG. 1 ) of the fin 28 to accept the locator pins.
- the locator pins ensure a tight mechanical coupling between the synthetic jet 16 and the fin 28 . Again, any number of holes and locator pins may be employed.
- FIG. 5 is a cross-sectional view of a thermal management system 120 including sheet 122 of non-conductive tape on a whole area of each surface 44 of the piezo disks 15 , 17 .
- the sheet 122 electrically separates the synthetic jet 16 from the fin 28 to avoid potential electric shorting of the jet 16 in contact with the metallic inner surface 27 of the fin 28 .
- a non-limiting example of non-conductive tape is Kapton.
- a layer 128 of silicone is applied on a top opening 132 of the fin 28 to enclose synthetic jet 16 into the cavity of the fin 28 .
- the layer 128 ensures secure coupling of the synthetic jet 16 with the fin 28 .
- a smooth layer 128 also provides an aerodynamic surface for the air flow in the heatsink 24 .
- FIG. 6 is a cross-sectional view of a thermal management system 140 including extruded synthetic jets 142 .
- the extrusions 144 of the synthetic jet 142 enable top and bottom surfaces of the synthetic jet 142 to fit into external support slots that ensure a rigid attachment with the fin 28 .
- the piezo disks 15 , 17 are elongated above and below (if needed) the slot into which it is fitted.
- a silicone material may be introduced in the extrusion slot to hold the synthetic jet 16 .
- FIG. 7 is a top view of a thermal management system 180 including a fin cap 182 .
- the fin cap 182 is disposed on a top opening 132 of the fin 28 .
- the fin cap 182 is designed such that the synthetic jet 16 will be firmly enclosed within the fin 28 , without being in contact with the cap.
- Through holes 186 may be formed in the fin cap 182 to facilitate a path for electrical connection of the synthetic jet 16 .
- the shape of the fin cap 182 is similar to cross-section of the fin with a concave end. In another embodiment, the shape may be similar to cross-section of the fin with a short extruded wall fitting end.
- a single fin cap may be employed for each fin, or a top plate including a number of caps may cover all the fins.
- the fin cap 182 is adhesively coupled to the fin via a silicone or epoxy.
- FIG. 8 is a flow chart representing steps in an exemplary method 200 for manufacturing a thermal management system.
- the method 200 includes disposing at least one heat sink including one or more respective fins, wherein each of the fins includes one or more respective cavities in step 202 .
- a synthetic jet stack including at least one synthetic jet is mounted in the fin in step 204 , employing at least one engaging structure to provide rigid positioning of the synthetic jet stack within the fins.
- the synthetic jet includes at least one orifice through which a fluid is ejected.
- an engaging structure is employed by attaching an array of wires into each of the at least one synthetic jets to the respective one or more fins.
- the engaging structure is employed by adhesively coupling a gasket to an outer surface of the at least one synthetic jet and an inner surface of the fins.
- the engaging structure is employed by forming multiple bumps on an outer surface of the synthetic jet, and the multiple bumps are disposed upon multiple respective dimples embedded on the surface of the fins.
- the engaging structure is employed by disposing multiple locator pins on an outer surface of the synthetic jet, and the locator pins are fit into multiple respective holes drilled into the heat sink.
- the engaging structure is employed by adhering a sheet of non-conductive tape to each outer surface of the synthetic jets, and a layer of silicone is applied at a top opening side of the fins to enclose the synthetic jets into the cavities.
- the engaging structure is employed by forming extrusions in the synthetic jets, and the extrusions are fit into multiple external support slots on at least one of a top and a bottom surface of the fins, and a silicone adhesive is applied to the slots to ensure a rigid attachment.
- the engaging structure is employed by disposing a fin cap on a top opening of each of the respective fins such that the synthetic jets are rigidly disposed within the fins, wherein the fin cap includes one or more holes to facilitate electrical connection to the synthetic jets.
- the engaging structure is employed by disposing a top plate comprising multiple fin caps configured to cover each of the fins, such that the synthetic jets are rigidly disposed within the fins, the fin cap including one or more holes to facilitate electrical connection to the synthetic jets.
- thermal management system and method described above thus provide a way to achieve a convenient and efficient means of packaging synthetic jet embedded fins. This technique also provides energy efficient cooling of electronic devices. Further, such systems may be employed with low power fans in electronics to provide the desirable high performance cooling.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Thermal Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
- The present application is a continuation of, and claims priority to, U.S. patent application Ser. No. 12/911,995, filed Oct. 26, 2010, the disclosure of which is incorporated herein by reference in its entirety.
