US20160181441A1 - Semiconductor Device and Method for Manufacturing a Semiconductor Device - Google Patents
Semiconductor Device and Method for Manufacturing a Semiconductor Device Download PDFInfo
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- US20160181441A1 US20160181441A1 US14/971,823 US201514971823A US2016181441A1 US 20160181441 A1 US20160181441 A1 US 20160181441A1 US 201514971823 A US201514971823 A US 201514971823A US 2016181441 A1 US2016181441 A1 US 2016181441A1
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- contact layer
- contact
- semiconductor
- semiconductor device
- metal nitride
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 134
- 238000000034 method Methods 0.000 title claims description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000463 material Substances 0.000 claims abstract description 44
- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000002184 metal Substances 0.000 claims abstract description 44
- 150000004767 nitrides Chemical class 0.000 claims abstract description 27
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 33
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005546 reactive sputtering Methods 0.000 claims 3
- 239000000376 reactant Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- 238000001465 metallisation Methods 0.000 description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
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- 150000002739 metals Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910016285 MxNy Inorganic materials 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
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- 238000009792 diffusion process Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
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- 239000011261 inert gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000001616 ion spectroscopy Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0495—Schottky electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66053—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide
- H01L29/6606—Multistep manufacturing processes of devices having a semiconductor body comprising crystalline silicon carbide the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66143—Schottky diodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/868—PIN diodes
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1602—Diamond
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Definitions
- Schottky diodes comprising a metal-semiconductor junction are generally used as rectifying devices.
- SiC Schottky diodes are increasingly used in the field of power electronics.
- a semiconductor device comprises a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with the semiconductor material, the contact layer comprising a metal nitride. A non-ohmic contact is formed between the semiconductor material and the contact layer.
- semiconductor device comprises a semiconductor body including a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with a first surface of the semiconductor body.
- the contact layer comprises a metal nitride.
- the contact layer is electrically connected to a first load terminal, and a non-ohmic contact is formed between the semiconductor body and the contact layer.
- a second surface of the semiconductor body is electrically connected to a second load terminal, the second surface being opposite to the first surface.
- a semiconductor device comprises a semiconductor body including a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with a first surface of the semiconductor body.
- the contact layer comprises a metal nitride.
- the contact layer is electrically connected to a first load terminal.
- a non-ohmic contact is formed between the semiconductor body and the contact layer.
- a second surface of the semiconductor body is electrically connected to a second load terminal, the second surface being opposite to the first surface.
- FIG. 1A illustrates a cross-sectional view of an example of a semiconductor device according to an embodiment.
- FIG. 1B shows a cross-sectional view of a semiconductor device according to a further embodiment.
- FIG. 1C shows a cross-sectional view of a semiconductor device according to a further embodiment.
- FIG. 1D shows a cross-sectional view of a semiconductor device according to a further embodiment.
- FIG. 2A illustrates an example of a current-voltage characteristic of an ohmic contact.
- FIG. 2B illustrates a cross-sectional view of a rectifying contact.
- FIG. 3 illustrates an energy band diagram of a Schottky contact.
- FIG. 4 illustrates an example of a reaction chamber which may be used for manufacturing the semiconductor device according to an embodiment.
- wafer may include any semiconductor-based structure that has a semiconductor surface.
- Wafer and structure are to be understood to include silicon, silicon-on-insulator (SOI), silicon-on sapphire (SOS), doped and undoped semiconductors, epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures.
- SOI silicon-on-insulator
- SOS silicon-on sapphire
- the semiconductor need not be silicon-based.
- the semiconductor could as well be silicon-germanium, germanium, or gallium arsenide.
- diamond, silicon carbide (Sic) or gallium. nitride (GaN) may form the semiconductor substrate material.
- n ⁇ means a doping concentration. which is lower than the doping concentration of an “n”-doping region while an “n + ”-doping region has a higher doping concentration than an “n”-doping region.
- Doping regions of the same relative doping concentration do not necessarily have the same absolute doping concentration.
- two different “n”-doping regions may have the same or different absolute doping concentrations.
- the doped portions are designated as being “p” or “n”-doped. As is clearly to be understood, this designation is by no means intended to be limiting.
- the doping type can be arbitrary as long as the described functionality is achieved. Further, in all embodiments, the doping types can be reversed.
- Coupled and/or “electrically coupled” are not meant to mean that the elements must be directly coupled together—intervening elements may be provided between the “coupled” or “electrically coupled” elements.
- electrically connected intends to describe a low-resistive electric connection between the elements electrically connected together.
- lateral and “horizontal” as used in this specification intends to describe an orientation parallel to a first surface of a semiconductor substrate or semiconductor body. This can be for instance the surface of a wafer or a die.
- vertical as used in this specification intends to describe an orientation which is arranged perpendicular to the first surface of the semiconductor substrate or semiconductor body.
- FIG. 1A shows a cross-sectional view of a semiconductor device 1 according to an embodiment.
- the semiconductor device illustrated in FIG. 1A comprises a semiconductor material 100 and a contact layer 130 in contact with the semiconductor material 100 .
- the contact layer 130 comprises a metal nitride and a non-ohmic contact is formed between the semiconductor material 100 and the contact layer 130 .
- a bandgap of the semiconductor material 100 is larger than 2 eV and less than 10 eV, e.g. less than 6 eV.
- the bandgap of the semiconductor material may be larger than 0.9 or 1 eV and less than 10 eV.
- the semiconductor material 100 may be a semiconductor body 101 including one or more doped portions or layers at either side thereof.
- the doped portion may be formed by various methods such as ion implantation, diffusion and epitaxial growth of the doped layer.
- the semiconductor material may be a material having a bandgap larger than 1 eV.
- the semiconductor material may comprise silicon carbide, diamond, gallium nitride, indium phosphide, AlGaAs and further examples of III-V semiconductors.
- the semiconductor body 101 may be heavily n-doped and may comprise a portion that is n-doped at a lower doping level, the portion being disposed at a first surface 110 of the semiconductor body.
- the contact layer 130 may comprise a combination of a stoichiometric compound with a non-stoichiometric compound including the metal and nitrogen.
- the contact layer 130 may comprise mixture of MN, having different values for x and y, wherein B denotes the metal.
- the metal nitride layer may comprise a mixture of MN and M x N y or of MN 2 and M x N y .
- x may be equal to 1, and y may be a real number fulfilling 0 ⁇ y ⁇ 3.
- y may be equal to 1, and x may be a real number fulfilling 0 ⁇ x ⁇ 3.
- the metal may be selected from the group of molybdenum, titanium, tantalum, and tungsten.
- the metal nitride may comprise two metals, such as MoTiN.
- the contact layer 130 may be electrically connected to an anode terminal.
- the semiconductor device 1 may comprise a back side metallization 160 which forms an ohmic contact to the semiconductor body 101 .
- the back side metallization 160 is disposed at a second surface 115 of the semiconductor body 101 , opposite to the first surface 110 .
- the back side metallization 160 may be electrically connected to a cathode terminal.
- the terms “ohmic contact”, “Schottky contact”, and “rectifying contact” will be explained below, while referring to FIGS. 2A and 2B .
- FIG. 1B shows a further embodiment of a semiconductor device 1 .
- the semiconductor device 1 illustrated in FIG. 1B comprises a semiconductor material 200 , e.g. a semiconductor body 201 and a contact layer 130 in contact with the semiconductor material.
- the contact layer 130 comprises a metal nitride and a non-ohmic contact is formed between the semiconductor material 200 and the contact layer 130 .
- the semiconductor material 200 may be a semiconductor body 201 including further doped portions.
- these doped portions may be disposed adjacent to a first surface 210 or a second surface 215 of the semiconductor body 201 .
- the semiconductor device 1 of FIG. 1B further comprises a doped region 180 of the second conductivity type.
- the semiconductor material 200 may be n ⁇ -doped and the doped portion 180 may be p + -doped.
- the doped portion 180 may be disposed at the first surface 210 of the semiconductor body 201 , and portions of the semiconductor material 200 , which is n ⁇ -doped may be present at the first surface 210 .
- the contact layer 130 may be in contact with the semiconductor material 200 and the doped portions 180 .
- the semiconductor device 1 illustrated in FIG. 1B further comprises a heavily n + -doped region 170 at the second surface of the semiconductor body 201 .
- the semiconductor device further comprises a back side metallization layer 160 that forms an ohmic contact to the doped layer 170 .
- the back side metallization layer 160 may be electrically connected to a cathode terminal.
- the contact layer 130 may be electrically connected to an anode terminal.
- the semiconductor material may comprise any of the materials mentioned above.
- the semiconductor material may be silicon carbide.
- the semiconductor device illustrated in FIG. 1B may implement a Junction-Barrier Schottky (JBS) diode including p + implanted portions 180 .
- JBS Junction-Barrier Schottky
- a reverse voltage is applied to the semiconductor device, depletion regions formed at the interface between the n ⁇ portion 200 and the p + portion 180 pinch off a leakage current which may arise from the Schottky contact of the device. Accordingly, such a Junction-Barrier Schottky diode has a reduced leakage current.
- Such a JBS may be suitably used in a switched mode power supply.
- the semiconductor device 1 may implement a merged PIN Schottky diode (MPS).
- FIG. 1C shows a cross-sectional view of such a merged PIN Schottky-Diode.
- the MPS comprises similar components as the JBS, these components having the same reference numerals as the corresponding components of the JBS.
- the p ⁇ portions 185 of the MPS are configured to inject minority carriers into the n ⁇ portion 400 in a forward direction.
- the p + portions 185 may be doped at a high doping concentration, e.g. 10′ 9 to 10 20 cm ⁇ 3 .
- FIG. 1D illustrates a further example of a semiconductor device.
- the semiconductor device 1 comprises a semiconductor body 101 comprising a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, a contact layer 130 in contact with a first surface 110 of the semiconductor body 101 , the contact layer 130 comprising a metal nitride.
- the contact layer 130 is electrically connected to a first load terminal 240 .
- a non-ohmic contact is formed between the semiconductor body 101 and the contact layer 130 .
- a second surface 115 of the semiconductor body 101 is electrically connected to a second load terminal 250 .
- the second surface 115 is opposite to the first surface 110 .
- the contact layer 130 may be in contact with the doped portion 120 .
- the semiconductor body 101 may be heavily n + -doped and may be of an n-conductivity type.
- the doped portion 120 may be of an n-conductivity type, at a lower concentration of the n-type dopants.
- the semiconductor device shown in FIG. 1D may implement a Schottky-diode or a Schottky-diode related device.
- the first load terminal 240 may be an anode terminal
- the second load terminal 250 may be a cathode terminal.
- the first load terminal 240 may be a source terminal and the second load terminal 250 may be a drain terminal, e.g. in the case of a MOSFET (metal oxide semiconductor field effect transistor) or a JFET (junction field effect transistor).
- the first load terminal 240 may be an emitter terminal
- the second load terminal 250 may be a collector terminal, e.g. in the case of an IGBT (insulated gate bipolar transistor).
- IGBT insulated gate bipolar transistor
- the semiconductor device may comprise an active region 181 and a junction terminal area 182 .
- the contact layer 130 is in contact with the semiconductor body 101 .
- the junction terminal area 182 is different. from the active region 181 with regard to function and structure.
- a load terminal of the semiconductor device e.g. the anode terminal is electrically connected to the semiconductor body for the purpose of current conduction.
- the purpose of the junction termination area is edge termination for reducing the electric field peak at the periphery of the semiconductor device 1 .
- Typical structural elements of the junction termination area include one or more of field plates, ring structures such as floating guard rings or ring segments, junction termination extension (JTE) structures and variation of lateral doping (VLD) structures, for example.
- FIG. 2A shows an example of a current-voltage characteristic of an ohmic contact. As can be seen, the current is approximately proportional with respect to the applied voltage. The ratio of voltage and current is denoted as the resistance of the contact.
- the contact may be a rectifying contact such as, for example, a pn junction or a Schottky junction, in which only a small current, i.e. the reverse saturation current flows, when a low voltage in a reverse direction is applied. When a higher voltage is applied in the reverse direction, a breakdown current may flow.
- non-ohmic contact is understood to represent any kind of contact having a non-linear current-voltage characteristics.
- rectifying contact is considered to represent any kind of contact according to which only a little or no current flows, when a voltage in a reverse direction is applied, the current not being proportional with respect to the applied voltage.
- FIG. 3 shows an example of an energy band diagram of a rectifying metal semiconductor junction.
- the right-hand side of FIG. 3 shows the energy band diagram within the semiconductor material, wherein W C denotes the energy level of the conduction band, W V denotes the energy level of the valence band and W F denotes the Fermi level of the semiconductor material.
- W C denotes the energy level of the conduction band
- W V denotes the energy level of the valence band
- W F denotes the Fermi level of the semiconductor material.
- the difference AW between the energy level W C of the conduction band and the energy level W V of the valence band denotes the bandgap of the semiconductor material.
- the left-hand portion of the energy band diagram of FIG. 3 shows the work function q ⁇ M of the metal.
- a potential barrier is generated at the interface between the Fermi level of the metal W F and the valence band of the semiconductor material.
- the height of the potential barrier q ⁇ B also is referred to as the “Schottky barrier” of the contact.
- Schottky contacts including a semiconductor material having a wide bandgap have a large forward voltage drop due to the work function and the Schottky barrier of the contact metals used.
- the height of the Schottky barrier may be adjusted.
- the work function of the metal may be suitably set.
- the Schottky barrier and hence, the forward voltage drop may be set by setting the nitrogen content of the metal nitride.
- the nitrogen content of the metal nitride may be more than 10 at-% and less than 50 at-%, more specifically, from 38 to 45 at-%.
- the nitrogen content may be determined using Auger ion spectroscopy, secondary ion mass spectroscopy (SIMS) or X-Ray Photoelectron Spectroscopy (XPS).
- the semiconductor device may be a semiconductor component which may be selected from the group consisting of a Schottky diode, a merged pn Schottky diode, a JFET, a MESFET, an integrated flyback diode, a rectifier, an inverter and a power supply.
- FIG. 4 illustrates a reaction chamber of a sputter processing apparatus in which the contact layer comprising a metal nitride may be formed.
- a semiconductor substrate 430 may be disposed on a rotatable table 440 .
- a sputter target 410 may be attached to a supporting element 415 .
- the target may comprise the metal that forms the metal nitride.
- the target may be made of a metal selected from the group consisting of molybdenum, titanium, tantalum, and tungsten. Further, the target 410 may comprise a combination of these metals.
- the chamber 400 comprises a gas inlet 420 through which a plasma forming inert gas such as argon may be fed into the reaction chamber.
- nitrogen (N 2 ) may be fed via the inlet 420 .
- nitrogen is a reactive gas which reacts with the atoms of the target 410 .
- An electrical field as well as a magnetic field may be applied to the sputtering apparatus. Further details of the sputtering method are generally known.
- the content of the nitrogen in the deposited metal nitride layer may be determined. It has been shown, that thereby the work function of the contact layer may be changed.
- the barrier height of a Mo X N Y metal in contact with a silicon carbide layer may be 0.94 eV to 1.12 eV.
- the total pressure within the sputtering chamber may be 4 to 15 mTorr.
- the partial pressure of nitrogen (N 2 (N 2 +Ar)) may be 0.1 to 1.0.
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Abstract
A semiconductor device includes a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with the semiconductor material. The contact layer includes a metal nitride. A non-ohmic contact is formed between the semiconductor material and the contact layer.
Description
- This application claims priority to German Patent Application No. 10 2014 118 874.8 filed on 17 Dec. 2014, the content of said application incorporated herein by reference in its entirety.
- Schottky diodes comprising a metal-semiconductor junction are generally used as rectifying devices. In particular, SiC Schottky diodes are increasingly used in the field of power electronics.
- It is an object of the present invention to provide an improved semiconductor device comprising a metal-semiconductor junction. Further, it is an object to provide a method of manufacturing such a semiconductor device.
- According to an embodiment, a semiconductor device comprises a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with the semiconductor material, the contact layer comprising a metal nitride. A non-ohmic contact is formed between the semiconductor material and the contact layer.
- According to a further embodiment, semiconductor device comprises a semiconductor body including a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with a first surface of the semiconductor body. The contact layer comprises a metal nitride. The contact layer is electrically connected to a first load terminal, and a non-ohmic contact is formed between the semiconductor body and the contact layer. A second surface of the semiconductor body is electrically connected to a second load terminal, the second surface being opposite to the first surface.
- According to a further embodiment, a semiconductor device comprises a semiconductor body including a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, and a contact layer in contact with a first surface of the semiconductor body. The contact layer comprises a metal nitride. The contact layer is electrically connected to a first load terminal. A non-ohmic contact is formed between the semiconductor body and the contact layer. A second surface of the semiconductor body is electrically connected to a second load terminal, the second surface being opposite to the first surface.
- Those skilled in the art will recognize additional features and advantages upon reading the following detailed description, and upon viewing the accompanying drawings.
- The accompanying drawings are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification. The drawings illustrate the embodiments of the present invention and together with the description serve to explain the principles. Other embodiments of the invention and many of the intended advantages will be readily appreciated, as they become better understood by reference to the following detailed description. The elements of the drawings are not necessarily to scale relative to each other. Like reference numbers designate corresponding similar parts.
-
FIG. 1A illustrates a cross-sectional view of an example of a semiconductor device according to an embodiment. -
FIG. 1B shows a cross-sectional view of a semiconductor device according to a further embodiment. -
FIG. 1C shows a cross-sectional view of a semiconductor device according to a further embodiment. -
FIG. 1D shows a cross-sectional view of a semiconductor device according to a further embodiment. -
FIG. 2A illustrates an example of a current-voltage characteristic of an ohmic contact. -
FIG. 2B illustrates a cross-sectional view of a rectifying contact. -
FIG. 3 illustrates an energy band diagram of a Schottky contact. -
FIG. 4 illustrates an example of a reaction chamber which may be used for manufacturing the semiconductor device according to an embodiment. - In the following detailed description reference is made to the accompanying drawings, which form. a part hereof and in which are illustrated by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as “top”, “bottom”, “front”, “back”, “leading”, “trailing” etc. is used with reference to the orientation of the Figures being described. Since components of embodiments of the invention can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope defined by the claims.
- The description of the embodiments is not limiting. In particular, elements of the embodiments described hereinafter may be combined with elements of different embodiments.
- The terms “wafer”, “substrate” or “semiconductor substrate” used in the following description may include any semiconductor-based structure that has a semiconductor surface. Wafer and structure are to be understood to include silicon, silicon-on-insulator (SOI), silicon-on sapphire (SOS), doped and undoped semiconductors, epitaxial layers of silicon supported by a base semiconductor foundation, and other semiconductor structures. The semiconductor need not be silicon-based. The semiconductor could as well be silicon-germanium, germanium, or gallium arsenide. According to other embodiments, diamond, silicon carbide (Sic) or gallium. nitride (GaN) may form the semiconductor substrate material.
- The Figures and the description illustrate relative doping concentrations by indicating “−” or “+” next to the doping type “n” or “p”. For example, “n−” means a doping concentration. which is lower than the doping concentration of an “n”-doping region while an “n+”-doping region has a higher doping concentration than an “n”-doping region. Doping regions of the same relative doping concentration do not necessarily have the same absolute doping concentration. For example, two different “n”-doping regions may have the same or different absolute doping concentrations. In the Figures and the description, for the sake of a better comprehension, often. the doped portions are designated as being “p” or “n”-doped. As is clearly to be understood, this designation is by no means intended to be limiting. The doping type can be arbitrary as long as the described functionality is achieved. Further, in all embodiments, the doping types can be reversed.
- As employed in this specification, the terms “coupled” and/or “electrically coupled” are not meant to mean that the elements must be directly coupled together—intervening elements may be provided between the “coupled” or “electrically coupled” elements. The term “electrically connected” intends to describe a low-resistive electric connection between the elements electrically connected together.
- As used herein, the terms “having”, “containing”, “including”, “comprising” and the like are open ended terms that indicate the presence of stated elements or features, but do not preclude additional elements or features. The articles “a”, “an” and “the” are intended to include the plural as well as the singular, unless the context clearly indicates otherwise.
- The terms “lateral” and “horizontal” as used in this specification intends to describe an orientation parallel to a first surface of a semiconductor substrate or semiconductor body. This can be for instance the surface of a wafer or a die.
- The term “vertical” as used in this specification intends to describe an orientation which is arranged perpendicular to the first surface of the semiconductor substrate or semiconductor body.
-
FIG. 1A shows a cross-sectional view of a semiconductor device 1 according to an embodiment. The semiconductor device illustrated inFIG. 1A comprises asemiconductor material 100 and acontact layer 130 in contact with thesemiconductor material 100. As will be explained in the following, thecontact layer 130 comprises a metal nitride and a non-ohmic contact is formed between thesemiconductor material 100 and thecontact layer 130. A bandgap of thesemiconductor material 100 is larger than 2 eV and less than 10 eV, e.g. less than 6 eV. According to a further embodiment, the bandgap of the semiconductor material may be larger than 0.9 or 1 eV and less than 10 eV. - The
semiconductor material 100 may be asemiconductor body 101 including one or more doped portions or layers at either side thereof. The doped portion may be formed by various methods such as ion implantation, diffusion and epitaxial growth of the doped layer. For example, the semiconductor material may be a material having a bandgap larger than 1 eV. By way of example, the semiconductor material may comprise silicon carbide, diamond, gallium nitride, indium phosphide, AlGaAs and further examples of III-V semiconductors. - For example, the
semiconductor body 101 may be heavily n-doped and may comprise a portion that is n-doped at a lower doping level, the portion being disposed at afirst surface 110 of the semiconductor body. Thecontact layer 130 may comprise a combination of a stoichiometric compound with a non-stoichiometric compound including the metal and nitrogen. For example, thecontact layer 130 may comprise mixture of MN, having different values for x and y, wherein B denotes the metal. For example, the metal nitride layer may comprise a mixture of MN and MxNy or of MN2 and MxNy. Generally, in these formulas, x may be equal to 1, and y may be a real number fulfilling 0<y<3. Alternatively, y may be equal to 1, and x may be a real number fulfilling 0<x<3. For example, the metal may be selected from the group of molybdenum, titanium, tantalum, and tungsten. Further, the metal nitride may comprise two metals, such as MoTiN. - The
contact layer 130 may be electrically connected to an anode terminal. Further, the semiconductor device 1 may comprise aback side metallization 160 which forms an ohmic contact to thesemiconductor body 101. Theback side metallization 160 is disposed at asecond surface 115 of thesemiconductor body 101, opposite to thefirst surface 110. Theback side metallization 160 may be electrically connected to a cathode terminal. The terms “ohmic contact”, “Schottky contact”, and “rectifying contact” will be explained below, while referring toFIGS. 2A and 2B . -
FIG. 1B shows a further embodiment of a semiconductor device 1. The semiconductor device 1 illustrated inFIG. 1B comprises a semiconductor material 200, e.g. a semiconductor body 201 and acontact layer 130 in contact with the semiconductor material. Thecontact layer 130 comprises a metal nitride and a non-ohmic contact is formed between the semiconductor material 200 and thecontact layer 130. - Generally, the semiconductor material 200 may be a semiconductor body 201 including further doped portions. For example, these doped portions may be disposed adjacent to a
first surface 210 or a second surface 215 of the semiconductor body 201. Differing from the embodiment ofFIG. 1A , the semiconductor device 1 ofFIG. 1B further comprises a dopedregion 180 of the second conductivity type. For example, the semiconductor material 200 may be n−-doped and the dopedportion 180 may be p+-doped. The dopedportion 180 may be disposed at thefirst surface 210 of the semiconductor body 201, and portions of the semiconductor material 200, which is n−-doped may be present at thefirst surface 210. Thecontact layer 130 may be in contact with the semiconductor material 200 and thedoped portions 180. The semiconductor device 1 illustrated inFIG. 1B further comprises a heavily n+-dopedregion 170 at the second surface of the semiconductor body 201. The semiconductor device further comprises a backside metallization layer 160 that forms an ohmic contact to the dopedlayer 170. The backside metallization layer 160 may be electrically connected to a cathode terminal. Thecontact layer 130 may be electrically connected to an anode terminal. The semiconductor material may comprise any of the materials mentioned above. For example, the semiconductor material may be silicon carbide. - The semiconductor device illustrated in
FIG. 1B may implement a Junction-Barrier Schottky (JBS) diode including p+ implantedportions 180. When a reverse voltage is applied to the semiconductor device, depletion regions formed at the interface between the n− portion 200 and the p+ portion 180 pinch off a leakage current which may arise from the Schottky contact of the device. Accordingly, such a Junction-Barrier Schottky diode has a reduced leakage current. Such a JBS may be suitably used in a switched mode power supply. - According to a further embodiment, the semiconductor device 1 may implement a merged PIN Schottky diode (MPS).
FIG. 1C shows a cross-sectional view of such a merged PIN Schottky-Diode. The MPS comprises similar components as the JBS, these components having the same reference numerals as the corresponding components of the JBS. In particular, the p− portions 185 of the MPS are configured to inject minority carriers into the n− portion 400 in a forward direction. For example the p+ portions 185 may be doped at a high doping concentration, e.g. 10′9 to 1020 cm−3. -
FIG. 1D illustrates a further example of a semiconductor device. As is shown, the semiconductor device 1 comprises asemiconductor body 101 comprising a semiconductor material having a bandgap larger than 2 eV and less than 10 eV, acontact layer 130 in contact with afirst surface 110 of thesemiconductor body 101, thecontact layer 130 comprising a metal nitride. Thecontact layer 130 is electrically connected to afirst load terminal 240. A non-ohmic contact is formed between thesemiconductor body 101 and thecontact layer 130. Asecond surface 115 of thesemiconductor body 101 is electrically connected to asecond load terminal 250. Thesecond surface 115 is opposite to thefirst surface 110. - For example, the
contact layer 130 may be in contact with the dopedportion 120. According to an embodiment, thesemiconductor body 101 may be heavily n+-doped and may be of an n-conductivity type. The dopedportion 120 may be of an n-conductivity type, at a lower concentration of the n-type dopants. - For example, the semiconductor device shown in
FIG. 1D may implement a Schottky-diode or a Schottky-diode related device. In this case, thefirst load terminal 240 may be an anode terminal, and thesecond load terminal 250 may be a cathode terminal. Depending from different implementations of the semiconductor device, thefirst load terminal 240 may be a source terminal and thesecond load terminal 250 may be a drain terminal, e.g. in the case of a MOSFET (metal oxide semiconductor field effect transistor) or a JFET (junction field effect transistor). According to a further example, thefirst load terminal 240 may be an emitter terminal, and thesecond load terminal 250 may be a collector terminal, e.g. in the case of an IGBT (insulated gate bipolar transistor). - The semiconductor device may comprise an
active region 181 and ajunction terminal area 182. In theactive region 181, thecontact layer 130 is in contact with thesemiconductor body 101. Thejunction terminal area 182 is different. from theactive region 181 with regard to function and structure. To be more specific, in theactive region 181, a load terminal of the semiconductor device, e.g. the anode terminal is electrically connected to the semiconductor body for the purpose of current conduction. In contrast, the purpose of the junction termination area is edge termination for reducing the electric field peak at the periphery of the semiconductor device 1. Typical structural elements of the junction termination area include one or more of field plates, ring structures such as floating guard rings or ring segments, junction termination extension (JTE) structures and variation of lateral doping (VLD) structures, for example. -
FIG. 2A shows an example of a current-voltage characteristic of an ohmic contact. As can be seen, the current is approximately proportional with respect to the applied voltage. The ratio of voltage and current is denoted as the resistance of the contact. - On the other hand, as is illustrated in
FIG. 2B , across a non-ohmic contact the current need not be proportional with respect to the voltage. Rather, as can be seen on the left-hand side of the chart illustrated inFIG. 2B , almost no current may be flowing, independent from the negative voltage applied. Further, when applying a positive voltage, the current may increase in a non-linear manner. Any kind of current-voltage characteristics in which the current is non-linear to the applied voltage, may be regarded as establishing a non-ohmic contact. For example, the contact may be a rectifying contact such as, for example, a pn junction or a Schottky junction, in which only a small current, i.e. the reverse saturation current flows, when a low voltage in a reverse direction is applied. When a higher voltage is applied in the reverse direction, a breakdown current may flow. - In the context of the present specification, the term “non-ohmic contact” is understood to represent any kind of contact having a non-linear current-voltage characteristics. According to a further modification, the term “rectifying contact” is considered to represent any kind of contact according to which only a little or no current flows, when a voltage in a reverse direction is applied, the current not being proportional with respect to the applied voltage.
-
FIG. 3 shows an example of an energy band diagram of a rectifying metal semiconductor junction. The right-hand side ofFIG. 3 shows the energy band diagram within the semiconductor material, wherein WC denotes the energy level of the conduction band, WV denotes the energy level of the valence band and WF denotes the Fermi level of the semiconductor material. The difference AW between the energy level WC of the conduction band and the energy level WV of the valence band denotes the bandgap of the semiconductor material. The left-hand portion of the energy band diagram ofFIG. 3 shows the work function q×φM of the metal. When the metal and the semiconductor material form a junction, a potential barrier is generated at the interface between the Fermi level of the metal WF and the valence band of the semiconductor material. The height of the potential barrier q×φB also is referred to as the “Schottky barrier” of the contact. - Generally, Schottky contacts including a semiconductor material having a wide bandgap have a large forward voltage drop due to the work function and the Schottky barrier of the contact metals used. According to the described embodiment, by selecting a contact layer including a metal nitride, the height of the Schottky barrier may be adjusted. in particular, by varying the nitrogen content of the metal nitride, the work function of the metal may be suitably set. As a consequence, the Schottky barrier and hence, the forward voltage drop may be set by setting the nitrogen content of the metal nitride. For example, the nitrogen content of the metal nitride may be more than 10 at-% and less than 50 at-%, more specifically, from 38 to 45 at-%. For example, the nitrogen content may be determined using Auger ion spectroscopy, secondary ion mass spectroscopy (SIMS) or X-Ray Photoelectron Spectroscopy (XPS).
- The semiconductor device may be a semiconductor component which may be selected from the group consisting of a Schottky diode, a merged pn Schottky diode, a JFET, a MESFET, an integrated flyback diode, a rectifier, an inverter and a power supply.
-
FIG. 4 illustrates a reaction chamber of a sputter processing apparatus in which the contact layer comprising a metal nitride may be formed. Asemiconductor substrate 430 may be disposed on a rotatable table 440. Asputter target 410 may be attached to a supportingelement 415. The target may comprise the metal that forms the metal nitride. For example, the target may be made of a metal selected from the group consisting of molybdenum, titanium, tantalum, and tungsten. Further, thetarget 410 may comprise a combination of these metals. Thechamber 400 comprises agas inlet 420 through which a plasma forming inert gas such as argon may be fed into the reaction chamber. Further, nitrogen (N2) may be fed via theinlet 420. After igniting a plasma nitrogen is a reactive gas which reacts with the atoms of thetarget 410. An electrical field as well as a magnetic field may be applied to the sputtering apparatus. Further details of the sputtering method are generally known. - According to an embodiment, by setting the partial pressure of nitrogen, the content of the nitrogen in the deposited metal nitride layer may be determined. It has been shown, that thereby the work function of the contact layer may be changed. For example, the barrier height of a MoXNY metal in contact with a silicon carbide layer may be 0.94 eV to 1.12 eV. For example, the total pressure within the sputtering chamber may be 4 to 15 mTorr. The partial pressure of nitrogen (N2(N2+Ar)) may be 0.1 to 1.0.
- While embodiments of the invention have been described above, it is obvious that further embodiments may be implemented. For example, further embodiments may comprise any subcombination of features recited in the claims or any subcombination of elements described in the examples given above. This application is intended to cover any adaptations or variations of the specific embodiments discussed herein. Therefore, it is intended that this invention be limited only by the claims and the equivalents thereof.
Claims (15)
1. A semiconductor device, comprising:
a semiconductor material having a bandgap larger than 2 eV and less than 10 eV;
a contact layer in contact with the semiconductor material, the contact layer comprising a metal nitride, wherein a nitrogen content of the metal nitride is 10 to 45 at-%; and
a non-ohmic contact formed between the semiconductor material and the contact layer.
2. The semiconductor device of claim 1 , wherein the semiconductor material comprises SiC.
3. The semiconductor device of claim 1 , wherein the metal nitride comprises a combination of a stoichiometric compound with a non-stoichiometric compound including the metal and nitrogen.
4. The semiconductor device of claim 1 , wherein the metal nitride comprises a metal selected from the group consisting of molybdenum, titanium, tantalum, and tungsten. The semiconductor device of claim 1 , wherein the non-ohmic contact is a Schottky contact.
6. The semiconductor device of claim 1 , wherein the non-ohmic contact is a rectifying contact.
7. An electrical component comprising the semiconductor device of claim 1 , wherein the electrical component is selected from the group consisting of a Schottky diode, a merged pn Schottky diode, a JFET, a MESFET, an integrated flyback diode, a rectifier, an inverter, and a power supply.
8. A semiconductor device, comprising:
a semiconductor body comprising a semiconductor material having a bandgap larger than 2 eV and less than 10 eV;
a contact layer in contact with a first surface of the semiconductor body, the contact layer comprising a metal nitride, wherein a nitrogen content of the metal nitride is 10 to 45 at-%, the contact layer being electrically connected to a first load terminal; and
a non-ohmic contact formed between the semiconductor body and the contact layer,
wherein a second surface of the semiconductor body is electrically connected to a second load terminal, the second surface being opposite to the first surface.
9. The semiconductor device of claim 8 , further comprising a doped portion in contact with the contact layer, the doped portion being embedded in the semiconductor body and having a conductivity type opposite to the conductivity type of the semiconductor body.
10. A method of manufacturing a semiconductor device, the method comprising:
forming a contact layer in contact with a semiconductor material, so as to form a non-ohmic contact between the semiconductor material and the contact layer, the semiconductor material having a bandgap larger than 2 eV and less than 10 eV, the contact layer comprising a metal nitride,
wherein forming the contact layer comprises selecting a composition ratio of the metal nitride, thereby setting a work function of the contact layer.
11. The method of claim 10 , wherein the semiconductor material comprises SiC.
12. The method of claim 10 , wherein the contact layer is formed by a reactive sputtering process using nitrogen as a reactant.
13. The method of claim 12 , wherein a partial pressure of nitrogen during the reactive sputtering process is set so as to form the metal nitride comprising a mixed phase of MN and M2N, wherein M denotes the metal.
14. The method of claim 13 , wherein a ratio of the nitrogen partial pressure and the total pressure during the sputtering process is in a range of 0.1 to 1.0.
15. The method of claim 13 , wherein. the partial pressure of nitrogen during the reactive sputtering process is set so as to set the work function of the contact layer.
16. The method of claim 10 , wherein the metal nitride comprises a metal selected from the group consisting of molybdenum, titanium, tantalum, and tungsten.
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US16/238,213 US10431698B2 (en) | 2014-12-17 | 2019-01-02 | Semiconductor device with non-ohmic contact between SiC and a contact layer containing metal nitride |
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US20180158964A1 (en) | 2018-06-07 |
US20190140111A1 (en) | 2019-05-09 |
US10431698B2 (en) | 2019-10-01 |
JP6231065B2 (en) | 2017-11-15 |
JP2016115942A (en) | 2016-06-23 |
US10199514B2 (en) | 2019-02-05 |
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