US20160136660A1 - Multi-gas centrally cooled showerhead design - Google Patents
Multi-gas centrally cooled showerhead design Download PDFInfo
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- US20160136660A1 US20160136660A1 US15/003,083 US201615003083A US2016136660A1 US 20160136660 A1 US20160136660 A1 US 20160136660A1 US 201615003083 A US201615003083 A US 201615003083A US 2016136660 A1 US2016136660 A1 US 2016136660A1
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- gas
- bottom plate
- plenum
- plate
- mid
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
- B05B1/18—Roses; Shower heads
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4411—Cooling of the reaction chamber walls
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45514—Mixing in close vicinity to the substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45572—Cooled nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45574—Nozzles for more than one gas
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45576—Coaxial inlets for each gas
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
Definitions
- Embodiments of the present invention generally relate to methods and apparatus for chemical vapor deposition (CVD) on a substrate, and, in particular, to a showerhead design for use in metal organic chemical vapor deposition and/or hydride vapor phase epitaxy (HVPE).
- CVD chemical vapor deposition
- HVPE hydride vapor phase epitaxy
- Group III-V films are finding greater importance in the development and fabrication of a variety of semiconductor devices, such as short wavelength light emitting diodes (LEDs), laser diodes (LDs), and electronic devices including high power, high frequency, high temperature transistors and integrated circuits.
- LEDs light emitting diodes
- LDs laser diodes
- electronic devices including high power, high frequency, high temperature transistors and integrated circuits.
- short wavelength (e.g., blue/green to ultraviolet) LEDs are fabricated using the Group III-nitride semiconducting material gallium nitride. It has been observed that short wavelength LEDs fabricated using gallium nitride can provide significantly greater efficiencies and longer operating lifetimes than short wavelength LEDs fabricated using non-nitride semiconducting materials, such as Group II-VI materials.
- MOCVD metal organic chemical vapor deposition
- This chemical vapor deposition method is generally performed in a reactor having a temperature controlled environment to assure the stability of a first process gas which contains at least one element from Group III, such as gallium.
- a second process gas such as ammonia, provides the nitrogen needed to form a Group III-nitride.
- the two process gases are injected into a processing zone within the reactor where they mix and move towards a heated substrate in the processing zone.
- a carrier gas may be used to assist in the transport of the process gases towards the substrate.
- the precursors react at the surface of the heated substrate to form a Group III-nitride layer on the substrate surface.
- the quality of the film depends in part upon deposition uniformity which, in turn, depends upon uniform mixing of the precursors across the substrate.
- each substrate may have a diameter ranging from 50 mm to 100 mm or larger.
- the uniform mixing of precursors over larger substrates and/or more substrates and larger deposition areas is desirable in order to increase yield and throughput. These factors are important since they directly affect the cost to produce an electronic device and, thus, a device manufacturer's competitiveness in the market place.
- the hot reactor surfaces are formed by radiation from the heat sources used to heat the substrates.
- the deposition of the precursor materials on the hot surfaces can be especially problematic when it occurs in or on the precursor distribution components, such as the showerhead. Deposition on the precursor distribution components will affect the flow distribution uniformity over time. Therefore, there is a need for a gas distribution apparatus that prevents or reduces the likelihood that the MOCVD or HVPE precursors will be heated to a temperature that will cause them to break down and affect the performance of the gas distribution device.
- the apparatus generally include a lower bottom plate and an upper bottom plate defining a first plenum.
- the upper bottom plate and a mid-plate positioned above the upper bottom plate define a heat exchanging channel.
- the mid-plate and a top plate positioned above the mid-plate define a second plenum.
- a plurality of gas conduits extend from the second plenum through the heat exchanging channel and the first plenum.
- the method generally includes flowing a first gas through a first plenum into a processing region, and flowing a second gas through a second plenum into a processing region.
- a heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum.
- the temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region.
- the first gas and the second gas are then reacted to form a film on a substrate.
- One embodiment provides an apparatus comprising a lower bottom plate and an upper bottom plate positioned above the lower bottom plate.
- the upper bottom plate and the lower bottom plate define a first plenum.
- a mid-plate is positioned above the upper bottom plate.
- the mid-plate and the upper bottom plate define a heat exchanging channel for containing a heat exchanging fluid.
- a top plate is positioned above the mid-plate.
- the top plate and the mid-plate define a second plenum.
- a plurality of first gas conduits extend from the second plenum through the heat exchanging channel and the first plenum. Each of the plurality of first gas conduits are in fluid communication with the second plenum and a processing region of a processing chamber.
- an apparatus in another embodiment, comprises a lower bottom plate and an upper bottom plate positioned above the lower bottom plate.
- the upper bottom plate and the lower bottom plate define a first plenum.
- a plurality of first gas conduits are in fluid communication with the first plenum and a processing region of a process chamber.
- a mid-plate is positioned above the upper bottom plate.
- the mid-plate and the upper bottom plate define a heat exchanging channel for containing a heat exchanging fluid.
- a top plate is positioned above the mid-plate.
- the top plate and the mid-plate define a second plenum.
- the showerhead apparatus also comprises a plurality of second gas conduits in fluid communication with the second plenum and the processing region.
- the plurality of second gas conduits extend through the first plenum and the heat exchanging channel.
- Each of the first gas conduits has a second gas conduit that is disposed within the boundary of the first gas conduit.
- a method comprises flowing a first gas through a first plenum of a showerhead apparatus and into a processing region of a chamber.
- a second gas is flown through a second plenum of the showerhead apparatus and into the processing region of the chamber.
- the second plenum is fluidly coupled to the processing region through a plurality of gas conduits.
- a heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum.
- the plurality of gas conduits extend through the heat exchanging channel.
- the first gas and the second gas are reacted in the processing region to form a film on the substrate, and the temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region.
- FIG. 1 is a schematic view of a deposition apparatus according to one embodiment of the invention.
- FIG. 2 is a cross sectional view of an embodiment of a showerhead assembly.
- FIG. 3 is a partial cross sectional view of another embodiment of a showerhead assembly.
- FIG. 4A is a partial schematic bottom view of the showerhead assembly shown in FIG. 3 according to an embodiment of the invention.
- FIG. 4B is a partial schematic bottom view of the showerhead assembly shown in FIG. 2 according to an embodiment of the invention.
- FIG. 4C is a partial schematic bottom view of the showerhead assembly shown in FIG. 2 according to an embodiment of the invention.
- the apparatus generally include a lower bottom plate and an upper bottom plate defining a first plenum.
- the upper bottom plate and a mid-plate positioned above the upper bottom plate define a heat exchanging channel.
- the mid-plate and a top plate positioned above the mid-plate define a second plenum.
- a plurality of gas conduits extend from the second plenum through the heat exchanging channel and the first plenum.
- the method generally includes flowing a first gas through the first plenum into a processing region and flowing a second gas through the second plenum into a processing region.
- a heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum.
- the temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region.
- the first gas and the second gas are then reacted to form a film on a substrate.
- FIG. 1 is a schematic view of a deposition apparatus according to one embodiment of the invention.
- the apparatus 100 includes a chamber 102 , a gas delivery system 125 , a remote plasma source 126 , and a vacuum system 112 .
- the chamber 102 includes a chamber body 103 that encloses a processing region 108 and a lower volume 110 .
- a showerhead assembly 104 is disposed at one end of the chamber body 103 , while a lower dome 119 is disposed at another end of the chamber body 103 .
- a processing region 108 and a lower volume 110 are located between the showerhead assembly 104 and a lower dome 119 within the chamber body 103 .
- a substrate carrier 114 is disposed between the processing region 108 and the lower volume 119 .
- the lower volume 110 is defined by the lower dome 119 and the substrate carrier 114
- the processing region 108 is defined by the showerhead assembly 104 and the substrate carrier 114
- the substrate carrier 114 is shown in the process position, but may be moved to a lower position where the substrates 140 may be loaded or unloaded.
- An exhaust ring 120 is disposed around the periphery of the substrate carrier 114 to help prevent deposition from occurring in the lower volume 110 and to also help direct exhaust gases from the chamber 102 to exhaust ports 109 .
- Radiant heating may be provided by a plurality of inner lamps 121 A and outer lamps 121 B disposed below the lower dome 119 to effect heating of substrates 140 , substrate carrier 114 , or process gases located within processing region 108 .
- the lower dome 119 is made of transparent material, such as high-purity quartz, to allow light to pass therethrough from the plurality of inner lamps 121 A and outer lamps 121 B.
- Reflectors 166 may be used to direct the radiant energy provided by inner and outer lamps 121 A, 121 B to the interior volume of chamber 102 . Additional rings of lamps may also be used for finer temperature control of the substrates 140 .
- the plurality of inner and outer lamps 121 A, 121 B may be arranged in concentric circles or zones (not shown), and each lamp zone may be separately powered.
- One or more temperature sensors such as pyrometers (not shown), may be disposed within the showerhead assembly 104 to measure substrate 140 and substrate carrier 114 temperatures.
- the temperature data may be sent to a controller 199 which can adjust power to separate lamp zones to maintain a predetermined temperature profile across the substrate carrier 114 .
- the power to separate lamp zones can be adjusted to compensate for precursor flow or precursor concentration non-uniformity. For example, if the precursor concentration is lower in a substrate carrier 114 region near an outer lamp zone, the power to the outer lamp zone may be adjusted to help compensate for the precursor depletion in this region.
- the inner and outer lamps 121 A, 121 B may heat the substrates 140 to a temperature of about 400 degrees Celsius to about 1200 degrees Celsius during processing. It is to be understood that the heating source is not restricted to the use of arrays of inner and outer lamps 121 A, 121 B. Any suitable heating source may be utilized to ensure that the proper temperature is adequately applied to the chamber 102 and substrates 140 therein.
- the heating source may comprise resistive heating elements which are in thermal contact with the substrate carrier 114 .
- the substrate carrier 114 includes one or more recesses 116 within which one or more substrates 140 are disposed during processing.
- the substrate carrier 114 is formed from silicon carbide (SiC) and generally ranges in size from about 200 millimeters to about 750 millimeters. Alternatively, the substrate carrier 114 may be formed from SiC-coated graphite.
- the substrate carrier 114 can rotate about an axis during processing. For example, the substrate carrier 114 may be rotated at about 2 RPM to about 100 RPM, such as at about 30 RPM. Rotating the substrate carrier 114 aids in providing uniform heating of the substrates 140 and uniform exposure of the processing gases to each substrate 140 .
- the distance between the lower surface of showerhead assembly 104 and the substrate carrier 114 ranges from about 4 mm to about 41 mm.
- the lower surface of showerhead assembly 104 is coplanar and faces the substrates 140 during processing.
- the substrate carrier 114 is shown having two substrates 140 positioned within recesses 116 . However, substrate carrier 114 may support six, eight, or more substrates during processing depending on the desired throughput. Typical substrates 140 may include sapphire, silicon carbide, or silicon. It is contemplated that other types of substrates 140 , such as glass substrates 140 , may also be processed. Substrate 140 size may range from 50 mm-150 mm in diameter or larger. It is to be understood that substrates 140 of other sizes may be processed within the chamber 102 and according to the processes described herein.
- a gas delivery system 125 is coupled to the showerhead apparatus 104 to provide one or more gases to the processing region 108 during processing.
- the gas delivery system 125 includes multiple gas sources 131 A and 132 A coupled to supply lines 131 and 132 , respectively, as well as supply line 133 . It is to be understood that the gas delivery system 125 is not limited to two gas sources.
- Each supply line 131 , 132 may comprise a plurality of lines which are coupled to and in fluid communication with the showerhead assembly 104 .
- some of the sources may be liquid sources rather than gases, in which case the gas delivery system may include a liquid injection system or other means (e.g., a bubbler) to vaporize the liquid.
- the vapor may then be mixed with a carrier gas such as hydrogen (H 2 ), nitrogen (N 2 ), helium (He) or argon (Ar) prior to delivery to the chamber 102 .
- a carrier gas such as hydrogen (H 2 ), nitrogen (N 2 ), helium (He) or argon (Ar)
- gases such as precursor gases, carrier gases, purge gases, cleaning/etching gases or others may be supplied from the gas delivery system 125 to separate supply lines 131 , 132 , and 133 to the showerhead assembly 104 .
- the supply lines 131 , 132 , and 133 may include shut-off valves and mass flow controllers or other types of controllers to monitor and regulate or shut off the flow of gas in each line.
- a conduit 129 receives cleaning and/or etching gases from a remote plasma source 126 .
- the remote plasma source 126 receives gases from the gas delivery system 125 via supply line 124 .
- a valve 130 is disposed between the showerhead assembly 104 and remote plasma source 126 to control the flow of gas between the remote plasma source 126 and the showerhead assembly 104 .
- the valve 130 may be opened to allow a cleaning and/or etching gas, including ionized gases, to flow into the showerhead assembly 104 via supply line 133 .
- gas delivery system 125 and remote plasma source 126 may be suitably adapted so that process gases from sources 131 A and 132 A may be supplied to the remote plasma source 126 to produce plasma species which may be sent through showerhead assembly 104 to deposit CVD layers, such as III-V films, on substrates 140 .
- the remote plasma source 126 is a radio frequency plasma source adapted for chamber cleaning and/or substrate etching.
- Cleaning and/or etching gas may be supplied to the remote plasma source 126 via supply line 124 to produce plasma species which may be sent via conduit 129 and supply line 133 for dispersion through showerhead assembly 104 into chamber 102 .
- cleaning/etching gases may be delivered from gas delivery system 125 for non-plasma cleaning and/or etching using alternate supply line configurations to showerhead assembly 104 .
- Gases for a cleaning application may comprise a halogen containing gas, such as fluorine or chlorine, or vapor comprising hydrochloric acid (HCl). It is contemplated that plasma sources other than radio frequency plasma sources, for example microwave plasma sources, may also be used.
- a purge gas (e.g., nitrogen) may be delivered into the chamber 102 from the showerhead assembly 104 and/or from inlet ports (not shown) disposed below the substrate carrier 114 near the bottom of the chamber body 103 .
- the purge gas may be used to remove gases from the processing region 108 after processing.
- gas provided from inlet ports disposed below the substrate carrier 114 may also increase the pressure within the lower volume 110 to contain process gases in the processing region 108 , thereby reducing the deposition of material in undesired locations.
- the purge gas enters the lower volume 110 of the chamber 102 and flows upwards past the substrate carrier 114 and exhaust ring 120 and into multiple exhaust ports 109 which are disposed around an annular exhaust channel 105 .
- An exhaust conduit 106 connects the annular exhaust channel 105 to a vacuum system 112 which includes a vacuum pump (not shown).
- the chamber pressure may be controlled using a valve system 107 which controls the rate at which the exhaust gases are drawn from the annular exhaust channel 105 .
- the draw of the annular exhaust channel 105 may affect gas flow so that the process gas introduced to the processing region 108 flows substantially tangential to the substrates 140 and may be uniformly distributed radially across the substrate 140 deposition surfaces in a laminar flow.
- the processing region 108 may be maintained at a pressure of about 760 Torr down to about 80 Torr during processing.
- the showerhead assembly 104 has a heat exchanging system 170 coupled thereto to assist in controlling the temperature of various components of the showerhead assembly 170 .
- the heat exchanging system 170 comprises a heat exchanger 170 A that is coupled to the showerhead assembly 104 via an inlet conduit 171 and an outlet conduit 172 .
- a controller 199 is coupled to the heat exchanger 170 A to control the temperature of the showerhead assembly 104 .
- FIG. 2 is a cross sectional view of an embodiment of a showerhead assembly.
- the showerhead assembly 104 comprises a top plate 230 , mid-plate 210 , an upper bottom plate 233 A and a lower bottom plate 233 B.
- the upper bottom plate 233 A and the lower bottom plate 233 B define the first plenum 244 .
- the mid-plate 210 and upper bottom plate 233 A define the heat exchanging channel 275 .
- the top plate 230 and the mid-plate 210 define the second plenum 245 .
- the heat exchanging channel 275 is coupled to a heat exchanging system 170 to control the temperature of the various surfaces of the showerhead assembly 104 .
- the heat exchanging system 170 comprises a heat exchanger 170 A that is coupled to the one or more heat exchanging channels 275 formed in the showerhead assembly 104 via an inlet conduit 171 and an outlet conduit 172 .
- the heat exchanging channel 275 through which a heat exchanging fluid flows is used to help regulate the temperature of the showerhead assembly 104 .
- the heat exchanging channel 275 is disposed between the first plenum 244 and the second plenum 245 .
- the heat exchanging channel 275 encircles the gas conduits 247 , which are disposed through mid-plate holes 240 , bottom plate holes 250 and holes 251 in wall 285 .
- the heat exchanging fluid can flow around and cool the gas or vapor flowing through a central region 247 A of the gas conduits 247 while the vapor flows into processing region 108 .
- the central region 247 A of the gas conduits 247 are in fluid communication with the second plenum 245 and the processing region 108 , thus permitting process gases to travel from the second plenum 245 to the processing region 108 .
- the heat exchanging channel 275 is disposed between the first plenum 244 and second plenum 245 to control the temperature of the gases or vapor delivered therethrough.
- a central conduit 248 is disposed through the showerhead assembly 104 to provide a cleaning and/or etching gas or plasma into the chamber body 103 .
- the central conduit 248 may receive cleaning and/or etching gas or plasma from supply line 133 and disperse the cleaning and/or etching gas inside chamber body 103 to provide more effective cleaning.
- cleaning and/or etching gas or plasma may be delivered into chamber body 103 through other routes, such as through the gas conduits 247 and/or conduits 281 in the showerhead assembly 104 .
- fluorine or chlorine may be used for plasma based etching or cleaning.
- halogen gases such as Cl 2 , Br, and I 2
- halides such as HCl, HBr, and HI
- the cleaning and/or etching gas is removed from the processing region 108 through the exhaust port 109 , the exhaust channel 105 , and the exhaust conduit 106 .
- the process gas 255 flows from the gas supply 132 A through supply line 132 into the second plenum 245 and into gas conduits 247 , which are in fluid communication with the processing region 108 .
- the process gas 254 flows from gas supply 131 A through the supply line 131 into the gas conduits 281 towards the processing region 108 .
- the first plenum 244 is not in fluid communication with the second plenum 245 so that the first process gas 254 and the second process gas 255 remain isolated until injected into the processing region 108 located within the chamber body 103 .
- the process gas 254 and/or process gas 255 may comprise one or more precursor gases or other process gases, including carrier gases and dopant gases, to carry out desired processes within the processing region 108 .
- process gas 254 and process gas 255 may contain one or more precursors for deposition of a material on substrates 140 positioned on substrate carrier 114 .
- the positioning of a heat exchanging channel 275 provides control of the temperature of various showerhead assembly features, such as the gas conduits 247 , the wall 280 , and the showerhead face 283 .
- Control of the temperature of the showerhead assembly features is desirable to reduce or eliminate the formation of condensates on the showerhead assembly 104 .
- Control of the temperature of the various showerhead assembly features is also desirable to reduce gas phase particle formation and to prevent the production of undesirable precursor reactant products which may adversely affect the composition of the film deposited on the substrates 140 .
- the showerhead temperature may be measured by one or more thermocouples or other temperature sensors disposed in proximity to showerhead face 283 , heat exchanging channel 275 , and/or wall 280 .
- thermocouples or other temperature sensors may be disposed in proximity to the inlet conduit 171 and/or the outlet conduit 172 .
- the temperature data measured by the one or more thermocouples or other temperature sensors is sent to a controller which may adjust the heat exchanging fluid temperature and flow rate to maintain the showerhead temperature within a predetermined range.
- the showerhead temperature is generally maintained at about 50 degrees Celsius to about 350 degrees Celsius, but may also be maintained at a temperature of greater than 350 degrees Celsius, if desired.
- gas conduit and heat exchanging channel configuration that only requires half of the gas conduits (e.g., gas conduits 247 ) to extend through the heat exchanging channel 275 will greatly reduce the chances of the heat exchanging fluid leaking into the first plenum 244 or second plenum 245 at the junctions formed between the gas conduits (e.g., gas conduits 247 ) and the walls (e.g., walls 279 and 280 ).
- the leakage of the heat exchanging fluid into the processing region 108 can be dangerous at the typical processing temperature used to form LED and LD products, such as greater than 750 degrees Celsius, due to the phase change created as the liquid heat exchanging fluid turns into a gas.
- the flow rate of the heat exchanging fluid may be adjusted to help control the temperature of the showerhead assembly 104 .
- the thickness of the walls 279 and 280 surrounding the heat exchanging channel 275 may be designed to facilitate temperature regulation of various showerhead surfaces.
- Suitable heat exchanging fluids include water, water-based ethylene glycol mixtures, a perfluoropolyether (e.g., GALDEN® fluid), oil-based thermal transfer fluids, or liquid metals such as gallium or gallium alloy.
- the heat exchanging fluid is circulated through a heat exchanger 170 A to raise or lower the temperature of the heat exchanging fluid as required to maintain the temperature of the showerhead assembly 104 within a desired temperature range.
- the heat exchanging fluid can be maintained at a temperature of 20 degrees Celsius or greater, depending on process requirements.
- the heat exchanging fluid can be maintained at a temperature within a range from about 20 degrees Celsius to about 120 degrees, or within a range of about 100 degrees Celsius to about 350 degrees Celsius.
- the heat exchanging fluid may also be heated above its boiling point so that the showerhead assembly 104 may be maintained at higher temperatures using readily available heat exchanging fluids.
- FIG. 3 is a partial cross sectional view of another embodiment of a showerhead assembly.
- the showerhead assembly 304 comprises a top plate 330 , mid-plate 310 , an upper bottom plate 333 A and a lower bottom plate 333 B which are coupled together.
- the mid-plate 310 and upper bottom plate 333 A define the heat exchanging channel 375 through which the gas conduits 347 extend.
- the mid-plate 310 includes a plurality of gas conduits 347 disposed therethrough.
- the plurality of gas conduits 347 are disposed in the mid-plate holes 340 and extend down through heat exchanging channel 375 and into the bottom plate holes 350 located in upper bottom plate 333 A.
- the gas conduits 347 which are aluminum tubes, are sealably coupled to the mid-plate 310 and wall 380 in the upper bottom plate 333 A by use of a brazing or a welding technique to prevent the heat exchanging fluid from entering the first plenum 344 or the second plenum 345 .
- the gas conduits 347 are sealably coupled to the mid-plate 310 , wall 380 and wall 385 to assure that the fluids flowing through the first plenum 344 , second plenum 345 and heat exchanging channel 375 are all isolated from each other.
- the first plenum 344 is fluidly coupled to the processing region 308 through the conduits 381 formed in the wall 385 of the lower bottom plate 333 B.
- the upper bottom plate 333 A and a lower plate 333 B are sealably coupled together to form the first plenum 344 , and to prevent the material delivered from the source 331 A from leaking from regions of the showerhead assembly 304 .
- the upper plate 333 A and lower plate 333 B may be a single, unitary plate.
- the top plate 330 , the mid-plate 310 , upper bottom plate 333 A and lower bottom plate 333 B are formed from a metal, such as 316L stainless steel. It is contemplated that the top plate 330 , the mid-plate 310 , upper bottom plate 333 A and lower bottom plate 333 B may be formed from other materials as well, such as INCONEL®, HASTELLOY®, electroless nickel plated aluminum, pure nickel, and other metals and alloys resistant to chemical attack, or even quartz. Additionally, it is contemplated that gas conduits 347 may be formed from a material other than aluminum, such as stainless steel.
- the top plate 330 contains a blocker plate 361 that is adapted to evenly distribute the flow of the process gas 355 before the process gas 355 enters the second plenum 345 .
- the process gas 355 is delivered to second plenum 345 from the source 332 A via gas line 332 and holes 362 formed in the blocker plate 361 .
- the process gas 355 then flows into a plurality of mid-plate holes 340 disposed in mid-plate 310 and into gas conduits 347 , which are in fluid communication with the processing region 308 .
- Each of the gas conduits 381 are concentric with the outlet of the gas conduits 347 .
- the gas conduits 347 and gas conduits 381 are both cylindrical in shape.
- a first end of each gas conduit 347 is disposed in a mid-plate hole 340 and the first end of gas conduit 347 is suitably coupled (e.g., brazed, welded and/or press fit) to mid-plate 310 so that a fluid seal is formed between the gas conduit 347 and mid-plate 310 .
- each gas conduit 347 is disposed within plate hole 350 of the upper bottom plate 333 A such that the gas conduit 347 is sealably connected (e.g., brazed, welded and/or press fit) to the wall 380 of the upper bottom plate 333 A.
- the first plenum 344 contains first process gas 354 which flows out of a plurality of conduits 381 and into the processing region 108 .
- FIGS. 4A, 4B and 4C are schematic bottom views of the showerhead assemblies shown in FIG. 2 and FIG. 3 according to embodiments of the present invention.
- FIG. 4A is a partial schematic bottom view of the showerhead assembly shown in FIG. 3 .
- an array of concentric gas conduits i.e., gas conduit 347 and gas conduits 381 ) are formed in the showerhead face 383 to evenly distribute and mix the process gas prior to delivery to the surface of a substrate.
- FIG. 4B is a partial schematic bottom view of the showerhead assembly shown in FIG. 2 according to one embodiment of the invention.
- an array of gas conduits 247 and gas conduits 281 are formed in the showerhead face 283 to evenly distribute and mix the process prior to delivery to the surface of a substrate.
- the gas conduits 247 and gas conduits 281 are adjacently configured in a hexagonal close pack orientation.
- FIG. 4C is a partial schematic bottom view of the showerhead assembly shown in FIG. 2 according to another embodiment of the invention.
- a radial array of gas conduits 247 and gas conduits 281 are formed in the showerhead face 283 to evenly distribute and mix the process gas prior to delivery to the surface of a substrate.
- the radial array comprises an interleaved circular array of gas conduits 247 and gas conduits 281 that are concentric about the center of the showerhead assembly.
- FIGS. 4A, 4B and 4C are not meant to be limiting in scope, but rather, illustrate some of the possible combinations of gas conduits 247 , 281 , 347 and 381 .
- the showerhead assembly described herein may be advantageously used in substrate processing, especially metal organic chemical vapor depositions or hydride vapor phase epitaxy processes.
- a metal organic vapor deposition process will be described.
- a process gas 354 at a first temperature is introduced to a first plenum 344 of the showerhead apparatus 304 .
- the process gas 354 is then flown into a processing region 308 .
- a process gas 355 at a second temperature is introduced to a second plenum 345 of the showerhead apparatus 304 .
- the process gas 355 is then flown into the processing region 308 through gas conduits 347 .
- a heat exchanging fluid is introduced to a heat exchanging channel 375 disposed between the first plenum 344 and the second plenum 345 .
- the process gas 354 and the process gas 355 are reacted in the processing region 108 to form a film on a substrate. It is to be understood that process gas 354 and process gas 355 may be flown sequentially or simultaneously. Additionally, it is to be understood that the heat exchanging fluid may be introduced to the heat exchanging channel prior to, during, or after flowing the process gases 354 , 355 to the processing region.
- the process gas 354 which is delivered to first plenum 344 may comprise a Group V precursor
- process gas 355 which is delivered to second plenum 345 may comprise a Group III precursor.
- the precursor delivery may be switched so that the Group V precursor is routed to second plenum 345 and the Group III precursor is routed to first plenum 344 .
- the choice of first or second plenum 344 , 345 for a given precursor may be determined in part by the distance of the plenum from the heat exchanging channel 375 and the desired temperature ranges which may be maintained for each plenum and the precursor therein.
- Gas source 332 A is configured to deliver a process gas 355 to the first plenum 345 .
- Process gas 355 is a metal organic precursor, such as gallium chloride.
- Other metal organic precursors including Group III precursors such as trimethylgallium (TMG), trimethyl aluminum (TMAI) and trimethyl indium (TMI), are contemplated.
- Group III precursors having the general formula MX 3 may also be used, where M is a Group III element (e.g., gallium, aluminum, or indium) and X is a Group VII element (e.g., bromine, chlorine or iodine).
- Source 331 A is configured to deliver a process gas 354 , such as ammonia, to the second plenum 344 . It is contemplated that other process gasses, such as nitrogen (N 2 ) or hydrogen (H 2 ) may be used.
- Process gas 354 and process gas 355 are reacted to deposit a material, such as gallium nitride, on a substrate. It is contemplated that other materials may also be deposited on a substrate, such as aluminum nitride, indium nitride, aluminum gallium nitride and indium gallium nitride. Additionally, dopants, such as silicon (Si) or magnesium (Mg), may be added to the films. The films may be doped by adding small amounts of dopant gases during the deposition process.
- silane (SiH 4 ) or disilane (Si 2 H 6 ) gases may be used, for example, and a dopant gas may include Bis(cyclopentadienyl) magnesium (Cp 2 Mg or (C 5 H 5 ) 2 Mg) for magnesium doping.
- a dopant gas may include Bis(cyclopentadienyl) magnesium (Cp 2 Mg or (C 5 H 5 ) 2 Mg) for magnesium doping.
- the deposition of material on a substrate generally occurs at temperatures greater than about 20 degrees Celsius. Thus, it may be desirable to heat the process gases prior to deposition so that lamps or resistive heaters are not the sole means of providing heat. This allows for more control over deposition temperatures, resulting in a more uniform deposition.
- some process gases cannot always be heated to a desired temperature prior to material deposition because the precursor contained within the process gas could decompose. If the precursor undesirably decomposes, deposition of material could occur in locations other than a substrate surface, for example, on interior surfaces of the showerhead assembly 304 . Deposition within the showerhead assembly 304 can affect gas flow, or could flake off, which could therefore affect deposition uniformity of a material on a substrate. Thus, deposition of a material on interior surfaces of the showerhead assembly 304 is undesirable.
- heat exchanging channel 375 between the first plenum 344 and the second plenum 345 is the ability to deliver multiple precursors to the processing region 308 at different temperatures. Since the heat exchanging channel 375 is positioned between the first plenum 344 and the second plenum 345 , only one precursor travels across the heat exchanging channel 375 . Thus, precursor temperatures can be desirably affected by heat exchanging fluid provided to the heat exchanging channel 375 through inlet conduit 371 .
- source 331 A may contain a Group V precursor and may be heated in supply line 331 while being delivered to the showerhead assembly 304 . The process gas then enters the first plenum 344 and the processing region 308 without crossing the heat exchanging channel 375 .
- the temperature of the Group V precursor remains substantially at the elevated temperature caused by the heated supply lines.
- the temperature of the process gas in the first plenum 344 could be increased by heat radiated from the processing region 308 , thus pre-heating the process gas before delivery to the process region. Heating of the process gas allows a reaction to occur at an elevated temperature without requiring lamps disposed below the chamber to be the sole method of heating the interior of the chamber.
- a Group III precursor such as trimethylgallium is delivered to the second plenum 345 at a first temperature. Since trimethylgallium can decompose at elevated temperatures, thus depositing gallium on interior surfaces of the showerhead assembly 304 , it is preferable that the first temperature is sufficiently low to prevent gallium deposition.
- the trimethylgallium is then introduced to the processing region 308 through gas conduits 347 . Since gas conduits 347 are positioned in contact with a heat exchanging fluid present in the heat exchanging channel 375 , the temperature of the trimethylgallium present in the gas conduits 347 is prevented from increasing to a temperature where decomposition and deposition could occur.
- a Group V precursor such as ammonia
- a Group V precursor is delivered to the processing region 308 through the first plenum 344 at a second temperature which is greater than the first temperature. Since the Group V precursor does not pass through the heat exchanging channel 375 , the Group V precursor enters the processing region 308 without a substantial loss of heat. Thus, the Group V precursor enters the processing region 308 at the second temperature, while the Group II precursor enters the processing region at the first temperature (as maintained by the heat exchanging fluid).
- a heat exchanging channel 375 between a first plenum 344 and a second plenum 345 , temperature-sensitive precursors can be delivered to the process region 308 without decomposing in undesired locations. Furthermore, precursors which are not temperature sensitive can be delivered at increased temperatures to allow more control over deposition processes by providing an additional means of controlling process gas temperatures.
- process gas temperatures can be affected by heated gas lines, heat exchanging fluid, and lamps disposed beneath the chamber, the temperature of the process gases and of the substrate during processing can be more accurately controlled and fine-tuned.
- the combination of multiple heating sources allows for greater process control and thus deposition uniformity.
- heat exchanging channel 375 within the showerhead assembly 304 , the temperature of the showerhead assembly 304 can be maintained by removing any excess heat transferred to the showerhead assembly 304 from the heated Group V precursor. Thus, heat-induced damage, such as warping or wear of the showerhead, can be prevented. Additionally, since a heated process gas does not travel through the heat exchanging channel 375 , thermal efficiency is increased.
- the showerhead assembly embodiments described herein for metal organic chemical vapor deposition applications may be adapted for use in a hydride vapor phase epitaxy or metal-organic chemical vapor deposition, among other processes.
- the hydride vapor phase epitaxy process offers several advantages in the growth of some Group III-V films, gallium nitride in particular, such as high growth rate, relative simplicity, and cost effectiveness.
- the growth of gallium nitride proceeds due to the high temperature, vapor phase reaction between gallium chloride and ammonia.
- the ammonia may be supplied from a standard gas source, while the gallium chloride is produced by passing a hydride-containing gas, such as HCl, over a heated liquid gallium supply.
- the two gases, ammonia and gallium chloride, are directed towards a heated substrate where they react to form an epitaxial gallium nitride film on the surface of the substrate.
- the hydride vapor phase epitaxy process may be used to grow other Group III-nitride films by flowing a hydride-containing gas (such as HCl, HBr, or HI) over a Group III liquid source to form a Group III-halide gas. Then, the Group III-halide gas is mixed with a nitrogen-containing gas, such as ammonia, to form a Group III-nitride film.
- a hydride-containing gas such as HCl, HBr, or HI
- a heated source boat may be coupled to the first plenum 344 or the second plenum 345 .
- the heated source boat may contain a metal (e.g., gallium) source which is heated to the liquid phase, and a hydride-containing gas (e.g., hydrochloric acid) may flow over the metal source to form a Group III-halide gas, such as gallium chloride.
- a metal e.g., gallium
- a hydride-containing gas e.g., hydrochloric acid
- the Group III-halide gas and a nitrogen-containing gas, such as ammonia may then be delivered to first and second plenums 344 , 345 of showerhead assembly 304 via supply lines 331 , 332 for injection into the processing region 308 to deposit a Group III-nitride film, such as gallium nitride, on a substrate.
- a Group III-nitride film such as gallium nitride
- one or more supply lines 331 , 332 may be heated to deliver the precursors from an external heated boat to chamber 302 .
- an inert gas which may be hydrogen, nitrogen, helium, argon or combinations thereof, may be flowed between first and second hydride vapor phase epitaxy process gases to help keep the precursors separated before reaching a substrate.
- the HVPE process gases may also include dopant gases.
- a heat exchanging channel disposed within a showerhead assembly allows for temperature control of the showerhead assembly, and may increase the usable life of the showerhead assembly by reducing heat-induced damage thereto. Additionally, since at least one process gas is not required to travel across or through the heat exchanging channel, one process gas can be delivered to a processing region at a temperature greater than another processing gas. This allows for process gases to be supplied to a process region at a more accurate temperature.
- the process gas does not undesirably have heat removed, the overall thermal budget of the process is decreased because lamps below the chamber are not required to supply energy to the process gas or chamber which was previously removed by a heat exchanging fluid. Thus, since at least one process gas does not travel through the heat exchanging channel, processes within the process chamber are thermally more efficient.
- the invention provides at least two ways of controlling process temperature (accurate heating of process gas prior to delivery to the showerhead apparatus, and heat supplied from lamps disposed below the chamber), processes within the chamber can be more accurately controlled.
- the greater level of control due to the multiple heat sources causes greater process uniformity across individual substrates, and greater uniformity from substrate to substrate during processing.
- substrate uniformity is increased, a greater number of substrates and/or larger substrates can be processed compared to traditional metal organic chemical vapor deposition chambers.
- the increased processing ability increases throughput and reduces processing cost per substrate.
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Abstract
A method and apparatus for chemical vapor deposition and/or hydride vapor phase epitaxial deposition are provided. The apparatus generally include a lower bottom plate and an upper bottom plate defining a first plenum. The upper bottom plate and a mid-plate positioned above the upper bottom plate define a heat exchanging channel. The mid-plate and a top plate positioned above the mid-plate define a second plenum. A plurality of gas conduits extend from the second plenum through the heat exchanging channel and the first plenum. The method generally includes flowing a first gas through a first plenum into a processing region, and flowing a second gas through a second plenum into a processing region. A heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum. The first gas and the second gas are then reacted to form a film on a substrate.
Description
- This application claims benefit of U.S. patent application Ser. No. 13/500,948, filed Oct. 23, 2012, which is a national phase entry of International Patent Application No. PCT/US2010/051961, filed Oct. 8, 2010, which claims benefit of U.S. Provisional Patent Application No. 61/250,472, filed Oct. 9, 2009. Each of the aforementioned applications is herein incorporated by reference.
- 1. Field of the Invention
- Embodiments of the present invention generally relate to methods and apparatus for chemical vapor deposition (CVD) on a substrate, and, in particular, to a showerhead design for use in metal organic chemical vapor deposition and/or hydride vapor phase epitaxy (HVPE).
- 2. Description of the Related Art
- Group III-V films are finding greater importance in the development and fabrication of a variety of semiconductor devices, such as short wavelength light emitting diodes (LEDs), laser diodes (LDs), and electronic devices including high power, high frequency, high temperature transistors and integrated circuits. For example, short wavelength (e.g., blue/green to ultraviolet) LEDs are fabricated using the Group III-nitride semiconducting material gallium nitride. It has been observed that short wavelength LEDs fabricated using gallium nitride can provide significantly greater efficiencies and longer operating lifetimes than short wavelength LEDs fabricated using non-nitride semiconducting materials, such as Group II-VI materials.
- One method that has been used for depositing Group III-nitrides, such as gallium nitride, is metal organic chemical vapor deposition (MOCVD). This chemical vapor deposition method is generally performed in a reactor having a temperature controlled environment to assure the stability of a first process gas which contains at least one element from Group III, such as gallium. A second process gas, such as ammonia, provides the nitrogen needed to form a Group III-nitride. The two process gases are injected into a processing zone within the reactor where they mix and move towards a heated substrate in the processing zone. A carrier gas may be used to assist in the transport of the process gases towards the substrate. The precursors react at the surface of the heated substrate to form a Group III-nitride layer on the substrate surface. The quality of the film depends in part upon deposition uniformity which, in turn, depends upon uniform mixing of the precursors across the substrate.
- Multiple substrates may be arranged on a substrate carrier and each substrate may have a diameter ranging from 50 mm to 100 mm or larger. The uniform mixing of precursors over larger substrates and/or more substrates and larger deposition areas is desirable in order to increase yield and throughput. These factors are important since they directly affect the cost to produce an electronic device and, thus, a device manufacturer's competitiveness in the market place.
- Interaction of the process gases with the hot hardware components, which are often found in the processing zone of an LED or LD forming reactor, will generally cause the precursor to break-down and deposit on these hot surfaces. Typically, the hot reactor surfaces are formed by radiation from the heat sources used to heat the substrates. The deposition of the precursor materials on the hot surfaces can be especially problematic when it occurs in or on the precursor distribution components, such as the showerhead. Deposition on the precursor distribution components will affect the flow distribution uniformity over time. Therefore, there is a need for a gas distribution apparatus that prevents or reduces the likelihood that the MOCVD or HVPE precursors will be heated to a temperature that will cause them to break down and affect the performance of the gas distribution device.
- Also, as the demand for LEDs, LDs, transistors, and integrated circuits increases, the efficiency of depositing high quality Group-III nitride films takes on greater importance. Therefore, there is a need for an improved deposition apparatus and process that can provide consistent film quality over larger substrates and larger deposition areas.
- A method and apparatus that may be utilized for chemical vapor deposition and/or hydride vapor phase epitaxial deposition are provided. The apparatus generally include a lower bottom plate and an upper bottom plate defining a first plenum. The upper bottom plate and a mid-plate positioned above the upper bottom plate define a heat exchanging channel. The mid-plate and a top plate positioned above the mid-plate define a second plenum. A plurality of gas conduits extend from the second plenum through the heat exchanging channel and the first plenum. The method generally includes flowing a first gas through a first plenum into a processing region, and flowing a second gas through a second plenum into a processing region. A heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum. The temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region. The first gas and the second gas are then reacted to form a film on a substrate.
- One embodiment provides an apparatus comprising a lower bottom plate and an upper bottom plate positioned above the lower bottom plate. The upper bottom plate and the lower bottom plate define a first plenum. A mid-plate is positioned above the upper bottom plate. The mid-plate and the upper bottom plate define a heat exchanging channel for containing a heat exchanging fluid. A top plate is positioned above the mid-plate. The top plate and the mid-plate define a second plenum. A plurality of first gas conduits extend from the second plenum through the heat exchanging channel and the first plenum. Each of the plurality of first gas conduits are in fluid communication with the second plenum and a processing region of a processing chamber.
- In another embodiment, an apparatus comprises a lower bottom plate and an upper bottom plate positioned above the lower bottom plate. The upper bottom plate and the lower bottom plate define a first plenum. A plurality of first gas conduits are in fluid communication with the first plenum and a processing region of a process chamber. A mid-plate is positioned above the upper bottom plate. The mid-plate and the upper bottom plate define a heat exchanging channel for containing a heat exchanging fluid. A top plate is positioned above the mid-plate. The top plate and the mid-plate define a second plenum. The showerhead apparatus also comprises a plurality of second gas conduits in fluid communication with the second plenum and the processing region. The plurality of second gas conduits extend through the first plenum and the heat exchanging channel. Each of the first gas conduits has a second gas conduit that is disposed within the boundary of the first gas conduit.
- In another embodiment, a method comprises flowing a first gas through a first plenum of a showerhead apparatus and into a processing region of a chamber. A second gas is flown through a second plenum of the showerhead apparatus and into the processing region of the chamber. The second plenum is fluidly coupled to the processing region through a plurality of gas conduits. A heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum. The plurality of gas conduits extend through the heat exchanging channel. The first gas and the second gas are reacted in the processing region to form a film on the substrate, and the temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region.
- So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
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FIG. 1 is a schematic view of a deposition apparatus according to one embodiment of the invention. -
FIG. 2 is a cross sectional view of an embodiment of a showerhead assembly. -
FIG. 3 is a partial cross sectional view of another embodiment of a showerhead assembly. -
FIG. 4A is a partial schematic bottom view of the showerhead assembly shown inFIG. 3 according to an embodiment of the invention. -
FIG. 4B is a partial schematic bottom view of the showerhead assembly shown inFIG. 2 according to an embodiment of the invention. -
FIG. 4C is a partial schematic bottom view of the showerhead assembly shown inFIG. 2 according to an embodiment of the invention. - To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
- A method and apparatus that may be utilized for chemical vapor deposition and/or hydride vapor phase epitaxial deposition are provided. The apparatus generally include a lower bottom plate and an upper bottom plate defining a first plenum. The upper bottom plate and a mid-plate positioned above the upper bottom plate define a heat exchanging channel. The mid-plate and a top plate positioned above the mid-plate define a second plenum. A plurality of gas conduits extend from the second plenum through the heat exchanging channel and the first plenum. The method generally includes flowing a first gas through the first plenum into a processing region and flowing a second gas through the second plenum into a processing region. A heat exchanging fluid is introduced to a heat exchanging channel disposed between the first plenum and the second plenum. The temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region. The first gas and the second gas are then reacted to form a film on a substrate.
- Systems and chambers that may be adapted to practice the present invention are described in U.S. patent application Ser. No. 11/404,516, filed on Apr. 14, 2006, and Ser. No. 11/429,022, filed May 5, 2005, both of which are incorporated by reference in their entireties. It is contemplated that other systems and chambers may also benefit from embodiments described herein.
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FIG. 1 is a schematic view of a deposition apparatus according to one embodiment of the invention. Theapparatus 100 includes achamber 102, agas delivery system 125, aremote plasma source 126, and avacuum system 112. Thechamber 102 includes achamber body 103 that encloses aprocessing region 108 and alower volume 110. Ashowerhead assembly 104 is disposed at one end of thechamber body 103, while alower dome 119 is disposed at another end of thechamber body 103. Aprocessing region 108 and alower volume 110 are located between theshowerhead assembly 104 and alower dome 119 within thechamber body 103. Asubstrate carrier 114 is disposed between theprocessing region 108 and thelower volume 119. Thus, thelower volume 110 is defined by thelower dome 119 and thesubstrate carrier 114, while theprocessing region 108 is defined by theshowerhead assembly 104 and thesubstrate carrier 114. Thesubstrate carrier 114 is shown in the process position, but may be moved to a lower position where thesubstrates 140 may be loaded or unloaded. Anexhaust ring 120 is disposed around the periphery of thesubstrate carrier 114 to help prevent deposition from occurring in thelower volume 110 and to also help direct exhaust gases from thechamber 102 to exhaustports 109. - Radiant heating may be provided by a plurality of
inner lamps 121A andouter lamps 121B disposed below thelower dome 119 to effect heating ofsubstrates 140,substrate carrier 114, or process gases located withinprocessing region 108. Thelower dome 119 is made of transparent material, such as high-purity quartz, to allow light to pass therethrough from the plurality ofinner lamps 121A andouter lamps 121B.Reflectors 166 may be used to direct the radiant energy provided by inner andouter lamps chamber 102. Additional rings of lamps may also be used for finer temperature control of thesubstrates 140. - The plurality of inner and
outer lamps showerhead assembly 104 to measuresubstrate 140 andsubstrate carrier 114 temperatures. The temperature data may be sent to acontroller 199 which can adjust power to separate lamp zones to maintain a predetermined temperature profile across thesubstrate carrier 114. Additionally, the power to separate lamp zones can be adjusted to compensate for precursor flow or precursor concentration non-uniformity. For example, if the precursor concentration is lower in asubstrate carrier 114 region near an outer lamp zone, the power to the outer lamp zone may be adjusted to help compensate for the precursor depletion in this region. - The inner and
outer lamps substrates 140 to a temperature of about 400 degrees Celsius to about 1200 degrees Celsius during processing. It is to be understood that the heating source is not restricted to the use of arrays of inner andouter lamps chamber 102 andsubstrates 140 therein. For example, the heating source may comprise resistive heating elements which are in thermal contact with thesubstrate carrier 114. - The
substrate carrier 114 includes one ormore recesses 116 within which one ormore substrates 140 are disposed during processing. Thesubstrate carrier 114 is formed from silicon carbide (SiC) and generally ranges in size from about 200 millimeters to about 750 millimeters. Alternatively, thesubstrate carrier 114 may be formed from SiC-coated graphite. Thesubstrate carrier 114 can rotate about an axis during processing. For example, thesubstrate carrier 114 may be rotated at about 2 RPM to about 100 RPM, such as at about 30 RPM. Rotating thesubstrate carrier 114 aids in providing uniform heating of thesubstrates 140 and uniform exposure of the processing gases to eachsubstrate 140. During processing, the distance between the lower surface ofshowerhead assembly 104 and thesubstrate carrier 114 ranges from about 4 mm to about 41 mm. The lower surface ofshowerhead assembly 104 is coplanar and faces thesubstrates 140 during processing. - The
substrate carrier 114 is shown having twosubstrates 140 positioned withinrecesses 116. However,substrate carrier 114 may support six, eight, or more substrates during processing depending on the desired throughput.Typical substrates 140 may include sapphire, silicon carbide, or silicon. It is contemplated that other types ofsubstrates 140, such asglass substrates 140, may also be processed.Substrate 140 size may range from 50 mm-150 mm in diameter or larger. It is to be understood thatsubstrates 140 of other sizes may be processed within thechamber 102 and according to the processes described herein. - A
gas delivery system 125 is coupled to theshowerhead apparatus 104 to provide one or more gases to theprocessing region 108 during processing. Thegas delivery system 125 includesmultiple gas sources lines supply line 133. It is to be understood that thegas delivery system 125 is not limited to two gas sources. Eachsupply line showerhead assembly 104. Depending on the process being run, some of the sources may be liquid sources rather than gases, in which case the gas delivery system may include a liquid injection system or other means (e.g., a bubbler) to vaporize the liquid. The vapor may then be mixed with a carrier gas such as hydrogen (H2), nitrogen (N2), helium (He) or argon (Ar) prior to delivery to thechamber 102. Different gases, such as precursor gases, carrier gases, purge gases, cleaning/etching gases or others may be supplied from thegas delivery system 125 toseparate supply lines showerhead assembly 104. Furthermore, thesupply lines - A
conduit 129 receives cleaning and/or etching gases from aremote plasma source 126. Theremote plasma source 126 receives gases from thegas delivery system 125 viasupply line 124. Avalve 130 is disposed between theshowerhead assembly 104 andremote plasma source 126 to control the flow of gas between theremote plasma source 126 and theshowerhead assembly 104. Thevalve 130 may be opened to allow a cleaning and/or etching gas, including ionized gases, to flow into theshowerhead assembly 104 viasupply line 133. Additionally, thegas delivery system 125 andremote plasma source 126 may be suitably adapted so that process gases fromsources remote plasma source 126 to produce plasma species which may be sent throughshowerhead assembly 104 to deposit CVD layers, such as III-V films, onsubstrates 140. - The
remote plasma source 126 is a radio frequency plasma source adapted for chamber cleaning and/or substrate etching. Cleaning and/or etching gas may be supplied to theremote plasma source 126 viasupply line 124 to produce plasma species which may be sent viaconduit 129 andsupply line 133 for dispersion throughshowerhead assembly 104 intochamber 102. Alternatively, cleaning/etching gases may be delivered fromgas delivery system 125 for non-plasma cleaning and/or etching using alternate supply line configurations toshowerhead assembly 104. Gases for a cleaning application may comprise a halogen containing gas, such as fluorine or chlorine, or vapor comprising hydrochloric acid (HCl). It is contemplated that plasma sources other than radio frequency plasma sources, for example microwave plasma sources, may also be used. - A purge gas (e.g., nitrogen) may be delivered into the
chamber 102 from theshowerhead assembly 104 and/or from inlet ports (not shown) disposed below thesubstrate carrier 114 near the bottom of thechamber body 103. The purge gas may be used to remove gases from theprocessing region 108 after processing. In additional to purging thechamber 102, gas provided from inlet ports disposed below thesubstrate carrier 114 may also increase the pressure within thelower volume 110 to contain process gases in theprocessing region 108, thereby reducing the deposition of material in undesired locations. The purge gas enters thelower volume 110 of thechamber 102 and flows upwards past thesubstrate carrier 114 andexhaust ring 120 and intomultiple exhaust ports 109 which are disposed around anannular exhaust channel 105. Anexhaust conduit 106 connects theannular exhaust channel 105 to avacuum system 112 which includes a vacuum pump (not shown). The chamber pressure may be controlled using avalve system 107 which controls the rate at which the exhaust gases are drawn from theannular exhaust channel 105. During processing, the draw of theannular exhaust channel 105 may affect gas flow so that the process gas introduced to theprocessing region 108 flows substantially tangential to thesubstrates 140 and may be uniformly distributed radially across thesubstrate 140 deposition surfaces in a laminar flow. Theprocessing region 108 may be maintained at a pressure of about 760 Torr down to about 80 Torr during processing. - The
showerhead assembly 104 has aheat exchanging system 170 coupled thereto to assist in controlling the temperature of various components of theshowerhead assembly 170. Theheat exchanging system 170 comprises aheat exchanger 170A that is coupled to theshowerhead assembly 104 via aninlet conduit 171 and anoutlet conduit 172. Acontroller 199 is coupled to theheat exchanger 170A to control the temperature of theshowerhead assembly 104. -
FIG. 2 is a cross sectional view of an embodiment of a showerhead assembly. Theshowerhead assembly 104 comprises atop plate 230, mid-plate 210, anupper bottom plate 233A and a lower bottom plate 233B. Theupper bottom plate 233A and the lower bottom plate 233B define thefirst plenum 244. The mid-plate 210 andupper bottom plate 233A define theheat exchanging channel 275. Thetop plate 230 and the mid-plate 210 define thesecond plenum 245. - The
heat exchanging channel 275 is coupled to aheat exchanging system 170 to control the temperature of the various surfaces of theshowerhead assembly 104. Theheat exchanging system 170 comprises aheat exchanger 170A that is coupled to the one or moreheat exchanging channels 275 formed in theshowerhead assembly 104 via aninlet conduit 171 and anoutlet conduit 172. Theheat exchanging channel 275 through which a heat exchanging fluid flows is used to help regulate the temperature of theshowerhead assembly 104. - The
heat exchanging channel 275 is disposed between thefirst plenum 244 and thesecond plenum 245. Theheat exchanging channel 275 encircles thegas conduits 247, which are disposed throughmid-plate holes 240, bottom plate holes 250 andholes 251 inwall 285. Thus, the heat exchanging fluid can flow around and cool the gas or vapor flowing through acentral region 247A of thegas conduits 247 while the vapor flows intoprocessing region 108. Thecentral region 247A of thegas conduits 247 are in fluid communication with thesecond plenum 245 and theprocessing region 108, thus permitting process gases to travel from thesecond plenum 245 to theprocessing region 108. In this configuration, theheat exchanging channel 275 is disposed between thefirst plenum 244 andsecond plenum 245 to control the temperature of the gases or vapor delivered therethrough. - A
central conduit 248 is disposed through theshowerhead assembly 104 to provide a cleaning and/or etching gas or plasma into thechamber body 103. Thecentral conduit 248 may receive cleaning and/or etching gas or plasma fromsupply line 133 and disperse the cleaning and/or etching gas insidechamber body 103 to provide more effective cleaning. Alternatively, cleaning and/or etching gas or plasma may be delivered intochamber body 103 through other routes, such as through thegas conduits 247 and/orconduits 281 in theshowerhead assembly 104. For plasma based etching or cleaning, fluorine or chlorine may be used. For non-plasma based etching, halogen gases, such as Cl2, Br, and I2, or halides, such as HCl, HBr, and HI may be used. The cleaning and/or etching gas is removed from theprocessing region 108 through theexhaust port 109, theexhaust channel 105, and theexhaust conduit 106. - The
process gas 255 flows from thegas supply 132A throughsupply line 132 into thesecond plenum 245 and intogas conduits 247, which are in fluid communication with theprocessing region 108. Theprocess gas 254 flows fromgas supply 131A through thesupply line 131 into thegas conduits 281 towards theprocessing region 108. Thefirst plenum 244 is not in fluid communication with thesecond plenum 245 so that thefirst process gas 254 and thesecond process gas 255 remain isolated until injected into theprocessing region 108 located within thechamber body 103. Theprocess gas 254 and/orprocess gas 255 may comprise one or more precursor gases or other process gases, including carrier gases and dopant gases, to carry out desired processes within theprocessing region 108. For example,process gas 254 andprocess gas 255 may contain one or more precursors for deposition of a material onsubstrates 140 positioned onsubstrate carrier 114. - The positioning of a
heat exchanging channel 275 provides control of the temperature of various showerhead assembly features, such as thegas conduits 247, thewall 280, and theshowerhead face 283. Control of the temperature of the showerhead assembly features is desirable to reduce or eliminate the formation of condensates on theshowerhead assembly 104. Control of the temperature of the various showerhead assembly features is also desirable to reduce gas phase particle formation and to prevent the production of undesirable precursor reactant products which may adversely affect the composition of the film deposited on thesubstrates 140. The showerhead temperature may be measured by one or more thermocouples or other temperature sensors disposed in proximity toshowerhead face 283,heat exchanging channel 275, and/orwall 280. Additionally or alternatively, one or more thermocouples or other temperature sensors may be disposed in proximity to theinlet conduit 171 and/or theoutlet conduit 172. The temperature data measured by the one or more thermocouples or other temperature sensors is sent to a controller which may adjust the heat exchanging fluid temperature and flow rate to maintain the showerhead temperature within a predetermined range. The showerhead temperature is generally maintained at about 50 degrees Celsius to about 350 degrees Celsius, but may also be maintained at a temperature of greater than 350 degrees Celsius, if desired. - It is believed that a gas conduit and heat exchanging channel configuration that only requires half of the gas conduits (e.g., gas conduits 247) to extend through the
heat exchanging channel 275 will greatly reduce the chances of the heat exchanging fluid leaking into thefirst plenum 244 orsecond plenum 245 at the junctions formed between the gas conduits (e.g., gas conduits 247) and the walls (e.g.,walls 279 and 280). Only half of the gas conduits are required to extend through theheat exchanging channel 275, since only one gas plenum (e.g., second plenum 245) is disposed on one side of theheat exchanging channel 275 opposite theprocessing region 108, while the gas exiting thefirst plenum 244 enters directly into theprocessing region 108. Also, by positioning theheat exchanging channel 275 so that it is not directly adjacent to theprocessing region 108, the chances that a heat exchanging fluid leak will reach theprocessing region 108 is greatly reduced. Thus, the chance of damage occurring to the chamber andsubstrates 140 is also reduced. It is also believed that the leakage of the heat exchanging fluid into theprocessing region 108 can be dangerous at the typical processing temperature used to form LED and LD products, such as greater than 750 degrees Celsius, due to the phase change created as the liquid heat exchanging fluid turns into a gas. - The flow rate of the heat exchanging fluid may be adjusted to help control the temperature of the
showerhead assembly 104. Additionally, the thickness of thewalls heat exchanging channel 275 may be designed to facilitate temperature regulation of various showerhead surfaces. Suitable heat exchanging fluids include water, water-based ethylene glycol mixtures, a perfluoropolyether (e.g., GALDEN® fluid), oil-based thermal transfer fluids, or liquid metals such as gallium or gallium alloy. The heat exchanging fluid is circulated through aheat exchanger 170A to raise or lower the temperature of the heat exchanging fluid as required to maintain the temperature of theshowerhead assembly 104 within a desired temperature range. The heat exchanging fluid can be maintained at a temperature of 20 degrees Celsius or greater, depending on process requirements. For example, the heat exchanging fluid can be maintained at a temperature within a range from about 20 degrees Celsius to about 120 degrees, or within a range of about 100 degrees Celsius to about 350 degrees Celsius. The heat exchanging fluid may also be heated above its boiling point so that theshowerhead assembly 104 may be maintained at higher temperatures using readily available heat exchanging fluids. -
FIG. 3 is a partial cross sectional view of another embodiment of a showerhead assembly. Theshowerhead assembly 304 comprises atop plate 330, mid-plate 310, an upper bottom plate 333A and alower bottom plate 333B which are coupled together. The mid-plate 310 and upper bottom plate 333A define theheat exchanging channel 375 through which thegas conduits 347 extend. - The mid-plate 310 includes a plurality of
gas conduits 347 disposed therethrough. The plurality ofgas conduits 347 are disposed in themid-plate holes 340 and extend down throughheat exchanging channel 375 and into the bottom plate holes 350 located in upper bottom plate 333A. Thegas conduits 347, which are aluminum tubes, are sealably coupled to the mid-plate 310 andwall 380 in the upper bottom plate 333A by use of a brazing or a welding technique to prevent the heat exchanging fluid from entering thefirst plenum 344 or thesecond plenum 345. Thegas conduits 347 are sealably coupled to the mid-plate 310,wall 380 andwall 385 to assure that the fluids flowing through thefirst plenum 344,second plenum 345 andheat exchanging channel 375 are all isolated from each other. Thefirst plenum 344 is fluidly coupled to theprocessing region 308 through theconduits 381 formed in thewall 385 of thelower bottom plate 333B. The upper bottom plate 333A and alower plate 333B are sealably coupled together to form thefirst plenum 344, and to prevent the material delivered from thesource 331A from leaking from regions of theshowerhead assembly 304. Alternatively, the upper plate 333A andlower plate 333B may be a single, unitary plate. - The
top plate 330, the mid-plate 310, upper bottom plate 333A andlower bottom plate 333B are formed from a metal, such as 316L stainless steel. It is contemplated that thetop plate 330, the mid-plate 310, upper bottom plate 333A andlower bottom plate 333B may be formed from other materials as well, such as INCONEL®, HASTELLOY®, electroless nickel plated aluminum, pure nickel, and other metals and alloys resistant to chemical attack, or even quartz. Additionally, it is contemplated thatgas conduits 347 may be formed from a material other than aluminum, such as stainless steel. - The
top plate 330 contains ablocker plate 361 that is adapted to evenly distribute the flow of theprocess gas 355 before theprocess gas 355 enters thesecond plenum 345. In this configuration, theprocess gas 355 is delivered tosecond plenum 345 from thesource 332A viagas line 332 and holes 362 formed in theblocker plate 361. Theprocess gas 355 then flows into a plurality ofmid-plate holes 340 disposed inmid-plate 310 and intogas conduits 347, which are in fluid communication with theprocessing region 308. - Each of the
gas conduits 381 are concentric with the outlet of thegas conduits 347. In one example, thegas conduits 347 andgas conduits 381 are both cylindrical in shape. A first end of eachgas conduit 347 is disposed in amid-plate hole 340 and the first end ofgas conduit 347 is suitably coupled (e.g., brazed, welded and/or press fit) to mid-plate 310 so that a fluid seal is formed between thegas conduit 347 andmid-plate 310. Further, a second portion of eachgas conduit 347 is disposed withinplate hole 350 of the upper bottom plate 333A such that thegas conduit 347 is sealably connected (e.g., brazed, welded and/or press fit) to thewall 380 of the upper bottom plate 333A. Thefirst plenum 344 containsfirst process gas 354 which flows out of a plurality ofconduits 381 and into theprocessing region 108. -
FIGS. 4A, 4B and 4C are schematic bottom views of the showerhead assemblies shown inFIG. 2 andFIG. 3 according to embodiments of the present invention.FIG. 4A is a partial schematic bottom view of the showerhead assembly shown inFIG. 3 . In this configuration ofshowerhead assembly 304, an array of concentric gas conduits (i.e.,gas conduit 347 and gas conduits 381) are formed in theshowerhead face 383 to evenly distribute and mix the process gas prior to delivery to the surface of a substrate. -
FIG. 4B is a partial schematic bottom view of the showerhead assembly shown inFIG. 2 according to one embodiment of the invention. In this configuration ofshowerhead assembly 104, an array ofgas conduits 247 andgas conduits 281 are formed in theshowerhead face 283 to evenly distribute and mix the process prior to delivery to the surface of a substrate. In this configuration, thegas conduits 247 andgas conduits 281 are adjacently configured in a hexagonal close pack orientation. -
FIG. 4C is a partial schematic bottom view of the showerhead assembly shown inFIG. 2 according to another embodiment of the invention. In this configuration a radial array ofgas conduits 247 andgas conduits 281 are formed in theshowerhead face 283 to evenly distribute and mix the process gas prior to delivery to the surface of a substrate. In this configuration, the radial array comprises an interleaved circular array ofgas conduits 247 andgas conduits 281 that are concentric about the center of the showerhead assembly. The embodiments shown inFIGS. 4A, 4B and 4C are not meant to be limiting in scope, but rather, illustrate some of the possible combinations ofgas conduits - The showerhead assembly described herein may be advantageously used in substrate processing, especially metal organic chemical vapor depositions or hydride vapor phase epitaxy processes. With reference to
FIG. 3 , a metal organic vapor deposition process will be described. In the metal organic chemical vapor deposition process, aprocess gas 354 at a first temperature is introduced to afirst plenum 344 of theshowerhead apparatus 304. Theprocess gas 354 is then flown into aprocessing region 308. Aprocess gas 355 at a second temperature is introduced to asecond plenum 345 of theshowerhead apparatus 304. Theprocess gas 355 is then flown into theprocessing region 308 throughgas conduits 347. A heat exchanging fluid is introduced to aheat exchanging channel 375 disposed between thefirst plenum 344 and thesecond plenum 345. Theprocess gas 354 and theprocess gas 355 are reacted in theprocessing region 108 to form a film on a substrate. It is to be understood thatprocess gas 354 andprocess gas 355 may be flown sequentially or simultaneously. Additionally, it is to be understood that the heat exchanging fluid may be introduced to the heat exchanging channel prior to, during, or after flowing theprocess gases - The
process gas 354 which is delivered tofirst plenum 344 may comprise a Group V precursor, andprocess gas 355 which is delivered tosecond plenum 345 may comprise a Group III precursor. Alternatively, the precursor delivery may be switched so that the Group V precursor is routed tosecond plenum 345 and the Group III precursor is routed tofirst plenum 344. The choice of first orsecond plenum heat exchanging channel 375 and the desired temperature ranges which may be maintained for each plenum and the precursor therein. Thus, examples of processes gases provided to thefirst plenum 344 orsecond plenum 345 are not meant to be limiting in scope, rather, the examples are provided merely for explanatory purposes. It is to be understood that embodiments described herein are not to be restricted to certain processes gases provided to either thefirst plenum 344 orsecond plenum 345 without specific recitation. -
Gas source 332A is configured to deliver aprocess gas 355 to thefirst plenum 345.Process gas 355 is a metal organic precursor, such as gallium chloride. Other metal organic precursors, including Group III precursors such as trimethylgallium (TMG), trimethyl aluminum (TMAI) and trimethyl indium (TMI), are contemplated. Group III precursors having the general formula MX3 may also be used, where M is a Group III element (e.g., gallium, aluminum, or indium) and X is a Group VII element (e.g., bromine, chlorine or iodine).Source 331A is configured to deliver aprocess gas 354, such as ammonia, to thesecond plenum 344. It is contemplated that other process gasses, such as nitrogen (N2) or hydrogen (H2) may be used. -
Process gas 354 andprocess gas 355 are reacted to deposit a material, such as gallium nitride, on a substrate. It is contemplated that other materials may also be deposited on a substrate, such as aluminum nitride, indium nitride, aluminum gallium nitride and indium gallium nitride. Additionally, dopants, such as silicon (Si) or magnesium (Mg), may be added to the films. The films may be doped by adding small amounts of dopant gases during the deposition process. For silicon doping, silane (SiH4) or disilane (Si2H6) gases may be used, for example, and a dopant gas may include Bis(cyclopentadienyl) magnesium (Cp2Mg or (C5H5)2Mg) for magnesium doping. - The deposition of material on a substrate generally occurs at temperatures greater than about 20 degrees Celsius. Thus, it may be desirable to heat the process gases prior to deposition so that lamps or resistive heaters are not the sole means of providing heat. This allows for more control over deposition temperatures, resulting in a more uniform deposition. However, some process gases cannot always be heated to a desired temperature prior to material deposition because the precursor contained within the process gas could decompose. If the precursor undesirably decomposes, deposition of material could occur in locations other than a substrate surface, for example, on interior surfaces of the
showerhead assembly 304. Deposition within theshowerhead assembly 304 can affect gas flow, or could flake off, which could therefore affect deposition uniformity of a material on a substrate. Thus, deposition of a material on interior surfaces of theshowerhead assembly 304 is undesirable. - One advantage of positioning
heat exchanging channel 375 between thefirst plenum 344 and thesecond plenum 345 is the ability to deliver multiple precursors to theprocessing region 308 at different temperatures. Since theheat exchanging channel 375 is positioned between thefirst plenum 344 and thesecond plenum 345, only one precursor travels across theheat exchanging channel 375. Thus, precursor temperatures can be desirably affected by heat exchanging fluid provided to theheat exchanging channel 375 throughinlet conduit 371. For example,source 331A may contain a Group V precursor and may be heated insupply line 331 while being delivered to theshowerhead assembly 304. The process gas then enters thefirst plenum 344 and theprocessing region 308 without crossing theheat exchanging channel 375. Thus, the temperature of the Group V precursor remains substantially at the elevated temperature caused by the heated supply lines. Additionally or alternatively, the temperature of the process gas in thefirst plenum 344 could be increased by heat radiated from theprocessing region 308, thus pre-heating the process gas before delivery to the process region. Heating of the process gas allows a reaction to occur at an elevated temperature without requiring lamps disposed below the chamber to be the sole method of heating the interior of the chamber. - In one example, a Group III precursor, such as trimethylgallium is delivered to the
second plenum 345 at a first temperature. Since trimethylgallium can decompose at elevated temperatures, thus depositing gallium on interior surfaces of theshowerhead assembly 304, it is preferable that the first temperature is sufficiently low to prevent gallium deposition. The trimethylgallium is then introduced to theprocessing region 308 throughgas conduits 347. Sincegas conduits 347 are positioned in contact with a heat exchanging fluid present in theheat exchanging channel 375, the temperature of the trimethylgallium present in thegas conduits 347 is prevented from increasing to a temperature where decomposition and deposition could occur. A Group V precursor, such as ammonia, is delivered to theprocessing region 308 through thefirst plenum 344 at a second temperature which is greater than the first temperature. Since the Group V precursor does not pass through theheat exchanging channel 375, the Group V precursor enters theprocessing region 308 without a substantial loss of heat. Thus, the Group V precursor enters theprocessing region 308 at the second temperature, while the Group II precursor enters the processing region at the first temperature (as maintained by the heat exchanging fluid). Thus, by positioning aheat exchanging channel 375 between afirst plenum 344 and asecond plenum 345, temperature-sensitive precursors can be delivered to theprocess region 308 without decomposing in undesired locations. Furthermore, precursors which are not temperature sensitive can be delivered at increased temperatures to allow more control over deposition processes by providing an additional means of controlling process gas temperatures. - Additionally, since process gas temperatures can be affected by heated gas lines, heat exchanging fluid, and lamps disposed beneath the chamber, the temperature of the process gases and of the substrate during processing can be more accurately controlled and fine-tuned. The combination of multiple heating sources allows for greater process control and thus deposition uniformity. Also, by disposing
heat exchanging channel 375 within theshowerhead assembly 304, the temperature of theshowerhead assembly 304 can be maintained by removing any excess heat transferred to theshowerhead assembly 304 from the heated Group V precursor. Thus, heat-induced damage, such as warping or wear of the showerhead, can be prevented. Additionally, since a heated process gas does not travel through theheat exchanging channel 375, thermal efficiency is increased. If a heated gas was to pass through theheat exchanging channel 375, heat would be removed. Thus, lamps would have to reheat the process gas by providing heat to the interior of the chamber which was previously removed by the heat exchanging fluid, thereby reducing thermal budget and increasing process cost. - The showerhead assembly embodiments described herein for metal organic chemical vapor deposition applications may be adapted for use in a hydride vapor phase epitaxy or metal-organic chemical vapor deposition, among other processes. The hydride vapor phase epitaxy process offers several advantages in the growth of some Group III-V films, gallium nitride in particular, such as high growth rate, relative simplicity, and cost effectiveness. In this technique, the growth of gallium nitride proceeds due to the high temperature, vapor phase reaction between gallium chloride and ammonia. The ammonia may be supplied from a standard gas source, while the gallium chloride is produced by passing a hydride-containing gas, such as HCl, over a heated liquid gallium supply. The two gases, ammonia and gallium chloride, are directed towards a heated substrate where they react to form an epitaxial gallium nitride film on the surface of the substrate. In general, the hydride vapor phase epitaxy process may be used to grow other Group III-nitride films by flowing a hydride-containing gas (such as HCl, HBr, or HI) over a Group III liquid source to form a Group III-halide gas. Then, the Group III-halide gas is mixed with a nitrogen-containing gas, such as ammonia, to form a Group III-nitride film.
- Still with reference to
FIG. 3 , whenshowerhead assembly 304 is adapted for hydride vapor phase epitaxy, a heated source boat (not shown) may be coupled to thefirst plenum 344 or thesecond plenum 345. The heated source boat may contain a metal (e.g., gallium) source which is heated to the liquid phase, and a hydride-containing gas (e.g., hydrochloric acid) may flow over the metal source to form a Group III-halide gas, such as gallium chloride. The Group III-halide gas and a nitrogen-containing gas, such as ammonia, may then be delivered to first andsecond plenums showerhead assembly 304 viasupply lines processing region 308 to deposit a Group III-nitride film, such as gallium nitride, on a substrate. Additionally or alternatively, one ormore supply lines - Advantages of the present invention include, but are not limited to, an improved deposition apparatus and processes which provide greater process control and uniformity. A heat exchanging channel disposed within a showerhead assembly allows for temperature control of the showerhead assembly, and may increase the usable life of the showerhead assembly by reducing heat-induced damage thereto. Additionally, since at least one process gas is not required to travel across or through the heat exchanging channel, one process gas can be delivered to a processing region at a temperature greater than another processing gas. This allows for process gases to be supplied to a process region at a more accurate temperature. Additionally, since the process gas does not undesirably have heat removed, the overall thermal budget of the process is decreased because lamps below the chamber are not required to supply energy to the process gas or chamber which was previously removed by a heat exchanging fluid. Thus, since at least one process gas does not travel through the heat exchanging channel, processes within the process chamber are thermally more efficient.
- Furthermore, since the invention provides at least two ways of controlling process temperature (accurate heating of process gas prior to delivery to the showerhead apparatus, and heat supplied from lamps disposed below the chamber), processes within the chamber can be more accurately controlled. The greater level of control due to the multiple heat sources causes greater process uniformity across individual substrates, and greater uniformity from substrate to substrate during processing. Thus, since substrate uniformity is increased, a greater number of substrates and/or larger substrates can be processed compared to traditional metal organic chemical vapor deposition chambers. The increased processing ability increases throughput and reduces processing cost per substrate.
- While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (20)
1. An apparatus, comprising:
a lower bottom plate;
an upper bottom plate positioned above the lower bottom plate, the upper bottom plate and the lower bottom plate defining a first plenum within the apparatus;
a mid-plate positioned above the upper bottom plate, the mid-plate and the upper bottom plate defining a heat exchange channel within the apparatus; and
a top plate positioned above the mid-plate, the top plate and the mid-plate defining a second plenum within the apparatus, wherein one or more first gas conduits extend from the second plenum through the heat exchanging channel and the first plenum, and each of the one or more first gas conduits in fluid communication with the second plenum and a processing region of a processing chamber.
2. The apparatus of claim 1 , wherein the top plate, the mid-plate, the upper bottom plate, the lower bottom plate and the plurality of first gas conduits comprise stainless steel.
3. The apparatus of claim 2 , wherein the mid-plate and the upper bottom plate both have holes disposed therethrough, and wherein the one or more first gas conduits are positioned within the holes of the mid-plate and the upper bottom plate.
4. The apparatus of claim 3 , further comprising one or more second gas conduits, wherein the one or more first gas conduits and the one or more second gas conduits are positioned in a hexagonal close pack orientation on a surface of the lower bottom plate.
5. The apparatus of claim 3 , further comprising one or more second gas conduits, wherein the one or more first gas conduits and the one or more second gas conduits form concentric circular arrays on a surface of the lower bottom plate.
6. The apparatus of claim 1 , wherein the one or more first conduits is a plurality of first conduits.
7. The apparatus of claim 1 , further comprising one or more second gas conduits, wherein the one or more first gas conduits and the one or more second gas conduits form concentric circular arrays on a surface of the lower bottom plate.
8. The apparatus of claim 1 , wherein the mid-plate and the upper bottom plate both have holes disposed therethrough, and wherein the one or more first gas conduits are positioned within the holes of the mid-plate and the upper bottom plate.
9. A chamber, comprising:
a chamber body;
a substrate carrier disposed in the chamber body; and
a showerhead assembly, the showerhead assembly comprising:
a lower bottom plate;
an upper bottom plate positioned above the lower bottom plate, the upper bottom plate and the lower bottom plate defining a first plenum within the showerhead;
a mid-plate positioned above the upper bottom plate, the mid-plate and the upper bottom plate defining a heat exchange channel within the showerhead; and
a top plate positioned above the mid-plate, the top plate and the mid-plate defining a second plenum within the showerhead, wherein one or more first gas conduits extend from the second plenum through the heat exchanging channel and the first plenum, and each of the one or more first gas conduits in fluid communication with the second plenum and a processing region of the chamber.
10. The chamber of claim 9 , further comprising a heat exchanger fluidly coupled to the heat exchange channel.
11. The chamber of claim 9 , further comprising a remote plasma source coupled the one or more first gas conduits.
12. The apparatus of claim 9 , wherein the top plate, the mid-plate, the upper bottom plate, the lower bottom plate and the plurality of first gas conduits comprise stainless steel.
13. The apparatus of claim 12 , wherein the mid-plate and the upper bottom plate both have holes disposed therethrough, and wherein the one or more first gas conduits are positioned within the holes of the mid-plate and the upper bottom plate.
14. The apparatus of claim 13 , further comprising one or more second gas conduits, wherein the one or more first gas conduits and the one or more second gas conduits are positioned in a hexagonal close pack orientation on a surface of the lower bottom plate.
15. The apparatus of claim 13 , further comprising one or more second gas conduits, wherein the one or more first gas conduits and the one or more second gas conduits form concentric circular arrays on a surface of the lower bottom plate.
16. The apparatus of claim 9 , wherein the one or more first conduits is a plurality of first conduits.
17. The apparatus of claim 9 , further comprising one or more second gas conduits, wherein the one or more first gas conduits and the one or more second gas conduits form concentric circular arrays on a surface of the lower bottom plate.
18. A method, comprising:
flowing a first gas through a first plenum of a showerhead apparatus and into a processing region of a chamber;
flowing a second gas through a second plenum of the showerhead apparatus and into the processing region of the chamber, the second plenum fluidly coupled to the processing region through one or more gas conduits;
introducing a heat exchanging fluid to a heat exchanging channel disposed between the first plenum and the second plenum, wherein the plurality of gas conduits extend through the heat exchanging channel; and
reacting the first gas and the second gas in the processing region to form a film on the substrate, wherein the temperature of the first gas is greater than the temperature of the second gas when the first gas and the second gas enter the processing region.
19. The method of claim 18 , wherein the first gas comprises a Group III element and the second gas comprises a Group V element.
20. The method of claim 19 , wherein the first gas comprises gallium and the second gas comprises ammonia.
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US20130052804A1 (en) | 2013-02-28 |
WO2011044451A2 (en) | 2011-04-14 |
WO2011044451A3 (en) | 2011-09-29 |
US9449859B2 (en) | 2016-09-20 |
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