- The invention relates generally to thermal management systems, and more particularly, to systems and methods for packaging synthetic jets.
- As the size of semiconductor devices has continued to shrink and circuit densities have increased accordingly, thermal management of these devices has become more challenging. In the past, thermal management in semiconductor devices was often addressed through the use of forced convective air cooling, either alone or in conjunction with various heat sink devices, and was accomplished through the use of fans. However, fan-based cooling systems are undesirable due to the noise attendant to their use. Moreover, the use of fans requires relatively large moving parts, and correspondingly high power inputs, in order to achieve the desired level of heat transfer. As a result of the moving parts, fan reliability is also an issue Furthermore, while fans are adequate for providing global movement of air over electronic devices, they generally provide insufficient localized cooling to provide adequate heat dissipation for the hot spots that typically exist in semiconductor devices and in many types of electronic equipment.
- More recently, thermal management systems have been developed which utilize synthetic jets. Such systems are more energy efficient than comparable fan-based systems, and also offer reduced levels of noise and electromagnetic interference. The use of synthetic jets has proven very efficient in providing localized heat dissipation, and hence can be used to address hot spots in semiconductor devices and electronic equipment. Synthetic jets may be used in conjunction with fan-based systems to provide thermal management systems that afford both global and localized heat dissipation.
- Despite their notable advantages, however, there is a need in the art for further improvements in synthetic jet ejectors. In particular, synthetic jets need to be packaged in fins that provide reduced thermal resistance and steer fluid flow in the jet, for optimal performance. However, such packaging is complex.
- Therefore, there is a need in the art for an optimally packaged thermal management system.
- In accordance with an embodiment of the invention, a thermal management system is provided. The thermal management system includes at least one heat sink including one or more respective fins, wherein the one or more fins include one or more respective cavities. The thermal management system also includes a synthetic jet stack including at least one synthetic jet mounted within each of the respective cavities employing at least one engaging structure to provide a rigid positioning of the synthetic jet stack within the fins, wherein the synthetic jet includes at least one orifice through which a fluid is ejected.
- In accordance with another embodiment of the invention, a method for manufacturing a thermal management system is provided. The method includes disposing at least one heat sink comprising one or more respective fins, each of the fins including one or more respective cavities. The method also includes mounting a synthetic jet stack including at least one synthetic jet within each of the respective cavities, employing at least one engaging structure to provide a rigid positioning of the synthetic jet stack within the fins, wherein the synthetic jet includes at least one orifice through which a fluid is ejected.
- These and other features, aspects, and advantages of the present invention will become better understood when the following detailed description is read with reference to the accompanying drawings in which like characters represent like parts throughout the drawings, wherein:
-
FIG. 1 is a cross-sectional view of an exemplary synthetic jet thermal management system including a wire frame in accordance with an embodiment of the invention. -
FIG. 2 is a cross-sectional view of an exemplary synthetic jet thermal management system including a gasket in accordance with an embodiment of the invention. -
FIG. 3 is a cross-sectional view of an exemplary synthetic jet thermal management system including multiple bumps in accordance with an embodiment of the invention. -
FIG. 4 a cross-sectional view of an exemplary synthetic jet thermal management system including multiple locator pins in accordance with an embodiment of the invention. -
FIG. 5 is a cross-sectional view of an exemplary synthetic jet thermal management system including a sheet of non-conductive tape in accordance with an embodiment of the invention. -
FIG. 6 is a cross-sectional view of an exemplary synthetic jet thermal management system including extrusions in accordance with an embodiment of the invention. -
FIG. 7 is a top view of an exemplary synthetic jet thermal management system including a fin cap in accordance with an embodiment of the invention. -
FIG. 8 is a flow chart representing steps in an exemplary method for manufacturing a synthetic jet thermal management system in accordance with an embodiment of the invention. - As discussed in detail below, embodiments of the invention include systems and methods for packaging synthetic jet embedded fins. The systems and methods include various techniques of mechanically coupling the synthetic fin within the fins to provide high performance cooling. Although embodiments illustrated below include one synthetic jet attached to a single fin, it should be noted that the techniques are applicable to multiple synthetic jets attached to multiple fins and heat sinks.
-
FIG. 1 is a cross-sectional view of athermal management system 10 including awire frame 12. Asynthetic jet 16 is mounted within acavity 20 in aheat sink 24 including one or morerespective fins 28. Thesynthetic jet 16 includes two 15, 17 with anpiezo disks elastomeric wall 18 between them. In an example, the elastomeric wall is made of silicone material. Theelastomeric wall 18 includes at least oneorifice 19 for fluid flow.Electrical wires 21 attached to thepiezo disk 17 ensure electrical connection to thesynthetic jet 16. - In the illustrated embodiment, the
synthetic jet 16 is inserted into thefin 28 via thewire frame 12. For example, the wire frame or array of wires includes three 32, 34, 36 attached to the synthetic jet through holes (not shown) on thewires fin 28. Non-limiting example of material used in the 32, 34, and 36 are copper and aluminum. In another example, the fin is made of aluminum. Thewires synthetic jet 16 also includesmultiple orifices 19 through which afluid 23 is ejected. In one embodiment, the fluid is air. To increase robustness, a slot at abase center 37 of thefin 28 may be opened and asimilar wire frame 12 may be employed therein. It will be appreciated that although one heat sink, one fin and synthetic jet is illustrated herein, there may be any number of heat sinks, fins and synthetic jets employed. -
FIG. 2 is a cross-sectional view of athermal management system 40 including agasket 42. Thegasket 42 is disposed between anouter surface 44 of the piezo disk 17 (FIG. 1 ) and aninner surface 27 of thefin 28. It should be pointed out that while thepiezo disk 17 shown inFIG. 1 is round, it can be any planar shape, including square, as shown inFIG. 2 . Theouter surface 44 of thepiezo disk 17 bellows in and out within thefin 28. Similarly, a second gasket is adhesively coupled to the other piezo disk 15 (FIG. 1 ). A couple of different manufacturing techniques may be employed for the mechanical coupling of thegasket 42 with thesynthetic jet 16 inserted into thefin 28. In a particular embodiment, thegasket 42 may be manufactured separately and an adhesive is applied on each side of the gasket. Thegasket 42 is further attached to thejet 16 that is separately manufactured, with the adhesive on one side that would have enough tact at room temperature and thejet 16 is then inserted into thefin 28. Furthermore, heat or a chemical is applied to ensure desirable tact to the adhesive on the other side. The thickness of thegasket 42 may be selected based upon a desirable volume required for thepiezo disk 17 to bellow back and forth. For example, if a desirable volume required for bellowing is 300 μm, the thickness of the gasket would be at least 300 μm to avoid collision of thejet 16 with theinner surface 27 of thefin 28. In another embodiment, thegasket 42 is built onto thepiezo disk 17 during the manufacturing of thesynthetic jet 16 and an adhesive is further applied on an outer gasket material. When thesynthetic jet 16 is inserted into thefin 28, the adhesive is activated either via mechanical pressure, heat, or chemical activation. Subsequently the adhesive bonds thegasket 42 to theinner surface 27 of the fin. In another embodiment, the gasket is dispensed over the synthetic jet and after attachment to the fin, is curing at a specified temperature. -
FIG. 3 is a cross-sectional view of a thermal management system 60 including multiple bumps 62. The bumps 62 are formed at different locations 64 on anouter surface 44 of the piezo disk 17 (FIG. 1 ) of thesynthetic jet 16. Similar shaped dimples (not shown) are formed at the same locations on theinner side 27 of thefin 28 such that the bumps 62 align into respective dimples to provide desirable mechanical coupling of thesynthetic jet 16 and thefin 28. In one embodiment, dimples are formed by drilling holes on theinner side 27 of thefin 28 and later filling the holes with epoxy to establish smooth bumps over the surface. In another embodiment, the bumps are formed by a stamping process via a dye. It will be appreciated that any number of dimples and bumps may be formed. -
FIG. 4 is a cross-sectional view of a thermal management system 80 including multiple locator pins 82, 84, 86 and 88. The locator pins are welded or soldered on anouter surface 44 of thepiezo disk 17. In the illustrated embodiment, two locator pins 82, 84 and 86, 88 are welded on each side of the piezo disk respectively. In a particular embodiment, tight fitting holes 92 are drilled in the base/heat sink 24 (FIG. 1 ) of thefin 28 to accept the locator pins. The locator pins ensure a tight mechanical coupling between thesynthetic jet 16 and thefin 28. Again, any number of holes and locator pins may be employed. -
FIG. 5 is a cross-sectional view of a thermal management system 120 including sheet 122 of non-conductive tape on a whole area of eachsurface 44 of the 15, 17. The sheet 122 electrically separates thepiezo disks synthetic jet 16 from thefin 28 to avoid potential electric shorting of thejet 16 in contact with the metallicinner surface 27 of thefin 28. A non-limiting example of non-conductive tape is Kapton. Furthermore, a layer 128 of silicone is applied on atop opening 132 of thefin 28 to enclosesynthetic jet 16 into the cavity of thefin 28. The layer 128 ensures secure coupling of thesynthetic jet 16 with thefin 28. A smooth layer 128 also provides an aerodynamic surface for the air flow in theheatsink 24. -
FIG. 6 is a cross-sectional view of athermal management system 140 including extrudedsynthetic jets 142. Theextrusions 144 of thesynthetic jet 142 enable top and bottom surfaces of thesynthetic jet 142 to fit into external support slots that ensure a rigid attachment with thefin 28. As illustrated herein, the 15, 17 are elongated above and below (if needed) the slot into which it is fitted. For further robustness, a silicone material (not shown) may be introduced in the extrusion slot to hold thepiezo disks synthetic jet 16. -
FIG. 7 is a top view of athermal management system 180 including afin cap 182. Thefin cap 182 is disposed on atop opening 132 of thefin 28. Thefin cap 182 is designed such that thesynthetic jet 16 will be firmly enclosed within thefin 28, without being in contact with the cap. Throughholes 186 may be formed in thefin cap 182 to facilitate a path for electrical connection of thesynthetic jet 16. In the illustrated embodiment, the shape of thefin cap 182 is similar to cross-section of the fin with a concave end. In another embodiment, the shape may be similar to cross-section of the fin with a short extruded wall fitting end. In an embodiment, wherein there are multiple fins, a single fin cap may be employed for each fin, or a top plate including a number of caps may cover all the fins. In an exemplary embodiment, thefin cap 182 is adhesively coupled to the fin via a silicone or epoxy. -
FIG. 8 is a flow chart representing steps in anexemplary method 200 for manufacturing a thermal management system. Themethod 200 includes disposing at least one heat sink including one or more respective fins, wherein each of the fins includes one or more respective cavities instep 202. A synthetic jet stack including at least one synthetic jet is mounted in the fin instep 204, employing at least one engaging structure to provide rigid positioning of the synthetic jet stack within the fins. The synthetic jet includes at least one orifice through which a fluid is ejected. In one embodiment, an engaging structure is employed by attaching an array of wires into each of the at least one synthetic jets to the respective one or more fins. In another embodiment, the engaging structure is employed by adhesively coupling a gasket to an outer surface of the at least one synthetic jet and an inner surface of the fins. In yet another embodiment, the engaging structure is employed by forming multiple bumps on an outer surface of the synthetic jet, and the multiple bumps are disposed upon multiple respective dimples embedded on the surface of the fins. - In another embodiment, the engaging structure is employed by disposing multiple locator pins on an outer surface of the synthetic jet, and the locator pins are fit into multiple respective holes drilled into the heat sink. In another embodiment, the engaging structure is employed by adhering a sheet of non-conductive tape to each outer surface of the synthetic jets, and a layer of silicone is applied at a top opening side of the fins to enclose the synthetic jets into the cavities. In yet another embodiment, the engaging structure is employed by forming extrusions in the synthetic jets, and the extrusions are fit into multiple external support slots on at least one of a top and a bottom surface of the fins, and a silicone adhesive is applied to the slots to ensure a rigid attachment. In another embodiment, the engaging structure is employed by disposing a fin cap on a top opening of each of the respective fins such that the synthetic jets are rigidly disposed within the fins, wherein the fin cap includes one or more holes to facilitate electrical connection to the synthetic jets. In yet another embodiment, the engaging structure is employed by disposing a top plate comprising multiple fin caps configured to cover each of the fins, such that the synthetic jets are rigidly disposed within the fins, the fin cap including one or more holes to facilitate electrical connection to the synthetic jets.
- The various embodiments of a thermal management system and method described above thus provide a way to achieve a convenient and efficient means of packaging synthetic jet embedded fins. This technique also provides energy efficient cooling of electronic devices. Further, such systems may be employed with low power fans in electronics to provide the desirable high performance cooling.
- It is to be understood that not necessarily all such objects or advantages described above may be achieved in accordance with any particular embodiment. Thus, for example, those skilled in the art will recognize that the systems and techniques described herein may be embodied or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught herein without necessarily achieving other objects or advantages as may be taught or suggested herein.
- Furthermore, the skilled artisan will recognize the interchangeability of various features from different embodiments. Similarly, the various features described, as well as other known equivalents for each feature, can be mixed and matched by one of ordinary skill in this art to construct additional systems and techniques in accordance with principles of this disclosure.
- While the invention has been described in detail in connection with only a limited number of embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather, the invention can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the invention. Additionally, while various embodiments of the invention have been described, it is to be understood that aspects of the invention may include only some of the described embodiments. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.
Claims (28)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/298,677 US20170040242A1 (en) | 2010-10-26 | 2016-10-20 | Thermal management system and method |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/911,995 US9478479B2 (en) | 2010-10-26 | 2010-10-26 | Thermal management system and method |
| US15/298,677 US20170040242A1 (en) | 2010-10-26 | 2016-10-20 | Thermal management system and method |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/911,995 Continuation US9478479B2 (en) | 2009-04-09 | 2010-10-26 | Thermal management system and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20170040242A1 true US20170040242A1 (en) | 2017-02-09 |
Family
ID=45023568
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/911,995 Active 2032-10-04 US9478479B2 (en) | 2009-04-09 | 2010-10-26 | Thermal management system and method |
| US15/298,677 Abandoned US20170040242A1 (en) | 2010-10-26 | 2016-10-20 | Thermal management system and method |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US12/911,995 Active 2032-10-04 US9478479B2 (en) | 2009-04-09 | 2010-10-26 | Thermal management system and method |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US9478479B2 (en) |
| EP (1) | EP2447992A3 (en) |
| CN (1) | CN102456645B (en) |
| BR (1) | BRPI1104371A2 (en) |
| CA (1) | CA2755589A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180061737A1 (en) * | 2015-12-09 | 2018-03-01 | Ozyegin Universitesi | Heat sink cooling with preferred synthetic jet cooling devices |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10274263B2 (en) | 2009-04-09 | 2019-04-30 | General Electric Company | Method and apparatus for improved cooling of a heat sink using a synthetic jet |
| CN109041521A (en) * | 2012-05-03 | 2018-12-18 | 爱立信(中国)通信有限公司 | Method and apparatus for cooling down telecommunication apparatus |
| US9194575B2 (en) * | 2012-06-29 | 2015-11-24 | General Electric Company | Thermal management in optical and electronic devices |
| US9215520B2 (en) * | 2012-08-15 | 2015-12-15 | General Electric Company | Multi-function synthetic jet and method of manufacturing same |
| US20140268545A1 (en) * | 2013-02-22 | 2014-09-18 | Nuventix, Inc. | Modular synthetic jet ejector and systems incorporating the same |
| JP6509189B2 (en) | 2013-03-14 | 2019-05-08 | ゼネラル・エレクトリック・カンパニイ | Low resonance acoustic synthetic jet structure |
| EP2969231B1 (en) | 2013-03-14 | 2019-10-23 | General Electric Company | Synthetic jet suspension structure |
| US9570643B2 (en) | 2013-10-28 | 2017-02-14 | General Electric Company | System and method for enhanced convection cooling of temperature-dependent power producing and power consuming electrical devices |
| US9879661B2 (en) | 2014-08-29 | 2018-01-30 | General Electric Company | Vibrational fluid mover jet with active damping mechanism |
| US11222830B2 (en) * | 2018-01-03 | 2022-01-11 | Lenovo (Beijing) Co., Ltd. | Heat dissipation structure and electronic device |
| US11204204B2 (en) * | 2019-03-08 | 2021-12-21 | Toyota Motor Engineering & Manufacturing North America, Inc. | Acoustic absorber with integrated heat sink |
| US12414261B2 (en) * | 2021-06-25 | 2025-09-09 | Intel Corporation | Thermal management systems for electronic devices and related methods |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4498851A (en) * | 1980-05-02 | 1985-02-12 | Piezo Electric Products, Inc. | Solid state blower |
| US4889498A (en) * | 1987-10-21 | 1989-12-26 | Mitsubishi Denki Kabushiki Kaisha | Memory card having an elastomer connector |
| US4923000A (en) * | 1989-03-03 | 1990-05-08 | Microelectronics And Computer Technology Corporation | Heat exchanger having piezoelectric fan means |
| US5941694A (en) * | 1996-11-06 | 1999-08-24 | Honda Giken Kogyo Kabushiki Kaisha | Fluid conveying apparatus having multiple piezoelectric driven blades |
| US6588497B1 (en) * | 2002-04-19 | 2003-07-08 | Georgia Tech Research Corporation | System and method for thermal management by synthetic jet ejector channel cooling techniques |
| US7891410B1 (en) * | 2008-06-26 | 2011-02-22 | Lockheed Martin Corporation | Devices for heat exchange |
Family Cites Families (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2766619A (en) | 1953-06-26 | 1956-10-16 | Tribus Myron | Ice detecting apparatus |
| DE2015694B2 (en) | 1970-04-02 | 1971-11-11 | Exatest Meßtechnik GmbH, 5090 Le verkusen | METHOD OF CONTACTLESS MEASUREMENT OF THE WIDTH OR POSITION OF AN OBJECTIVE BY MEANS OF A VISUAL BEAM |
| US3692414A (en) | 1971-02-24 | 1972-09-19 | Harry L Hosterman | Non-contacting measuring probe |
| US4501319A (en) * | 1979-04-17 | 1985-02-26 | The United States Of America As Represented By The Secretary Of The Army | Piezoelectric polymer heat exchanger |
| DD218672A1 (en) | 1982-07-07 | 1985-02-13 | Ilmenau Tech Hochschule | OPTICAL TOUCHLESS MULTI-CORDINATE ANTASTE DEVICE |
| US4583854A (en) | 1982-07-15 | 1986-04-22 | General Electric Company | High resolution electronic automatic imaging and inspecting system |
| US4745290A (en) | 1987-03-19 | 1988-05-17 | David Frankel | Method and apparatus for use in making custom shoes |
| US4736247A (en) | 1987-05-04 | 1988-04-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Range and range rate system |
| US4966460A (en) | 1987-10-28 | 1990-10-30 | The Ingersoll Milling Machine Company | Laser gauging of rotary cutting tools |
| US5369286A (en) | 1989-05-26 | 1994-11-29 | Ann F. Koo | Method and apparatus for measuring stress in a film applied to surface of a workpiece |
| DE9110287U1 (en) | 1991-08-20 | 1991-10-02 | Siemens AG, 8000 München | Device for contactless measurement of core thickness, diameter and concentricity of micro drills in printed circuit board technology |
| US5570186A (en) | 1992-04-28 | 1996-10-29 | Mtu Motoren- Und Turbinen-Union Munich Gmbh | Method for inspecting the curvature of a profile, such an edge of a turbine blade |
| US5760333A (en) * | 1992-08-06 | 1998-06-02 | Pfu Limited | Heat-generating element cooling device |
| US5445215A (en) | 1992-12-22 | 1995-08-29 | Herbert; Edward | Fan assembly with heat sink |
| US5477371A (en) | 1993-12-13 | 1995-12-19 | Shafir Production Systems Ltd. | Three-dimensional, non-contact scanning apparatus and method |
| US5568260A (en) | 1995-03-31 | 1996-10-22 | General Electric Company | Precision non-contact measurement system for curved workpieces |
| US5846081A (en) | 1995-08-23 | 1998-12-08 | Bushway; Geoffrey C. | Computerized instrument platform positioning system |
| JPH09139448A (en) | 1995-11-13 | 1997-05-27 | Fujitsu Denso Ltd | Semiconductor fitting, its mounting method and semiconductor device using it |
| JP3159071B2 (en) | 1996-08-01 | 2001-04-23 | 株式会社日立製作所 | Electric device having radiating fins |
| US5781411A (en) | 1996-09-19 | 1998-07-14 | Gateway 2000, Inc. | Heat sink utilizing the chimney effect |
| US6016250A (en) | 1998-01-30 | 2000-01-18 | Credence Systems Corporation | Self-balancing thermal control device for integrated circuits |
| US6788807B1 (en) | 1998-02-13 | 2004-09-07 | Minolta Co., Ltd. | Three dimensional information measurement method and apparatus |
| US6185030B1 (en) | 1998-03-20 | 2001-02-06 | James W. Overbeck | Wide field of view and high speed scanning microscopy |
| JP2001075624A (en) | 1999-07-01 | 2001-03-23 | Mori Seiki Co Ltd | Tool path data generation device for NC machine tool and numerical control device equipped with the same |
| US6110306A (en) | 1999-11-18 | 2000-08-29 | The United States Of America As Represented By The Secretary Of The Navy | Complexed liquid fuel compositions |
| JP2001332671A (en) | 2000-05-23 | 2001-11-30 | Nohira Seisakusho:Kk | Heat sink fixing structure |
| JP2002026214A (en) | 2000-07-12 | 2002-01-25 | Sumitomo Metal Ind Ltd | Electronic component cooling device |
| US6296048B1 (en) * | 2000-09-08 | 2001-10-02 | Powerwave Technologies, Inc. | Heat sink assembly |
| US6666261B2 (en) * | 2001-06-15 | 2003-12-23 | Foxconn Precision Components Co., Ltd. | Liquid circulation cooler |
| DE10211070A1 (en) | 2002-03-13 | 2003-09-25 | Gurny Broesch Andrea | Device for measuring a measurement object |
| US6817405B2 (en) * | 2002-06-03 | 2004-11-16 | International Business Machines Corporation | Apparatus having forced fluid cooling and pin-fin heat sink |
| US20040263863A1 (en) | 2003-01-27 | 2004-12-30 | Rogers William E | System and method for design and manufacture of custom face masks |
| US7204615B2 (en) * | 2003-03-31 | 2007-04-17 | Lumination Llc | LED light with active cooling |
| US7027145B2 (en) | 2003-06-24 | 2006-04-11 | The Regents Of The University Of Michigan | Reconfigurable surface finish inspection apparatus for cylinder bores and other surfaces |
| CN1233038C (en) | 2003-07-11 | 2005-12-21 | 北京工业大学 | Microjet array cooling heat sink |
| DE102004014153A1 (en) | 2004-03-23 | 2005-10-13 | IBTL - Ing. Büro Lang & Armlich GmbH | Coordinate measuring machine with exchangeable optics |
| US20060021736A1 (en) | 2004-07-29 | 2006-02-02 | International Rectifier Corporation | Pin type heat sink for channeling air flow |
| US7286347B2 (en) | 2004-08-10 | 2007-10-23 | Dupont Displays | Electronic device having a temperature control system |
| US7182124B2 (en) | 2004-08-31 | 2007-02-27 | Egbon Electronics Ltd. | Heat sink structure |
| US7252140B2 (en) | 2004-09-03 | 2007-08-07 | Nuveatix, Inc. | Apparatus and method for enhanced heat transfer |
| US7249625B2 (en) * | 2005-08-03 | 2007-07-31 | Cooler Master Co., Ltd. | Water-cooling heat dissipation device |
| US7607470B2 (en) * | 2005-11-14 | 2009-10-27 | Nuventix, Inc. | Synthetic jet heat pipe thermal management system |
| US7577491B2 (en) | 2005-11-30 | 2009-08-18 | General Electric Company | System and method for extracting parameters of a cutting tool |
| US20070196190A1 (en) | 2005-12-15 | 2007-08-23 | Ingersoll Machine Tools, Inc. | Determining cutting tool dimensions and run-out using acoustic emissions |
| WO2008048493A2 (en) | 2006-10-13 | 2008-04-24 | Nuventix, Inc. | Thermal management of very small form factor projectors with synthetic jets |
| US20080137289A1 (en) | 2006-12-08 | 2008-06-12 | General Electric Company | Thermal management system for embedded environment and method for making same |
| US7768655B2 (en) | 2006-12-20 | 2010-08-03 | General Electric Company | Methods and system for measuring an object |
| JP2008196989A (en) | 2007-02-14 | 2008-08-28 | General Electric Co <Ge> | System and method for extracting parameter of cutting tool |
| US20080310110A1 (en) | 2007-06-12 | 2008-12-18 | General Electric Company | System and method for mounting a cooling device and method of fabrication |
| US20090145581A1 (en) | 2007-12-11 | 2009-06-11 | Paul Hoffman | Non-linear fin heat sink |
| US20090321046A1 (en) | 2008-06-30 | 2009-12-31 | Alcatel-Lucent Technologies Inc. | Flow diverters to enhance heat sink performance |
| US20100014251A1 (en) | 2008-07-15 | 2010-01-21 | Advanced Micro Devices, Inc. | Multidimensional Thermal Management Device for an Integrated Circuit Chip |
| US20100038056A1 (en) | 2008-08-15 | 2010-02-18 | Ellsworth Joseph R | High performance compact heat exchanger |
| US8453715B2 (en) | 2008-10-30 | 2013-06-04 | General Electric Company | Synthetic jet embedded heat sink |
| US8496049B2 (en) | 2009-04-09 | 2013-07-30 | General Electric Company | Heat sinks with distributed and integrated jet cooling |
| US9615482B2 (en) * | 2009-12-11 | 2017-04-04 | General Electric Company | Shaped heat sinks to optimize flow |
| US8584735B2 (en) | 2009-07-28 | 2013-11-19 | Aerojet Rocketdyne Of De, Inc. | Cooling device and method with synthetic jet actuator |
| JP2011103395A (en) | 2009-11-11 | 2011-05-26 | Sumitomo Electric Ind Ltd | Heat radiating structure of heat generating component and circuit device including the same heat radiating structure |
-
2010
- 2010-10-26 US US12/911,995 patent/US9478479B2/en active Active
-
2011
- 2011-10-20 EP EP11186013A patent/EP2447992A3/en not_active Withdrawn
- 2011-10-20 CA CA2755589A patent/CA2755589A1/en not_active Abandoned
- 2011-10-24 BR BRPI1104371-7A2A patent/BRPI1104371A2/en not_active IP Right Cessation
- 2011-10-26 CN CN201110354647.0A patent/CN102456645B/en active Active
-
2016
- 2016-10-20 US US15/298,677 patent/US20170040242A1/en not_active Abandoned
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4498851A (en) * | 1980-05-02 | 1985-02-12 | Piezo Electric Products, Inc. | Solid state blower |
| US4889498A (en) * | 1987-10-21 | 1989-12-26 | Mitsubishi Denki Kabushiki Kaisha | Memory card having an elastomer connector |
| US4923000A (en) * | 1989-03-03 | 1990-05-08 | Microelectronics And Computer Technology Corporation | Heat exchanger having piezoelectric fan means |
| US5941694A (en) * | 1996-11-06 | 1999-08-24 | Honda Giken Kogyo Kabushiki Kaisha | Fluid conveying apparatus having multiple piezoelectric driven blades |
| US6588497B1 (en) * | 2002-04-19 | 2003-07-08 | Georgia Tech Research Corporation | System and method for thermal management by synthetic jet ejector channel cooling techniques |
| US7891410B1 (en) * | 2008-06-26 | 2011-02-22 | Lockheed Martin Corporation | Devices for heat exchange |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180061737A1 (en) * | 2015-12-09 | 2018-03-01 | Ozyegin Universitesi | Heat sink cooling with preferred synthetic jet cooling devices |
| US10629514B2 (en) * | 2015-12-09 | 2020-04-21 | Ozyegin Universitesi | Heat sink cooling with preferred synthetic jet cooling devices |
Also Published As
| Publication number | Publication date |
|---|---|
| US20120097377A1 (en) | 2012-04-26 |
| CN102456645A (en) | 2012-05-16 |
| CN102456645B (en) | 2016-08-03 |
| CA2755589A1 (en) | 2012-04-26 |
| US9478479B2 (en) | 2016-10-25 |
| EP2447992A2 (en) | 2012-05-02 |
| BRPI1104371A2 (en) | 2014-01-07 |
| EP2447992A3 (en) | 2013-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20170040242A1 (en) | Thermal management system and method | |
| KR100665933B1 (en) | Power Semiconductor Module | |
| US7190581B1 (en) | Low thermal resistance power module assembly | |
| US8885343B2 (en) | Heat dissipation from a control unit | |
| KR200448519Y1 (en) | Heat Sink for Protruding IC Packages | |
| KR100632459B1 (en) | Heat-dissipating semiconductor package and manufacturing method | |
| US10217686B2 (en) | Air-cavity package with enhanced package integration level and thermal performance | |
| US9974158B2 (en) | Air-cavity package with two heat dissipation interfaces | |
| US10840165B2 (en) | Electronics package with improved thermal performance | |
| US9795053B2 (en) | Electronic device and method for manufacturing the electronic device | |
| US20180197800A1 (en) | Air-cavity package with dual signal-transition sides | |
| JP2009105394A (en) | Electric assembly using circuit board having internal cooling structure | |
| US20170230011A1 (en) | Vapor chamber amplifier module | |
| CN105659400A (en) | Circuit and method for manufacturing circuit | |
| JPH0748536B2 (en) | Module for electronic package | |
| KR102018588B1 (en) | Case and Installing Method of the same | |
| US20040227230A1 (en) | Heat spreaders | |
| KR20160038440A (en) | Power module package and method of fabricating thereof | |
| JP2016086134A (en) | Heat sink, heat sink integrated power module, and manufacturing method thereof | |
| US7672140B2 (en) | Circuit board configuration | |
| EP3214646A1 (en) | Heat-dissipating structure | |
| JP2008098243A (en) | Heat sink, method for mounting electronic components on heat sink, and method for manufacturing heat sink | |
| JP5860665B2 (en) | Thermal management system and method | |
| KR20170017481A (en) | Heat sink assembly | |
| KR102869892B1 (en) | Power semiconductor module with integrated cooling structure and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: GENERAL ELECTRIC COMPANY, NEW YORK Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ARIK, MEHMET;GERSTLER, WILLIAM DWIGHT;LI, RI;AND OTHERS;SIGNING DATES FROM 20161010 TO 20161223;REEL/FRAME:040823/0818 |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE AFTER FINAL ACTION FORWARDED TO EXAMINER |
|
| STPP | Information on status: patent application and granting procedure in general |
Free format text: ADVISORY ACTION MAILED |
|
| STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |