US20160240649A1 - Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures - Google Patents
Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures Download PDFInfo
- Publication number
- US20160240649A1 US20160240649A1 US14/664,186 US201514664186A US2016240649A1 US 20160240649 A1 US20160240649 A1 US 20160240649A1 US 201514664186 A US201514664186 A US 201514664186A US 2016240649 A1 US2016240649 A1 US 2016240649A1
- Authority
- US
- United States
- Prior art keywords
- mosfet
- jfet
- sections
- section
- electrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 48
- 230000000694 effects Effects 0.000 title abstract description 37
- 230000000116 mitigating effect Effects 0.000 title abstract description 3
- 238000000034 method Methods 0.000 claims abstract description 71
- 230000005669 field effect Effects 0.000 claims abstract description 19
- 239000004065 semiconductor Substances 0.000 claims abstract description 17
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 13
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 13
- 230000004044 response Effects 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 34
- 210000000746 body region Anatomy 0.000 claims description 27
- 239000012212 insulator Substances 0.000 claims 8
- 239000002019 doping agent Substances 0.000 claims 4
- 230000005670 electromagnetic radiation Effects 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 41
- 238000013461 design Methods 0.000 description 19
- 230000000977 initiatory effect Effects 0.000 description 17
- 229910052710 silicon Inorganic materials 0.000 description 17
- 239000010703 silicon Substances 0.000 description 17
- 230000006870 function Effects 0.000 description 16
- 230000008569 process Effects 0.000 description 14
- 239000002245 particle Substances 0.000 description 11
- 230000000903 blocking effect Effects 0.000 description 9
- 230000009977 dual effect Effects 0.000 description 9
- 230000005684 electric field Effects 0.000 description 9
- 230000009467 reduction Effects 0.000 description 8
- 230000008030 elimination Effects 0.000 description 7
- 238000003379 elimination reaction Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000005865 ionizing radiation Effects 0.000 description 3
- 230000000191 radiation effect Effects 0.000 description 3
- 238000005510 radiation hardening Methods 0.000 description 3
- 230000001603 reducing effect Effects 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
- H01L29/0852—Source or drain regions of field-effect devices of field-effect transistors with insulated gate of DMOS transistors
- H01L29/0856—Source regions
- H01L29/086—Impurity concentration or distribution
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7831—Field effect transistors with field effect produced by an insulated gate with multiple gate structure
- H01L29/7832—Field effect transistors with field effect produced by an insulated gate with multiple gate structure the structure comprising a MOS gate and at least one non-MOS gate, e.g. JFET or MESFET gate
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/14—Modifications for compensating variations of physical values, e.g. of temperature
- H03K17/145—Modifications for compensating variations of physical values, e.g. of temperature in field-effect transistor switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
Definitions
- FIGS. 1 a and 1 b respectively represent simplified cross-sectional views of a basic design/layout of N-channel and P-Channel VDMOSFETs 1 , 3 , respectively (a structure is cut parallel to sources along a metal oxide semiconductor (MOS) gate—cut lines are shown as AB in FIGS. 2 a and 2 b ).
- a VDMOSFET 1 as shown is made of a doped substrate (e.g., N-channel devices use N+ substrates 104 ; whereas, FIG. 1 b shows a P-channel device using P+ substrates 113 ).
- a lighter-doped epitaxial layer N-channel devices use N-type silicon 103 ; referring to FIG. 1 b , P-channel devices use P-type silicon 112 ).
- a second epitaxial layer referred to as a buffer layer in this example
- SEB single-event burnout
- a region of opposite doping 105 , 105 ′ is implanted/diffused to form a doped region (hereinafter referred to as body) (e.g., N-channel devices use P-type doping (P-body) 105 , 105 ′ and P-channel devices use N-type doping (N-body) 114 , 114 ′).
- body e.g., N-channel devices use P-type doping (P-body) 105 , 105 ′ and P-channel devices use N-type doping (N-body) 114 , 114 ′).
- a higher doped region e.g., 106
- a higher doped region can be implanted/diffused into the exemplary body (e.g., N-channel device use a higher doped P region 106 , 106 ′ and P-channel devices use a higher doped N region 115 , 115 ′).
- doped regions e.g., various bodies (e.g., P-body 105 , 105 ′ or N-body 115 , 115 ′) are manufactured, an opposite doping of exemplary body region (e.g., N-body 107 , 107 ′, P-body 116 , 116 ′) can be implanted/diffused to define source regions (e.g., N-channel devices use N-type doping (e.g., N-body) 107 and P-channel devices use P-type doping (P-body) 116 ).
- a source contact conductive layer 101 (or FIG.
- 1 b , 101 ′ can be deposited connecting source and body regions (e.g., P-body 106 /N-body 107 or N-body 115 /P-body 116 ) forming a portion of an electrical conductive path (shown as one segment of dashed lines through these areas) for an electrical power supply (not shown).
- a dielectric material e.g., a gate oxide 108
- MOS gate 109 is formed with a conductive layer placed on top of gate oxide 108 .
- a portion of P-Body 105 , 105 ′ FIG.
- N-Source 107 or 107 ′ and N Type Silicon epitaxial layer 103 respectively defines semi-conductive channel regions 111 , 111 ′.
- a portion of N-Body 114 , 114 ′ respectively between P-Source 116 or 116 ′ and the P Type Silicon epitaxial layer 112 respectively defines semi-conductive channel regions 111 ′′, 111 ′′′.
- Dashed lines show electrical conductive paths that are formed during operation of FIGS. 1 a and 1 b VDMOSFETs.
- MOSFETs vertical power metal oxide semiconductor field effect transistors
- ITD total ionizing dose
- SEGR single-event gate rupture
- SEB issues SEB issues
- TID Trigger voltage
- MOS gate threshold voltage e.g., gate voltage required to turn on the device can change with TID. If this TID-induced shift is sufficiently large, n-channel devices cannot be turned off and become non-functional.
- threshold voltage of re-channel device shifts below zero volts and becomes negative (e.g., n-channel devices have positive threshold voltages), that device is said to have failed by going into depletion mode.
- An exemplary MOS gate threshold voltage shift of p-channel devices has an opposite effect. P-channel devices become impossible to turn-on without applying an excessive gate voltage that can damage device. Methods have been attempted to help resolve TID issues in power MOSFETs. One method seeks to decrease gate oxide thickness (e.g., a thinner gate oxide traps less charge but makes device more susceptible to SEGR). Another method seeks to ensure high quality of final gate oxide by manufacturing radiation-hardened gate oxides but these rad-hard oxides can be expensive and exhibit variability in radiation hardness from processing lot to processing lot. Another method seeks to apply higher gate voltages to turn-on or turn-off the device but threshold voltages can shift beyond a safe operating voltage; higher gate voltages can also make devices more susceptible to SEGR.
- gate oxide thickness e.g., a thinner gate oxide traps less charge but makes device more susceptible to SEGR.
- Another method seeks to ensure high quality of final gate oxide by manufacturing radiation-hardened gate oxides but these rad-hard oxides can be expensive and exhibit variability in radiation hard
- FIGS. 3 a and 3 b represent a simplified cross sectional view of a basic design/layout of N-channel and P-Channel Junction Field Effect Transistors (JFETs), respectively (the exemplary structure is cut parallel to the drain and source and along the JFET gate).
- JFETs use a reverse biased P-N junction to control current flow by modulating the depletion layer width.
- the JFET consists of a doped semiconductor layer (N-Channel JFETs use N-Type Substrates 122 ; whereas, P-Channel JFETs use P-Type Substrates 123 ).
- a conductive layer can be deposited onto opposite ends of substrate forming the drain contact 120 and source contact 121 of the JFET.
- N-Channel JFET uses a P-type Silicon 117 ; whereas, P-Channel JFETs use N-Type Silicon 119 ) forming the PN junction.
- a conductive layer is deposited onto these opposite doped regions to form the gate contact 118 .
- JFETs Unlike MOSFETs, JFETs exhibit a natural hardness to TID radiation. TID issues in MOSFETs are directly related to trapped charge in gate oxide used to modulate conductive channel; whereas, JFETs do not use dielectric materials to form a conductive channel making it naturally hard to TID.
- SEB a main area of concern is the interaction of a charged particle with the inherent parasitic bipolar transistor where the source acts like an emitter, the body acts like a base and the drain acts like a collector (e.g., see FIG. 4 ).
- SEGR the main area of concern is the interaction of a charged particle strike within neck region defined by the epitaxial region under the gate oxide between adjacent body regions (e.g., see FIG. 4 ).
- SEB linear energy transfer
- SEGR can occur if this current flow disrupts the depletion field in the epitaxial layer under the gate and couples a portion of the drain potential across the gate dielectric sufficient to damage gate dielectric (e.g., see FIG. 5 ).
- SEGR mechanisms can be more complex than presented here but the intent is to only provide a cursory explanation of SEGR.
- Some high-voltage applications involving RF mixers, amplifiers, gain control, and detectors may employ two devices to perform the intended application. If an electrical circuit uses two devices to accomplish the intended application, there can be added costs, more space, and added weight when compared to a single device option.
- DGVDMOSFET Dual-Gate Vertical Double-Diffused Metal Oxide Semiconductor Field Effect Transistor
- DGVDMOSFET Planar Dual-Gate Vertical Double-Diffused Metal Oxide Semiconductor Field Effect Transistor
- an exemplary improved DGVDMOSFET has advantages of both VDMOSFETs and JFETs creating an exemplary innovative new device and related methods thereof: the DGVDMOSFET.
- dual-gate MOSFETs can be built by packaging two MOSFETs into a hybrid-type package with two MOSFETs placed in series but this implementation does not address radiation issues and increases overall cost, weight and size.
- Another implementation can be to fabricate two lateral MOSFETs in series using a monolithic type layout.
- use of lateral MOSFETs can limit a drain-to-source blocking voltages of such devices to applications that are typically less than 100V due to surface area considerations (blocking voltage is basically determined by the lateral spacing between drain and source and doping) and does not address radiation issues.
- Drain-to-source blocking voltage of the VDMOS can be determined by the epitaxial layer thickness and doping; therefore, an exemplary DGVDMOSFET can be fabricated for blocking voltages that exceed 1000V providing a new device for high-voltage applications.
- This exemplary device can be useful in RF type applications such as mixers, gain control, amplifiers, and detectors.
- Exemplary embodiments of the invention can also enhance operational performance in radiation environments, specifically SEB, SEGR, and TID environments.
- Existing power VDMOSFETs can be prone to catastrophic failure from SEB and SEGR, if operated in radiation environments where particles such as neutrons, protons, and heavy ions are present.
- An exemplary DGVDMOSFET structure can provide an enhanced barrier (e.g., enhanced depletion region) to reduce interactions of radiation particles with exemplary embodiments of the invention from suffering from SEB and SEGR conditions.
- Existing power VDMOSFETs can also be prone to TID-induced threshold voltage (VTH) shifts from ionizing radiation environments, which can lead to device failure in their intended application.
- VTH TID-induced threshold voltage
- An exemplary embodiment's independent JFET gate can provide a radiation hardened by design (RHBD) approach to reduce TID effects providing enhanced operational performance beyond an operational failure point of VDMOSFETs (e.g., an exemplary improved JFET gate can allow the exemplary structure to be turned off even after the MOS gate becomes non-functional from TID-induced threshold voltage shifts).
- RHBD radiation hardened by design
- FIG. 6 provides one simplistic application of a dual gate transistor e.g., DGVDMOSFET 200 or 200 ′, used in a RF mixer circuit. Dual gate transistors can be useful in many types of RF applications.
- FIG. 1 a shows a simplified cross sectional side view of a N-channel VDMOSFET
- FIG. 1 b shows a simplified cross sectional side view of a P-channel VDMOSFET
- FIG. 2 a shows a simplified top view of the FIG. 1 a N-channel VDMOSFET
- FIG. 2 b shows a simplified top view of the FIG. 1 b P-channel VDMOSFET
- FIG. 3 a shows a simplified cross sectional view of a N-channel JFET
- FIG. 3 b shows a simplified cross sectional view of a P-channel JFET
- FIG. 4 shows a simplified three-dimensional cross-sectional view of the FIG. 1 a N-channel VDMOSFET showing parasitic bipolar and neck region;
- FIG. 5 shows a simplified pictorial evolution of SEGR stages of a simplified N-channel VDMOSFET such as shown in FIG. 1 a;
- FIG. 6 shows a simplified dual gate transistor used in an exemplary RF mixer application
- FIG. 7 a shows a simplified cross sectional view of an exemplary N-channel DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 7 b shows a simplified cross sectional view of an exemplary P-channel DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 8 a shows a simplified cross sectional side view of an exemplary N-channel DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 8 b shows a simplified cross sectional side view of an exemplary P-channel DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 8 c shows a simplified schematic of N-channel DGVDMOSFET in accordance with one embodiment of the invention.
- FIG. 8 d shows a simplified schematic P-channel DGVDMOSFET in accordance with one embodiment of the invention.
- FIG. 9 a shows one exemplary application (Standard DC Mode Configuration) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 9 b shows one exemplary result or output (Standard DC Mode (I-V) response) from the FIG. 9 a exemplary application in accordance with one embodiment of the invention
- FIG. 10 a shows another exemplary application (Enhanced DC Mode Configuration) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 10 b shows one exemplary result or output (enhanced DC mode (I-V) response) associated with the FIG. 10 a exemplary Enhanced DC Mode configuration associated with one element (e.g., MOS Gate 209 Control) of the exemplary FIG. 10 a DGVDMOSFET exemplary application;
- I-V enhanced DC mode
- FIG. 10 c shows one exemplary result or output (enhanced DC mode (I-V) response) associated with the FIG. 10 a exemplary Enhanced DC Mode configuration associated with another element (e.g., JFET 195 Control) of the exemplary FIG. 10 a DGVDMOSFET exemplary application;
- I-V enhanced DC mode
- FIG. 11 a shows another exemplary application (Dual gate AC Mode Configuration) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 11 b shows one exemplary result or output (dual gate AC mode response e.g., a simplistic mixer output) from the FIG. 11 a exemplary application;
- FIG. 12 shows exemplary methods of operation of exemplary embodiments of the invention comprising various modes of operation
- FIG. 13 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation
- FIG. 14 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation
- FIG. 15 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation
- FIG. 16 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation
- FIG. 17 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation
- FIG. 18 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation
- FIG. 19 shows an exemplary system application (linear voltage regulator) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 20 shows another exemplary system application (switching voltage regulator) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention
- FIG. 21 shows another exemplary system application (RF amplifier) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention.
- FIG. 22 shows another exemplary system application (RF Mixer) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention.
- One exemplary embodiment of the invention describes a design/layout of an innovative device, a DGVDMOSFET, which allows dual gate control of a modified VDMOSFET to be fabricated into a monolithic device (integrate improved elements and functions within a combined VDMOSFET and JFET).
- An exemplary DGVDMOSFET has dual independent gates to control current between drain and source.
- An embodiment includes an exemplary basic fabrication steps (design/layout) of an exemplary DGVDMOSFET incorporating aspects of improvements to a planar VDMOSFET.
- FIGS. 7 a and 7 b represents simplified top-views of cutaway cross-sectional views of two exemplary DGVDMOSFETs 200 (N-channel version), 200 ′ (P-channel version) that includes a JFET structure, e.g., 211 , 217 , and 218 ( FIG. 7 a ) or 211 ′, 219 , 220 ( FIG. 7 b ).
- the DGVDMOSFET (e.g., 200 , 200 ′) design/layout can be fabricated using stripe; rectangular; hexagonal; and other commonly used cell layout schemes.
- 7 a , 7 b views are simplified cutaways showing a lateral slice view of these devices versus a three-dimensional view of a device shown in FIG. 4 .
- Many cells e.g., DGVDMOSFET 200 and/or 200 ′
- DGVDMOSFET 200 and/or 200 ′ can be integrated in parallel providing different current and on-resistance capabilities depending upon number of cells integrated together.
- FIG. 7 a includes a N-Type Silicon ( 203 ) epitaxial layer formed with a MOSFET structure section having a first and second portions 191 , 193 (comprising 209 / 201 / 205 / 207 and 209 / 201 , 205 / 207 ) with the JFET 195 (comprising 211 , 217 , 218 ) formed between the two MOSFET structure portions 191 , 193 .
- the first MOSFET portion 191 includes a MOS Gate 209 disposed with one section over a P-Body 205 and an N+ Type Source section 207 where a Source Contact 201 is disposed within the N+ Type Source section 207 .
- the N+ Type Source section 207 is disposed within the P-body 205 section.
- the second MOSFET portion 193 includes a section of MOS Gate 209 (in this example MOS Gate 209 s are coupled in a three-dimensional structure connecting them which are not shown due to the cutaway nature of this view) which is disposed with one section over the P-Body 205 and the N+ Type Source section 207 where the Source Contact 201 is disposed within the N+ Type Source section 207 .
- the N+ Type Source section 207 is disposed within the P-body 205 section (in this example both P-bodies 205 / 205 , Source Contacts 201 , and N+ Type Sources 207 are coupled in a three-dimensional structure connecting them which is not shown due to the cutaway nature of this view).
- the first and second MOSFET structure portions 191 , 193 and the JFET 195 section are disposed within an N-Type Silicon epitaxial layer 203 .
- FIG. 7 b includes a P-Type Silicon ( 212 ) epitaxial layer formed with a MOSFET structure section having a first and second portions 197 , 199 (comprising 209 ′/ 201 ′/ 214 / 216 and 209 ′/ 201 ′/ 214 / 216 ) with the JFET 198 (comprising 211 ′, 219 , 220 ) formed between the two MOSFET structure portions 197 , 199 .
- Both FIGS. 7 a and 7 b have a cut line (A-B) representing a vertical cut line which defines respective views in FIGS. 8 a and 8 b .
- the first MOSFET portion 197 includes a section of a MOS Gate 209 ′ disposed with one section over a N-body 214 and an P+ Type Source section 216 where a Source Contact 201 ′ is disposed within the P+ Type Source section 216 .
- the P+ Type Source section 216 is disposed within the N-Body 214 section.
- the second MOSFET portion 199 includes the MOS Gate 209 ′ section (in this example both MOS Gate 209 ′ sections are coupled in a three-dimensional structure which is not shown connecting them due to the cutaway of this view) which is disposed with one section over the N-Body 214 and the P+ Type Source section 216 where the Source Contact 201 ′ is disposed within the P+ Type Source section 216 .
- the P+ Type Source section 216 is disposed within the N-body 214 section.
- N-bodies 214 / 214 , Source Contacts 201 ′, and P+ Type Sources 216 are coupled in a three-dimensional structure which is not shown connecting them due to the cutaway nature of this view.
- the first and second MOSFET structure portions 197 , 199 and the JFET 198 section are disposed within a P-Type Silicon epitaxial layer 212 .
- the JFET section 198 is disposed within the P Type epitaxial layer 212 such that it decouples the MOSFET section 197 , 199 on either side of it and is disposed so that the JFET section's 198 outer boundary is in proximity to an outer boundary section of one side of both MOSFET sections 197 , 199 on either side of the JFET section 198 .
- FIG. 8 a shows a simplified side cross-sectional view of the exemplary FIG. 7 a N-channel DGVDMOSFET along FIG. 7 a A-B cut lines in accordance with one embodiment of the invention.
- FIG. 8 a adds elements to the FIG. 7 a structure that cannot be seen in the top cross-sectional cutaway view.
- FIG. 8 a shows two Gate Oxide 208 sections respectively disposed between both MOS Gate Contact 209 sections and N+ Type Source 207 /P-Body 205 sections/N Type epitaxial layer 203 .
- Two categories of semi-conductive channel regions (SCR) are shown 123 , 125 .
- a First Type SCR 123 is created as a result of design of the MOSFET sections 191 , 193 —for example, SCR 123 can be a region in lateral proximity to the N+ Source Type 207 that is underneath a portion of Gate Oxide area 208 and a section of P-Body 205 that is underneath a portion of Gate Oxide 208 that is next to a boundary section of N Type epitaxial layer 203 .
- a Second Type SCR 125 is formed in another region 125 , e.g., underneath a section of Gate Oxide 208 and disposed between P-Body 205 and a section of JFET 195 , e.g., P-Body 217 that forms a lower section of the JFET 195 section.
- a JFET Gate Contact 211 is shown in contact with P Type Body 218 which is in turn surrounded at least in part by P Type layer 217 .
- dashed grey-lines 194 are shown which exemplify production of an electrical field effect created by JFET section 195 when it is biased with an electrical power supply.
- Two sets of black dashed lines 192 , 192 ′ show two separate exemplary electrical paths that are controlled by the MOSFET sections 191 , 193 .
- the First Type SCRs 123 respectively regulates current through the MOSFET sections 191 , 193 .
- the Second Type SCRs 125 perform a second current regulation function associated with electrical signals passing through the MOSFET by opening or closing a semi-conductive path in a section of the N-Type epitaxial layer 203 .
- the MOSFET 191 , 193 sections are sensitive to radiation degradation which can be compensated for or eliminated by use of the Second Type SCR 125 by means of the electrical field effect 194 passing through the epitaxial layer 203 which reduces or cuts off electrical flow path 192 / 192 ′.
- Various negative effects can be mitigated or eliminated by embodiments of this invention such as TID, SEB, and SEGR.
- TID effects can cause the First Type SCR 123 to be permanently turned on; however, TID effects do not fully or partially affect the Second Type SCR 125 .
- FIG. 8 a Additional elements shown in FIG. 8 a include N Type substrate 204 disposed beneath the N Type epitaxial layer 203 as well as a drain contact 202 disposed beneath the N Type substrate 204 .
- FIG. 8 b shows a simplified side cross sectional view of the exemplary FIG. 7 b P-channel DGVDMOSFET along FIG. 7 b A-B cut lines in accordance with one embodiment of the invention.
- FIG. 8 b adds elements to the FIG. 7 b structure that cannot be seen in the top cross-sectional cutaway view.
- the FIG. 8 b structure differs from the FIG. 8 a design in that references to N type silicon becomes P-type silicon references and references to P type silicon become N-type references. Different elements numbers are also used for elements which are different in structure or material composition to the FIG. 8 a design.
- References to the first and second MOSFET sections 197 , 199 differ as well as JFET section 198 .
- FIG. 8 b shows two Gate Oxide 208 ′ sections respectively disposed between both MOS Gate Contact 209 ′ sections and P+ Type Source 216 /N-body 214 sections/P-Type epitaxial layer 212 .
- Two categories of semi-conductive channel regions are shown 123 , 125 which perform a same or similar function as the FIG. 8 a structure's SCRs.
- a First Type SCR 123 is created as a result of design of the MOSFET sections 197 , 199 —for example, SCR 123 can be a region in lateral proximity to the P+Source 216 , that can be formed underneath a portion of Gate Oxide area 208 ′ and a section of N-Body 214 which is underneath a portion of Gate Oxide 208 ′ that is next to a boundary section of P Type epitaxial layer 212 .
- a Second Type SCR 125 is formed in another region, e.g., underneath a section of Gate Oxide 208 ′ and disposed between N-Body 214 and a section of JFET 198 , e.g., N-Body 219 that forms a lower section of the JFET 198 section.
- a JFET Gate Contact 211 ′ is shown in contact with N Type Body 220 which is in turn surrounded at least in part by N body 219 .
- dashed grey-lines 194 are shown which exemplify production of an electrical field effect created by the JFET section 198 when it is biased with an electrical power supply (not shown).
- Two sets of black dashed lines 192 , 192 ′ shows two separate exemplary electrical path that is controlled by the MOSFET sections 197 , 199 .
- the First Type SCRs 123 respectively regulates current through the MOSFET sections 197 , 199 .
- the Second Type SCRs 125 perform a second current regulation function associated with electrical signals passing through the MOSFETs 197 , 199 by opening or closing a semi-conductive path in a section of the P-Type epitaxial layer 212 .
- These dual SCR regions ( 123 / 125 ) provides two independent gate type functions or capabilities which are useful for mixing signals as well as providing benefits from a radiation hardening or performance perspective.
- the MOSFET 197 , 199 sections are sensitive to radiation degradation which can be compensated for or eliminated by use of the Second Type SCR 125 by means of the electrical field effect 194 passing through the P type epitaxial layer 212 which selectively reduces or cuts off electrical flow path 192 / 192 ′.
- TID effects can cause the First Type SCR 123 can be permanently turned on; however, TID effects do not fully or partially affect the Second Type SCR 125 .
- radiation induced currents can cause failure of the MOSFET sections 197 , 199 ; an addition of the JFET structure 198 reduces radiation induced current through these MOSFET sections 197 , 199 facilitating increased radiation tolerance.
- Additional elements shown in FIG. 8 b include P Type substrate 213 disposed beneath the P Type epitaxial layer 212 as well as a drain contact 202 ′ disposed beneath the P Type substrate 213 .
- a control and sensor system could also be provided for (not shown) which would operate embodiments such as the FIG. 7 a / 8 a (and/or 7 b / 8 b ) MOSFET 191 , 193 (or 197 , 199 ) and the JFET 195 (or 198 ) in response to detected radiation fields or energy.
- a control section can have a pulse width modulator (not shown) which would operate the MOSFET sections 191 , 193 (or 197 , 199 ) and JFET 195 (or 198 ) in order to reduce or adjust radiation-induced currents or other aspects of operation of this system.
- a look up table can be utilized by the control section (not shown) which can correlate operation of the MOSFET sections 191 , 193 (or 197 , 199 ) and the JFET section 195 (or 198 ) which in turn generates effects in the First and/or Second Type SCRs 123 , 125 to increase radiation hardening as well as facilitate additional modulation schemes performed by an embodiment of the invention.
- FIG. 8 c shows a simplified schematic of N-channel DGVDMOSFET in accordance with one embodiment of the invention.
- the FIG. 8 c drawing shows an example of a symbolic representation of the FIG. 7 a / 8 a embodiment that show a combination of the two MOSFET sections 191 , 193 as well as the JFET section 195 as well as input/outputs such as MOS Gate 209 , JFET Gate Contact 211 , Source 201 , and Drain 202 .
- Additional elements that are optional include two diodes (e.g., parasitic element diodes) that respectively couple drain 202 to source 201 ; the other diode couples between drain 202 and JFET gate terminal 211 .
- FIG. 8 d shows a simplified schematic of P-channel DGVDMOSFET in accordance with one embodiment of the invention.
- the FIG. 8 d drawing shows an example of a symbolic representation of the FIG. 7 b / 8 b embodiment that show a combination of the two MOSFET sections 197 , 199 as well as the JFET section 198 as well as input/outputs such as MOS Gate 209 ′, JFET Gate Contact 211 ′, Source 201 ′′, and Drain 202 ′.
- Additional elements that are optional include two diodes (e.g., parasitic element diodes) that respectively couple drain 202 ′ to source 201 ; the other diode couples between drain 202 ′ and JFET gate terminal 211 ′.
- FIG. 9 a shows one exemplary application (Standard DC Mode Configuration) of exemplary DGVDMOSFET symbol shown in FIG. 8 c in accordance with one embodiment of the invention.
- FIG. 9 a schematic shows an external gate circuit (e.g., power supply (VG 241 )) and an external drain circuit (e.g., power supply (VD 243 )) coupled to DGVDMOSFET embodiment 200 .
- VG 241 power supply
- VD 243 power supply
- FIG. 9 b shows an example of five exemplary standard DC mode I-V responses or outputs (I-V responses 233 , 235 , 236 , 237 and 239 ) of FIG. 9 a exemplary application (Standard DC Mode configuration) in accordance with one embodiment of the invention.
- FIG. 9 b shows an example of five exemplary standard DC mode I-V responses or outputs (I-V responses 233 , 235 , 236 , 237 and 239 ) of FIG. 9 a exemplary application (Standard DC Mode configuration) in accordance with one embodiment of the invention.
- Cut-off 233 can be operable in FIG. 9 a exemplary application if power supply VG 241 delivers a voltage less than MOS's gate threshold voltage (Vth_MOS) to effect a reduction or elimination of DGVDMOSFET's current flow through MOS's semi-conductive channel region 123 .
- Linear 231 can be operable in FIG.
- Vth_MOS MOS's gate threshold voltage
- Saturation 232 can be operable in FIG. 9 a exemplary application if power supply VG 241 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter saturated DGVDMOSFET current flow (saturation) through MOS's semi-conductive channel region 123 , where power supply VD 243 delivers a voltage greater than the difference of VG 241 and Vth_MOS.
- FIG. 9 b does not necessarily represent an actual DGVDMOSFET's I-V response but is only provided to show how one embodiment of an exemplary DGVDMOSFET would operate in a standard DC mode configuration. Operation of an exemplary DGVDMOSFET in a standard DC mode configuration may not enhance TID performance but may provide higher SEB and SEGR performance.
- FIG. 10 a shows another exemplary application (Enhanced DC mode configuration) of exemplary DGVDMOSFET 200 symbol shown in FIG. 8 c in accordance with one embodiment of the invention.
- FIG. 10 a schematic shows a MOS gate power supply (VG 253 ), a JFET gate power supply (VG 2 251 ), and a drain power supply (VD 255 ) coupled to the DGVDMOSFET embodiment 200 .
- the MOSFET gate 191 , 193 and the JFET gate 195 can be used separately or together to assist in controlling DGVDMOSFET's current flow.
- the exemplary DGVDMOSFET 200 can be configured to function similar to a standard VDMOSFET (e.g., VG 2 251 voltage can be set to zero or other fixed voltage) providing similar electrical and performance of a standard VDMOSFET; can be configured to function similar to a standard JFET (e.g., VG 253 voltage can be greater than the MOS's threshold voltage) providing similar electrical and performance of a standard JFET; or can be configured to function similar to JFET connected in series to VDMOSFET (e.g., VG 253 and VG 2 251 voltages can be used to control current flow) providing similar electrical and performance of a series connection.
- a standard VDMOSFET e.g., VG 2 251 voltage can be set to zero or other fixed voltage
- VG 253 voltage can be greater than the MOS's threshold voltage
- JFET connected in series to VDMOSFET e.g., VG 253 and VG 2 251 voltages can be used to control
- the exemplary embodiment DGVDMOSFET 200 may exhibit higher on-resistance and lower power density compared to either a standard VDMOSFET or JFET but the exemplary DGVDMOSFET's die area is comparable to either a standard VDMOSFET's or JFET's die area (e.g., of comparable voltage and current capabilities).
- the exemplary DGVDMOSFET 200 offers enhanced operational and performance capabilities with respect to TID, SEB, and SEGR.
- Enhanced TID performance can occur because the exemplary JFET gate 195 can continue to function even after high levels of TID exposure (e.g., TID>1 Mrd) and can be used to control current flow through the DGVDMOSFET's semi-conducting channel region 125 even after MOSFET 191 , 193 sections become non-functional due to TID-induced voltage shift of MOS's threshold voltage.
- Enhanced SEGR performance can occur because the exemplary JFET gate 195 can be used to produce an electrical field 194 as shown in FIG. 8 a / FIG. 8 b (e.g., depletion layer), where an electrical field 194 provides an additional barrier to retard drain potentials from coupling to the exemplary MOSFET gate oxide 208 during heavy ion strikes.
- Additional enhanced SEGR performance can occur because MOSFET 191 , 193 sections can be configured to conduct current (e.g., FIG. 10 c , linear 251 or saturation 254 ) and JFET gate 195 can be configured to block current (e.g., FIG. 10 c , cut-off 256 ), where under this exemplary configuration coupling of drain voltage to the gate oxide 208 is minimized.
- Enhanced SEB performance can occur because the exemplary JFET gate 195 can be used to produce an electrical field 194 (e.g., formation of a depletion field), where formation of electrical field 194 collects a portion of heavy ion generated photocurrent to effect a reduction in heavy ion generated photocurrent collected through the MOSFET 191 , 193 .
- FIG. 10 a represents an exemplary DGVDMOSFET schematically connected to operate in an enhanced DC mode configuration.
- FIG. 10 b represents an exemplary current-voltage (I-V) response of an exemplary DGVDMOSFET 200 when exemplary JFET gate 195 is at a fixed bias and the MOSFET 191 , 193 sections modulate current flow.
- FIG. 10 b demonstrates an example of five exemplary enhanced DC mode I-V responses or outputs (I-V responses 247 , 248 , 249 , and 250 ) of FIG. 10 a exemplary application (enhance DC mode configuration) in accordance with one embodiment of the invention.
- FIG. 10 b also depicts three regions of exemplary operation (cut-off 247 , linear 245 , and saturation 246 ). Cut-off 247 can be operable in FIG.
- Linear 245 can be operable in FIG. 10 a exemplary example if power supply VG 253 delivers a voltage less than MOS's gate threshold voltage (Vth_MOS) to effect a reduction or elimination of DGVDMOSFET's current flow through MOS's semi-conductive channel region 123 .
- Linear 245 can be operable in FIG. 10 a exemplary example if power supply VG 253 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter a resistive DGVDMOSFET current flow through MOS's semi-conductive channel region 123 , where power supply VD 255 delivers a voltage less than the difference of VG and Vth_MOS.
- Saturation 246 can be operable in FIG.
- FIG. 10 a exemplary example if power supply VG 253 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter limited DGVDMOSFET current flow (saturation) through MOS's semi-conductive channel region 123 , where power supply VD 255 delivers a voltage greater than the difference of VG and Vth_MOS.
- FIG. 10 c represents a current-voltage (I-V) characteristic of an exemplary DGVDMOSFET 200 when exemplary MOSFET 191 , 193 is at a fixed bias and the JFET gate 195 modulates current flow.
- I-V current-voltage
- FIG. 10 c shows examples of exemplary responses or outputs (I-V responses 256 , 257 , 258 , 259 and 260 ) of enhanced DC Mode operation from FIG. 10 a exemplary application in accordance with one embodiment of the invention.
- FIG. 10 c also depicts exemplary examples of three regions of exemplary operation, cut-off 256 , Linear 252 , and saturation 254 .
- Cut-off 252 can be operable in FIG. 10 a exemplary example when power supply VG 2 251 delivers a voltage less than JFET's gate threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET's current flow through JFET's semi-conductive channel region 125 .
- Linear 252 can be operable in FIG.
- Vth_JFET JFET's gate threshold voltage
- Saturation 254 can be operable in FIG.
- FIGS. 10 b and 10 c do not represent actual DGVDMOSFET's I-V characteristics and are only provided to demonstrate application of an exemplary DGVDMOSFET in enhanced DC mode.
- FIG. 11 a shows another exemplary application (e.g., enhanced AC mode configuration) of exemplary DGVDMOSFET 200 symbol shown in FIG. 8 c in accordance with one embodiment of the invention.
- FIG. 11 a schematic shows a MOS gate power supply (VG) 267 , a MOS gate alternating current (AC) power supply (VAC) 265 , a JFET gate power supply (VG 2 ) 263 , a JFET gate AC power supply (VAC 2 ) 261 , and a drain power supply (VD) 266 coupled to the DGVDMOSFET embodiment 200 .
- VG MOS gate power supply
- AC MOS gate alternating current
- VAC JFET gate power supply
- VD drain power supply
- the MOSFET gate 191 , 193 and the JFET gate 195 can be operated separately or together to assist in controlling DC current flow and AC current flow in phase or out of phase to allow a variety of different radio frequency (RF) type applications such as RF mixers, RF amplifiers, and RF gain control.
- RF radio frequency
- This exemplary operational mode provides application designers functionality of two independent gates in a variety of RF type applications.
- the FIG. 11 a exemplary embodiment represents a simplistic RF mixer application using exemplary DGVDMOSFET 200 in a dual-gate AC mode operation.
- FIG. 11 b represents one exemplary output using a RF mixer type circuit.
- FIG. 11 b does not represent an actual DGVDMOSFET output but is provided to demonstrate its potential application.
- Exemplary embodiments of a DGVDMOSFET can provide for a design/layout of a monolithic structure with two independent gate terminals to modulate drain-to-source current flow (e.g., can replace two devices, where devices are slaved together).
- an exemplary embodiment can be used as a radio frequency (RF) mixer, modulator, demodulator, gain control element and more in analog circuits.
- RF radio frequency
- Exemplary gate functionality can be operated out of phase or operated in phase depending upon the desired circuit application allowing greater circuit design flexibility in this example due to how two-gate functionality in accordance with an embodiment of the invention can be independent in operation.
- a monolithic solution lowers costs, size, and weight and increase reliability which are important factors in a majority of strategic and space systems.
- conventional non-radiation hardened VDMOSFETs cannot operate in TID environments without degraded performance of the MOSFET sections 191 , 193 where a MOS gate may become non-functional (non-functional performance of commercial VDMOSFETs with ionizing radiation can be less than 10 krd(Si)).
- An addition of an exemplary JFET gate 195 provides a different configuration and method to control current flow.
- An exemplary JFET gate 195 is not directly degraded by TID radiation (e.g., functional performance of JFETs with ionizing radiation can be greater than 1 Mrd(Si)). If MOSFET sections 191 , 193 are degraded or become non-functional due to TID, then an exemplary JFET gate 195 can be used to extend the operating performance of device.
- An exemplary embodiment can be designed and fabricated to operate at drain-to-source voltages from a few volts to voltages over a thousand volts.
- a drain-to-source breakdown voltage (BVDSS) of an exemplary embodiment can be determined by epitaxial doping and epitaxial thickness.
- An exemplary design and layout of an overall embodiment can be minimal. Therefore, exemplary embodiments with different blocking voltages can be realized.
- An exemplary embodiment can be designed and fabricated to handle different currents.
- the current handling capability of a fabricated device can be increased by placing an exemplary embodiment into an array of parallel cells that can be a few cells to several thousand cells placed in parallel. Therefore, embodiments with different current capabilities can be realized.
- An exemplary JFET gate 195 can maintain operational capability in particle-rich radiation environment such as a space environment.
- an exemplary JFET gate 195 can increase failure threshold voltages for SEB and SEGR, which increases the operational capabilities of exemplary embodiments in a particular type of radiation environment (higher failure thresholds equate to higher radiation performance). Higher SEB and SEGR failure threshold voltages are desirable in short- and long-term applications where embodiments of the invention are subjected to particles (SEB and SEGR can be catastrophic).
- SEB performance can be improved with an exemplary embodiment as particle-induced photocurrent, which normally flows into Body 205 or 214 can decrease as a portion of induced photocurrent can flow into the exemplary JFET 195 's Body 217 or 219 . Reducing induced photocurrent flowing into exemplary Body 205 can increase a threshold for SEB.
- SEGR performance can be improved using an embodiment of the invention because particle-induced coupling of a portion of the drain potential across an exemplary gate oxide 208 can be impeded by an added depletion field induced by an exemplary JFET section 195 .
- An exemplary embodiment can provide for two independent body diodes (e.g., a source body diode and a JFET body diode). Having two independent diodes allows more flexibility in circuit designs. As an example, a source body diode or JFET body diode can be used as a freewheeling diode in switching applications.
- An exemplary embodiment can be fabricated using different semiconductor and dielectric materials e.g., Silicon (Si) and Silicon Dioxide (SiO2).
- Other semiconductor materials such as silicon carbide (SiC) and Gallium Arsenide (GaAs) can be used instead of silicon for, e.g., an epitaxial layer and doped implants/diffusions.
- Use of other semiconductor materials such as SiC provides structures with different characteristics and higher performance characteristics. As an example, SiC has a higher band gap, breakdown field, and thermal conductivity when compared to silicon. These types of characteristics yield higher current density, higher voltages, and better thermal conductivity.
- Other dielectric materials can be used to form, e.g., gate oxide 208 .
- Alternative materials can include but are not limited to SiN, Al 2 O 3 , and HfO2.
- Use of other dielectrics provides different performance characteristics such as increasing or decreasing oxide capacitance which affects switching performance.
- FIG. 12 shows exemplary methods of operation 300 of exemplary embodiments of the invention. These methods of operation can be triggered based on determinations that operation of one or more functionalities of an exemplary embodiment of the invention is needed such as, for example, detecting a condition to alter operation of the MOSFET sections 191 , 193 in response to an electromagnetic interference event. Another determination for need to operate exemplary functionality is determining additional or different current or voltage control operations are desirable such as in RF system operation such as described above.
- operation of an exemplary embodiment of the invention can commence such as, for example, at step 301 , a standard DC mode of operation can be initiated comprising providing an exemplary embodiment of the invention such as described above; at step 303 , shorting JFET Gate 211 to Source 201 ; at step 305 , applying DC voltage to drain 202 ; at step 307 , applying voltage to MOS Gate 209 to control output, current and voltage, between drain 202 and source 201 .
- a second mode can comprise initiating an Enhanced DC Mode of Operation using a design such as described herein/above at step 317 ; at step 319 , apply DC voltage to drain 202 ; steps 321 / 325 can be executed concurrently or separately following a step shown as respectively preceding these steps comprising applying DC voltage to JFET gate 211 and applying DC voltage to MOS gate 209 ; steps 323 and 327 can be executed concurrently or separately comprising applying voltage to MOS gate 209 to control current/voltage between drain 202 and source 201 as well as applying voltage to JFET gate 211 to control current/voltage between drain 202 and source 201 .
- exemplary processing provides an Enhanced AC Mode configuration in accordance with an exemplary embodiment of the invention, such as discussed above/herein and initiates an Enhanced AC Mode Operation at step 331 ; at Step 333 , applying DC voltage to drain 202 ; at step 335 , applying DC voltage and AC input to JFET Gate 211 ; at step 337 , applying DC voltage and AC input to MOS gate 209 ; and at Step 339 , producing output using said Enhanced AC Mode Configuration of a mixer of AC inputs of JFET Gate 211 and MOS Gate 209 .
- FIG. 13 shows another exemplary method of operation in accordance with another embodiment of the invention.
- processing begins with providing an embodiment and configuration of an exemplary embodiment of the invention such as, for example, an Alternative Enhanced DC Mode of Operation Configuration, such as discussed herein/above at step 317 ; at step 319 , applying DC voltage to drain 202 ; steps 321 , 325 , and 341 (each following step 319 ) can be executed substantially concurrently or separately following a step shown as preceding these steps wherein step 321 comprises applying DC voltage to JFET Gate 211 , applying DC voltage to MOS Gate 209 , and under an “Off State” condition (e.g., when MOS Gate is turned off or not having power applied to one or more portions of it), apply reverse bias to the JFET Gate 211 ; steps 323 , 327 , and 343 (respectively following step 321 , 325 , and 341 ) can be executed substantially concurrently or separately following a step shown as preceding these steps wherein step 323
- FIG. 14 shows another exemplary method of operation 401 in accordance with another embodiment of the invention.
- a process begins by initiating standard DC mode configuration step 403 by connecting the JFET gate 211 to the source 201 step 405 and by connecting drain 202 to an external circuit (e.g., power supply) step 407 .
- the next step is a determination depending upon system requirements of how to configure exemplary functionality such as whether to initiate MOS cut-off mode step 409 ; whether to initiate MOS linear mode step 411 ; whether to initiate MOS saturation mode step 413 ; or whether to initiate Switch mode step 421 .
- MOS cut-off mode step 415 is initiated by connecting MOS gate 209 to an external circuit that delivers a gate voltage to MOS gate 209 up to a voltage less than the MOS's threshold voltage (Vth_MOS) to effect a reduction or elimination of DGVDMOSFET current flow through the semi-conductive channel region (e.g., SCR 123 ).
- MOS linear mode step 417 is initiated by connecting MOS gate 209 to an external circuit that delivers a gate voltage to MOS gate 209 that is greater than the MOS's threshold voltage (Vth_MOS) to effect and to modulate a resistive current-voltage (I-V) response through MOS's semi-conductive channel region (e.g., SCR 123 ).
- MOS saturation mode step 419 is initiated by connecting MOS gate 209 to an external circuit that delivers a gate voltage to MOS gate 209 that is greater than the MOS's threshold voltage (Vth_MOS) to effect and to modulate a resistive current-voltage (I-V) response through MOS's semi-conductive channel region (e.g., SCR 123 ).
- Switch mode step 423 is initiated by connecting MOS gate 209 to an external circuit to deliver a gate voltage VG to MOS gate 209 to switch the DGVDMOSFET's I-V response between cut-off step 415 and linear step 417 ; between linear step 417 and saturation step 419 ; or between cut-off step 415 and saturation step 419 to effect a predetermined DGVDMOSFET's (I-V) response operable to a duty cycle to effect said predetermined I-V response.
- VG gate voltage
- VTH_MOS gate threshold voltage
- FIG. 15 shows another exemplary method of operation 501 in accordance with another embodiment of the invention.
- a process begins by initiating enhanced DC mode step 503 by connecting the MOS gate 209 to an external circuit executing cut-off mode step 507 and by connecting drain 202 to an external circuit (e.g., power supply) step 505 .
- the process continues by initiating an enhanced radiation mode step 513 providing a configuration to enhance performance of the DGVDMOSFET functionality when the embodiment of the invention is subjected to radiation effects (e.g., TID 515 , SEB 517 , and SEGR 519 ), by executing JFET cut off mode step 509 .
- radiation effects e.g., TID 515 , SEB 517 , and SEGR 519
- Cut off 511 is initiated by connecting JFET gate 211 to an external circuit that delivers a gate voltage to JFET gate 211 up to a voltage less than JFET's threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET current flow through the semi-conductive channel region (e.g., SCR 125 ).
- Vth_JFET JFET's threshold voltage
- FIG. 16 shows another exemplary method of operation 601 in accordance with another embodiment of the invention.
- a process begins by initiating enhanced DC mode step 603 by connecting the MOS gate 209 to an external circuit executing linear mode step 607 and by connecting drain 202 to an external circuit (e.g., power supply) step 605 .
- the process continues by initiating enhanced radiation mode step 615 providing a configuration to enhance performance of the DGVDMOSFET functionality when the embodiment of the invention is subjected to radiation effects (e.g., TID 617 , SEB 619 , and SEGR 621 ), by executing JFET cut off mode step 609 .
- Other processes can be employed by initiating JFET linear mode step 611 ; or by initiating switch mode step 625 .
- Cut off step 613 is initiated by connecting JFET gate 211 to an external circuit that delivers a gate voltage to JFET gate 211 up to a voltage less than the JFET's threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET current flow through JFET's semi-conductive channel region (e.g., SCR 125 ).
- Linear mode step 623 is initiated by connecting JFET gate 211 to an external circuit that delivers a gate voltage to JFET gate 211 that is greater than JFET's threshold voltage (Vth_JFET) to effect and to modulate a resistive current-voltage (I-V) response through JFET's semi-conductive channel region (e.g., SCR 125 ).
- drain voltages must be less than the difference between the gate voltage (VG) and the gate threshold voltage (VTH_JFET) (e.g., VD ⁇ VG ⁇ Vth_JFET).
- the process can evolve by initiating switch mode step 625 .
- Switch mode step 627 is initiated by connecting JFET gate 211 to an external circuit to deliver a gate voltage VG to JFET gate 211 to switch DGVDMOSFET's I-V response between cut-off step 613 and linear step 623 to effect a predetermined DGVDMOSFET's (I-V) response operable to a duty cycle to effect said predetermined I-V response.
- FIG. 17 shows another exemplary method of operation 701 in accordance with another embodiment of the invention.
- a process begins by initiating enhanced DC mode step 703 by connecting the MOS gate 209 to an external circuit executing saturation mode step 707 and by connecting drain 202 to an external circuit (e.g., power supply) step 705 .
- the process continues by initiating enhanced radiation mode step 717 providing a configuration to enhance performance of the DGVDMOSFET functionality when the embodiment of the invention is subjected to radiation effects (e.g., TID 719 , SEB 721 , and SEGR 723 ), by executing JFET cut off mode step 709 .
- Other processes can be employed by initiating JFET saturation mode step 711 ; or by initiating switch mode step 725 .
- Cut off step 713 is initiated by connecting JFET gate 211 to an external circuit that delivers a gate voltage to JFET gate 211 up to a voltage less than the JFET's threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET current flow through JFET's semi-conductive channel region (e.g., SCR 125 ).
- Saturation mode step 715 is initiated by connecting JFET gate 211 to an external circuit that delivers a gate voltage to JFET gate 211 that is greater than JFET's threshold voltage (Vth_JFET) to effect and to modulate a saturated current-voltage (I-V) response through JFET's semi-conductive channel region (e.g., SCR 125 ).
- drain voltages must be greater than the difference between the gate voltage (VG) and the gate threshold voltage (VTH_JFET) (e.g., VD>VG ⁇ Vth_JFET).
- Switch mode step 727 is initiated by connecting JFET gate 211 to an external circuit to deliver a gate voltage VG to JFET gate 211 to switch DGVDMOSFET's I-V response between cut-off step 613 and saturation step 715 to effect a predetermined DGVDMOSFET's (I-V) response operable to a duty cycle to effect said predetermined I-V response.
- FIG. 18 shows another exemplary method of operation 801 in accordance with another embodiment of the invention.
- a process begins by initiating enhanced AC mode step 803 by connecting the drain 202 to an external circuit (e.g., power supply) step 805 .
- the process continues by initiating either linear mode (MOS linear mode step 807 and JFET linear mode step 809 ) or saturation mode (MOS saturation mode step 811 and JFET saturation mode step 813 ).
- Another process can be employed by initiating RF mode step 815 .
- RF mode of MOS gate step 817 begins by connecting the MOS gate 209 to an external AC circuit to deliver an AC voltage to MOS gate 209 to modulate DGVDMOSFET's I-V response to effect a modulation of AC input into DGVDMOSFET's response.
- RF mode of JFET gate step 819 begins by connecting the JFET gate 211 to an external AC circuit to deliver an AC voltage to JFET gate 211 to modulate DGVDMOSFET's I-V response to effect a modulation of AC input into DGVDMOSFET's response.
- RF mode of both MOS gate and JFET gate step 821 begins by connecting MOS gate 209 and JFET gate 211 to external AC circuits to deliver AC voltages (in phase or out of phase) to said gates to modulate DGVDMOSFET response to said AC inputs.
- FIG. 19 shows a block diagram of an exemplary application (a linear voltage regulator 901 ) where an exemplary DGVDMOSFET 905 is connected to an unregulated DC power source 903 (e.g., 28 volt solar array).
- the exemplary JFET gate 211 is connected to source 201 .
- the source 201 is connected to an output sensing circuit 907 (e.g., a resistor divider network).
- the sensing network 907 provides an input to an external feedback amplifier 909 with the other input being a reference voltage 911 . If regulated DC output voltage 915 is lower or higher than expected output voltage, said feedback amplifier 909 adjusts the MOS gate voltage until expected output voltage is achieved.
- FIG. 20 shows a block diagram of an exemplary application (a switching voltage regulator 931 ) where an exemplary DGVDMOSFET 935 is connected to an unregulated DC power source 933 (e.g., 28 volt solar array).
- the exemplary MOS gate 209 is connected to a MOS gate circuit 937 where MOS gate 209 is configured to operate in saturation mode.
- the source 201 is connected to an output sensing circuit 939 (e.g., a resistor divider network).
- the sensing network 939 provides an input to an external feedback amplifier 941 with the other input being a reference voltage 943 . If regulated DC output voltage 947 is lower or higher than expected output voltage, said feedback amplifier 941 adjusts the JFET gate drive circuit 945 (e.g., pulse width modulator) to adjust the duty cycle in switch mode until desired output voltage is achieved.
- JFET gate drive circuit 945 e.g., pulse width modulator
- FIG. 21 shows a block diagram of an exemplary application (RF amplifier 961 ) where an exemplary DGVDMOSFET 965 is connected to DC power source 963 (e.g., regulated voltage).
- the exemplary JFET gate 211 is connected to source 201 .
- the exemplary MOS gate 209 is connected to RF input with a DC offset circuit 969 where MOS gate 209 is configured to operate in linear AC mode.
- the drain 202 is connected to a DC blocking circuit 967 (e.g., capacitor), where DC blocking circuit 967 removes DC voltage from RF output 971 .
- DC blocking circuit 967 e.g., capacitor
- FIG. 22 shows a block diagram of an exemplary application (RF mixer 981 ) where an exemplary DGVDMOSFET 985 is connected to DC power source 983 (e.g., regulated voltage).
- the exemplary JFET gate 211 is connected to local oscillator (LO) with DC offset circuit 987 , where the JFET gate 211 is configured to operate in linear AC mode.
- the exemplary MOS gate 209 is connected to RF input with DC offset circuit 989 where the MOS gate 209 is configured to operate in linear AC mode.
- the drain 202 is also connected to DC blocking circuit 991 (e.g., capacitor), where DC blocking circuit 991 removes DC voltage from RF mixer output 993 .
- DC blocking circuit 991 e.g., capacitor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
- The present application claims priority to U.S. Provisional Patent Application Ser. No. 62/116,129, filed Feb. 13, 2015, entitled “SYSTEMS AND METHODS FOR CONTROLLING CURRENT OR MITIGATING ELECTROMAGNETIC OR RADIATION INTERFERENCE EFFECTS USING MULTIPLE AND DIFFERENT SEMI-CONDUCTIVE CHANNEL REGIONS GENERATING STRUCTURES FORMED BY MULTIPLE DIFFERENT SEMI-CONDUCTIVE ELECTRICAL CURRENT OR VOLTAGE CONTROL STRUCTURES,” the disclosure of which is expressly incorporated by reference herein.
- The invention described herein was made in the performance of official duties by employees of the Department of the Navy and may be manufactured, used and licensed by or for the United States Government for any governmental purpose without payment of any royalties thereon. This invention (Navy Case 200,100) is assigned to the United States Government and is available for licensing for commercial purposes. Licensing and technical inquiries may be directed to the Technology Transfer Office, Naval Surface Warfare Center Crane, email: Cran_CTO@navy.mil.
- Vertical Double-Diffused Metal Oxide Field Effect Transistors (VDMOSFETs) are used because of their high-current, high-voltage capabilities.
FIGS. 1a and 1b respectively represent simplified cross-sectional views of a basic design/layout of N-channel and P-Channel VDMOSFETs FIGS. 2a and 2b ). A VDMOSFET 1 as shown is made of a doped substrate (e.g., N-channel devices useN+ substrates 104; whereas,FIG. 1b shows a P-channel device using P+ substrates 113). A conductive layer contacting bottom of a substrate 104 (for N-channel) or substrate 113 (for P-channel) forms adrain contact 102. At top ofsubstrate type silicon 103; referring toFIG. 1b , P-channel devices use P-type silicon 112). In an alternative embodiment (not shown), a second epitaxial layer (referred to as a buffer layer in this example) can be added betweenlayers 103 and 104 (for N-channel) to enhance single-event burnout (SEB) performance. At a surface of the exemplaryepitaxial layer 103, a region ofopposite doping P region N region body body body body FIG. 1b , 101′) can be deposited connecting source and body regions (e.g., P-body 106/N-body 107 or N-body 115/P-body 116) forming a portion of an electrical conductive path (shown as one segment of dashed lines through these areas) for an electrical power supply (not shown). A dielectric material (e.g., a gate oxide 108) can be placed on top of epitaxial region (N type silicon 103) and over/betweenN source 107 andN source 107′. InFIG. 1a , MOSgate 109 is formed with a conductive layer placed on top ofgate oxide 108. A portion of P-Body FIG. 1a ) respectively between N-Source 107 or 107′ and N Type Siliconepitaxial layer 103 respectively definessemi-conductive channel regions FIG. 1b , a portion of N-Body Source epitaxial layer 112 respectively definessemi-conductive channel regions 111″, 111′″. Dashed lines show electrical conductive paths that are formed during operation ofFIGS. 1a and 1b VDMOSFETs. - Attempts have been made, including numerous modifications/improvements in the design, layout, and fabrication of vertical power metal oxide semiconductor field effect transistors (MOSFETs) to enhance their electrical and radiation performance (e.g., increase power density, decrease on-resistance, increase radiation hardness, etc.). For example, radiation-tolerant power, MOSFETs were first introduced to address requirements of various military and space applications. Since then, numerous radiation issues have been discovered and significant research has been devoted to resolving specific radiation issues (e.g., total ionizing dose (TID), single-event gate rupture (SEGR), and SEB issues).
- Under some types of MOSFET operation, application of an appropriate gate voltage (a gate voltage greater than the device's gate threshold voltage) forms a conducting path between source and drain allowing current to flow (device is turned on). Higher gate voltages equates to higher current flow. One effect of TID is to trap charge in gate oxide, which causes MOS gate threshold voltage to shift (e.g., gate voltage required to turn on the device can change with TID). If this TID-induced shift is sufficiently large, n-channel devices cannot be turned off and become non-functional. When threshold voltage of re-channel device shifts below zero volts and becomes negative (e.g., n-channel devices have positive threshold voltages), that device is said to have failed by going into depletion mode. An exemplary MOS gate threshold voltage shift of p-channel devices has an opposite effect. P-channel devices become impossible to turn-on without applying an excessive gate voltage that can damage device. Methods have been attempted to help resolve TID issues in power MOSFETs. One method seeks to decrease gate oxide thickness (e.g., a thinner gate oxide traps less charge but makes device more susceptible to SEGR). Another method seeks to ensure high quality of final gate oxide by manufacturing radiation-hardened gate oxides but these rad-hard oxides can be expensive and exhibit variability in radiation hardness from processing lot to processing lot. Another method seeks to apply higher gate voltages to turn-on or turn-off the device but threshold voltages can shift beyond a safe operating voltage; higher gate voltages can also make devices more susceptible to SEGR.
-
FIGS. 3a and 3b represent a simplified cross sectional view of a basic design/layout of N-channel and P-Channel Junction Field Effect Transistors (JFETs), respectively (the exemplary structure is cut parallel to the drain and source and along the JFET gate). Unlike MOSFETs, the JFETs use a reverse biased P-N junction to control current flow by modulating the depletion layer width. The JFET consists of a doped semiconductor layer (N-Channel JFETs use N-Type Substrates 122; whereas, P-Channel JFETs use P-Type Substrates 123). A conductive layer can be deposited onto opposite ends of substrate forming thedrain contact 120 andsource contact 121 of the JFET. Toward a middle of 122 or 123, a region is implanted/diffused with opposite doping of the substrate (N-Channel JFET uses a P-type Silicon 117; whereas, P-Channel JFETs use N-Type Silicon 119) forming the PN junction. A conductive layer is deposited onto these opposite doped regions to form thegate contact 118. - Unlike MOSFETs, JFETs exhibit a natural hardness to TID radiation. TID issues in MOSFETs are directly related to trapped charge in gate oxide used to modulate conductive channel; whereas, JFETs do not use dielectric materials to form a conductive channel making it naturally hard to TID.
- Power MOSFETs subjected to space-like environments or other particle-enriched environments are prone to SEGR and SEB, which can adversely affect the device's performance and may even cause system failure. For SEB, a main area of concern is the interaction of a charged particle with the inherent parasitic bipolar transistor where the source acts like an emitter, the body acts like a base and the drain acts like a collector (e.g., see
FIG. 4 ). For SEGR, the main area of concern is the interaction of a charged particle strike within neck region defined by the epitaxial region under the gate oxide between adjacent body regions (e.g., seeFIG. 4 ). When a charge particle traverses a semiconductor material, it sheds energy in accordance with its linear energy transfer (LET) function for that material and that energy can create electron-hole pairs along particle's path. In presence of an electric field, these electron-hole pairs can separate producing unwanted current flow. A resultant current flow under certain conditions can lead to SEB or SEGR. SEB can occur if this current flow is sufficient to locally turn on the parasitic bipolar transistor which if not interrupted may lead to thermal runaway (device fails catastrophically). SEB mechanisms can be more complex than presented here but the intent is to only provide a cursory explanation of SEB. SEGR can occur if this current flow disrupts the depletion field in the epitaxial layer under the gate and couples a portion of the drain potential across the gate dielectric sufficient to damage gate dielectric (e.g., seeFIG. 5 ). SEGR mechanisms can be more complex than presented here but the intent is to only provide a cursory explanation of SEGR. - Some high-voltage applications involving RF mixers, amplifiers, gain control, and detectors may employ two devices to perform the intended application. If an electrical circuit uses two devices to accomplish the intended application, there can be added costs, more space, and added weight when compared to a single device option.
- One exemplary embodiment of the invention, such as a planar Dual-Gate Vertical Double-Diffused Metal Oxide Semiconductor Field Effect Transistor (DGVDMOSFET), can be a layout/design of an innovative structure integrating and combining aspects of improved VDMOSFETs and operational gates of JFETs. Therefore, an exemplary improved DGVDMOSFET has advantages of both VDMOSFETs and JFETs creating an exemplary innovative new device and related methods thereof: the DGVDMOSFET. Presently, dual-gate MOSFETs can be built by packaging two MOSFETs into a hybrid-type package with two MOSFETs placed in series but this implementation does not address radiation issues and increases overall cost, weight and size. Another implementation can be to fabricate two lateral MOSFETs in series using a monolithic type layout. However, use of lateral MOSFETs can limit a drain-to-source blocking voltages of such devices to applications that are typically less than 100V due to surface area considerations (blocking voltage is basically determined by the lateral spacing between drain and source and doping) and does not address radiation issues. Drain-to-source blocking voltage of the VDMOS can be determined by the epitaxial layer thickness and doping; therefore, an exemplary DGVDMOSFET can be fabricated for blocking voltages that exceed 1000V providing a new device for high-voltage applications. This exemplary device can be useful in RF type applications such as mixers, gain control, amplifiers, and detectors.
- Exemplary embodiments of the invention, e.g., DGVDMOSFET, can also enhance operational performance in radiation environments, specifically SEB, SEGR, and TID environments. Existing power VDMOSFETs can be prone to catastrophic failure from SEB and SEGR, if operated in radiation environments where particles such as neutrons, protons, and heavy ions are present. An exemplary DGVDMOSFET structure can provide an enhanced barrier (e.g., enhanced depletion region) to reduce interactions of radiation particles with exemplary embodiments of the invention from suffering from SEB and SEGR conditions. Existing power VDMOSFETs can also be prone to TID-induced threshold voltage (VTH) shifts from ionizing radiation environments, which can lead to device failure in their intended application. An exemplary embodiment's independent JFET gate can provide a radiation hardened by design (RHBD) approach to reduce TID effects providing enhanced operational performance beyond an operational failure point of VDMOSFETs (e.g., an exemplary improved JFET gate can allow the exemplary structure to be turned off even after the MOS gate becomes non-functional from TID-induced threshold voltage shifts).
-
FIG. 6 provides one simplistic application of a dual gate transistor e.g.,DGVDMOSFET - Additional features and advantages of the present invention will become apparent to those skilled in the art upon consideration of the following detailed description of the illustrative embodiment(s) exemplifying some best modes of carrying out the invention as presently perceived.
- The detailed description of the drawings particularly refers to the accompanying figures in which:
-
FIG. 1a shows a simplified cross sectional side view of a N-channel VDMOSFET; -
FIG. 1b shows a simplified cross sectional side view of a P-channel VDMOSFET; -
FIG. 2a shows a simplified top view of theFIG. 1a N-channel VDMOSFET; -
FIG. 2b shows a simplified top view of theFIG. 1b P-channel VDMOSFET; -
FIG. 3a shows a simplified cross sectional view of a N-channel JFET; -
FIG. 3b shows a simplified cross sectional view of a P-channel JFET; -
FIG. 4 shows a simplified three-dimensional cross-sectional view of theFIG. 1a N-channel VDMOSFET showing parasitic bipolar and neck region; -
FIG. 5 shows a simplified pictorial evolution of SEGR stages of a simplified N-channel VDMOSFET such as shown inFIG. 1 a; -
FIG. 6 shows a simplified dual gate transistor used in an exemplary RF mixer application; -
FIG. 7a shows a simplified cross sectional view of an exemplary N-channel DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 7b shows a simplified cross sectional view of an exemplary P-channel DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 8a shows a simplified cross sectional side view of an exemplary N-channel DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 8b shows a simplified cross sectional side view of an exemplary P-channel DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 8c shows a simplified schematic of N-channel DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 8d shows a simplified schematic P-channel DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 9a shows one exemplary application (Standard DC Mode Configuration) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 9b shows one exemplary result or output (Standard DC Mode (I-V) response) from theFIG. 9a exemplary application in accordance with one embodiment of the invention; -
FIG. 10a shows another exemplary application (Enhanced DC Mode Configuration) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 10b shows one exemplary result or output (enhanced DC mode (I-V) response) associated with theFIG. 10a exemplary Enhanced DC Mode configuration associated with one element (e.g.,MOS Gate 209 Control) of the exemplaryFIG. 10a DGVDMOSFET exemplary application; -
FIG. 10c shows one exemplary result or output (enhanced DC mode (I-V) response) associated with theFIG. 10a exemplary Enhanced DC Mode configuration associated with another element (e.g.,JFET 195 Control) of the exemplaryFIG. 10a DGVDMOSFET exemplary application; -
FIG. 11a shows another exemplary application (Dual gate AC Mode Configuration) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 11b shows one exemplary result or output (dual gate AC mode response e.g., a simplistic mixer output) from theFIG. 11a exemplary application; -
FIG. 12 shows exemplary methods of operation of exemplary embodiments of the invention comprising various modes of operation; -
FIG. 13 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation; -
FIG. 14 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation; -
FIG. 15 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation; -
FIG. 16 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation; -
FIG. 17 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation; -
FIG. 18 shows another exemplary method of operation of an exemplary embodiment of the invention comprising another mode of operation; -
FIG. 19 shows an exemplary system application (linear voltage regulator) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 20 shows another exemplary system application (switching voltage regulator) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention; -
FIG. 21 shows another exemplary system application (RF amplifier) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention; and -
FIG. 22 shows another exemplary system application (RF Mixer) of an exemplary DGVDMOSFET in accordance with one embodiment of the invention. - The embodiments of the invention described herein are not intended to be exhaustive or to limit the invention to precise forms disclosed. Rather, the embodiments selected for description have been chosen to enable one skilled in the art to practice the invention.
- One exemplary embodiment of the invention describes a design/layout of an innovative device, a DGVDMOSFET, which allows dual gate control of a modified VDMOSFET to be fabricated into a monolithic device (integrate improved elements and functions within a combined VDMOSFET and JFET). An exemplary DGVDMOSFET has dual independent gates to control current between drain and source. An embodiment includes an exemplary basic fabrication steps (design/layout) of an exemplary DGVDMOSFET incorporating aspects of improvements to a planar VDMOSFET.
-
FIGS. 7a and 7b represents simplified top-views of cutaway cross-sectional views of two exemplary DGVDMOSFETs 200 (N-channel version), 200′ (P-channel version) that includes a JFET structure, e.g., 211, 217, and 218 (FIG. 7a ) or 211′, 219, 220 (FIG. 7b ). The DGVDMOSFET (e.g., 200, 200′) design/layout can be fabricated using stripe; rectangular; hexagonal; and other commonly used cell layout schemes. TheFIGS. 7a, 7b views are simplified cutaways showing a lateral slice view of these devices versus a three-dimensional view of a device shown inFIG. 4 . Many cells (e.g.,DGVDMOSFET 200 and/or 200′) can be integrated in parallel providing different current and on-resistance capabilities depending upon number of cells integrated together. -
FIG. 7a includes a N-Type Silicon (203) epitaxial layer formed with a MOSFET structure section having a first andsecond portions 191, 193 (comprising 209/201/205/207 and 209/201, 205/207) with the JFET 195 (comprising 211, 217, 218) formed between the twoMOSFET structure portions first MOSFET portion 191 includes aMOS Gate 209 disposed with one section over a P-Body 205 and an N+Type Source section 207 where aSource Contact 201 is disposed within the N+Type Source section 207. The N+Type Source section 207 is disposed within the P-body 205 section. Thesecond MOSFET portion 193 includes a section of MOS Gate 209 (in this example MOS Gate 209 s are coupled in a three-dimensional structure connecting them which are not shown due to the cutaway nature of this view) which is disposed with one section over the P-Body 205 and the N+Type Source section 207 where theSource Contact 201 is disposed within the N+Type Source section 207. The N+Type Source section 207 is disposed within the P-body 205 section (in this example both P-bodies 205/205,Source Contacts 201, andN+ Type Sources 207 are coupled in a three-dimensional structure connecting them which is not shown due to the cutaway nature of this view). The first and secondMOSFET structure portions JFET 195 section are disposed within an N-TypeSilicon epitaxial layer 203. -
FIG. 7b includes a P-Type Silicon (212) epitaxial layer formed with a MOSFET structure section having a first andsecond portions 197, 199 (comprising 209′/201′/214/216 and 209′/201′/214/216) with the JFET 198 (comprising 211′, 219, 220) formed between the twoMOSFET structure portions FIGS. 7a and 7b have a cut line (A-B) representing a vertical cut line which defines respective views inFIGS. 8a and 8b . Thefirst MOSFET portion 197 includes a section of aMOS Gate 209′ disposed with one section over a N-body 214 and an P+Type Source section 216 where aSource Contact 201′ is disposed within the P+Type Source section 216. The P+Type Source section 216 is disposed within the N-Body 214 section. Thesecond MOSFET portion 199 includes theMOS Gate 209′ section (in this example bothMOS Gate 209′ sections are coupled in a three-dimensional structure which is not shown connecting them due to the cutaway of this view) which is disposed with one section over the N-Body 214 and the P+Type Source section 216 where theSource Contact 201′ is disposed within the P+Type Source section 216. The P+Type Source section 216 is disposed within the N-body 214 section. In this example, N-bodies 214/214,Source Contacts 201′, andP+ Type Sources 216 are coupled in a three-dimensional structure which is not shown connecting them due to the cutaway nature of this view. The first and secondMOSFET structure portions JFET 198 section are disposed within a P-TypeSilicon epitaxial layer 212. In this exemplary embodiment, theJFET section 198 is disposed within the PType epitaxial layer 212 such that it decouples theMOSFET section MOSFET sections JFET section 198. -
FIG. 8a shows a simplified side cross-sectional view of the exemplaryFIG. 7a N-channel DGVDMOSFET alongFIG. 7a A-B cut lines in accordance with one embodiment of the invention.FIG. 8a adds elements to theFIG. 7a structure that cannot be seen in the top cross-sectional cutaway view. For example,FIG. 8a shows twoGate Oxide 208 sections respectively disposed between bothMOS Gate Contact 209 sections andN+ Type Source 207/P-Body 205 sections/NType epitaxial layer 203. Two categories of semi-conductive channel regions (SCR) are shown 123, 125. AFirst Type SCR 123 is created as a result of design of theMOSFET sections SCR 123 can be a region in lateral proximity to theN+ Source Type 207 that is underneath a portion ofGate Oxide area 208 and a section of P-Body 205 that is underneath a portion ofGate Oxide 208 that is next to a boundary section of NType epitaxial layer 203. ASecond Type SCR 125 is formed in anotherregion 125, e.g., underneath a section ofGate Oxide 208 and disposed between P-Body 205 and a section ofJFET 195, e.g., P-Body 217 that forms a lower section of theJFET 195 section. AJFET Gate Contact 211 is shown in contact withP Type Body 218 which is in turn surrounded at least in part byP Type layer 217. In this example, dashed grey-lines 194 are shown which exemplify production of an electrical field effect created byJFET section 195 when it is biased with an electrical power supply. Two sets of black dashedlines MOSFET sections First Type SCRs 123 formed at a boundary section of both MOSFET sections in proximity to the NType epitaxial layer 203. In this example, there are twoSecond Type SCRs 125 formed as a result of theFIG. 7a /8 a design on either side of theJFET section 195 and between the twoMOSFET sections First Type SCRs 123 respectively regulates current through theMOSFET sections Second Type SCRs 125 perform a second current regulation function associated with electrical signals passing through the MOSFET by opening or closing a semi-conductive path in a section of the N-Type epitaxial layer 203. These dual SCR regions (123/125) provides two independent gate type functions or capabilities that are useful for mixing signals as well as providing benefits from a radiation hardening or performance perspective. TheMOSFET Second Type SCR 125 by means of theelectrical field effect 194 passing through theepitaxial layer 203 which reduces or cuts offelectrical flow path 192/192′. Various negative effects can be mitigated or eliminated by embodiments of this invention such as TID, SEB, and SEGR. As an example, TID effects can cause theFirst Type SCR 123 to be permanently turned on; however, TID effects do not fully or partially affect theSecond Type SCR 125. Also, radiation induced currents can cause failure of theMOSFET sections JFET structure 195 reduces radiation induced current through theseMOSFET sections FIG. 8a includeN Type substrate 204 disposed beneath the NType epitaxial layer 203 as well as adrain contact 202 disposed beneath theN Type substrate 204. -
FIG. 8b shows a simplified side cross sectional view of the exemplaryFIG. 7b P-channel DGVDMOSFET alongFIG. 7b A-B cut lines in accordance with one embodiment of the invention.FIG. 8b adds elements to theFIG. 7b structure that cannot be seen in the top cross-sectional cutaway view. TheFIG. 8b structure differs from theFIG. 8a design in that references to N type silicon becomes P-type silicon references and references to P type silicon become N-type references. Different elements numbers are also used for elements which are different in structure or material composition to theFIG. 8a design. References to the first andsecond MOSFET sections JFET section 198. - For example,
FIG. 8b shows twoGate Oxide 208′ sections respectively disposed between bothMOS Gate Contact 209′ sections andP+ Type Source 216/N-body 214 sections/P-Type epitaxial layer 212. Two categories of semi-conductive channel regions are shown 123, 125 which perform a same or similar function as theFIG. 8a structure's SCRs. AFirst Type SCR 123 is created as a result of design of theMOSFET sections SCR 123 can be a region in lateral proximity to the P+Source 216, that can be formed underneath a portion ofGate Oxide area 208′ and a section of N-Body 214 which is underneath a portion ofGate Oxide 208′ that is next to a boundary section of PType epitaxial layer 212. ASecond Type SCR 125 is formed in another region, e.g., underneath a section ofGate Oxide 208′ and disposed between N-Body 214 and a section ofJFET 198, e.g., N-Body 219 that forms a lower section of theJFET 198 section. AJFET Gate Contact 211′ is shown in contact withN Type Body 220 which is in turn surrounded at least in part byN body 219. In this example, dashed grey-lines 194 are shown which exemplify production of an electrical field effect created by theJFET section 198 when it is biased with an electrical power supply (not shown). Two sets of black dashedlines MOSFET sections First Type SCRs 123 formed at a boundary section of bothMOSFET sections Type epitaxial layer 212. In this example, there are twoSecond Type SCRs 125 formed as a result of theFIG. 7b /8 b design on either side of theJFET section 198 and between the twoMOSFET sections First Type SCRs 123 respectively regulates current through theMOSFET sections Second Type SCRs 125 perform a second current regulation function associated with electrical signals passing through theMOSFETs Type epitaxial layer 212. These dual SCR regions (123/125) provides two independent gate type functions or capabilities which are useful for mixing signals as well as providing benefits from a radiation hardening or performance perspective. TheMOSFET Second Type SCR 125 by means of theelectrical field effect 194 passing through the Ptype epitaxial layer 212 which selectively reduces or cuts offelectrical flow path 192/192′. Various negative effects can be mitigated or eliminated by embodiments of this invention such as TID, SEB, and SEGR. As an example, TID effects can cause theFirst Type SCR 123 can be permanently turned on; however, TID effects do not fully or partially affect theSecond Type SCR 125. Also, radiation induced currents can cause failure of theMOSFET sections JFET structure 198 reduces radiation induced current through theseMOSFET sections FIG. 8b includeP Type substrate 213 disposed beneath the PType epitaxial layer 212 as well as adrain contact 202′ disposed beneath theP Type substrate 213. - A control and sensor system could also be provided for (not shown) which would operate embodiments such as the
FIG. 7a /8 a (and/or 7 b/8 b)MOSFET 191, 193 (or 197, 199) and the JFET 195 (or 198) in response to detected radiation fields or energy. For example, a control section can have a pulse width modulator (not shown) which would operate theMOSFET sections 191, 193 (or 197, 199) and JFET 195 (or 198) in order to reduce or adjust radiation-induced currents or other aspects of operation of this system. A look up table can be utilized by the control section (not shown) which can correlate operation of theMOSFET sections 191, 193 (or 197, 199) and the JFET section 195 (or 198) which in turn generates effects in the First and/orSecond Type SCRs -
FIG. 8c shows a simplified schematic of N-channel DGVDMOSFET in accordance with one embodiment of the invention. TheFIG. 8c drawing shows an example of a symbolic representation of theFIG. 7a /8 a embodiment that show a combination of the twoMOSFET sections JFET section 195 as well as input/outputs such asMOS Gate 209,JFET Gate Contact 211,Source 201, andDrain 202. Additional elements that are optional include two diodes (e.g., parasitic element diodes) that respectively couple drain 202 tosource 201; the other diode couples betweendrain 202 andJFET gate terminal 211. -
FIG. 8d shows a simplified schematic of P-channel DGVDMOSFET in accordance with one embodiment of the invention. TheFIG. 8d drawing shows an example of a symbolic representation of theFIG. 7b /8 b embodiment that show a combination of the twoMOSFET sections JFET section 198 as well as input/outputs such asMOS Gate 209′,JFET Gate Contact 211′,Source 201″, andDrain 202′. Additional elements that are optional include two diodes (e.g., parasitic element diodes) that respectively couple drain 202′ to source 201; the other diode couples betweendrain 202′ andJFET gate terminal 211′. -
FIG. 9a shows one exemplary application (Standard DC Mode Configuration) of exemplary DGVDMOSFET symbol shown inFIG. 8c in accordance with one embodiment of the invention.FIG. 9a schematic shows an external gate circuit (e.g., power supply (VG 241)) and an external drain circuit (e.g., power supply (VD 243)) coupled toDGVDMOSFET embodiment 200. Referring back toFIG. 7a /8 a in view ofFIG. 9a /9 b, ifJFET gate contact 211 is connected directly to thesource contact 201, one embodiment of theDGVDMOSFET 200 can be configured to function similar to a standard VDMOSFET providing similar electrical characteristics and performance of standard VDMOSFET; however, anexemplary embodiment DGVDMOSFET 200 may exhibit higher on-resistance and lower power density.FIG. 9b shows an example of five exemplary standard DC mode I-V responses or outputs (I-V responses FIG. 9a exemplary application (Standard DC Mode configuration) in accordance with one embodiment of the invention.FIG. 9b also presents three regions of exemplary operation (cut-off 233, linear 231, and saturation 232). Cut-off 233 can be operable inFIG. 9a exemplary application ifpower supply VG 241 delivers a voltage less than MOS's gate threshold voltage (Vth_MOS) to effect a reduction or elimination of DGVDMOSFET's current flow through MOS'ssemi-conductive channel region 123.Linear 231 can be operable inFIG. 9a exemplary application ifpower supply VG 241 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter a resistive DGVDMOSFET current flow through MOS'ssemi-conductive channel region 123, wherepower supply VD 243 delivers a voltage less than the difference ofVG 241 and Vth_MOS.Saturation 232 can be operable inFIG. 9a exemplary application ifpower supply VG 241 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter saturated DGVDMOSFET current flow (saturation) through MOS'ssemi-conductive channel region 123, wherepower supply VD 243 delivers a voltage greater than the difference ofVG 241 and Vth_MOS.FIG. 9b does not necessarily represent an actual DGVDMOSFET's I-V response but is only provided to show how one embodiment of an exemplary DGVDMOSFET would operate in a standard DC mode configuration. Operation of an exemplary DGVDMOSFET in a standard DC mode configuration may not enhance TID performance but may provide higher SEB and SEGR performance. -
FIG. 10a shows another exemplary application (Enhanced DC mode configuration) ofexemplary DGVDMOSFET 200 symbol shown inFIG. 8c in accordance with one embodiment of the invention.FIG. 10a schematic shows a MOS gate power supply (VG 253), a JFET gate power supply (VG2 251), and a drain power supply (VD 255) coupled to theDGVDMOSFET embodiment 200. In this exemplary configuration, theMOSFET gate JFET gate 195 can be used separately or together to assist in controlling DGVDMOSFET's current flow. Theexemplary DGVDMOSFET 200 can be configured to function similar to a standard VDMOSFET (e.g.,VG2 251 voltage can be set to zero or other fixed voltage) providing similar electrical and performance of a standard VDMOSFET; can be configured to function similar to a standard JFET (e.g.,VG 253 voltage can be greater than the MOS's threshold voltage) providing similar electrical and performance of a standard JFET; or can be configured to function similar to JFET connected in series to VDMOSFET (e.g.,VG 253 andVG2 251 voltages can be used to control current flow) providing similar electrical and performance of a series connection. Theexemplary embodiment DGVDMOSFET 200 may exhibit higher on-resistance and lower power density compared to either a standard VDMOSFET or JFET but the exemplary DGVDMOSFET's die area is comparable to either a standard VDMOSFET's or JFET's die area (e.g., of comparable voltage and current capabilities). In this exemplary configuration, theexemplary DGVDMOSFET 200 offers enhanced operational and performance capabilities with respect to TID, SEB, and SEGR. Enhanced TID performance can occur because theexemplary JFET gate 195 can continue to function even after high levels of TID exposure (e.g., TID>1 Mrd) and can be used to control current flow through the DGVDMOSFET'ssemi-conducting channel region 125 even afterMOSFET exemplary JFET gate 195 can be used to produce anelectrical field 194 as shown inFIG. 8a /FIG. 8b (e.g., depletion layer), where anelectrical field 194 provides an additional barrier to retard drain potentials from coupling to the exemplaryMOSFET gate oxide 208 during heavy ion strikes. Additional enhanced SEGR performance can occur becauseMOSFET FIG. 10c , linear 251 or saturation 254) andJFET gate 195 can be configured to block current (e.g.,FIG. 10c , cut-off 256), where under this exemplary configuration coupling of drain voltage to thegate oxide 208 is minimized. Enhanced SEB performance can occur because theexemplary JFET gate 195 can be used to produce an electrical field 194 (e.g., formation of a depletion field), where formation ofelectrical field 194 collects a portion of heavy ion generated photocurrent to effect a reduction in heavy ion generated photocurrent collected through theMOSFET MOSFET FIG. 10c , linear 251 or saturation 254) andJFET gate 195 can be configured to block current (e.g.,FIG. 10c , cut-off 256), where under this exemplary configuration a portion of the heavy ion generated photocurrent can be collected directly through thesource 207 reducing heavy ion generated photocurrent collected through thebody 205.FIG. 10a represents an exemplary DGVDMOSFET schematically connected to operate in an enhanced DC mode configuration.FIG. 10b represents an exemplary current-voltage (I-V) response of anexemplary DGVDMOSFET 200 whenexemplary JFET gate 195 is at a fixed bias and theMOSFET FIG. 10b demonstrates an example of five exemplary enhanced DC mode I-V responses or outputs (I-V responses FIG. 10a exemplary application (enhance DC mode configuration) in accordance with one embodiment of the invention.FIG. 10b also depicts three regions of exemplary operation (cut-off 247, linear 245, and saturation 246). Cut-off 247 can be operable inFIG. 10a exemplary example ifpower supply VG 253 delivers a voltage less than MOS's gate threshold voltage (Vth_MOS) to effect a reduction or elimination of DGVDMOSFET's current flow through MOS'ssemi-conductive channel region 123.Linear 245 can be operable inFIG. 10a exemplary example ifpower supply VG 253 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter a resistive DGVDMOSFET current flow through MOS'ssemi-conductive channel region 123, wherepower supply VD 255 delivers a voltage less than the difference of VG and Vth_MOS.Saturation 246 can be operable inFIG. 10a exemplary example ifpower supply VG 253 delivers a voltage greater than MOS's gate threshold voltage (Vth_MOS) to enter limited DGVDMOSFET current flow (saturation) through MOS'ssemi-conductive channel region 123, wherepower supply VD 255 delivers a voltage greater than the difference of VG and Vth_MOS.FIG. 10c represents a current-voltage (I-V) characteristic of anexemplary DGVDMOSFET 200 whenexemplary MOSFET JFET gate 195 modulates current flow.FIG. 10c shows examples of exemplary responses or outputs (I-V responses FIG. 10a exemplary application in accordance with one embodiment of the invention.FIG. 10c also depicts exemplary examples of three regions of exemplary operation, cut-off 256,Linear 252, andsaturation 254. Cut-off 252 can be operable inFIG. 10a exemplary example whenpower supply VG2 251 delivers a voltage less than JFET's gate threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET's current flow through JFET'ssemi-conductive channel region 125.Linear 252 can be operable inFIG. 10a exemplary example whenpower supply VG2 251 delivers a voltage greater than JFET's gate threshold voltage (Vth_JFET) to enter a resistive DGVDMOSFET current flow through JFET'ssemi-conductive channel region 125, wherepower supply VD 255 delivers a voltage less than the difference of VG and Vth_JFET.Saturation 254 can be operable inFIG. 10a exemplary example whenpower supply VG2 251 delivers a voltage greater than JFET's gate threshold voltage (Vth_JFET) to enter limited DGVDMOSFET current flow (saturation) through JFET'ssemi-conductive channel region 125, wherepower supply VD 255 delivers a voltage greater than the difference of VG and Vth_JFET.FIGS. 10b and 10c do not represent actual DGVDMOSFET's I-V characteristics and are only provided to demonstrate application of an exemplary DGVDMOSFET in enhanced DC mode. -
FIG. 11a shows another exemplary application (e.g., enhanced AC mode configuration) ofexemplary DGVDMOSFET 200 symbol shown inFIG. 8c in accordance with one embodiment of the invention.FIG. 11a schematic shows a MOS gate power supply (VG) 267, a MOS gate alternating current (AC) power supply (VAC) 265, a JFET gate power supply (VG2) 263, a JFET gate AC power supply (VAC2) 261, and a drain power supply (VD) 266 coupled to theDGVDMOSFET embodiment 200. In this exemplary configuration, theMOSFET gate JFET gate 195 can be operated separately or together to assist in controlling DC current flow and AC current flow in phase or out of phase to allow a variety of different radio frequency (RF) type applications such as RF mixers, RF amplifiers, and RF gain control. This exemplary operational mode provides application designers functionality of two independent gates in a variety of RF type applications. TheFIG. 11a exemplary embodiment represents a simplistic RF mixer application usingexemplary DGVDMOSFET 200 in a dual-gate AC mode operation.FIG. 11b represents one exemplary output using a RF mixer type circuit.FIG. 11b does not represent an actual DGVDMOSFET output but is provided to demonstrate its potential application. - Exemplary embodiments of a DGVDMOSFET (e.g., 200, 200′) can provide for a design/layout of a monolithic structure with two independent gate terminals to modulate drain-to-source current flow (e.g., can replace two devices, where devices are slaved together). With two independent gate terminals to modulate current flow (or modulate signal), an exemplary embodiment can be used as a radio frequency (RF) mixer, modulator, demodulator, gain control element and more in analog circuits. Exemplary gate functionality can be operated out of phase or operated in phase depending upon the desired circuit application allowing greater circuit design flexibility in this example due to how two-gate functionality in accordance with an embodiment of the invention can be independent in operation. A monolithic solution lowers costs, size, and weight and increase reliability which are important factors in a majority of strategic and space systems.
- In one example, conventional non-radiation hardened VDMOSFETs cannot operate in TID environments without degraded performance of the
MOSFET sections exemplary JFET gate 195 provides a different configuration and method to control current flow. Anexemplary JFET gate 195 is not directly degraded by TID radiation (e.g., functional performance of JFETs with ionizing radiation can be greater than 1 Mrd(Si)). IfMOSFET sections exemplary JFET gate 195 can be used to extend the operating performance of device. - An exemplary embodiment can be designed and fabricated to operate at drain-to-source voltages from a few volts to voltages over a thousand volts. A drain-to-source breakdown voltage (BVDSS) of an exemplary embodiment can be determined by epitaxial doping and epitaxial thickness. An exemplary design and layout of an overall embodiment can be minimal. Therefore, exemplary embodiments with different blocking voltages can be realized.
- An exemplary embodiment can be designed and fabricated to handle different currents. The current handling capability of a fabricated device can be increased by placing an exemplary embodiment into an array of parallel cells that can be a few cells to several thousand cells placed in parallel. Therefore, embodiments with different current capabilities can be realized.
- An
exemplary JFET gate 195 can maintain operational capability in particle-rich radiation environment such as a space environment. For example, anexemplary JFET gate 195 can increase failure threshold voltages for SEB and SEGR, which increases the operational capabilities of exemplary embodiments in a particular type of radiation environment (higher failure thresholds equate to higher radiation performance). Higher SEB and SEGR failure threshold voltages are desirable in short- and long-term applications where embodiments of the invention are subjected to particles (SEB and SEGR can be catastrophic). - SEB performance can be improved with an exemplary embodiment as particle-induced photocurrent, which normally flows into
Body exemplary JFET 195'sBody exemplary Body 205 can increase a threshold for SEB. - SEGR performance can be improved using an embodiment of the invention because particle-induced coupling of a portion of the drain potential across an
exemplary gate oxide 208 can be impeded by an added depletion field induced by anexemplary JFET section 195. - An exemplary embodiment can provide for two independent body diodes (e.g., a source body diode and a JFET body diode). Having two independent diodes allows more flexibility in circuit designs. As an example, a source body diode or JFET body diode can be used as a freewheeling diode in switching applications.
- An exemplary embodiment can be fabricated using different semiconductor and dielectric materials e.g., Silicon (Si) and Silicon Dioxide (SiO2). Other semiconductor materials such as silicon carbide (SiC) and Gallium Arsenide (GaAs) can be used instead of silicon for, e.g., an epitaxial layer and doped implants/diffusions. Use of other semiconductor materials such as SiC provides structures with different characteristics and higher performance characteristics. As an example, SiC has a higher band gap, breakdown field, and thermal conductivity when compared to silicon. These types of characteristics yield higher current density, higher voltages, and better thermal conductivity. Other dielectric materials can be used to form, e.g.,
gate oxide 208. Alternative materials can include but are not limited to SiN, Al2O3, and HfO2. Use of other dielectrics provides different performance characteristics such as increasing or decreasing oxide capacitance which affects switching performance. -
FIG. 12 shows exemplary methods ofoperation 300 of exemplary embodiments of the invention. These methods of operation can be triggered based on determinations that operation of one or more functionalities of an exemplary embodiment of the invention is needed such as, for example, detecting a condition to alter operation of theMOSFET sections step 301, a standard DC mode of operation can be initiated comprising providing an exemplary embodiment of the invention such as described above; atstep 303, shortingJFET Gate 211 toSource 201; atstep 305, applying DC voltage to drain 202; atstep 307, applying voltage toMOS Gate 209 to control output, current and voltage, betweendrain 202 andsource 201. A second mode can comprise initiating an Enhanced DC Mode of Operation using a design such as described herein/above atstep 317; atstep 319, apply DC voltage to drain 202;steps 321/325 can be executed concurrently or separately following a step shown as respectively preceding these steps comprising applying DC voltage toJFET gate 211 and applying DC voltage toMOS gate 209;steps MOS gate 209 to control current/voltage betweendrain 202 andsource 201 as well as applying voltage toJFET gate 211 to control current/voltage betweendrain 202 andsource 201. Atstep 331, exemplary processing provides an Enhanced AC Mode configuration in accordance with an exemplary embodiment of the invention, such as discussed above/herein and initiates an Enhanced AC Mode Operation atstep 331; atStep 333, applying DC voltage to drain 202; atstep 335, applying DC voltage and AC input toJFET Gate 211; atstep 337, applying DC voltage and AC input toMOS gate 209; and atStep 339, producing output using said Enhanced AC Mode Configuration of a mixer of AC inputs ofJFET Gate 211 andMOS Gate 209. -
FIG. 13 shows another exemplary method of operation in accordance with another embodiment of the invention. Again, processing begins with providing an embodiment and configuration of an exemplary embodiment of the invention such as, for example, an Alternative Enhanced DC Mode of Operation Configuration, such as discussed herein/above atstep 317; atstep 319, applying DC voltage to drain 202;steps step 321 comprises applying DC voltage toJFET Gate 211, applying DC voltage toMOS Gate 209, and under an “Off State” condition (e.g., when MOS Gate is turned off or not having power applied to one or more portions of it), apply reverse bias to theJFET Gate 211;steps step step 323 comprises applying voltage toMOS Gate 209 to control current flow betweendrain 202 andsource 201,step 327 comprises applying voltage toJFET Gate 211 to control current flow betweendrain 202 andsource 201, and reducing effects from radiation or electromagnetic interference atstep 343 by operation or modulation of the exemplary Alternative Enhanced DC Mode configuration. -
FIG. 14 shows another exemplary method ofoperation 401 in accordance with another embodiment of the invention. Again, a process begins by initiating standard DCmode configuration step 403 by connecting theJFET gate 211 to thesource 201step 405 and by connectingdrain 202 to an external circuit (e.g., power supply)step 407. The next step is a determination depending upon system requirements of how to configure exemplary functionality such as whether to initiate MOS cut-offmode step 409; whether to initiate MOSlinear mode step 411; whether to initiate MOSsaturation mode step 413; or whether to initiateSwitch mode step 421. MOS cut-offmode step 415 is initiated by connectingMOS gate 209 to an external circuit that delivers a gate voltage toMOS gate 209 up to a voltage less than the MOS's threshold voltage (Vth_MOS) to effect a reduction or elimination of DGVDMOSFET current flow through the semi-conductive channel region (e.g., SCR 123). MOSlinear mode step 417 is initiated by connectingMOS gate 209 to an external circuit that delivers a gate voltage toMOS gate 209 that is greater than the MOS's threshold voltage (Vth_MOS) to effect and to modulate a resistive current-voltage (I-V) response through MOS's semi-conductive channel region (e.g., SCR 123). To function inlinear mode step 417, drain voltages must be less than the difference between the gate voltage (VG) and the gate threshold voltage (VTH_MOS) (e.g., VD<VG−Vth_MOS). MOSsaturation mode step 419 is initiated by connectingMOS gate 209 to an external circuit that delivers a gate voltage toMOS gate 209 that is greater than the MOS's threshold voltage (Vth_MOS) to effect and to modulate a resistive current-voltage (I-V) response through MOS's semi-conductive channel region (e.g., SCR 123). To function insaturation mode step 419, drain voltages must be greater than the difference between the gate voltage (VG) and the gate threshold voltage (VTH_MOS) (e.g., VD>VG−Vth_MOS).Switch mode step 423 is initiated by connectingMOS gate 209 to an external circuit to deliver a gate voltage VG toMOS gate 209 to switch the DGVDMOSFET's I-V response between cut-off step 415 andlinear step 417; betweenlinear step 417 andsaturation step 419; or between cut-off step 415 andsaturation step 419 to effect a predetermined DGVDMOSFET's (I-V) response operable to a duty cycle to effect said predetermined I-V response. -
FIG. 15 shows another exemplary method ofoperation 501 in accordance with another embodiment of the invention. Again, a process begins by initiating enhancedDC mode step 503 by connecting theMOS gate 209 to an external circuit executing cut-offmode step 507 and by connectingdrain 202 to an external circuit (e.g., power supply)step 505. The process continues by initiating an enhancedradiation mode step 513 providing a configuration to enhance performance of the DGVDMOSFET functionality when the embodiment of the invention is subjected to radiation effects (e.g.,TID 515,SEB 517, and SEGR 519), by executing JFET cut offmode step 509. Cut off 511 is initiated by connectingJFET gate 211 to an external circuit that delivers a gate voltage to JFETgate 211 up to a voltage less than JFET's threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET current flow through the semi-conductive channel region (e.g., SCR 125). -
FIG. 16 shows another exemplary method ofoperation 601 in accordance with another embodiment of the invention. Again, a process begins by initiating enhancedDC mode step 603 by connecting theMOS gate 209 to an external circuit executinglinear mode step 607 and by connectingdrain 202 to an external circuit (e.g., power supply)step 605. The process continues by initiating enhancedradiation mode step 615 providing a configuration to enhance performance of the DGVDMOSFET functionality when the embodiment of the invention is subjected to radiation effects (e.g.,TID 617,SEB 619, and SEGR 621), by executing JFET cut offmode step 609. Other processes can be employed by initiating JFETlinear mode step 611; or by initiatingswitch mode step 625. Cut offstep 613 is initiated by connectingJFET gate 211 to an external circuit that delivers a gate voltage to JFETgate 211 up to a voltage less than the JFET's threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET current flow through JFET's semi-conductive channel region (e.g., SCR 125).Linear mode step 623 is initiated by connectingJFET gate 211 to an external circuit that delivers a gate voltage to JFETgate 211 that is greater than JFET's threshold voltage (Vth_JFET) to effect and to modulate a resistive current-voltage (I-V) response through JFET's semi-conductive channel region (e.g., SCR 125). To function inlinear mode step 623, drain voltages must be less than the difference between the gate voltage (VG) and the gate threshold voltage (VTH_JFET) (e.g., VD<VG−Vth_JFET). The process can evolve by initiatingswitch mode step 625.Switch mode step 627 is initiated by connectingJFET gate 211 to an external circuit to deliver a gate voltage VG toJFET gate 211 to switch DGVDMOSFET's I-V response between cut-off step 613 andlinear step 623 to effect a predetermined DGVDMOSFET's (I-V) response operable to a duty cycle to effect said predetermined I-V response. -
FIG. 17 shows another exemplary method ofoperation 701 in accordance with another embodiment of the invention. Again, a process begins by initiating enhancedDC mode step 703 by connecting theMOS gate 209 to an external circuit executingsaturation mode step 707 and by connectingdrain 202 to an external circuit (e.g., power supply)step 705. The process continues by initiating enhancedradiation mode step 717 providing a configuration to enhance performance of the DGVDMOSFET functionality when the embodiment of the invention is subjected to radiation effects (e.g.,TID 719,SEB 721, and SEGR 723), by executing JFET cut offmode step 709. Other processes can be employed by initiating JFETsaturation mode step 711; or by initiating switch mode step 725. Cut offstep 713 is initiated by connectingJFET gate 211 to an external circuit that delivers a gate voltage to JFETgate 211 up to a voltage less than the JFET's threshold voltage (Vth_JFET) to effect a reduction or elimination of DGVDMOSFET current flow through JFET's semi-conductive channel region (e.g., SCR 125).Saturation mode step 715 is initiated by connectingJFET gate 211 to an external circuit that delivers a gate voltage to JFETgate 211 that is greater than JFET's threshold voltage (Vth_JFET) to effect and to modulate a saturated current-voltage (I-V) response through JFET's semi-conductive channel region (e.g., SCR 125). To function insaturation mode step 715, drain voltages must be greater than the difference between the gate voltage (VG) and the gate threshold voltage (VTH_JFET) (e.g., VD>VG−Vth_JFET). Another process can evolve by initiating switch mode step 725.Switch mode step 727 is initiated by connectingJFET gate 211 to an external circuit to deliver a gate voltage VG toJFET gate 211 to switch DGVDMOSFET's I-V response between cut-off step 613 andsaturation step 715 to effect a predetermined DGVDMOSFET's (I-V) response operable to a duty cycle to effect said predetermined I-V response. -
FIG. 18 shows another exemplary method ofoperation 801 in accordance with another embodiment of the invention. Again, a process begins by initiating enhancedAC mode step 803 by connecting thedrain 202 to an external circuit (e.g., power supply)step 805. The process continues by initiating either linear mode (MOSlinear mode step 807 and JFET linear mode step 809) or saturation mode (MOSsaturation mode step 811 and JFET saturation mode step 813). Another process can be employed by initiatingRF mode step 815. RF mode ofMOS gate step 817 begins by connecting theMOS gate 209 to an external AC circuit to deliver an AC voltage toMOS gate 209 to modulate DGVDMOSFET's I-V response to effect a modulation of AC input into DGVDMOSFET's response. RF mode ofJFET gate step 819 begins by connecting theJFET gate 211 to an external AC circuit to deliver an AC voltage to JFETgate 211 to modulate DGVDMOSFET's I-V response to effect a modulation of AC input into DGVDMOSFET's response. RF mode of both MOS gate andJFET gate step 821 begins by connectingMOS gate 209 andJFET gate 211 to external AC circuits to deliver AC voltages (in phase or out of phase) to said gates to modulate DGVDMOSFET response to said AC inputs. -
FIG. 19 shows a block diagram of an exemplary application (a linear voltage regulator 901) where anexemplary DGVDMOSFET 905 is connected to an unregulated DC power source 903 (e.g., 28 volt solar array). Theexemplary JFET gate 211 is connected tosource 201. Thesource 201 is connected to an output sensing circuit 907 (e.g., a resistor divider network). Thesensing network 907 provides an input to anexternal feedback amplifier 909 with the other input being areference voltage 911. If regulatedDC output voltage 915 is lower or higher than expected output voltage, saidfeedback amplifier 909 adjusts the MOS gate voltage until expected output voltage is achieved. -
FIG. 20 shows a block diagram of an exemplary application (a switching voltage regulator 931) where anexemplary DGVDMOSFET 935 is connected to an unregulated DC power source 933 (e.g., 28 volt solar array). Theexemplary MOS gate 209 is connected to aMOS gate circuit 937 whereMOS gate 209 is configured to operate in saturation mode. Thesource 201 is connected to an output sensing circuit 939 (e.g., a resistor divider network). Thesensing network 939 provides an input to anexternal feedback amplifier 941 with the other input being areference voltage 943. If regulatedDC output voltage 947 is lower or higher than expected output voltage, saidfeedback amplifier 941 adjusts the JFET gate drive circuit 945 (e.g., pulse width modulator) to adjust the duty cycle in switch mode until desired output voltage is achieved. -
FIG. 21 shows a block diagram of an exemplary application (RF amplifier 961) where anexemplary DGVDMOSFET 965 is connected to DC power source 963 (e.g., regulated voltage). Theexemplary JFET gate 211 is connected tosource 201. Theexemplary MOS gate 209 is connected to RF input with a DC offsetcircuit 969 whereMOS gate 209 is configured to operate in linear AC mode. Thedrain 202 is connected to a DC blocking circuit 967 (e.g., capacitor), whereDC blocking circuit 967 removes DC voltage fromRF output 971. -
FIG. 22 shows a block diagram of an exemplary application (RF mixer 981) where anexemplary DGVDMOSFET 985 is connected to DC power source 983 (e.g., regulated voltage). Theexemplary JFET gate 211 is connected to local oscillator (LO) with DC offsetcircuit 987, where theJFET gate 211 is configured to operate in linear AC mode. Theexemplary MOS gate 209 is connected to RF input with DC offsetcircuit 989 where theMOS gate 209 is configured to operate in linear AC mode. Thedrain 202 is also connected to DC blocking circuit 991 (e.g., capacitor), whereDC blocking circuit 991 removes DC voltage fromRF mixer output 993. - Although the invention has been described in detail with reference to certain preferred embodiments, variations and modifications exist within the spirit and scope of the invention as described and defined in the following claims.
Claims (64)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/664,186 US9425303B1 (en) | 2015-02-13 | 2015-03-20 | Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures |
US14/724,267 US9425187B1 (en) | 2015-02-13 | 2015-05-28 | Apparatus and methods for modulating current / voltage response using multiple semi-conductive channel regions (SCR) produced from different integrated semiconductor structures |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562116129P | 2015-02-13 | 2015-02-13 | |
US14/664,186 US9425303B1 (en) | 2015-02-13 | 2015-03-20 | Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/724,267 Continuation-In-Part US9425187B1 (en) | 2015-02-13 | 2015-05-28 | Apparatus and methods for modulating current / voltage response using multiple semi-conductive channel regions (SCR) produced from different integrated semiconductor structures |
Publications (2)
Publication Number | Publication Date |
---|---|
US20160240649A1 true US20160240649A1 (en) | 2016-08-18 |
US9425303B1 US9425303B1 (en) | 2016-08-23 |
Family
ID=56622283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/664,186 Active US9425303B1 (en) | 2015-02-13 | 2015-03-20 | Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures |
Country Status (1)
Country | Link |
---|---|
US (1) | US9425303B1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108649073A (en) * | 2018-06-22 | 2018-10-12 | 重庆平伟实业股份有限公司 | Power semiconductor |
CN108831835A (en) * | 2018-06-22 | 2018-11-16 | 重庆平伟实业股份有限公司 | The forming method of power semiconductor |
CN116629183A (en) * | 2023-07-24 | 2023-08-22 | 湖南大学 | Silicon carbide MOSFET interference source modeling method, equipment and storage medium |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10910478B1 (en) | 2020-03-04 | 2021-02-02 | Shuming Xu | Metal-oxide-semiconductor field-effect transistor having enhanced high-frequency performance |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4811065A (en) | 1987-06-11 | 1989-03-07 | Siliconix Incorporated | Power DMOS transistor with high speed body diode |
EP2070108A4 (en) * | 2006-09-27 | 2010-12-01 | Maxpower Semiconductor Inc | Power mosfet with recessed field plate |
US9590611B2 (en) * | 2014-04-10 | 2017-03-07 | The United States Of America As Represented By The Secretary Of The Navy | Radiation-hardened dual gate semiconductor transistor devices containing various improved structures including MOSFET gate and JFET gate structures and related methods |
-
2015
- 2015-03-20 US US14/664,186 patent/US9425303B1/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108649073A (en) * | 2018-06-22 | 2018-10-12 | 重庆平伟实业股份有限公司 | Power semiconductor |
CN108831835A (en) * | 2018-06-22 | 2018-11-16 | 重庆平伟实业股份有限公司 | The forming method of power semiconductor |
CN116629183A (en) * | 2023-07-24 | 2023-08-22 | 湖南大学 | Silicon carbide MOSFET interference source modeling method, equipment and storage medium |
Also Published As
Publication number | Publication date |
---|---|
US9425303B1 (en) | 2016-08-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10229993B2 (en) | LDMOS transistors including resurf layers and stepped-gates, and associated systems and methods | |
US11557588B2 (en) | Multi-transistor device including first and second LDMOS transistors having respective drift regions separated in a thickness direction by a shared RESURF layer | |
US9570438B1 (en) | Avalanche-rugged quasi-vertical HEMT | |
US9496364B2 (en) | Field effect semiconductor component and methods for operating and producing it | |
US11705485B2 (en) | LDMOS transistors with breakdown voltage clamps | |
US12087820B2 (en) | Semiconductor device having a plurality of III-V semiconductor layers | |
US10483387B2 (en) | Lateral/vertical semiconductor device with embedded isolator | |
US9425187B1 (en) | Apparatus and methods for modulating current / voltage response using multiple semi-conductive channel regions (SCR) produced from different integrated semiconductor structures | |
US9305917B1 (en) | High electron mobility transistor with RC network integrated into gate structure | |
US9595519B2 (en) | Combination metal oxide semi-conductor field effect transistor (MOSFET) and junction field effect transistor (JFET) operable for modulating current voltage response or mitigating electromagnetic or radiation interference effects by altering current flow through the MOSFETs semi-conductive channel region (SCR) | |
US9735769B1 (en) | Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures | |
US9425303B1 (en) | Controlling current or mitigating electromagnetic or radiation interference effects using multiple and different semi-conductive channel regions generating structures | |
US9590611B2 (en) | Radiation-hardened dual gate semiconductor transistor devices containing various improved structures including MOSFET gate and JFET gate structures and related methods | |
Zhang et al. | SiC trench MOSFET with self‐biased p‐shield for low RON‐SP and low OFF‐state oxide field | |
EP2482315A1 (en) | Semiconductor element | |
WO2013153937A1 (en) | Semiconductor diode device | |
US9455701B1 (en) | Apparatus and methods for modulating current / voltage response using multiple semi-conductive channel regions (SCR) produced from different integrated semiconductor structures | |
US20180286860A1 (en) | Cmos compatible low gate charge high voltage pmos | |
US10741551B2 (en) | Integrated vertical and lateral semiconductor devices | |
US10475785B2 (en) | Semiconductor device | |
Sankin | Edge termination and RESURF technology in power silicon carbide devices |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: UNITED STATES OF AMERICA AS REPRESENTED BY THE SEC Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:TITUS, JEFFREY;REEL/FRAME:035793/0173 Effective date: 20150417 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 4 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |